<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.276319"
                        y3="0.337053"
                        z3="1.829958"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.38227"
                        y3="-0.419643"
                        z3="-2.144132"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.968668"
                        y3="3.544593"
                        z3="-1.051217"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.764752"
                        y3="-2.836927"
                        z3="-1.004985"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.261752"
                        y3="-1.265235"
                        z3="0.829641"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.743143"
                        y3="-1.057532"
                        z3="-0.612376"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.960355"
                        y3="1.420717"
                        z3="1.030636"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-2.816056"
                        y3="0.006098"
                        z3="3.623599"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.954673"
                        y3="1.177726"
                        z3="1.715665"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.013559"
                        y3="-1.92519"
                        z3="-1.642446"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.260281"
                        y3="2.441116"
                        z3="0.122675"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.608366"
                        y3="1.150921"
                        z3="1.242965"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.567793"
                        y3="-1.535479"
                        z3="-1.78755"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.269229"
                        y3="3.142797"
                        z3="-0.542614"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.404648"
                        y3="1.839874"
                        z3="0.589295"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.074838"
                        y3="2.839917"
                        z3="-0.322849"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.549382"
                        y3="-2.354374"
                        z3="-1.309005"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.221097"
                        y3="-0.316776"
                        z3="-2.36929"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.780579"
                        y3="-1.982445"
                        z3="-1.427054"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.104893"
                        y3="0.070652"
                        z3="-2.488349"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.092856"
                        y3="-0.771149"
                        z3="-2.024642"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.363121"
                        y3="3.313737"
                        z3="-0.874883"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.919155"
                        y3="3.981947"
                        z3="0.364396"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.63933"
                        y3="-2.400852"
                        z3="-0.03818"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.287329"
                        y3="-1.450541"
                        z3="0.909716"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.899149"
                        y3="-2.983398"
                        z3="-0.026626"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.220604"
                        y3="-1.067708"
                        z3="1.863356"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.816895"
                        y3="-2.598694"
                        z3="0.939362"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.486981"
                        y3="-1.635034"
                        z3="1.883849"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.225847"
                        y3="-1.623426"
                        z3="0.843086"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.848623"
                        y3="-2.049146"
                        z3="1.315637"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.634455"
                        y3="-0.012904"
                        z3="-0.92374"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.813612"
                        y3="-1.264285"
                        z3="-0.669083"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-1.840892"
                        y3="-0.477025"
                        z3="3.709323"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.776527"
                        y3="0.929235"
                        z3="4.204595"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.544777"
                        y3="-0.651401"
                        z3="4.101929"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.730575"
                        y3="0.554152"
                        z3="2.164711"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.964082"
