<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.86035"
                        y3="-0.098519"
                        z3="1.429651"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.568051"
                        y3="0.212545"
                        z3="-0.478259"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.869858"
                        y3="3.678223"
                        z3="1.618133"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.560602"
                        y3="-2.345688"
                        z3="-0.499433"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.598712"
                        y3="-1.115182"
                        z3="-0.138962"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.63019"
                        y3="-0.268609"
                        z3="-1.419356"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.394704"
                        y3="1.080712"
                        z3="1.546974"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.871144"
                        y3="-1.230667"
                        z3="2.933087"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.454052"
                        y3="0.89562"
                        z3="1.323391"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.606427"
                        y3="-0.705408"
                        z3="-2.474588"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.501328"
                        y3="2.444627"
                        z3="1.254276"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.124129"
                        y3="0.60826"
                        z3="1.878705"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.197628"
                        y3="-0.473594"
                        z3="-2.004076"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.404424"
                        y3="3.287801"
                        z3="1.285002"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.008854"
                        y3="1.435755"
                        z3="1.925658"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-0.146027"
                        y3="2.787999"
                        z3="1.620338"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.40964"
                        y3="-1.526021"
                        z3="-1.547594"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.674012"
                        y3="0.8172"
                        z3="-1.955346"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.85698"
                        y3="-1.299366"
                        z3="-1.031786"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.598549"
                        y3="1.056474"
                        z3="-1.459051"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.346553"
                        y3="-0.003114"
                        z3="-0.992556"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.190212"
                        y3="3.216703"
                        z3="1.883621"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.130173"
                        y3="4.388601"
                        z3="1.750157"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.813456"
                        y3="-2.636381"
                        z3="-0.981413"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.665506"
                        y3="-3.306107"
                        z3="-0.112688"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.217105"
                        y3="-2.324347"
                        z3="-2.272411"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.936649"
                        y3="-3.656939"
                        z3="-0.540219"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.496147"
                        y3="-2.677732"
                        z3="-2.683022"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.361706"
                        y3="-3.340045"
                        z3="-1.824263"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.626421"
                        y3="-1.606701"
                        z3="-0.02161"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.327516"
                        y3="-1.927916"
                        z3="-0.204448"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.450696"
                        y3="0.790803"
                        z3="-1.205396"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.629711"
                        y3="-0.310132"
                        z3="-1.856799"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.939001"
                        y3="-1.79331"
                        z3="3.018101"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.999082"
                        y3="-0.668095"
                        z3="3.859813"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.683633"
                        y3="-1.957977"
                        z3="2.876294"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.600908"
                        y3="1.523425"
                        z3="2.204379"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.470616"
                        y3="1.548003"
                        z3="0.448086"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-6.318572"
                        y3="0.232966"
                        z3="1.248565"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.750969"
                        y3="-1.76116"
                        z3="-2.715051"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.781629"
                        y3="-0.142968"
