<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.217964"
                        y3="0.338237"
                        z3="1.834358"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.359176"
                        y3="-0.256543"
                        z3="-2.197099"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.961873"
                        y3="3.542255"
                        z3="-1.119988"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.859484"
                        y3="-2.728317"
                        z3="-1.1485"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.201617"
                        y3="-1.28126"
                        z3="0.85798"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.710594"
                        y3="-1.102968"
                        z3="-0.578652"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.924646"
                        y3="1.424063"
                        z3="1.015152"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-2.752053"
                        y3="0.021368"
                        z3="3.632046"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.911284"
                        y3="1.158546"
                        z3="1.742372"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.968435"
                        y3="-1.957751"
                        z3="-1.610904"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.237705"
                        y3="2.457652"
                        z3="0.129157"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.571637"
                        y3="1.144831"
                        z3="1.190253"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.537858"
                        y3="-1.523068"
                        z3="-1.786208"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.259755"
                        y3="3.158148"
                        z3="-0.552839"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.429213"
                        y3="1.830148"
                        z3="0.519183"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.08665"
                        y3="2.842371"
                        z3="-0.374014"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.479579"
                        y3="-2.327327"
                        z3="-1.378191"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.246351"
                        y3="-0.274013"
                        z3="-2.328277"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.834837"
                        y3="-1.908034"
                        z3="-1.517859"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.060176"
                        y3="0.159185"
                        z3="-2.473944"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.090569"
                        y3="-0.663168"
                        z3="-2.071507"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.352682"
                        y3="3.324293"
                        z3="-0.969539"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.926801"
                        y3="3.988491"
                        z3="0.26748"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.631676"
                        y3="-2.363151"
                        z3="-0.084619"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.184888"
                        y3="-1.502857"
                        z3="0.908886"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.899354"
                        y3="-2.924612"
                        z3="-0.008635"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.02073"
                        y3="-1.198742"
                        z3="1.973664"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.719534"
                        y3="-2.616466"
                        z3="1.063527"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.289924"
                        y3="-1.748405"
                        z3="2.058002"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.15862"
                        y3="-1.617575"
                        z3="0.849566"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.762324"
                        y3="-2.070546"
                        z3="1.365893"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.63178"
                        y3="-0.057377"
                        z3="-0.896488"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.777003"
                        y3="-1.337431"
                        z3="-0.618749"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.711668"
                        y3="0.950379"
                        z3="4.201963"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.47738"
                        y3="-0.632516"
                        z3="4.119325"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.776805"
                        y3="-0.459407"
                        z3="3.724015"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.241055"
                        y3="1.311669"
                        z3="0.713424"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.668737"
                        y3="0.544658"
                        z3="2.232537"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.912594"
                        y3="2.131826"
                        z3="2.235311"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.006057"
                        y3="-3.009119"
                        z3="-1.314895"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.486719"
                        y3="-1.889824"
                        z3="-2.571634"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.273256"
                        y3="2.730174"
                        z3="-0.040937"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.270056"