                        y3="2.135709"
                        z3="2.239118"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.250953"
                        y3="1.365931"
                        z3="0.681889"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.087769"
                        y3="-2.977542"
                        z3="-1.359094"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.51252"
                        y3="-1.822786"
                        z3="-2.609529"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.292737"
                        y3="2.701653"
                        z3="-0.080898"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.314467"
                        y3="0.372801"
                        z3="1.940071"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.530528"
                        y3="3.923436"
                        z3="-1.246803"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.432366"
                        y3="1.573557"
                        z3="0.797243"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.786073"
                        y3="-3.30407"
                        z3="-0.844324"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.994834"
                        y3="0.34326"
                        z3="-2.741369"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.37291"
                        y3="1.014376"
                        z3="-2.945338"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.830028"
                        y3="3.738507"
                        z3="-1.763174"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.579922"
                        y3="2.241359"
                        z3="-0.884976"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.501617"
                        y3="3.579175"
                        z3="1.287062"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.998536"
                        y3="3.831102"
                        z3="0.398782"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.734368"
                        y3="5.056289"
                        z3="0.345685"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.297679"
                        y3="-1.011855"
                        z3="0.91857"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.158312"
                        y3="-3.727721"
                        z3="-0.76887"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.945783"
                        y3="-0.322151"
                        z3="2.597936"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.79969"
                        y3="-3.05185"
                        z3="0.94523"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.210148"
                        y3="-1.330539"
                        z3="2.628404"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.2763,.3371,1.83;2.3823,-.4196,-2.1441;.9687,3.5446,-1.0512;1.7648,-2.8369,-1.005;-3.2618,-1.2652,.8296;-3.7431,-1.0575,-.6124;-1.9604,1.4207,1.0306;-2.8161,.0061,3.6236;-4.9547,1.1777,1.7157;-3.0136,-1.9252,-1.6424;-2.2603,2.4411,.1227;-.6084,1.1509,1.243;-1.5678,-1.5355,-1.7875;-1.2692,3.1428,-.5426;.4046,1.8399,.5893;.0748,2.8399,-.3228;-.5494,-2.3544,-1.309;-1.2211,-.3168,-2.3693;.7806,-1.9824,-1.4271;.1049,.0707,-2.4883;1.0929,-.7711,-2.0246;2.3631,3.3137,-.8749;2.9192,3.9819,.3644;2.6393,-2.4009,-.0382;2.2873,-1.4505,.9097;3.8991,-2.9834,-.0266;3.2206,-1.0677,1.8634;4.8169,-2.5987,.9394;4.487,-1.635,1.8838;-2.2258,-1.6234,.8431;-3.8486,-2.0491,1.3156;-3.6345,-.0129,-.9237;-4.8136,-1.2643,-.6691;-1.8409,-.477,3.7093;-2.7765,.9292,4.2046;-3.5448,-.6514,4.1019;-5.7306,.5542,2.1647;-4.9641,2.1357,2.2391;-5.251,1.3659,.6819;-3.0878,-2.9775,-1.3591;-3.5125,-1.8228,-2.6095;-3.2927,2.7017,-.0809;-.3145,.3728,1.9401;-1.5305,3.9234,-1.2468;1.4324,1.5736,.7972;-.7861,-3.3041,-.8443;-1.9948,.3433,-2.7414;.3729,1.0144,-2.9453;2.83,3.7385,-1.7632;2.5799,2.2414,-.885;2.5016,3.5792,1.2871;3.9985,3.8311,.3988;2.7344,5.0563,.3457;1.2977,-1.0119,.9186;4.1583,-3.7277,-.7689;2.9458,-.3222,2.5979;5.7997,-3.0518,.9452;5.2101,-1.3305,2.6284;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3023.4077758096 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.137e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.422 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.816 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.27631906"
                                 y3="0.337053"
                                 z3="1.8299578">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.38227008"
                                 y3="-0.41964264"
                                 z3="-2.14413161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.96866768"
                                 y3="3.54459315"
                                 z3="-1.05121699">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.76475194"
                                 y3="-2.8369265"
                                 z3="-1.00498547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.26175193"
                                 y3="-1.26523522"