                        z3="-3.394941"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.462865"
                        y3="2.870559"
                        z3="0.991094"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.978664"
                        y3="-0.442111"
                        z3="2.108643"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.513361"
                        y3="4.339474"
                        z3="1.04859"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.949893"
                        y3="1.010574"
                        z3="2.190019"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.786748"
                        y3="-2.541464"
                        z3="-1.575704"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.267228"
                        y3="1.653018"
                        z3="-2.305495"/>
                  <atom elementType="H"
                        id="a48"
                        x3="1.001376"
                        y3="2.060261"
                        z3="-1.416472"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.463234"
                        y3="2.427716"
                        z3="1.176207"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.247367"
                        y3="2.792926"
                        z3="2.891342"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.148295"
                        y3="4.056781"
                        z3="1.952361"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.110089"
                        y3="4.805732"
                        z3="0.74311"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.890559"
                        y3="5.180283"
                        z3="2.460219"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.33309"
                        y3="-3.545403"
                        z3="0.889721"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.551673"
                        y3="-1.817392"
                        z3="-2.960238"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.600436"
                        y3="-4.174095"
                        z3="0.140429"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.812933"
                        y3="-2.432072"
                        z3="-3.688314"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.357021"
                        y3="-3.608825"
                        z3="-2.15215"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.8603,-.0985,1.4297;2.5681,.2125,-.4783;.8699,3.6782,1.6181;1.5606,-2.3457,-.4994;-3.5987,-1.1152,-.139;-3.6302,-.2686,-1.4194;-2.3947,1.0807,1.547;-3.8711,-1.2307,2.9331;-5.4541,.8956,1.3234;-2.6064,-.7054,-2.4746;-2.5013,2.4446,1.2543;-1.1241,.6083,1.8787;-1.1976,-.4736,-2.0041;-1.4044,3.2878,1.285;-.0089,1.4358,1.9257;-.146,2.788,1.6203;-.4096,-1.526,-1.5476;-.674,.8172,-1.9553;.857,-1.2994,-1.0318;.5985,1.0565,-1.4591;1.3466,-.0031,-.9926;2.1902,3.2167,1.8836;3.1302,4.3886,1.7502;2.8135,-2.6364,-.9814;3.6655,-3.3061,-.1127;3.2171,-2.3243,-2.2724;4.9366,-3.6569,-.5402;4.4961,-2.6777,-2.683;5.3617,-3.34,-1.8243;-2.6264,-1.6067,-.0216;-4.3275,-1.9279,-.2044;-3.4507,.7908,-1.2054;-4.6297,-.3101,-1.8568;-2.939,-1.7933,3.0181;-3.9991,-.6681,3.8598;-4.6836,-1.958,2.8763;-5.6009,1.5234,2.2044;-5.4706,1.548,.4481;-6.3186,.233,1.2486;-2.751,-1.7612,-2.7151;-2.7816,-.143,-3.3949;-3.4629,2.8706,.9911;-.9787,-.4421,2.1086;-1.5134,4.3395,1.0486;.9499,1.0106,2.19;-.7867,-2.5415,-1.5757;-1.2672,1.653,-2.3055;1.0014,2.0603,-1.4165;2.4632,2.4277,1.1762;2.2474,2.7929,2.8913;4.1483,4.0568,1.9524;3.1101,4.8057,.7431;2.8906,5.1803,2.4602;3.3331,-3.5454,.8897;2.5517,-1.8174,-2.9602;5.6004,-4.1741,.1404;4.8129,-2.4321,-3.6883;6.357,-3.6088,-2.1521;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2945.4244894800 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.517e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.416 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.811 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.86034984"
                                 y3="-0.09851896"
                                 z3="1.42965119">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.56805133"
                                 y3="0.21254461"
                                 z3="-0.47825917">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.86985761"
                                 y3="3.6782234"
                                 z3="1.6181325">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.56060192"
                                 y3="-2.34568795"
                                 z3="-0.49943334">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.59871183"
                                 y3="-1.11518195"
                                 z3="-0.13896238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.63018958"
                                 y3="-0.26860926"
                                 z3="-1.419356">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.39470447"
                                 y3="1.08071151"
                                 z3="1.54697421">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.87114383"
                                 y3="-1.23066707"
                                 z3="2.93308676">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-5.45405214"
                                 y3="0.89562011"
                                 z3="1.32339109">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.60642654"
                                 y3="-0.70540757"
                                 z3="-2.47458777">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.50132811"
