<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.567457"
                        y3="1.332524"
                        z3="0.077369"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.559583"
                        y3="-2.860433"
                        z3="1.980977"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.216984"
                        y3="2.192743"
                        z3="1.609904"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.117579"
                        y3="-1.832038"
                        z3="-0.38693"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.775421"
                        y3="-0.479955"
                        z3="-0.418401"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.042074"
                        y3="-0.855822"
                        z3="-1.710312"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.770031"
                        y3="1.586656"
                        z3="0.568148"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.694508"
                        y3="1.716108"
                        z3="1.539979"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.998158"
                        y3="2.461707"
                        z3="-1.370561"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.587456"
                        y3="-2.322264"
                        z3="-1.757987"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.085761"
                        y3="0.635408"
                        z3="1.323979"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.059795"
                        y3="2.744087"
                        z3="0.228103"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.475604"
                        y3="-2.572284"
                        z3="-0.777826"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.235602"
                        y3="0.80522"
                        z3="1.71694"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.255895"
                        y3="2.934352"
                        z3="0.603395"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.92464"
                        y3="1.95563"
                        z3="1.340351"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.18998"
                        y3="-2.131334"
                        z3="-1.084794"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.704642"
                        y3="-3.150403"
                        z3="0.46331"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.838053"
                        y3="-2.213044"
                        z3="-0.160637"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.67898"
                        y3="-3.260713"
                        z3="1.393935"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.572409"
                        y3="-2.782044"
                        z3="1.082123"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.014079"
                        y3="1.149599"
                        z3="2.138221"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.458511"
                        y3="1.58451"
                        z3="2.057751"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.448505"
                        y3="-0.794001"
                        z3="-1.211744"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.643909"
                        y3="0.319332"
                        z3="-1.417583"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.708795"
                        y3="-0.868204"
                        z3="-1.791882"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.117113"
                        y3="1.357676"
                        z3="-2.206114"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.166516"
                        y3="0.178228"
                        z3="-2.575154"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.373472"
                        y3="1.296708"
                        z3="-2.788636"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.398936"
                        y3="-1.077315"
                        z3="0.41892"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.835724"
                        y3="-0.737317"
                        z3="-0.499587"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.156602"
                        y3="-0.226836"
                        z3="-1.85335"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.68973"
                        y3="-0.651954"
                        z3="-2.566429"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.746949"
                        y3="1.572358"
                        z3="1.288717"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.469788"
                        y3="1.074903"
                        z3="2.393692"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.573395"
                        y3="2.747906"
                        z3="1.872681"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.917209"
                        y3="3.517892"
                        z3="-1.108484"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.349299"
                        y3="2.286133"
                        z3="-2.229947"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.025783"
                        y3="2.293928"
                        z3="-1.698079"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.435342"
                        y3="-2.979237"
                        z3="-1.548178"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.248809"
