<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.567527"
                        y3="1.414145"
                        z3="0.084719"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.820692"
                        y3="-3.608993"
                        z3="-1.470569"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.130226"
                        y3="1.940546"
                        z3="2.071523"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.884163"
                        y3="-1.622959"
                        z3="0.404675"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.758352"
                        y3="-0.193634"
                        z3="-0.901619"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-4.087048"
                        y3="-1.443686"
                        z3="-0.08406"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.804999"
                        y3="1.61021"
                        z3="0.712873"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.760794"
                        y3="1.428488"
                        z3="1.537775"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.935967"
                        y3="2.858214"
                        z3="-1.066971"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.989924"
                        y3="-1.883704"
                        z3="0.885397"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.461223"
                        y3="1.543177"
                        z3="2.065586"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.761329"
                        y3="1.815495"
                        z3="-0.18887"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.708883"
                        y3="-2.31572"
                        z3="0.222497"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.149716"
                        y3="1.66271"
                        z3="2.494606"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.559265"
                        y3="1.950557"
                        z3="0.216583"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.876291"
                        y3="1.862909"
                        z3="1.570193"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.493158"
                        y3="-1.730961"
                        z3="0.567378"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.707435"
                        y3="-3.331252"
                        z3="-0.732238"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.693557"
                        y3="-2.163547"
                        z3="-0.003097"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.527363"
                        y3="-3.769609"
                        z3="-1.314972"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.663927"
                        y3="-3.188556"
                        z3="-0.936466"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.198412"
                        y3="2.388318"
                        z3="1.239601"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.161713"
                        y3="3.879187"
                        z3="0.987804"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.668779"
                        y3="-0.97156"
                        z3="-0.515886"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.157722"
                        y3="-0.403287"
                        z3="-1.675249"/>
                  <atom elementType="C"
                        id="a26"
                        x3="4.018899"
                        y3="-0.865589"
                        z3="-0.208955"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.015849"
                        y3="0.278786"
                        z3="-2.528009"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.861613"
                        y3="-0.178337"
                        z3="-1.069475"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.366956"
                        y3="0.395399"
                        z3="-2.233623"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.561172"
                        y3="-0.030229"
                        z3="-1.629627"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.855568"
                        y3="-0.356798"
                        z3="-1.501491"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.319808"
                        y3="-2.273961"
                        z3="-0.757299"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.99908"
                        y3="-1.273392"
                        z3="0.49442"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.791818"
                        y3="1.327465"
                        z3="1.191884"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.575203"
                        y3="0.614574"
                        z3="2.241382"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.698729"
                        y3="2.364236"
                        z3="2.096829"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.954894"
                        y3="2.803887"
                        z3="-1.456657"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.831219"
