<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.36709"
                        y3="1.208545"
                        z3="0.819629"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.021227"
                        y3="-4.958176"
                        z3="0.261145"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.246385"
                        y3="3.180057"
                        z3="-0.304565"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.423816"
                        y3="-2.433223"
                        z3="0.992791"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.659324"
                        y3="-0.615504"
                        z3="0.396933"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.737246"
                        y3="-0.990704"
                        z3="-1.083661"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.626653"
                        y3="1.816947"
                        z3="0.430984"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.644128"
                        y3="1.395061"
                        z3="2.674286"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.593092"
                        y3="2.261348"
                        z3="-0.147056"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.391415"
                        y3="-1.004669"
                        z3="-1.815237"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.558176"
                        y3="1.582715"
                        z3="1.305438"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.33898"
                        y3="2.532711"
                        z3="-0.729894"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.453105"
                        y3="-2.051995"
                        z3="-1.282945"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.72078"
                        y3="2.036198"
                        z3="1.038585"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.061896"
                        y3="2.998286"
                        z3="-1.022574"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.978379"
                        y3="2.755832"
                        z3="-0.129911"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.411515"
                        y3="-1.714586"
                        z3="-0.424451"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.643967"
                        y3="-3.393843"
                        z3="-1.607551"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.428905"
                        y3="-2.691469"
                        z3="0.092556"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.817499"
                        y3="-4.379356"
                        z3="-1.090826"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.212915"
                        y3="-4.017272"
                        z3="-0.249215"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.595142"
                        y3="3.829793"
                        z3="-1.5216"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.074318"
                        y3="4.124282"
                        z3="-1.485743"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.322689"
                        y3="-1.418911"
                        z3="0.787645"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.961161"
                        y3="-0.938056"
                        z3="1.924065"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.640711"
                        y3="-0.915493"
                        z3="-0.467781"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.927214"
                        y3="0.049055"
                        z3="1.801018"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.601504"
                        y3="0.08183"
                        z3="-0.571948"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.24925"
                        y3="0.568765"
                        z3="0.554407"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.920601"
                        y3="-1.237374"
                        z3="0.91331"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.616762"
                        y3="-0.86308"
                        z3="0.869751"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.406032"
                        y3="-0.302735"
                        z3="-1.608363"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.192187"
                        y3="-1.980775"
                        z3="-1.187908"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.673016"
                        y3="1.148741"
                        z3="2.944918"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.993482"
                        y3="0.729255"
                        z3="3.245501"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.449222"
                        y3="2.414011"
                        z3="3.013895"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.447878"
                        y3="2.180203"
                        z3="-1.226134"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.618803"
                        y3="1.95054"
                        z3="0.062881"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.510664"
                        y3="3.317842"
                        z3="0.11509"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.577717"
                        y3="-1.19816"
                        z3="-2.874034"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.91989"
                        y3="-0.022183"
