<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.200964"
                        y3="1.111375"
                        z3="1.03916"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.120518"
                        y3="-1.515901"
                        z3="-2.630956"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.186196"
                        y3="2.53365"
                        z3="-1.304056"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.950256"
                        y3="-2.365752"
                        z3="-0.101187"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.123332"
                        y3="-0.783305"
                        z3="1.030049"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.665676"
                        y3="-1.46317"
                        z3="-0.234122"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.583622"
                        y3="1.715522"
                        z3="0.28199"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.330842"
                        y3="1.737343"
                        z3="2.807593"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.666375"
                        y3="1.723787"
                        z3="0.028275"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.954437"
                        y3="-2.779625"
                        z3="-0.577853"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.675343"
                        y3="2.496269"
                        z3="0.993524"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.181079"
                        y3="1.283596"
                        z3="-0.989757"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.5814"
                        y3="-2.524628"
                        z3="-1.13341"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.586221"
                        y3="2.812338"
                        z3="0.49776"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.066945"
                        y3="1.581765"
                        z3="-1.502797"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.971821"
                        y3="2.333209"
                        z3="-0.749655"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.446006"
                        y3="-2.604142"
                        z3="-0.334601"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.433162"
                        y3="-2.128069"
                        z3="-2.463021"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.802225"
                        y3="-2.260675"
                        z3="-0.837675"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.191646"
                        y3="-1.798954"
                        z3="-2.980969"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.913367"
                        y3="-1.852847"
                        z3="-2.155631"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.212495"
                        y3="3.129441"
                        z3="-0.517606"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.493719"
                        y3="3.080768"
                        z3="-1.312257"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.090986"
                        y3="-1.665136"
                        z3="1.068557"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.281078"
                        y3="-0.597089"
                        z3="1.431273"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.138768"
                        y3="-2.06881"
                        z3="1.888517"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.524801"
                        y3="0.055865"
                        z3="2.633633"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.373649"
                        y3="-1.399321"
                        z3="3.078654"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.564174"
                        y3="-0.337313"
                        z3="3.462828"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.069295"
                        y3="-1.040881"
                        z3="1.183033"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.644356"
                        y3="-1.180529"
                        z3="1.906419"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.596655"
                        y3="-0.809204"
                        z3="-1.108618"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.732617"
                        y3="-1.656955"
                        z3="-0.103465"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.514904"
                        y3="1.368723"
                        z3="3.432405"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.323614"
                        y3="2.827486"
                        z3="2.862968"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.264118"
                        y3="1.39676"
                        z3="3.26155"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.607999"
                        y3="1.314719"
                        z3="0.400646"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.743348"
