<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.734771"
                        y3="1.81703"
                        z3="0.398784"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.449752"
                        y3="-5.33713"
                        z3="0.499796"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.99825"
                        y3="3.484289"
                        z3="1.306967"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.196888"
                        y3="-3.213976"
                        z3="-0.935677"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.631596"
                        y3="0.391461"
                        z3="-0.844823"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.653766"
                        y3="-0.695178"
                        z3="-0.401542"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.984848"
                        y3="2.422043"
                        z3="0.711819"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.49107"
                        y3="1.195522"
                        z3="2.009979"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.785274"
                        y3="3.216676"
                        z3="-0.300372"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.502142"
                        y3="-1.837965"
                        z3="-1.40948"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.23097"
                        y3="1.972221"
                        z3="1.800809"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.344476"
                        y3="3.274428"
                        z3="-0.183309"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.46394"
                        y3="-2.825441"
                        z3="-0.958417"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.086913"
                        y3="2.343457"
                        z3="1.981632"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.020406"
                        y3="3.663092"
                        z3="-0.024628"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.706092"
                        y3="3.191582"
                        z3="1.064019"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.117325"
                        y3="-2.565202"
                        z3="-1.192607"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.806615"
                        y3="-3.964018"
                        z3="-0.239348"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.872496"
                        y3="-3.403415"
                        z3="-0.702622"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.828225"
                        y3="-4.820599"
                        z3="0.244479"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.500539"
                        y3="-4.529886"
                        z3="0.021442"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.707265"
                        y3="4.294437"
                        z3="0.393058"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.129463"
                        y3="4.416489"
                        z3="0.888703"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.73092"
                        y3="-1.959067"
                        z3="-0.873768"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.305739"
                        y3="-1.004206"
                        z3="0.041955"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.773653"
                        y3="-1.680824"
                        z3="-1.746779"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.927059"
                        y3="0.234674"
                        z3="0.069412"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.390911"
                        y3="-0.440573"
                        z3="-1.702748"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.967908"
                        y3="0.523968"
                        z3="-0.800371"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.627733"
                        y3="-0.034661"
                        z3="-1.008476"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.315974"
                        y3="0.795138"
                        z3="-1.813551"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.964062"
                        y3="-1.118453"
                        z3="0.559194"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.669062"
                        y3="-0.252738"
                        z3="-0.225064"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.95359"
                        y3="0.339138"
                        z3="2.42004"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.499977"
                        y3="1.973714"
                        z3="2.774734"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.524059"
                        y3="0.878556"
                        z3="1.855462"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.83508"
                        y3="4.056873"
                        z3="0.393699"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.393374"
                        y3="3.596971"
                        z3="-1.245112"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.808062"
                        y3="2.8858"
                        z3="-0.488918"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.465124"
                        y3="-2.336574"
                        z3="-1.548081"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.227337"
