<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.751864"
                        y3="1.414342"
                        z3="0.314791"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.704223"
                        y3="-3.204249"
                        z3="-2.258773"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.055737"
                        y3="3.079615"
                        z3="0.440962"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.010996"
                        y3="-2.328447"
                        z3="0.320869"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.714618"
                        y3="-0.46461"
                        z3="0.089432"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.17987"
                        y3="-1.197382"
                        z3="1.318891"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.971015"
                        y3="1.998783"
                        z3="0.40301"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.648739"
                        y3="1.862426"
                        z3="1.911277"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.615144"
                        y3="2.217077"
                        z3="-1.155354"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.80175"
                        y3="-2.659114"
                        z3="1.057351"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.238733"
                        y3="2.268079"
                        z3="-0.75834"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.286208"
                        y3="2.114783"
                        z3="1.60947"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.608915"
                        y3="-2.804272"
                        z3="0.152667"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.093899"
                        y3="2.625738"
                        z3="-0.717862"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.056281"
                        y3="2.465052"
                        z3="1.676138"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.762674"
                        y3="2.720962"
                        z3="0.50412"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.339274"
                        y3="-2.461422"
                        z3="0.614691"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.734193"
                        y3="-3.254288"
                        z3="-1.155103"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.77785"
                        y3="-2.590242"
                        z3="-0.190038"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.623487"
                        y3="-3.383212"
                        z3="-1.979453"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.622223"
                        y3="-3.062256"
                        z3="-1.489661"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.854384"
                        y3="3.064379"
                        z3="1.608534"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.239257"
                        y3="1.668313"
                        z3="2.060508"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.796061"
                        y3="-1.382424"
                        z3="-0.27601"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.167119"
                        y3="-1.522913"
                        z3="-0.10986"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.275611"
                        y3="-0.304556"
                        z3="-0.97777"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.021783"
                        y3="-0.582894"
                        z3="-0.66145"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.145414"
                        y3="0.62352"
                        z3="-1.530539"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.517002"
                        y3="0.491204"
                        z3="-1.381512"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.707217"
                        y3="-0.847276"
                        z3="-0.170482"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.075057"
                        y3="-0.669785"
                        z3="-0.776391"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.929522"
                        y3="-1.167468"
                        z3="2.11432"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.300188"
                        y3="-0.680576"
                        z3="1.717222"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.687916"
                        y3="1.530052"
                        z3="1.884363"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.189935"
                        y3="1.402611"
                        z3="2.788092"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.65395"
                        y3="2.941015"
                        z3="2.074247"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.664947"
                        y3="1.923083"
                        z3="-1.203183"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.581242"
                        y3="3.305507"
                        z3="-1.092529"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.160548"
                        y3="1.929925"
                        z3="-2.104871"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.590262"
                        y3="-3.149179"
                        z3="2.011886"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.657687"
                        y3="-3.184983"