                        y3="0.360361"
                        z3="1.877234"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.525642"
                        y3="3.953487"
                        z3="-1.23771"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.459523"
                        y3="1.549852"
                        z3="0.692666"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.666986"
                        y3="-3.303868"
                        z3="-0.947845"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.04957"
                        y3="0.380995"
                        z3="-2.640758"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.2816"
                        y3="1.131275"
                        z3="-2.893831"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.801411"
                        y3="3.760461"
                        z3="-1.862411"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.586587"
                        y3="2.254858"
                        z3="-0.992287"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.515352"
                        y3="3.581735"
                        z3="1.190674"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.007052"
                        y3="3.841796"
                        z3="0.294081"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.733623"
                        y3="5.060726"
                        z3="0.257624"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.191493"
                        y3="-1.077237"
                        z3="0.859854"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.233776"
                        y3="-3.594081"
                        z3="-0.79001"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.667709"
                        y3="-0.528052"
                        z3="2.746797"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.707366"
                        y3="-3.054873"
                        z3="1.116913"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.93687"
                        y3="-1.507392"
                        z3="2.890244"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.218,.3382,1.8344;2.3592,-.2565,-2.1971;.9619,3.5423,-1.12;1.8595,-2.7283,-1.1485;-3.2016,-1.2813,.858;-3.7106,-1.103,-.5787;-1.9246,1.4241,1.0152;-2.7521,.0214,3.632;-4.9113,1.1585,1.7424;-2.9684,-1.9578,-1.6109;-2.2377,2.4577,.1292;-.5716,1.1448,1.1903;-1.5379,-1.5231,-1.7862;-1.2598,3.1581,-.5528;.4292,1.8301,.5192;.0867,2.8424,-.374;-.4796,-2.3273,-1.3782;-1.2464,-.274,-2.3283;.8348,-1.908,-1.5179;.0602,.1592,-2.4739;1.0906,-.6632,-2.0715;2.3527,3.3243,-.9695;2.9268,3.9885,.2675;2.6317,-2.3632,-.0846;2.1849,-1.5029,.9089;3.8994,-2.9246,-.0086;3.0207,-1.1987,1.9737;4.7195,-2.6165,1.0635;4.2899,-1.7484,2.058;-2.1586,-1.6176,.8496;-3.7623,-2.0705,1.3659;-3.6318,-.0574,-.8965;-4.777,-1.3374,-.6187;-2.7117,.9504,4.202;-3.4774,-.6325,4.1193;-1.7768,-.4594,3.724;-5.2411,1.3117,.7134;-5.6687,.5447,2.2325;-4.9126,2.1318,2.2353;-3.0061,-3.0091,-1.3149;-3.4867,-1.8898,-2.5716;-3.2733,2.7302,-.0409;-.2701,.3604,1.8772;-1.5256,3.9535,-1.2377;1.4595,1.5499,.6927;-.667,-3.3039,-.9478;-2.0496,.381,-2.6408;.2816,1.1313,-2.8938;2.8014,3.7605,-1.8624;2.5866,2.2549,-.9923;2.5154,3.5817,1.1907;4.0071,3.8418,.2941;2.7336,5.0607,.2576;1.1915,-1.0772,.8599;4.2338,-3.5941,-.79;2.6677,-.5281,2.7468;5.7074,-3.0549,1.1169;4.9369,-1.5074,2.8902;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3033.5890561726 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.822e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.404 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.799 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.21796353"
                                 y3="0.33823714"
                                 z3="1.83435773">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.35917568"
                                 y3="-0.25654336"
                                 z3="-2.19709891">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.9618726"
                                 y3="3.54225466"
                                 z3="-1.1199877">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.85948399"
                                 y3="-2.72831673"
                                 z3="-1.14849979">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.20161662"
                                 y3="-1.28126"
                                 z3="0.85798001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.7105944"
                                 y3="-1.10296764"
                                 z3="-0.57865238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.92464632"
                                 y3="1.42406321"
                                 z3="1.01515247">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-2.75205324"
                                 y3="0.02136828"
                                 z3="3.63204569">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.91128396"
                                 y3="1.15854634"
                                 z3="1.74237191">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.96843452"
                                 y3="-1.95775136"
                                 z3="-1.61090352">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.23770459"
                                 y3="2.4576519"
                                 z3="0.12915721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.57163691"
                                 y3="1.14483089"
                                 z3="1.19025307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.53785794"
                                 y3="-1.5230681"
                                 z3="-1.78620756">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.25975473"