                        y3="-1.422823"
                        z3="-2.383229"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.678387"
                        y3="1.3089"
                        z3="2.532203"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.881562"
                        y3="3.658136"
                        z3="-1.043849"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.652397"
                        y3="1.9830"
                        z3="2.831968"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.42319"
                        y3="4.326381"
                        z3="-0.754646"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.166883"
                        y3="-1.686032"
                        z3="-1.759483"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.849006"
                        y3="-4.189668"
                        z3="-0.051591"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.090915"
                        y3="-5.708339"
                        z3="0.804457"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.243318"
                        y3="5.28525"
                        z3="0.319246"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.689069"
                        y3="3.847809"
                        z3="-0.608423"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.707631"
                        y3="5.040948"
                        z3="0.20825"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.166018"
                        y3="4.872635"
                        z3="1.877371"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.613992"
                        y3="3.441645"
                        z3="0.945158"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.497842"
                        y3="-1.217349"
                        z3="0.729871"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.0959"
                        y3="-2.438178"
                        z3="-2.449326"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.596977"
                        y3="0.976154"
                        z3="0.783315"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.204601"
                        y3="-0.229112"
                        z3="-2.384161"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.450181"
                        y3="1.492243"
                        z3="-0.770423"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7348,1.817,.3988;1.4498,-5.3371,.4998;1.9983,3.4843,1.307;2.1969,-3.214,-.9357;-3.6316,.3915,-.8448;-2.6538,-.6952,-.4015;-1.9848,2.422,.7118;-4.4911,1.1955,2.01;-4.7853,3.2167,-.3004;-2.5021,-1.838,-1.4095;-1.231,1.9722,1.8008;-1.3445,3.2744,-.1833;-1.4639,-2.8254,-.9584;.0869,2.3435,1.9816;-.0204,3.6631,-.0246;.7061,3.1916,1.064;-.1173,-2.5652,-1.1926;-1.8066,-3.964,-.2393;.8725,-3.4034,-.7026;-.8282,-4.8206,.2445;.5005,-4.5299,.0214;2.7073,4.2944,.3931;4.1295,4.4165,.8887;2.7309,-1.9591,-.8738;2.3057,-1.0042,.042;3.7737,-1.6808,-1.7468;2.9271,.2347,.0694;4.3909,-.4406,-1.7027;3.9679,.524,-.8004;-4.6277,-.0347,-1.0085;-3.316,.7951,-1.8136;-2.9641,-1.1185,.5592;-1.6691,-.2527,-.2251;-3.9536,.3391,2.42;-4.5,1.9737,2.7747;-5.5241,.8786,1.8555;-4.8351,4.0569,.3937;-4.3934,3.597,-1.2451;-5.8081,2.8858,-.4889;-3.4651,-2.3366,-1.5481;-2.2273,-1.4228,-2.3832;-1.6784,1.3089,2.5322;-1.8816,3.6581,-1.0438;.6524,1.983,2.832;.4232,4.3264,-.7546;.1669,-1.686,-1.7595;-2.849,-4.1897,-.0516;-1.0909,-5.7083,.8045;2.2433,5.2852,.3192;2.6891,3.8478,-.6084;4.7076,5.0409,.2082;4.166,4.8726,1.8774;4.614,3.4416,.9452;1.4978,-1.2173,.7299;4.0959,-2.4382,-2.4493;2.597,.9762,.7833;5.2046,-.2291,-2.3842;4.4502,1.4922,-.7704;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2858.1364606478 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.197e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.390 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.396 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.793 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.73477067"
                                 y3="1.8170301"
                                 z3="0.39878383">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.44975165"
                                 y3="-5.33713025"
                                 z3="0.49979575">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.99825007"
                                 y3="3.48428915"
                                 z3="1.30696735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.19688755"
                                 y3="-3.21397629"
                                 z3="-0.93567675">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.63159616"
                                 y3="0.39146109"
                                 z3="-0.84482332">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.65376593"
                                 y3="-0.69517772"
                                 z3="-0.40154201">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.98484834"
                                 y3="2.4220426"
                                 z3="0.71181915">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.49106968"
                                 y3="1.19552218"
                                 z3="2.00997919">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.78527366"
                                 y3="3.21667576"
                                 z3="-0.30037163">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.50214157"
                                 y3="-1.83796529"