                        z3="0.626493"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.71831"
                        y3="2.203155"
                        z3="-1.728717"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.803122"
                        y3="1.930161"
                        z3="2.544594"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.634957"
                        y3="2.842582"
                        z3="-1.630493"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.528479"
                        y3="2.535476"
                        z3="2.646494"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.202421"
                        y3="-2.09916"
                        z3="1.626871"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.710975"
                        y3="-3.519221"
                        z3="-1.539542"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.719776"
                        y3="-3.744617"
                        z3="-2.994585"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.368908"
                        y3="3.622938"
                        z3="2.417089"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.75047"
                        y3="3.623446"
                        z3="1.338426"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.376176"
                        y3="1.058665"
                        z3="2.325836"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.790387"
                        y3="1.143735"
                        z3="1.281837"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.880397"
                        y3="1.73718"
                        z3="2.940444"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.553033"
                        y3="-2.369635"
                        z3="0.442268"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.206287"
                        y3="-0.170529"
                        z3="-1.083359"/>
                  <atom elementType="H"
                        id="a56"
                        x3="6.090272"
                        y3="-0.697879"
                        z3="-0.53411"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.740062"
                        y3="1.465236"
                        z3="-2.074909"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.186183"
                        y3="1.220929"
                        z3="-1.816481"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7519,1.4143,.3148;1.7042,-3.2042,-2.2588;2.0557,3.0796,.441;2.011,-2.3284,.3209;-3.7146,-.4646,.0894;-3.1799,-1.1974,1.3189;-1.971,1.9988,.403;-4.6487,1.8624,1.9113;-4.6151,2.2171,-1.1554;-2.8018,-2.6591,1.0574;-1.2387,2.2681,-.7583;-1.2862,2.1148,1.6095;-1.6089,-2.8043,.1527;.0939,2.6257,-.7179;.0563,2.4651,1.6761;.7627,2.721,.5041;-.3393,-2.4614,.6147;-1.7342,-3.2543,-1.1551;.7779,-2.5902,-.19;-.6235,-3.3832,-1.9795;.6222,-3.0623,-1.4897;2.8544,3.0644,1.6085;3.2393,1.6683,2.0605;2.7961,-1.3824,-.276;4.1671,-1.5229,-.1099;2.2756,-.3046,-.9778;5.0218,-.5829,-.6614;3.1454,.6235,-1.5305;4.517,.4912,-1.3815;-4.7072,-.8473,-.1705;-3.0751,-.6698,-.7764;-3.9295,-1.1675,2.1143;-2.3002,-.6806,1.7172;-5.6879,1.5301,1.8844;-4.1899,1.4026,2.7881;-4.654,2.941,2.0742;-5.6649,1.9231,-1.2032;-4.5812,3.3055,-1.0925;-4.1605,1.9299,-2.1049;-2.5903,-3.1492,2.0119;-3.6577,-3.185,.6265;-1.7183,2.2032,-1.7287;-1.8031,1.9302,2.5446;.635,2.8426,-1.6305;.5285,2.5355,2.6465;-.2024,-2.0992,1.6269;-2.711,-3.5192,-1.5395;-.7198,-3.7446,-2.9946;2.3689,3.6229,2.4171;3.7505,3.6234,1.3384;2.3762,1.0587,2.3258;3.7904,1.1437,1.2818;3.8804,1.7372,2.9404;4.553,-2.3696,.4423;1.2063,-.1705,-1.0834;6.0903,-.6979,-.5341;2.7401,1.4652,-2.0749;5.1862,1.2209,-1.8165;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2986.7034719425 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.985e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.442 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.836 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.75186381"
                                 y3="1.41434193"
                                 z3="0.31479123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.70422346"
                                 y3="-3.20424929"
                                 z3="-2.25877341">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.05573683"
                                 y3="3.07961452"
                                 z3="0.44096163">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.01099582"
                                 y3="-2.32844652"
                                 z3="0.32086939">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.7146185"
                                 y3="-0.46460994"
                                 z3="0.0894323">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.17986964"
                                 y3="-1.19738179"
                                 z3="1.31889058">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.97101527"
                                 y3="1.99878297"
                                 z3="0.40300964">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.6487392"
                                 y3="1.86242564"
                                 z3="1.91127707">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.61514384"
                                 y3="2.2170775"
                                 z3="-1.15535392">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.80174964"
                                 y3="-2.65911384"
                                 z3="1.05735087">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.23873288"
