<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.728345"
                        y3="1.57456"
                        z3="0.645788"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.75316"
                        y3="-4.786216"
                        z3="-1.180983"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.118495"
                        y3="3.066851"
                        z3="0.171574"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.091126"
                        y3="-2.143772"
                        z3="-1.127519"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.940814"
                        y3="-0.170519"
                        z3="1.364728"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.837281"
                        y3="-1.169432"
                        z3="1.021687"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.898773"
                        y3="1.98387"
                        z3="0.463067"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.501269"
                        y3="2.805295"
                        z3="1.842176"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.570556"
                        y3="1.729671"
                        z3="-1.029341"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.740319"
                        y3="-1.500084"
                        z3="-0.468877"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.101597"
                        y3="2.261731"
                        z3="1.581203"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.272032"
                        y3="2.039757"
                        z3="-0.780085"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.564074"
                        y3="-2.391405"
                        z3="-0.743787"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.234246"
                        y3="2.599115"
                        z3="1.46363"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.070845"
                        y3="2.374501"
                        z3="-0.926135"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.828779"
                        y3="2.677325"
                        z3="0.201528"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.291738"
                        y3="-1.833809"
                        z3="-0.843218"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.697672"
                        y3="-3.773829"
                        z3="-0.827837"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.82566"
                        y3="-2.639591"
                        z3="-0.986467"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.586745"
                        y3="-4.590434"
                        z3="-0.990185"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.664469"
                        y3="-4.015841"
                        z3="-1.05036"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.771091"
                        y3="3.199894"
                        z3="-1.087351"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.143272"
                        y3="3.777017"
                        z3="-0.848862"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.607612"
                        y3="-1.274421"
                        z3="-0.201251"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.758452"
                        y3="-0.599607"
                        z3="-0.591293"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.07153"
                        y3="-1.083267"
                        z3="1.065707"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.373978"
                        y3="0.270806"
                        z3="0.293691"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.693486"
                        y3="-0.194854"
                        z3="1.934866"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.841298"
                        y3="0.486573"
                        z3="1.5584"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.002377"
                        y3="-0.073542"
                        z3="2.453658"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.914937"
                        y3="-0.563368"
                        z3="1.051808"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.992766"
                        y3="-2.101779"
                        z3="1.573508"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.872542"
                        y3="-0.777163"
                        z3="1.35841"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.013335"
                        y3="2.781868"
                        z3="2.818813"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.43588"
                        y3="3.828296"
                        z3="1.466822"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.558426"
                        y3="2.583733"
                        z3="2.00514"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.17919"
                        y3="1.028181"
                        z3="-1.768281"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.639829"