                                 z3="-1.4094795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.23097019"
                                 y3="1.97222063"
                                 z3="1.80080925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.34447592"
                                 y3="3.27442766"
                                 z3="-0.18330949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.46394011"
                                 y3="-2.82544091"
                                 z3="-0.95841746">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.08691281"
                                 y3="2.34345669"
                                 z3="1.98163174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.02040594"
                                 y3="3.66309162"
                                 z3="-0.02462805">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.70609219"
                                 y3="3.19158203"
                                 z3="1.06401864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.11732546"
                                 y3="-2.56520175"
                                 z3="-1.19260736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.80661494"
                                 y3="-3.96401843"
                                 z3="-0.23934803">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.87249592"
                                 y3="-3.40341458"
                                 z3="-0.7026216">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.82822509"
                                 y3="-4.82059902"
                                 z3="0.24447943">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.50053923"
                                 y3="-4.52988568"
                                 z3="0.02144152">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.70726483"
                                 y3="4.29443658"
                                 z3="0.39305791">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.12946315"
                                 y3="4.41648934"
                                 z3="0.88870342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.7309203"
                                 y3="-1.95906698"
                                 z3="-0.87376837">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.30573872"
                                 y3="-1.00420559"
                                 z3="0.04195506">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.77365271"
                                 y3="-1.68082445"
                                 z3="-1.74677946">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.92705863"
                                 y3="0.23467435"
                                 z3="0.06941156">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.39091073"
                                 y3="-0.44057349"
                                 z3="-1.70274785">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.96790844"
                                 y3="0.52396816"
                                 z3="-0.80037081">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.62773341"
                                 y3="-0.03466086"
                                 z3="-1.0084763">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.315974"
                                 y3="0.79513836"
                                 z3="-1.81355128">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.96406212"
                                 y3="-1.11845312"
                                 z3="0.55919424">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-1.66906226"
                                 y3="-0.25273793"
                                 z3="-0.22506397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.95359003"
                                 y3="0.33913812"
                                 z3="2.42004009">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.49997739"
                                 y3="1.97371442"
                                 z3="2.77473408">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.52405938"
                                 y3="0.87855615"
                                 z3="1.85546234">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.83508011"
                                 y3="4.05687273"
                                 z3="0.3936985">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.39337428"
                                 y3="3.59697089"
                                 z3="-1.24511209">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.80806197"
                                 y3="2.8858001"
                                 z3="-0.48891778">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.46512421"
                                 y3="-2.33657402"
                                 z3="-1.54808079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.22733691"
                                 y3="-1.42282311"
                                 z3="-2.38322918">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.67838658"
                                 y3="1.3088999"
                                 z3="2.53220287">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.88156177"
                                 y3="3.65813562"
                                 z3="-1.04384887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.65239661"
                                 y3="1.98299981"
                                 z3="2.83196823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.42318983"
