<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.572834"
                        y3="1.246568"
                        z3="0.728582"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.029783"
                        y3="-4.620885"
                        z3="1.128396"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.217479"
                        y3="3.004209"
                        z3="0.70609"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.669479"
                        y3="-2.134786"
                        z3="0.511748"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.513581"
                        y3="-0.416453"
                        z3="-0.164235"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.866299"
                        y3="-0.337012"
                        z3="-1.546044"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.800935"
                        y3="1.881423"
                        z3="0.769329"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.203769"
                        y3="0.984729"
                        z3="2.482253"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.655108"
                        y3="2.473186"
                        z3="-0.198176"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.495859"
                        y3="-1.699942"
                        z3="-2.133508"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.403897"
                        y3="3.041862"
                        z3="0.109918"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.794433"
                        y3="1.143728"
                        z3="1.406448"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.549045"
                        y3="-2.48739"
                        z3="-1.266784"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.076889"
                        y3="3.45868"
                        z3="0.066476"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.530319"
                        y3="1.537494"
                        z3="1.38095"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.902844"
                        y3="2.699401"
                        z3="0.699334"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.357033"
                        y3="-1.916892"
                        z3="-0.818566"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.854171"
                        y3="-3.786884"
                        z3="-0.878438"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.51896"
                        y3="-2.63703"
                        z3="-0.021817"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.990717"
                        y3="-4.51548"
                        z3="-0.071243"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.186667"
                        y3="-3.936618"
                        z3="0.341918"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.654637"
                        y3="4.162048"
                        z3="0.001063"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.156535"
                        y3="4.245126"
                        z3="0.111062"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.505252"
                        y3="-1.305832"
                        z3="-0.190432"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.33829"
                        y3="-0.504722"
                        z3="0.581389"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.58744"
                        y3="-1.279764"
                        z3="-1.576687"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.243752"
                        y3="0.341611"
                        z3="-0.037841"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.493572"
                        y3="-0.417977"
                        z3="-2.182307"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.320693"
                        y3="0.397513"
                        z3="-1.42349"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.947348"
                        y3="-1.100542"
                        z3="0.478786"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.517826"
                        y3="-0.84651"
                        z3="-0.239684"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.966871"
                        y3="0.284938"
                        z3="-1.50761"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.54079"
                        y3="0.167507"
                        z3="-2.242771"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.252597"
                        y3="1.921133"
                        z3="3.040911"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.205359"
                        y3="0.549491"
                        z3="2.482602"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.554662"
                        y3="0.304376"
                        z3="3.037691"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.686746"
                        y3="2.117568"
                        z3="-0.24303"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.671746"
