<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.354985"
                        y3="1.403843"
                        z3="-0.016892"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.409663"
                        y3="-3.039093"
                        z3="1.963903"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.214778"
                        y3="1.596897"
                        z3="2.372632"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.02907"
                        y3="-1.864721"
                        z3="-0.314039"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.698681"
                        y3="-0.375522"
                        z3="-0.542411"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.977345"
                        y3="-0.803204"
                        z3="-1.826052"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.595862"
                        y3="1.482621"
                        z3="0.664496"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.563438"
                        y3="1.893611"
                        z3="1.34405"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.508562"
                        y3="2.58129"
                        z3="-1.476091"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.624733"
                        y3="-2.297703"
                        z3="-1.864853"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.754828"
                        y3="2.572002"
                        z3="0.434255"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.088224"
                        y3="0.462494"
                        z3="1.479758"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.549336"
                        y3="-2.614025"
                        z3="-0.863196"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.52282"
                        y3="2.660276"
                        z3="0.978561"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.179707"
                        y3="0.52486"
                        z3="2.028446"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.999485"
                        y3="1.62755"
                        z3="1.781977"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.250538"
                        y3="-2.174528"
                        z3="-1.116734"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.821012"
                        y3="-3.237183"
                        z3="0.348303"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.742932"
                        y3="-2.28816"
                        z3="-0.160038"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.820866"
                        y3="-3.401506"
                        z3="1.30087"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.439562"
                        y3="-2.915186"
                        z3="1.043835"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.164082"
                        y3="2.627302"
                        z3="2.120611"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.863909"
                        y3="2.46697"
                        z3="0.788617"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.358819"
                        y3="-0.816311"
                        z3="-1.136778"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.527886"
                        y3="0.273019"
                        z3="-1.369438"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.628356"
                        y3="-0.868282"
                        z3="-1.698559"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.971839"
                        y3="1.297225"
                        z3="-2.194041"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.064864"
                        y3="0.173011"
                        z3="-2.504233"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.235843"
                        y3="1.255875"
                        z3="-2.765836"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.40317"
                        y3="-1.014385"
                        z3="0.297587"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.776254"
                        y3="-0.531051"
                        z3="-0.650316"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.050204"
                        y3="-0.236177"
                        z3="-1.969472"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.601459"
                        y3="-0.55895"
                        z3="-2.688517"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.597751"
                        y3="1.855351"
                        z3="0.994721"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.483273"
                        y3="1.224033"
                        z3="2.203394"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.374995"
                        y3="2.90777"
                        z3="1.702356"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-2.779179"
                        y3="2.358835"
                        z3="-2.257448"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.50139"