                                 y3="4.32638099"
                                 z3="-0.75464593">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.16688265"
                                 y3="-1.6860321"
                                 z3="-1.75948273">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.84900642"
                                 y3="-4.18966833"
                                 z3="-0.05159093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.09091547"
                                 y3="-5.70833905"
                                 z3="0.80445736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.2433179"
                                 y3="5.2852501"
                                 z3="0.31924639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.68906878"
                                 y3="3.84780888"
                                 z3="-0.60842305">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.70763098"
                                 y3="5.0409478"
                                 z3="0.2082498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.16601768"
                                 y3="4.87263456"
                                 z3="1.8773714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.61399223"
                                 y3="3.44164511"
                                 z3="0.94515828">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.49784161"
                                 y3="-1.21734928"
                                 z3="0.72987067">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.09590024"
                                 y3="-2.43817789"
                                 z3="-2.44932641">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.59697736"
                                 y3="0.976154"
                                 z3="0.78331501">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.20460057"
                                 y3="-0.22911248"
                                 z3="-2.38416072">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.45018141"
                                 y3="1.49224263"
                                 z3="-0.77042278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7348,1.817,.3988;1.4498,-5.3371,.4998;1.9983,3.4843,1.307;2.1969,-3.214,-.9357;-3.6316,.3915,-.8448;-2.6538,-.6952,-.4015;-1.9848,2.422,.7118;-4.4911,1.1955,2.01;-4.7853,3.2167,-.3004;-2.5021,-1.838,-1.4095;-1.231,1.9722,1.8008;-1.3445,3.2744,-.1833;-1.4639,-2.8254,-.9584;.0869,2.3435,1.9816;-.0204,3.6631,-.0246;.7061,3.1916,1.064;-.1173,-2.5652,-1.1926;-1.8066,-3.964,-.2393;.8725,-3.4034,-.7026;-.8282,-4.8206,.2445;.5005,-4.5299,.0214;2.7073,4.2944,.3931;4.1295,4.4165,.8887;2.7309,-1.9591,-.8738;2.3057,-1.0042,.042;3.7737,-1.6808,-1.7468;2.9271,.2347,.0694;4.3909,-.4406,-1.7027;3.9679,.524,-.8004;-4.6277,-.0347,-1.0085;-3.316,.7951,-1.8136;-2.9641,-1.1185,.5592;-1.6691,-.2527,-.2251;-3.9536,.3391,2.42;-4.5,1.9737,2.7747;-5.5241,.8786,1.8555;-4.8351,4.0569,.3937;-4.3934,3.597,-1.2451;-5.8081,2.8858,-.4889;-3.4651,-2.3366,-1.5481;-2.2273,-1.4228,-2.3832;-1.6784,1.3089,2.5322;-1.8816,3.6581,-1.0438;.6524,1.983,2.832;.4232,4.3264,-.7546;.1669,-1.686,-1.7595;-2.849,-4.1897,-.0516;-1.0909,-5.7083,.8045;2.2433,5.2853,.3192;2.6891,3.8478,-.6084;4.7076,5.0409,.2082;4.166,4.8726,1.8774;4.614,3.4416,.9452;1.4978,-1.2173,.7299;4.0959,-2.4382,-2.4493;2.597,.9762,.7833;5.2046,-.2291,-2.3842;4.4502,1.4922,-.7704;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.734771"
                        y3="1.81703"
                        z3="0.398784"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.449752"
                        y3="-5.33713"
                        z3="0.499796"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.99825"
                        y3="3.484289"
                        z3="1.306967"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.196888"
                        y3="-3.213976"
                        z3="-0.935677"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.631596"
                        y3="0.391461"
                        z3="-0.844823"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.653766"
                        y3="-0.695178"
                        z3="-0.401542"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.984848"
                        y3="2.422043"
                        z3="0.711819"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.49107"
                        y3="1.195522"
                        z3="2.009979"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.785274"
                        y3="3.216676"
                        z3="-0.300372"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.502142"
                        y3="-1.837965"
                        z3="-1.40948"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.23097"
                        y3="1.972221"
                        z3="1.800809"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.344476"
                        y3="3.274428"
                        z3="-0.183309"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.46394"
                        y3="-2.825441"
                        z3="-0.958417"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.086913"
                        y3="2.343457"
                        z3="1.981632"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.020406"
                        y3="3.663092"
                        z3="-0.024628"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.706092"
