<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.261006"
                        y3="0.900872"
                        z3="1.368342"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.894667"
                        y3="-3.877502"
                        z3="-1.04039"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.427544"
                        y3="3.789208"
                        z3="-1.155569"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.959995"
                        y3="-1.164727"
                        z3="-1.146737"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.358885"
                        y3="-0.952705"
                        z3="0.994015"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.890734"
                        y3="-1.346428"
                        z3="-0.384709"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.783485"
                        y3="1.745276"
                        z3="0.561084"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.0787"
                        y3="1.101052"
                        z3="3.233193"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.840446"
                        y3="1.7321"
                        z3="0.771608"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.939206"
                        y3="-1.050962"
                        z3="-1.546861"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.479844"
                        y3="1.490213"
                        z3="0.98884"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.932095"
                        y3="2.673679"
                        z3="-0.473992"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.639251"
                        y3="-1.801116"
                        z3="-1.44236"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.627185"
                        y3="2.121714"
                        z3="0.433372"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.847698"
                        y3="3.319618"
                        z3="-1.040227"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.44445"
                        y3="3.060734"
                        z3="-0.581039"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.424683"
                        y3="-1.129092"
                        z3="-1.340056"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.630748"
                        y3="-3.194609"
                        z3="-1.412389"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.763397"
                        y3="-1.829203"
                        z3="-1.207871"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.44851"
                        y3="-3.906454"
                        z3="-1.280806"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.738538"
                        y3="-3.213967"
                        z3="-1.177177"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.793041"
                        y3="3.511238"
                        z3="-0.862551"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.314503"
                        y3="2.329475"
                        z3="-1.647679"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.623062"
                        y3="-1.120716"
                        z3="0.054175"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.973834"
                        y3="-0.799206"
                        z3="-0.00254"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.998049"
                        y3="-1.340466"
                        z3="1.274237"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.70206"
                        y3="-0.699309"
                        z3="1.172041"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.744678"
                        y3="-1.241987"
                        z3="2.442151"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.093854"
                        y3="-0.923437"
                        z3="2.400855"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.383398"
                        y3="-1.417458"
                        z3="1.176561"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.021876"
                        y3="-1.374425"
                        z3="1.757741"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.837814"
                        y3="-0.835892"
                        z3="-0.578807"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.12871"
                        y3="-2.414374"
                        z3="-0.392376"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.914384"
                        y3="0.644924"
                        z3="3.767856"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.164129"
                        y3="0.630621"
                        z3="3.600599"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.040456"
                        y3="2.153961"
                        z3="3.519239"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.71642"
                        y3="1.257607"
                        z3="1.218985"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.869519"
                        y3="2.789088"
                        z3="1.043014"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.958246"
                        y3="1.668837"
                        z3="-0.311956"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.438475"
                        y3="-1.323018"
                        z3="-2.480826"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.738214"
                        y3="0.021161"
                        z3="-1.608433"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.299522"
                        y3="0.774906"
                        z3="1.784791"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.918504"
                        y3="2.908257"
                        z3="-0.857591"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.611106"
                        y3="1.875069"
                        z3="0.810428"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.995435"
                        y3="4.041419"
                        z3="-1.834504"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.393274"