                        y3="2.511178"
                        z3="-1.9256"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.363165"
                        y3="3.621323"
                        z3="-1.176945"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.517204"
                        y3="-2.895279"
                        z3="-1.664758"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.282875"
                        y3="-2.560558"
                        z3="-2.869048"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.090506"
                        y3="3.392555"
                        z3="-0.190529"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.692181"
                        y3="-0.411374"
                        z3="1.700294"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.12535"
                        y3="3.530738"
                        z3="0.75517"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.549204"
                        y3="-0.281498"
                        z3="2.651307"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.030984"
                        y3="-1.709546"
                        z3="-2.06982"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.821252"
                        y3="-3.591642"
                        z3="0.562243"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.025857"
                        y3="-3.887166"
                        z3="2.246512"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.886441"
                        y3="2.544146"
                        z3="2.932356"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.701106"
                        y3="3.614097"
                        z3="2.209738"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.659663"
                        y3="3.208718"
                        z3="0.711136"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.319597"
                        y3="1.479706"
                        z3="0.700873"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.193901"
                        y3="2.614372"
                        z3="-0.057576"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.544968"
                        y3="0.337998"
                        z3="-0.921533"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.269803"
                        y3="-1.717985"
                        z3="-1.500136"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.319167"
                        y3="2.141383"
                        z3="-2.375902"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.055982"
                        y3="0.129283"
                        z3="-2.936592"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.573749"
                        y3="2.062106"
                        z3="-3.403138"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.355,1.4038,-.0169;1.4097,-3.0391,1.9639;2.2148,1.5969,2.3726;2.0291,-1.8647,-.314;-3.6987,-.3755,-.5424;-2.9773,-.8032,-1.8261;-1.5959,1.4826,.6645;-4.5634,1.8936,1.344;-3.5086,2.5813,-1.4761;-2.6247,-2.2977,-1.8649;-.7548,2.572,.4343;-1.0882,.4625,1.4798;-1.5493,-2.614,-.8632;.5228,2.6603,.9786;.1797,.5249,2.0284;.9995,1.6276,1.782;-.2505,-2.1745,-1.1167;-1.821,-3.2372,.3483;.7429,-2.2882,-.16;-.8209,-3.4015,1.3009;.4396,-2.9152,1.0438;3.1641,2.6273,2.1206;3.8639,2.467,.7886;2.3588,-.8163,-1.1368;1.5279,.273,-1.3694;3.6284,-.8683,-1.6986;1.9718,1.2972,-2.194;4.0649,.173,-2.5042;3.2358,1.2559,-2.7658;-3.4032,-1.0144,.2976;-4.7763,-.5311,-.6503;-2.0502,-.2362,-1.9695;-3.6015,-.5589,-2.6885;-5.5978,1.8554,.9947;-4.4833,1.224,2.2034;-4.375,2.9078,1.7024;-2.7792,2.3588,-2.2574;-4.5014,2.5112,-1.9256;-3.3632,3.6213,-1.1769;-3.5172,-2.8953,-1.6648;-2.2829,-2.5606,-2.869;-1.0905,3.3926,-.1905;-1.6922,-.4114,1.7003;1.1254,3.5307,.7552;.5492,-.2815,2.6513;-.031,-1.7095,-2.0698;-2.8213,-3.5916,.5622;-1.0259,-3.8872,2.2465;3.8864,2.5441,2.9324;2.7011,3.6141,2.2097;4.6597,3.2087,.7111;4.3196,1.4797,.7009;3.1939,2.6144,-.0576;.545,.338,-.9215;4.2698,-1.718,-1.5001;1.3192,2.1414,-2.3759;5.056,.1293,-2.9366;3.5737,2.0621,-3.4031;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3073.1142689916 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.006e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.393 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.391 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.792 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.35498519"
                                 y3="1.40384331"
                                 z3="-0.01689207">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.40966261"
                                 y3="-3.03909276"
                                 z3="1.96390298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.21477792"
                                 y3="1.59689726"
                                 z3="2.37263245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.02906989"
                                 y3="-1.86472059"
                                 z3="-0.31403893">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.69868119"