                                 z3="0.82964093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.74314275"
                                 y3="-1.05753212"
                                 z3="-0.61237628">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.96035464"
                                 y3="1.42071724"
                                 z3="1.03063638">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-2.81605585"
                                 y3="0.00609783"
                                 z3="3.6235987">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.95467294"
                                 y3="1.17772553"
                                 z3="1.71566469">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.01355891"
                                 y3="-1.92519028"
                                 z3="-1.64244599">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.26028144"
                                 y3="2.44111579"
                                 z3="0.12267509">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.60836561"
                                 y3="1.15092084"
                                 z3="1.24296451">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.5677933"
                                 y3="-1.53547859"
                                 z3="-1.78754976">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.26922889"
                                 y3="3.1427966"
                                 z3="-0.54261423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.40464765"
                                 y3="1.8398739"
                                 z3="0.58929548">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.07483826"
                                 y3="2.83991731"
                                 z3="-0.32284945">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.54938224"
                                 y3="-2.35437377"
                                 z3="-1.30900523">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.22109705"
                                 y3="-0.3167764"
                                 z3="-2.36929003">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.78057935"
                                 y3="-1.98244473"
                                 z3="-1.42705376">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="0.104893"
                                 y3="0.07065241"
                                 z3="-2.48834942">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.09285615"
                                 y3="-0.77114858"
                                 z3="-2.02464225">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.36312053"
                                 y3="3.31373672"
                                 z3="-0.87488284">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.91915526"
                                 y3="3.98194684"
                                 z3="0.36439626">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.63932955"
                                 y3="-2.40085208"
                                 z3="-0.03818044">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.28732895"
                                 y3="-1.45054098"
                                 z3="0.90971646">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.8991489"
                                 y3="-2.98339822"
                                 z3="-0.02662643">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.22060352"
                                 y3="-1.06770845"
                                 z3="1.86335639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.81689506"
                                 y3="-2.59869377"
                                 z3="0.93936193">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.48698078"
                                 y3="-1.63503444"
                                 z3="1.88384921">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.22584685"
                                 y3="-1.62342598"
                                 z3="0.84308568">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.84862282"
                                 y3="-2.04914588"
                                 z3="1.31563703">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.63445477"
                                 y3="-0.01290424"
                                 z3="-0.92373969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.81361198"
                                 y3="-1.26428485"
                                 z3="-0.66908339">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-1.84089221"
                                 y3="-0.47702532"
                                 z3="3.70932326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.77652725"
                                 y3="0.92923459"
                                 z3="4.20459475">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.54477702"
                                 y3="-0.65140139"
                                 z3="4.10192857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.73057467"
                                 y3="0.5541519"
