<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.816011"
                        y3="1.690192"
                        z3="-0.736599"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.694336"
                        y3="-1.672879"
                        z3="1.035975"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.87752"
                        y3="0.975355"
                        z3="3.982857"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.163765"
                        y3="-2.123384"
                        z3="-1.584863"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.853113"
                        y3="-0.052239"
                        z3="-1.47154"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.382476"
                        y3="-1.113685"
                        z3="-0.496518"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.664214"
                        y3="1.615502"
                        z3="0.743928"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.538984"
                        y3="2.2116"
                        z3="-0.180823"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-2.148348"
                        y3="2.897062"
                        z3="-2.022486"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.636427"
                        y3="-2.452229"
                        z3="-0.569325"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.285237"
                        y3="1.726082"
                        z3="0.591267"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.128567"
                        y3="1.328705"
                        z3="2.031931"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.202616"
                        y3="-2.314081"
                        z3="-0.136808"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.601634"
                        y3="1.5324"
                        z3="1.641091"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-1.268677"
                        y3="1.136023"
                        z3="3.095526"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.110357"
                        y3="1.219957"
                        z3="2.904785"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.170194"
                        y3="-2.325024"
                        z3="-1.063791"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.88367"
                        y3="-2.103715"
                        z3="1.203468"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.146288"
                        y3="-2.108681"
                        z3="-0.677852"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.42464"
                        y3="-1.907321"
                        z3="1.606015"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.43078"
                        y3="-1.897591"
                        z3="0.659645"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.284073"
                        y3="1.040948"
                        z3="3.853102"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.890542"
                        y3="0.736601"
                        z3="5.202829"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.218447"
                        y3="-1.141653"
                        z3="-2.527958"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.053047"
                        y3="-1.375202"
                        z3="-3.614473"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.506166"
                        y3="0.04776"
                        z3="-2.436532"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.17133"
                        y3="-0.41644"
                        z3="-4.606084"/>
                  <atom elementType="C"
                        id="a28"
                        x3="1.632563"
                        y3="0.996309"
                        z3="-3.441631"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.460021"
                        y3="0.773505"
                        z3="-4.530157"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.421043"
                        y3="-0.076016"
                        z3="-2.40588"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.818745"
                        y3="-0.276979"
                        z3="-1.755262"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.444259"
                        y3="-1.286975"
                        z3="-0.686509"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.324678"
                        y3="-0.764545"
                        z3="0.539654"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.986646"
                        y3="1.487869"
                        z3="0.502693"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.523647"
                        y3="3.176137"
                        z3="0.328291"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.213187"
                        y3="2.301696"
                        z3="-1.034202"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-2.030565"
                        y3="3.900412"
                        z3="-1.611726"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-1.176866"
                        y3="2.584042"
                        z3="-2.410001"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-2.821069"
                        y3="2.968303"
                        z3="-2.878695"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.144445"
                        y3="-3.181041"
                        z3="0.068062"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.682786"
                        y3="-2.845069"