                        y3="-2.563614"
                        z3="-2.769006"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.577388"
                        y3="-0.286162"
                        z3="1.616381"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.539377"
                        y3="3.520705"
                        z3="-0.357015"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.715101"
                        y3="0.025597"
                        z3="2.293438"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.791784"
                        y3="3.829356"
                        z3="0.31367"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.004056"
                        y3="-1.703719"
                        z3="-2.060967"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.692064"
                        y3="-3.515674"
                        z3="0.715071"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.849724"
                        y3="-3.709178"
                        z3="2.363684"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.867673"
                        y3="0.227014"
                        z3="1.565801"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.730383"
                        y3="0.940524"
                        z3="3.177125"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.101586"
                        y3="0.80641"
                        z3="2.468497"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.754856"
                        y3="1.755381"
                        z3="1.022878"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.632145"
                        y3="2.499547"
                        z3="2.624183"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.666314"
                        y3="0.397506"
                        z3="-0.961777"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.324158"
                        y3="-1.740911"
                        z3="-1.616872"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.489538"
                        y3="2.227383"
                        z3="-2.348553"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.150141"
                        y3="0.115856"
                        z3="-3.022006"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.733433"
                        y3="2.113678"
                        z3="-3.39911"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5675,1.3325,.0774;1.5596,-2.8604,1.981;2.217,2.1927,1.6099;2.1176,-1.832,-.3869;-3.7754,-.48,-.4184;-3.0421,-.8558,-1.7103;-1.77,1.5867,.5681;-4.6945,1.7161,1.54;-3.9982,2.4617,-1.3706;-2.5875,-2.3223,-1.758;-1.0858,.6354,1.324;-1.0598,2.7441,.2281;-1.4756,-2.5723,-.7778;.2356,.8052,1.7169;.2559,2.9344,.6034;.9246,1.9556,1.3404;-.19,-2.1313,-1.0848;-1.7046,-3.1504,.4633;.8381,-2.213,-.1606;-.679,-3.2607,1.3939;.5724,-2.782,1.0821;3.0141,1.1496,2.1382;4.4585,1.5845,2.0578;2.4485,-.794,-1.2117;1.6439,.3193,-1.4176;3.7088,-.8682,-1.7919;2.1171,1.3577,-2.2061;4.1665,.1782,-2.5752;3.3735,1.2967,-2.7886;-3.3989,-1.0773,.4189;-4.8357,-.7373,-.4996;-2.1566,-.2268,-1.8534;-3.6897,-.652,-2.5664;-5.7469,1.5724,1.2887;-4.4698,1.0749,2.3937;-4.5734,2.7479,1.8727;-3.9172,3.5179,-1.1085;-3.3493,2.2861,-2.2299;-5.0258,2.2939,-1.6981;-3.4353,-2.9792,-1.5482;-2.2488,-2.5636,-2.769;-1.5774,-.2862,1.6164;-1.5394,3.5207,-.357;.7151,.0256,2.2934;.7918,3.8294,.3137;.0041,-1.7037,-2.061;-2.6921,-3.5157,.7151;-.8497,-3.7092,2.3637;2.8677,.227,1.5658;2.7304,.9405,3.1771;5.1016,.8064,2.4685;4.7549,1.7554,1.0229;4.6321,2.4995,2.6242;.6663,.3975,-.9618;4.3242,-1.7409,-1.6169;1.4895,2.2274,-2.3486;5.1501,.1159,-3.022;3.7334,2.1137,-3.3991;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3064.3975870551 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.878e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.449 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.844 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.56745722"
                                 y3="1.33252426"
                                 z3="0.07736909">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.55958311"
                                 y3="-2.8604331"
                                 z3="1.98097673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.21698376"
                                 y3="2.1927433"
                                 z3="1.60990419">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.11757906"
                                 y3="-1.83203751"
                                 z3="-0.38693003">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.77542061"
                                 y3="-0.47995504"
                                 z3="-0.41840087">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.04207444"
                                 y3="-0.8558224"
                                 z3="-1.71031151">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.77003098"
                                 y3="1.58665611"
                                 z3="0.56814777">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.6945085"
                                 y3="1.71610816"
                                 z3="1.53997888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.99815818"
                                 y3="2.46170713"
                                 z3="-1.3705607">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.58745629"
                                 y3="-2.32226385"
                                 z3="-1.75798658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.0857613"