                                 z3="2.16471126">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.96408214"
                                 y3="2.13570884"
                                 z3="2.23911808">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.25095315"
                                 y3="1.36593078"
                                 z3="0.68188901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.08776931"
                                 y3="-2.97754213"
                                 z3="-1.35909448">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.51252027"
                                 y3="-1.82278649"
                                 z3="-2.60952883">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-3.29273707"
                                 y3="2.70165279"
                                 z3="-0.08089774">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.31446688"
                                 y3="0.37280067"
                                 z3="1.94007057">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-1.53052815"
                                 y3="3.92343647"
                                 z3="-1.24680315">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.43236577"
                                 y3="1.5735574"
                                 z3="0.79724348">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.78607346"
                                 y3="-3.30406963"
                                 z3="-0.84432407">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-1.99483364"
                                 y3="0.34326019"
                                 z3="-2.74136908">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.37290978"
                                 y3="1.01437612"
                                 z3="-2.94533846">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.83002793"
                                 y3="3.73850714"
                                 z3="-1.76317446">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.57992185"
                                 y3="2.24135942"
                                 z3="-0.88497639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.5016167"
                                 y3="3.57917456"
                                 z3="1.28706237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.99853631"
                                 y3="3.83110174"
                                 z3="0.39878233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.73436814"
                                 y3="5.05628894"
                                 z3="0.34568514">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.29767851"
                                 y3="-1.0118552"
                                 z3="0.91857029">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.15831173"
                                 y3="-3.72772119"
                                 z3="-0.76887024">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.94578257"
                                 y3="-0.32215134"
                                 z3="2.59793582">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.79968984"
                                 y3="-3.05185046"
                                 z3="0.94522952">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.21014784"
                                 y3="-1.33053899"
                                 z3="2.62840383">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.2763,.3371,1.83;2.3823,-.4196,-2.1441;.9687,3.5446,-1.0512;1.7648,-2.8369,-1.005;-3.2618,-1.2652,.8296;-3.7431,-1.0575,-.6124;-1.9604,1.4207,1.0306;-2.8161,.0061,3.6236;-4.9547,1.1777,1.7157;-3.0136,-1.9252,-1.6424;-2.2603,2.4411,.1227;-.6084,1.1509,1.243;-1.5678,-1.5355,-1.7875;-1.2692,3.1428,-.5426;.4046,1.8399,.5893;.0748,2.8399,-.3228;-.5494,-2.3544,-1.309;-1.2211,-.3168,-2.3693;.7806,-1.9824,-1.4271;.1049,.0707,-2.4883;1.0929,-.7711,-2.0246;2.3631,3.3137,-.8749;2.9192,3.9819,.3644;2.6393,-2.4009,-.0382;2.2873,-1.4505,.9097;3.8991,-2.9834,-.0266;3.2206,-1.0677,1.8634;4.8169,-2.5987,.9394;4.487,-1.635,1.8838;-2.2258,-1.6234,.8431;-3.8486,-2.0491,1.3156;-3.6345,-.0129,-.9237;-4.8136,-1.2643,-.6691;-1.8409,-.477,3.7093;-2.7765,.9292,4.2046;-3.5448,-.6514,4.1019;-5.7306,.5542,2.1647;-4.9641,2.1357,2.2391;-5.251,1.3659,.6819;-3.0878,-2.9775,-1.3591;-3.5125,-1.8228,-2.6095;-3.2927,2.7017,-.0809;-.3145,.3728,1.9401;-1.5305,3.9234,-1.2468;1.4324,1.5736,.7972;-.7861,-3.3041,-.8443;-1.9948,.3433,-2.7414;.3729,1.0144,-2.9453;2.83,3.7385,-1.7632;2.5799,2.2414,-.885;2.5016,3.5792,1.2871;3.9985,3.8311,.3988;2.7344,5.0563,.3457;1.2977,-1.0119,.9186;4.1583,-3.7277,-.7689;2.9458,-.3222,2.5979;5.7997,-3.0519,.9452;5.2101,-1.3305,2.6284;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.276319"
                        y3="0.337053"
                        z3="1.829958"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.38227"
                        y3="-0.419643"
                        z3="-2.144132"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.968668"
                        y3="3.544593"