                        z3="-1.588015"/>
                  <atom elementType="H"
                        id="a42"
                        x3="0.133542"
                        y3="1.976251"
                        z3="-0.37738"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-3.194039"
                        y3="1.251833"
                        z3="2.218191"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.662863"
                        y3="1.616564"
                        z3="1.451543"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-1.651137"
                        y3="0.911363"
                        z3="4.083261"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.38314"
                        y3="-2.49234"
                        z3="-2.113408"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.668976"
                        y3="-2.084662"
                        z3="1.94843"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.665949"
                        y3="-1.740989"
                        z3="2.647436"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.591185"
                        y3="2.037962"
                        z3="3.515218"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.634336"
                        y3="0.31996"
                        z3="3.104981"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.571259"
                        y3="1.460447"
                        z3="5.951898"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.612026"
                        y3="-0.258916"
                        z3="5.547167"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.977339"
                        y3="0.776706"
                        z3="5.136808"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.604073"
                        y3="-2.304598"
                        z3="-3.672296"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.858727"
                        y3="0.23921"
                        z3="-1.591326"/>
                  <atom elementType="H"
                        id="a56"
                        x3="3.822888"
                        y3="-0.605265"
                        z3="-5.449114"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.075311"
                        y3="1.921635"
                        z3="-3.365015"/>
                  <atom elementType="H"
                        id="a58"
                        x3="2.552235"
                        y3="1.517352"
                        z3="-5.309595"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.816,1.6902,-.7366;2.6943,-1.6729,1.036;.8775,.9754,3.9829;2.1638,-2.1234,-1.5849;-2.8531,-.0522,-1.4715;-3.3825,-1.1137,-.4965;-1.6642,1.6155,.7439;-4.539,2.2116,-.1808;-2.1483,2.8971,-2.0225;-2.6364,-2.4522,-.5693;-.2852,1.7261,.5913;-2.1286,1.3287,2.0319;-1.2026,-2.3141,-.1368;.6016,1.5324,1.6411;-1.2687,1.136,3.0955;.1104,1.22,2.9048;-.1702,-2.325,-1.0638;-.8837,-2.1037,1.2035;1.1463,-2.1087,-.6779;.4246,-1.9073,1.606;1.4308,-1.8976,.6596;2.2841,1.0409,3.8531;2.8905,.7366,5.2028;2.2184,-1.1417,-2.528;3.053,-1.3752,-3.6145;1.5062,.0478,-2.4365;3.1713,-.4164,-4.6061;1.6326,.9963,-3.4416;2.46,.7735,-4.5302;-3.421,-.076,-2.4059;-1.8187,-.277,-1.7553;-4.4443,-1.287,-.6865;-3.3247,-.7645,.5397;-4.9866,1.4879,.5027;-4.5236,3.1761,.3283;-5.2132,2.3017,-1.0342;-2.0306,3.9004,-1.6117;-1.1769,2.584,-2.41;-2.8211,2.9683,-2.8787;-3.1444,-3.181,.0681;-2.6828,-2.8451,-1.588;.1335,1.9763,-.3774;-3.194,1.2518,2.2182;1.6629,1.6166,1.4515;-1.6511,.9114,4.0833;-.3831,-2.4923,-2.1134;-1.669,-2.0847,1.9484;.6659,-1.741,2.6474;2.5912,2.038,3.5152;2.6343,.32,3.105;2.5713,1.4604,5.9519;2.612,-.2589,5.5472;3.9773,.7767,5.1368;3.6041,-2.3046,-3.6723;.8587,.2392,-1.5913;3.8229,-.6053,-5.4491;1.0753,1.9216,-3.365;2.5522,1.5174,-5.3096;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3023.3592255094 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.832e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.389 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.444 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.842 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.81601144"
                                 y3="1.69019198"
                                 z3="-0.73659864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.69433568"
                                 y3="-1.67287865"
                                 z3="1.03597506">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.87751972"
                                 y3="0.97535455"
                                 z3="3.98285721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.163765"
                                 y3="-2.12338375"
                                 z3="-1.58486255">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.85311255"
                                 y3="-0.05223932"
                                 z3="-1.47153967">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.38247567"
                                 y3="-1.11368517"
                                 z3="-0.4965185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.66421418"
                                 y3="1.61550192"
                                 z3="0.74392804">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.5389837"
                                 y3="2.21159999"
                                 z3="-0.18082254">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-2.14834808"
                                 y3="2.89706153"
                                 z3="-2.02248573">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.63642735"