                        y3="2.812312"
                        z3="0.0697"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.582972"
                        y3="1.444765"
                        z3="-1.024029"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.893763"
                        y3="-3.410327"
                        z3="0.312265"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.546413"
                        y3="-3.325457"
                        z3="-1.316109"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.933196"
                        y3="2.866931"
                        z3="1.979137"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.84721"
                        y3="0.682287"
                        z3="-1.59883"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.253512"
                        y3="3.410013"
                        z3="1.104322"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.358241"
                        y3="1.220731"
                        z3="-2.481875"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.529421"
                        y3="-2.931828"
                        z3="0.695258"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.303828"
                        y3="-2.069179"
                        z3="-3.104603"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.081372"
                        y3="-1.488139"
                        z3="-4.011897"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.326963"
                        y3="2.584741"
                        z3="0.4254"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.95196"
                        y3="4.164227"
                        z3="-0.273588"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.296208"
                        y3="3.534462"
                        z3="-0.731214"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.785065"
                        y3="2.054929"
                        z3="-1.538937"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.407255"
                        y3="3.633109"
                        z3="-2.248281"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.468669"
                        y3="-0.262419"
                        z3="0.799042"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.767945"
                        y3="-2.898017"
                        z3="1.590236"/>
                  <atom elementType="H"
                        id="a56"
                        x3="0.88677"
                        y3="0.882991"
                        z3="2.916632"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.192319"
                        y3="-1.716338"
                        z3="3.711293"/>
                  <atom elementType="H"
                        id="a58"
                        x3="2.743985"
                        y3="0.178797"
                        z3="4.3963"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.201,1.1114,1.0392;2.1205,-1.5159,-2.631;2.1862,2.5337,-1.3041;1.9503,-2.3658,-.1012;-3.1233,-.7833,1.03;-3.6657,-1.4632,-.2341;-1.5836,1.7155,.282;-3.3308,1.7373,2.8076;-4.6664,1.7238,.0283;-2.9544,-2.7796,-.5779;-.6753,2.4963,.9935;-1.1811,1.2836,-.9898;-1.5814,-2.5246,-1.1334;.5862,2.8123,.4978;.0669,1.5818,-1.5028;.9718,2.3332,-.7497;-.446,-2.6041,-.3346;-1.4332,-2.1281,-2.463;.8022,-2.2607,-.8377;-.1916,-1.799,-2.981;.9134,-1.8528,-2.1556;3.2125,3.1294,-.5176;4.4937,3.0808,-1.3123;2.091,-1.6651,1.0686;1.2811,-.5971,1.4313;3.1388,-2.0688,1.8885;1.5248,.0559,2.6336;3.3736,-1.3993,3.0787;2.5642,-.3373,3.4628;-2.0693,-1.0409,1.183;-3.6444,-1.1805,1.9064;-3.5967,-.8092,-1.1086;-4.7326,-1.657,-.1035;-2.5149,1.3687,3.4324;-3.3236,2.8275,2.863;-4.2641,1.3968,3.2616;-5.608,1.3147,.4006;-4.7433,2.8123,.0697;-4.583,1.4448,-1.024;-2.8938,-3.4103,.3123;-3.5464,-3.3255,-1.3161;-.9332,2.8669,1.9791;-1.8472,.6823,-1.5988;1.2535,3.41,1.1043;.3582,1.2207,-2.4819;-.5294,-2.9318,.6953;-2.3038,-2.0692,-3.1046;-.0814,-1.4881,-4.0119;3.327,2.5847,.4254;2.952,4.1642,-.2736;5.2962,3.5345,-.7312;4.7851,2.0549,-1.5389;4.4073,3.6331,-2.2483;.4687,-.2624,.799;3.7679,-2.898,1.5902;.8868,.883,2.9166;4.1923,-1.7163,3.7113;2.744,.1788,4.3963;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3045.8585412550 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.088e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.403 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.796 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.20096429"
                                 y3="1.11137464"
                                 z3="1.03915963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.12051769"
                                 y3="-1.51590063"
                                 z3="-2.63095583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.1861963"
                                 y3="2.53365017"
                                 z3="-1.3040556">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.95025599"
                                 y3="-2.36575173"
                                 z3="-0.10118702">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.12333229"
                                 y3="-0.78330455"