                                 y3="2.44462712"
                                 z3="1.25427602">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.12412902"
                                 y3="0.60826019"
                                 z3="1.87870526">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.19762814"
                                 y3="-0.47359379"
                                 z3="-2.00407551">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.40442396"
                                 y3="3.28780104"
                                 z3="1.28500238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.00885368"
                                 y3="1.43575509"
                                 z3="1.92565768">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-0.14602736"
                                 y3="2.7879991"
                                 z3="1.62033845">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.40964035"
                                 y3="-1.52602133"
                                 z3="-1.54759352">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-0.67401206"
                                 y3="0.81719999"
                                 z3="-1.95534559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.85697989"
                                 y3="-1.29936578"
                                 z3="-1.03178584">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="0.59854868"
                                 y3="1.05647351"
                                 z3="-1.45905068">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.34655289"
                                 y3="-0.00311398"
                                 z3="-0.99255569">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.1902116"
                                 y3="3.21670307"
                                 z3="1.88362093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.13017332"
                                 y3="4.38860095"
                                 z3="1.75015693">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.81345633"
                                 y3="-2.63638051"
                                 z3="-0.98141291">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.66550584"
                                 y3="-3.30610719"
                                 z3="-0.11268819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.21710508"
                                 y3="-2.32434727"
                                 z3="-2.27241139">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.93664863"
                                 y3="-3.65693859"
                                 z3="-0.540219">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.49614708"
                                 y3="-2.67773176"
                                 z3="-2.683022">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="5.36170571"
                                 y3="-3.34004501"
                                 z3="-1.82426278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.62642068"
                                 y3="-1.60670117"
                                 z3="-0.02161049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.32751579"
                                 y3="-1.92791597"
                                 z3="-0.20444841">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.4506961"
                                 y3="0.79080282"
                                 z3="-1.20539592">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.62971051"
                                 y3="-0.31013222"
                                 z3="-1.85679923">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.9390011"
                                 y3="-1.79331009"
                                 z3="3.01810145">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.9990817"
                                 y3="-0.66809483"
                                 z3="3.85981316">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.68363268"
                                 y3="-1.95797727"
                                 z3="2.87629414">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.60090778"
                                 y3="1.52342516"
                                 z3="2.2043787">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.47061583"
                                 y3="1.54800253"
                                 z3="0.44808613">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-6.31857182"
                                 y3="0.23296571"
                                 z3="1.24856491">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.75096914"
                                 y3="-1.76115976"
                                 z3="-2.71505147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.78162934"
                                 y3="-0.14296802"
                                 z3="-3.39494119">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-3.46286468"
                                 y3="2.87055938"
                                 z3="0.99109405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.97866359"
                                 y3="-0.44211107"
                                 z3="2.10864315">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-1.51336095"
                                 y3="4.33947363"
                                 z3="1.04859014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.94989337"
                                 y3="1.01057416"
                                 z3="2.19001925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.78674794"