                                 y3="-2.45222892"
                                 z3="-0.56932479">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.2852367"
                                 y3="1.72608181"
                                 z3="0.59126676">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.12856721"
                                 y3="1.32870537"
                                 z3="2.03193115">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.20261597"
                                 y3="-2.31408076"
                                 z3="-0.13680788">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.60163355"
                                 y3="1.53240048"
                                 z3="1.64109079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-1.26867657"
                                 y3="1.13602346"
                                 z3="3.09552599">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.11035665"
                                 y3="1.21995733"
                                 z3="2.90478546">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.17019351"
                                 y3="-2.32502387"
                                 z3="-1.06379148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-0.88367011"
                                 y3="-2.10371492"
                                 z3="1.20346753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.14628758"
                                 y3="-2.10868141"
                                 z3="-0.67785189">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="0.42464038"
                                 y3="-1.90732054"
                                 z3="1.60601461">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.43078026"
                                 y3="-1.89759147"
                                 z3="0.65964537">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.28407341"
                                 y3="1.04094794"
                                 z3="3.85310246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.89054214"
                                 y3="0.7366009"
                                 z3="5.20282875">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.21844718"
                                 y3="-1.14165328"
                                 z3="-2.52795752">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.05304724"
                                 y3="-1.37520189"
                                 z3="-3.61447251">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.50616628"
                                 y3="0.04775997"
                                 z3="-2.43653238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.17132991"
                                 y3="-0.41643994"
                                 z3="-4.60608386">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="1.6325632"
                                 y3="0.99630867"
                                 z3="-3.44163092">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="2.46002144"
                                 y3="0.7735053"
                                 z3="-4.53015711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.42104313"
                                 y3="-0.07601557"
                                 z3="-2.40587953">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.81874478"
                                 y3="-0.27697874"
                                 z3="-1.75526192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.44425933"
                                 y3="-1.2869748"
                                 z3="-0.68650858">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.32467821"
                                 y3="-0.76454517"
                                 z3="0.53965392">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.98664627"
                                 y3="1.48786875"
                                 z3="0.50269342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.52364736"
                                 y3="3.17613707"
                                 z3="0.32829059">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.21318717"
                                 y3="2.30169579"
                                 z3="-1.0342021">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-2.03056486"
                                 y3="3.9004119"
                                 z3="-1.61172595">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-1.17686617"
                                 y3="2.58404175"
                                 z3="-2.41000066">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-2.82106871"
                                 y3="2.96830318"
                                 z3="-2.87869546">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.14444517"
                                 y3="-3.1810412"
                                 z3="0.06806217">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.68278577"
                                 y3="-2.84506913"
                                 z3="-1.58801455">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="0.1335416"
                                 y3="1.97625137"
                                 z3="-0.37738049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-3.19403866"
                                 y3="1.2518325"
                                 z3="2.2181908">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.66286289"
                                 y3="1.61656447"
                                 z3="1.45154283">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-1.65113745"