                        y3="3.45156"
                        z3="0.28584"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.319247"
                        y3="2.620495"
                        z3="-1.226533"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.401706"
                        y3="-2.289403"
                        z3="-2.293846"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.046068"
                        y3="-1.550606"
                        z3="-3.119796"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.138705"
                        y3="3.654326"
                        z3="-0.400013"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.041945"
                        y3="0.228296"
                        z3="1.933941"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.168668"
                        y3="4.367131"
                        z3="-0.466567"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.285683"
                        y3="0.950091"
                        z3="1.887597"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.112486"
                        y3="-0.897077"
                        z3="-1.090839"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.780794"
                        y3="-4.241645"
                        z3="-1.204465"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.230553"
                        y3="-5.526014"
                        z3="0.233337"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.189725"
                        y3="5.05748"
                        z3="0.425695"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.354311"
                        y3="4.099331"
                        z3="-1.049785"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.502582"
                        y3="5.144775"
                        z3="-0.397483"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.482084"
                        y3="4.304187"
                        z3="1.149922"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.64247"
                        y3="3.390032"
                        z3="-0.359764"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.274633"
                        y3="-0.546065"
                        z3="1.661463"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.963753"
                        y3="-1.915652"
                        z3="-2.190595"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.887489"
                        y3="0.963996"
                        z3="0.569796"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.552195"
                        y3="-0.394608"
                        z3="-3.262701"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.022199"
                        y3="1.065208"
                        z3="-1.905751"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5728,1.2466,.7286;1.0298,-4.6209,1.1284;2.2175,3.0042,.7061;1.6695,-2.1348,.5117;-3.5136,-.4165,-.1642;-2.8663,-.337,-1.546;-1.8009,1.8814,.7693;-4.2038,.9847,2.4823;-4.6551,2.4732,-.1982;-2.4959,-1.6999,-2.1335;-1.4039,3.0419,.1099;-.7944,1.1437,1.4064;-1.549,-2.4874,-1.2668;-.0769,3.4587,.0665;.5303,1.5375,1.3809;.9028,2.6994,.6993;-.357,-1.9169,-.8186;-1.8542,-3.7869,-.8784;.519,-2.637,-.0218;-.9907,-4.5155,-.0712;.1867,-3.9366,.3419;2.6546,4.162,.0011;4.1565,4.2451,.1111;2.5053,-1.3058,-.1904;3.3383,-.5047,.5814;2.5874,-1.2798,-1.5767;4.2438,.3416,-.0378;3.4936,-.418,-2.1823;4.3207,.3975,-1.4235;-2.9473,-1.1005,.4788;-4.5178,-.8465,-.2397;-1.9669,.2849,-1.5076;-3.5408,.1675,-2.2428;-4.2526,1.9211,3.0409;-5.2054,.5495,2.4826;-3.5547,.3044,3.0377;-5.6867,2.1176,-.243;-4.6717,3.4516,.2858;-4.3192,2.6205,-1.2265;-3.4017,-2.2894,-2.2938;-2.0461,-1.5506,-3.1198;-2.1387,3.6543,-.4;-1.0419,.2283,1.9339;.1687,4.3671,-.4666;1.2857,.9501,1.8876;-.1125,-.8971,-1.0908;-2.7808,-4.2416,-1.2045;-1.2306,-5.526,.2333;2.1897,5.0575,.4257;2.3543,4.0993,-1.0498;4.5026,5.1448,-.3975;4.4821,4.3042,1.1499;4.6425,3.39,-.3598;3.2746,-.5461,1.6615;1.9638,-1.9157,-2.1906;4.8875,.964,.5698;3.5522,-.3946,-3.2627;5.0222,1.0652,-1.9058;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2957.1311708842 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.450e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.432 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.826 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.57283434"
                                 y3="1.2465678"
                                 z3="0.72858159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.02978257"
                                 y3="-4.62088517"
                                 z3="1.12839644">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.21747926"
                                 y3="3.00420907"
                                 z3="0.70608991">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.66947892"
                                 y3="-2.13478624"
                                 z3="0.51174808">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.51358077"
                                 y3="-0.4164533"