                                 y3="-2.54146436"
                                 z3="-1.57570425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-1.26722821"
                                 y3="1.65301798"
                                 z3="-2.30549535">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="1.00137608"
                                 y3="2.06026149"
                                 z3="-1.4164724">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.46323388"
                                 y3="2.42771581"
                                 z3="1.17620672">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.24736714"
                                 y3="2.79292601"
                                 z3="2.8913425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.14829526"
                                 y3="4.05678056"
                                 z3="1.95236068">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.11008924"
                                 y3="4.80573216"
                                 z3="0.74310982">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.89055851"
                                 y3="5.18028319"
                                 z3="2.46021913">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.33309019"
                                 y3="-3.54540324"
                                 z3="0.88972142">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.55167296"
                                 y3="-1.81739163"
                                 z3="-2.96023796">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.60043591"
                                 y3="-4.17409509"
                                 z3="0.14042901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.81293286"
                                 y3="-2.43207163"
                                 z3="-3.68831437">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="6.35702094"
                                 y3="-3.60882508"
                                 z3="-2.15215028">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.8603,-.0985,1.4297;2.5681,.2125,-.4783;.8699,3.6782,1.6181;1.5606,-2.3457,-.4994;-3.5987,-1.1152,-.139;-3.6302,-.2686,-1.4194;-2.3947,1.0807,1.547;-3.8711,-1.2307,2.9331;-5.4541,.8956,1.3234;-2.6064,-.7054,-2.4746;-2.5013,2.4446,1.2543;-1.1241,.6083,1.8787;-1.1976,-.4736,-2.0041;-1.4044,3.2878,1.285;-.0089,1.4358,1.9257;-.146,2.788,1.6203;-.4096,-1.526,-1.5476;-.674,.8172,-1.9553;.857,-1.2994,-1.0318;.5985,1.0565,-1.4591;1.3466,-.0031,-.9926;2.1902,3.2167,1.8836;3.1302,4.3886,1.7502;2.8135,-2.6364,-.9814;3.6655,-3.3061,-.1127;3.2171,-2.3243,-2.2724;4.9366,-3.6569,-.5402;4.4961,-2.6777,-2.683;5.3617,-3.34,-1.8243;-2.6264,-1.6067,-.0216;-4.3275,-1.9279,-.2044;-3.4507,.7908,-1.2054;-4.6297,-.3101,-1.8568;-2.939,-1.7933,3.0181;-3.9991,-.6681,3.8598;-4.6836,-1.958,2.8763;-5.6009,1.5234,2.2044;-5.4706,1.548,.4481;-6.3186,.233,1.2486;-2.751,-1.7612,-2.7151;-2.7816,-.143,-3.3949;-3.4629,2.8706,.9911;-.9787,-.4421,2.1086;-1.5134,4.3395,1.0486;.9499,1.0106,2.19;-.7867,-2.5415,-1.5757;-1.2672,1.653,-2.3055;1.0014,2.0603,-1.4165;2.4632,2.4277,1.1762;2.2474,2.7929,2.8913;4.1483,4.0568,1.9524;3.1101,4.8057,.7431;2.8906,5.1803,2.4602;3.3331,-3.5454,.8897;2.5517,-1.8174,-2.9602;5.6004,-4.1741,.1404;4.8129,-2.4321,-3.6883;6.357,-3.6088,-2.1522;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.86035"
                        y3="-0.098519"
                        z3="1.429651"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.568051"
                        y3="0.212545"
                        z3="-0.478259"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.869858"
                        y3="3.678223"
                        z3="1.618133"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.560602"
                        y3="-2.345688"
                        z3="-0.499433"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.598712"
                        y3="-1.115182"
                        z3="-0.138962"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.63019"
                        y3="-0.268609"
                        z3="-1.419356"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.394704"
                        y3="1.080712"
                        z3="1.546974"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.871144"
                        y3="-1.230667"
                        z3="2.933087"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.454052"
                        y3="0.89562"
                        z3="1.323391"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.606427"
                        y3="-0.705408"
                        z3="-2.474588"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.501328"
                        y3="2.444627"
                        z3="1.254276"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.124129"
                        y3="0.60826"
                        z3="1.878705"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.197628"
                        y3="-0.473594"
                        z3="-2.004076"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.404424"
                        y3="3.287801"
                        z3="1.285002"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.008854"
                        y3="1.435755"
                        z3="1.925658"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-0.146027"
                        y3="2.787999"
                        z3="1.620338"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.40964"