                                 y3="3.15814777"
                                 z3="-0.55283899">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.42921298"
                                 y3="1.83014834"
                                 z3="0.51918319">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.0866503"
                                 y3="2.84237137"
                                 z3="-0.37401354">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.47957904"
                                 y3="-2.32732727"
                                 z3="-1.37819113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.24635101"
                                 y3="-0.27401283"
                                 z3="-2.32827695">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.83483736"
                                 y3="-1.9080344"
                                 z3="-1.51785947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="0.06017605"
                                 y3="0.15918495"
                                 z3="-2.47394351">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.09056887"
                                 y3="-0.66316824"
                                 z3="-2.0715065">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.35268166"
                                 y3="3.32429309"
                                 z3="-0.96953917">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.92680079"
                                 y3="3.98849079"
                                 z3="0.26748018">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.63167601"
                                 y3="-2.36315124"
                                 z3="-0.08461917">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.18488813"
                                 y3="-1.50285665"
                                 z3="0.90888576">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.89935424"
                                 y3="-2.92461229"
                                 z3="-0.00863455">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.02072958"
                                 y3="-1.19874175"
                                 z3="1.97366367">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.71953437"
                                 y3="-2.61646645"
                                 z3="1.06352747">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.289924"
                                 y3="-1.74840457"
                                 z3="2.05800154">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.15861997"
                                 y3="-1.61757532"
                                 z3="0.84956601">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.76232361"
                                 y3="-2.07054565"
                                 z3="1.36589275">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.63178045"
                                 y3="-0.05737655"
                                 z3="-0.89648814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.77700331"
                                 y3="-1.33743101"
                                 z3="-0.61874901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.7116682"
                                 y3="0.95037911"
                                 z3="4.20196277">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.4773798"
                                 y3="-0.63251597"
                                 z3="4.11932535">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-1.77680477"
                                 y3="-0.45940653"
                                 z3="3.72401519">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.24105511"
                                 y3="1.31166946"
                                 z3="0.71342446">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.66873745"
                                 y3="0.54465825"
                                 z3="2.23253725">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.91259398"
                                 y3="2.13182579"
                                 z3="2.23531111">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.00605676"
                                 y3="-3.00911877"
                                 z3="-1.31489512">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.48671938"
                                 y3="-1.88982401"
                                 z3="-2.57163359">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-3.27325604"
                                 y3="2.73017425"
                                 z3="-0.04093714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.27005629"
                                 y3="0.36036096"
                                 z3="1.87723399">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-1.52564249"
                                 y3="3.95348683"
                                 z3="-1.23770976">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.45952302"
                                 y3="1.54985209"
                                 z3="0.69266561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.66698611"
                                 y3="-3.30386784"
                                 z3="-0.94784526">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.04957015"
                                 y3="0.38099532"
                                 z3="-2.6407584">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.28159999"
                                 y3="1.13127504"
                                 z3="-2.89383149">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.80141101"
                                 y3="3.76046144"
                                 z3="-1.86241055">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.58658721"