                                 z3="-0.16423533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.86629891"
                                 y3="-0.33701193"
                                 z3="-1.54604435">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.80093463"
                                 y3="1.881423"
                                 z3="0.76932922">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.20376897"
                                 y3="0.98472895"
                                 z3="2.48225309">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.65510801"
                                 y3="2.47318626"
                                 z3="-0.19817561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.49585889"
                                 y3="-1.6999417"
                                 z3="-2.1335082">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.40389655"
                                 y3="3.04186201"
                                 z3="0.10991755">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.79443293"
                                 y3="1.14372771"
                                 z3="1.40644835">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.5490448"
                                 y3="-2.48739018"
                                 z3="-1.26678397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.07688897"
                                 y3="3.45867959"
                                 z3="0.06647623">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.53031905"
                                 y3="1.5374945"
                                 z3="1.38094985">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.90284395"
                                 y3="2.69940131"
                                 z3="0.69933394">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.35703263"
                                 y3="-1.91689236"
                                 z3="-0.8185655">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.85417069"
                                 y3="-3.78688391"
                                 z3="-0.8784381">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.5189605"
                                 y3="-2.63703023"
                                 z3="-0.02181654">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.99071673"
                                 y3="-4.51548016"
                                 z3="-0.07124286">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.18666652"
                                 y3="-3.93661772"
                                 z3="0.34191808">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.6546368"
                                 y3="4.16204804"
                                 z3="0.00106342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.15653455"
                                 y3="4.24512634"
                                 z3="0.11106187">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.50525217"
                                 y3="-1.30583235"
                                 z3="-0.19043249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.33829015"
                                 y3="-0.50472236"
                                 z3="0.58138921">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.58744027"
                                 y3="-1.27976354"
                                 z3="-1.57668728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.24375208"
                                 y3="0.34161084"
                                 z3="-0.03784057">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.49357217"
                                 y3="-0.41797686"
                                 z3="-2.18230692">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.32069279"
                                 y3="0.39751257"
                                 z3="-1.42349002">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.94734844"
                                 y3="-1.10054179"
                                 z3="0.47878571">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.51782561"
                                 y3="-0.84650957"
                                 z3="-0.23968397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.96687097"
                                 y3="0.28493825"
                                 z3="-1.50760967">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.54078968"
                                 y3="0.16750677"
                                 z3="-2.24277058">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.25259719"
                                 y3="1.92113323"
                                 z3="3.04091063">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-5.20535916"
                                 y3="0.5494911"
                                 z3="2.4826024">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.55466162"
                                 y3="0.30437561"
                                 z3="3.03769082">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.68674626"