                        y3="-1.526021"
                        z3="-1.547594"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.674012"
                        y3="0.8172"
                        z3="-1.955346"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.85698"
                        y3="-1.299366"
                        z3="-1.031786"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.598549"
                        y3="1.056474"
                        z3="-1.459051"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.346553"
                        y3="-0.003114"
                        z3="-0.992556"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.190212"
                        y3="3.216703"
                        z3="1.883621"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.130173"
                        y3="4.388601"
                        z3="1.750157"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.813456"
                        y3="-2.636381"
                        z3="-0.981413"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.665506"
                        y3="-3.306107"
                        z3="-0.112688"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.217105"
                        y3="-2.324347"
                        z3="-2.272411"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.936649"
                        y3="-3.656939"
                        z3="-0.540219"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.496147"
                        y3="-2.677732"
                        z3="-2.683022"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.361706"
                        y3="-3.340045"
                        z3="-1.824263"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.626421"
                        y3="-1.606701"
                        z3="-0.02161"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.327516"
                        y3="-1.927916"
                        z3="-0.204448"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.450696"
                        y3="0.790803"
                        z3="-1.205396"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.629711"
                        y3="-0.310132"
                        z3="-1.856799"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.939001"
                        y3="-1.79331"
                        z3="3.018101"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.999082"
                        y3="-0.668095"
                        z3="3.859813"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.683633"
                        y3="-1.957977"
                        z3="2.876294"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.600908"
                        y3="1.523425"
                        z3="2.204379"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.470616"
                        y3="1.548003"
                        z3="0.448086"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-6.318572"
                        y3="0.232966"
                        z3="1.248565"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.750969"
                        y3="-1.76116"
                        z3="-2.715051"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.781629"
                        y3="-0.142968"
                        z3="-3.394941"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.462865"
                        y3="2.870559"
                        z3="0.991094"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.978664"
                        y3="-0.442111"
                        z3="2.108643"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.513361"
                        y3="4.339474"
                        z3="1.04859"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.949893"
                        y3="1.010574"
                        z3="2.190019"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.786748"
                        y3="-2.541464"
                        z3="-1.575704"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.267228"
                        y3="1.653018"
                        z3="-2.305495"/>
                  <atom elementType="H"
                        id="a48"
                        x3="1.001376"
                        y3="2.060261"
                        z3="-1.416472"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.463234"
                        y3="2.427716"
                        z3="1.176207"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.247367"
                        y3="2.792926"
                        z3="2.891342"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.148295"
                        y3="4.056781"
                        z3="1.952361"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.110089"
                        y3="4.805732"
                        z3="0.74311"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.890559"
                        y3="5.180283"
                        z3="2.460219"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.33309"
                        y3="-3.545403"
                        z3="0.889721"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.551673"
                        y3="-1.817392"
                        z3="-2.960238"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.600436"
                        y3="-4.174095"
                        z3="0.140429"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.812933"
                        y3="-2.432072"