                        y3="3.815748"
                        z3="-0.553534"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.261709"
                        y3="2.873262"
                        z3="-1.925898"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.772831"
                        y3="-1.086004"
                        z3="1.599577"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.372973"
                        y3="-2.7192"
                        z3="1.478543"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.229333"
                        y3="1.389862"
                        z3="2.815105"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.964571"
                        y3="1.879123"
                        z3="-1.252622"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.08607"
                        y3="1.602138"
                        z3="3.549896"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.319659"
                        y3="2.115756"
                        z3="-0.533494"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.45926"
                        y3="-0.936713"
                        z3="1.304204"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.636996"
                        y3="-3.804874"
                        z3="-1.021615"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.529726"
                        y3="-4.567076"
                        z3="-2.047296"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.223054"
                        y3="1.830904"
                        z3="0.300042"/>
                  <atom elementType="H"
                        id="a50"
                        x3="4.102959"
                        y3="2.12383"
                        z3="1.786453"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.17854"
                        y3="4.438953"
                        z3="1.922903"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.04284"
                        y3="4.164675"
                        z3="0.412668"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.284612"
                        y3="4.186526"
                        z3="0.418622"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.104064"
                        y3="-0.46741"
                        z3="-1.915364"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.403615"
                        y3="-1.311051"
                        z3="0.699748"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.615996"
                        y3="0.725746"
                        z3="-3.42902"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.91282"
                        y3="-0.096133"
                        z3="-0.826482"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.02785"
                        y3="0.92797"
                        z3="-2.904241"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5675,1.4141,.0847;1.8207,-3.609,-1.4706;2.1302,1.9405,2.0715;1.8842,-1.623,.4047;-3.7584,-.1936,-.9016;-4.087,-1.4437,-.0841;-1.805,1.6102,.7129;-4.7608,1.4285,1.5378;-3.936,2.8582,-1.067;-2.9899,-1.8837,.8854;-1.4612,1.5432,2.0656;-.7613,1.8155,-.1889;-1.7089,-2.3157,.2225;-.1497,1.6627,2.4946;.5593,1.9506,.2166;.8763,1.8629,1.5702;-.4932,-1.731,.5674;-1.7074,-3.3313,-.7322;.6936,-2.1635,-.0031;-.5274,-3.7696,-1.315;.6639,-3.1886,-.9365;3.1984,2.3883,1.2396;3.1617,3.8792,.9878;2.6688,-.9716,-.5159;2.1577,-.4033,-1.6752;4.0189,-.8656,-.209;3.0158,.2788,-2.528;4.8616,-.1783,-1.0695;4.367,.3954,-2.2336;-4.5612,-.0302,-1.6296;-2.8556,-.3568,-1.5015;-4.3198,-2.274,-.7573;-4.9991,-1.2734,.4944;-5.7918,1.3275,1.1919;-4.5752,.6146,2.2414;-4.6987,2.3642,2.0968;-4.9549,2.8039,-1.4567;-3.8312,3.8157,-.5535;-3.2617,2.8733,-1.9259;-2.7728,-1.086,1.5996;-3.373,-2.7192,1.4785;-2.2293,1.3899,2.8151;-.9646,1.8791,-1.2526;.0861,1.6021,3.5499;1.3197,2.1158,-.5335;-.4593,-.9367,1.3042;-2.637,-3.8049,-1.0216;-.5297,-4.5671,-2.0473;3.2231,1.8309,.3;4.103,2.1238,1.7865;3.1785,4.439,1.9229;4.0428,4.1647,.4127;2.2846,4.1865,.4186;1.1041,-.4674,-1.9154;4.4036,-1.3111,.6997;2.616,.7257,-3.429;5.9128,-.0961,-.8265;5.0278,.928,-2.9042;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3031.9931708747 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.375e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.429 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.821 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.56752705"
                                 y3="1.41414543"
                                 z3="0.08471868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.82069237"
                                 y3="-3.60899347"
                                 z3="-1.47056947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.13022608"
                                 y3="1.94054595"
                                 z3="2.07152308">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.88416276"
                                 y3="-1.62295854"
                                 z3="0.40467534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.75835192"
                                 y3="-0.19363417"