                                 z3="1.03004863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.66567576"
                                 y3="-1.46316983"
                                 z3="-0.23412247">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.58362231"
                                 y3="1.71552239"
                                 z3="0.28199028">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.33084213"
                                 y3="1.73734303"
                                 z3="2.80759293">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.6663751"
                                 y3="1.72378689"
                                 z3="0.028275">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.95443739"
                                 y3="-2.77962519"
                                 z3="-0.57785254">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.67534335"
                                 y3="2.49626939"
                                 z3="0.9935242">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.18107859"
                                 y3="1.28359594"
                                 z3="-0.98975713">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.58140012"
                                 y3="-2.52462821"
                                 z3="-1.1334103">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.58622071"
                                 y3="2.81233826"
                                 z3="0.49775954">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.06694523"
                                 y3="1.58176532"
                                 z3="-1.50279748">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.97182146"
                                 y3="2.33320945"
                                 z3="-0.74965522">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.44600615"
                                 y3="-2.60414196"
                                 z3="-0.33460076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.43316232"
                                 y3="-2.12806928"
                                 z3="-2.46302147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.80222493"
                                 y3="-2.26067536"
                                 z3="-0.83767457">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.19164601"
                                 y3="-1.79895399"
                                 z3="-2.98096943">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.91336706"
                                 y3="-1.85284663"
                                 z3="-2.15563121">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.21249488"
                                 y3="3.12944141"
                                 z3="-0.51760596">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.49371948"
                                 y3="3.08076765"
                                 z3="-1.31225656">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.09098576"
                                 y3="-1.66513562"
                                 z3="1.06855747">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.28107818"
                                 y3="-0.59708936"
                                 z3="1.43127335">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.13876838"
                                 y3="-2.06881026"
                                 z3="1.88851657">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="1.52480066"
                                 y3="0.05586492"
                                 z3="2.63363309">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.37364925"
                                 y3="-1.39932064"
                                 z3="3.07865407">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="2.56417443"
                                 y3="-0.33731318"
                                 z3="3.4628279">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.06929514"
                                 y3="-1.0408811"
                                 z3="1.18303308">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.64435641"
                                 y3="-1.18052902"
                                 z3="1.90641857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.5966554"
                                 y3="-0.8092037"
                                 z3="-1.10861817">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.73261683"
                                 y3="-1.65695497"
                                 z3="-0.10346502">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.51490416"
                                 y3="1.36872319"
                                 z3="3.43240498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.32361413"
                                 y3="2.82748596"
                                 z3="2.86296786">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.26411825"
                                 y3="1.39676003"
                                 z3="3.26154965">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.60799898"