                        z3="-1.757324"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.71931"
                        y3="1.030492"
                        z3="2.224807"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.125758"
                        y3="2.747927"
                        z3="-1.444069"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.527573"
                        y3="1.845452"
                        z3="1.736122"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.096516"
                        y3="3.55201"
                        z3="-1.938106"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.254095"
                        y3="-0.677107"
                        z3="-0.15246"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.44927"
                        y3="-3.677255"
                        z3="-2.273905"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.964237"
                        y3="-5.421303"
                        z3="-1.344553"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.024481"
                        y3="4.757477"
                        z3="-1.63127"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.35277"
                        y3="3.188007"
                        z3="-2.374332"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.358907"
                        y3="4.650618"
                        z3="-2.396428"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.335244"
                        y3="4.759663"
                        z3="-0.638755"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.665681"
                        y3="3.209644"
                        z3="-1.429409"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.706397"
                        y3="-1.341328"
                        z3="2.896064"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.158542"
                        y3="-1.289934"
                        z3="-1.361055"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.423175"
                        y3="0.417066"
                        z3="2.689588"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.84427"
                        y3="0.476597"
                        z3="-1.550193"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.996893"
                        y3="1.345165"
                        z3="0.461518"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.3671,1.2085,.8196;1.0212,-4.9582,.2611;2.2464,3.1801,-.3046;1.4238,-2.4332,.9928;-3.6593,-.6155,.3969;-3.7372,-.9907,-1.0837;-1.6267,1.8169,.431;-3.6441,1.3951,2.6743;-4.5931,2.2613,-.1471;-2.3914,-1.0047,-1.8152;-.5582,1.5827,1.3054;-1.339,2.5327,-.7299;-1.4531,-2.052,-1.2829;.7208,2.0362,1.0386;-.0619,2.9983,-1.0226;.9784,2.7558,-.1299;-.4115,-1.7146,-.4245;-1.644,-3.3938,-1.6076;.4289,-2.6915,.0926;-.8175,-4.3794,-1.0908;.2129,-4.0173,-.2492;2.5951,3.8298,-1.5216;4.0743,4.1243,-1.4857;2.3227,-1.4189,.7876;2.9612,-.9381,1.9241;2.6407,-.9155,-.4678;3.9272,.0491,1.801;3.6015,.0818,-.5719;4.2492,.5688,.5544;-2.9206,-1.2374,.9133;-4.6168,-.8631,.8698;-4.406,-.3027,-1.6084;-4.1922,-1.9808,-1.1879;-4.673,1.1487,2.9449;-2.9935,.7293,3.2455;-3.4492,2.414,3.0139;-4.4479,2.1802,-1.2261;-5.6188,1.9505,.0629;-4.5107,3.3178,.1151;-2.5777,-1.1982,-2.874;-1.9199,-.0222,-1.7573;-.7193,1.0305,2.2248;-2.1258,2.7479,-1.4441;1.5276,1.8455,1.7361;.0965,3.552,-1.9381;-.2541,-.6771,-.1525;-2.4493,-3.6773,-2.2739;-.9642,-5.4213,-1.3446;2.0245,4.7575,-1.6313;2.3528,3.188,-2.3743;4.3589,4.6506,-2.3964;4.3352,4.7597,-.6388;4.6657,3.2096,-1.4294;2.7064,-1.3413,2.8961;2.1585,-1.2899,-1.3611;4.4232,.4171,2.6896;3.8443,.4766,-1.5502;4.9969,1.3452,.4615;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2984.6537870660 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.259e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.390 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.423 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.821 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.36709017"
                                 y3="1.20854459"
                                 z3="0.8196287">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.02122731"
                                 y3="-4.95817617"
                                 z3="0.26114486">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.24638484"
                                 y3="3.18005733"
                                 z3="-0.30456473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.42381643"
                                 y3="-2.43322284"
                                 z3="0.99279054">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.6593237"
                                 y3="-0.61550413"
                                 z3="0.39693279">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.73724576"
                                 y3="-0.99070388"
                                 z3="-1.08366109">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.62665296"
                                 y3="1.81694732"
                                 z3="0.43098371">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.64412766"
                                 y3="1.39506061"
                                 z3="2.67428599">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.59309245"
                                 y3="2.26134844"
                                 z3="-0.14705564">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.39141549"
                                 y3="-1.00466897"
                                 z3="-1.8152371">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.55817589"