                                 y3="2.11756841"
                                 z3="-0.24302959">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.6717459"
                                 y3="3.45156019"
                                 z3="0.28583997">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.31924738"
                                 y3="2.62049507"
                                 z3="-1.22653276">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.4017059"
                                 y3="-2.28940339"
                                 z3="-2.29384619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.04606793"
                                 y3="-1.55060597"
                                 z3="-3.11979558">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.13870534"
                                 y3="3.65432629"
                                 z3="-0.40001266">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.04194507"
                                 y3="0.22829566"
                                 z3="1.93394092">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.16866754"
                                 y3="4.3671307"
                                 z3="-0.46656671">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.28568283"
                                 y3="0.9500906"
                                 z3="1.88759685">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.11248631"
                                 y3="-0.89707728"
                                 z3="-1.09083943">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.78079429"
                                 y3="-4.2416453"
                                 z3="-1.20446498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.23055339"
                                 y3="-5.52601377"
                                 z3="0.23333692">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.1897253"
                                 y3="5.05747971"
                                 z3="0.42569473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.35431054"
                                 y3="4.09933122"
                                 z3="-1.04978516">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.50258205"
                                 y3="5.14477457"
                                 z3="-0.39748315">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.48208383"
                                 y3="4.30418741"
                                 z3="1.14992192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.64246962"
                                 y3="3.39003153"
                                 z3="-0.35976434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.27463321"
                                 y3="-0.54606491"
                                 z3="1.66146306">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.96375255"
                                 y3="-1.91565168"
                                 z3="-2.19059524">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.88748897"
                                 y3="0.96399633"
                                 z3="0.56979563">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.55219517"
                                 y3="-0.39460847"
                                 z3="-3.26270092">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.02219914"
                                 y3="1.06520809"
                                 z3="-1.90575076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5728,1.2466,.7286;1.0298,-4.6209,1.1284;2.2175,3.0042,.7061;1.6695,-2.1348,.5117;-3.5136,-.4165,-.1642;-2.8663,-.337,-1.546;-1.8009,1.8814,.7693;-4.2038,.9847,2.4823;-4.6551,2.4732,-.1982;-2.4959,-1.6999,-2.1335;-1.4039,3.0419,.1099;-.7944,1.1437,1.4064;-1.549,-2.4874,-1.2668;-.0769,3.4587,.0665;.5303,1.5375,1.3809;.9028,2.6994,.6993;-.357,-1.9169,-.8186;-1.8542,-3.7869,-.8784;.519,-2.637,-.0218;-.9907,-4.5155,-.0712;.1867,-3.9366,.3419;2.6546,4.162,.0011;4.1565,4.2451,.1111;2.5053,-1.3058,-.1904;3.3383,-.5047,.5814;2.5874,-1.2798,-1.5767;4.2438,.3416,-.0378;3.4936,-.418,-2.1823;4.3207,.3975,-1.4235;-2.9473,-1.1005,.4788;-4.5178,-.8465,-.2397;-1.9669,.2849,-1.5076;-3.5408,.1675,-2.2428;-4.2526,1.9211,3.0409;-5.2054,.5495,2.4826;-3.5547,.3044,3.0377;-5.6867,2.1176,-.243;-4.6717,3.4516,.2858;-4.3192,2.6205,-1.2265;-3.4017,-2.2894,-2.2938;-2.0461,-1.5506,-3.1198;-2.1387,3.6543,-.4;-1.0419,.2283,1.9339;.1687,4.3671,-.4666;1.2857,.9501,1.8876;-.1125,-.8971,-1.0908;-2.7808,-4.2416,-1.2045;-1.2306,-5.526,.2333;2.1897,5.0575,.4257;2.3543,4.0993,-1.0498;4.5026,5.1448,-.3975;4.4821,4.3042,1.1499;4.6425,3.39,-.3598;3.2746,-.5461,1.6615;1.9638,-1.9157,-2.1906;4.8875,.964,.5698;3.5522,-.3946,-3.2627;5.0222,1.0652,-1.9058;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.572834"
                        y3="1.246568"
                        z3="0.728582"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.029783"
                        y3="-4.620885"
                        z3="1.128396"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.217479"
                        y3="3.004209"