                        y3="1.528644"
                        z3="-0.932407"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.46666"
                        y3="2.735032"
                        z3="-1.442301"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.66562"
                        y3="-1.978209"
                        z3="-0.799661"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.637337"
                        y3="-0.580633"
                        z3="-1.051187"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.52953"
                        y3="2.22687"
                        z3="2.577309"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.833823"
                        y3="1.823896"
                        z3="-1.681917"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.822035"
                        y3="2.823054"
                        z3="2.345572"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.497047"
                        y3="2.407697"
                        z3="-1.919617"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.171641"
                        y3="-0.756536"
                        z3="-0.79534"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.679932"
                        y3="-4.224819"
                        z3="-0.764812"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.690915"
                        y3="-5.665751"
                        z3="-1.055673"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.196106"
                        y3="3.861819"
                        z3="-1.742553"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.839378"
                        y3="2.223855"
                        z3="-1.578821"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.086828"
                        y3="4.773462"
                        z3="-0.409992"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.744577"
                        y3="3.144723"
                        z3="-0.195706"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.665703"
                        y3="3.862754"
                        z3="-1.801457"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.171833"
                        y3="-0.762997"
                        z3="-1.57847"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.184539"
                        y3="-1.609872"
                        z3="1.391674"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.272386"
                        y3="0.789147"
                        z3="-0.014736"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.269531"
                        y3="-0.042931"
                        z3="2.918915"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.318312"
                        y3="1.175369"
                        z3="2.242339"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7283,1.5746,.6458;1.7532,-4.7862,-1.181;2.1185,3.0669,.1716;2.0911,-2.1438,-1.1275;-3.9408,-.1705,1.3647;-2.8373,-1.1694,1.0217;-1.8988,1.9839,.4631;-4.5013,2.8053,1.8422;-4.5706,1.7297,-1.0293;-2.7403,-1.5001,-.4689;-1.1016,2.2617,1.5812;-1.272,2.0398,-.7801;-1.5641,-2.3914,-.7438;.2342,2.5991,1.4636;.0708,2.3745,-.9261;.8288,2.6773,.2015;-.2917,-1.8338,-.8432;-1.6977,-3.7738,-.8278;.8257,-2.6396,-.9865;-.5867,-4.5904,-.9902;.6645,-4.0158,-1.0504;2.7711,3.1999,-1.0874;4.1433,3.777,-.8489;2.6076,-1.2744,-.2013;3.7585,-.5996,-.5913;2.0715,-1.0833,1.0657;4.374,.2708,.2937;2.6935,-.1949,1.9349;3.8413,.4866,1.5584;-4.0024,-.0735,2.4537;-4.9149,-.5634,1.0518;-2.9928,-2.1018,1.5735;-1.8725,-.7772,1.3584;-4.0133,2.7819,2.8188;-4.4359,3.8283,1.4668;-5.5584,2.5837,2.0051;-4.1792,1.0282,-1.7683;-5.6398,1.5286,-.9324;-4.4667,2.735,-1.4423;-3.6656,-1.9782,-.7997;-2.6373,-.5806,-1.0512;-1.5295,2.2269,2.5773;-1.8338,1.8239,-1.6819;.822,2.8231,2.3456;.497,2.4077,-1.9196;-.1716,-.7565,-.7953;-2.6799,-4.2248,-.7648;-.6909,-5.6658,-1.0557;2.1961,3.8618,-1.7426;2.8394,2.2239,-1.5788;4.0868,4.7735,-.41;4.7446,3.1447,-.1957;4.6657,3.8628,-1.8015;4.1718,-.763,-1.5785;1.1845,-1.6099,1.3917;5.2724,.7891,-.0147;2.2695,-.0429,2.9189;4.3183,1.1754,2.2423;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2971.3220910206 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.474e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.816 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.72834527"
                                 y3="1.57455975"
                                 z3="0.64578775">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.7531598"
                                 y3="-4.78621556"
                                 z3="-1.18098291">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.11849497"
                                 y3="3.06685072"
                                 z3="0.17157372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.09112627"
                                 y3="-2.14377223"
                                 z3="-1.1275193">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.94081431"
                                 y3="-0.17051923"