                                 y3="0.63540774"
                                 z3="1.32397872">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.05979482"
                                 y3="2.74408719"
                                 z3="0.22810328">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.47560384"
                                 y3="-2.57228411"
                                 z3="-0.77782636">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.23560211"
                                 y3="0.80521996"
                                 z3="1.71693972">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.25589533"
                                 y3="2.93435179"
                                 z3="0.60339495">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.9246401"
                                 y3="1.95562952"
                                 z3="1.34035143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.18997959"
                                 y3="-2.13133447"
                                 z3="-1.08479371">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.7046415"
                                 y3="-3.15040328"
                                 z3="0.46330982">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.83805314"
                                 y3="-2.2130436"
                                 z3="-0.16063679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.67898014"
                                 y3="-3.26071306"
                                 z3="1.39393487">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.57240875"
                                 y3="-2.78204429"
                                 z3="1.08212256">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.01407918"
                                 y3="1.14959898"
                                 z3="2.13822076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.45851111"
                                 y3="1.58450951"
                                 z3="2.05775051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.44850511"
                                 y3="-0.79400068"
                                 z3="-1.21174403">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.64390939"
                                 y3="0.31933202"
                                 z3="-1.41758295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.70879465"
                                 y3="-0.86820374"
                                 z3="-1.791882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.11711254"
                                 y3="1.3576755"
                                 z3="-2.20611365">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.16651575"
                                 y3="0.17822769"
                                 z3="-2.57515369">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.37347229"
                                 y3="1.2967083"
                                 z3="-2.78863574">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.39893629"
                                 y3="-1.07731496"
                                 z3="0.41892025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.83572444"
                                 y3="-0.73731738"
                                 z3="-0.49958749">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.15660194"
                                 y3="-0.22683583"
                                 z3="-1.85334978">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.68972953"
                                 y3="-0.65195379"
                                 z3="-2.56642932">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.74694903"
                                 y3="1.57235795"
                                 z3="1.28871728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.46978817"
                                 y3="1.07490327"
                                 z3="2.39369159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.57339488"
                                 y3="2.74790635"
                                 z3="1.8726807">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.91720908"
                                 y3="3.51789174"
                                 z3="-1.10848389">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.34929873"
                                 y3="2.28613346"
                                 z3="-2.22994676">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.02578325"
                                 y3="2.29392832"
                                 z3="-1.6980791">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.43534153"
                                 y3="-2.97923696"
                                 z3="-1.54817778">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.24880923"
                                 y3="-2.56361428"
                                 z3="-2.76900603">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.57738846"
                                 y3="-0.28616196"
                                 z3="1.61638098">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.53937725"
                                 y3="3.5207048"
                                 z3="-0.35701497">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.71510124"
                                 y3="0.02559696"
                                 z3="2.29343772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.7917843"
                                 y3="3.82935599"