                                 y3="0.91136251"
                                 z3="4.08326123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.38314033"
                                 y3="-2.49234034"
                                 z3="-2.11340821">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-1.66897579"
                                 y3="-2.08466215"
                                 z3="1.94843049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.66594908"
                                 y3="-1.74098878"
                                 z3="2.64743575">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.59118453"
                                 y3="2.03796236"
                                 z3="3.51521847">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.63433645"
                                 y3="0.3199598"
                                 z3="3.1049806">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.57125868"
                                 y3="1.46044672"
                                 z3="5.9518983">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="2.61202616"
                                 y3="-0.25891602"
                                 z3="5.54716718">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.97733888"
                                 y3="0.7767057"
                                 z3="5.13680813">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.60407318"
                                 y3="-2.30459772"
                                 z3="-3.67229624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="0.85872739"
                                 y3="0.23920994"
                                 z3="-1.59132578">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="3.82288819"
                                 y3="-0.60526548"
                                 z3="-5.44911431">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="1.07531135"
                                 y3="1.92163482"
                                 z3="-3.36501485">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="2.55223524"
                                 y3="1.51735204"
                                 z3="-5.30959511">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.816,1.6902,-.7366;2.6943,-1.6729,1.036;.8775,.9754,3.9829;2.1638,-2.1234,-1.5849;-2.8531,-.0522,-1.4715;-3.3825,-1.1137,-.4965;-1.6642,1.6155,.7439;-4.539,2.2116,-.1808;-2.1483,2.8971,-2.0225;-2.6364,-2.4522,-.5693;-.2852,1.7261,.5913;-2.1286,1.3287,2.0319;-1.2026,-2.3141,-.1368;.6016,1.5324,1.6411;-1.2687,1.136,3.0955;.1104,1.22,2.9048;-.1702,-2.325,-1.0638;-.8837,-2.1037,1.2035;1.1463,-2.1087,-.6779;.4246,-1.9073,1.606;1.4308,-1.8976,.6596;2.2841,1.0409,3.8531;2.8905,.7366,5.2028;2.2184,-1.1417,-2.528;3.053,-1.3752,-3.6145;1.5062,.0478,-2.4365;3.1713,-.4164,-4.6061;1.6326,.9963,-3.4416;2.46,.7735,-4.5302;-3.421,-.076,-2.4059;-1.8187,-.277,-1.7553;-4.4443,-1.287,-.6865;-3.3247,-.7645,.5397;-4.9866,1.4879,.5027;-4.5236,3.1761,.3283;-5.2132,2.3017,-1.0342;-2.0306,3.9004,-1.6117;-1.1769,2.584,-2.41;-2.8211,2.9683,-2.8787;-3.1444,-3.181,.0681;-2.6828,-2.8451,-1.588;.1335,1.9763,-.3774;-3.194,1.2518,2.2182;1.6629,1.6166,1.4515;-1.6511,.9114,4.0833;-.3831,-2.4923,-2.1134;-1.669,-2.0847,1.9484;.6659,-1.741,2.6474;2.5912,2.038,3.5152;2.6343,.32,3.105;2.5713,1.4604,5.9519;2.612,-.2589,5.5472;3.9773,.7767,5.1368;3.6041,-2.3046,-3.6723;.8587,.2392,-1.5913;3.8229,-.6053,-5.4491;1.0753,1.9216,-3.365;2.5522,1.5174,-5.3096;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.816011"
                        y3="1.690192"
                        z3="-0.736599"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.694336"
                        y3="-1.672879"
                        z3="1.035975"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.87752"
                        y3="0.975355"
                        z3="3.982857"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.163765"
                        y3="-2.123384"
                        z3="-1.584863"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.853113"
                        y3="-0.052239"
                        z3="-1.47154"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.382476"
                        y3="-1.113685"
                        z3="-0.496518"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.664214"
                        y3="1.615502"
                        z3="0.743928"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.538984"
                        y3="2.2116"
                        z3="-0.180823"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-2.148348"
                        y3="2.897062"
                        z3="-2.022486"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.636427"
                        y3="-2.452229"
                        z3="-0.569325"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.285237"
                        y3="1.726082"
                        z3="0.591267"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.128567"
                        y3="1.328705"
                        z3="2.031931"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.202616"
                        y3="-2.314081"
                        z3="-0.136808"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.601634"
                        y3="1.5324"
                        z3="1.641091"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-1.268677"
                        y3="1.136023"
                        z3="3.095526"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.110357"