                                 y3="2.25485849"
                                 z3="-0.99228736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.51535198"
                                 y3="3.58173537"
                                 z3="1.19067354">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.0070523"
                                 y3="3.84179575"
                                 z3="0.29408078">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.7336233"
                                 y3="5.06072578"
                                 z3="0.25762423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.19149299"
                                 y3="-1.07723668"
                                 z3="0.85985374">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.23377593"
                                 y3="-3.59408114"
                                 z3="-0.7900096">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.66770879"
                                 y3="-0.52805164"
                                 z3="2.74679695">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.70736647"
                                 y3="-3.05487278"
                                 z3="1.11691325">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.93687037"
                                 y3="-1.50739223"
                                 z3="2.89024398">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.218,.3382,1.8344;2.3592,-.2565,-2.1971;.9619,3.5423,-1.12;1.8595,-2.7283,-1.1485;-3.2016,-1.2813,.858;-3.7106,-1.103,-.5787;-1.9246,1.4241,1.0152;-2.7521,.0214,3.632;-4.9113,1.1585,1.7424;-2.9684,-1.9578,-1.6109;-2.2377,2.4577,.1292;-.5716,1.1448,1.1903;-1.5379,-1.5231,-1.7862;-1.2598,3.1581,-.5528;.4292,1.8301,.5192;.0867,2.8424,-.374;-.4796,-2.3273,-1.3782;-1.2464,-.274,-2.3283;.8348,-1.908,-1.5179;.0602,.1592,-2.4739;1.0906,-.6632,-2.0715;2.3527,3.3243,-.9695;2.9268,3.9885,.2675;2.6317,-2.3632,-.0846;2.1849,-1.5029,.9089;3.8994,-2.9246,-.0086;3.0207,-1.1987,1.9737;4.7195,-2.6165,1.0635;4.2899,-1.7484,2.058;-2.1586,-1.6176,.8496;-3.7623,-2.0705,1.3659;-3.6318,-.0574,-.8965;-4.777,-1.3374,-.6187;-2.7117,.9504,4.202;-3.4774,-.6325,4.1193;-1.7768,-.4594,3.724;-5.2411,1.3117,.7134;-5.6687,.5447,2.2325;-4.9126,2.1318,2.2353;-3.0061,-3.0091,-1.3149;-3.4867,-1.8898,-2.5716;-3.2733,2.7302,-.0409;-.2701,.3604,1.8772;-1.5256,3.9535,-1.2377;1.4595,1.5499,.6927;-.667,-3.3039,-.9478;-2.0496,.381,-2.6408;.2816,1.1313,-2.8938;2.8014,3.7605,-1.8624;2.5866,2.2549,-.9923;2.5154,3.5817,1.1907;4.0071,3.8418,.2941;2.7336,5.0607,.2576;1.1915,-1.0772,.8599;4.2338,-3.5941,-.79;2.6677,-.5281,2.7468;5.7074,-3.0549,1.1169;4.9369,-1.5074,2.8902;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.217964"
                        y3="0.338237"
                        z3="1.834358"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.359176"
                        y3="-0.256543"
                        z3="-2.197099"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.961873"
                        y3="3.542255"
                        z3="-1.119988"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.859484"
                        y3="-2.728317"
                        z3="-1.1485"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.201617"
                        y3="-1.28126"
                        z3="0.85798"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.710594"
                        y3="-1.102968"
                        z3="-0.578652"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.924646"
                        y3="1.424063"
                        z3="1.015152"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-2.752053"
                        y3="0.021368"
                        z3="3.632046"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.911284"
                        y3="1.158546"
                        z3="1.742372"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.968435"
                        y3="-1.957751"
                        z3="-1.610904"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.237705"
                        y3="2.457652"
                        z3="0.129157"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.571637"
                        y3="1.144831"
                        z3="1.190253"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.537858"
                        y3="-1.523068"
                        z3="-1.786208"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.259755"
                        y3="3.158148"
                        z3="-0.552839"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.429213"
                        y3="1.830148"
                        z3="0.519183"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.08665"
                        y3="2.842371"
                        z3="-0.374014"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.479579"
                        y3="-2.327327"
                        z3="-1.378191"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.246351"
                        y3="-0.274013"
                        z3="-2.328277"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.834837"
                        y3="-1.908034"
                        z3="-1.517859"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.060176"
                        y3="0.159185"
                        z3="-2.473944"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.090569"
                        y3="-0.663168"
                        z3="-2.071507"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.352682"
                        y3="3.324293"
                        z3="-0.969539"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.926801"
                        y3="3.988491"