                                 z3="0.31367014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.00405637"
                                 y3="-1.70371892"
                                 z3="-2.06096658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.69206424"
                                 y3="-3.51567365"
                                 z3="0.71507145">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.84972431"
                                 y3="-3.70917753"
                                 z3="2.36368446">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.86767301"
                                 y3="0.2270144"
                                 z3="1.56580054">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.73038287"
                                 y3="0.94052408"
                                 z3="3.17712502">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="5.10158589"
                                 y3="0.80641008"
                                 z3="2.46849746">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.7548559"
                                 y3="1.75538133"
                                 z3="1.02287826">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.63214465"
                                 y3="2.49954724"
                                 z3="2.62418338">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.66631449"
                                 y3="0.39750562"
                                 z3="-0.96177728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.32415801"
                                 y3="-1.74091124"
                                 z3="-1.61687206">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.48953761"
                                 y3="2.22738331"
                                 z3="-2.34855258">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.15014086"
                                 y3="0.11585589"
                                 z3="-3.02200563">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.73343255"
                                 y3="2.11367825"
                                 z3="-3.39910987">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5675,1.3325,.0774;1.5596,-2.8604,1.981;2.217,2.1927,1.6099;2.1176,-1.832,-.3869;-3.7754,-.48,-.4184;-3.0421,-.8558,-1.7103;-1.77,1.5867,.5681;-4.6945,1.7161,1.54;-3.9982,2.4617,-1.3706;-2.5875,-2.3223,-1.758;-1.0858,.6354,1.324;-1.0598,2.7441,.2281;-1.4756,-2.5723,-.7778;.2356,.8052,1.7169;.2559,2.9344,.6034;.9246,1.9556,1.3404;-.19,-2.1313,-1.0848;-1.7046,-3.1504,.4633;.8381,-2.213,-.1606;-.679,-3.2607,1.3939;.5724,-2.782,1.0821;3.0141,1.1496,2.1382;4.4585,1.5845,2.0578;2.4485,-.794,-1.2117;1.6439,.3193,-1.4176;3.7088,-.8682,-1.7919;2.1171,1.3577,-2.2061;4.1665,.1782,-2.5752;3.3735,1.2967,-2.7886;-3.3989,-1.0773,.4189;-4.8357,-.7373,-.4996;-2.1566,-.2268,-1.8533;-3.6897,-.652,-2.5664;-5.7469,1.5724,1.2887;-4.4698,1.0749,2.3937;-4.5734,2.7479,1.8727;-3.9172,3.5179,-1.1085;-3.3493,2.2861,-2.2299;-5.0258,2.2939,-1.6981;-3.4353,-2.9792,-1.5482;-2.2488,-2.5636,-2.769;-1.5774,-.2862,1.6164;-1.5394,3.5207,-.357;.7151,.0256,2.2934;.7918,3.8294,.3137;.0041,-1.7037,-2.061;-2.6921,-3.5157,.7151;-.8497,-3.7092,2.3637;2.8677,.227,1.5658;2.7304,.9405,3.1771;5.1016,.8064,2.4685;4.7549,1.7554,1.0229;4.6321,2.4995,2.6242;.6663,.3975,-.9618;4.3242,-1.7409,-1.6169;1.4895,2.2274,-2.3486;5.1501,.1159,-3.022;3.7334,2.1137,-3.3991;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.567457"
                        y3="1.332524"
                        z3="0.077369"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.559583"
                        y3="-2.860433"
                        z3="1.980977"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.216984"
                        y3="2.192743"
                        z3="1.609904"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.117579"
                        y3="-1.832038"
                        z3="-0.38693"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.775421"
                        y3="-0.479955"
                        z3="-0.418401"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.042074"
                        y3="-0.855822"
                        z3="-1.710312"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.770031"
                        y3="1.586656"
                        z3="0.568148"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.694508"
                        y3="1.716108"
                        z3="1.539979"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.998158"
                        y3="2.461707"
                        z3="-1.370561"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.587456"
                        y3="-2.322264"
                        z3="-1.757987"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.085761"
                        y3="0.635408"
                        z3="1.323979"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.059795"
                        y3="2.744087"
                        z3="0.228103"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.475604"
                        y3="-2.572284"
                        z3="-0.777826"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.235602"
                        y3="0.80522"
                        z3="1.71694"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.255895"
                        y3="2.934352"
                        z3="0.603395"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.92464"
                        y3="1.95563"