                        y3="1.219957"
                        z3="2.904785"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.170194"
                        y3="-2.325024"
                        z3="-1.063791"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.88367"
                        y3="-2.103715"
                        z3="1.203468"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.146288"
                        y3="-2.108681"
                        z3="-0.677852"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.42464"
                        y3="-1.907321"
                        z3="1.606015"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.43078"
                        y3="-1.897591"
                        z3="0.659645"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.284073"
                        y3="1.040948"
                        z3="3.853102"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.890542"
                        y3="0.736601"
                        z3="5.202829"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.218447"
                        y3="-1.141653"
                        z3="-2.527958"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.053047"
                        y3="-1.375202"
                        z3="-3.614473"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.506166"
                        y3="0.04776"
                        z3="-2.436532"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.17133"
                        y3="-0.41644"
                        z3="-4.606084"/>
                  <atom elementType="C"
                        id="a28"
                        x3="1.632563"
                        y3="0.996309"
                        z3="-3.441631"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.460021"
                        y3="0.773505"
                        z3="-4.530157"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.421043"
                        y3="-0.076016"
                        z3="-2.40588"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.818745"
                        y3="-0.276979"
                        z3="-1.755262"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.444259"
                        y3="-1.286975"
                        z3="-0.686509"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.324678"
                        y3="-0.764545"
                        z3="0.539654"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.986646"
                        y3="1.487869"
                        z3="0.502693"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.523647"
                        y3="3.176137"
                        z3="0.328291"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.213187"
                        y3="2.301696"
                        z3="-1.034202"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-2.030565"
                        y3="3.900412"
                        z3="-1.611726"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-1.176866"
                        y3="2.584042"
                        z3="-2.410001"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-2.821069"
                        y3="2.968303"
                        z3="-2.878695"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.144445"
                        y3="-3.181041"
                        z3="0.068062"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.682786"
                        y3="-2.845069"
                        z3="-1.588015"/>
                  <atom elementType="H"
                        id="a42"
                        x3="0.133542"
                        y3="1.976251"
                        z3="-0.37738"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-3.194039"
                        y3="1.251833"
                        z3="2.218191"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.662863"
                        y3="1.616564"
                        z3="1.451543"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-1.651137"
                        y3="0.911363"
                        z3="4.083261"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.38314"
                        y3="-2.49234"
                        z3="-2.113408"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.668976"
                        y3="-2.084662"
                        z3="1.94843"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.665949"
                        y3="-1.740989"
                        z3="2.647436"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.591185"
                        y3="2.037962"
                        z3="3.515218"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.634336"
                        y3="0.31996"
                        z3="3.104981"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.571259"
                        y3="1.460447"
                        z3="5.951898"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.612026"
                        y3="-0.258916"
                        z3="5.547167"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.977339"
                        y3="0.776706"
                        z3="5.136808"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.604073"
                        y3="-2.304598"
                        z3="-3.672296"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.858727"
                        y3="0.23921"
                        z3="-1.591326"/>
                  <atom elementType="H"
                        id="a56"