                                 z3="-0.90161928">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-4.08704787"
                                 y3="-1.44368591"
                                 z3="-0.08405975">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.80499903"
                                 y3="1.6102099"
                                 z3="0.71287252">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.76079406"
                                 y3="1.42848775"
                                 z3="1.53777468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.93596747"
                                 y3="2.8582143"
                                 z3="-1.06697093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.9899242"
                                 y3="-1.8837042"
                                 z3="0.88539713">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.46122265"
                                 y3="1.54317684"
                                 z3="2.06558612">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.7613294"
                                 y3="1.81549544"
                                 z3="-0.18887017">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.70888308"
                                 y3="-2.31571967"
                                 z3="0.22249701">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.14971607"
                                 y3="1.66271022"
                                 z3="2.49460646">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.55926532"
                                 y3="1.95055719"
                                 z3="0.21658325">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.87629088"
                                 y3="1.86290879"
                                 z3="1.57019275">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.49315789"
                                 y3="-1.73096108"
                                 z3="0.56737831">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.70743521"
                                 y3="-3.33125155"
                                 z3="-0.73223807">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.69355704"
                                 y3="-2.16354705"
                                 z3="-0.00309729">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.5273628"
                                 y3="-3.76960859"
                                 z3="-1.31497198">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.66392742"
                                 y3="-3.18855619"
                                 z3="-0.93646559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.19841178"
                                 y3="2.38831794"
                                 z3="1.23960086">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.16171269"
                                 y3="3.87918698"
                                 z3="0.98780395">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.66877914"
                                 y3="-0.97155984"
                                 z3="-0.51588614">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.1577217"
                                 y3="-0.40328685"
                                 z3="-1.6752494">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="4.01889853"
                                 y3="-0.8655889"
                                 z3="-0.2089554">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.01584873"
                                 y3="0.2787863"
                                 z3="-2.5280093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.86161325"
                                 y3="-0.17833735"
                                 z3="-1.06947526">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.3669556"
                                 y3="0.39539869"
                                 z3="-2.23362292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.56117161"
                                 y3="-0.03022876"
                                 z3="-1.62962655">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.85556797"
                                 y3="-0.35679814"
                                 z3="-1.50149063">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.31980816"
                                 y3="-2.27396132"
                                 z3="-0.75729893">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.99907962"
                                 y3="-1.27339196"
                                 z3="0.49442012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.79181776"
                                 y3="1.32746457"
                                 z3="1.19188365">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.57520282"
                                 y3="0.61457419"
                                 z3="2.24138161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.6987285"
                                 y3="2.36423557"
                                 z3="2.0968295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.95489381"