                        z3="1.340351"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.18998"
                        y3="-2.131334"
                        z3="-1.084794"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.704642"
                        y3="-3.150403"
                        z3="0.46331"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.838053"
                        y3="-2.213044"
                        z3="-0.160637"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.67898"
                        y3="-3.260713"
                        z3="1.393935"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.572409"
                        y3="-2.782044"
                        z3="1.082123"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.014079"
                        y3="1.149599"
                        z3="2.138221"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.458511"
                        y3="1.58451"
                        z3="2.057751"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.448505"
                        y3="-0.794001"
                        z3="-1.211744"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.643909"
                        y3="0.319332"
                        z3="-1.417583"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.708795"
                        y3="-0.868204"
                        z3="-1.791882"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.117113"
                        y3="1.357676"
                        z3="-2.206114"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.166516"
                        y3="0.178228"
                        z3="-2.575154"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.373472"
                        y3="1.296708"
                        z3="-2.788636"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.398936"
                        y3="-1.077315"
                        z3="0.41892"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.835724"
                        y3="-0.737317"
                        z3="-0.499587"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.156602"
                        y3="-0.226836"
                        z3="-1.85335"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.68973"
                        y3="-0.651954"
                        z3="-2.566429"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.746949"
                        y3="1.572358"
                        z3="1.288717"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.469788"
                        y3="1.074903"
                        z3="2.393692"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.573395"
                        y3="2.747906"
                        z3="1.872681"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.917209"
                        y3="3.517892"
                        z3="-1.108484"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.349299"
                        y3="2.286133"
                        z3="-2.229947"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.025783"
                        y3="2.293928"
                        z3="-1.698079"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.435342"
                        y3="-2.979237"
                        z3="-1.548178"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.248809"
                        y3="-2.563614"
                        z3="-2.769006"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.577388"
                        y3="-0.286162"
                        z3="1.616381"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.539377"
                        y3="3.520705"
                        z3="-0.357015"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.715101"
                        y3="0.025597"
                        z3="2.293438"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.791784"
                        y3="3.829356"
                        z3="0.31367"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.004056"
                        y3="-1.703719"
                        z3="-2.060967"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.692064"
                        y3="-3.515674"
                        z3="0.715071"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.849724"
                        y3="-3.709178"
                        z3="2.363684"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.867673"
                        y3="0.227014"
                        z3="1.565801"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.730383"
                        y3="0.940524"
                        z3="3.177125"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.101586"
                        y3="0.80641"
                        z3="2.468497"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.754856"
                        y3="1.755381"
                        z3="1.022878"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.632145"
                        y3="2.499547"
                        z3="2.624183"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.666314"
                        y3="0.397506"
                        z3="-0.961777"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.324158"
                        y3="-1.740911"
                        z3="-1.616872"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.489538"
                        y3="2.227383"
                        z3="-2.348553"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.150141"