                                 y3="1.58271527"
                                 z3="1.30543798">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.33897977"
                                 y3="2.53271149"
                                 z3="-0.72989378">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.45310481"
                                 y3="-2.05199521"
                                 z3="-1.28294506">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.72078015"
                                 y3="2.03619808"
                                 z3="1.03858549">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.06189613"
                                 y3="2.99828551"
                                 z3="-1.02257374">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.97837852"
                                 y3="2.75583182"
                                 z3="-0.1299106">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.41151502"
                                 y3="-1.71458601"
                                 z3="-0.42445086">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.64396669"
                                 y3="-3.39384316"
                                 z3="-1.60755104">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.42890452"
                                 y3="-2.69146855"
                                 z3="0.09255583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.81749859"
                                 y3="-4.37935619"
                                 z3="-1.0908258">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.21291548"
                                 y3="-4.01727237"
                                 z3="-0.24921528">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.5951424"
                                 y3="3.82979318"
                                 z3="-1.52160018">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.07431805"
                                 y3="4.12428166"
                                 z3="-1.48574333">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.32268894"
                                 y3="-1.41891078"
                                 z3="0.78764497">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.96116066"
                                 y3="-0.93805629"
                                 z3="1.92406528">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.64071091"
                                 y3="-0.9154929"
                                 z3="-0.46778114">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.92721371"
                                 y3="0.04905537"
                                 z3="1.8010183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.60150414"
                                 y3="0.08183005"
                                 z3="-0.57194783">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.24924986"
                                 y3="0.5687647"
                                 z3="0.55440741">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.92060076"
                                 y3="-1.23737418"
                                 z3="0.91331042">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.61676165"
                                 y3="-0.86307995"
                                 z3="0.86975114">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.4060321"
                                 y3="-0.30273499"
                                 z3="-1.60836293">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.19218695"
                                 y3="-1.98077476"
                                 z3="-1.18790821">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.67301577"
                                 y3="1.14874119"
                                 z3="2.94491847">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.99348176"
                                 y3="0.72925461"
                                 z3="3.24550053">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.44922198"
                                 y3="2.41401125"
                                 z3="3.01389451">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.4478782"
                                 y3="2.18020271"
                                 z3="-1.22613434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.61880343"
                                 y3="1.95053993"
                                 z3="0.06288121">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.5106639"
                                 y3="3.31784207"
                                 z3="0.11509004">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.5777167"
                                 y3="-1.19816038"
                                 z3="-2.87403383">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-1.91989031"
                                 y3="-0.02218312"
                                 z3="-1.75732364">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.71931042"
                                 y3="1.03049212"
                                 z3="2.22480742">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.1257583"
                                 y3="2.74792741"
                                 z3="-1.44406879">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.52757309"
                                 y3="1.84545249"
                                 z3="1.73612166">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.09651565"
                                 y3="3.55201043"
                                 z3="-1.93810645">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.25409501"