                        z3="-3.688314"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.357021"
                        y3="-3.608825"
                        z3="-2.15215"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.8603,-.0985,1.4297;2.5681,.2125,-.4783;.8699,3.6782,1.6181;1.5606,-2.3457,-.4994;-3.5987,-1.1152,-.139;-3.6302,-.2686,-1.4194;-2.3947,1.0807,1.547;-3.8711,-1.2307,2.9331;-5.4541,.8956,1.3234;-2.6064,-.7054,-2.4746;-2.5013,2.4446,1.2543;-1.1241,.6083,1.8787;-1.1976,-.4736,-2.0041;-1.4044,3.2878,1.285;-.0089,1.4358,1.9257;-.146,2.788,1.6203;-.4096,-1.526,-1.5476;-.674,.8172,-1.9553;.857,-1.2994,-1.0318;.5985,1.0565,-1.4591;1.3466,-.0031,-.9926;2.1902,3.2167,1.8836;3.1302,4.3886,1.7502;2.8135,-2.6364,-.9814;3.6655,-3.3061,-.1127;3.2171,-2.3243,-2.2724;4.9366,-3.6569,-.5402;4.4961,-2.6777,-2.683;5.3617,-3.34,-1.8243;-2.6264,-1.6067,-.0216;-4.3275,-1.9279,-.2044;-3.4507,.7908,-1.2054;-4.6297,-.3101,-1.8568;-2.939,-1.7933,3.0181;-3.9991,-.6681,3.8598;-4.6836,-1.958,2.8763;-5.6009,1.5234,2.2044;-5.4706,1.548,.4481;-6.3186,.233,1.2486;-2.751,-1.7612,-2.7151;-2.7816,-.143,-3.3949;-3.4629,2.8706,.9911;-.9787,-.4421,2.1086;-1.5134,4.3395,1.0486;.9499,1.0106,2.19;-.7867,-2.5415,-1.5757;-1.2672,1.653,-2.3055;1.0014,2.0603,-1.4165;2.4632,2.4277,1.1762;2.2474,2.7929,2.8913;4.1483,4.0568,1.9524;3.1101,4.8057,.7431;2.8906,5.1803,2.4602;3.3331,-3.5454,.8897;2.5517,-1.8174,-2.9602;5.6004,-4.1741,.1404;4.8129,-2.4321,-3.6883;6.357,-3.6088,-2.1521;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3394</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2902.0596</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1623.2305</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05335368</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2945.42448948</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4455.47784316</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7921.83189514</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3466.35405199</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02642500</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95318811</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.89983443</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00409171</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999710043055</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999710043055</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999420086111</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.229500910941</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.5625 -674.9842 -524.7240 -524.1794 -282.0270 -281.5885 -281.5881 -281.3719 -280.8782 -279.9802 -279.9118 -279.8169 -279.8048 -279.8039 -279.7446 -279.7438 -279.7012 -279.7004 -279.6856 -279.5920 -279.5358 -279.4960 -279.3994 -279.3613 -279.1725 -279.1149 -278.7408 -278.6739 -278.6611 -145.6254 -100.6932 -100.6772 -100.6693 -36.8459 -32.9765 -32.3315 -27.0784 -26.6046 -26.4142 -24.9320 -24.2523 -24.2054 -23.6587 -23.4695 -23.4567 -23.0455 -22.7906 -22.0247 -21.3552 -21.3499 -20.5599 -20.4068 -19.9916 -19.6995 -19.3362 -19.2797 -18.6836 -18.4101 -18.0627 -17.5201 -17.3174 -16.7983 -16.3885 -16.1600 -16.0965 -15.9335 -15.6672 -15.6077 -15.4570 -14.8773 -14.7539 -14.7281 -14.6074 -14.4837 -14.2422 -14.1612 -14.0810 -13.9980 -13.8205 -13.7742 -13.6654 -13.4561 -13.3655 -13.3429 -13.1326 -12.9382 -12.8865 -12.8353 -12.6465 -12.5557 -12.4912 -12.3417 -12.2124 -12.1342 -11.9497 -11.7269 -11.4093 -11.3243 -11.2870 -11.1869 -10.4530 -10.3196 -9.9048 -9.4818 -9.4510 -9.3266 -8.9830 -8.4978 -8.2931 1.3935 1.5703 1.6742 1.8259 1.9434 2.0734 3.1120 3.4385 3.4434 3.7772 3.8713 3.9912 4.0847 4.2741 4.5085 4.5846 4.6571 4.7197 4.8321 4.8555 5.0186 5.0526 5.1352 5.2286 5.3094 5.4080 5.5422 5.6078 5.6295 5.7623 5.8235 5.9070 5.9542 6.0823 6.1124 6.1798 6.2281 6.3497 6.3848 6.4375 6.4878 6.6315 6.6881 6.8507 6.9185 7.0400 7.1517 7.3817 7.4023 7.4495 7.5840 7.7025 7.7792 7.8532 7.9122 8.0432 8.0735 8.1420 8.1971 8.3021 8.3864 8.4344 8.5025 8.6862 8.7944 8.8185 8.8802 8.9968 9.1140 9.3010 9.3122 9.3599 9.6995 9.7316 9.9449 10.0452 10.0852 10.1650 10.2602 10.3884 10.4599 10.5243 10.6473 10.7242 10.7873 10.9049 11.0107 11.1028 11.3072 11.3529 11.3933 11.4489 11.6343 11.7390 11.7913 11.8621 11.9744 12.0092 12.1522 12.1876 12.2713 12.3841 12.4878 12.6161 12.6705 12.7567 12.8873 13.0021 13.0716 13.1243 13.1802 13.2674 13.3485 13.3883 13.4612 13.5549 13.6320 13.7524 13.8399 13.8801 13.9569 13.9857 14.0650 14.1271 14.1610 14.1818 14.2746 14.4449 14.4891 14.6057 14.6276 14.7009 14.7500 14.7974 14.8812 15.0818 15.1030 15.1538 15.1797 15.3416 15.4286 15.4907 15.5411 15.6420 15.6963 15.7633 15.8608 15.9555 16.0384 16.0672 16.1495 16.2477 16.3785 16.4828 16.5183 16.5674 16.7149 16.8159 16.9005 17.1264 17.2231 17.3107 17.4902 17.5901 17.6125 17.7282 17.9188 18.1512 18.1791 18.2361 18.4793 18.6565 18.7102 18.7356 18.7494 18.9443 19.1132 19.2413 19.3074 19.3433 19.5721 19.7123 19.8480 19.9910 20.0706 20.1207 20.3095 20.3910 20.4839 20.6354 20.6835 20.8557 20.9092 20.9913 21.1209 21.1772 21.2555 21.4044 21.5776 21.6768 21.7868 21.8429 21.9455 22.0828 22.1936 22.3484 22.5095 22.6197 22.6759 22.8305 22.8823 23.0367 23.1090 23.2292 23.3479 23.4198 23.5563 23.6665 23.8755 23.9711 24.1689 24.2272 24.3464 24.5534 24.5816 24.6904 24.8300 25.0293 25.0966 25.1730 25.2625 25.3054 25.4543 25.6295 25.7604 25.9151 25.9688 26.1993 26.3333 26.4224 26.5707 26.6692 26.8050 26.9009 27.0630 27.0839 27.2292 27.3133 27.4347 27.5998 27.6397 27.7368 27.9196 27.9867 28.0938 28.2491 28.3879 28.6296 28.7477 28.8099 28.8548 28.9130 29.1063 29.1820 29.2986 29.4352 29.5222 29.5566 29.7082 29.8205 