                        y3="3.191582"
                        z3="1.064019"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.117325"
                        y3="-2.565202"
                        z3="-1.192607"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.806615"
                        y3="-3.964018"
                        z3="-0.239348"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.872496"
                        y3="-3.403415"
                        z3="-0.702622"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.828225"
                        y3="-4.820599"
                        z3="0.244479"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.500539"
                        y3="-4.529886"
                        z3="0.021442"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.707265"
                        y3="4.294437"
                        z3="0.393058"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.129463"
                        y3="4.416489"
                        z3="0.888703"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.73092"
                        y3="-1.959067"
                        z3="-0.873768"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.305739"
                        y3="-1.004206"
                        z3="0.041955"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.773653"
                        y3="-1.680824"
                        z3="-1.746779"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.927059"
                        y3="0.234674"
                        z3="0.069412"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.390911"
                        y3="-0.440573"
                        z3="-1.702748"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.967908"
                        y3="0.523968"
                        z3="-0.800371"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.627733"
                        y3="-0.034661"
                        z3="-1.008476"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.315974"
                        y3="0.795138"
                        z3="-1.813551"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.964062"
                        y3="-1.118453"
                        z3="0.559194"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.669062"
                        y3="-0.252738"
                        z3="-0.225064"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.95359"
                        y3="0.339138"
                        z3="2.42004"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.499977"
                        y3="1.973714"
                        z3="2.774734"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.524059"
                        y3="0.878556"
                        z3="1.855462"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.83508"
                        y3="4.056873"
                        z3="0.393699"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.393374"
                        y3="3.596971"
                        z3="-1.245112"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.808062"
                        y3="2.8858"
                        z3="-0.488918"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.465124"
                        y3="-2.336574"
                        z3="-1.548081"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.227337"
                        y3="-1.422823"
                        z3="-2.383229"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.678387"
                        y3="1.3089"
                        z3="2.532203"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.881562"
                        y3="3.658136"
                        z3="-1.043849"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.652397"
                        y3="1.9830"
                        z3="2.831968"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.42319"
                        y3="4.326381"
                        z3="-0.754646"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.166883"
                        y3="-1.686032"
                        z3="-1.759483"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.849006"
                        y3="-4.189668"
                        z3="-0.051591"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.090915"
                        y3="-5.708339"
                        z3="0.804457"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.243318"
                        y3="5.28525"
                        z3="0.319246"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.689069"
                        y3="3.847809"
                        z3="-0.608423"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.707631"
                        y3="5.040948"
                        z3="0.20825"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.166018"
                        y3="4.872635"
                        z3="1.877371"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.613992"
                        y3="3.441645"
                        z3="0.945158"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.497842"
                        y3="-1.217349"
                        z3="0.729871"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.0959"
                        y3="-2.438178"
                        z3="-2.449326"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.596977"
                        y3="0.976154"
                        z3="0.783315"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.204601"