                                 y3="-0.67710708"
                                 z3="-0.15245959">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.44926972"
                                 y3="-3.67725451"
                                 z3="-2.27390523">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.96423714"
                                 y3="-5.4213032"
                                 z3="-1.34455345">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.02448078"
                                 y3="4.75747665"
                                 z3="-1.63126992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.35277003"
                                 y3="3.18800712"
                                 z3="-2.37433185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.35890693"
                                 y3="4.65061761"
                                 z3="-2.39642768">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.3352443"
                                 y3="4.75966278"
                                 z3="-0.6387547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.66568134"
                                 y3="3.20964431"
                                 z3="-1.42940908">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="2.70639709"
                                 y3="-1.34132831"
                                 z3="2.89606429">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.15854238"
                                 y3="-1.28993426"
                                 z3="-1.36105498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.42317547"
                                 y3="0.41706575"
                                 z3="2.68958823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.84427038"
                                 y3="0.47659675"
                                 z3="-1.55019337">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.99689255"
                                 y3="1.345165"
                                 z3="0.46151792">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.3671,1.2085,.8196;1.0212,-4.9582,.2611;2.2464,3.1801,-.3046;1.4238,-2.4332,.9928;-3.6593,-.6155,.3969;-3.7372,-.9907,-1.0837;-1.6267,1.8169,.431;-3.6441,1.3951,2.6743;-4.5931,2.2613,-.1471;-2.3914,-1.0047,-1.8152;-.5582,1.5827,1.3054;-1.339,2.5327,-.7299;-1.4531,-2.052,-1.2829;.7208,2.0362,1.0386;-.0619,2.9983,-1.0226;.9784,2.7558,-.1299;-.4115,-1.7146,-.4245;-1.644,-3.3938,-1.6076;.4289,-2.6915,.0926;-.8175,-4.3794,-1.0908;.2129,-4.0173,-.2492;2.5951,3.8298,-1.5216;4.0743,4.1243,-1.4857;2.3227,-1.4189,.7876;2.9612,-.9381,1.9241;2.6407,-.9155,-.4678;3.9272,.0491,1.801;3.6015,.0818,-.5719;4.2492,.5688,.5544;-2.9206,-1.2374,.9133;-4.6168,-.8631,.8698;-4.406,-.3027,-1.6084;-4.1922,-1.9808,-1.1879;-4.673,1.1487,2.9449;-2.9935,.7293,3.2455;-3.4492,2.414,3.0139;-4.4479,2.1802,-1.2261;-5.6188,1.9505,.0629;-4.5107,3.3178,.1151;-2.5777,-1.1982,-2.874;-1.9199,-.0222,-1.7573;-.7193,1.0305,2.2248;-2.1258,2.7479,-1.4441;1.5276,1.8455,1.7361;.0965,3.552,-1.9381;-.2541,-.6771,-.1525;-2.4493,-3.6773,-2.2739;-.9642,-5.4213,-1.3446;2.0245,4.7575,-1.6313;2.3528,3.188,-2.3743;4.3589,4.6506,-2.3964;4.3352,4.7597,-.6388;4.6657,3.2096,-1.4294;2.7064,-1.3413,2.8961;2.1585,-1.2899,-1.3611;4.4232,.4171,2.6896;3.8443,.4766,-1.5502;4.9969,1.3452,.4615;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.36709"
                        y3="1.208545"
                        z3="0.819629"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.021227"
                        y3="-4.958176"
                        z3="0.261145"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.246385"
                        y3="3.180057"
                        z3="-0.304565"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.423816"
                        y3="-2.433223"
                        z3="0.992791"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.659324"
                        y3="-0.615504"
                        z3="0.396933"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.737246"
                        y3="-0.990704"
                        z3="-1.083661"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.626653"
                        y3="1.816947"
                        z3="0.430984"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.644128"
                        y3="1.395061"
                        z3="2.674286"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.593092"
                        y3="2.261348"
                        z3="-0.147056"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.391415"
                        y3="-1.004669"
                        z3="-1.815237"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.558176"
                        y3="1.582715"
                        z3="1.305438"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.33898"
                        y3="2.532711"
                        z3="-0.729894"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.453105"
                        y3="-2.051995"
                        z3="-1.282945"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.72078"
                        y3="2.036198"
                        z3="1.038585"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.061896"
                        y3="2.998286"
                        z3="-1.022574"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.978379"
                        y3="2.755832"
                        z3="-0.129911"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.411515"