                        y3="-0.046081"
                        z3="-1.363867"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.561453"
                        y3="-3.741943"
                        z3="-1.494204"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.446855"
                        y3="-4.988486"
                        z3="-1.260665"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.942803"
                        y3="3.374992"
                        z3="0.211438"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.331334"
                        y3="4.416003"
                        z3="-1.144279"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.76514"
                        y3="1.415318"
                        z3="-1.428743"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.253514"
                        y3="2.514056"
                        z3="-2.720536"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.361314"
                        y3="2.157661"
                        z3="-1.396021"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.44818"
                        y3="-0.629561"
                        z3="-0.960638"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.94393"
                        y3="-1.580172"
                        z3="1.332712"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.754258"
                        y3="-0.45139"
                        z3="1.12245"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.256584"
                        y3="-1.415118"
                        z3="3.392229"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.666269"
                        y3="-0.848309"
                        z3="3.31537"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.261,.9009,1.3683;1.8947,-3.8775,-1.0404;1.4275,3.7892,-1.1556;1.96,-1.1647,-1.1467;-3.3589,-.9527,.994;-3.8907,-1.3464,-.3847;-1.7835,1.7453,.5611;-3.0787,1.1011,3.2332;-4.8404,1.7321,.7716;-2.9392,-1.051,-1.5469;-.4798,1.4902,.9888;-1.9321,2.6737,-.474;-1.6393,-1.8011,-1.4424;.6272,2.1217,.4334;-.8477,3.3196,-1.0402;.4445,3.0607,-.581;-.4247,-1.1291,-1.3401;-1.6307,-3.1946,-1.4124;.7634,-1.8292,-1.2079;-.4485,-3.9065,-1.2808;.7385,-3.214,-1.1772;2.793,3.5112,-.8626;3.3145,2.3295,-1.6477;2.6231,-1.1207,.0542;3.9738,-.7992,-.0025;1.998,-1.3405,1.2742;4.7021,-.6993,1.172;2.7447,-1.242,2.4422;4.0939,-.9234,2.4009;-2.3834,-1.4175,1.1766;-4.0219,-1.3744,1.7577;-4.8378,-.8359,-.5788;-4.1287,-2.4144,-.3924;-3.9144,.6449,3.7679;-2.1641,.6306,3.6006;-3.0405,2.154,3.5192;-5.7164,1.2576,1.219;-4.8695,2.7891,1.043;-4.9582,1.6688,-.312;-3.4385,-1.323,-2.4808;-2.7382,.0212,-1.6084;-.2995,.7749,1.7848;-2.9185,2.9083,-.8576;1.6111,1.8751,.8104;-.9954,4.0414,-1.8345;-.3933,-.0461,-1.3639;-2.5615,-3.7419,-1.4942;-.4469,-4.9885,-1.2607;2.9428,3.375,.2114;3.3313,4.416,-1.1443;2.7651,1.4153,-1.4287;3.2535,2.5141,-2.7205;4.3613,2.1577,-1.396;4.4482,-.6296,-.9606;.9439,-1.5802,1.3327;5.7543,-.4514,1.1224;2.2566,-1.4151,3.3922;4.6663,-.8483,3.3154;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3012.6868776722 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.546e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.413 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.809 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.26100553"
                                 y3="0.90087201"
                                 z3="1.36834159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.89466703"
                                 y3="-3.87750165"
                                 z3="-1.04039005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.42754436"
                                 y3="3.78920831"
                                 z3="-1.15556867">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.95999538"
                                 y3="-1.16472683"
                                 z3="-1.14673716">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.35888525"
                                 y3="-0.95270498"
                                 z3="0.99401529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.89073388"
                                 y3="-1.34642788"
                                 z3="-0.38470908">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.78348532"
                                 y3="1.74527554"
                                 z3="0.56108362">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.07870028"
                                 y3="1.10105198"
                                 z3="3.23319301">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.84044631"
                                 y3="1.73210005"
                                 z3="0.77160786">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.9392064"
                                 y3="-1.05096238"
                                 z3="-1.54686081">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.47984359"
                                 y3="1.49021305"
                                 z3="0.98883987">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.93209462"
                                 y3="2.67367919"
                                 z3="-0.47399161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.63925086"
                                 y3="-1.80111631"
                                 z3="-1.44236014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.62718493"
                                 y3="2.12171357"
                                 z3="0.43337223">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.84769765"
                                 y3="3.31961785"
                                 z3="-1.04022665">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.44445039"
                                 y3="3.06073399"
                                 z3="-0.58103869">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.42468346"
                                 y3="-1.12909179"
                                 z3="-1.34005607">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.63074793"
                                 y3="-3.19460862"
                                 z3="-1.41238881">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.76339727"