                        z3="-1.051217"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.764752"
                        y3="-2.836927"
                        z3="-1.004985"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.261752"
                        y3="-1.265235"
                        z3="0.829641"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.743143"
                        y3="-1.057532"
                        z3="-0.612376"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.960355"
                        y3="1.420717"
                        z3="1.030636"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-2.816056"
                        y3="0.006098"
                        z3="3.623599"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.954673"
                        y3="1.177726"
                        z3="1.715665"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.013559"
                        y3="-1.92519"
                        z3="-1.642446"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.260281"
                        y3="2.441116"
                        z3="0.122675"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.608366"
                        y3="1.150921"
                        z3="1.242965"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.567793"
                        y3="-1.535479"
                        z3="-1.78755"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.269229"
                        y3="3.142797"
                        z3="-0.542614"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.404648"
                        y3="1.839874"
                        z3="0.589295"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.074838"
                        y3="2.839917"
                        z3="-0.322849"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.549382"
                        y3="-2.354374"
                        z3="-1.309005"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.221097"
                        y3="-0.316776"
                        z3="-2.36929"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.780579"
                        y3="-1.982445"
                        z3="-1.427054"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.104893"
                        y3="0.070652"
                        z3="-2.488349"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.092856"
                        y3="-0.771149"
                        z3="-2.024642"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.363121"
                        y3="3.313737"
                        z3="-0.874883"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.919155"
                        y3="3.981947"
                        z3="0.364396"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.63933"
                        y3="-2.400852"
                        z3="-0.03818"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.287329"
                        y3="-1.450541"
                        z3="0.909716"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.899149"
                        y3="-2.983398"
                        z3="-0.026626"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.220604"
                        y3="-1.067708"
                        z3="1.863356"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.816895"
                        y3="-2.598694"
                        z3="0.939362"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.486981"
                        y3="-1.635034"
                        z3="1.883849"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.225847"
                        y3="-1.623426"
                        z3="0.843086"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.848623"
                        y3="-2.049146"
                        z3="1.315637"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.634455"
                        y3="-0.012904"
                        z3="-0.92374"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.813612"
                        y3="-1.264285"
                        z3="-0.669083"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-1.840892"
                        y3="-0.477025"
                        z3="3.709323"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.776527"
                        y3="0.929235"
                        z3="4.204595"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.544777"
                        y3="-0.651401"
                        z3="4.101929"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.730575"
                        y3="0.554152"
                        z3="2.164711"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.964082"
                        y3="2.135709"
                        z3="2.239118"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.250953"
                        y3="1.365931"
                        z3="0.681889"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.087769"
                        y3="-2.977542"
                        z3="-1.359094"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.51252"