                                 z3="1.36472753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.83728147"
                                 y3="-1.16943166"
                                 z3="1.02168668">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.89877263"
                                 y3="1.98387021"
                                 z3="0.46306723">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.50126884"
                                 y3="2.80529511"
                                 z3="1.84217559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.57055628"
                                 y3="1.72967147"
                                 z3="-1.02934093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.74031931"
                                 y3="-1.50008409"
                                 z3="-0.46887736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.10159697"
                                 y3="2.26173135"
                                 z3="1.58120264">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.27203178"
                                 y3="2.03975745"
                                 z3="-0.78008478">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.56407431"
                                 y3="-2.3914048"
                                 z3="-0.74378664">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.23424641"
                                 y3="2.59911476"
                                 z3="1.46362973">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.07084523"
                                 y3="2.37450078"
                                 z3="-0.92613522">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.82877911"
                                 y3="2.67732503"
                                 z3="0.20152762">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.29173763"
                                 y3="-1.8338087"
                                 z3="-0.84321784">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.69767189"
                                 y3="-3.77382852"
                                 z3="-0.8278372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.82566019"
                                 y3="-2.63959074"
                                 z3="-0.98646716">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.58674539"
                                 y3="-4.59043423"
                                 z3="-0.99018482">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.6644688"
                                 y3="-4.01584134"
                                 z3="-1.05035995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.77109063"
                                 y3="3.19989384"
                                 z3="-1.08735115">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.14327245"
                                 y3="3.77701667"
                                 z3="-0.84886228">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.60761159"
                                 y3="-1.27442093"
                                 z3="-0.20125063">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.75845173"
                                 y3="-0.59960676"
                                 z3="-0.59129255">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.07152957"
                                 y3="-1.08326749"
                                 z3="1.0657071">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.37397847"
                                 y3="0.27080631"
                                 z3="0.29369065">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.6934859"
                                 y3="-0.1948538"
                                 z3="1.93486563">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.84129837"
                                 y3="0.4865732"
                                 z3="1.55840006">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.0023767"
                                 y3="-0.07354172"
                                 z3="2.45365826">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.91493723"
                                 y3="-0.56336811"
                                 z3="1.05180796">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.99276566"
                                 y3="-2.1017787"
                                 z3="1.57350769">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-1.87254226"
                                 y3="-0.77716267"
                                 z3="1.35840973">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.01333485"
                                 y3="2.78186844"
                                 z3="2.81881266">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.4358803"
                                 y3="3.8282961"
                                 z3="1.46682171">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.55842597"
                                 y3="2.58373344"
                                 z3="2.00514046">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.17918997"
                                 y3="1.02818095"