                                 y3="-0.37552212"
                                 z3="-0.5424115">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.97734463"
                                 y3="-0.80320432"
                                 z3="-1.82605196">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.59586219"
                                 y3="1.48262096"
                                 z3="0.66449595">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.56343769"
                                 y3="1.89361111"
                                 z3="1.34404996">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.50856177"
                                 y3="2.58128951"
                                 z3="-1.47609055">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.62473343"
                                 y3="-2.29770296"
                                 z3="-1.86485285">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.75482843"
                                 y3="2.57200211"
                                 z3="0.4342551">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.08822393"
                                 y3="0.46249364"
                                 z3="1.47975832">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.5493359"
                                 y3="-2.61402544"
                                 z3="-0.86319627">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.52282014"
                                 y3="2.66027583"
                                 z3="0.9785612">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.1797071"
                                 y3="0.52485994"
                                 z3="2.02844631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.99948488"
                                 y3="1.62755015"
                                 z3="1.78197678">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.25053835"
                                 y3="-2.17452815"
                                 z3="-1.11673361">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.82101215"
                                 y3="-3.23718278"
                                 z3="0.34830333">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.74293245"
                                 y3="-2.28816011"
                                 z3="-0.16003792">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.82086562"
                                 y3="-3.4015065"
                                 z3="1.30086998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.43956166"
                                 y3="-2.91518622"
                                 z3="1.04383479">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.16408154"
                                 y3="2.62730239"
                                 z3="2.12061061">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.8639094"
                                 y3="2.46697038"
                                 z3="0.7886171">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.35881893"
                                 y3="-0.81631076"
                                 z3="-1.13677828">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.52788593"
                                 y3="0.27301913"
                                 z3="-1.36943837">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.62835586"
                                 y3="-0.86828192"
                                 z3="-1.69855899">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="1.97183906"
                                 y3="1.29722514"
                                 z3="-2.19404135">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.06486406"
                                 y3="0.17301134"
                                 z3="-2.504233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.23584255"
                                 y3="1.25587523"
                                 z3="-2.76583624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.40317019"
                                 y3="-1.01438456"
                                 z3="0.29758705">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.77625423"
                                 y3="-0.53105119"
                                 z3="-0.65031554">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.05020429"
                                 y3="-0.23617671"
                                 z3="-1.96947237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.60145925"
                                 y3="-0.55895016"
                                 z3="-2.68851709">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.597751"
                                 y3="1.85535133"
                                 z3="0.99472077">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.48327298"
                                 y3="1.22403307"
                                 z3="2.20339449">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.37499507"
                                 y3="2.90777013"
                                 z3="1.70235602">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-2.77917905"