                                 y3="1.31471851"
                                 z3="0.40064637">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.74334817"
                                 y3="2.81231161"
                                 z3="0.06969967">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.58297194"
                                 y3="1.4447648"
                                 z3="-1.02402912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.89376304"
                                 y3="-3.41032669"
                                 z3="0.31226534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.54641318"
                                 y3="-3.32545745"
                                 z3="-1.31610895">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.93319633"
                                 y3="2.86693096"
                                 z3="1.97913733">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.84721032"
                                 y3="0.68228701"
                                 z3="-1.59883008">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.25351154"
                                 y3="3.41001259"
                                 z3="1.10432183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.35824125"
                                 y3="1.22073123"
                                 z3="-2.48187537">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.52942122"
                                 y3="-2.93182778"
                                 z3="0.69525806">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.303828"
                                 y3="-2.06917888"
                                 z3="-3.10460282">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.08137196"
                                 y3="-1.48813863"
                                 z3="-4.01189744">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.32696282"
                                 y3="2.58474108"
                                 z3="0.42539957">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.95195995"
                                 y3="4.16422714"
                                 z3="-0.27358826">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="5.2962083"
                                 y3="3.53446209"
                                 z3="-0.73121427">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.78506542"
                                 y3="2.05492887"
                                 z3="-1.53893722">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.40725476"
                                 y3="3.63310931"
                                 z3="-2.24828077">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.46866889"
                                 y3="-0.26241894"
                                 z3="0.79904235">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.76794522"
                                 y3="-2.89801728"
                                 z3="1.59023593">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="0.88677034"
                                 y3="0.88299129"
                                 z3="2.91663155">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.19231925"
                                 y3="-1.7163383"
                                 z3="3.71129254">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="2.74398459"
                                 y3="0.17879667"
                                 z3="4.39629986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.201,1.1114,1.0392;2.1205,-1.5159,-2.631;2.1862,2.5337,-1.3041;1.9503,-2.3658,-.1012;-3.1233,-.7833,1.03;-3.6657,-1.4632,-.2341;-1.5836,1.7155,.282;-3.3308,1.7373,2.8076;-4.6664,1.7238,.0283;-2.9544,-2.7796,-.5779;-.6753,2.4963,.9935;-1.1811,1.2836,-.9898;-1.5814,-2.5246,-1.1334;.5862,2.8123,.4978;.0669,1.5818,-1.5028;.9718,2.3332,-.7497;-.446,-2.6041,-.3346;-1.4332,-2.1281,-2.463;.8022,-2.2607,-.8377;-.1916,-1.799,-2.981;.9134,-1.8528,-2.1556;3.2125,3.1294,-.5176;4.4937,3.0808,-1.3123;2.091,-1.6651,1.0686;1.2811,-.5971,1.4313;3.1388,-2.0688,1.8885;1.5248,.0559,2.6336;3.3736,-1.3993,3.0787;2.5642,-.3373,3.4628;-2.0693,-1.0409,1.183;-3.6444,-1.1805,1.9064;-3.5967,-.8092,-1.1086;-4.7326,-1.657,-.1035;-2.5149,1.3687,3.4324;-3.3236,2.8275,2.863;-4.2641,1.3968,3.2615;-5.608,1.3147,.4006;-4.7433,2.8123,.0697;-4.583,1.4448,-1.024;-2.8938,-3.4103,.3123;-3.5464,-3.3255,-1.3161;-.9332,2.8669,1.9791;-1.8472,.6823,-1.5988;1.2535,3.41,1.1043;.3582,1.2207,-2.4819;-.5294,-2.9318,.6953;-2.3038,-2.0692,-3.1046;-.0814,-1.4881,-4.0119;3.327,2.5847,.4254;2.952,4.1642,-.2736;5.2962,3.5345,-.7312;4.7851,2.0549,-1.5389;4.4073,3.6331,-2.2483;.4687,-.2624,.799;3.7679,-2.898,1.5902;.8868,.883,2.9166;4.1923,-1.7163,3.7113;2.744,.1788,4.3963;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.200964"
                        y3="1.111375"
                        z3="1.03916"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.120518"
                        y3="-1.515901"
                        z3="-2.630956"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.186196"
                        y3="2.53365"