                                 z3="-1.768281">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.63982941"
                                 y3="1.52864392"
                                 z3="-0.93240717">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.46665974"
                                 y3="2.73503215"
                                 z3="-1.44230081">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.66562002"
                                 y3="-1.97820927"
                                 z3="-0.79966107">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.63733733"
                                 y3="-0.58063279"
                                 z3="-1.05118724">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.52952952"
                                 y3="2.22687028"
                                 z3="2.57730858">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.833823"
                                 y3="1.8238958"
                                 z3="-1.68191658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.82203516"
                                 y3="2.82305376"
                                 z3="2.3455718">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.49704734"
                                 y3="2.40769718"
                                 z3="-1.91961679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.17164127"
                                 y3="-0.75653635"
                                 z3="-0.79533986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.67993171"
                                 y3="-4.22481934"
                                 z3="-0.76481218">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.69091542"
                                 y3="-5.66575117"
                                 z3="-1.05567344">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.19610601"
                                 y3="3.86181946"
                                 z3="-1.74255306">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.8393778"
                                 y3="2.22385502"
                                 z3="-1.57882074">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.08682761"
                                 y3="4.77346166"
                                 z3="-0.40999215">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.74457704"
                                 y3="3.14472257"
                                 z3="-0.19570606">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.66570301"
                                 y3="3.8627543"
                                 z3="-1.80145653">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="4.1718333"
                                 y3="-0.76299744"
                                 z3="-1.5784701">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.18453948"
                                 y3="-1.6098717"
                                 z3="1.39167409">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.27238638"
                                 y3="0.78914741"
                                 z3="-0.01473569">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.26953083"
                                 y3="-0.04293052"
                                 z3="2.91891501">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.31831242"
                                 y3="1.17536911"
                                 z3="2.24233901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7283,1.5746,.6458;1.7532,-4.7862,-1.181;2.1185,3.0669,.1716;2.0911,-2.1438,-1.1275;-3.9408,-.1705,1.3647;-2.8373,-1.1694,1.0217;-1.8988,1.9839,.4631;-4.5013,2.8053,1.8422;-4.5706,1.7297,-1.0293;-2.7403,-1.5001,-.4689;-1.1016,2.2617,1.5812;-1.272,2.0398,-.7801;-1.5641,-2.3914,-.7438;.2342,2.5991,1.4636;.0708,2.3745,-.9261;.8288,2.6773,.2015;-.2917,-1.8338,-.8432;-1.6977,-3.7738,-.8278;.8257,-2.6396,-.9865;-.5867,-4.5904,-.9902;.6645,-4.0158,-1.0504;2.7711,3.1999,-1.0874;4.1433,3.777,-.8489;2.6076,-1.2744,-.2013;3.7585,-.5996,-.5913;2.0715,-1.0833,1.0657;4.374,.2708,.2937;2.6935,-.1949,1.9349;3.8413,.4866,1.5584;-4.0024,-.0735,2.4537;-4.9149,-.5634,1.0518;-2.9928,-2.1018,1.5735;-1.8725,-.7772,1.3584;-4.0133,2.7819,2.8188;-4.4359,3.8283,1.4668;-5.5584,2.5837,2.0051;-4.1792,1.0282,-1.7683;-5.6398,1.5286,-.9324;-4.4667,2.735,-1.4423;-3.6656,-1.9782,-.7997;-2.6373,-.5806,-1.0512;-1.5295,2.2269,2.5773;-1.8338,1.8239,-1.6819;.822,2.8231,2.3456;.497,2.4077,-1.9196;-.1716,-.7565,-.7953;-2.6799,-4.2248,-.7648;-.6909,-5.6658,-1.0557;2.1961,3.8618,-1.7426;2.8394,2.2239,-1.5788;4.0868,4.7735,-.41;4.7446,3.1447,-.1957;4.6657,3.8628,-1.8015;4.1718,-.763,-1.5785;1.1845,-1.6099,1.3917;5.2724,.7891,-.0147;2.2695,-.0429,2.9189;4.3183,1.1754,2.2423;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.728345"
                        y3="1.57456"
                        z3="0.645788"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.75316"
                        y3="-4.786216"
                        z3="-1.180983"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.118495"
                        y3="3.066851"