                                 y3="2.3588354"
                                 z3="-2.25744764">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.50138951"
                                 y3="2.51117763"
                                 z3="-1.9255997">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-3.3631654"
                                 y3="3.62132347"
                                 z3="-1.17694533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.51720364"
                                 y3="-2.89527865"
                                 z3="-1.6647581">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.28287491"
                                 y3="-2.56055773"
                                 z3="-2.86904759">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.09050647"
                                 y3="3.39255534"
                                 z3="-0.19052902">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.69218064"
                                 y3="-0.41137374"
                                 z3="1.70029372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.12535033"
                                 y3="3.53073751"
                                 z3="0.75516974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.5492043"
                                 y3="-0.28149789"
                                 z3="2.65130721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.0309839"
                                 y3="-1.70954599"
                                 z3="-2.06982032">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.82125185"
                                 y3="-3.5916417"
                                 z3="0.56224306">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.0258568"
                                 y3="-3.88716641"
                                 z3="2.24651172">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.88644094"
                                 y3="2.54414573"
                                 z3="2.93235611">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.70110577"
                                 y3="3.61409748"
                                 z3="2.20973778">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.6596632"
                                 y3="3.20871765"
                                 z3="0.71113579">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.31959688"
                                 y3="1.47970592"
                                 z3="0.70087269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.19390123"
                                 y3="2.61437163"
                                 z3="-0.05757635">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.54496804"
                                 y3="0.33799845"
                                 z3="-0.92153256">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.26980309"
                                 y3="-1.71798532"
                                 z3="-1.50013598">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.31916694"
                                 y3="2.14138266"
                                 z3="-2.37590185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.05598246"
                                 y3="0.12928252"
                                 z3="-2.9365922">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.57374905"
                                 y3="2.06210612"
                                 z3="-3.4031385">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.355,1.4038,-.0169;1.4097,-3.0391,1.9639;2.2148,1.5969,2.3726;2.0291,-1.8647,-.314;-3.6987,-.3755,-.5424;-2.9773,-.8032,-1.8261;-1.5959,1.4826,.6645;-4.5634,1.8936,1.344;-3.5086,2.5813,-1.4761;-2.6247,-2.2977,-1.8649;-.7548,2.572,.4343;-1.0882,.4625,1.4798;-1.5493,-2.614,-.8632;.5228,2.6603,.9786;.1797,.5249,2.0284;.9995,1.6276,1.782;-.2505,-2.1745,-1.1167;-1.821,-3.2372,.3483;.7429,-2.2882,-.16;-.8209,-3.4015,1.3009;.4396,-2.9152,1.0438;3.1641,2.6273,2.1206;3.8639,2.467,.7886;2.3588,-.8163,-1.1368;1.5279,.273,-1.3694;3.6284,-.8683,-1.6986;1.9718,1.2972,-2.194;4.0649,.173,-2.5042;3.2358,1.2559,-2.7658;-3.4032,-1.0144,.2976;-4.7763,-.5311,-.6503;-2.0502,-.2362,-1.9695;-3.6015,-.559,-2.6885;-5.5978,1.8554,.9947;-4.4833,1.224,2.2034;-4.375,2.9078,1.7024;-2.7792,2.3588,-2.2574;-4.5014,2.5112,-1.9256;-3.3632,3.6213,-1.1769;-3.5172,-2.8953,-1.6648;-2.2829,-2.5606,-2.869;-1.0905,3.3926,-.1905;-1.6922,-.4114,1.7003;1.1254,3.5307,.7552;.5492,-.2815,2.6513;-.031,-1.7095,-2.0698;-2.8213,-3.5916,.5622;-1.0259,-3.8872,2.2465;3.8864,2.5441,2.9324;2.7011,3.6141,2.2097;4.6597,3.2087,.7111;4.3196,1.4797,.7009;3.1939,2.6144,-.0576;.545,.338,-.9215;4.2698,-1.718,-1.5001;1.3192,2.1414,-2.3759;5.056,.1293,-2.9366;3.5737,2.0621,-3.4031;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.354985"
                        y3="1.403843"
                        z3="-0.016892"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.409663"
                        y3="-3.039093"
                        z3="1.963903"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.214778"