                        z3="0.70609"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.669479"
                        y3="-2.134786"
                        z3="0.511748"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.513581"
                        y3="-0.416453"
                        z3="-0.164235"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.866299"
                        y3="-0.337012"
                        z3="-1.546044"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.800935"
                        y3="1.881423"
                        z3="0.769329"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.203769"
                        y3="0.984729"
                        z3="2.482253"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.655108"
                        y3="2.473186"
                        z3="-0.198176"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.495859"
                        y3="-1.699942"
                        z3="-2.133508"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.403897"
                        y3="3.041862"
                        z3="0.109918"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.794433"
                        y3="1.143728"
                        z3="1.406448"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.549045"
                        y3="-2.48739"
                        z3="-1.266784"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.076889"
                        y3="3.45868"
                        z3="0.066476"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.530319"
                        y3="1.537494"
                        z3="1.38095"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.902844"
                        y3="2.699401"
                        z3="0.699334"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.357033"
                        y3="-1.916892"
                        z3="-0.818566"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.854171"
                        y3="-3.786884"
                        z3="-0.878438"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.51896"
                        y3="-2.63703"
                        z3="-0.021817"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.990717"
                        y3="-4.51548"
                        z3="-0.071243"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.186667"
                        y3="-3.936618"
                        z3="0.341918"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.654637"
                        y3="4.162048"
                        z3="0.001063"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.156535"
                        y3="4.245126"
                        z3="0.111062"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.505252"
                        y3="-1.305832"
                        z3="-0.190432"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.33829"
                        y3="-0.504722"
                        z3="0.581389"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.58744"
                        y3="-1.279764"
                        z3="-1.576687"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.243752"
                        y3="0.341611"
                        z3="-0.037841"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.493572"
                        y3="-0.417977"
                        z3="-2.182307"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.320693"
                        y3="0.397513"
                        z3="-1.42349"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.947348"
                        y3="-1.100542"
                        z3="0.478786"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.517826"
                        y3="-0.84651"
                        z3="-0.239684"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.966871"
                        y3="0.284938"
                        z3="-1.50761"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.54079"
                        y3="0.167507"
                        z3="-2.242771"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.252597"
                        y3="1.921133"
                        z3="3.040911"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.205359"
                        y3="0.549491"
                        z3="2.482602"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.554662"
                        y3="0.304376"
                        z3="3.037691"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.686746"
                        y3="2.117568"
                        z3="-0.24303"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.671746"
                        y3="3.45156"
                        z3="0.28584"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.319247"
                        y3="2.620495"
                        z3="-1.226533"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.401706"
                        y3="-2.289403"
                        z3="-2.293846"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.046068"