                                 y3="2.26807855"
                                 z3="-0.75833993">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.28620761"
                                 y3="2.11478271"
                                 z3="1.60946998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.60891467"
                                 y3="-2.8042724"
                                 z3="0.1526674">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.09389906"
                                 y3="2.62573808"
                                 z3="-0.71786204">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.05628099"
                                 y3="2.46505178"
                                 z3="1.67613784">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.76267406"
                                 y3="2.72096179"
                                 z3="0.50411974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.33927388"
                                 y3="-2.46142156"
                                 z3="0.61469051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.7341934"
                                 y3="-3.25428776"
                                 z3="-1.15510282">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.7778504"
                                 y3="-2.59024197"
                                 z3="-0.19003752">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.62348725"
                                 y3="-3.38321195"
                                 z3="-1.97945272">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.62222339"
                                 y3="-3.06225644"
                                 z3="-1.48966129">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.85438437"
                                 y3="3.06437941"
                                 z3="1.60853394">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.23925681"
                                 y3="1.66831322"
                                 z3="2.06050788">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.79606071"
                                 y3="-1.38242391"
                                 z3="-0.27601045">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="4.16711923"
                                 y3="-1.52291327"
                                 z3="-0.10985964">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.27561141"
                                 y3="-0.30455614"
                                 z3="-0.97777002">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="5.02178257"
                                 y3="-0.58289384"
                                 z3="-0.66144983">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.14541405"
                                 y3="0.62351978"
                                 z3="-1.5305394">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.51700217"
                                 y3="0.49120388"
                                 z3="-1.38151166">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.70721736"
                                 y3="-0.84727613"
                                 z3="-0.17048167">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.07505691"
                                 y3="-0.66978496"
                                 z3="-0.77639102">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.92952218"
                                 y3="-1.16746764"
                                 z3="2.11432038">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.30018838"
                                 y3="-0.68057572"
                                 z3="1.71722166">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.68791602"
                                 y3="1.53005242"
                                 z3="1.88436254">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.18993505"
                                 y3="1.40261116"
                                 z3="2.78809154">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.6539502"
                                 y3="2.94101476"
                                 z3="2.07424711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.6649472"
                                 y3="1.9230826"
                                 z3="-1.20318274">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.58124168"
                                 y3="3.30550659"
                                 z3="-1.092529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.16054812"
                                 y3="1.92992507"
                                 z3="-2.10487122">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.59026242"
                                 y3="-3.14917875"
                                 z3="2.0118864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.65768657"
                                 y3="-3.18498254"
                                 z3="0.62649257">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.71830992"
                                 y3="2.20315537"
                                 z3="-1.72871735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.80312169"
                                 y3="1.93016096"
                                 z3="2.54459423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.63495714"
                                 y3="2.84258205"
                                 z3="-1.63049343">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.52847916"
                                 y3="2.53547581"