                                 y3="-1.82920271"
                                 z3="-1.20787107">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.44851049"
                                 y3="-3.90645402"
                                 z3="-1.28080571">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.73853781"
                                 y3="-3.21396738"
                                 z3="-1.17717709">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.793041"
                                 y3="3.51123809"
                                 z3="-0.86255099">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.31450318"
                                 y3="2.32947549"
                                 z3="-1.64767928">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.62306207"
                                 y3="-1.1207161"
                                 z3="0.05417521">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.97383351"
                                 y3="-0.79920618"
                                 z3="-0.00253977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.99804888"
                                 y3="-1.34046568"
                                 z3="1.27423679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.70206023"
                                 y3="-0.69930906"
                                 z3="1.17204132">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.74467785"
                                 y3="-1.2419868"
                                 z3="2.44215068">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.09385435"
                                 y3="-0.92343659"
                                 z3="2.40085451">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.38339801"
                                 y3="-1.41745797"
                                 z3="1.17656095">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.0218764"
                                 y3="-1.37442481"
                                 z3="1.75774118">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.83781356"
                                 y3="-0.83589239"
                                 z3="-0.57880693">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.12871035"
                                 y3="-2.41437446"
                                 z3="-0.39237629">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.91438435"
                                 y3="0.64492393"
                                 z3="3.76785614">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.16412918"
                                 y3="0.63062067"
                                 z3="3.6005994">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.04045644"
                                 y3="2.15396118"
                                 z3="3.51923864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.71642035"
                                 y3="1.25760722"
                                 z3="1.21898468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.8695188"
                                 y3="2.78908758"
                                 z3="1.0430143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.95824551"
                                 y3="1.66883679"
                                 z3="-0.31195637">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.43847541"
                                 y3="-1.32301795"
                                 z3="-2.48082562">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.73821394"
                                 y3="0.02116125"
                                 z3="-1.608433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.29952176"
                                 y3="0.77490585"
                                 z3="1.78479086">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.91850373"
                                 y3="2.90825657"
                                 z3="-0.85759069">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.6111059"
                                 y3="1.87506863"
                                 z3="0.81042803">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-0.99543458"
                                 y3="4.0414185"
                                 z3="-1.83450384">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.39327448"
                                 y3="-0.04608082"
                                 z3="-1.36386704">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.56145272"
                                 y3="-3.7419433"
                                 z3="-1.49420379">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.4468554"
                                 y3="-4.98848642"
                                 z3="-1.26066503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.94280261"
                                 y3="3.37499154"
                                 z3="0.21143793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.33133407"
                                 y3="4.41600272"
                                 z3="-1.14427914">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.76514049"
                                 y3="1.4153178"
                                 z3="-1.42874318">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.25351421"
                                 y3="2.51405559"
                                 z3="-2.72053559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.36131435"
                                 y3="2.1576605"
                                 z3="-1.39602078">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="4.44817993"
                                 y3="-0.62956068"
                                 z3="-0.96063836">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="0.94393001"
                                 y3="-1.58017166"
                                 z3="1.33271189">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.75425785"
                                 y3="-0.45139026"
                                 z3="1.12245026">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.25658427"
                                 y3="-1.415118"
                                 z3="3.39222937">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.66626902"