                        y3="0.115856"
                        z3="-3.022006"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.733433"
                        y3="2.113678"
                        z3="-3.39911"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5675,1.3325,.0774;1.5596,-2.8604,1.981;2.217,2.1927,1.6099;2.1176,-1.832,-.3869;-3.7754,-.48,-.4184;-3.0421,-.8558,-1.7103;-1.77,1.5867,.5681;-4.6945,1.7161,1.54;-3.9982,2.4617,-1.3706;-2.5875,-2.3223,-1.758;-1.0858,.6354,1.324;-1.0598,2.7441,.2281;-1.4756,-2.5723,-.7778;.2356,.8052,1.7169;.2559,2.9344,.6034;.9246,1.9556,1.3404;-.19,-2.1313,-1.0848;-1.7046,-3.1504,.4633;.8381,-2.213,-.1606;-.679,-3.2607,1.3939;.5724,-2.782,1.0821;3.0141,1.1496,2.1382;4.4585,1.5845,2.0578;2.4485,-.794,-1.2117;1.6439,.3193,-1.4176;3.7088,-.8682,-1.7919;2.1171,1.3577,-2.2061;4.1665,.1782,-2.5752;3.3735,1.2967,-2.7886;-3.3989,-1.0773,.4189;-4.8357,-.7373,-.4996;-2.1566,-.2268,-1.8534;-3.6897,-.652,-2.5664;-5.7469,1.5724,1.2887;-4.4698,1.0749,2.3937;-4.5734,2.7479,1.8727;-3.9172,3.5179,-1.1085;-3.3493,2.2861,-2.2299;-5.0258,2.2939,-1.6981;-3.4353,-2.9792,-1.5482;-2.2488,-2.5636,-2.769;-1.5774,-.2862,1.6164;-1.5394,3.5207,-.357;.7151,.0256,2.2934;.7918,3.8294,.3137;.0041,-1.7037,-2.061;-2.6921,-3.5157,.7151;-.8497,-3.7092,2.3637;2.8677,.227,1.5658;2.7304,.9405,3.1771;5.1016,.8064,2.4685;4.7549,1.7554,1.0229;4.6321,2.4995,2.6242;.6663,.3975,-.9618;4.3242,-1.7409,-1.6169;1.4895,2.2274,-2.3486;5.1501,.1159,-3.022;3.7334,2.1137,-3.3991;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04874451</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3064.39758706</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4574.44633157</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8158.09560225</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3583.64927068</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.99077877</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.94203426</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00406047</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000304981463</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000304981463</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000609962926</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.241226395630</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7513 -674.7826 -524.7277 -524.0445 -281.9996 -281.7221 -281.5813 -281.3137 -281.0122 -280.0982 -280.0159 -279.8953 -279.8574 -279.8554 -279.8286 -279.7422 -279.7384 -279.7314 -279.7263 -279.7181 -279.6730 -279.6570 -279.5160 -279.4620 -279.3231 -279.1493 -279.0333 -278.9299 -278.8266 -145.8101 -100.8737 -100.8669 -100.8541 -36.6881 -33.0861 -32.3361 -27.1395 -26.6519 -26.4024 -25.1538 -24.3201 -24.2834 -23.7362 -23.6342 -23.4751 -23.1118 -22.8346 -22.1860 -21.5745 -21.5183 -20.8375 -20.4876 -20.0963 -19.6335 -19.3669 -19.2018 -18.7357 -18.6549 -18.0104 -17.6258 -17.5706 -16.9116 -16.4456 -16.2533 -16.1059 -16.0101 -15.6674 -15.6188 -15.5145 -15.0001 -14.9135 -14.8915 -14.7989 -14.5721 -14.4037 -14.3680 -14.1115 -14.0187 -13.8655 -13.7208 -13.6902 -13.5473 -13.4539 -13.4067 -13.3741 -13.1875 -13.0626 -13.0006 -12.8849 -12.6512 -12.6093 -12.4652 -12.2166 -12.1702 -12.0125 -11.7930 -11.7082 -11.5294 -11.3571 -11.1364 -10.5997 -10.4667 -10.1194 -9.5784 -9.4118 -9.2781 -9.0155 -8.3295 -8.1847 1.2629 1.5231 1.7484 1.8277 1.8780 2.2704 2.8166 3.2344 3.2938 3.4023 3.6773 3.7508 3.8705 3.9657 4.1818 4.3233 4.4676 4.5845 4.6391 4.7287 4.7787 4.9090 4.9442 5.0557 5.1307 5.2786 5.4079 5.4789 5.4971 5.5727 5.6261 5.7037 5.7349 5.8222 5.9710 6.0466 6.1479 6.2961 6.3376 6.4240 6.5144 6.6904 6.7670 6.8055 6.9286 6.9863 7.1299 7.2690 7.3502 7.3619 7.5260 7.6596 7.6914 7.7508 7.9260 7.9520 8.0835 8.1263 8.2251 8.3527 8.4916 8.6537 8.6940 8.8130 8.9329 9.0383 9.0990 9.2781 9.3977 9.4663 9.5616 9.7700 9.8461 9.9216 9.9810 10.0545 10.2054 10.2395 10.3174 10.3642 10.5024 10.5665 10.7040 10.8593 10.9087 11.0430 11.1327 11.2028 11.3134 11.3403 11.4645 11.5208 11.6524 11.7262 11.7597 11.8639 12.0698 12.1286 12.1605 12.2971 12.4043 12.4862 12.5884 12.6785 12.8003 12.8104 12.8606 13.0244 13.0556 13.1009 13.1932 13.3749 13.3862 13.4414 13.5486 13.6648 13.6962 13.7039 13.8107 13.8463 13.9640 14.0660 14.0949 14.2300 14.2919 14.3083 14.4450 14.5573 14.5924 14.6552 14.7259 14.8010 14.8303 14.8996 15.0192 15.0481 15.2148 15.3513 15.3990 15.4757 15.5332 15.5439 15.6360 15.7702 15.8173 15.9115 16.0034 16.1296 16.1686 16.2660 16.3388 16.3621 16.4280 16.5906 16.6662 16.8121 16.9978 17.1515 17.1805 17.2163 17.2650 17.5441 17.7456 17.8039 17.8828 18.0624 18.1268 18.2072 18.3004 18.3810 18.5348 18.6797 18.8153 19.0078 19.1520 19.2150 19.3735 19.4743 19.6105 19.7921 19.9325 19.9859 20.1443 20.1734 20.2328 20.3451 20.4748 20.4926 20.7175 20.8229 21.0034 21.0615 21.1375 21.2560 21.3939 21.4426 21.6095 21.6754 21.7816 21.8647 22.0481 22.1306 22.2752 22.3069 22.4114 22.5222 22.6570 22.8279 23.0469 23.1412 23.2579 23.3228 23.4897 23.5087 23.5887 23.8073 23.8151 24.1053 24.2624 24.3510 24.4812 24.6087 24.6897 24.8235 24.8827 25.0117 25.2236 25.2687 25.3773 25.4742 25.5926 25.6825 25.8026 25.9180 25.9863 26.0644 26.1869 26.3553 26.4972 26.6639 26.7805 26.7912 26.9979 27.0166 27.0750 27.2340 27.3444 27.4504 27.5900 27.6998 27.8205 27.9746 28.0712 28.1717 28.3145 28.4549 28.5347 28.7407 28.8096 28.9032 28.9604 28.9739 29.0696 29.2291 29.2565 29.4544 29.5022 29.6733 29.7361 29.8449 30.0113 30.0983 30.3198 30.4810 30.5420 30.5861 30.7125 30.9248 31.1016 31.2452 31.2840 31.3675 31.5101 31.5569 31.7604 