                                 z3="2.64649432">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.20242058"
                                 y3="-2.09915968"
                                 z3="1.62687072">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.71097489"
                                 y3="-3.51922124"
                                 z3="-1.53954173">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.71977603"
                                 y3="-3.74461701"
                                 z3="-2.99458484">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.36890772"
                                 y3="3.62293831"
                                 z3="2.41708903">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.75046986"
                                 y3="3.62344591"
                                 z3="1.33842624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.37617632"
                                 y3="1.0586648"
                                 z3="2.32583639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.79038686"
                                 y3="1.1437346"
                                 z3="1.28183658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.88039704"
                                 y3="1.73718016"
                                 z3="2.94044423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="4.55303338"
                                 y3="-2.36963453"
                                 z3="0.4422677">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.2062872"
                                 y3="-0.17052932"
                                 z3="-1.08335946">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="6.09027215"
                                 y3="-0.69787894"
                                 z3="-0.53411046">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.74006195"
                                 y3="1.46523586"
                                 z3="-2.07490867">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.1861829"
                                 y3="1.22092892"
                                 z3="-1.81648132">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7519,1.4143,.3148;1.7042,-3.2042,-2.2588;2.0557,3.0796,.441;2.011,-2.3284,.3209;-3.7146,-.4646,.0894;-3.1799,-1.1974,1.3189;-1.971,1.9988,.403;-4.6487,1.8624,1.9113;-4.6151,2.2171,-1.1554;-2.8017,-2.6591,1.0574;-1.2387,2.2681,-.7583;-1.2862,2.1148,1.6095;-1.6089,-2.8043,.1527;.0939,2.6257,-.7179;.0563,2.4651,1.6761;.7627,2.721,.5041;-.3393,-2.4614,.6147;-1.7342,-3.2543,-1.1551;.7779,-2.5902,-.19;-.6235,-3.3832,-1.9795;.6222,-3.0623,-1.4897;2.8544,3.0644,1.6085;3.2393,1.6683,2.0605;2.7961,-1.3824,-.276;4.1671,-1.5229,-.1099;2.2756,-.3046,-.9778;5.0218,-.5829,-.6614;3.1454,.6235,-1.5305;4.517,.4912,-1.3815;-4.7072,-.8473,-.1705;-3.0751,-.6698,-.7764;-3.9295,-1.1675,2.1143;-2.3002,-.6806,1.7172;-5.6879,1.5301,1.8844;-4.1899,1.4026,2.7881;-4.654,2.941,2.0742;-5.6649,1.9231,-1.2032;-4.5812,3.3055,-1.0925;-4.1605,1.9299,-2.1049;-2.5903,-3.1492,2.0119;-3.6577,-3.185,.6265;-1.7183,2.2032,-1.7287;-1.8031,1.9302,2.5446;.635,2.8426,-1.6305;.5285,2.5355,2.6465;-.2024,-2.0992,1.6269;-2.711,-3.5192,-1.5395;-.7198,-3.7446,-2.9946;2.3689,3.6229,2.4171;3.7505,3.6234,1.3384;2.3762,1.0587,2.3258;3.7904,1.1437,1.2818;3.8804,1.7372,2.9404;4.553,-2.3696,.4423;1.2063,-.1705,-1.0834;6.0903,-.6979,-.5341;2.7401,1.4652,-2.0749;5.1862,1.2209,-1.8165;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.751864"
                        y3="1.414342"
                        z3="0.314791"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.704223"
                        y3="-3.204249"
                        z3="-2.258773"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.055737"
                        y3="3.079615"
                        z3="0.440962"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.010996"
                        y3="-2.328447"
                        z3="0.320869"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.714618"
                        y3="-0.46461"
                        z3="0.089432"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.17987"
                        y3="-1.197382"
                        z3="1.318891"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.971015"
                        y3="1.998783"
                        z3="0.40301"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.648739"
                        y3="1.862426"
                        z3="1.911277"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.615144"
                        y3="2.217077"
                        z3="-1.155354"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.80175"
                        y3="-2.659114"
                        z3="1.057351"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.238733"
                        y3="2.268079"
                        z3="-0.75834"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.286208"
                        y3="2.114783"
                        z3="1.60947"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.608915"
                        y3="-2.804272"
                        z3="0.152667"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.093899"
                        y3="2.625738"
                        z3="-0.717862"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.056281"
                        y3="2.465052"
                        z3="1.676138"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.762674"