                        x3="3.822888"
                        y3="-0.605265"
                        z3="-5.449114"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.075311"
                        y3="1.921635"
                        z3="-3.365015"/>
                  <atom elementType="H"
                        id="a58"
                        x3="2.552235"
                        y3="1.517352"
                        z3="-5.309595"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.816,1.6902,-.7366;2.6943,-1.6729,1.036;.8775,.9754,3.9829;2.1638,-2.1234,-1.5849;-2.8531,-.0522,-1.4715;-3.3825,-1.1137,-.4965;-1.6642,1.6155,.7439;-4.539,2.2116,-.1808;-2.1483,2.8971,-2.0225;-2.6364,-2.4522,-.5693;-.2852,1.7261,.5913;-2.1286,1.3287,2.0319;-1.2026,-2.3141,-.1368;.6016,1.5324,1.6411;-1.2687,1.136,3.0955;.1104,1.22,2.9048;-.1702,-2.325,-1.0638;-.8837,-2.1037,1.2035;1.1463,-2.1087,-.6779;.4246,-1.9073,1.606;1.4308,-1.8976,.6596;2.2841,1.0409,3.8531;2.8905,.7366,5.2028;2.2184,-1.1417,-2.528;3.053,-1.3752,-3.6145;1.5062,.0478,-2.4365;3.1713,-.4164,-4.6061;1.6326,.9963,-3.4416;2.46,.7735,-4.5302;-3.421,-.076,-2.4059;-1.8187,-.277,-1.7553;-4.4443,-1.287,-.6865;-3.3247,-.7645,.5397;-4.9866,1.4879,.5027;-4.5236,3.1761,.3283;-5.2132,2.3017,-1.0342;-2.0306,3.9004,-1.6117;-1.1769,2.584,-2.41;-2.8211,2.9683,-2.8787;-3.1444,-3.181,.0681;-2.6828,-2.8451,-1.588;.1335,1.9763,-.3774;-3.194,1.2518,2.2182;1.6629,1.6166,1.4515;-1.6511,.9114,4.0833;-.3831,-2.4923,-2.1134;-1.669,-2.0847,1.9484;.6659,-1.741,2.6474;2.5912,2.038,3.5152;2.6343,.32,3.105;2.5713,1.4604,5.9519;2.612,-.2589,5.5472;3.9773,.7767,5.1368;3.6041,-2.3046,-3.6723;.8587,.2392,-1.5913;3.8229,-.6053,-5.4491;1.0753,1.9216,-3.365;2.5522,1.5174,-5.3096;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04701636</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3023.35922551</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4533.40624187</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8075.90681166</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3542.50056979</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00773735</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.96072099</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404684</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000340125980</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000340125980</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000680251959</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.241587567648</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7813 -674.7628 -524.5528 -524.2066 -281.9583 -281.5572 -281.4875 -281.3931 -281.1916 -280.0209 -279.9209 -279.8819 -279.8663 -279.8447 -279.8080 -279.8023 -279.7797 -279.7327 -279.6872 -279.6830 -279.6405 -279.6199 -279.6086 -279.5419 -279.5088 -279.1781 -279.0005 -278.9570 -278.9481 -145.8431 -100.9056 -100.8974 -100.8904 -36.6582 -32.9573 -32.4688 -27.0614 -26.6115 -26.4802 -25.0906 -24.4654 -24.1752 -23.6665 -23.6175 -23.5440 -23.0990 -22.9103 -22.2472 -21.6191 -21.5330 -20.6601 -20.6238 -19.9552 -19.6882 -19.4647 -19.3926 -18.8576 -18.5061 -17.9962 -17.6999 -17.4418 -16.8776 -16.4349 -16.3307 -16.2012 -16.0252 -15.7337 -15.6201 -15.5575 -15.0350 -14.9375 -14.8084 -14.7519 -14.5685 -14.3543 -14.2559 -14.1436 -14.1018 -13.9419 -13.8172 -13.6805 -13.6369 -13.6183 -13.4696 -13.3878 -13.1812 -13.1503 -13.0870 -12.7951 -12.6723 -12.5638 -12.3910 -12.3368 -12.2287 -12.0797 -11.6778 -11.6531 -11.4997 -11.3705 -11.3457 -10.6850 -10.4972 -10.1078 -9.5432 -9.3655 -9.3236 -8.8287 -8.4577 -8.2964 1.3221 1.5635 1.6794 1.8356 1.9632 2.1193 2.7789 3.1652 3.2350 3.4826 3.5935 3.7210 3.9404 4.0348 4.2121 4.3292 4.4423 4.4830 4.6367 4.7070 4.7750 4.8669 4.9878 5.0408 5.0940 5.2473 5.2767 5.3995 5.4258 5.4850 5.6004 5.7620 5.8857 5.9102 6.0234 6.0409 6.1060 6.2566 6.3491 6.4906 6.5556 6.6091 6.7091 6.7848 6.8011 6.9548 7.0371 7.1726 7.3960 7.4388 7.5846 7.6656 7.7020 7.8472 7.9316 8.0030 8.0797 8.1729 8.2469 8.3812 8.4379 8.5083 8.6761 8.7245 8.8919 9.0192 9.0439 9.1281 9.2224 9.3677 9.5500 9.6545 9.6998 9.7964 9.9692 10.0607 10.1491 10.2171 10.3245 10.3793 10.5011 10.6298 10.6842 10.7518 10.9252 11.0087 11.0522 11.1585 11.2635 11.3543 11.4415 11.5677 11.6581 11.7747 11.9429 11.9639 12.0245 12.1329 12.1887 12.1976 12.3485 12.3700 12.4371 12.5690 12.6549 12.7087 12.8472 12.9117 12.9807 13.0811 13.1307 13.1890 13.3060 13.3925 13.4655 13.5717 13.6311 13.7074 13.7427 13.8604 13.8779 13.9631 14.0866 14.1303 14.1941 14.2618 14.3486 14.3978 14.5026 14.6325 14.6933 14.8116 14.8594 14.9439 14.9769 15.0779 15.1483 15.2163 15.2737 15.3601 15.4649 15.4830 15.6455 15.7472 15.8254 15.8670 15.9316 16.0827 16.2006 16.3112 16.4164 16.4817 16.5554 16.6372 16.8177 16.8591 16.9875 17.2002 17.2350 17.3381 17.4375 17.5662 17.7061 17.8387 17.9679 18.1161 18.1747 18.2652 18.3792 18.4224 18.6184 18.7896 18.9114 19.0174 19.1071 19.2465 19.4900 19.5520 19.6689 19.7127 19.8478 19.9761 20.0949 20.1635 20.2293 20.3304 20.4491 20.6798 20.7838 20.8476 20.9113 21.1014 21.2458 21.4099 21.4522 21.4894 21.6457 21.7365 21.8135 21.9124 21.9400 22.1056 22.1596 22.2891 22.4421 22.5282 22.6059 22.7162 22.7817 22.9277 23.1050 23.2053 23.2675 23.4538 23.5364 23.6277 23.7333 23.8259 23.9832 24.1783 24.2787 24.3444 24.4834 24.6066 24.7132 24.8671 24.9734 25.0291 25.1901 25.2673 25.3315 25.6029 25.6446 25.7421 25.9051 26.0406 26.1031 26.1830 26.3167 26.3909 26.5211 26.6491 26.8193 26.9023 27.0205 27.1963 27.2552 27.3078 27.5271 27.5840 27.6490 27.8467 27.8771 27.9621 28.0649 28.2051 28.3158 28.5331 28.6201 28.7961 28.8348 28.9261 29.0531 29.2260 29.3693 29.5133 29.5745 29.6452 