                        y3="1.596897"
                        z3="2.372632"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.02907"
                        y3="-1.864721"
                        z3="-0.314039"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.698681"
                        y3="-0.375522"
                        z3="-0.542411"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.977345"
                        y3="-0.803204"
                        z3="-1.826052"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.595862"
                        y3="1.482621"
                        z3="0.664496"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.563438"
                        y3="1.893611"
                        z3="1.34405"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.508562"
                        y3="2.58129"
                        z3="-1.476091"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.624733"
                        y3="-2.297703"
                        z3="-1.864853"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.754828"
                        y3="2.572002"
                        z3="0.434255"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.088224"
                        y3="0.462494"
                        z3="1.479758"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.549336"
                        y3="-2.614025"
                        z3="-0.863196"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.52282"
                        y3="2.660276"
                        z3="0.978561"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.179707"
                        y3="0.52486"
                        z3="2.028446"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.999485"
                        y3="1.62755"
                        z3="1.781977"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.250538"
                        y3="-2.174528"
                        z3="-1.116734"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.821012"
                        y3="-3.237183"
                        z3="0.348303"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.742932"
                        y3="-2.28816"
                        z3="-0.160038"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.820866"
                        y3="-3.401506"
                        z3="1.30087"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.439562"
                        y3="-2.915186"
                        z3="1.043835"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.164082"
                        y3="2.627302"
                        z3="2.120611"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.863909"
                        y3="2.46697"
                        z3="0.788617"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.358819"
                        y3="-0.816311"
                        z3="-1.136778"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.527886"
                        y3="0.273019"
                        z3="-1.369438"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.628356"
                        y3="-0.868282"
                        z3="-1.698559"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.971839"
                        y3="1.297225"
                        z3="-2.194041"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.064864"
                        y3="0.173011"
                        z3="-2.504233"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.235843"
                        y3="1.255875"
                        z3="-2.765836"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.40317"
                        y3="-1.014385"
                        z3="0.297587"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.776254"
                        y3="-0.531051"
                        z3="-0.650316"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.050204"
                        y3="-0.236177"
                        z3="-1.969472"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.601459"
                        y3="-0.55895"
                        z3="-2.688517"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.597751"
                        y3="1.855351"
                        z3="0.994721"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.483273"
                        y3="1.224033"
                        z3="2.203394"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.374995"
                        y3="2.90777"
                        z3="1.702356"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-2.779179"
                        y3="2.358835"
                        z3="-2.257448"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.50139"
                        y3="2.511178"
                        z3="-1.9256"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.363165"
                        y3="3.621323"
                        z3="-1.176945"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.517204"
                        y3="-2.895279"