                        y3="-0.229112"
                        z3="-2.384161"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.450181"
                        y3="1.492243"
                        z3="-0.770423"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7348,1.817,.3988;1.4498,-5.3371,.4998;1.9983,3.4843,1.307;2.1969,-3.214,-.9357;-3.6316,.3915,-.8448;-2.6538,-.6952,-.4015;-1.9848,2.422,.7118;-4.4911,1.1955,2.01;-4.7853,3.2167,-.3004;-2.5021,-1.838,-1.4095;-1.231,1.9722,1.8008;-1.3445,3.2744,-.1833;-1.4639,-2.8254,-.9584;.0869,2.3435,1.9816;-.0204,3.6631,-.0246;.7061,3.1916,1.064;-.1173,-2.5652,-1.1926;-1.8066,-3.964,-.2393;.8725,-3.4034,-.7026;-.8282,-4.8206,.2445;.5005,-4.5299,.0214;2.7073,4.2944,.3931;4.1295,4.4165,.8887;2.7309,-1.9591,-.8738;2.3057,-1.0042,.042;3.7737,-1.6808,-1.7468;2.9271,.2347,.0694;4.3909,-.4406,-1.7027;3.9679,.524,-.8004;-4.6277,-.0347,-1.0085;-3.316,.7951,-1.8136;-2.9641,-1.1185,.5592;-1.6691,-.2527,-.2251;-3.9536,.3391,2.42;-4.5,1.9737,2.7747;-5.5241,.8786,1.8555;-4.8351,4.0569,.3937;-4.3934,3.597,-1.2451;-5.8081,2.8858,-.4889;-3.4651,-2.3366,-1.5481;-2.2273,-1.4228,-2.3832;-1.6784,1.3089,2.5322;-1.8816,3.6581,-1.0438;.6524,1.983,2.832;.4232,4.3264,-.7546;.1669,-1.686,-1.7595;-2.849,-4.1897,-.0516;-1.0909,-5.7083,.8045;2.2433,5.2852,.3192;2.6891,3.8478,-.6084;4.7076,5.0409,.2082;4.166,4.8726,1.8774;4.614,3.4416,.9452;1.4978,-1.2173,.7299;4.0959,-2.4382,-2.4493;2.597,.9762,.7833;5.2046,-.2291,-2.3842;4.4502,1.4922,-.7704;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05042821</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2858.13646065</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4368.18688886</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7745.35976244</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3377.17287357</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.99912648</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.94869826</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00405714</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999964678217</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999964678217</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999929356435</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.233365500916</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.8160 -674.6070 -524.5460 -524.3224 -281.8885 -281.5544 -281.4948 -281.4848 -281.3534 -279.9999 -279.9000 -279.8709 -279.8361 -279.8219 -279.8092 -279.7740 -279.7681 -279.7184 -279.7107 -279.6889 -279.6493 -279.6401 -279.6333 -279.6079 -279.5710 -279.2274 -279.0771 -278.9701 -278.9607 -145.8776 -100.9396 -100.9324 -100.9249 -36.5384 -32.9466 -32.5856 -27.0233 -26.5867 -26.5570 -25.0611 -24.5892 -24.1591 -23.7015 -23.6336 -23.5989 -23.1152 -22.9552 -22.2647 -21.6264 -21.4917 -20.7429 -20.6747 -19.9099 -19.5609 -19.5210 -19.1777 -18.9377 -18.6814 -17.9415 -17.7859 -17.4901 -16.8437 -16.4995 -16.3537 -16.2401 -15.9878 -15.8089 -15.5140 -15.4132 -15.1310 -14.9349 -14.8308 -14.7330 -14.5475 -14.3543 -14.2710 -14.2163 -14.0843 -13.8974 -13.8590 -13.7631 -13.6750 -13.6516 -13.5028 -13.2941 -13.2299 -13.1571 -12.9832 -12.8596 -12.6604 -12.5348 -12.4497 -12.3809 -12.2240 -12.0962 -11.8133 -11.5815 -11.5563 -11.4748 -11.4083 -10.7080 -10.5553 -10.1973 -9.5355 -9.3990 -9.3231 -8.8647 -8.4063 -8.2882 1.3608 1.5596 1.6608 1.7939 1.9765 2.2213 2.7403 2.9435 3.2630 3.3582 3.5762 3.7206 3.9109 3.9897 4.1458 4.1980 4.2856 4.5037 4.5395 4.6076 4.6384 4.7776 4.7946 4.8974 5.0491 5.1307 5.2517 5.3489 5.4530 5.5335 5.5568 5.7044 5.7362 5.7995 5.8490 6.0528 6.0748 6.1726 6.2923 6.3580 6.4703 6.5078 6.6265 6.7273 6.8207 6.9363 7.0242 7.2634 7.3217 7.3584 7.4707 7.5352 7.5605 7.7691 7.7953 7.8637 7.9766 8.0070 8.0837 8.1570 8.2414 8.5092 8.6844 8.7051 8.7753 8.8381 8.8914 9.0339 9.0657 9.1815 9.3692 9.4992 9.5550 9.7220 9.7547 9.8893 10.0846 10.2093 10.2509 10.3340 10.3963 10.4512 10.5351 10.6153 10.7465 10.8199 10.8526 10.8944 11.1166 11.1455 11.2060 11.2711 11.5381 11.5810 11.6526 11.6999 11.8981 11.9228 11.9951 12.0613 12.1782 12.1957 12.2665 12.4049 12.4274 12.5038 12.6156 12.7000 12.8278 12.9450 12.9819 13.0400 13.1318 13.2733 13.3434 13.3938 13.4879 13.5939 13.6954 13.7501 13.7576 13.7817 13.8867 13.9245 14.0461 14.0926 14.1818 14.2359 14.3770 14.4256 14.4608 14.4930 14.5019 14.6417 14.7439 14.8596 14.8974 14.9686 15.0802 15.1390 15.2560 15.2693 15.4865 15.5595 15.5995 15.7092 15.8105 15.8749 15.9809 16.0164 16.0574 16.1825 16.2556 16.3091 16.4527 16.5431 16.6279 16.6957 16.8916 16.9768 17.1131 17.2340 17.3973 17.5084 17.5474 17.7151 17.9045 18.0436 18.1521 18.1874 18.3360 18.4076 18.5744 18.6789 18.7827 18.9451 18.9980 19.1064 19.1587 19.4467 19.4945 19.5805 19.6878 19.7156 19.9594 20.0764 20.0974 20.1744 20.2520 20.4596 20.5252 20.6490 20.7524 20.7840 20.8481 20.9899 21.0759 21.2859 21.3561 21.5265 21.5533 21.6077 21.7300 21.8422 21.9818 22.0234 22.2438 22.3843 22.4226 22.5094 22.6553 22.7548 22.8609 23.0068 23.1847 23.2791 23.3926 23.4116 23.6952 23.7341 23.8429 23.9578 24.0916 24.1152 24.2395 24.3207 24.5404 24.6313 24.7721 24.8230 24.9224 25.0925 25.1872 25.3048 25.3653 25.5811 25.7704 25.8909 25.9649 26.1137 26.1455 26.2365 26.2874 26.5677 26.6199 26.7749 26.8660 26.9292 27.0978 27.1932 27.2290 27.4681 27.5199 27.5608 27.6842 27.7697 27.9014 28.1090 28.2238 28.2805 28.3913 28.5245 28.6413 28.8660 28.9910 29.1902 29.2260 29.2598 29.3911 29.5170 29.6051 29.6629 29.8330 29.9077 30.0453 30.0558 30.1893 30.2723 30.3371 30.4707 30.5606 30.7142 30.7513 30.9663 31.0930 