31.8685 31.9795 32.0052 32.1984 32.2063 32.4318 32.4690 32.6281 32.7090 32.8408 32.8788 33.0575 33.1665 33.2951 33.3907 33.4486 33.5579 33.6287 33.7106 33.8367 33.9642 34.0520 34.1551 34.2892 34.5472 34.6773 34.7147 34.8036 34.8358 34.8653 35.0964 35.3393 35.5275 35.6685 35.7235 35.8884 36.0409 36.1456 36.2195 36.2673 36.5368 36.7632 36.7973 36.9215 37.0094 37.1070 37.2455 37.2565 37.4027 37.5450 37.6029 37.6499 37.9353 38.0232 38.1474 38.1804 38.2980 38.3903 38.4888 38.6109 38.7521 38.7925 38.8898 39.0082 39.1059 39.1762 39.3645 39.4310 39.5077 39.6207 39.7013 39.8082 39.9163 40.0731 40.1199 40.2712 40.3022 40.4821 40.5628 40.7747 40.8539 40.9749 41.0905 41.2363 41.3685 41.4738 41.4930 41.7271 41.7549 41.8922 41.9043 42.0371 42.1256 42.3173 42.4406 42.4971 42.6541 42.7872 42.8791 42.9574 43.0990 43.2015 43.2670 43.4614 43.4816 43.6499 43.7440 43.8109 43.9581 44.0316 44.2504 44.3153 44.4182 44.6156 44.6270 44.7666 44.7749 44.9215 45.0056 45.1605 45.3662 45.5134 45.5762 45.7511 45.7893 45.8378 46.0098 46.0862 46.2361 46.4743 46.5621 46.6416 46.8202 46.9175 47.0682 47.1138 47.3091 47.4677 47.5916 47.6599 47.7259 47.9221 48.1369 48.2428 48.3279 48.4117 48.5534 48.6917 48.8524 49.1771 49.3714 49.4524 49.5209 49.6756 49.8735 49.9849 50.2077 50.2445 50.3590 50.4847 50.6414 50.7904 50.8228 51.1426 51.3376 51.6075 51.8309 52.0179 52.2039 52.2958 52.4338 52.7221 52.8782 52.9203 53.0808 53.3004 53.4259 53.6546 53.9017 54.0098 54.5880 54.6976 54.8068 54.8711 55.2065 55.4008 55.4274 55.6073 55.7564 56.3114 56.3404 56.6237 56.8559 56.9954 57.2451 57.4356 57.6532 57.8204 57.9080 58.0637 58.2178 58.3021 58.4178 58.7654 59.0139 59.0705 59.2011 59.3628 59.6007 59.8225 59.9973 60.1492 60.4657 60.6549 60.7912 60.9496 61.0715 61.3158 61.5719 61.7690 62.1492 62.3905 62.5878 62.6677 62.9281 63.1053 63.5812 63.8289 64.1079 64.1807 64.2030 64.5159 64.6163 64.8601 64.9599 65.0790 65.2718 65.4626 65.7970 65.8516 66.1120 66.3728 66.6410 67.0511 67.2794 67.3606 67.4356 67.7218 67.9903 68.0910 68.3894 68.4186 68.6069 68.7943 68.9278 69.2361 69.5101 69.7357 70.0232 70.1192 70.4465 70.6526 70.8665 71.2810 71.5687 71.7009 71.8290 72.2463 72.4688 72.5191 72.6825 72.8653 72.9124 73.1825 73.3287 73.4584 73.8271 73.9258 73.9405 74.2393 74.5599 74.6648 74.7755 74.9988 75.2218 75.3305 75.7288 75.8885 76.1570 76.2646 76.2907 76.4583 76.7136 76.7476 76.9602 77.0879 77.1898 77.2993 77.5450 77.7578 77.8145 78.0049 78.0473 78.1672 78.3902 78.5720 78.6536 78.8001 78.8867 79.0179 79.0922 79.2002 79.2295 79.3534 79.4502 79.5488 79.6500 79.6761 79.9419 80.0805 80.1508 80.2061 80.2574 80.3685 80.4674 80.7874 80.8575 81.0157 81.0668 81.2109 81.3341 81.4365 81.5769 81.6492 81.7635 81.9635 82.2461 82.3014 82.4535 82.5712 82.7121 82.7390 82.9259 82.9598 83.0471 83.2348 83.3707 83.5866 83.7452 83.8493 83.9617 84.1007 84.2525 84.2934 84.3827 84.5257 84.6682 84.8195 84.8532 84.9640 85.0798 85.2459 85.3288 85.3973 85.4344 85.5378 85.6201 85.7895 85.9320 85.9772 86.0727 86.1302 86.2997 86.3423 86.4645 86.5322 86.6564 86.7060 86.8868 87.0079 87.0386 87.1895 87.3462 87.4253 87.5911 87.6457 87.7524 87.8344 87.9805 88.0596 88.1016 88.2793 88.4083 88.5212 88.6269 88.7733 88.8322 88.8821 88.9355 89.0857 89.1618 89.3279 89.4561 89.5463 89.5785 89.7317 89.7901 89.9124 89.9919 90.0457 90.1703 90.2709 90.3723 90.4600 90.5374 90.6098 90.9133 90.9945 91.0476 91.1822 91.2667 91.4015 91.6064 91.7146 91.9845 92.1276 92.3209 92.4076 92.5052 92.6064 92.7092 92.8724 92.9995 93.0626 93.1346 93.1695 93.3523 93.5531 93.6531 93.7015 93.8073 93.9190 94.0099 94.1069 94.1741 94.2922 94.3942 94.4562 94.6481 94.7228 94.8418 94.9281 95.1464 95.2487 95.3031 95.4209 95.4307 95.5492 95.6334 95.6767 95.8490 95.9806 96.1584 96.2909 96.3945 96.5621 96.6239 96.6805 96.8157 96.9596 97.1901 97.3441 97.5080 97.5741 97.6490 97.8133 97.9948 98.0790 98.1772 98.2767 98.2965 98.4271 98.4943 98.6751 98.6792 98.9760 99.0518 99.0910 99.2053 99.2963 99.4893 99.6972 99.7950 99.9506 100.0362 100.0754 100.1869 100.3817 100.4667 100.5630 100.6973 100.7680 100.9086 100.9679 101.0984 101.2870 101.4572 101.5540 101.7068 101.8455 102.0346 102.1339 102.3166 102.5729 102.7435 102.8481 102.9959 103.1956 103.3103 103.3399 103.5161 103.6350 103.7110 103.8293 104.0242 104.1407 104.2050 104.2267 104.4458 104.6725 104.9062 105.0925 105.2505 105.2968 105.4729 105.6062 105.6897 106.0010 106.0210 106.1513 106.2303 106.3306 106.5786 106.6549 106.7319 106.8937 107.0721 107.1455 107.4034 107.4417 107.4983 107.5308 107.5952 107.8270 107.9193 108.0219 108.2379 108.2782 108.4146 108.5036 108.7414 108.7575 108.8904 109.0209 109.1695 109.2350 109.4722 109.5699 109.7845 109.8945 110.0024 110.0869 110.2041 110.3274 110.4285 110.6850 110.7814 111.1361 111.2863 111.4280 111.4593 111.7265 111.7991 111.9267 112.1382 112.1701 112.2670 112.5328 112.6503 112.6783 112.7055 112.8703 113.0833 113.2445 113.4920 113.5051 113.6683 113.8130 113.8512 114.1027 114.3106 114.4271 114.4975 114.5495 114.8359 114.9125 115.0031 115.0939 115.2246 115.3678 115.4493 115.5253 115.6916 115.8808 115.9439 116.0632 116.1542 116.3023 116.3546 116.5637 116.6152 116.7508 116.9111 117.1347 117.1787 117.5413 117.6180 117.6564 117.7277 117.8144 117.9904 118.1211 118.2821 118.3451 118.5109 118.5829 118.6098 118.7335 118.8727 118.9570 118.9595 119.0686 119.1785 119.2816 119.4202 119.5064 119.7278 119.7699 119.8732 119.9908 120.1320 120.3206 120.4511 120.4982 120.5540 120.6149 120.9940 121.0486 121.3779 121.4646 121.6369 121.6972 121.8480 121.8703 122.2150 122.3047 122.3326 122.7985 123.0630 123.1850 123.2258 123.3202 123.4731 123.8110 123.9634 124.3594 