                        y3="-1.714586"
                        z3="-0.424451"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.643967"
                        y3="-3.393843"
                        z3="-1.607551"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.428905"
                        y3="-2.691469"
                        z3="0.092556"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.817499"
                        y3="-4.379356"
                        z3="-1.090826"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.212915"
                        y3="-4.017272"
                        z3="-0.249215"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.595142"
                        y3="3.829793"
                        z3="-1.5216"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.074318"
                        y3="4.124282"
                        z3="-1.485743"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.322689"
                        y3="-1.418911"
                        z3="0.787645"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.961161"
                        y3="-0.938056"
                        z3="1.924065"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.640711"
                        y3="-0.915493"
                        z3="-0.467781"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.927214"
                        y3="0.049055"
                        z3="1.801018"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.601504"
                        y3="0.08183"
                        z3="-0.571948"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.24925"
                        y3="0.568765"
                        z3="0.554407"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.920601"
                        y3="-1.237374"
                        z3="0.91331"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.616762"
                        y3="-0.86308"
                        z3="0.869751"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.406032"
                        y3="-0.302735"
                        z3="-1.608363"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.192187"
                        y3="-1.980775"
                        z3="-1.187908"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.673016"
                        y3="1.148741"
                        z3="2.944918"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.993482"
                        y3="0.729255"
                        z3="3.245501"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.449222"
                        y3="2.414011"
                        z3="3.013895"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.447878"
                        y3="2.180203"
                        z3="-1.226134"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.618803"
                        y3="1.95054"
                        z3="0.062881"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.510664"
                        y3="3.317842"
                        z3="0.11509"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.577717"
                        y3="-1.19816"
                        z3="-2.874034"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.91989"
                        y3="-0.022183"
                        z3="-1.757324"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.71931"
                        y3="1.030492"
                        z3="2.224807"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.125758"
                        y3="2.747927"
                        z3="-1.444069"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.527573"
                        y3="1.845452"
                        z3="1.736122"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.096516"
                        y3="3.55201"
                        z3="-1.938106"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.254095"
                        y3="-0.677107"
                        z3="-0.15246"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.44927"
                        y3="-3.677255"
                        z3="-2.273905"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.964237"
                        y3="-5.421303"
                        z3="-1.344553"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.024481"
                        y3="4.757477"
                        z3="-1.63127"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.35277"
                        y3="3.188007"
                        z3="-2.374332"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.358907"
                        y3="4.650618"
                        z3="-2.396428"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.335244"
                        y3="4.759663"
                        z3="-0.638755"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.665681"
                        y3="3.209644"
                        z3="-1.429409"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.706397"
                        y3="-1.341328"
                        z3="2.896064"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.158542"
                        y3="-1.289934"
                        z3="-1.361055"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.423175"
                        y3="0.417066"
                        z3="2.689588"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.84427"
                        y3="0.476597"
                        z3="-1.550193"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.996893"