                        y3="2.720962"
                        z3="0.50412"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.339274"
                        y3="-2.461422"
                        z3="0.614691"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.734193"
                        y3="-3.254288"
                        z3="-1.155103"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.77785"
                        y3="-2.590242"
                        z3="-0.190038"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.623487"
                        y3="-3.383212"
                        z3="-1.979453"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.622223"
                        y3="-3.062256"
                        z3="-1.489661"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.854384"
                        y3="3.064379"
                        z3="1.608534"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.239257"
                        y3="1.668313"
                        z3="2.060508"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.796061"
                        y3="-1.382424"
                        z3="-0.27601"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.167119"
                        y3="-1.522913"
                        z3="-0.10986"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.275611"
                        y3="-0.304556"
                        z3="-0.97777"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.021783"
                        y3="-0.582894"
                        z3="-0.66145"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.145414"
                        y3="0.62352"
                        z3="-1.530539"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.517002"
                        y3="0.491204"
                        z3="-1.381512"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.707217"
                        y3="-0.847276"
                        z3="-0.170482"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.075057"
                        y3="-0.669785"
                        z3="-0.776391"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.929522"
                        y3="-1.167468"
                        z3="2.11432"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.300188"
                        y3="-0.680576"
                        z3="1.717222"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.687916"
                        y3="1.530052"
                        z3="1.884363"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.189935"
                        y3="1.402611"
                        z3="2.788092"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.65395"
                        y3="2.941015"
                        z3="2.074247"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.664947"
                        y3="1.923083"
                        z3="-1.203183"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.581242"
                        y3="3.305507"
                        z3="-1.092529"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.160548"
                        y3="1.929925"
                        z3="-2.104871"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.590262"
                        y3="-3.149179"
                        z3="2.011886"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.657687"
                        y3="-3.184983"
                        z3="0.626493"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.71831"
                        y3="2.203155"
                        z3="-1.728717"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.803122"
                        y3="1.930161"
                        z3="2.544594"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.634957"
                        y3="2.842582"
                        z3="-1.630493"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.528479"
                        y3="2.535476"
                        z3="2.646494"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.202421"
                        y3="-2.09916"
                        z3="1.626871"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.710975"
                        y3="-3.519221"
                        z3="-1.539542"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.719776"
                        y3="-3.744617"
                        z3="-2.994585"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.368908"
                        y3="3.622938"
                        z3="2.417089"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.75047"
                        y3="3.623446"
                        z3="1.338426"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.376176"
                        y3="1.058665"
                        z3="2.325836"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.790387"
                        y3="1.143735"
                        z3="1.281837"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.880397"
                        y3="1.73718"
                        z3="2.940444"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.553033"
                        y3="-2.369635"
                        z3="0.442268"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.206287"
                        y3="-0.170529"
                        z3="-1.083359"/>
                  <atom elementType="H"
                        id="a56"
                        x3="6.090272"
                        y3="-0.697879"