                        z3="-1.304056"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.950256"
                        y3="-2.365752"
                        z3="-0.101187"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.123332"
                        y3="-0.783305"
                        z3="1.030049"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.665676"
                        y3="-1.46317"
                        z3="-0.234122"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.583622"
                        y3="1.715522"
                        z3="0.28199"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.330842"
                        y3="1.737343"
                        z3="2.807593"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.666375"
                        y3="1.723787"
                        z3="0.028275"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.954437"
                        y3="-2.779625"
                        z3="-0.577853"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.675343"
                        y3="2.496269"
                        z3="0.993524"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.181079"
                        y3="1.283596"
                        z3="-0.989757"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.5814"
                        y3="-2.524628"
                        z3="-1.13341"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.586221"
                        y3="2.812338"
                        z3="0.49776"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.066945"
                        y3="1.581765"
                        z3="-1.502797"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.971821"
                        y3="2.333209"
                        z3="-0.749655"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.446006"
                        y3="-2.604142"
                        z3="-0.334601"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.433162"
                        y3="-2.128069"
                        z3="-2.463021"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.802225"
                        y3="-2.260675"
                        z3="-0.837675"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.191646"
                        y3="-1.798954"
                        z3="-2.980969"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.913367"
                        y3="-1.852847"
                        z3="-2.155631"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.212495"
                        y3="3.129441"
                        z3="-0.517606"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.493719"
                        y3="3.080768"
                        z3="-1.312257"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.090986"
                        y3="-1.665136"
                        z3="1.068557"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.281078"
                        y3="-0.597089"
                        z3="1.431273"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.138768"
                        y3="-2.06881"
                        z3="1.888517"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.524801"
                        y3="0.055865"
                        z3="2.633633"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.373649"
                        y3="-1.399321"
                        z3="3.078654"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.564174"
                        y3="-0.337313"
                        z3="3.462828"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.069295"
                        y3="-1.040881"
                        z3="1.183033"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.644356"
                        y3="-1.180529"
                        z3="1.906419"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.596655"
                        y3="-0.809204"
                        z3="-1.108618"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.732617"
                        y3="-1.656955"
                        z3="-0.103465"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.514904"
                        y3="1.368723"
                        z3="3.432405"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.323614"
                        y3="2.827486"
                        z3="2.862968"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.264118"
                        y3="1.39676"
                        z3="3.26155"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.607999"
                        y3="1.314719"
                        z3="0.400646"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.743348"
                        y3="2.812312"
                        z3="0.0697"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.582972"
                        y3="1.444765"
                        z3="-1.024029"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.893763"
                        y3="-3.410327"
                        z3="0.312265"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.546413"