                                 y3="2.80388687"
                                 z3="-1.4566573">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.83121916"
                                 y3="3.81574756"
                                 z3="-0.5535338">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-3.26170901"
                                 y3="2.87326163"
                                 z3="-1.92589847">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.77283084"
                                 y3="-1.08600409"
                                 z3="1.59957747">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.3729735"
                                 y3="-2.71919996"
                                 z3="1.47854337">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.22933342"
                                 y3="1.38986183"
                                 z3="2.81510524">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.96457145"
                                 y3="1.87912324"
                                 z3="-1.25262232">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.08607048"
                                 y3="1.60213811"
                                 z3="3.54989631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.31965944"
                                 y3="2.11575609"
                                 z3="-0.53349434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.45925988"
                                 y3="-0.9367133"
                                 z3="1.3042044">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.63699612"
                                 y3="-3.80487387"
                                 z3="-1.02161462">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.52972554"
                                 y3="-4.56707575"
                                 z3="-2.04729551">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.22305356"
                                 y3="1.83090374"
                                 z3="0.30004219">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="4.10295899"
                                 y3="2.12383039"
                                 z3="1.78645285">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="3.17853986"
                                 y3="4.43895341"
                                 z3="1.92290278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.04283963"
                                 y3="4.16467537"
                                 z3="0.41266844">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.2846119"
                                 y3="4.18652648"
                                 z3="0.41862177">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.10406431"
                                 y3="-0.46741018"
                                 z3="-1.91536376">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.40361467"
                                 y3="-1.3110507"
                                 z3="0.69974793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.61599603"
                                 y3="0.72574584"
                                 z3="-3.42902015">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.91281973"
                                 y3="-0.09613252"
                                 z3="-0.82648223">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.02785013"
                                 y3="0.92796973"
                                 z3="-2.9042415">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5675,1.4141,.0847;1.8207,-3.609,-1.4706;2.1302,1.9405,2.0715;1.8842,-1.623,.4047;-3.7584,-.1936,-.9016;-4.087,-1.4437,-.0841;-1.805,1.6102,.7129;-4.7608,1.4285,1.5378;-3.936,2.8582,-1.067;-2.9899,-1.8837,.8854;-1.4612,1.5432,2.0656;-.7613,1.8155,-.1889;-1.7089,-2.3157,.2225;-.1497,1.6627,2.4946;.5593,1.9506,.2166;.8763,1.8629,1.5702;-.4932,-1.731,.5674;-1.7074,-3.3313,-.7322;.6936,-2.1635,-.0031;-.5274,-3.7696,-1.315;.6639,-3.1886,-.9365;3.1984,2.3883,1.2396;3.1617,3.8792,.9878;2.6688,-.9716,-.5159;2.1577,-.4033,-1.6752;4.0189,-.8656,-.209;3.0158,.2788,-2.528;4.8616,-.1783,-1.0695;4.367,.3954,-2.2336;-4.5612,-.0302,-1.6296;-2.8556,-.3568,-1.5015;-4.3198,-2.274,-.7573;-4.9991,-1.2734,.4944;-5.7918,1.3275,1.1919;-4.5752,.6146,2.2414;-4.6987,2.3642,2.0968;-4.9549,2.8039,-1.4567;-3.8312,3.8157,-.5535;-3.2617,2.8733,-1.9259;-2.7728,-1.086,1.5996;-3.373,-2.7192,1.4785;-2.2293,1.3899,2.8151;-.9646,1.8791,-1.2526;.0861,1.6021,3.5499;1.3197,2.1158,-.5335;-.4593,-.9367,1.3042;-2.637,-3.8049,-1.0216;-.5297,-4.5671,-2.0473;3.2231,1.8309,.3;4.103,2.1238,1.7865;3.1785,4.439,1.9229;4.0428,4.1647,.4127;2.2846,4.1865,.4186;1.1041,-.4674,-1.9154;4.4036,-1.3111,.6997;2.616,.7257,-3.429;5.9128,-.0961,-.8265;5.0279,.928,-2.9042;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.567527"
                        y3="1.414145"
                        z3="0.084719"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.820692"
                        y3="-3.608993"
                        z3="-1.470569"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.130226"
                        y3="1.940546"