                        y3="-1.550606"
                        z3="-3.119796"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.138705"
                        y3="3.654326"
                        z3="-0.400013"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.041945"
                        y3="0.228296"
                        z3="1.933941"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.168668"
                        y3="4.367131"
                        z3="-0.466567"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.285683"
                        y3="0.950091"
                        z3="1.887597"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.112486"
                        y3="-0.897077"
                        z3="-1.090839"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.780794"
                        y3="-4.241645"
                        z3="-1.204465"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.230553"
                        y3="-5.526014"
                        z3="0.233337"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.189725"
                        y3="5.05748"
                        z3="0.425695"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.354311"
                        y3="4.099331"
                        z3="-1.049785"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.502582"
                        y3="5.144775"
                        z3="-0.397483"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.482084"
                        y3="4.304187"
                        z3="1.149922"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.64247"
                        y3="3.390032"
                        z3="-0.359764"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.274633"
                        y3="-0.546065"
                        z3="1.661463"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.963753"
                        y3="-1.915652"
                        z3="-2.190595"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.887489"
                        y3="0.963996"
                        z3="0.569796"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.552195"
                        y3="-0.394608"
                        z3="-3.262701"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.022199"
                        y3="1.065208"
                        z3="-1.905751"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5728,1.2466,.7286;1.0298,-4.6209,1.1284;2.2175,3.0042,.7061;1.6695,-2.1348,.5117;-3.5136,-.4165,-.1642;-2.8663,-.337,-1.546;-1.8009,1.8814,.7693;-4.2038,.9847,2.4823;-4.6551,2.4732,-.1982;-2.4959,-1.6999,-2.1335;-1.4039,3.0419,.1099;-.7944,1.1437,1.4064;-1.549,-2.4874,-1.2668;-.0769,3.4587,.0665;.5303,1.5375,1.3809;.9028,2.6994,.6993;-.357,-1.9169,-.8186;-1.8542,-3.7869,-.8784;.519,-2.637,-.0218;-.9907,-4.5155,-.0712;.1867,-3.9366,.3419;2.6546,4.162,.0011;4.1565,4.2451,.1111;2.5053,-1.3058,-.1904;3.3383,-.5047,.5814;2.5874,-1.2798,-1.5767;4.2438,.3416,-.0378;3.4936,-.418,-2.1823;4.3207,.3975,-1.4235;-2.9473,-1.1005,.4788;-4.5178,-.8465,-.2397;-1.9669,.2849,-1.5076;-3.5408,.1675,-2.2428;-4.2526,1.9211,3.0409;-5.2054,.5495,2.4826;-3.5547,.3044,3.0377;-5.6867,2.1176,-.243;-4.6717,3.4516,.2858;-4.3192,2.6205,-1.2265;-3.4017,-2.2894,-2.2938;-2.0461,-1.5506,-3.1198;-2.1387,3.6543,-.4;-1.0419,.2283,1.9339;.1687,4.3671,-.4666;1.2857,.9501,1.8876;-.1125,-.8971,-1.0908;-2.7808,-4.2416,-1.2045;-1.2306,-5.526,.2333;2.1897,5.0575,.4257;2.3543,4.0993,-1.0498;4.5026,5.1448,-.3975;4.4821,4.3042,1.1499;4.6425,3.39,-.3598;3.2746,-.5461,1.6615;1.9638,-1.9157,-2.1906;4.8875,.964,.5698;3.5522,-.3946,-3.2627;5.0222,1.0652,-1.9058;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3367</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2907.5535</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1635.5954</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05293450</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2957.13117088</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4467.18410538</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7945.28020637</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3478.09610099</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02832395</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96805464</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91512015</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408122</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999906119605</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999906119605</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999812239209</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.235290285713</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4747 127.5419 127.6783 127.7308 127.9561 128.2893 128.3163 128.4165 128.6197 128.8381 129.2352 129.4586 129.4962 129.7964 129.9358 129.9906 130.4123 130.6038 130.6916 130.8625 130.8697 131.1654 131.3437 131.7049 131.9077 131.9678 132.0552 132.2269 132.3310 132.5908 132.7040 132.9087 133.0760 133.3910 