124.6413 124.7758 124.9335 125.3955 125.5342 125.8425 125.8869 126.2062 126.4497 126.5415 126.6946 126.8529 126.9214 126.9843 127.1873 127.3958 127.5639 127.7392 127.8326 128.0656 128.1010 128.3537 128.4775 128.6374 128.7876 129.1706 129.3985 129.5167 129.6835 129.9927 130.2835 130.3814 130.7241 130.8143 131.0662 131.1836 131.3935 131.5198 131.6313 131.8139 132.0038 132.0665 132.1894 132.3239 132.4209 132.9616 133.0292 133.1557 133.3465 133.5612 134.0090 134.1846 134.3541 134.5605 134.6985 134.9700 135.1371 135.4514 135.6249 135.7234 135.9173 135.9533 136.1325 136.3202 136.5930 136.7807 136.9464 137.2570 137.7156 137.9336 138.1846 138.4228 138.5818 138.7773 139.1363 139.2007 139.3945 139.4596 139.6256 139.7443 140.0482 140.3095 140.5834 140.6936 141.1403 141.3903 141.5614 141.9058 141.9661 142.0432 142.5121 142.8013 143.0413 143.2040 143.4072 143.4951 143.6710 143.9809 144.0282 144.1552 144.2756 144.6999 144.7599 145.0124 145.3283 145.4071 145.7773 146.0586 146.5275 146.8730 147.0215 147.2442 147.3411 147.8432 147.9302 148.2988 148.3519 148.4663 148.5105 148.6746 149.0583 149.0729 149.2513 149.4394 149.5257 149.7708 150.0521 150.1190 150.2821 150.5004 150.5941 150.6726 150.9118 151.3996 151.4932 151.6569 151.9005 152.2011 152.2546 152.7777 152.9666 153.4565 153.5657 153.8310 153.9886 154.1612 154.4709 154.5299 155.4987 155.8573 156.0891 156.1072 156.3756 156.5906 156.6835 156.8367 157.0304 157.2876 157.4387 157.5778 157.7212 158.0721 158.2383 158.3868 158.5523 158.8549 158.9025 159.4862 159.7127 160.8541 161.4967 161.8516 162.0227 162.3946 162.8443 163.2165 165.1680 165.4517 169.1007 169.4691 169.7831 170.3262 171.9914 172.4699 174.3457 174.7721 176.6167 179.9387 181.1841 183.0389 186.3316 187.4177 187.9363 188.2545 188.7499 189.3300 189.6707 190.2915 190.7473 191.7384 192.4841 192.9802 193.7952 194.9171 196.2385 200.4157 203.2170 203.6189 206.5246 207.4394 208.2798 213.0127 230.1666 236.1625 241.6962 248.3058 249.3129 338.3657 619.3687 621.5554 625.8120 630.5662 631.1362 632.2712 633.0559 633.9303 634.7646 635.0608 635.6040 635.8828 637.2898 637.7571 637.8317 639.0215 639.7565 640.5464 642.7348 643.4652 645.5390 646.6857 654.7730 655.9201 658.6745 1215.1797 1217.4015 1565.1983</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.420727 -0.200411 -0.282705 -0.293722 -0.265476 -0.118280 -0.149847 -0.376560 -0.415140 -0.124783 -0.106747 0.000715 0.122261 -0.234311 -0.327838 0.348921 -0.232274 -0.264688 0.250873 -0.082637 0.101632 0.033363 -0.254767 0.267297 -0.134832 -0.223308 -0.130504 -0.099100 -0.138126 0.066226 0.089608 0.064234 0.088895 0.089413 0.091790 0.094668 0.094099 0.103343 0.100454 0.077170 0.091379 0.108351 0.107308 0.115636 0.112474 0.134381 0.118940 0.122637 0.074302 0.095776 0.079276 0.085805 0.086670 0.119813 0.125305 0.123704 0.123944 0.124666</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5793 9.2004 8.2827 8.2937 6.2655 6.1183 6.1498 6.3766 6.4151 6.1248 6.1067 5.9993 5.8777 6.2343 6.3278 5.6511 6.2323 6.2647 5.7491 6.0826 5.8984 5.9666 6.2548 5.7327 6.1348 6.2233 6.1305 6.0991 6.1381 0.9338 0.9104 0.9358 0.9111 0.9106 0.9082 0.9053 0.9059 0.8967 0.8995 0.9228 0.9086 0.8916 0.8927 0.8844 0.8875 0.8656 0.8811 0.8774 0.9257 0.9042 0.9207 0.9142 0.9133 0.8802 0.8747 0.8763 0.8761 0.8753</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4207 -0.2004 -0.2827 -0.2937 -0.2655 -0.1183 -0.1498 -0.3766 -0.4151 -0.1248 -0.1067 0.0007 0.1223 -0.2343 -0.3278 0.3489 -0.2323 -0.2647 0.2509 -0.0826 0.1016 0.0334 -0.2548 0.2673 -0.1348 -0.2233 -0.1305 -0.0991 -0.1381 0.0662 0.0896 0.0642 0.0889 0.0894 0.0918 0.0947 0.0941 0.1033 0.1005 0.0772 0.0914 0.1084 0.1073 0.1156 0.1125 0.1344 0.1189 0.1226 0.0743 0.0958 0.0793 0.0858 0.0867 0.1198 0.1253 0.1237 0.1239 0.1247</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1803 1.0883 2.1076 2.0923 3.8355 3.8757 3.7841 3.8944 3.9073 3.9046 3.8745 3.7683 3.5726 3.8567 4.0477 3.7601 3.9501 3.9537 3.6830 3.8675 4.0461 3.8446 3.9772 3.6931 3.8514 4.0296 3.9888 3.9388 3.9734 1.0252 1.0161 1.0054 1.0089 1.0126 1.0137 1.0142 1.0133 1.0072 1.0127 1.0099 1.0085 0.9900 0.9941 1.0152 1.0217 1.0050 1.0095 1.0061 0.9883 0.9893 1.0076 1.0065 1.0064 0.9909 1.0152 1.0056 0.9992 1.0002</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1803 1.0883 2.1076 2.0923 3.8355 3.8757 3.7841 3.8944 3.9073 3.9046 3.8745 3.7683 3.5726 3.8567 4.0477 3.7601 3.9501 3.9537 3.6830 3.8675 4.0461 3.8446 3.9772 3.6931 3.8514 4.0296 3.9888 3.9388 3.9734 1.0252 1.0161 1.0054 1.0089 1.0126 1.0137 1.0142 1.0133 1.0072 1.0127 1.0099 1.0085 0.9900 0.9941 1.0152 1.0217 1.0050 1.0095 1.0061 0.9883 0.9893 1.0076 1.0065 1.0064 0.9909 1.0152 1.0056 0.9992 1.0002</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9404 1.0378 0.9770 0.9682 1.0582 1.1164 0.9006 1.0246 0.9295 0.9118 0.9900 0.9794 0.9250 1.0080 0.9940 1.3373 1.2842 0.9726 0.9725 0.9752 0.9777 0.9716 0.9733 0.8888 1.0152 1.0175 1.3990 0.9701 1.4639 0.9847 1.3594 1.3455 1.2928 0.9873 1.3242 1.0093 1.3676 0.9679 1.3946 0.9975 1.3156 1.4629 0.9889 0.9762 0.9700 0.9799 0.9920 0.9898 0.9950 1.3061 1.4229 1.4259 0.9865 1.4516 0.9737 1.4625 0.9667 1.4199 0.9781 0.9788</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.037479661</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086224172986</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-16.85815 16.49028 -0.36787 14.98472 -15.03522 -0.05050 -5.33080 4.92054 -0.41026</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.55335</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.40651</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