                        y3="-1.822786"
                        z3="-2.609529"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.292737"
                        y3="2.701653"
                        z3="-0.080898"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.314467"
                        y3="0.372801"
                        z3="1.940071"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.530528"
                        y3="3.923436"
                        z3="-1.246803"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.432366"
                        y3="1.573557"
                        z3="0.797243"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.786073"
                        y3="-3.30407"
                        z3="-0.844324"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.994834"
                        y3="0.34326"
                        z3="-2.741369"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.37291"
                        y3="1.014376"
                        z3="-2.945338"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.830028"
                        y3="3.738507"
                        z3="-1.763174"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.579922"
                        y3="2.241359"
                        z3="-0.884976"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.501617"
                        y3="3.579175"
                        z3="1.287062"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.998536"
                        y3="3.831102"
                        z3="0.398782"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.734368"
                        y3="5.056289"
                        z3="0.345685"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.297679"
                        y3="-1.011855"
                        z3="0.91857"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.158312"
                        y3="-3.727721"
                        z3="-0.76887"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.945783"
                        y3="-0.322151"
                        z3="2.597936"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.79969"
                        y3="-3.05185"
                        z3="0.94523"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.210148"
                        y3="-1.330539"
                        z3="2.628404"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.2763,.3371,1.83;2.3823,-.4196,-2.1441;.9687,3.5446,-1.0512;1.7648,-2.8369,-1.005;-3.2618,-1.2652,.8296;-3.7431,-1.0575,-.6124;-1.9604,1.4207,1.0306;-2.8161,.0061,3.6236;-4.9547,1.1777,1.7157;-3.0136,-1.9252,-1.6424;-2.2603,2.4411,.1227;-.6084,1.1509,1.243;-1.5678,-1.5355,-1.7875;-1.2692,3.1428,-.5426;.4046,1.8399,.5893;.0748,2.8399,-.3228;-.5494,-2.3544,-1.309;-1.2211,-.3168,-2.3693;.7806,-1.9824,-1.4271;.1049,.0707,-2.4883;1.0929,-.7711,-2.0246;2.3631,3.3137,-.8749;2.9192,3.9819,.3644;2.6393,-2.4009,-.0382;2.2873,-1.4505,.9097;3.8991,-2.9834,-.0266;3.2206,-1.0677,1.8634;4.8169,-2.5987,.9394;4.487,-1.635,1.8838;-2.2258,-1.6234,.8431;-3.8486,-2.0491,1.3156;-3.6345,-.0129,-.9237;-4.8136,-1.2643,-.6691;-1.8409,-.477,3.7093;-2.7765,.9292,4.2046;-3.5448,-.6514,4.1019;-5.7306,.5542,2.1647;-4.9641,2.1357,2.2391;-5.251,1.3659,.6819;-3.0878,-2.9775,-1.3591;-3.5125,-1.8228,-2.6095;-3.2927,2.7017,-.0809;-.3145,.3728,1.9401;-1.5305,3.9234,-1.2468;1.4324,1.5736,.7972;-.7861,-3.3041,-.8443;-1.9948,.3433,-2.7414;.3729,1.0144,-2.9453;2.83,3.7385,-1.7632;2.5799,2.2414,-.885;2.5016,3.5792,1.2871;3.9985,3.8311,.3988;2.7344,5.0563,.3457;1.2977,-1.0119,.9186;4.1583,-3.7277,-.7689;2.9458,-.3222,2.5979;5.7997,-3.0518,.9452;5.2101,-1.3305,2.6284;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3395</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2917.1328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1625.7298</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05169798</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3023.40777581</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4533.45947379</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8077.28648745</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3543.82701366</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02701273</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96815132</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91645334</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407951</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000386258824</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000386258824</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000772517649</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234836772635</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 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127.3919 127.5947 127.7021 127.7451 128.0123 128.1777 128.4439 128.6368 128.8934 129.0149 129.3957 129.5192 129.7380 129.8499 130.0515 130.1112 130.2716 130.5563 130.8355 130.8684 131.0307 131.2373 131.3955 131.7124 131.8161 131.8787 132.0262 132.0957 132.2633 132.4432 132.6352 