                        y3="1.345165"
                        z3="0.461518"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.3671,1.2085,.8196;1.0212,-4.9582,.2611;2.2464,3.1801,-.3046;1.4238,-2.4332,.9928;-3.6593,-.6155,.3969;-3.7372,-.9907,-1.0837;-1.6267,1.8169,.431;-3.6441,1.3951,2.6743;-4.5931,2.2613,-.1471;-2.3914,-1.0047,-1.8152;-.5582,1.5827,1.3054;-1.339,2.5327,-.7299;-1.4531,-2.052,-1.2829;.7208,2.0362,1.0386;-.0619,2.9983,-1.0226;.9784,2.7558,-.1299;-.4115,-1.7146,-.4245;-1.644,-3.3938,-1.6076;.4289,-2.6915,.0926;-.8175,-4.3794,-1.0908;.2129,-4.0173,-.2492;2.5951,3.8298,-1.5216;4.0743,4.1243,-1.4857;2.3227,-1.4189,.7876;2.9612,-.9381,1.9241;2.6407,-.9155,-.4678;3.9272,.0491,1.801;3.6015,.0818,-.5719;4.2492,.5688,.5544;-2.9206,-1.2374,.9133;-4.6168,-.8631,.8698;-4.406,-.3027,-1.6084;-4.1922,-1.9808,-1.1879;-4.673,1.1487,2.9449;-2.9935,.7293,3.2455;-3.4492,2.414,3.0139;-4.4479,2.1802,-1.2261;-5.6188,1.9505,.0629;-4.5107,3.3178,.1151;-2.5777,-1.1982,-2.874;-1.9199,-.0222,-1.7573;-.7193,1.0305,2.2248;-2.1258,2.7479,-1.4441;1.5276,1.8455,1.7361;.0965,3.552,-1.9381;-.2541,-.6771,-.1525;-2.4493,-3.6773,-2.2739;-.9642,-5.4213,-1.3446;2.0245,4.7575,-1.6313;2.3528,3.188,-2.3743;4.3589,4.6506,-2.3964;4.3352,4.7597,-.6388;4.6657,3.2096,-1.4294;2.7064,-1.3413,2.8961;2.1585,-1.2899,-1.3611;4.4232,.4171,2.6896;3.8443,.4766,-1.5502;4.9969,1.3452,.4615;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3392</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2924.1952</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1629.8178</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.8s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05325066</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2984.65378707</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4494.70703772</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8000.07594457</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3505.36890685</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02773344</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95843691</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90518625</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408807</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999980682462</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999980682462</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999961364924</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234863460842</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.5850 -674.9067 -524.7380 -524.1928 -281.9888 -281.6158 -281.6049 -281.3966 -280.8970 -279.9700 -279.8911 -279.8047 -279.7914 -279.7871 -279.7473 -279.7128 -279.7058 -279.7031 -279.6896 -279.5736 -279.5470 -279.5088 -279.3632 -279.3419 -279.1808 -279.1336 -278.7930 -278.6586 -278.6419 -145.6437 -100.7119 -100.6966 -100.6873 -36.7875 -33.0017 -32.3698 -27.0563 -26.6043 -26.4321 -24.9314 -24.2702 -24.1701 -23.6502 -23.5222 -23.4802 -23.0435 -22.7984 -22.0226 -21.3907 -21.3362 -20.6733 -20.4165 -19.9445 -19.5706 -19.3722 -19.2143 -18.6951 -18.3667 -17.9595 -17.5305 -17.4296 -16.8660 -16.3188 -16.1103 -16.0946 -15.9675 -15.6296 -15.6148 -15.3868 -14.9204 -14.7788 -14.7309 -14.6488 -14.5142 -14.2608 -14.2453 -14.1179 -14.0257 -13.7799 -13.7154 -13.6803 -13.4674 -13.4113 -13.3351 -13.0256 -12.9095 -12.8745 -12.8465 -12.6412 -12.5015 -12.4518 -12.3372 -12.1835 -12.1367 -11.8553 -11.7840 -11.5056 -11.3805 -11.2947 -11.1798 -10.4304 -10.3234 -9.9116 -9.5716 -9.4037 -9.3340 -8.9325 -8.4332 -8.2534 1.3215 1.5970 1.6386 1.7751 1.9752 2.1728 3.0792 3.2994 3.5662 3.7539 3.9074 3.9779 4.0644 4.1553 4.3970 4.4756 4.6709 4.6999 4.8008 4.8857 4.9560 5.1400 5.1826 5.2431 5.3670 5.4147 5.5354 5.5594 5.6907 5.8152 5.8500 5.9486 5.9656 6.1358 6.1580 6.2609 6.3547 6.4174 6.4979 6.5971 6.7475 6.7944 6.8347 6.9368 6.9934 7.0865 7.2047 7.2894 7.4252 7.4809 7.5677 7.7613 7.8229 7.8808 7.9407 8.1650 8.2898 8.3161 8.4271 8.5219 8.5365 8.5945 8.6803 8.8010 8.9262 9.0118 9.2037 9.2722 9.3446 9.4619 9.4928 9.5777 9.7294 9.8595 10.0071 10.0743 10.1833 10.2878 10.3308 10.4435 10.5665 10.6559 10.8125 10.8951 10.9637 11.0872 11.0971 11.2977 11.3461 11.3663 11.4696 11.5967 11.6570 11.7567 11.8650 11.9092 11.9863 12.0664 12.2064 12.2982 12.4234 12.4832 12.6954 12.7298 12.8132 12.9183 12.9517 13.0331 13.2149 13.3128 13.3270 13.4014 13.4686 13.5467 13.5850 13.6969 13.8500 13.8748 13.9018 13.9629 14.0077 14.0885 14.1565 14.2391 14.3576 14.3671 14.4358 14.4938 14.5172 14.6467 14.7099 14.7870 14.8613 14.9200 15.0469 15.0932 15.1171 15.2399 15.3252 15.4382 15.4489 15.6414 15.6726 15.7842 15.9190 15.9493 16.0344 16.1226 16.1727 16.2871 16.3592 16.4474 16.5836 16.6699 16.6851 16.7580 16.8278 17.0821 17.1802 17.3026 17.3618 17.4595 17.5374 17.6697 17.8112 18.0584 18.1857 18.2308 18.3269 18.4061 18.6579 18.8466 19.0335 19.0798 19.2064 19.3743 19.4441 19.5306 19.6115 19.7348 19.8532 19.8634 20.1088 20.1487 20.2921 20.4274 20.5054 20.6404 20.7592 20.8358 20.8816 21.0963 21.2238 21.2994 21.3907 21.4553 21.5252 21.6726 21.7310 21.9012 22.0341 22.0635 22.1014 22.2281 22.4032 22.4812 22.5172 22.5749 22.7308 22.8984 23.0765 23.1634 23.3073 23.3326 23.4235 23.6095 23.7589 23.8554 24.0212 24.1639 24.2619 24.3951 24.4681 24.6358 24.6494 24.7568 24.9658 24.9847 25.1507 25.2707 25.3841 25.6342 25.8064 25.8378 25.8631 25.9081 26.1896 26.2723 26.4085 26.4644 26.6008 26.7072 26.8216 26.9775 27.1129 27.1337 27.3038 27.4075 27.5132 27.5898 27.6402 27.8421 27.8748 28.2025 28.2654 28.3068 28.4295 28.5661 28.6365 28.7694 28.9718 29.1249 29.2121 29.2827 29.4875 29.6167 29.7278 29.8044 29.8510 30.0216 30.2423 30.2743 