                        z3="0.171574"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.091126"
                        y3="-2.143772"
                        z3="-1.127519"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.940814"
                        y3="-0.170519"
                        z3="1.364728"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.837281"
                        y3="-1.169432"
                        z3="1.021687"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.898773"
                        y3="1.98387"
                        z3="0.463067"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.501269"
                        y3="2.805295"
                        z3="1.842176"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.570556"
                        y3="1.729671"
                        z3="-1.029341"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.740319"
                        y3="-1.500084"
                        z3="-0.468877"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.101597"
                        y3="2.261731"
                        z3="1.581203"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.272032"
                        y3="2.039757"
                        z3="-0.780085"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.564074"
                        y3="-2.391405"
                        z3="-0.743787"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.234246"
                        y3="2.599115"
                        z3="1.46363"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.070845"
                        y3="2.374501"
                        z3="-0.926135"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.828779"
                        y3="2.677325"
                        z3="0.201528"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.291738"
                        y3="-1.833809"
                        z3="-0.843218"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.697672"
                        y3="-3.773829"
                        z3="-0.827837"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.82566"
                        y3="-2.639591"
                        z3="-0.986467"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.586745"
                        y3="-4.590434"
                        z3="-0.990185"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.664469"
                        y3="-4.015841"
                        z3="-1.05036"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.771091"
                        y3="3.199894"
                        z3="-1.087351"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.143272"
                        y3="3.777017"
                        z3="-0.848862"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.607612"
                        y3="-1.274421"
                        z3="-0.201251"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.758452"
                        y3="-0.599607"
                        z3="-0.591293"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.07153"
                        y3="-1.083267"
                        z3="1.065707"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.373978"
                        y3="0.270806"
                        z3="0.293691"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.693486"
                        y3="-0.194854"
                        z3="1.934866"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.841298"
                        y3="0.486573"
                        z3="1.5584"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.002377"
                        y3="-0.073542"
                        z3="2.453658"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.914937"
                        y3="-0.563368"
                        z3="1.051808"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.992766"
                        y3="-2.101779"
                        z3="1.573508"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.872542"
                        y3="-0.777163"
                        z3="1.35841"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.013335"
                        y3="2.781868"
                        z3="2.818813"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.43588"
                        y3="3.828296"
                        z3="1.466822"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.558426"
                        y3="2.583733"
                        z3="2.00514"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.17919"
                        y3="1.028181"
                        z3="-1.768281"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.639829"
                        y3="1.528644"
                        z3="-0.932407"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.46666"
                        y3="2.735032"
                        z3="-1.442301"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.66562"
                        y3="-1.978209"
                        z3="-0.799661"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.637337"