                        z3="-0.53411"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.740062"
                        y3="1.465236"
                        z3="-2.074909"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.186183"
                        y3="1.220929"
                        z3="-1.816481"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7519,1.4143,.3148;1.7042,-3.2042,-2.2588;2.0557,3.0796,.441;2.011,-2.3284,.3209;-3.7146,-.4646,.0894;-3.1799,-1.1974,1.3189;-1.971,1.9988,.403;-4.6487,1.8624,1.9113;-4.6151,2.2171,-1.1554;-2.8018,-2.6591,1.0574;-1.2387,2.2681,-.7583;-1.2862,2.1148,1.6095;-1.6089,-2.8043,.1527;.0939,2.6257,-.7179;.0563,2.4651,1.6761;.7627,2.721,.5041;-.3393,-2.4614,.6147;-1.7342,-3.2543,-1.1551;.7779,-2.5902,-.19;-.6235,-3.3832,-1.9795;.6222,-3.0623,-1.4897;2.8544,3.0644,1.6085;3.2393,1.6683,2.0605;2.7961,-1.3824,-.276;4.1671,-1.5229,-.1099;2.2756,-.3046,-.9778;5.0218,-.5829,-.6614;3.1454,.6235,-1.5305;4.517,.4912,-1.3815;-4.7072,-.8473,-.1705;-3.0751,-.6698,-.7764;-3.9295,-1.1675,2.1143;-2.3002,-.6806,1.7172;-5.6879,1.5301,1.8844;-4.1899,1.4026,2.7881;-4.654,2.941,2.0742;-5.6649,1.9231,-1.2032;-4.5812,3.3055,-1.0925;-4.1605,1.9299,-2.1049;-2.5903,-3.1492,2.0119;-3.6577,-3.185,.6265;-1.7183,2.2032,-1.7287;-1.8031,1.9302,2.5446;.635,2.8426,-1.6305;.5285,2.5355,2.6465;-.2024,-2.0992,1.6269;-2.711,-3.5192,-1.5395;-.7198,-3.7446,-2.9946;2.3689,3.6229,2.4171;3.7505,3.6234,1.3384;2.3762,1.0587,2.3258;3.7904,1.1437,1.2818;3.8804,1.7372,2.9404;4.553,-2.3696,.4423;1.2063,-.1705,-1.0834;6.0903,-.6979,-.5341;2.7401,1.4652,-2.0749;5.1862,1.2209,-1.8165;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04796822</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2986.70347194</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4496.75144017</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8002.97013939</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3506.21869923</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00782196</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95985374</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404806</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000290235573</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000290235573</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000580471146</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.240264292513</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7496 -674.7487 -524.5150 -524.0873 -281.9881 -281.5349 -281.4243 -281.3789 -281.1126 -280.0411 -279.9586 -279.8506 -279.8466 -279.7781 -279.7586 -279.7413 -279.7171 -279.6787 -279.6254 -279.5975 -279.5938 -279.5886 -279.5211 -279.5017 -279.2845 -279.1317 -278.9924 -278.9315 -278.9046 -145.8121 -100.8739 -100.8676 -100.8590 -36.6791 -32.9007 -32.3613 -27.0609 -26.5197 -26.4326 -25.0809 -24.2781 -24.1875 -23.6230 -23.5519 -23.4867 -23.0150 -22.9380 -22.2435 -21.5839 -21.5219 -20.6098 -20.5245 -20.1202 -19.6395 -19.5562 -19.2300 -18.7215 -18.5287 -17.9810 -17.4326 -17.3209 -16.9141 -16.3763 -16.2806 -16.0876 -15.9607 -15.5372 -15.5128 -15.1931 -15.0625 -14.9704 -14.8357 -14.6929 -14.6015 -14.3903 -14.2424 -14.1946 -14.1082 -14.0349 -13.9221 -13.6971 -13.5401 -13.4538 -13.3751 -13.3158 -13.1692 -13.1226 -12.9625 -12.8569 -12.6646 -12.5175 -12.3455 -12.2921 -12.0310 -11.7931 -11.7364 -11.6221 -11.4623 -11.4112 -11.1194 -10.6505 -10.4727 -10.1359 -9.3800 -9.3298 -9.2613 -8.9355 -8.3891 -8.2341 1.3974 1.6760 1.6938 1.8431 1.9592 2.2183 2.7864 3.1969 3.3671 3.4423 3.6589 3.7110 3.8161 4.0358 4.1242 4.2150 4.3532 4.4458 4.5800 4.7296 4.7937 4.8296 4.9855 5.0027 5.1095 5.2205 5.3186 5.4361 5.5283 5.6025 5.7157 5.7345 5.7629 5.8733 5.9482 6.0044 6.0701 6.2234 6.4222 6.4515 6.5926 6.6514 6.7496 6.8376 6.8775 7.0216 7.0634 7.2674 7.2980 7.3949 7.4779 7.6774 7.7818 7.9185 7.9698 8.0891 8.1275 8.1823 8.2719 8.3471 8.4657 8.4960 8.6282 8.7754 8.8755 8.9469 9.0008 9.1143 9.3201 9.4385 9.5106 9.5380 9.6456 9.9022 9.9715 10.1102 10.2162 10.2241 10.3251 10.4163 10.5150 10.6491 10.7694 10.8261 10.9703 11.0574 11.1444 11.1782 11.3074 11.3589 11.4944 11.5456 11.6151 11.7075 11.8189 11.9341 12.0245 12.0774 12.2012 12.2808 12.3273 12.3380 12.4270 12.5953 12.6287 12.6799 12.8646 12.9843 13.0481 13.1296 13.1826 13.2178 13.2332 13.3437 13.4464 13.5521 13.5810 13.6218 13.7166 13.7976 13.8311 13.9270 14.0042 14.1193 14.1337 14.2524 14.3114 14.4014 14.4905 14.5807 14.6409 14.6835 14.7175 14.8094 14.8856 15.0525 15.0922 15.1721 15.2424 15.3179 15.3814 15.5099 15.6505 15.7025 15.7646 15.7978 15.9446 16.0157 16.1263 16.2166 16.3050 16.4338 16.5254 16.5875 16.6315 16.6522 16.7680 16.9722 17.0651 17.1580 17.4841 17.5551 17.6422 17.7139 17.7504 17.8994 18.0002 18.1483 18.2155 18.3901 18.4459 18.5104 18.7596 18.8137 18.9084 19.0918 19.2628 19.3562 19.4930 19.5190 19.6182 19.6961 19.8055 19.8855 20.0340 20.1216 20.3583 20.4351 20.5208 20.6562 20.7324 20.8663 20.9790 21.0729 21.1026 21.3228 21.3506 21.4379 21.5729 21.7915 21.8490 22.1364 22.1850 22.2045 22.3068 22.4567 22.5687 22.6129 22.7862 22.9427 23.0146 23.0958 23.3531 23.4576 23.5183 23.5703 23.6939 23.7884 23.9633 24.2012 24.2869 24.3818 24.4347 24.6283 24.6790 24.7015 24.8243 25.0765 25.1447 25.3316 25.4543 25.5022 25.6308 25.7451 25.7496 25.8162 25.9621 26.2308 26.3218 26.4649 26.5426 26.7229 26.7740 26.7821 26.9094 27.0937 27.2289 27.3351 27.3681 27.4990 27.6027 27.6909 27.8466 28.0085 28.1591 28.2299 28.3473 28.4754 28.7053 28.7935 28.9801 29.0545 29.1368 29.3419 29.3860 29.5086 29.7437 29.7970 29.8428 29.9373 30.0985 30.1308 30.2693 30.3431 30.4446 30.5647 30.6606 30.7041 30.9235 30.9783 