30.4482 30.4841 30.5536 30.6632 30.9249 30.9818 31.0187 31.0802 31.2175 31.3301 31.4765 31.5986 31.7135 31.8517 31.9628 32.0155 32.1120 32.2247 32.2805 32.4132 32.6249 32.8714 32.8987 32.9672 33.0386 33.1549 33.2317 33.4685 33.5207 33.6442 33.7551 33.8481 33.8882 34.0392 34.1542 34.2216 34.2989 34.4770 34.6070 34.7809 34.9401 35.0181 35.0704 35.1357 35.2144 35.3543 35.6120 35.7320 35.8422 35.9917 36.0331 36.3181 36.3883 36.4546 36.6363 36.7061 36.8017 36.8712 37.0173 37.1326 37.2491 37.3279 37.4971 37.5589 37.6777 37.7642 37.9412 38.0404 38.0969 38.2152 38.4415 38.5059 38.6229 38.7481 38.8911 38.9633 39.0297 39.0375 39.2584 39.4194 39.4436 39.5724 39.6227 39.7635 39.8244 40.0478 40.1301 40.1701 40.2796 40.3911 40.5087 40.5916 40.6860 40.7446 41.0148 41.1151 41.2778 41.3556 41.4125 41.5636 41.6402 41.8528 41.9083 41.9854 42.1945 42.2785 42.3476 42.4095 42.5300 42.6703 42.7660 42.8466 42.9991 43.0467 43.1146 43.3096 43.3538 43.5605 43.7303 43.7522 43.8717 43.9714 44.0704 44.2022 44.3172 44.3923 44.4182 44.5305 44.8441 44.8896 44.9976 45.0512 45.1981 45.2741 45.3967 45.5412 45.7125 45.8592 45.8980 46.1077 46.1275 46.3702 46.4264 46.5689 46.6453 46.7506 46.7758 46.9291 47.0874 47.1631 47.2451 47.4404 47.5776 47.7122 47.8004 47.9778 48.1772 48.2999 48.3728 48.5716 48.6168 48.7534 48.9639 49.0783 49.1097 49.2549 49.3908 49.6332 49.8618 50.0094 50.1591 50.2363 50.4119 50.7218 50.8313 50.8936 51.1972 51.3638 51.5026 51.6931 51.9151 51.9786 52.1895 52.3521 52.4292 52.6557 52.7667 52.9354 53.2290 53.3897 53.5995 53.7519 53.8770 54.1105 54.3756 54.4508 54.6235 54.8616 55.4295 55.4652 55.6672 55.9299 56.0205 56.2740 56.3517 56.4750 56.6097 56.9437 57.1425 57.2766 57.5844 57.7905 58.0305 58.1437 58.3279 58.4107 58.7590 58.9413 59.0453 59.2194 59.3370 59.6453 59.8036 59.9321 60.0027 60.1315 60.3073 60.5073 60.7359 61.1190 61.1789 61.3266 61.5171 61.8556 62.2627 62.3334 62.5640 62.9636 63.0381 63.1400 63.4205 63.5295 63.8556 64.1079 64.2248 64.4173 64.6239 64.6930 64.8757 65.1272 65.3274 65.5994 65.7304 66.1909 66.3417 66.5706 66.8208 67.1335 67.4512 67.5987 67.6505 67.6984 68.0365 68.1743 68.2882 68.4432 68.8522 68.9904 69.2507 69.4387 69.6723 69.9245 70.1297 70.2909 70.4494 70.7334 70.8797 71.4668 71.7332 71.8638 72.0431 72.0833 72.2512 72.4708 72.6368 73.0746 73.2322 73.4415 73.5372 73.7322 74.0227 74.1390 74.2878 74.3983 74.6465 74.8004 75.0466 75.1869 75.3032 75.6924 75.7990 76.0471 76.2308 76.3086 76.4033 76.5459 76.7844 76.8710 77.0850 77.3123 77.5538 77.6937 77.8373 78.0190 78.1201 78.1819 78.2579 78.3146 78.5055 78.5829 78.7419 78.7847 78.9173 79.0948 79.3064 79.3373 79.4159 79.5470 79.6193 79.7453 79.8228 79.9466 80.0382 80.0891 80.3016 80.3594 80.4387 80.5468 80.6431 80.7631 80.9365 80.9716 81.1626 81.3786 81.4373 81.5145 81.6258 81.8268 81.9331 82.1928 82.2601 82.4350 82.4478 82.5513 82.6785 82.7387 83.0570 83.1628 83.3449 83.3599 83.4533 83.5136 83.6600 83.7676 83.9323 83.9967 84.0586 84.3068 84.4548 84.5429 84.5747 84.7391 84.9222 84.9231 85.0248 85.2015 85.2598 85.4505 85.5185 85.6454 85.7013 85.8700 85.9735 86.0036 86.0686 86.2042 86.2746 86.3897 86.4892 86.6305 86.7075 86.7909 86.8056 86.9677 87.2157 87.2952 87.3670 87.5305 87.6389 87.6710 87.7739 87.8526 88.0046 88.0974 88.1992 88.3368 88.4187 88.4533 88.5578 88.6782 88.9752 88.9988 89.1262 89.3331 89.3975 89.4430 89.5939 89.6441 89.6911 89.8340 89.8969 89.9810 90.0509 90.1670 90.3064 90.3493 90.4632 90.5139 90.6585 90.8142 90.8757 91.0095 91.1067 91.1430 91.4107 91.4329 91.7015 91.8389 91.9274 92.1249 92.3201 92.4678 92.5998 92.7154 92.7773 92.8395 92.9049 93.0628 93.2047 93.3416 93.3936 93.4765 93.5745 93.7106 93.8150 93.8821 94.0105 94.1335 94.1626 94.2414 94.3796 94.5132 94.6678 94.7468 94.9108 95.1109 95.1505 95.2387 95.3523 95.4435 95.4938 95.5733 95.6049 95.8620 96.0652 96.0883 96.1610 96.2294 96.3256 96.4734 96.5222 96.7830 96.8871 96.9355 97.0728 97.2790 97.3268 97.4863 97.6202 97.7274 98.0203 98.0946 98.1134 98.2551 98.3107 98.3575 98.4889 98.5755 98.7896 98.7977 98.9241 99.0625 99.1982 99.3968 99.4933 99.6286 99.8229 99.8672 100.0409 100.1369 100.2699 100.3215 100.5148 100.6354 100.7357 101.0509 101.0775 101.2545 101.2992 101.5348 101.6638 101.7708 101.8380 101.9434 102.0859 102.2521 102.5263 102.7104 102.8180 102.9778 103.1089 103.3479 103.5663 103.6760 103.8565 103.9731 104.0648 104.3786 104.4385 104.5110 104.5749 104.7136 104.8404 104.9655 105.0899 105.2755 105.3379 105.4389 105.5950 105.6811 105.8075 105.9058 105.9617 106.0940 106.3657 106.5221 106.5746 106.7368 106.8262 107.0687 107.1018 107.2447 107.3907 107.4464 107.5736 107.6915 107.8384 107.9596 107.9991 108.2641 108.3990 108.4550 108.6080 108.8135 108.8380 109.0282 109.0927 109.1431 109.4250 109.6095 109.6764 109.7868 109.8552 109.9616 109.9840 110.2791 110.4673 110.6502 110.9250 111.0417 111.1073 111.1984 111.3751 111.4692 111.6412 111.8053 111.9931 112.1578 112.2421 112.3090 112.4101 112.5496 112.5807 112.6594 112.8068 112.9100 113.1741 113.3705 113.5849 113.7505 113.7891 113.9299 113.9530 114.2912 114.4600 114.5079 114.6317 114.7770 114.9588 115.0499 115.1931 115.3269 115.3728 115.4964 115.5512 115.6618 115.7542 115.8707 116.0645 116.1716 116.2017 116.3268 116.4435 116.5451 116.8003 116.9557 117.1634 117.1653 117.2768 117.3787 117.4447 117.5972 117.8304 117.8719 118.0763 118.2025 118.3471 118.4754 118.5311 118.7157 118.9073 118.9857 119.0973 119.1507 119.2020 119.3640 119.4415 119.5237 119.7050 119.7488 119.8761 120.0022 120.0184 120.1286 120.1626 120.2590 120.4858 120.6233 120.6764 120.8395 121.0200 121.1187 121.3507 121.4469 121.5493 121.6710 121.8277 122.0183 122.1221 122.2807 122.5440 122.7544 122.9939 