                        z3="0.26748"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.631676"
                        y3="-2.363151"
                        z3="-0.084619"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.184888"
                        y3="-1.502857"
                        z3="0.908886"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.899354"
                        y3="-2.924612"
                        z3="-0.008635"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.02073"
                        y3="-1.198742"
                        z3="1.973664"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.719534"
                        y3="-2.616466"
                        z3="1.063527"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.289924"
                        y3="-1.748405"
                        z3="2.058002"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.15862"
                        y3="-1.617575"
                        z3="0.849566"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.762324"
                        y3="-2.070546"
                        z3="1.365893"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.63178"
                        y3="-0.057377"
                        z3="-0.896488"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.777003"
                        y3="-1.337431"
                        z3="-0.618749"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.711668"
                        y3="0.950379"
                        z3="4.201963"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.47738"
                        y3="-0.632516"
                        z3="4.119325"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.776805"
                        y3="-0.459407"
                        z3="3.724015"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.241055"
                        y3="1.311669"
                        z3="0.713424"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.668737"
                        y3="0.544658"
                        z3="2.232537"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.912594"
                        y3="2.131826"
                        z3="2.235311"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.006057"
                        y3="-3.009119"
                        z3="-1.314895"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.486719"
                        y3="-1.889824"
                        z3="-2.571634"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.273256"
                        y3="2.730174"
                        z3="-0.040937"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.270056"
                        y3="0.360361"
                        z3="1.877234"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.525642"
                        y3="3.953487"
                        z3="-1.23771"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.459523"
                        y3="1.549852"
                        z3="0.692666"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.666986"
                        y3="-3.303868"
                        z3="-0.947845"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.04957"
                        y3="0.380995"
                        z3="-2.640758"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.2816"
                        y3="1.131275"
                        z3="-2.893831"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.801411"
                        y3="3.760461"
                        z3="-1.862411"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.586587"
                        y3="2.254858"
                        z3="-0.992287"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.515352"
                        y3="3.581735"
                        z3="1.190674"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.007052"
                        y3="3.841796"
                        z3="0.294081"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.733623"
                        y3="5.060726"
                        z3="0.257624"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.191493"
                        y3="-1.077237"
                        z3="0.859854"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.233776"
                        y3="-3.594081"
                        z3="-0.79001"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.667709"
                        y3="-0.528052"
                        z3="2.746797"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.707366"
                        y3="-3.054873"
                        z3="1.116913"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.93687"
                        y3="-1.507392"
                        z3="2.890244"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.218,.3382,1.8344;2.3592,-.2565,-2.1971;.9619,3.5423,-1.12;1.8595,-2.7283,-1.1485;-3.2016,-1.2813,.858;-3.7106,-1.103,-.5787;-1.9246,1.4241,1.0152;-2.7521,.0214,3.632;-4.9113,1.1585,1.7424;-2.9684,-1.9578,-1.6109;-2.2377,2.4577,.1292;-.5716,1.1448,1.1903;-1.5379,-1.5231,-1.7862;-1.2598,3.1581,-.5528;.4292,1.8301,.5192;.0867,2.8424,-.374;-.4796,-2.3273,-1.3782;-1.2464,-.274,-2.3283;.8348,-1.908,-1.5179;.0602,.1592,-2.4739;1.0906,-.6632,-2.0715;2.3527,3.3243,-.9695;2.9268,3.9885,.2675;2.6317,-2.3632,-.0846;2.1849,-1.5029,.9089;3.8994,-2.9246,-.0086;3.0207,-1.1987,1.9737;4.7195,-2.6165,1.0635;4.2899,-1.7484,2.058;-2.1586,-1.6176,.8496;-3.7623,-2.0705,1.3659;-3.6318,-.0574,-.8965;-4.777,-1.3374,-.6187;-2.7117,.9504,4.202;-3.4774,-.6325,4.1193;-1.7768,-.4594,3.724;-5.2411,1.3117,.7134;-5.6687,.5447,2.2325;-4.9126,2.1318,2.2353;-3.0061,-3.0091,-1.3149;-3.4867,-1.8898,-2.5716;-3.2733,2.7302,-.0409;-.2701,.3604,1.8772;-1.5256,3.9535