                        y3="-0.580633"
                        z3="-1.051187"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.52953"
                        y3="2.22687"
                        z3="2.577309"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.833823"
                        y3="1.823896"
                        z3="-1.681917"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.822035"
                        y3="2.823054"
                        z3="2.345572"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.497047"
                        y3="2.407697"
                        z3="-1.919617"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.171641"
                        y3="-0.756536"
                        z3="-0.79534"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.679932"
                        y3="-4.224819"
                        z3="-0.764812"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.690915"
                        y3="-5.665751"
                        z3="-1.055673"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.196106"
                        y3="3.861819"
                        z3="-1.742553"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.839378"
                        y3="2.223855"
                        z3="-1.578821"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.086828"
                        y3="4.773462"
                        z3="-0.409992"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.744577"
                        y3="3.144723"
                        z3="-0.195706"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.665703"
                        y3="3.862754"
                        z3="-1.801457"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.171833"
                        y3="-0.762997"
                        z3="-1.57847"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.184539"
                        y3="-1.609872"
                        z3="1.391674"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.272386"
                        y3="0.789147"
                        z3="-0.014736"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.269531"
                        y3="-0.042931"
                        z3="2.918915"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.318312"
                        y3="1.175369"
                        z3="2.242339"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7283,1.5746,.6458;1.7532,-4.7862,-1.181;2.1185,3.0669,.1716;2.0911,-2.1438,-1.1275;-3.9408,-.1705,1.3647;-2.8373,-1.1694,1.0217;-1.8988,1.9839,.4631;-4.5013,2.8053,1.8422;-4.5706,1.7297,-1.0293;-2.7403,-1.5001,-.4689;-1.1016,2.2617,1.5812;-1.272,2.0398,-.7801;-1.5641,-2.3914,-.7438;.2342,2.5991,1.4636;.0708,2.3745,-.9261;.8288,2.6773,.2015;-.2917,-1.8338,-.8432;-1.6977,-3.7738,-.8278;.8257,-2.6396,-.9865;-.5867,-4.5904,-.9902;.6645,-4.0158,-1.0504;2.7711,3.1999,-1.0874;4.1433,3.777,-.8489;2.6076,-1.2744,-.2013;3.7585,-.5996,-.5913;2.0715,-1.0833,1.0657;4.374,.2708,.2937;2.6935,-.1949,1.9349;3.8413,.4866,1.5584;-4.0024,-.0735,2.4537;-4.9149,-.5634,1.0518;-2.9928,-2.1018,1.5735;-1.8725,-.7772,1.3584;-4.0133,2.7819,2.8188;-4.4359,3.8283,1.4668;-5.5584,2.5837,2.0051;-4.1792,1.0282,-1.7683;-5.6398,1.5286,-.9324;-4.4667,2.735,-1.4423;-3.6656,-1.9782,-.7997;-2.6373,-.5806,-1.0512;-1.5295,2.2269,2.5773;-1.8338,1.8239,-1.6819;.822,2.8231,2.3456;.497,2.4077,-1.9196;-.1716,-.7565,-.7953;-2.6799,-4.2248,-.7648;-.6909,-5.6658,-1.0557;2.1961,3.8618,-1.7426;2.8394,2.2239,-1.5788;4.0868,4.7735,-.41;4.7446,3.1447,-.1957;4.6657,3.8628,-1.8015;4.1718,-.763,-1.5785;1.1845,-1.6099,1.3917;5.2724,.7891,-.0147;2.2695,-.0429,2.9189;4.3183,1.1754,2.2423;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3368</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2909.5902</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1638.2261</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05349144</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2971.32209102</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4481.37558246</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7973.13997811</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3491.76439565</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02813646</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.97062510</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91713366</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408025</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999919620001</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999919620001</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999839240003</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234666764607</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4703 127.6150 127.8603 128.0734 128.1210 128.1422 128.4200 128.4799 128.7826 129.0518 129.3998 129.5912 129.7945 129.8458 130.0318 130.1518 130.4744 130.5649 130.8054 130.8584 131.1125 131.4173 131.5834 131.7596 131.8080 131.9076 131.9405 132.0770 132.1825 132.3214 132.7022 132.8899 133.0135 