29.7375 29.7895 29.8457 29.9619 30.0782 30.1664 30.2642 30.4750 30.5155 30.6903 30.7894 30.9359 31.1380 31.2263 31.2929 31.4349 31.5150 31.6764 31.7952 31.9260 32.0124 32.1220 32.2472 32.3145 32.4630 32.5876 32.7368 32.9122 33.0853 33.2453 33.2471 33.3429 33.3856 33.4631 33.6721 33.7423 33.8177 34.0161 34.1593 34.2113 34.2995 34.3831 34.5301 34.6404 34.7185 34.7909 34.9054 34.9726 35.1611 35.2496 35.4103 35.6073 35.6930 35.8625 35.8833 35.9874 36.1250 36.1568 36.4165 36.4794 36.5232 36.8241 36.8984 37.1203 37.2386 37.2726 37.4274 37.4507 37.7503 37.7576 37.8159 37.9787 38.0570 38.1297 38.2973 38.3654 38.5478 38.6469 38.7132 38.8238 38.9707 39.1082 39.1255 39.2739 39.4873 39.6260 39.6766 39.7607 39.8476 39.9364 39.9804 40.1568 40.1992 40.3586 40.4954 40.6294 40.6418 40.7732 40.9358 41.1387 41.2015 41.3829 41.4753 41.4896 41.6014 41.7751 41.8869 41.9260 42.0850 42.1139 42.1843 42.2594 42.4597 42.5390 42.6530 42.7044 42.7969 42.8863 42.9497 43.0685 43.1856 43.3080 43.4249 43.5324 43.5907 43.8227 43.8307 43.9429 44.1404 44.3039 44.4060 44.4846 44.5401 44.7608 44.9655 45.0000 45.1577 45.1767 45.2946 45.3115 45.4771 45.6588 45.8693 46.0736 46.1666 46.2311 46.3595 46.4867 46.5989 46.6971 46.7659 46.9479 46.9690 47.3095 47.4042 47.5660 47.6865 47.8291 47.9212 48.0087 48.1695 48.4209 48.5648 48.7313 48.8119 49.0001 49.0270 49.1787 49.3723 49.4814 49.6059 49.7835 49.8094 49.8622 50.2026 50.3196 50.4854 50.5741 50.8161 50.9852 51.0505 51.1947 51.4331 51.7042 51.8625 52.2587 52.3668 52.5249 52.6949 52.8020 52.8954 53.0159 53.2003 53.4111 53.4820 53.7550 53.9106 54.0883 54.3164 54.5135 54.9413 55.1031 55.3722 55.4518 55.5135 55.8513 56.2322 56.3536 56.5046 56.7926 56.9944 57.1229 57.2216 57.3486 57.5443 57.8434 58.0285 58.0830 58.2947 58.4384 58.5823 58.7746 58.9321 59.0548 59.3287 59.4980 59.6810 59.9755 60.0759 60.1800 60.3503 60.7016 60.7671 61.0326 61.3473 61.4675 61.5241 61.6583 61.9914 62.2882 62.8501 63.0058 63.1450 63.2003 63.3181 63.7196 63.9559 64.0964 64.2336 64.4641 64.7389 64.9498 65.0226 65.4077 65.6902 65.8813 66.2975 66.3277 66.5714 66.6934 66.7491 67.1330 67.3356 67.4874 67.6911 67.8637 68.0229 68.0740 68.2376 68.4509 68.7437 68.9544 69.0394 69.2252 69.4706 69.7442 69.8832 70.2231 70.6047 70.7369 71.3245 71.4007 71.6985 71.8889 72.1241 72.2092 72.5484 72.7177 72.8143 72.8577 73.0377 73.2492 73.4639 73.6635 73.8611 74.0473 74.1666 74.4060 74.6189 74.7911 75.0680 75.2021 75.3430 75.5198 75.7717 75.9283 76.0688 76.2513 76.2971 76.3465 76.6641 76.8357 76.9016 77.0351 77.3289 77.4618 77.7455 77.8675 78.0091 78.1392 78.3075 78.3851 78.4649 78.4866 78.8098 78.8651 78.9783 79.0620 79.1136 79.2525 79.3564 79.4329 79.5498 79.6808 79.7343 79.8268 79.8660 79.9735 80.0406 80.1992 80.2449 80.3063 80.5303 80.6161 80.7958 80.8965 81.1061 81.1813 81.3879 81.4819 81.6846 81.8003 81.8502 82.2582 82.2917 82.4594 82.5616 82.5894 82.7247 82.9173 83.1119 83.1258 83.2687 83.3680 83.4713 83.6447 83.7923 83.8613 83.9315 84.0002 84.1732 84.2454 84.3994 84.4328 84.5836 84.6968 84.7690 84.9358 85.0011 85.1412 85.2903 85.3985 85.5129 85.5776 85.6504 85.6638 85.7922 85.8885 85.9381 86.1343 86.2132 86.2790 86.3358 86.4425 86.6032 86.7754 86.8357 86.9068 87.0302 87.0929 87.2575 87.4399 87.6046 87.6251 87.6791 87.7789 87.8639 87.9813 88.1466 88.2822 88.4520 88.4860 88.5877 88.6810 88.7060 88.8011 88.9367 89.0256 89.1542 89.3910 89.4181 89.4861 89.5098 89.7221 89.7571 89.7988 89.9086 90.0949 90.2305 90.2484 90.3936 90.4708 90.6496 90.7636 90.8668 91.0491 91.0742 91.1805 91.5016 91.5516 91.7205 91.8225 91.9158 91.9591 92.1962 92.2944 92.5734 92.5838 92.7087 92.8349 92.8880 93.0798 93.1328 93.3202 93.3615 93.4285 93.5234 93.7223 93.7503 93.7781 93.8230 94.0494 94.2160 94.3173 94.3970 94.4871 94.5668 94.7161 94.9053 94.9699 95.1407 95.2221 95.2495 95.3646 95.4344 95.4791 95.6659 95.8248 95.9535 96.0340 96.2075 96.4486 96.5221 96.6454 96.6948 96.9577 97.0603 97.1617 97.2602 97.4239 97.5413 97.6559 97.6742 97.9262 98.0449 98.0864 98.1478 98.2598 98.4391 98.4908 98.6089 98.6643 98.9096 99.0122 99.2411 99.3060 99.3906 99.5460 99.6261 99.7841 99.8529 99.8766 100.0145 100.1563 100.2482 100.2832 100.5787 100.6335 100.7657 100.8851 101.0560 101.1693 101.3065 101.3571 101.5336 101.6744 101.7966 101.9530 102.1124 102.2258 102.3700 102.5251 102.7170 102.9139 103.0987 103.2256 103.4055 103.4905 103.5834 103.7759 104.0272 104.1209 104.1936 104.3310 104.4916 104.5439 104.7361 104.9153 105.0937 105.2164 105.3234 105.3700 105.5529 105.6070 105.7187 105.8277 106.0386 106.1525 106.3465 106.3965 106.4855 106.5683 106.7076 106.9499 107.0166 107.1652 107.2510 107.3057 107.4574 107.5359 107.5881 107.7100 107.8737 107.9423 108.2079 108.2874 108.3222 108.4490 108.6274 108.9067 108.9360 109.0515 109.2454 109.4209 109.5297 109.6213 109.6990 109.9334 110.1753 110.1984 110.4229 110.4759 110.5899 110.7769 110.9633 111.1395 111.2601 111.3263 111.3903 111.5016 111.7788 111.7996 111.9586 112.1410 112.2244 112.3349 112.4622 112.6588 112.8249 112.9771 113.3076 113.4741 113.5355 113.6540 113.7747 113.9256 114.1809 114.2917 114.3684 114.4308 114.5160 114.6573 114.8111 114.9389 115.1283 115.1995 115.3947 115.4037 115.5503 115.6427 115.7350 115.8002 115.9147 116.1913 116.2695 116.2916 116.5605 116.6290 116.7544 116.7952 117.0446 117.1269 117.2575 117.3729 117.5177 117.7528 117.8331 117.8606 118.0894 118.2064 118.2999 118.3878 118.4793 118.6003 118.7456 118.7977 118.8898 118.9426 118.9870 119.0986 119.2078 119.3657 119.4185 119.5856 119.7225 119.8791 119.9462 120.0369 120.1011 120.1474 120.3449 120.4745 120.6050 120.7919 120.9625 121.1004 121.3304 121.5263 121.6305 121.6571 121.7813 122.0332 122.1156 122.5410 122.5825 