                        z3="-1.664758"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.282875"
                        y3="-2.560558"
                        z3="-2.869048"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.090506"
                        y3="3.392555"
                        z3="-0.190529"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.692181"
                        y3="-0.411374"
                        z3="1.700294"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.12535"
                        y3="3.530738"
                        z3="0.75517"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.549204"
                        y3="-0.281498"
                        z3="2.651307"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.030984"
                        y3="-1.709546"
                        z3="-2.06982"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.821252"
                        y3="-3.591642"
                        z3="0.562243"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.025857"
                        y3="-3.887166"
                        z3="2.246512"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.886441"
                        y3="2.544146"
                        z3="2.932356"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.701106"
                        y3="3.614097"
                        z3="2.209738"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.659663"
                        y3="3.208718"
                        z3="0.711136"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.319597"
                        y3="1.479706"
                        z3="0.700873"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.193901"
                        y3="2.614372"
                        z3="-0.057576"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.544968"
                        y3="0.337998"
                        z3="-0.921533"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.269803"
                        y3="-1.717985"
                        z3="-1.500136"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.319167"
                        y3="2.141383"
                        z3="-2.375902"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.055982"
                        y3="0.129283"
                        z3="-2.936592"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.573749"
                        y3="2.062106"
                        z3="-3.403138"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.355,1.4038,-.0169;1.4097,-3.0391,1.9639;2.2148,1.5969,2.3726;2.0291,-1.8647,-.314;-3.6987,-.3755,-.5424;-2.9773,-.8032,-1.8261;-1.5959,1.4826,.6645;-4.5634,1.8936,1.344;-3.5086,2.5813,-1.4761;-2.6247,-2.2977,-1.8649;-.7548,2.572,.4343;-1.0882,.4625,1.4798;-1.5493,-2.614,-.8632;.5228,2.6603,.9786;.1797,.5249,2.0284;.9995,1.6276,1.782;-.2505,-2.1745,-1.1167;-1.821,-3.2372,.3483;.7429,-2.2882,-.16;-.8209,-3.4015,1.3009;.4396,-2.9152,1.0438;3.1641,2.6273,2.1206;3.8639,2.467,.7886;2.3588,-.8163,-1.1368;1.5279,.273,-1.3694;3.6284,-.8683,-1.6986;1.9718,1.2972,-2.194;4.0649,.173,-2.5042;3.2358,1.2559,-2.7658;-3.4032,-1.0144,.2976;-4.7763,-.5311,-.6503;-2.0502,-.2362,-1.9695;-3.6015,-.5589,-2.6885;-5.5978,1.8554,.9947;-4.4833,1.224,2.2034;-4.375,2.9078,1.7024;-2.7792,2.3588,-2.2574;-4.5014,2.5112,-1.9256;-3.3632,3.6213,-1.1769;-3.5172,-2.8953,-1.6648;-2.2829,-2.5606,-2.869;-1.0905,3.3926,-.1905;-1.6922,-.4114,1.7003;1.1254,3.5307,.7552;.5492,-.2815,2.6513;-.031,-1.7095,-2.0698;-2.8213,-3.5916,.5622;-1.0259,-3.8872,2.2465;3.8864,2.5441,2.9324;2.7011,3.6141,2.2097;4.6597,3.2087,.7111;4.3196,1.4797,.7009;3.1939,2.6144,-.0576;.545,.338,-.9215;4.2698,-1.718,-1.5001;1.3192,2.1414,-2.3759;5.056,.1293,-2.9366;3.5737,2.0621,-3.4031;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3367</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2902.0522</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1589.7707</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05097146</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3073.11426899</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4583.16524046</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8177.14798124</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3593.98274078</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02701493</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.93627201</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.88530055</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00409983</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999911052080</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999911052080</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999822104161</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.235724496628</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5879 127.6820 127.8028 127.9347 128.1434 128.3842 128.4301 128.7872 129.0014 129.0382 129.2374 129.4714 129.5480 129.6346 129.9760 130.3780 130.5824 130.6856 130.8198 130.8836 131.1506 131.5164 131.8092 131.9117 131.9544 132.0858 132.2844 132.3384 132.4671 132.5826 132.7599 132.9704 133.1767 