31.3362 31.4810 31.6140 31.8124 31.8857 31.9500 32.0446 32.0996 32.2675 32.2985 32.3793 32.6110 32.7371 32.8233 32.9705 33.0887 33.2928 33.3416 33.4924 33.5185 33.6706 33.6880 33.7369 33.9032 34.0711 34.1151 34.2235 34.3108 34.4458 34.5691 34.6287 34.8054 34.9269 35.1309 35.2033 35.3083 35.4524 35.6052 35.6364 35.8222 35.8756 36.0755 36.1661 36.2015 36.4842 36.6024 36.7341 36.8798 36.9576 37.0363 37.0841 37.1959 37.3332 37.3821 37.5654 37.9085 37.9289 37.9980 38.1275 38.1644 38.2107 38.3110 38.4479 38.5922 38.6931 38.7955 38.8182 38.9862 39.0823 39.1091 39.2478 39.3430 39.3756 39.4905 39.5810 39.7769 39.8991 39.9245 40.0087 40.0919 40.2907 40.3558 40.5143 40.5656 40.9250 41.0038 41.0429 41.1656 41.3374 41.4454 41.5173 41.6813 41.7914 41.8261 41.9647 42.0924 42.1377 42.1910 42.2090 42.4351 42.4510 42.5593 42.7070 42.8623 42.9650 43.0332 43.1834 43.2410 43.3111 43.4405 43.6061 43.7438 43.8091 43.9459 44.0111 44.2087 44.2278 44.3694 44.4659 44.5866 44.6523 44.7357 44.8824 45.0016 45.1544 45.3399 45.4123 45.4716 45.5992 45.8606 45.9060 46.0016 46.1476 46.2587 46.3205 46.3888 46.4925 46.6526 46.7874 47.0361 47.1269 47.2307 47.3674 47.4878 47.5916 47.8225 47.9646 47.9965 48.1134 48.1463 48.3728 48.5200 48.6183 48.6731 48.8020 49.0485 49.3747 49.5302 49.6024 49.6642 50.0577 50.1711 50.3849 50.5581 50.6013 50.9139 51.0614 51.2238 51.3641 51.4840 51.6005 51.9047 52.0325 52.2741 52.4299 52.4863 52.6192 52.7855 52.8652 52.9775 53.1241 53.3419 53.4970 53.9748 54.4472 54.5187 54.9300 55.0932 55.3065 55.5595 55.7243 55.9430 56.0455 56.1940 56.4416 56.6323 56.8260 56.9050 57.1165 57.2976 57.4919 57.6944 57.7378 57.9641 58.1778 58.3305 58.5922 58.6554 58.7648 59.0961 59.1796 59.2479 59.5389 59.6865 59.8402 60.1741 60.3613 60.5514 60.8859 61.1513 61.3550 61.5977 61.8760 62.0167 62.3930 62.5051 62.9286 63.1036 63.4691 63.5940 63.7019 63.9307 63.9576 64.0210 64.3451 64.7309 64.9269 65.0001 65.1117 65.2638 65.3279 65.6233 65.7685 66.2153 66.5537 66.7481 67.2138 67.4207 67.5852 67.7050 67.7628 67.9660 68.0743 68.3608 68.5579 68.7847 68.8196 68.9595 69.3741 69.4647 69.7920 70.0455 70.2642 70.6970 71.2452 71.5981 71.6595 72.0276 72.1445 72.2221 72.5485 72.6950 72.8611 73.0877 73.1679 73.4179 73.5362 73.8123 74.0412 74.2093 74.2555 74.4887 74.6784 74.9600 75.0324 75.3496 75.3655 75.5910 75.7154 75.8349 76.0203 76.1162 76.3921 76.4843 76.7492 76.8910 76.9656 77.1033 77.3138 77.4748 77.5834 77.7275 77.8836 78.1210 78.2002 78.2772 78.4564 78.5613 78.6708 78.8468 78.9990 79.0469 79.1603 79.2551 79.2944 79.4161 79.4835 79.6011 79.7150 79.7922 79.9182 80.0624 80.1677 80.2354 80.2590 80.3723 80.4765 80.5322 80.5366 80.6504 80.7221 80.7769 81.0292 81.1889 81.3087 81.4540 81.7059 81.9119 81.9667 82.1300 82.2691 82.3059 82.3600 82.5025 82.7244 82.7972 82.8349 83.0420 83.1940 83.3185 83.3937 83.4968 83.6214 83.7401 83.8889 83.9572 84.0617 84.0953 84.2384 84.2519 84.4324 84.5481 84.8195 84.8684 84.9500 85.0419 85.0572 85.1766 85.2681 85.5113 85.5417 85.6290 85.7049 85.8209 85.8483 86.0233 86.1490 86.2239 86.2385 86.3298 86.5931 86.8055 86.8400 86.9412 86.9552 87.1387 87.2660 87.3685 87.4148 87.5346 87.6491 87.7848 87.9669 88.0409 88.1368 88.2811 88.3546 88.5133 88.6218 88.6995 88.7889 88.8675 89.0666 89.0756 89.1869 89.2851 89.4476 89.5722 89.6159 89.6885 89.8710 89.9928 90.0513 90.0938 90.1470 90.2280 90.4403 90.5726 90.6338 90.7188 90.8013 90.8762 90.9676 91.0914 91.3028 91.3998 91.5628 91.5903 91.8653 92.0803 92.1666 92.2827 92.3562 92.4633 92.5411 92.5960 92.6841 92.8311 93.0105 93.0766 93.1477 93.4402 93.4714 93.6187 93.7246 93.7580 93.8075 94.0517 94.1362 94.2558 94.4037 94.5008 94.5718 94.6934 94.7898 94.8784 94.9586 94.9936 95.1175 95.1931 95.2819 95.3713 95.5481 95.6721 95.8337 95.9044 96.0789 96.3727 96.3781 96.4979 96.6323 96.7780 96.8259 96.9192 97.0355 97.2079 97.4187 97.5511 97.7189 97.8250 97.8773 97.9997 98.1167 98.3434 98.5192 98.5823 98.6903 98.8511 98.9462 99.0466 99.1644 99.2202 99.2769 99.4071 99.4122 99.5685 99.7568 99.8888 99.9328 100.0465 100.2198 100.3595 100.3859 100.6202 100.6701 100.8132 100.8998 101.0168 101.1143 101.4354 101.6479 101.7526 101.8242 101.8769 102.1142 102.1786 102.7736 102.9399 102.9637 103.2085 103.3275 103.3906 103.5129 103.5597 103.7550 103.8377 104.1076 104.2141 104.4436 104.5843 104.7927 104.9406 105.0290 105.1304 105.1850 105.3712 105.4703 105.5272 105.5929 105.7106 105.9774 106.0220 106.2906 106.3772 106.5293 106.6272 106.7185 106.7914 106.8817 107.0450 107.1885 107.3238 107.3939 107.4602 107.5796 107.6990 107.8016 107.9560 107.9904 108.1407 108.4339 108.5118 108.6525 108.8481 108.9398 109.1036 109.1826 109.3530 109.4393 109.6116 109.6600 109.8121 109.9693 110.1525 110.2615 110.3966 110.4898 110.5907 110.6697 111.0043 111.1611 111.2728 111.4208 111.4360 111.5906 111.6153 111.7128 111.8546 112.1269 112.3177 112.4148 112.5474 112.6760 112.8184 113.0168 113.3112 113.3527 113.4984 113.5845 113.6776 113.8247 113.9019 114.0481 114.1454 114.2658 114.3158 114.4382 114.5617 114.6260 114.8003 114.9071 114.9949 115.1655 115.2741 115.3495 115.4075 115.5415 115.6450 115.7299 115.9461 115.9614 115.9922 116.1797 116.4392 116.6721 116.7268 117.0738 117.1438 117.2677 117.4456 117.5427 117.8295 117.8651 117.9704 118.0625 118.1399 118.3483 118.3752 118.4933 118.6579 118.7546 118.8433 118.9795 119.0266 119.1101 119.2298 119.3372 119.4400 119.5581 119.6862 119.7161 119.7621 119.9761 120.1538 120.2669 120.2788 120.3323 120.5487 120.7222 120.8118 121.1243 121.2839 121.3390 121.5157 121.7396 121.8091 122.1892 122.2970 122.4107 122.4583 122.8276 122.9592 123.0115 123.4037 123.4932 123.5664 