31.1814 31.2772 31.4284 31.5205 31.5562 31.7944 31.8555 31.9679 32.0428 32.1573 32.3566 32.4109 32.4961 32.6531 32.7606 32.8589 32.9856 33.1429 33.2717 33.3177 33.3660 33.5675 33.6667 33.7187 33.8675 33.9096 34.0254 34.1620 34.2282 34.3020 34.4146 34.6040 34.7881 34.8107 34.8983 34.9934 35.1022 35.3331 35.3974 35.4508 35.6034 35.6607 35.9786 36.1837 36.2618 36.3369 36.5509 36.6892 36.7479 36.7645 37.0367 37.0395 37.1078 37.1598 37.4478 37.4969 37.6433 37.7249 37.7978 37.9546 38.1299 38.1482 38.2317 38.3422 38.3810 38.5122 38.5391 38.6464 38.7700 38.8501 38.9871 39.0532 39.1076 39.1915 39.2846 39.4954 39.6188 39.7180 39.8465 39.9713 40.0679 40.1426 40.2253 40.4774 40.5174 40.6646 40.7881 40.9192 40.9833 41.0181 41.1282 41.3657 41.4497 41.4625 41.6552 41.7687 41.9358 42.0090 42.0716 42.2353 42.4296 42.5352 42.6329 42.6866 42.8776 42.9914 43.0424 43.1489 43.3068 43.3909 43.5201 43.6211 43.7467 43.7581 43.8399 43.9188 44.0511 44.1878 44.3052 44.4429 44.5383 44.6474 44.7784 44.8625 44.9455 45.0259 45.1295 45.3282 45.3641 45.4900 45.6274 45.6941 45.9558 46.0190 46.1093 46.2641 46.5193 46.5761 46.6907 46.8054 46.8959 46.9663 47.1254 47.5851 47.7144 47.7344 47.7821 47.8992 47.9396 48.2038 48.2696 48.3361 48.5714 48.5914 48.6852 48.8735 49.1723 49.2116 49.3422 49.5110 49.6135 49.7767 49.9111 50.1219 50.2969 50.6534 50.6897 50.9012 51.1109 51.1895 51.3559 51.5842 51.6821 51.9497 52.0090 52.1087 52.3609 52.5528 52.6266 52.7465 52.9661 53.0567 53.1847 53.2604 53.4898 53.5666 53.7898 54.0818 54.2708 54.6516 54.9670 55.2386 55.3513 55.7366 55.8318 55.9341 56.1180 56.3501 56.4903 56.6095 56.7480 57.0873 57.2318 57.3113 57.5532 57.6671 58.0153 58.1991 58.3976 58.4804 58.8338 58.9548 58.9774 59.0523 59.4231 59.5242 59.6752 60.0618 60.2311 60.4099 60.5855 60.6977 61.0274 61.2124 61.5656 61.6805 61.8494 62.2642 62.6433 62.8242 62.8927 63.0382 63.3238 63.5662 63.6177 63.7981 64.0317 64.5175 64.5857 64.6691 64.9379 65.0438 65.3728 65.5265 65.6680 65.7024 65.9139 66.1497 66.2924 66.8305 67.0715 67.5887 67.7129 67.9401 67.9720 68.1251 68.2684 68.3740 68.6204 68.7806 68.9165 69.2274 69.6202 69.7469 70.1251 70.2404 70.6778 70.9139 70.9538 71.1119 71.6431 71.7071 72.2975 72.5191 72.6983 72.7930 72.8977 73.1180 73.1932 73.5216 73.7633 73.8845 74.0384 74.1922 74.3847 74.5996 74.6558 74.8919 75.0393 75.2008 75.4354 75.6398 75.7072 75.7684 75.9819 76.2326 76.3927 76.5183 76.6552 76.8689 76.9872 77.1173 77.2386 77.3106 77.7587 77.7881 77.8564 78.0453 78.1878 78.5307 78.6477 78.7118 78.7397 78.8262 78.8891 79.0005 79.0422 79.1488 79.2400 79.4353 79.4950 79.5522 79.6281 79.6504 79.9037 79.9981 80.1264 80.1634 80.2433 80.3405 80.4781 80.7076 80.7635 80.7949 80.8969 81.0386 81.1188 81.3945 81.5641 81.7236 81.8216 81.9771 82.1051 82.3022 82.4303 82.6345 82.6497 82.8395 83.1303 83.2279 83.2763 83.4071 83.5147 83.5459 83.7075 83.8726 84.0613 84.0941 84.1686 84.4404 84.4660 84.5352 84.6466 84.6996 84.8229 84.8945 85.0404 85.1891 85.2921 85.3337 85.4674 85.5570 85.7495 85.7843 85.8615 85.9311 86.1442 86.2335 86.2618 86.4254 86.4540 86.5369 86.6561 86.7405 86.8150 86.9964 87.1167 87.1783 87.2045 87.2844 87.4089 87.4519 87.6871 87.8294 87.9616 88.0760 88.2898 88.3596 88.4181 88.4559 88.5709 88.6083 88.7595 88.8298 88.8372 89.1162 89.1702 89.3052 89.4247 89.4464 89.5906 89.7924 89.8645 90.0051 90.0884 90.2270 90.2547 90.2850 90.4714 90.4782 90.5800 90.7356 90.8345 90.9096 91.0168 91.1442 91.3168 91.4634 91.5227 91.6875 91.7674 91.8061 91.9895 92.0733 92.2267 92.3867 92.5421 92.6562 92.8140 92.8853 93.0284 93.1720 93.3158 93.3688 93.4719 93.5185 93.5997 93.7773 93.7968 93.8715 94.0515 94.1820 94.2548 94.3184 94.4750 94.5592 94.6139 94.8747 94.9485 95.0351 95.1325 95.2223 95.2572 95.3456 95.5046 95.7501 95.8574 96.0313 96.1958 96.2087 96.3263 96.3539 96.4476 96.7244 96.7755 97.0136 97.2018 97.3115 97.4948 97.5860 97.6655 97.7136 97.9750 98.0257 98.1510 98.2432 98.3339 98.4761 98.6446 98.7734 98.8355 98.8907 98.9950 99.1388 99.1729 99.3151 99.3457 99.5037 99.6010 99.6967 99.8195 99.8745 100.1148 100.1478 100.3871 100.4694 100.4931 100.6418 100.8132 100.9324 101.0271 101.2321 101.3093 101.5343 101.7690 101.8533 101.9488 102.1241 102.3835 102.4787 102.5323 102.8188 102.9422 103.0628 103.1777 103.2797 103.5729 103.6850 103.8032 103.8652 104.0229 104.2119 104.2962 104.5129 104.5772 104.7857 104.9664 105.0454 105.1502 105.4175 105.5699 105.6051 105.7237 105.8421 105.9081 105.9909 106.0702 106.2836 106.4426 106.5046 106.6846 106.8558 107.0114 107.2494 107.3507 107.3846 107.5459 107.6919 107.7511 107.9033 107.9514 108.0740 108.2100 108.4549 108.5376 108.7028 108.8739 109.0213 109.0525 109.1631 109.2754 109.4894 109.5565 109.6392 109.8159 109.9449 110.0808 110.2191 110.3526 110.5596 110.7297 110.8835 110.9033 110.9828 111.0683 111.2109 111.2976 111.5551 111.7084 111.7639 112.1083 112.1649 112.2767 112.3493 112.5098 112.6956 112.9106 113.0905 113.1645 113.3274 113.3755 113.5003 113.7054 113.8509 113.9676 114.0833 114.2499 114.2980 114.4917 114.5388 114.6711 114.7903 114.9875 115.0593 115.1287 115.3130 115.3981 115.5955 115.6766 115.7373 115.8687 116.0872 116.1295 116.3519 116.3956 116.5061 116.6597 116.9201 117.0677 117.1473 117.3628 117.5232 117.6376 117.6717 117.8503 117.8988 118.0027 118.1255 118.1551 118.3364 118.4384 118.5432 118.6283 118.7030 118.7793 118.8337 118.9506 119.2145 119.2287 119.2670 119.4145 119.6413 119.6500 119.7857 119.8839 120.0246 120.0988 120.1672 120.2921 120.4976 120.5291 120.6864 120.8663 121.0494 121.0620 121.2714 121.3887 121.4624 121.6423 121.8021 122.1205 122.2236 122.5440 122.8343 123.0903 123.3363 123.3662 123.5288 123.6037 