                        y3="-3.325457"
                        z3="-1.316109"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.933196"
                        y3="2.866931"
                        z3="1.979137"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.84721"
                        y3="0.682287"
                        z3="-1.59883"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.253512"
                        y3="3.410013"
                        z3="1.104322"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.358241"
                        y3="1.220731"
                        z3="-2.481875"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.529421"
                        y3="-2.931828"
                        z3="0.695258"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.303828"
                        y3="-2.069179"
                        z3="-3.104603"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.081372"
                        y3="-1.488139"
                        z3="-4.011897"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.326963"
                        y3="2.584741"
                        z3="0.4254"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.95196"
                        y3="4.164227"
                        z3="-0.273588"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.296208"
                        y3="3.534462"
                        z3="-0.731214"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.785065"
                        y3="2.054929"
                        z3="-1.538937"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.407255"
                        y3="3.633109"
                        z3="-2.248281"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.468669"
                        y3="-0.262419"
                        z3="0.799042"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.767945"
                        y3="-2.898017"
                        z3="1.590236"/>
                  <atom elementType="H"
                        id="a56"
                        x3="0.88677"
                        y3="0.882991"
                        z3="2.916632"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.192319"
                        y3="-1.716338"
                        z3="3.711293"/>
                  <atom elementType="H"
                        id="a58"
                        x3="2.743985"
                        y3="0.178797"
                        z3="4.3963"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.201,1.1114,1.0392;2.1205,-1.5159,-2.631;2.1862,2.5337,-1.3041;1.9503,-2.3658,-.1012;-3.1233,-.7833,1.03;-3.6657,-1.4632,-.2341;-1.5836,1.7155,.282;-3.3308,1.7373,2.8076;-4.6664,1.7238,.0283;-2.9544,-2.7796,-.5779;-.6753,2.4963,.9935;-1.1811,1.2836,-.9898;-1.5814,-2.5246,-1.1334;.5862,2.8123,.4978;.0669,1.5818,-1.5028;.9718,2.3332,-.7497;-.446,-2.6041,-.3346;-1.4332,-2.1281,-2.463;.8022,-2.2607,-.8377;-.1916,-1.799,-2.981;.9134,-1.8528,-2.1556;3.2125,3.1294,-.5176;4.4937,3.0808,-1.3123;2.091,-1.6651,1.0686;1.2811,-.5971,1.4313;3.1388,-2.0688,1.8885;1.5248,.0559,2.6336;3.3736,-1.3993,3.0787;2.5642,-.3373,3.4628;-2.0693,-1.0409,1.183;-3.6444,-1.1805,1.9064;-3.5967,-.8092,-1.1086;-4.7326,-1.657,-.1035;-2.5149,1.3687,3.4324;-3.3236,2.8275,2.863;-4.2641,1.3968,3.2616;-5.608,1.3147,.4006;-4.7433,2.8123,.0697;-4.583,1.4448,-1.024;-2.8938,-3.4103,.3123;-3.5464,-3.3255,-1.3161;-.9332,2.8669,1.9791;-1.8472,.6823,-1.5988;1.2535,3.41,1.1043;.3582,1.2207,-2.4819;-.5294,-2.9318,.6953;-2.3038,-2.0692,-3.1046;-.0814,-1.4881,-4.0119;3.327,2.5847,.4254;2.952,4.1642,-.2736;5.2962,3.5345,-.7312;4.7851,2.0549,-1.5389;4.4073,3.6331,-2.2483;.4687,-.2624,.799;3.7679,-2.898,1.5902;.8868,.883,2.9166;4.1923,-1.7163,3.7113;2.744,.1788,4.3963;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3379</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2918.9718</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1617.8587</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05117493</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3045.85854125</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4555.90971619</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8122.46615634</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3566.55644015</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02764684</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95726854</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90609361</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408608</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999694229436</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999694229436</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999388458872</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234407680264</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5152 127.8038 127.8900 127.9858 128.0323 128.2261 128.4251 128.5215 128.8774 129.0898 129.3543 129.5845 129.7504 129.9248 130.0851 130.2876 130.4734 130.5873 130.7686 130.9898 131.1206 131.3721 131.7167 131.8540 131.9267 132.0205 132.1799 132.4243 132.6147 132.9101 