133.2049 133.3431 133.7074 134.3981 134.5385 134.8991 135.0950 135.2278 135.5019 135.6369 135.7225 135.8540 136.0123 136.1932 136.3465 136.6347 137.0243 137.3004 137.4260 137.5375 137.7836 137.8795 138.1161 138.4211 138.5101 139.0236 139.0740 139.2627 139.3118 139.4802 139.9388 140.1369 140.2325 140.5458 140.8189 140.9855 141.3583 141.5197 141.7845 141.9740 142.1381 142.3042 142.7172 143.0165 143.2236 143.3772 143.5975 143.7456 143.7712 144.0206 144.2196 144.2773 144.4527 144.5863 144.8205 145.1597 145.2944 145.6673 145.9371 146.2055 146.7470 146.9293 147.2033 147.3962 147.8590 147.9436 148.0539 148.3608 148.4971 148.8252 149.0195 149.1531 149.3436 149.3607 149.5026 149.6787 149.8469 149.9835 150.3590 150.3939 150.5163 150.6205 150.7612 150.9260 151.2576 151.4077 151.5709 151.8109 151.9676 152.2016 152.4130 152.9192 153.0837 153.3273 153.5704 153.8622 153.9593 154.2451 154.5276 155.1421 155.7826 155.9081 156.0401 156.1771 156.3130 156.5417 156.8087 156.9262 157.1423 157.2287 157.4646 157.7591 157.9971 158.1056 158.5662 158.6977 159.0066 159.1765 159.5700 159.6825 160.0059 160.8042 161.4128 161.8296 162.0373 162.4653 162.7318 163.4708 164.1638 165.4832 167.9433 168.3780 169.5454 170.1734 171.7086 172.3428 174.3953 174.4523 176.3599 180.8192 181.0634 182.8771 186.4226 186.7207 187.6207 187.8473 188.0344 189.2082 189.4928 190.0312 190.3733 191.4693 192.4121 192.7110 193.9260 194.5741 195.9791 200.0853 202.3974 203.0175 206.0944 207.0608 207.8989 212.5775 229.8858 235.9134 241.2613 248.1300 248.9231 338.5237 619.8307 621.9575 625.5537 630.1096 630.9887 632.0551 632.7950 632.9334 634.8430 635.0488 635.4837 635.6948 637.4459 637.6093 637.8391 638.6827 639.4376 640.1095 643.1133 643.6252 645.9829 647.4851 654.1799 655.6820 658.3854 1213.2225 1216.2694 1564.9066</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.459581 -0.223580 -0.347652 -0.335112 -0.276520 -0.128097 -0.139146 -0.420537 -0.441022 -0.086416 -0.132618 -0.139610 0.066093 -0.273984 -0.260067 0.352125 -0.257391 -0.271188 0.280781 -0.107161 0.116393 0.053033 -0.277676 0.325775 -0.170864 -0.241169 -0.203878 -0.138628 -0.166777 0.079933 0.098146 0.066215 0.095458 0.101488 0.100634 0.101311 0.108096 0.112156 0.106628 0.083650 0.096608 0.140283 0.144617 0.141960 0.130797 0.155280 0.146100 0.149475 0.108538 0.086520 0.105161 0.088092 0.086702 0.127627 0.145739 0.158441 0.159521 0.160135</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5404 9.2236 8.3477 8.3351 6.2765 6.1281 6.1391 6.4205 6.4410 6.0864 6.1326 6.1396 5.9339 6.2740 6.2601 5.6479 6.2574 6.2712 5.7192 6.1072 5.8836 5.9470 6.2777 5.6742 6.1709 6.2412 6.2039 6.1386 6.1668 0.9201 0.9019 0.9338 0.9045 0.8985 0.8994 0.8987 0.8919 0.8878 0.8934 0.9163 0.9034 0.8597 0.8554 0.8580 0.8692 0.8447 0.8539 0.8505 0.8915 0.9135 0.8948 0.9119 0.9133 0.8724 0.8543 0.8416 0.8405 0.8399</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4596 -0.2236 -0.3477 -0.3351 -0.2765 -0.1281 -0.1391 -0.4205 -0.4410 -0.0864 -0.1326 -0.1396 0.0661 -0.2740 -0.2601 0.3521 -0.2574 -0.2712 0.2808 -0.1072 0.1164 0.0530 -0.2777 0.3258 -0.1709 -0.2412 -0.2039 -0.1386 -0.1668 0.0799 0.0981 0.0662 0.0955 0.1015 0.1006 0.1013 0.1081 0.1122 0.1066 0.0837 0.0966 0.1403 0.1446 0.1420 0.1308 0.1553 0.1461 0.1495 0.1085 0.0865 0.1052 0.0881 0.0867 0.1276 0.1457 0.1584 0.1595 0.1601</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1348 1.0536 2.0482 2.0722 3.8491 3.8824 3.6919 3.8958 3.9059 3.8696 3.8028 3.8210 3.5803 3.8516 3.9562 3.6753 3.9032 3.9000 3.5990 3.8250 4.0139 3.8658 3.9045 3.6272 3.7828 3.9652 3.8922 3.8811 3.8808 1.0168 1.0131 1.0024 1.0076 1.0098 1.0091 1.0097 1.0061 1.0081 1.0089 1.0081 1.0069 0.9895 0.9802 1.0060 1.0219 0.9989 1.0027 0.9967 0.9909 0.9964 1.0118 1.0039 0.9984 0.9945 1.0089 0.9965 0.9888 0.9901</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1348 1.0536 2.0482 2.0722 3.8491 3.8824 3.6919 3.8958 3.9059 3.8696 3.8028 3.8210 3.5803 3.8516 3.9562 3.6753 3.9032 3.9000 3.5990 3.8250 4.0139 3.8658 3.9045 3.6272 3.7828 3.9652 3.8922 3.8811 3.8808 1.0168 1.0131 1.0024 1.0076 1.0098 1.0091 1.0097 1.0061 1.0081 1.0089 1.0081 1.0069 0.9895 0.9802 1.0060 1.0219 0.9989 1.0027 0.9967 0.9909 0.9964 1.0118 1.0039 0.9984 0.9945 1.0089 0.9965 0.9888 0.9901</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9467 1.0213 0.9669 0.9711 1.0350 1.0646 0.8996 0.9688 0.9392 0.9105 0.9897 0.9769 0.9221 1.0144 0.9931 1.3104 1.2737 0.9719 0.9746 0.9750 0.9716 0.9725 0.9747 0.9114 1.0112 1.0075 1.4167 0.9885 1.4375 0.9890 1.3472 1.3356 1.2684 0.9992 1.3290 1.0085 1.3492 0.9816 1.3810 1.0052 1.3211 1.4438 0.9927 0.9511 0.9812 0.9973 0.9858 0.9875 0.9828 1.3085 1.3795 1.3726 0.9811 1.4306 0.9930 1.4183 0.9914 1.3955 0.9846 0.9912</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.038195764</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.089167228183</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-16.34055 15.61719 -0.72336 21.69011 -20.50175 1.18836 -10.10634 8.82393 -1.28241</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.89209</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.80932</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