123.7946 123.9721 124.1637 124.4823 125.1395 125.4249 125.8736 125.9133 126.0253 126.4496 126.4712 126.6365 126.7284 126.8843 127.0340 127.1636 127.2429 127.2570 127.3329 127.5508 127.7655 128.0567 128.2282 128.3819 128.7080 128.9241 129.1354 129.2797 129.4828 129.8884 129.9956 130.2622 130.5249 130.5724 130.7649 130.8012 130.9043 131.0407 131.4735 131.6766 131.7540 131.8059 132.0000 132.1784 132.2540 132.4138 132.5207 132.7388 132.9412 133.0713 133.2960 133.4124 133.7887 133.9711 134.1985 134.5548 134.8685 135.1239 135.1416 135.3745 135.5291 135.8931 135.9425 135.9698 136.0748 136.5585 136.6123 137.1894 137.4328 137.7321 137.9640 138.1098 138.2993 138.5416 138.7164 138.8046 138.8866 139.2609 139.4053 139.7006 139.9423 139.9706 140.1524 140.3835 140.8048 140.9456 141.3552 141.6583 141.7485 141.8603 142.1036 142.6785 143.0008 143.0581 143.2511 143.5625 143.6028 143.6838 143.8722 144.0017 144.0675 144.4011 144.5721 144.6676 145.0029 145.1560 145.6305 146.0730 146.3681 146.6700 146.9232 147.3135 147.3317 147.6982 147.8895 147.9382 148.0971 148.2553 148.3233 148.4666 148.5110 148.6369 148.9382 149.1735 149.3751 149.5274 149.7614 149.8248 150.0218 150.0606 150.2164 150.4681 150.6711 150.7483 150.9928 151.2733 151.5515 151.9289 152.1212 152.2873 152.9127 153.2656 153.5187 153.6733 154.0331 154.1749 154.8726 155.0850 155.3270 155.6987 155.8015 156.0554 156.2042 156.4002 156.5843 156.6781 156.9223 157.0855 157.1731 157.3469 157.4784 157.6247 157.7538 157.8464 157.9893 158.4123 158.9636 159.1703 159.7434 160.6812 161.0448 161.6949 161.8391 162.3936 162.8041 163.4623 164.4462 164.8872 169.0731 169.1665 169.5229 170.6994 171.6408 172.8776 174.0794 174.2671 176.5872 179.8329 180.5933 182.7588 186.4427 187.0310 187.4497 188.1861 188.6803 189.1847 189.7878 190.3323 190.5678 191.4677 191.9733 192.7970 193.2004 195.5854 196.3921 200.5980 202.2222 203.7699 206.2815 206.9228 207.9623 213.2375 230.2412 236.2854 241.5651 248.3009 249.3291 338.2596 618.1242 618.7440 621.0775 629.4257 630.3255 631.7981 632.6626 632.7321 634.3184 634.6173 635.2758 635.5623 636.7771 637.2018 637.4592 637.7924 639.6685 639.8317 642.0129 643.6449 644.7023 646.3829 654.1824 655.6898 658.4489 1214.5911 1215.1339 1563.4993</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.445446 -0.193418 -0.292017 -0.293484 -0.231697 -0.129696 -0.158355 -0.398472 -0.414006 -0.092881 -0.025342 -0.099899 0.082890 -0.288092 -0.217503 0.322994 -0.219486 -0.187275 0.177750 -0.143562 0.174679 0.006458 -0.257413 0.270355 -0.174482 -0.217440 -0.088463 -0.099445 -0.167875 0.073782 0.071236 0.082932 0.083580 0.084686 0.107587 0.098009 0.100791 0.085631 0.093717 0.075033 0.079052 0.113888 0.101012 0.120486 0.105257 0.125921 0.109928 0.120590 0.099672 0.088163 0.083116 0.093385 0.081737 0.125839 0.124312 0.143404 0.122379 0.114606</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5546 9.1934 8.2920 8.2935 6.2317 6.1297 6.1584 6.3985 6.4140 6.0929 6.0253 6.0999 5.9171 6.2881 6.2175 5.6770 6.2195 6.1873 5.8222 6.1436 5.8253 5.9935 6.2574 5.7296 6.1745 6.2174 6.0885 6.0994 6.1679 0.9262 0.9288 0.9171 0.9164 0.9153 0.8924 0.9020 0.8992 0.9144 0.9063 0.9250 0.9209 0.8861 0.8990 0.8795 0.8947 0.8741 0.8901 0.8794 0.9003 0.9118 0.9169 0.9066 0.9183 0.8742 0.8757 0.8566 0.8776 0.8854</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4454 -0.1934 -0.2920 -0.2935 -0.2317 -0.1297 -0.1584 -0.3985 -0.4140 -0.0929 -0.0253 -0.0999 0.0829 -0.2881 -0.2175 0.3230 -0.2195 -0.1873 0.1778 -0.1436 0.1747 0.0065 -0.2574 0.2704 -0.1745 -0.2174 -0.0885 -0.0994 -0.1679 0.0738 0.0712 0.0829 0.0836 0.0847 0.1076 0.0980 0.1008 0.0856 0.0937 0.0750 0.0791 0.1139 0.1010 0.1205 0.1053 0.1259 0.1099 0.1206 0.0997 0.0882 0.0831 0.0934 0.0817 0.1258 0.1243 0.1434 0.1224 0.1146</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1849 1.1039 2.0860 2.1208 3.8210 3.8528 3.8039 3.8995 3.9155 3.8354 3.8094 3.9975 3.6641 4.0429 3.9811 3.7858 3.9404 3.9589 3.7566 3.9095 4.0983 3.8390 3.9794 3.7990 3.9525 4.0426 3.8989 3.9779 3.9895 1.0195 1.0184 1.0061 1.0079 1.0142 1.0085 1.0129 1.0109 1.0161 1.0132 1.0137 1.0125 0.9953 1.0009 1.0167 1.0186 1.0089 1.0106 1.0074 0.9895 0.9835 1.0063 1.0069 1.0053 1.0105 1.0139 0.9997 1.0002 1.0013</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1849 1.1039 2.0860 2.1208 3.8210 3.8528 3.8039 3.8995 3.9155 3.8354 3.8094 3.9975 3.6641 4.0429 3.9811 3.7858 3.9404 3.9589 3.7566 3.9095 4.0983 3.8390 3.9794 3.7990 3.9525 4.0426 3.8989 3.9779 3.9895 1.0195 1.0184 1.0061 1.0079 1.0142 1.0085 1.0129 1.0109 1.0161 1.0132 1.0137 1.0125 0.9953 1.0009 1.0167 1.0186 1.0089 1.0106 1.0074 0.9895 0.9835 1.0063 1.0069 1.0053 1.0105 1.0139 0.9997 1.0002 1.0013</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9519 1.0044 0.9734 0.9763 1.1000 1.0875 0.8981 1.0002 0.9689 0.9052 0.9861 0.9847 0.9180 0.9971 1.0020 1.2897 1.3905 0.9758 0.9741 0.9728 0.9749 0.9773 0.9752 0.8489 1.0168 1.0245 1.4759 0.9788 1.4861 0.9575 1.3666 1.3903 1.3486 0.9906 1.3316 0.9598 1.3836 0.9560 1.4149 0.9747 1.3719 1.4504 0.9798 0.9744 0.9728 0.9783 0.9933 0.9927 0.9927 1.3677 1.4118 1.4388 0.9669 1.4513 0.9727 1.4250 0.9491 1.4486 0.9774 0.9749</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.030078079</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.080506293387</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-17.22671 16.76144 -0.46527 33.02433 -31.76965 1.25468 -0.09250 -0.31943 -0.41193</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.40014</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.55887</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