                                 y3="-0.84830919"
                                 z3="3.31537019">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.261,.9009,1.3683;1.8947,-3.8775,-1.0404;1.4275,3.7892,-1.1556;1.96,-1.1647,-1.1467;-3.3589,-.9527,.994;-3.8907,-1.3464,-.3847;-1.7835,1.7453,.5611;-3.0787,1.1011,3.2332;-4.8404,1.7321,.7716;-2.9392,-1.051,-1.5469;-.4798,1.4902,.9888;-1.9321,2.6737,-.474;-1.6393,-1.8011,-1.4424;.6272,2.1217,.4334;-.8477,3.3196,-1.0402;.4445,3.0607,-.581;-.4247,-1.1291,-1.3401;-1.6307,-3.1946,-1.4124;.7634,-1.8292,-1.2079;-.4485,-3.9065,-1.2808;.7385,-3.214,-1.1772;2.793,3.5112,-.8626;3.3145,2.3295,-1.6477;2.6231,-1.1207,.0542;3.9738,-.7992,-.0025;1.998,-1.3405,1.2742;4.7021,-.6993,1.172;2.7447,-1.242,2.4422;4.0939,-.9234,2.4009;-2.3834,-1.4175,1.1766;-4.0219,-1.3744,1.7577;-4.8378,-.8359,-.5788;-4.1287,-2.4144,-.3924;-3.9144,.6449,3.7679;-2.1641,.6306,3.6006;-3.0405,2.154,3.5192;-5.7164,1.2576,1.219;-4.8695,2.7891,1.043;-4.9582,1.6688,-.312;-3.4385,-1.323,-2.4808;-2.7382,.0212,-1.6084;-.2995,.7749,1.7848;-2.9185,2.9083,-.8576;1.6111,1.8751,.8104;-.9954,4.0414,-1.8345;-.3933,-.0461,-1.3639;-2.5615,-3.7419,-1.4942;-.4469,-4.9885,-1.2607;2.9428,3.375,.2114;3.3313,4.416,-1.1443;2.7651,1.4153,-1.4287;3.2535,2.5141,-2.7205;4.3613,2.1577,-1.396;4.4482,-.6296,-.9606;.9439,-1.5802,1.3327;5.7543,-.4514,1.1225;2.2566,-1.4151,3.3922;4.6663,-.8483,3.3154;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.261006"
                        y3="0.900872"
                        z3="1.368342"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.894667"
                        y3="-3.877502"
                        z3="-1.04039"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.427544"
                        y3="3.789208"
                        z3="-1.155569"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.959995"
                        y3="-1.164727"
                        z3="-1.146737"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.358885"
                        y3="-0.952705"
                        z3="0.994015"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.890734"
                        y3="-1.346428"
                        z3="-0.384709"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.783485"
                        y3="1.745276"
                        z3="0.561084"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.0787"
                        y3="1.101052"
                        z3="3.233193"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.840446"
                        y3="1.7321"
                        z3="0.771608"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.939206"
                        y3="-1.050962"
                        z3="-1.546861"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.479844"
                        y3="1.490213"
                        z3="0.98884"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.932095"
                        y3="2.673679"
                        z3="-0.473992"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.639251"
                        y3="-1.801116"
                        z3="-1.44236"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.627185"
                        y3="2.121714"
                        z3="0.433372"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.847698"
                        y3="3.319618"
                        z3="-1.040227"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.44445"
                        y3="3.060734"
                        z3="-0.581039"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.424683"
                        y3="-1.129092"
                        z3="-1.340056"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.630748"
                        y3="-3.194609"
                        z3="-1.412389"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.763397"
                        y3="-1.829203"
                        z3="-1.207871"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.44851"
                        y3="-3.906454"
                        z3="-1.280806"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.738538"
                        y3="-3.213967"
                        z3="-1.177177"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.793041"
                        y3="3.511238"
                        z3="-0.862551"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.314503"
                        y3="2.329475"
                        z3="-1.647679"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.623062"
                        y3="-1.120716"
                        z3="0.054175"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.973834"
                        y3="-0.799206"
                        z3="-0.00254"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.998049"
                        y3="-1.340466"
                        z3="1.274237"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.70206"
                        y3="-0.699309"
                        z3="1.172041"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.744678"
                        y3="-1.241987"
                        z3="2.442151"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.093854"
                        y3="-0.923437"
                        z3="2.400855"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.383398"
                        y3="-1.417458"
                        z3="1.176561"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.021876"
                        y3="-1.374425"
                        z3="1.757741"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.837814"
                        y3="-0.835892"
                        z3="-0.578807"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.12871"
                        y3="-2.414374"
                        z3="-0.392376"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.914384"
                        y3="0.644924"
                        z3="3.767856"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.164129"
                        y3="0.630621"