123.7117 123.8504 124.0517 124.2553 124.3473 124.9091 125.1001 125.5631 125.8747 126.1249 126.3134 126.4473 126.5459 126.6898 126.8541 126.9258 127.0385 127.2098 127.3187 127.4386 127.6707 127.7599 127.9576 128.1496 128.3334 128.5089 128.8429 128.8625 129.0989 129.3584 129.5770 129.8885 129.9455 130.2406 130.6547 130.7920 130.8333 131.0107 131.1847 131.3552 131.5357 131.5678 131.9278 132.0100 132.0871 132.2222 132.2568 132.3171 132.8065 132.9203 133.0952 133.2887 133.3677 133.6488 134.0949 134.2670 134.5405 134.8620 134.9306 135.2939 135.4866 135.6753 135.7153 135.7871 136.0352 136.4008 136.5757 136.7548 136.8887 136.9666 137.4712 137.6221 138.0378 138.1343 138.3693 138.7338 138.8571 138.9592 139.1248 139.1667 139.4764 139.6275 139.9029 140.2343 140.3023 140.4933 140.5657 141.2234 141.3586 141.7053 141.7670 142.0048 142.3399 142.7674 143.1374 143.2318 143.3468 143.5046 143.7355 143.8663 143.9059 144.2202 144.5462 144.7659 144.9188 144.9891 145.1202 145.3784 145.4785 146.1210 146.5474 146.8040 146.9642 147.3064 147.3690 147.7617 147.9689 148.3102 148.3831 148.5165 148.6628 148.8532 148.9108 149.0974 149.2570 149.5319 149.5877 149.6838 149.8868 150.0817 150.3414 150.4477 150.7089 150.7812 150.8682 151.3436 151.4785 151.7110 151.7537 151.8875 152.3941 152.7866 153.1011 153.2766 153.4341 153.5501 153.8767 154.4191 154.7314 154.9800 155.1541 155.3059 155.6855 156.0558 156.2416 156.4451 156.5071 156.7131 157.0550 157.1776 157.4497 157.4629 157.6578 157.9128 158.1592 158.4403 158.7807 159.0007 159.4012 159.6746 160.1850 160.4970 161.2138 161.4335 161.6434 162.8542 163.1800 164.1192 164.5478 165.3504 168.2882 169.1280 169.9925 170.6936 171.6837 171.8591 174.7108 175.1785 176.9630 180.4775 181.5858 183.2477 185.9844 187.2890 187.3442 188.1520 188.8484 189.1696 189.8291 190.3722 190.6088 191.8722 192.2490 193.2029 194.1763 195.8627 196.6248 200.3013 201.7399 202.9549 206.6789 206.9826 208.3349 213.0204 230.7546 236.3530 241.6635 248.4545 249.5053 338.7250 618.0911 620.8205 622.8360 629.7309 630.2683 632.0760 632.8657 632.9722 634.4984 634.8538 635.3520 636.0028 636.8943 637.3938 638.1919 638.6007 639.7667 639.9181 642.5204 643.9780 644.7126 647.5711 654.3725 655.8495 658.7282 1213.9850 1215.3995 1565.0547</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.431640 -0.195307 -0.289541 -0.302947 -0.218847 -0.113855 -0.112457 -0.404696 -0.417583 -0.130094 -0.035969 -0.135346 0.047647 -0.337047 -0.220726 0.362971 -0.194095 -0.162047 0.116635 -0.139980 0.245214 0.016932 -0.240558 0.253253 -0.206514 -0.116171 -0.091768 -0.123454 -0.163697 0.075117 0.075895 0.083015 0.063891 0.098810 0.085194 0.108176 0.093634 0.102152 0.086684 0.098117 0.073374 0.104455 0.114663 0.120798 0.106957 0.109626 0.112477 0.122061 0.078083 0.100792 0.085224 0.079658 0.090460 0.119797 0.131495 0.119903 0.116872 0.121028</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5684 9.1953 8.2895 8.3029 6.2188 6.1139 6.1125 6.4047 6.4176 6.1301 6.0360 6.1353 5.9524 6.3370 6.2207 5.6370 6.1941 6.1620 5.8834 6.1400 5.7548 5.9831 6.2406 5.7467 6.2065 6.1162 6.0918 6.1235 6.1637 0.9249 0.9241 0.9170 0.9361 0.9012 0.9148 0.8918 0.9064 0.8978 0.9133 0.9019 0.9266 0.8955 0.8853 0.8792 0.8930 0.8904 0.8875 0.8779 0.9219 0.8992 0.9148 0.9203 0.9095 0.8802 0.8685 0.8801 0.8831 0.8790</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4316 -0.1953 -0.2895 -0.3029 -0.2188 -0.1139 -0.1125 -0.4047 -0.4176 -0.1301 -0.0360 -0.1353 0.0476 -0.3370 -0.2207 0.3630 -0.1941 -0.1620 0.1166 -0.1400 0.2452 0.0169 -0.2406 0.2533 -0.2065 -0.1162 -0.0918 -0.1235 -0.1637 0.0751 0.0759 0.0830 0.0639 0.0988 0.0852 0.1082 0.0936 0.1022 0.0867 0.0981 0.0734 0.1045 0.1147 0.1208 0.1070 0.1096 0.1125 0.1221 0.0781 0.1008 0.0852 0.0797 0.0905 0.1198 0.1315 0.1199 0.1169 0.1210</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1938 1.0984 2.1041 2.0981 3.8054 3.8725 3.7870 3.8973 3.9163 3.8915 3.8702 3.9505 3.6581 4.0419 3.9664 3.7438 3.9886 3.9110 3.8438 3.9396 4.0156 3.8876 3.9124 3.7761 4.0095 3.8378 3.9169 3.9136 3.9543 1.0136 1.0199 1.0070 1.0072 1.0107 1.0125 1.0109 1.0145 1.0111 1.0153 1.0045 1.0118 0.9968 0.9944 1.0132 1.0114 1.0216 1.0102 1.0069 0.9975 0.9946 1.0052 1.0073 1.0169 1.0164 1.0058 1.0001 1.0075 1.0024</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1938 1.0984 2.1041 2.0981 3.8054 3.8725 3.7870 3.8973 3.9163 3.8915 3.8702 3.9505 3.6581 4.0419 3.9664 3.7438 3.9886 3.9110 3.8438 3.9396 4.0156 3.8876 3.9124 3.7761 4.0095 3.8378 3.9169 3.9136 3.9543 1.0136 1.0199 1.0070 1.0072 1.0107 1.0125 1.0109 1.0145 1.0111 1.0153 1.0045 1.0118 0.9968 0.9944 1.0132 1.0114 1.0216 1.0102 1.0069 0.9975 0.9946 1.0052 1.0073 1.0169 1.0164 1.0058 1.0001 1.0075 1.0024</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9450 1.0048 0.9682 0.9740 1.0447 1.1033 0.9201 0.9476 0.9655 0.9083 0.9802 0.9751 0.9299 0.9970 1.0026 1.3283 1.3559 0.9742 0.9752 0.9743 0.9749 0.9757 0.9785 0.8807 1.0137 1.0215 1.4820 0.9760 1.4721 0.9624 1.3683 1.3672 1.3154 1.0000 1.3173 0.9732 1.4407 0.9651 1.4069 0.9835 1.3522 1.4650 0.9775 0.9446 1.0020 0.9835 0.9909 0.9863 0.9917 1.3996 1.3573 1.4533 0.9769 1.3701 0.9649 1.4064 0.9865 1.4450 0.9840 0.9899</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034329162</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.082297384641</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-19.58784 19.16025 -0.42759 17.01039 -16.77409 0.23630 13.51912 -12.97768 0.54144</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.72926</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.85364</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