                        z3="2.071523"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.884163"
                        y3="-1.622959"
                        z3="0.404675"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.758352"
                        y3="-0.193634"
                        z3="-0.901619"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-4.087048"
                        y3="-1.443686"
                        z3="-0.08406"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.804999"
                        y3="1.61021"
                        z3="0.712873"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.760794"
                        y3="1.428488"
                        z3="1.537775"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.935967"
                        y3="2.858214"
                        z3="-1.066971"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.989924"
                        y3="-1.883704"
                        z3="0.885397"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.461223"
                        y3="1.543177"
                        z3="2.065586"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.761329"
                        y3="1.815495"
                        z3="-0.18887"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.708883"
                        y3="-2.31572"
                        z3="0.222497"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.149716"
                        y3="1.66271"
                        z3="2.494606"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.559265"
                        y3="1.950557"
                        z3="0.216583"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.876291"
                        y3="1.862909"
                        z3="1.570193"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.493158"
                        y3="-1.730961"
                        z3="0.567378"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.707435"
                        y3="-3.331252"
                        z3="-0.732238"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.693557"
                        y3="-2.163547"
                        z3="-0.003097"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.527363"
                        y3="-3.769609"
                        z3="-1.314972"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.663927"
                        y3="-3.188556"
                        z3="-0.936466"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.198412"
                        y3="2.388318"
                        z3="1.239601"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.161713"
                        y3="3.879187"
                        z3="0.987804"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.668779"
                        y3="-0.97156"
                        z3="-0.515886"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.157722"
                        y3="-0.403287"
                        z3="-1.675249"/>
                  <atom elementType="C"
                        id="a26"
                        x3="4.018899"
                        y3="-0.865589"
                        z3="-0.208955"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.015849"
                        y3="0.278786"
                        z3="-2.528009"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.861613"
                        y3="-0.178337"
                        z3="-1.069475"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.366956"
                        y3="0.395399"
                        z3="-2.233623"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.561172"
                        y3="-0.030229"
                        z3="-1.629627"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.855568"
                        y3="-0.356798"
                        z3="-1.501491"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.319808"
                        y3="-2.273961"
                        z3="-0.757299"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.99908"
                        y3="-1.273392"
                        z3="0.49442"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.791818"
                        y3="1.327465"
                        z3="1.191884"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.575203"
                        y3="0.614574"
                        z3="2.241382"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.698729"
                        y3="2.364236"
                        z3="2.096829"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.954894"
                        y3="2.803887"
                        z3="-1.456657"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.831219"
                        y3="3.815748"
                        z3="-0.553534"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.261709"
                        y3="2.873262"
                        z3="-1.925898"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.772831"
                        y3="-1.086004"