132.8038 132.9627 133.1649 133.3319 133.3976 133.7459 134.3168 134.4260 134.6316 134.8310 135.1621 135.3943 135.4917 135.5304 135.6991 135.7986 136.2216 136.6016 136.9257 137.0790 137.4545 137.5282 137.9491 138.0113 138.1658 138.4037 138.5452 138.7557 138.9757 139.1444 139.3146 139.4748 139.5376 139.7360 139.9947 140.3007 140.5281 140.6497 141.3472 141.4833 141.5520 141.7041 141.9357 142.2475 142.6524 142.9940 143.2769 143.5555 143.6572 143.7155 143.8822 144.0541 144.1259 144.3233 144.4121 144.6119 144.9370 144.9630 145.0931 145.4845 145.7489 146.2820 146.4273 146.9657 147.0703 147.5039 147.5830 147.7934 147.9950 148.2163 148.2940 148.4646 148.7729 148.9085 148.9871 149.2437 149.4337 149.5144 149.7519 149.8592 149.9678 150.0639 150.4261 150.7401 150.7896 150.9449 150.9734 151.1703 151.4304 151.6218 151.8769 152.3323 152.6595 152.7901 153.0301 153.2393 153.4068 153.6461 153.8094 153.9907 154.1635 154.7437 155.2759 155.4072 155.8718 156.1743 156.4008 156.4901 156.8034 156.9641 157.1386 157.2711 157.4648 157.6896 157.7331 157.8490 158.2749 158.3461 158.8759 159.1306 159.3595 159.8402 159.9961 160.3493 161.2976 161.4950 162.5252 162.9198 163.2491 163.9682 164.2228 165.2576 167.7777 168.4841 169.4593 170.2529 171.4460 171.7197 174.3065 174.9175 176.7164 180.0393 180.9239 182.8018 185.7444 186.2926 187.5202 188.3637 188.7256 188.9856 189.5656 190.0339 190.4032 191.5903 191.9782 192.8180 193.7245 195.4171 196.2812 199.7938 201.1304 202.4088 206.2104 206.5295 208.1022 212.3300 230.5241 236.0748 241.6410 248.4121 249.2331 339.0889 618.3535 620.0925 624.1650 629.9672 630.5908 631.4154 632.7288 632.8848 634.2609 634.7317 635.3939 636.0029 636.8385 637.6824 638.0257 638.7369 639.7854 640.5196 643.1090 643.9116 645.4977 646.5936 654.2076 656.0218 658.0586 1213.1921 1214.7852 1566.4077</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.480514 -0.223312 -0.351216 -0.342709 -0.258662 -0.125348 -0.131507 -0.446454 -0.430477 -0.093620 -0.107031 -0.188770 0.073946 -0.285849 -0.241993 0.338633 -0.268613 -0.267955 0.228326 -0.137707 0.227039 0.071682 -0.268445 0.238289 -0.144196 -0.215486 -0.193284 -0.146093 -0.163649 0.076458 0.094830 0.064919 0.094229 0.100552 0.104108 0.104116 0.109478 0.110454 0.100950 0.085483 0.098481 0.143563 0.146463 0.131903 0.136395 0.136372 0.145728 0.151922 0.110554 0.067364 0.090860 0.095681 0.090126 0.154088 0.147152 0.160171 0.160466 0.161081</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5195 9.2233 8.3512 8.3427 6.2587 6.1253 6.1315 6.4465 6.4305 6.0936 6.1070 6.1888 5.9261 6.2858 6.2420 5.6614 6.2686 6.2680 5.7717 6.1377 5.7730 5.9283 6.2684 5.7617 6.1442 6.2155 6.1933 6.1461 6.1636 0.9235 0.9052 0.9351 0.9058 0.8994 0.8959 0.8959 0.8905 0.8895 0.8990 0.9145 0.9015 0.8564 0.8535 0.8681 0.8636 0.8636 0.8543 0.8481 0.8894 0.9326 0.9091 0.9043 0.9099 0.8459 0.8528 0.8398 0.8395 0.8389</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4805 -0.2233 -0.3512 -0.3427 -0.2587 -0.1253 -0.1315 -0.4465 -0.4305 -0.0936 -0.1070 -0.1888 0.0739 -0.2858 -0.2420 0.3386 -0.2686 -0.2680 0.2283 -0.1377 0.2270 0.0717 -0.2684 0.2383 -0.1442 -0.2155 -0.1933 -0.1461 -0.1636 0.0765 0.0948 0.0649 0.0942 0.1006 0.1041 0.1041 0.1095 0.1105 0.1010 0.0855 0.0985 0.1436 0.1465 0.1319 0.1364 0.1364 0.1457 0.1519 0.1106 0.0674 0.0909 0.0957 0.0901 0.1541 0.1472 0.1602 0.1605 0.1611</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1394 1.0563 2.0410 2.0591 3.8226 3.8956 3.6831 3.9055 3.9087 3.8392 3.8368 3.8588 3.5762 4.0393 3.8131 3.6832 3.9966 3.9011 3.6958 3.8172 3.9487 3.8347 3.9312 3.7248 3.8150 3.9729 3.9215 3.9071 3.8769 1.0153 1.0114 1.0051 1.0083 1.0114 1.0096 1.0107 1.0084 1.0074 1.0086 1.0088 1.0037 0.9863 0.9796 1.0156 1.0021 1.0166 1.0029 0.9959 0.9920 1.0072 1.0014 1.0080 1.0059 0.9923 1.0081 0.9928 0.9880 0.9887</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1394 1.0563 2.0410 2.0591 3.8226 3.8956 3.6831 3.9055 3.9087 3.8392 3.8368 3.8588 3.5762 4.0393 3.8131 3.6832 3.9966 3.9011 3.6958 3.8172 3.9487 3.8347 3.9312 3.7248 3.8150 3.9729 3.9215 3.9071 3.8769 1.0153 1.0114 1.0051 1.0083 1.0114 1.0096 1.0107 1.0084 1.0074 1.0086 1.0088 1.0037 0.9863 0.9796 1.0156 1.0021 1.0166 1.0029 0.9959 0.9920 1.0072 1.0014 1.0080 1.0059 0.9923 1.0081 0.9928 0.9880 0.9887</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9466 0.9860 0.9632 0.9799 0.9932 1.0534 0.8839 0.8949 0.9550 0.9068 0.9820 0.9776 0.9254 1.0159 0.9952 1.2884 1.3548 0.9784 0.9719 0.9769 0.9737 0.9727 0.9717 0.8971 1.0168 1.0002 1.4824 0.9965 1.3864 0.9769 1.3509 1.3340 1.3370 1.0061 1.2677 0.9996 1.4052 0.9877 1.3875 1.0041 1.3806 1.3958 0.9850 0.9559 0.9797 0.9883 0.9897 0.9849 0.9896 1.3473 1.3767 1.3987 0.9573 1.4429 0.9862 1.4244 0.9786 1.3975 0.9811 0.9850</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035655953</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087353929444</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.32414 17.92884 -0.39530 9.57001 -9.48214 0.08787 16.02541 -15.46901 0.55641</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.68816</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.74917</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