133.2242 133.2782 133.7852 134.0916 134.4582 134.7032 134.7783 135.0187 135.1775 135.4510 135.5571 135.8353 135.9433 136.2761 136.4162 136.6837 136.7697 136.8455 137.0236 137.2938 137.8428 137.9857 138.2332 138.5282 138.6229 138.8226 138.8495 138.9355 139.0501 139.1616 139.6162 139.7051 139.9970 140.2484 140.6129 140.8462 141.2427 141.2843 141.4865 141.6785 142.1270 142.2858 142.4837 143.1259 143.2355 143.4292 143.5663 143.8230 143.8659 143.9682 144.1551 144.5252 144.5556 144.8218 144.9458 144.9767 145.1846 145.7664 145.8980 146.2668 146.4635 147.0912 147.1018 147.4614 147.6604 147.7522 147.8579 148.3207 148.4171 148.6675 148.7233 148.8701 149.0934 149.1588 149.3340 149.4461 149.5928 149.7605 150.1280 150.2259 150.3063 150.3934 150.7124 150.8487 151.0105 151.1210 151.3323 151.4788 151.9843 152.3449 152.4911 152.5980 153.2321 153.6723 153.7584 153.9531 154.1653 154.8255 155.0475 155.4756 155.6331 156.0518 156.2062 156.3233 156.4799 156.5966 156.8897 157.0833 157.1243 157.2786 157.4350 157.7808 157.8394 158.1764 158.1951 158.7069 158.9436 159.1364 159.4480 159.5632 159.8804 160.5803 161.0218 161.7196 161.8867 162.4719 163.5936 164.1169 164.4272 164.6239 168.6960 168.7976 169.5535 169.8990 171.8489 172.6399 174.1188 174.4837 177.1367 179.8236 180.7245 182.5559 186.3426 187.3413 187.6774 188.2957 188.6473 188.7565 189.4428 190.0879 190.5983 190.9308 192.5547 192.7506 192.8484 194.9107 196.0590 200.0240 201.6222 203.5936 206.1277 206.7220 208.2250 212.4792 229.8445 235.8265 241.0976 247.9830 248.9015 338.4818 617.7759 621.9688 624.0012 629.6745 630.2683 631.9791 632.6737 633.0912 634.6252 634.9225 635.1211 635.7944 636.8775 637.0509 637.4343 638.2956 640.5007 641.1769 643.3520 644.0125 645.6972 647.0207 654.0956 655.9054 658.4256 1214.8510 1215.1950 1563.1011</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.479467 -0.219267 -0.336015 -0.337894 -0.280640 -0.106782 -0.129637 -0.465874 -0.427721 -0.084698 -0.108806 -0.182553 0.017584 -0.299899 -0.194638 0.320286 -0.218336 -0.196619 0.220714 -0.172891 0.184845 0.022725 -0.273290 0.354658 -0.289346 -0.213170 -0.097784 -0.152785 -0.231808 0.097218 0.084869 0.093882 0.068508 0.100093 0.101529 0.103198 0.103406 0.109681 0.108965 0.095655 0.080731 0.137344 0.146654 0.137418 0.139554 0.132730 0.143127 0.150297 0.119628 0.104831 0.093271 0.081160 0.094414 0.144690 0.158462 0.169065 0.161386 0.158408</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5205 9.2193 8.3360 8.3379 6.2806 6.1068 6.1296 6.4659 6.4277 6.0847 6.1088 6.1826 5.9824 6.2999 6.1946 5.6797 6.2183 6.1966 5.7793 6.1729 5.8152 5.9773 6.2733 5.6453 6.2893 6.2132 6.0978 6.1528 6.2318 0.9028 0.9151 0.9061 0.9315 0.8999 0.8985 0.8968 0.8966 0.8903 0.8910 0.9043 0.9193 0.8627 0.8533 0.8626 0.8604 0.8673 0.8569 0.8497 0.8804 0.8952 0.9067 0.9188 0.9056 0.8553 0.8415 0.8309 0.8386 0.8416</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4795 -0.2193 -0.3360 -0.3379 -0.2806 -0.1068 -0.1296 -0.4659 -0.4277 -0.0847 -0.1088 -0.1826 0.0176 -0.2999 -0.1946 0.3203 -0.2183 -0.1966 0.2207 -0.1729 0.1848 0.0227 -0.2733 0.3547 -0.2893 -0.2132 -0.0978 -0.1528 -0.2318 0.0972 0.0849 0.0939 0.0685 0.1001 0.1015 0.1032 0.1034 0.1097 0.1090 0.0957 0.0807 0.1373 0.1467 0.1374 0.1396 0.1327 0.1431 0.1503 0.1196 0.1048 0.0933 0.0812 0.0944 0.1447 0.1585 0.1691 0.1614 0.1584</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0754 1.0667 2.0391 2.0806 3.8611 3.8634 3.6802 3.9074 3.8882 3.7619 3.8644 3.8580 3.6582 3.9979 3.8374 3.6952 3.9254 3.9022 3.6630 3.8699 4.0522 3.7841 3.9595 3.6211 3.9520 3.8561 3.7839 3.8319 3.8741 1.0084 1.0129 1.0076 1.0117 1.0126 1.0112 1.0105 1.0110 1.0101 1.0075 1.0140 1.0182 0.9920 0.9876 1.0134 1.0109 1.0123 1.0027 0.9975 0.9914 0.9824 1.0041 1.0052 1.0056 1.0112 0.9977 0.9778 0.9906 0.9922</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0754 1.0667 2.0391 2.0806 3.8611 3.8634 3.6802 3.9074 3.8882 3.7619 3.8644 3.8580 3.6582 3.9979 3.8374 3.6952 3.9254 3.9022 3.6630 3.8699 4.0522 3.7841 3.9595 3.6211 3.9520 3.8561 3.7839 3.8319 3.8741 1.0084 1.0129 1.0076 1.0117 1.0126 1.0112 1.0105 1.0110 1.0101 1.0075 1.0140 1.0182 0.9920 0.9876 1.0134 1.0109 1.0123 1.0027 0.9975 0.9914 0.9824 1.0041 1.0052 1.0056 1.0112 0.9977 0.9778 0.9906 0.9922</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9460 0.9755 0.9549 0.9550 1.0723 1.0595 0.8622 0.9325 0.9674 0.9338 0.9829 0.9832 0.8979 0.9914 1.0161 1.3190 1.3123 0.9792 0.9750 0.9775 0.9787 0.9717 0.9738 0.8804 0.9897 1.0195 1.4802 0.9927 1.4144 0.9909 1.3621 1.3676 1.3091 1.0070 1.3065 0.9887 1.3839 0.9671 1.4031 0.9870 1.3710 1.4244 0.9861 0.9542 0.9734 0.9798 0.9945 0.9945 0.9916 1.3340 1.3378 1.4095 1.0048 1.3793 0.9750 1.3465 0.9925 1.3945 0.9900 1.0048</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034629146</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.088120580995</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.45175 17.45884 -0.99291 27.02751 -26.25075 0.77676 5.28943 -5.44293 -0.15350</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.26996</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.22797</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