                        z3="1.599577"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.372973"
                        y3="-2.7192"
                        z3="1.478543"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.229333"
                        y3="1.389862"
                        z3="2.815105"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.964571"
                        y3="1.879123"
                        z3="-1.252622"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.08607"
                        y3="1.602138"
                        z3="3.549896"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.319659"
                        y3="2.115756"
                        z3="-0.533494"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.45926"
                        y3="-0.936713"
                        z3="1.304204"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.636996"
                        y3="-3.804874"
                        z3="-1.021615"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.529726"
                        y3="-4.567076"
                        z3="-2.047296"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.223054"
                        y3="1.830904"
                        z3="0.300042"/>
                  <atom elementType="H"
                        id="a50"
                        x3="4.102959"
                        y3="2.12383"
                        z3="1.786453"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.17854"
                        y3="4.438953"
                        z3="1.922903"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.04284"
                        y3="4.164675"
                        z3="0.412668"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.284612"
                        y3="4.186526"
                        z3="0.418622"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.104064"
                        y3="-0.46741"
                        z3="-1.915364"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.403615"
                        y3="-1.311051"
                        z3="0.699748"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.615996"
                        y3="0.725746"
                        z3="-3.42902"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.91282"
                        y3="-0.096133"
                        z3="-0.826482"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.02785"
                        y3="0.92797"
                        z3="-2.904241"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5675,1.4141,.0847;1.8207,-3.609,-1.4706;2.1302,1.9405,2.0715;1.8842,-1.623,.4047;-3.7584,-.1936,-.9016;-4.087,-1.4437,-.0841;-1.805,1.6102,.7129;-4.7608,1.4285,1.5378;-3.936,2.8582,-1.067;-2.9899,-1.8837,.8854;-1.4612,1.5432,2.0656;-.7613,1.8155,-.1889;-1.7089,-2.3157,.2225;-.1497,1.6627,2.4946;.5593,1.9506,.2166;.8763,1.8629,1.5702;-.4932,-1.731,.5674;-1.7074,-3.3313,-.7322;.6936,-2.1635,-.0031;-.5274,-3.7696,-1.315;.6639,-3.1886,-.9365;3.1984,2.3883,1.2396;3.1617,3.8792,.9878;2.6688,-.9716,-.5159;2.1577,-.4033,-1.6752;4.0189,-.8656,-.209;3.0158,.2788,-2.528;4.8616,-.1783,-1.0695;4.367,.3954,-2.2336;-4.5612,-.0302,-1.6296;-2.8556,-.3568,-1.5015;-4.3198,-2.274,-.7573;-4.9991,-1.2734,.4944;-5.7918,1.3275,1.1919;-4.5752,.6146,2.2414;-4.6987,2.3642,2.0968;-4.9549,2.8039,-1.4567;-3.8312,3.8157,-.5535;-3.2617,2.8733,-1.9259;-2.7728,-1.086,1.5996;-3.373,-2.7192,1.4785;-2.2293,1.3899,2.8151;-.9646,1.8791,-1.2526;.0861,1.6021,3.5499;1.3197,2.1158,-.5335;-.4593,-.9367,1.3042;-2.637,-3.8049,-1.0216;-.5297,-4.5671,-2.0473;3.2231,1.8309,.3;4.103,2.1238,1.7865;3.1785,4.439,1.9229;4.0428,4.1647,.4127;2.2846,4.1865,.4186;1.1041,-.4674,-1.9154;4.4036,-1.3111,.6997;2.616,.7257,-3.429;5.9128,-.0961,-.8265;5.0278,.928,-2.9042;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3373</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2900.6313</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1589.0110</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05211009</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3031.99317087</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4542.04528096</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8094.77012949</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3552.72484853</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02615723</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96899289</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91688280</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407950</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999658639678</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999658639678</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999317279357</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.238679781977</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5583 127.6827 127.7871 127.8838 128.1433 128.2560 128.5230 128.7475 128.8671 129.0834 129.2796 129.4693 129.7781 130.0343 130.0791 130.2247 130.5903 130.6540 130.9692 131.0051 131.1907 131.2754 131.6376 131.8083 132.0066 132.0425 132.1420 132.3919 132.5365 132.7382 132.8952 