132.9832 133.2115 133.4652 133.5197 133.8734 133.9539 134.0844 134.2589 134.3737 134.5240 134.6340 134.9733 135.3148 135.5849 135.6563 135.8127 135.9433 136.2281 136.5902 136.8463 136.9705 137.2010 137.4193 137.6923 137.7980 138.3583 138.5538 138.6178 138.8199 138.9927 139.0119 139.1800 139.5333 139.6587 139.8843 140.2430 140.2712 140.4362 140.6965 141.1500 141.3967 141.6354 141.7609 142.1941 142.4170 142.7688 142.9182 143.1031 143.2538 143.5002 143.8284 143.8429 143.9984 144.2192 144.4438 144.5985 144.8889 144.9474 145.0634 145.4243 145.4833 146.2374 146.4355 146.8882 147.0500 147.2269 147.3400 147.6199 147.7386 147.8601 148.2633 148.3329 148.4899 148.5685 148.7996 148.9241 149.1937 149.4523 149.5517 149.6915 150.0209 150.1060 150.2798 150.3559 150.3971 150.7325 150.8729 151.1162 151.3870 151.4738 151.6936 152.1126 152.3398 152.6828 153.0068 153.0612 153.4020 153.5060 153.8136 154.0313 154.3488 154.6862 154.8988 155.2589 155.7921 156.1717 156.2038 156.2966 156.4561 156.7215 157.0197 157.2931 157.3382 157.4580 157.6700 157.7765 157.9815 158.2687 158.3208 158.7291 158.9157 159.3395 159.5305 159.8126 160.7465 161.5799 161.8210 162.3501 162.8025 163.7249 164.3947 164.5197 164.6421 168.4175 168.5955 169.5803 169.9191 171.9079 172.8481 174.2679 174.8292 177.3084 179.4906 180.7068 182.3203 186.2378 186.6884 186.7838 187.8261 188.7653 189.1327 189.4470 190.1674 190.3266 191.0927 192.0965 192.7673 193.0633 195.2993 196.3464 200.0560 201.5115 203.3840 206.2282 206.8221 207.7155 212.4415 229.9293 235.9841 241.2573 248.0866 248.9564 338.4544 619.7601 620.2298 625.3861 629.8935 630.7835 631.9952 633.1435 633.1543 634.4710 635.0878 635.2768 635.7652 636.8998 637.2672 638.0927 638.5819 639.7006 639.7878 643.3234 643.7362 645.8152 646.6258 654.3940 655.9001 658.3788 1213.9895 1215.4531 1565.0115</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.475036 -0.222265 -0.342836 -0.341220 -0.266286 -0.144415 -0.102756 -0.461646 -0.411509 -0.084065 -0.169732 -0.149016 0.097586 -0.273489 -0.276483 0.356462 -0.251326 -0.265543 0.265044 -0.153942 0.162447 0.071230 -0.274196 0.303606 -0.131093 -0.237116 -0.201500 -0.136800 -0.183774 0.074784 0.098201 0.072822 0.093588 0.104370 0.101990 0.108481 0.106646 0.107184 0.103163 0.086918 0.096665 0.146714 0.153957 0.137768 0.136710 0.153224 0.143304 0.151031 0.089192 0.094571 0.090668 0.086540 0.087367 0.092483 0.145924 0.165409 0.159720 0.160202</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5250 9.2223 8.3428 8.3412 6.2663 6.1444 6.1028 6.4616 6.4115 6.0841 6.1697 6.1490 5.9024 6.2735 6.2765 5.6435 6.2513 6.2655 5.7350 6.1539 5.8376 5.9288 6.2742 5.6964 6.1311 6.2371 6.2015 6.1368 6.1838 0.9252 0.9018 0.9272 0.9064 0.8956 0.8980 0.8915 0.8934 0.8928 0.8968 0.9131 0.9033 0.8533 0.8460 0.8622 0.8633 0.8468 0.8567 0.8490 0.9108 0.9054 0.9093 0.9135 0.9126 0.9075 0.8541 0.8346 0.8403 0.8398</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4750 -0.2223 -0.3428 -0.3412 -0.2663 -0.1444 -0.1028 -0.4616 -0.4115 -0.0841 -0.1697 -0.1490 0.0976 -0.2735 -0.2765 0.3565 -0.2513 -0.2655 0.2650 -0.1539 0.1624 0.0712 -0.2742 0.3036 -0.1311 -0.2371 -0.2015 -0.1368 -0.1838 0.0748 0.0982 0.0728 0.0936 0.1044 0.1020 0.1085 0.1066 0.1072 0.1032 0.0869 0.0967 0.1467 0.1540 0.1378 0.1367 0.1532 0.1433 0.1510 0.0892 0.0946 0.0907 0.0865 0.0874 0.0925 0.1459 0.1654 0.1597 0.1602</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1105 1.0580 2.0535 2.0791 3.8157 3.8988 3.6938 3.9322 3.8854 3.8356 3.8437 3.8450 3.5212 3.8393 3.9821 3.7082 3.9522 3.8754 3.6045 3.8115 4.0464 3.7941 3.9747 3.7286 3.7627 3.9574 3.8931 3.9084 3.9253 1.0103 1.0100 1.0009 1.0096 1.0099 1.0105 1.0121 1.0057 1.0094 1.0097 1.0091 1.0053 0.9881 0.9707 1.0117 1.0128 1.0012 1.0022 0.9969 0.9871 0.9869 1.0057 1.0038 1.0032 1.0326 1.0093 0.9937 0.9876 0.9898</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1105 1.0580 2.0535 2.0791 3.8157 3.8988 3.6938 3.9322 3.8854 3.8356 3.8437 3.8450 3.5212 3.8393 3.9821 3.7082 3.9522 3.8754 3.6045 3.8115 4.0464 3.7941 3.9747 3.7286 3.7627 3.9574 3.8931 3.9084 3.9253 1.0103 1.0100 1.0009 1.0096 1.0099 1.0105 1.0121 1.0057 1.0094 1.0097 1.0091 1.0053 0.9881 0.9707 1.0117 1.0128 1.0012 1.0022 0.9969 0.9871 0.9869 1.0057 1.0038 1.0032 1.0326 1.0093 0.9937 0.9876 0.9898</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9319 1.0015 0.9747 0.9620 1.0474 1.0906 0.8760 0.9100 0.9802 0.9114 0.9830 0.9799 0.9186 1.0235 0.9927 1.3402 1.2792 0.9775 0.9773 0.9733 0.9723 0.9729 0.9759 0.8952 1.0147 1.0078 1.3989 0.9915 1.4705 0.9789 1.3444 1.3079 1.2927 0.9987 1.3268 0.9987 1.3602 0.9791 1.3904 1.0120 1.3875 1.3923 0.9984 0.9673 0.9728 0.9760 0.9900 0.9933 0.9943 1.3501 1.3619 1.3525 0.9755 1.4484 0.9873 1.4486 0.9725 1.4012 0.9831 0.9868</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036154287</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087329221958</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-17.58248 16.55340 -1.02909 14.66964 -14.25458 0.41506 12.55306 -11.50862 1.04445</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.52387</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.87336</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