29.8784 30.0141 30.0494 30.2659 30.3833 30.5243 30.5875 30.6842 30.7716 30.9315 31.1240 31.2729 31.3542 31.4437 31.5807 31.6869 31.8102 31.8622 32.0228 32.1396 32.1604 32.2478 32.4233 32.5423 32.6080 32.6906 32.9167 33.1135 33.1329 33.2414 33.3328 33.4714 33.6071 33.8425 33.9370 33.9460 34.0969 34.2184 34.4223 34.5038 34.5862 34.6265 34.7516 34.8064 34.9623 35.1081 35.2731 35.4080 35.4571 35.5382 35.6177 35.8040 36.0386 36.0685 36.1215 36.1985 36.4688 36.5890 36.6657 36.7196 36.9076 37.0136 37.1094 37.2397 37.3167 37.3420 37.6808 37.7337 37.8279 38.0053 38.0658 38.1713 38.3771 38.4407 38.5260 38.5811 38.7453 38.8577 38.9431 39.0956 39.2043 39.2403 39.3521 39.4800 39.6275 39.7053 39.8398 39.9416 40.0125 40.0291 40.3597 40.4221 40.5300 40.6232 40.6463 40.8029 41.0041 41.0078 41.1148 41.2241 41.3036 41.3554 41.4755 41.6369 41.6697 41.8227 41.9684 42.1237 42.2507 42.3766 42.3978 42.4777 42.6489 42.7171 42.7422 42.9443 43.0124 43.0700 43.1629 43.2751 43.3877 43.4521 43.4773 43.7314 43.8992 43.9924 44.0422 44.1292 44.2118 44.2634 44.3893 44.6112 44.6557 44.7833 44.9259 45.1224 45.1952 45.2799 45.4077 45.4893 45.5854 45.6500 45.7182 45.9023 46.0026 46.0964 46.1751 46.3774 46.4578 46.5187 46.6963 46.9588 47.0095 47.2339 47.4093 47.5235 47.5762 47.7877 47.9143 48.0392 48.1239 48.3082 48.4768 48.5536 48.8134 48.8320 49.2411 49.3455 49.3696 49.4540 49.7140 49.7946 49.9210 50.0126 50.1399 50.3577 50.4368 50.6611 50.9065 51.1583 51.3573 51.4726 51.7469 52.0732 52.2198 52.4200 52.5301 52.6715 52.7746 52.8223 52.9698 53.2006 53.2119 53.2788 53.8164 53.9669 54.1562 54.3145 54.4546 54.8391 55.0449 55.0997 55.2644 55.4475 55.7759 55.9094 56.1023 56.3543 56.6529 56.9363 56.9802 57.0201 57.2309 57.3538 57.5278 57.7211 57.9438 58.1502 58.3353 58.6086 58.7933 58.9172 59.1574 59.4334 59.5691 59.7526 59.9345 60.0646 60.2899 60.6565 60.7018 60.9582 61.1670 61.3274 61.6329 61.7082 61.9312 62.1019 62.4608 62.5738 62.7763 63.1069 63.3720 63.6845 63.8671 63.9316 64.0040 64.2776 64.5223 64.8781 64.9890 65.0599 65.3369 65.6680 65.7870 66.0769 66.1777 66.4242 66.6817 66.9565 67.1405 67.2742 67.4295 67.6036 67.7908 68.0701 68.1577 68.2716 68.5148 68.8599 69.0992 69.1447 69.3150 69.5364 70.0534 70.2449 70.5509 70.7189 71.1384 71.3170 71.5603 71.9224 72.0528 72.1932 72.4100 72.7629 72.9236 73.0406 73.1986 73.2335 73.2973 73.6889 73.8690 73.9523 74.3331 74.4096 74.5668 74.6380 74.8172 74.9450 75.4417 75.5886 75.7696 76.0238 76.1207 76.1668 76.3394 76.4544 76.5459 76.8226 77.0118 77.0455 77.0921 77.3455 77.4212 77.6085 77.7666 77.9248 78.1072 78.1939 78.3542 78.4815 78.6403 78.7760 78.8371 79.0064 79.1479 79.1933 79.2470 79.3378 79.4559 79.5348 79.6150 79.7158 79.7555 79.8428 79.9311 80.0514 80.2206 80.4046 80.4829 80.7772 80.9593 81.0283 81.1334 81.2136 81.3499 81.5742 81.7279 81.8061 81.9615 81.9858 82.0778 82.3343 82.4661 82.5602 82.6012 82.7805 82.8806 83.1858 83.3033 83.4565 83.6247 83.7313 83.7861 83.9192 83.9885 84.1736 84.2645 84.3402 84.4051 84.5300 84.7060 84.7532 84.9119 84.9224 85.0953 85.1197 85.1868 85.3029 85.4415 85.5268 85.6274 85.6818 85.7592 85.8123 85.9318 86.0236 86.1059 86.1125 86.1332 86.3194 86.4824 86.6643 86.7752 86.9520 87.0216 87.1907 87.2538 87.5164 87.5683 87.6435 87.7948 87.8788 87.9498 88.1395 88.2678 88.2802 88.4014 88.5111 88.5422 88.5800 88.6176 88.7655 88.8956 88.9578 89.0713 89.2656 89.2750 89.4172 89.5500 89.6601 89.6995 89.8309 89.8584 89.9455 90.0047 90.1402 90.2716 90.3888 90.5587 90.6251 90.7739 90.8833 91.0795 91.2687 91.3577 91.4494 91.5114 91.5614 91.8559 91.9352 92.0663 92.1351 92.4451 92.5250 92.7024 92.8152 93.0255 93.1152 93.2216 93.2660 93.4118 93.4751 93.5102 93.5507 93.6659 93.6919 93.8073 93.8891 94.0245 94.1187 94.4514 94.5590 94.6308 94.6862 94.7520 94.9351 95.0771 95.1805 95.2462 95.3384 95.4280 95.4628 95.6100 95.7809 95.8865 95.9692 96.1322 96.2729 96.5042 96.6564 96.8423 96.9380 97.0377 97.1102 97.2376 97.2772 97.4169 97.5706 97.6381 97.6639 98.0190 98.1103 98.1344 98.2249 98.3369 98.5383 98.5880 98.7484 98.7786 98.9349 98.9882 99.1455 99.2285 99.3873 99.5241 99.5990 99.7018 99.7566 99.8941 100.0566 100.2150 100.3991 100.4464 100.5149 100.6888 100.7784 100.8467 100.9702 101.0282 101.2517 101.4308 101.5357 101.7476 101.7924 101.9996 102.0515 102.4002 102.5138 102.5766 102.9755 103.0047 103.1475 103.4841 103.5387 103.7216 103.8486 104.0164 104.1017 104.2147 104.2841 104.3609 104.5674 104.7643 104.9092 105.1221 105.2095 105.2558 105.5065 105.5182 105.6689 105.7424 105.7639 105.8693 106.0372 106.1173 106.2830 106.3599 106.5686 106.6671 106.8032 106.9176 107.0770 107.1876 107.1971 107.3108 107.5922 107.6982 107.8292 107.8608 107.9703 108.1845 108.2468 108.3200 108.5099 108.6024 108.7026 108.9346 109.0400 109.2920 109.4704 109.5443 109.6171 109.6766 109.7791 109.8839 110.0642 110.0837 110.4085 110.6708 110.7315 110.8891 111.1114 111.1875 111.2611 111.3796 111.5233 111.7042 111.8623 111.9858 112.1076 112.2306 112.3470 112.5693 112.6683 112.8813 113.1463 113.3476 113.4601 113.6458 113.6966 113.9037 114.0420 114.1330 114.2090 114.3970 114.4951 114.5546 114.6529 114.7051 114.8988 114.9738 115.1815 115.2298 115.3445 115.4889 115.6558 115.8417 115.9361 116.0264 116.1188 116.3457 116.3471 116.5309 116.6245 116.6803 116.7976 116.8426 117.0576 117.1720 117.3121 117.4867 117.6819 117.7861 117.9444 118.0253 118.1131 118.2070 118.3217 118.3642 118.5533 118.6007 118.8089 118.8946 118.9753 119.0874 119.1376 119.1773 119.3632 119.4730 119.5412 119.6118 119.8201 119.8610 120.1557 120.1624 120.2320 120.3962 120.5373 120.5801 120.6018 120.7504 121.0479 121.1694 121.2093 121.4938 121.5982 121.8016 121.8250 121.9838 122.2375 122.3540 122.6218 