133.0651 133.1272 133.2297 133.3274 133.5755 133.8278 134.2042 134.2916 134.7317 134.9635 135.1059 135.4222 135.5315 135.6630 135.8421 135.8849 136.4310 136.9484 137.0265 137.3013 137.5544 137.6175 137.9856 138.1936 138.3197 138.4215 138.5053 138.7082 138.9728 139.0582 139.2353 139.6044 139.7511 139.8644 140.0513 140.2205 140.6729 140.8379 141.0310 141.5257 141.7290 142.0270 142.1556 142.3556 142.7571 142.8550 143.3401 143.6507 143.7108 143.8937 143.9393 143.9826 144.1102 144.4633 144.6937 144.8235 144.9941 145.1270 145.4185 145.5949 146.1378 146.4715 146.6514 146.9380 147.2045 147.6141 147.7424 147.9806 148.1800 148.2673 148.5879 148.7529 148.8173 148.8519 149.1566 149.2155 149.4163 149.7316 149.7560 150.2472 150.2952 150.4276 150.6708 150.7691 150.9709 151.2321 151.2764 151.4206 151.6938 151.8097 152.0521 152.4953 152.8943 153.1130 153.1552 153.2186 153.5832 153.7144 154.3791 154.6445 154.7449 155.0689 155.2535 155.9035 156.1125 156.2965 156.5119 156.6393 156.8927 156.9908 157.1936 157.2927 157.5732 157.6908 157.9755 158.0425 158.3234 158.5878 159.1919 159.3511 159.4726 159.8473 160.2823 160.4514 161.0123 161.2684 162.2151 162.7990 163.3550 164.0546 164.2675 165.3214 167.7958 168.3454 169.5000 170.5804 171.3694 171.9422 174.4274 175.2368 176.9080 180.3278 180.8380 182.7788 186.1555 186.3809 187.5048 188.5600 188.9246 189.1154 189.5572 190.1295 190.6939 191.5670 192.7876 192.8050 194.1420 195.6760 196.2666 199.8624 201.5546 202.4150 206.1852 207.0493 208.2459 212.3154 230.5387 235.9935 241.2255 248.1794 249.0828 338.7759 618.3680 623.0270 624.6782 630.0435 630.2850 631.5764 632.7468 632.9000 634.6341 634.9423 635.1577 635.6026 637.4430 637.6652 637.7273 638.5018 640.6751 641.8105 643.2723 644.0621 646.1860 646.9994 654.4041 655.8573 658.3513 1213.1564 1216.1835 1564.8317</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.492730 -0.220472 -0.356638 -0.338731 -0.264499 -0.162076 -0.110708 -0.443441 -0.462614 -0.089063 -0.126020 -0.157664 -0.029322 -0.267911 -0.268465 0.325431 -0.220230 -0.157914 0.148849 -0.198298 0.288593 0.125033 -0.274746 0.306184 -0.173885 -0.259369 -0.184100 -0.131459 -0.164601 0.097791 0.080919 0.094556 0.090432 0.113821 0.103602 0.113795 0.103215 0.100606 0.100727 0.081224 0.103829 0.142219 0.133693 0.132020 0.150614 0.154549 0.143492 0.149684 0.012212 0.113062 0.093120 0.095649 0.092320 0.155886 0.143407 0.160484 0.158107 0.160370</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5073 9.2205 8.3566 8.3387 6.2645 6.1621 6.1107 6.4434 6.4626 6.0891 6.1260 6.1577 6.0293 6.2679 6.2685 5.6746 6.2202 6.1579 5.8512 6.1983 5.7114 5.8750 6.2747 5.6938 6.1739 6.2594 6.1841 6.1315 6.1646 0.9022 0.9191 0.9054 0.9096 0.8862 0.8964 0.8862 0.8968 0.8994 0.8993 0.9188 0.8962 0.8578 0.8663 0.8680 0.8494 0.8455 0.8565 0.8503 0.9878 0.8869 0.9069 0.9044 0.9077 0.8441 0.8566 0.8395 0.8419 0.8396</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4927 -0.2205 -0.3566 -0.3387 -0.2645 -0.1621 -0.1107 -0.4434 -0.4626 -0.0891 -0.1260 -0.1577 -0.0293 -0.2679 -0.2685 0.3254 -0.2202 -0.1579 0.1488 -0.1983 0.2886 0.1250 -0.2747 0.3062 -0.1739 -0.2594 -0.1841 -0.1315 -0.1646 0.0978 0.0809 0.0946 0.0904 0.1138 0.1036 0.1138 0.1032 0.1006 0.1007 0.0812 0.1038 0.1422 0.1337 0.1320 0.1506 0.1545 0.1435 0.1497 0.0122 0.1131 0.0931 0.0956 0.0923 0.1559 0.1434 0.1605 0.1581 0.1604</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0789 1.0640 2.0399 2.0336 3.8364 3.9014 3.6318 3.9131 3.9030 3.7894 3.8367 3.8639 3.6757 4.0219 3.8567 3.6851 3.8759 3.8726 3.7645 3.9453 3.9381 3.8320 3.9474 3.5137 3.8005 3.9459 3.9158 3.8699 3.8488 1.0060 1.0157 1.0020 1.0003 1.0076 1.0068 1.0090 1.0105 1.0106 1.0115 1.0148 1.0043 0.9884 0.9990 1.0148 0.9884 0.9949 1.0018 0.9994 1.0144 0.9925 1.0064 1.0081 1.0006 1.0026 1.0113 0.9905 0.9893 0.9883</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0789 1.0640 2.0399 2.0336 3.8364 3.9014 3.6318 3.9131 3.9030 3.7894 3.8367 3.8639 3.6757 4.0219 3.8567 3.6851 3.8759 3.8726 3.7645 3.9453 3.9381 3.8320 3.9474 3.5137 3.8005 3.9459 3.9158 3.8699 3.8488 1.0060 1.0157 1.0020 1.0003 1.0076 1.0068 1.0090 1.0105 1.0106 1.0115 1.0148 1.0043 0.9884 0.9990 1.0148 0.9884 0.9949 1.0018 0.9994 1.0144 0.9925 1.0064 1.0081 1.0006 1.0026 1.0113 0.9905 0.9893 0.9883</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9436 0.9895 0.9713 0.9523 1.0170 1.0490 0.8843 0.9408 0.9159 0.9203 0.9766 0.9812 0.9060 1.0098 1.0079 1.2695 1.3283 0.9737 0.9740 0.9753 0.9755 0.9759 0.9800 0.8858 1.0280 0.9840 1.4819 1.0031 1.4037 0.9842 1.3435 1.3648 1.3410 1.0069 1.2762 0.9904 1.3750 0.9649 1.4215 0.9847 1.3722 1.4338 0.9848 0.9616 0.9873 0.9763 0.9969 0.9860 0.9841 1.2746 1.3377 1.4046 0.9916 1.4271 1.0072 1.4135 0.9867 1.3850 0.9905 0.9868</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036514145</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.088624230982</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-19.99644 19.23799 -0.75846 23.08299 -22.51537 0.56762 1.71834 -2.54067 -0.82233</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.25446</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.18858</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