123.0790 123.3578 123.5021 123.6578 123.8346 124.0097 124.2454 124.4390 124.5930 124.8726 125.2456 125.3355 125.8476 126.3510 126.4057 126.6920 126.8252 126.8672 126.9540 127.1363 127.2822 127.3395 127.5814 127.6517 127.6712 127.9531 128.1795 128.3081 128.6786 128.7476 128.9825 129.1129 129.3930 129.5818 129.8140 130.0660 130.3568 130.6425 130.7830 130.8787 130.9721 131.1109 131.3249 131.5600 131.6358 131.9252 131.9718 132.1593 132.3892 132.4318 132.6519 132.8746 132.9693 133.1455 133.4012 133.6354 133.9498 134.1730 134.2875 134.3256 134.5528 134.6628 135.1064 135.2819 135.6406 135.6751 135.7894 135.8820 136.0966 136.6777 136.7242 137.0343 137.2558 137.5177 137.6890 137.8372 138.1534 138.3409 138.5350 138.6778 138.7860 138.8642 139.0549 139.1489 139.6093 139.8713 140.0669 140.2092 140.4588 140.6166 140.8509 141.3348 141.5040 141.9414 142.0500 142.2647 142.7320 143.0740 143.3639 143.6639 143.7284 143.8072 143.9681 144.1340 144.2553 144.4547 144.5301 144.7085 144.8589 145.0054 145.1649 145.5112 145.9036 146.3032 146.4808 146.9730 147.4162 147.5197 147.7289 147.8538 148.0357 148.2366 148.4249 148.5735 148.7083 148.8306 148.8875 149.1756 149.2586 149.3927 149.6458 149.8378 150.1502 150.2523 150.3530 150.4810 150.5814 150.7813 150.9255 151.1425 151.4375 151.7541 152.1863 152.2658 152.6571 152.8684 153.2515 153.2958 153.6430 153.8036 154.0652 154.5966 154.6821 155.4257 155.4532 155.9809 156.2002 156.2971 156.5495 156.6395 156.8201 157.0097 157.0970 157.2652 157.4206 157.8445 157.8770 158.0272 158.0948 158.1681 158.5861 159.1965 159.4342 159.6016 160.4054 160.6212 161.2118 161.8574 161.9314 162.4017 163.6372 163.8796 164.4158 164.7342 168.7976 169.1714 169.6805 169.9901 171.9680 172.6386 174.1261 174.4383 176.7733 179.8621 180.5532 182.5442 186.4159 187.4028 187.7643 188.1626 188.6695 189.3254 189.4562 190.1372 190.7552 191.0463 192.7079 192.7424 193.0796 195.1298 195.9904 200.0155 201.9233 203.6133 206.0880 206.7781 207.9706 212.4526 229.8598 235.8515 241.0711 248.0204 248.9180 337.9099 618.4323 621.3333 625.2360 629.9937 630.4023 631.8946 632.7058 633.0344 634.6209 635.0486 635.1899 635.6515 637.2421 637.4986 638.1294 638.9735 639.9934 640.7393 644.1039 644.4627 645.3870 646.8690 654.3932 656.0471 658.2754 1214.6741 1215.0964 1563.1156</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.512749 -0.220407 -0.334942 -0.337323 -0.279139 -0.154882 -0.196374 -0.461590 -0.449449 -0.083187 -0.065253 -0.137776 -0.020047 -0.337938 -0.240454 0.349963 -0.183938 -0.193811 0.241435 -0.187129 0.188964 0.041089 -0.277887 0.320006 -0.253431 -0.188939 -0.128895 -0.169939 -0.197320 0.083189 0.101085 0.086687 0.093993 0.106238 0.102686 0.105184 0.101659 0.111852 0.113250 0.100347 0.083671 0.135189 0.148648 0.152654 0.139653 0.121209 0.145577 0.149787 0.108255 0.101990 0.096751 0.090778 0.082238 0.144620 0.154298 0.158294 0.162993 0.163069</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4873 9.2204 8.3349 8.3373 6.2791 6.1549 6.1964 6.4616 6.4494 6.0832 6.0653 6.1378 6.0200 6.3379 6.2405 5.6500 6.1839 6.1938 5.7586 6.1871 5.8110 5.9589 6.2779 5.6800 6.2534 6.1889 6.1289 6.1699 6.1973 0.9168 0.8989 0.9133 0.9060 0.8938 0.8973 0.8948 0.8983 0.8881 0.8867 0.8997 0.9163 0.8648 0.8514 0.8473 0.8603 0.8788 0.8544 0.8502 0.8917 0.8980 0.9032 0.9092 0.9178 0.8554 0.8457 0.8417 0.8370 0.8369</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5127 -0.2204 -0.3349 -0.3373 -0.2791 -0.1549 -0.1964 -0.4616 -0.4494 -0.0832 -0.0653 -0.1378 -0.0200 -0.3379 -0.2405 0.3500 -0.1839 -0.1938 0.2414 -0.1871 0.1890 0.0411 -0.2779 0.3200 -0.2534 -0.1889 -0.1289 -0.1699 -0.1973 0.0832 0.1011 0.0867 0.0940 0.1062 0.1027 0.1052 0.1017 0.1119 0.1133 0.1003 0.0837 0.1352 0.1486 0.1527 0.1397 0.1212 0.1456 0.1498 0.1083 0.1020 0.0968 0.0908 0.0822 0.1446 0.1543 0.1583 0.1630 0.1631</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1328 1.0649 2.0565 2.0763 3.8314 3.9016 3.6953 3.9071 3.9063 3.8127 3.7634 3.8496 3.7024 3.9950 3.9305 3.7326 3.8217 3.8898 3.6261 3.8929 4.0468 3.7914 3.9688 3.6276 3.9677 3.8588 3.8718 3.8403 3.8472 1.0140 1.0071 1.0019 0.9991 1.0095 1.0093 1.0085 1.0051 1.0064 1.0077 1.0090 1.0157 0.9938 0.9863 1.0033 1.0098 1.0174 0.9995 0.9981 0.9877 0.9860 1.0071 1.0026 1.0016 1.0094 0.9994 0.9895 0.9876 0.9858</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1328 1.0649 2.0565 2.0763 3.8314 3.9016 3.6953 3.9071 3.9063 3.8127 3.7634 3.8496 3.7024 3.9950 3.9305 3.7326 3.8217 3.8898 3.6261 3.8929 4.0468 3.7914 3.9688 3.6276 3.9677 3.8588 3.8718 3.8403 3.8472 1.0140 1.0071 1.0019 0.9991 1.0095 1.0093 1.0085 1.0051 1.0064 1.0077 1.0090 1.0157 0.9938 0.9863 1.0033 1.0098 1.0174 0.9995 0.9981 0.9877 0.9860 1.0071 1.0026 1.0016 1.0094 0.9994 0.9895 0.9876 0.9858</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9607 1.0159 0.9619 0.9695 1.0709 1.0825 0.8753 0.9514 0.9596 0.9119 0.9779 0.9729 0.9125 1.0095 1.0061 1.2753 1.3027 0.9755 0.9767 0.9748 0.9743 0.9722 0.9737 0.8861 1.0048 1.0183 1.4408 1.0095 1.4559 0.9844 1.3654 1.3695 1.3212 0.9870 1.3295 0.9753 1.3329 0.9693 1.4165 0.9858 1.3812 1.4222 0.9872 0.9631 0.9743 0.9769 0.9928 0.9942 0.9939 1.3532 1.3204 1.4329 0.9968 1.4042 0.9847 1.3861 0.9920 1.3688 0.9859 0.9933</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034797026</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.088047685208</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-15.19120 14.47423 -0.71697 28.62763 -27.24625 1.38138 -6.01184 4.42880 -1.58305</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.21998</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.64273</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