122.6484 123.1003 123.2369 123.3903 123.5326 123.7230 123.8635 124.1481 124.2348 124.3518 124.7493 124.9392 125.2160 125.5292 125.8299 126.0236 126.3331 126.4529 126.6237 126.8680 127.0195 127.1491 127.1684 127.2469 127.5024 127.6279 127.7291 127.8010 127.9803 128.2455 128.5707 128.6864 129.1616 129.2265 129.4207 129.6348 129.9912 130.0801 130.3088 130.3931 130.4430 130.6641 130.9123 131.0422 131.3029 131.5102 131.5786 131.7426 131.8507 131.9625 132.1660 132.2842 132.6060 132.7385 132.8467 133.1525 133.3033 133.6061 133.7122 133.9105 134.0938 134.2026 134.4684 134.7625 134.9420 135.1011 135.3932 135.5512 135.6632 135.9874 136.0337 136.0705 136.6280 136.9081 137.1486 137.6174 137.8160 138.0438 138.2752 138.3851 138.4794 138.6623 138.7978 138.9736 139.1683 139.2386 139.4596 139.7406 139.9565 140.0209 140.2495 140.4915 141.1357 141.1604 141.4481 141.6650 141.7884 142.4006 142.7355 143.1083 143.2612 143.3484 143.4741 143.6468 143.7545 143.8961 144.0688 144.1865 144.2498 144.6208 144.6927 145.0323 145.1648 145.3920 145.7435 146.0830 146.5831 146.8475 146.9960 147.3845 147.5187 147.7207 147.7933 148.0341 148.1027 148.2594 148.3723 148.5184 148.8080 148.9154 149.0341 149.4595 149.8105 149.9071 150.0091 150.1061 150.1814 150.2254 150.6124 150.7352 150.9671 151.1287 151.4633 151.6317 151.6524 152.1046 152.4117 152.6494 153.1152 153.3813 153.4791 153.6273 153.8129 154.1146 154.1889 154.6824 155.3790 155.5989 156.0151 156.1830 156.3473 156.4534 156.6879 156.7889 157.0909 157.2513 157.5235 157.7987 157.9597 158.1761 158.3155 158.6709 158.8093 158.9216 159.0884 159.4927 160.1703 160.6690 161.7853 161.9888 162.3032 163.2846 163.3806 164.4272 164.6522 165.0195 168.1291 169.1203 169.6618 170.1059 171.8335 173.0456 174.2064 175.4316 177.7104 179.8997 181.1926 182.2957 186.1711 186.7808 187.5790 188.5704 188.9583 189.1873 189.6791 190.3996 190.5010 191.4481 192.0730 193.0112 193.0949 195.8056 196.8165 200.2068 201.5037 203.6370 206.6413 207.1462 208.0175 212.8978 230.3598 236.3109 241.7432 248.4919 249.5883 338.6950 619.6401 620.3683 625.1036 630.1649 630.7506 632.2942 633.1759 633.6817 634.4689 635.1284 635.7162 636.1576 637.1564 637.8427 638.4616 639.2658 640.0153 640.1455 642.9035 644.4194 645.1344 646.3970 654.6398 656.3654 658.4446 1214.8788 1215.6211 1565.6831</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.395612 -0.204710 -0.286649 -0.300275 -0.212563 -0.116348 -0.094703 -0.395963 -0.382208 -0.133301 -0.114358 -0.066932 0.115774 -0.219498 -0.269576 0.325331 -0.239183 -0.211035 0.226814 -0.150236 0.203816 0.031098 -0.254474 0.220955 -0.180011 -0.074864 -0.106915 -0.150055 -0.135866 0.089794 0.057231 0.087718 0.055777 0.086374 0.105119 0.096244 0.103009 0.063561 0.096229 0.094298 0.078395 0.100965 0.116088 0.109244 0.111917 0.123906 0.109131 0.128751 0.088369 0.080909 0.086025 0.083987 0.080964 0.123701 0.049373 0.123276 0.127256 0.122712</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.6044 9.2047 8.2866 8.3003 6.2126 6.1163 6.0947 6.3960 6.3822 6.1333 6.1144 6.0669 5.8842 6.2195 6.2696 5.6747 6.2392 6.2110 5.7732 6.1502 5.7962 5.9689 6.2545 5.7790 6.1800 6.0749 6.1069 6.1501 6.1359 0.9102 0.9428 0.9123 0.9442 0.9136 0.8949 0.9038 0.8970 0.9364 0.9038 0.9057 0.9216 0.8990 0.8839 0.8908 0.8881 0.8761 0.8909 0.8712 0.9116 0.9191 0.9140 0.9160 0.9190 0.8763 0.9506 0.8767 0.8727 0.8773</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.3956 -0.2047 -0.2866 -0.3003 -0.2126 -0.1163 -0.0947 -0.3960 -0.3822 -0.1333 -0.1144 -0.0669 0.1158 -0.2195 -0.2696 0.3253 -0.2392 -0.2110 0.2268 -0.1502 0.2038 0.0311 -0.2545 0.2210 -0.1800 -0.0749 -0.1069 -0.1501 -0.1359 0.0898 0.0572 0.0877 0.0558 0.0864 0.1051 0.0962 0.1030 0.0636 0.0962 0.0943 0.0784 0.1010 0.1161 0.1092 0.1119 0.1239 0.1091 0.1288 0.0884 0.0809 0.0860 0.0840 0.0810 0.1237 0.0494 0.1233 0.1273 0.1227</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.2057 1.0861 2.0978 2.1235 3.8080 3.8884 3.7227 3.9115 3.9094 3.8866 3.9675 3.8407 3.5891 3.8896 4.0725 3.7599 4.0023 3.9531 3.7371 3.8515 4.0497 3.8314 3.9846 3.8919 3.9917 3.8365 3.9695 3.9850 3.9805 1.0130 1.0224 1.0112 1.0097 1.0144 1.0100 1.0131 1.0124 1.0241 1.0155 1.0057 1.0110 0.9896 0.9894 1.0185 1.0199 1.0111 1.0139 0.9959 0.9902 0.9923 1.0058 1.0061 1.0072 1.0150 1.0526 0.9987 0.9978 1.0019</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.2057 1.0861 2.0978 2.1235 3.8080 3.8884 3.7227 3.9115 3.9094 3.8866 3.9675 3.8407 3.5891 3.8896 4.0725 3.7599 4.0023 3.9531 3.7371 3.8515 4.0497 3.8314 3.9846 3.8919 3.9917 3.8365 3.9695 3.9850 3.9805 1.0130 1.0224 1.0112 1.0097 1.0144 1.0100 1.0131 1.0124 1.0241 1.0155 1.0057 1.0110 0.9896 0.9894 1.0185 1.0199 1.0111 1.0139 0.9959 0.9902 0.9923 1.0058 1.0061 1.0072 1.0150 1.0526 0.9987 0.9978 1.0019</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9432 0.9852 0.9850 0.9740 1.0580 1.1053 0.8978 0.9272 1.0080 0.9090 0.9785 0.9783 0.9280 0.9978 1.0094 1.3738 1.2776 0.9719 0.9757 0.9763 0.9796 0.9765 0.9773 0.8868 1.0113 1.0191 1.4465 0.9644 1.4893 0.9874 1.3606 1.3544 1.2748 0.9804 1.3550 0.9967 1.3954 0.9802 1.4064 0.9869 1.4380 1.3700 0.9824 0.9792 0.9759 0.9725 0.9944 0.9919 0.9918 1.3993 1.3788 1.4653 0.9688 1.4079 0.9563 1.4202 0.9773 1.4722 0.9536 0.9797</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036037964</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.083054327114</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.92487 18.47281 -0.45206 14.05428 -13.82165 0.23263 0.68571 -0.73908 -0.05337</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.51120</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.29936</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