,-1.2377;1.4595,1.5499,.6927;-.667,-3.3039,-.9478;-2.0496,.381,-2.6408;.2816,1.1313,-2.8938;2.8014,3.7605,-1.8624;2.5866,2.2549,-.9923;2.5154,3.5817,1.1907;4.0071,3.8418,.2941;2.7336,5.0607,.2576;1.1915,-1.0772,.8599;4.2338,-3.5941,-.79;2.6677,-.5281,2.7468;5.7074,-3.0549,1.1169;4.9369,-1.5074,2.8902;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04596708</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3033.58905617</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4543.63502325</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8096.45566326</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3552.82064001</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.01089087</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.96492379</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404334</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000233021800</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000233021800</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000466043599</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.242359663039</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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                            dictRef="cc:energy"
                            size="1316"
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127.2026 127.4361 127.5551 127.6099 127.9925 128.0237 128.3223 128.4239 128.6705 128.8159 129.2426 129.3926 129.4566 129.6559 129.9725 130.1617 130.3069 130.3292 130.8132 130.8608 130.9973 131.3474 131.3756 131.5847 131.7701 131.8532 131.9374 132.0039 132.1843 132.3146 132.5420 132.7659 133.0039 133.1610 133.3099 133.4131 133.7748 134.2331 134.2815 134.5520 134.6357 134.9792 135.2761 135.3292 135.4028 135.5440 135.7784 136.0311 136.5025 136.6945 136.8536 137.0404 137.4393 137.8158 137.9193 138.1108 138.3728 138.5050 138.8211 138.9654 139.1731 139.2150 139.2731 139.4178 139.6915 139.9922 140.1945 140.2885 140.4880 141.0817 141.3664 141.4471 141.6526 141.8132 142.0403 142.4804 142.7999 143.0916 143.4613 143.5123 143.5665 143.7117 143.8460 143.9368 144.2025 144.2927 144.5757 144.6798 144.8437 145.0680 145.2972 145.6172 146.1555 146.3368 146.9055 146.9868 147.2471 147.4720 147.7240 147.7776 148.0487 148.1833 148.3689 148.6672 148.6895 148.8821 149.1096 149.3248 149.3907 149.5866 149.7410 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643.6955 645.4474 646.2396 654.5103 656.3652 658.4129 1213.7484 1215.3952 1566.6589</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.411742 -0.205628 -0.295480 -0.303857 -0.233121 -0.106024 -0.082258 -0.402543 -0.398326 -0.134002 -0.078937 -0.140658 0.098542 -0.243648 -0.204438 0.291795 -0.242542 -0.195382 0.201829 -0.118889 0.204881 0.035752 -0.251189 0.223090 -0.101168 -0.177629 -0.157954 -0.111035 -0.125915 0.067950 0.087601 0.050380 0.089397 0.098681 0.092864 0.086381 0.087439 0.098992 0.105632 0.076974 0.097165 0.113618 0.106572 0.111820 0.104866 0.114235 0.108359 0.129790 0.099932 0.069528 0.084329 0.085854 0.090121 0.093309 0.122073 0.122740 0.122738 0.123653</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5883 9.2056 8.2955 8.3039 6.2331 6.1060 6.0823 6.4025 6.3983 6.1340 6.0789 6.1407 5.9015 6.2436 6.2044 5.7082 6.2425 6.1954 5.7982 6.1189 5.7951 5.9642 6.2512 5.7769 6.1012 6.1776 6.1580 6.1110 6.1259 0.9320 0.9124 0.9496 0.9106 0.9013 0.9071 0.9136 0.9126 0.9010 0.8944 0.9230 0.9028 0.8864 0.8934 0.8882 0.8951 0.8858 0.8916 0.8702 0.9001 0.9305 0.9157 0.9141 0.9099 0.9067 0.8779 0.8773 0.8773 0.8763</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4117 -0.2056 -0.2955 -0.3039 -0.2331 -0.1060 -0.0823 -0.4025 -0.3983 -0.1340 -0.0789 -0.1407 0.0985 -0.2436 -0.2044 0.2918 -0.2425 -0.1954 0.2018 -0.1189 0.2049 0.0358 -0.2512 0.2231 -0.1012 -0.1776 -0.1580 -0.1110 -0.1259 0.0680 0.0876 0.0504 0.0894 0.0987 0.0929 0.0864 0.0874 0.0990 0.1056 0.0770 0.0972 0.1136 0.1066 0.1118 0.1049 0.1142 0.1084 0.1298 0.0999 0.0695 0.0843 0.0859 0.0901 0.0933 0.1221 0.1227 0.1227 0.1237</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.2009 1.0832 2.0931 2.1110 3.8160 3.8859 3.7570 3.9072 3.9099 3.8762 3.8651 3.9395 3.6002 4.0596 3.8491 3.8177 4.0125 3.9558 3.7821 3.8491 4.0116 3.8778 3.9274 3.8775 3.8493 4.0083 3.9736 3.9670 3.9514 1.0204 1.0134 1.0097 1.0094 1.0118 1.0139 1.0158 1.0126 1.0132 1.0095 1.0111 1.0035 0.9929 0.9837 1.0197 1.0133 1.0214 1.0124 1.0002 0.9939 1.0063 1.0061 1.0105 1.0061 1.0236 1.0151 1.0034 0.9990 1.0001</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.2009 1.0832 2.0931 2.1110 3.8160 3.8859 3.7570 3.9072 3.9099 3.8762 3.8651 3.9395 3.6002 4.0596 3.8491 3.8177 4.0125 3.9558 3.7821 3.8491 4.0116 3.8778 3.9274 3.8775 3.8493 4.0083 3.9736 3.9670 3.9514 1.0204 1.0134 1.0097 1.0094 1.0118 1.0139 1.0158 1.0126 1.0132 1.0095 1.0111 1.0035 0.9929 0.9837 1.0197 1.0133 1.0214 1.0124 1.0002 0.9939 1.0063 1.0061 1.0105 1.0061 1.0236 1.0151 1.0034 0.9990 1.0001</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9438 0.9927 0.9718 0.9833 1.0216 1.0891 0.9123 0.9169 0.9953 0.9112 0.9778 0.9789 0.9265 1.0110 0.9960 1.2973 1.3943 0.9748 0.9764 0.9770 0.9709 0.9747 0.9755 0.8915 1.0186 1.0061 1.4882 0.9875 1.4090 0.9569 1.3500 1.3633 1.3718 0.9931 1.2839 0.9866 1.4337 0.9799 1.4048 0.9881 1.3910 1.3895 0.9797 0.9560 0.9839 0.9893 0.9884 0.9867 0.9895 1.3765 1.4066 1.4061 0.9516 1.4630 0.9691 1.4571 0.9686 1.4180 0.9769 0.9798</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036130275</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.082097355204</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.35263 18.08198 -0.27065 8.76388 -8.59034 0.17354 16.60994 -16.30246 0.30748</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.44487</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.13077</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