133.5124 134.0785 134.3052 134.4590 134.4889 134.5628 134.8819 135.0795 135.2723 135.5685 135.6989 135.8849 136.4772 136.6809 136.7702 136.8301 137.1415 137.3913 137.4921 137.7242 137.8016 138.1716 138.3598 138.5272 138.7834 138.8776 138.9993 139.1980 139.3200 139.7144 139.8188 140.0346 140.2833 140.3965 140.4804 140.9192 141.2495 141.5074 141.8703 142.0605 142.2036 142.9504 143.0417 143.1719 143.4663 143.5813 143.7304 143.8455 144.0206 144.1758 144.4024 144.6030 144.6975 144.8426 145.0383 145.1880 145.4231 145.7694 146.5201 146.6503 146.8342 146.9678 147.3035 147.4887 147.8397 148.0534 148.2366 148.4028 148.5653 148.6178 148.7325 148.8292 149.0849 149.2502 149.4217 149.6173 149.7852 149.9938 150.2282 150.3814 150.4871 150.7279 150.9590 151.0627 151.0815 151.5064 151.6983 151.9190 152.1412 152.4175 152.4760 153.1510 153.5739 153.7689 153.9723 154.1649 154.3298 154.8026 155.2621 155.4859 155.7429 156.1530 156.2731 156.3765 156.3978 156.7235 156.8414 156.9526 157.2365 157.3446 157.3613 157.8576 157.9101 158.3529 158.3841 158.6691 158.7328 159.2323 159.4711 159.9727 160.6521 161.1230 161.7596 162.0450 162.3353 162.8387 163.0926 164.3259 164.8946 168.5693 169.1908 169.5805 169.9244 171.8826 172.2820 174.0040 174.3591 176.6780 179.6068 180.6769 182.7651 186.8616 187.0811 187.3950 188.1878 188.3461 189.2380 189.4488 190.0288 190.5124 191.1373 192.2221 192.5526 192.7277 194.6346 195.9601 200.0571 202.5632 203.6254 206.1499 206.9376 207.7311 212.5454 229.8627 235.8325 241.0803 247.9924 248.9223 339.1234 617.4209 619.9707 621.1267 629.6692 630.3072 631.8407 632.5230 632.6394 634.3742 634.6578 635.4825 635.5611 636.9050 637.3886 637.6680 638.5804 639.7943 641.5285 642.6563 643.0819 646.1175 646.9925 654.2251 655.5548 658.3198 1214.0099 1215.9039 1563.1288</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.497356 -0.220184 -0.340881 -0.334373 -0.271333 -0.119158 -0.169879 -0.434179 -0.445239 -0.103262 -0.127829 -0.128539 -0.010875 -0.257549 -0.322258 0.377306 -0.291301 -0.176343 0.306046 -0.166562 0.169223 0.053672 -0.278402 0.358698 -0.292681 -0.236632 -0.151288 -0.138487 -0.184693 0.082858 0.091446 0.072343 0.092439 0.103136 0.103563 0.101322 0.109906 0.108179 0.103931 0.081794 0.097029 0.146282 0.134219 0.140413 0.153038 0.151200 0.141478 0.150366 0.104899 0.097644 0.097294 0.091905 0.078595 0.151211 0.161485 0.165890 0.162505 0.163261</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5026 9.2202 8.3409 8.3344 6.2713 6.1192 6.1699 6.4342 6.4452 6.1033 6.1278 6.1285 6.0109 6.2575 6.3223 5.6227 6.2913 6.1763 5.6940 6.1666 5.8308 5.9463 6.2784 5.6413 6.2927 6.2366 6.1513 6.1385 6.1847 0.9171 0.9086 0.9277 0.9076 0.8969 0.8964 0.8987 0.8901 0.8918 0.8961 0.9182 0.9030 0.8537 0.8658 0.8596 0.8470 0.8488 0.8585 0.8496 0.8951 0.9024 0.9027 0.9081 0.9214 0.8488 0.8385 0.8341 0.8375 0.8367</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4974 -0.2202 -0.3409 -0.3344 -0.2713 -0.1192 -0.1699 -0.4342 -0.4452 -0.1033 -0.1278 -0.1285 -0.0109 -0.2575 -0.3223 0.3773 -0.2913 -0.1763 0.3060 -0.1666 0.1692 0.0537 -0.2784 0.3587 -0.2927 -0.2366 -0.1513 -0.1385 -0.1847 0.0829 0.0914 0.0723 0.0924 0.1031 0.1036 0.1013 0.1099 0.1082 0.1039 0.0818 0.0970 0.1463 0.1342 0.1404 0.1530 0.1512 0.1415 0.1504 0.1049 0.0976 0.0973 0.0919 0.0786 0.1512 0.1615 0.1659 0.1625 0.1633</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1274 1.0640 2.0550 2.0614 3.8404 3.8527 3.7371 3.8964 3.9216 3.8533 3.8757 3.8461 3.7196 3.9264 4.0033 3.7034 3.9105 3.8815 3.5317 3.8726 4.0714 3.7849 3.9700 3.6013 3.9417 3.9074 3.8366 3.8934 3.8745 1.0112 1.0162 1.0092 1.0063 1.0087 1.0089 1.0093 1.0088 1.0079 1.0060 1.0077 1.0024 0.9885 0.9942 1.0111 1.0026 0.9901 1.0016 0.9977 0.9883 0.9873 1.0077 1.0032 1.0029 1.0078 0.9949 0.9838 0.9885 0.9876</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1274 1.0640 2.0550 2.0614 3.8404 3.8527 3.7371 3.8964 3.9216 3.8533 3.8757 3.8461 3.7196 3.9264 4.0033 3.7034 3.9105 3.8815 3.5317 3.8726 4.0714 3.7849 3.9700 3.6013 3.9417 3.9074 3.8366 3.8934 3.8745 1.0112 1.0162 1.0092 1.0063 1.0087 1.0089 1.0093 1.0088 1.0079 1.0060 1.0077 1.0024 0.9885 0.9942 1.0111 1.0026 0.9901 1.0016 0.9977 0.9883 0.9873 1.0077 1.0032 1.0029 1.0078 0.9949 0.9838 0.9885 0.9876</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9547 1.0014 0.9588 0.9810 1.0659 1.0709 0.8779 0.9396 0.9569 0.9099 0.9853 0.9790 0.9251 1.0103 0.9958 1.3430 1.3001 0.9738 0.9742 0.9757 0.9719 0.9742 0.9738 0.9197 1.0169 0.9938 1.4488 0.9744 1.4690 0.9970 1.3684 1.3894 1.3260 0.9753 1.3143 0.9910 1.3188 0.9703 1.3899 0.9842 1.3657 1.4461 0.9878 0.9598 0.9760 0.9752 0.9929 0.9961 0.9949 1.3206 1.3432 1.4128 1.0011 1.4112 0.9758 1.3688 0.9933 1.4258 0.9772 0.9858</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.033123084</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086057579908</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-14.89828 14.18535 -0.71292 27.97928 -26.60012 1.37916 -6.74679 5.20599 -1.54080</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.18733</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.55975</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