122.8402 122.9668 123.1667 123.2179 123.5132 123.6939 123.8013 123.9749 124.1894 124.7464 125.0024 125.0713 125.4030 125.9769 126.1137 126.3699 126.5321 126.7496 126.9618 126.9840 127.1086 127.3884 127.4494 127.4891 127.6229 127.6865 127.7822 127.9721 128.2708 128.5335 128.9290 129.0669 129.2795 129.3580 129.4654 129.7344 129.8452 130.0788 130.2768 130.5524 130.6562 130.6884 130.9579 131.1012 131.2904 131.5127 131.6334 131.7885 131.9774 132.0379 132.1171 132.3816 132.6099 132.6854 132.9750 133.1146 133.1962 133.6573 134.1611 134.1792 134.4166 134.4962 134.8736 135.0663 135.1315 135.3095 135.6315 135.7477 135.9413 136.1838 136.6767 136.8376 136.9041 137.0246 137.3672 137.9032 137.9828 138.0713 138.1689 138.3380 138.4478 138.5748 138.8264 139.1129 139.3246 139.5716 139.6509 139.9043 140.0800 140.3292 140.6027 141.0751 141.2409 141.3764 141.6505 141.9382 142.2017 142.6152 142.9566 143.1320 143.3783 143.5145 143.6439 143.8535 144.0418 144.1763 144.3008 144.3589 144.5460 144.5934 144.6524 144.8980 145.1987 145.5211 146.0636 146.5235 146.7964 146.8869 147.1497 147.5404 147.7058 147.7939 148.0908 148.1819 148.4036 148.4450 148.4679 148.6059 148.9062 149.0592 149.3100 149.4582 149.7348 149.8849 150.0324 150.0946 150.3371 150.4010 150.6794 150.7522 151.0419 151.3919 151.7668 151.7892 152.2883 152.3524 152.6035 153.1304 153.4379 153.6711 153.7533 153.8227 154.1190 154.2329 154.6128 155.1109 155.4766 155.7817 156.1602 156.4777 156.5154 156.5990 156.8836 157.0026 157.1338 157.2592 157.6030 157.6467 157.8188 158.1885 158.3818 158.4180 158.7514 159.0031 159.3307 159.4662 160.1335 161.4056 161.8656 162.2564 163.0594 163.2685 163.9428 164.3547 165.1852 168.5599 168.6200 169.4906 170.2237 171.3276 171.6416 174.0589 174.6708 176.6681 179.5287 180.0047 182.8127 185.7388 186.6587 187.4531 188.5246 188.7879 188.9567 189.6181 190.0339 190.1927 191.4493 192.1637 192.7333 192.8348 195.1546 196.3227 199.7975 201.7005 203.2907 206.1034 206.7774 207.9156 212.3328 230.5413 236.1522 241.6330 248.7278 249.3547 338.9389 618.4325 619.8485 624.4722 629.8779 630.5359 631.3140 632.7545 632.8158 634.1734 634.6687 635.1505 635.8887 636.6892 637.4158 637.9219 638.4529 639.9795 640.1083 643.1817 643.4999 645.7440 646.6621 654.1902 655.9807 657.8517 1213.8341 1215.0963 1567.2193</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.489085 -0.227558 -0.342516 -0.340632 -0.273645 -0.129903 -0.142485 -0.445764 -0.433624 -0.089251 -0.094509 -0.196020 0.081843 -0.290981 -0.246231 0.353143 -0.277625 -0.255684 0.232702 -0.156358 0.239314 0.063960 -0.274578 0.286320 -0.256681 -0.182402 -0.124785 -0.160182 -0.190067 0.082703 0.097255 0.066086 0.092996 0.100930 0.103663 0.103811 0.109623 0.101955 0.108932 0.086778 0.096554 0.145915 0.137794 0.133868 0.137475 0.136317 0.145513 0.156327 0.085540 0.100551 0.090512 0.086929 0.088555 0.147669 0.156685 0.160777 0.162294 0.161104</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5109 9.2276 8.3425 8.3406 6.2736 6.1299 6.1425 6.4458 6.4336 6.0893 6.0945 6.1960 5.9182 6.2910 6.2462 5.6469 6.2776 6.2557 5.7673 6.1564 5.7607 5.9360 6.2746 5.7137 6.2567 6.1824 6.1248 6.1602 6.1901 0.9173 0.9027 0.9339 0.9070 0.8991 0.8963 0.8962 0.8904 0.8980 0.8911 0.9132 0.9034 0.8541 0.8622 0.8661 0.8625 0.8637 0.8545 0.8437 0.9145 0.8994 0.9095 0.9131 0.9114 0.8523 0.8433 0.8392 0.8377 0.8389</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4891 -0.2276 -0.3425 -0.3406 -0.2736 -0.1299 -0.1425 -0.4458 -0.4336 -0.0893 -0.0945 -0.1960 0.0818 -0.2910 -0.2462 0.3531 -0.2776 -0.2557 0.2327 -0.1564 0.2393 0.0640 -0.2746 0.2863 -0.2567 -0.1824 -0.1248 -0.1602 -0.1901 0.0827 0.0973 0.0661 0.0930 0.1009 0.1037 0.1038 0.1096 0.1020 0.1089 0.0868 0.0966 0.1459 0.1378 0.1339 0.1375 0.1363 0.1455 0.1563 0.0855 0.1006 0.0905 0.0869 0.0886 0.1477 0.1567 0.1608 0.1623 0.1611</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1330 1.0511 2.0539 2.0512 3.8276 3.8988 3.6905 3.9024 3.9115 3.8409 3.8229 3.8944 3.5503 4.0413 3.8283 3.6904 3.9921 3.8980 3.7098 3.8360 3.8938 3.7832 3.9750 3.6667 3.9979 3.8763 3.8889 3.9008 3.8946 1.0138 1.0111 1.0054 1.0094 1.0107 1.0090 1.0105 1.0075 1.0075 1.0090 1.0077 1.0057 0.9859 0.9929 1.0146 1.0124 1.0165 1.0030 0.9901 0.9920 0.9896 1.0055 1.0036 1.0037 1.0089 1.0001 0.9881 0.9895 0.9893</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1330 1.0511 2.0539 2.0512 3.8276 3.8988 3.6905 3.9024 3.9115 3.8409 3.8229 3.8944 3.5503 4.0413 3.8283 3.6904 3.9921 3.8980 3.7098 3.8360 3.8938 3.7832 3.9750 3.6667 3.9979 3.8763 3.8889 3.9008 3.8946 1.0138 1.0111 1.0054 1.0094 1.0107 1.0090 1.0105 1.0075 1.0075 1.0090 1.0077 1.0057 0.9859 0.9929 1.0146 1.0124 1.0165 1.0030 0.9901 0.9920 0.9896 1.0055 1.0036 1.0037 1.0089 1.0001 0.9881 0.9895 0.9893</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9484 0.9890 0.9602 0.9795 0.9677 1.0771 0.8719 0.9004 0.9604 0.9065 0.9830 0.9777 0.9235 1.0158 0.9961 1.2834 1.3519 0.9785 0.9725 0.9766 0.9737 0.9715 0.9736 0.8997 1.0154 1.0050 1.4895 0.9905 1.4014 0.9840 1.3420 1.3274 1.3363 0.9994 1.2756 0.9932 1.4067 0.9922 1.3958 1.0089 1.3819 1.3816 0.9896 0.9670 0.9698 0.9782 0.9899 0.9936 0.9953 1.3650 1.3356 1.4487 0.9852 1.4079 0.9703 1.3943 0.9802 1.4221 0.9764 0.9827</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032808056</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086161734363</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-19.38993 19.24302 -0.14691 6.07213 -6.24840 -0.17627 6.24274 -6.86749 -0.62474</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.66555</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.69170</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