                        z3="3.600599"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.040456"
                        y3="2.153961"
                        z3="3.519239"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.71642"
                        y3="1.257607"
                        z3="1.218985"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.869519"
                        y3="2.789088"
                        z3="1.043014"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.958246"
                        y3="1.668837"
                        z3="-0.311956"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.438475"
                        y3="-1.323018"
                        z3="-2.480826"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.738214"
                        y3="0.021161"
                        z3="-1.608433"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.299522"
                        y3="0.774906"
                        z3="1.784791"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.918504"
                        y3="2.908257"
                        z3="-0.857591"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.611106"
                        y3="1.875069"
                        z3="0.810428"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.995435"
                        y3="4.041419"
                        z3="-1.834504"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.393274"
                        y3="-0.046081"
                        z3="-1.363867"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.561453"
                        y3="-3.741943"
                        z3="-1.494204"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.446855"
                        y3="-4.988486"
                        z3="-1.260665"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.942803"
                        y3="3.374992"
                        z3="0.211438"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.331334"
                        y3="4.416003"
                        z3="-1.144279"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.76514"
                        y3="1.415318"
                        z3="-1.428743"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.253514"
                        y3="2.514056"
                        z3="-2.720536"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.361314"
                        y3="2.157661"
                        z3="-1.396021"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.44818"
                        y3="-0.629561"
                        z3="-0.960638"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.94393"
                        y3="-1.580172"
                        z3="1.332712"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.754258"
                        y3="-0.45139"
                        z3="1.12245"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.256584"
                        y3="-1.415118"
                        z3="3.392229"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.666269"
                        y3="-0.848309"
                        z3="3.31537"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.261,.9009,1.3683;1.8947,-3.8775,-1.0404;1.4275,3.7892,-1.1556;1.96,-1.1647,-1.1467;-3.3589,-.9527,.994;-3.8907,-1.3464,-.3847;-1.7835,1.7453,.5611;-3.0787,1.1011,3.2332;-4.8404,1.7321,.7716;-2.9392,-1.051,-1.5469;-.4798,1.4902,.9888;-1.9321,2.6737,-.474;-1.6393,-1.8011,-1.4424;.6272,2.1217,.4334;-.8477,3.3196,-1.0402;.4445,3.0607,-.581;-.4247,-1.1291,-1.3401;-1.6307,-3.1946,-1.4124;.7634,-1.8292,-1.2079;-.4485,-3.9065,-1.2808;.7385,-3.214,-1.1772;2.793,3.5112,-.8626;3.3145,2.3295,-1.6477;2.6231,-1.1207,.0542;3.9738,-.7992,-.0025;1.998,-1.3405,1.2742;4.7021,-.6993,1.172;2.7447,-1.242,2.4422;4.0939,-.9234,2.4009;-2.3834,-1.4175,1.1766;-4.0219,-1.3744,1.7577;-4.8378,-.8359,-.5788;-4.1287,-2.4144,-.3924;-3.9144,.6449,3.7679;-2.1641,.6306,3.6006;-3.0405,2.154,3.5192;-5.7164,1.2576,1.219;-4.8695,2.7891,1.043;-4.9582,1.6688,-.312;-3.4385,-1.323,-2.4808;-2.7382,.0212,-1.6084;-.2995,.7749,1.7848;-2.9185,2.9083,-.8576;1.6111,1.8751,.8104;-.9954,4.0414,-1.8345;-.3933,-.0461,-1.3639;-2.5615,-3.7419,-1.4942;-.4469,-4.9885,-1.2607;2.9428,3.375,.2114;3.3313,4.416,-1.1443;2.7651,1.4153,-1.4287;3.2535,2.5141,-2.7205;4.3613,2.1577,-1.396;4.4482,-.6296,-.9606;.9439,-1.5802,1.3327;5.7543,-.4514,1.1224;2.2566,-1.4151,3.3922;4.6663,-.8483,3.3154;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3384</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2910.7437</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1606.8802</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05161636</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3012.68687767</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4522.73849404</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8055.66203137</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3532.92353734</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02540406</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.97032767</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91871131</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407795</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999704616709</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999704616709</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999409233418</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.236361730655</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 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757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 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127.5208 127.5535 127.7149 127.9780 128.0362 128.1303 128.3597 128.5460 128.7913 129.0447 129.2943 129.4736 129.6835 129.9143 130.1916 130.3506 130.5132 130.7720 130.9829 131.0121 131.3186 131.3433 131.5432 131.6053 131.8704 131.9353 132.0948 132.1810 132.4830 132.7229 132.7710 132.9700 133.1834 133.2216 133.3310 133.6485 133.7282 134.1666 134.4764 134.6143 134.9692 135.0561 135.4136 135.6833 135.8081 135.9113 136.0264 136.2780 136.4185 137.0001 137.1459 137.3792 137.6675 137.7520 137.8327 138.0830 138.3171 138.6285 138.7133 138.9051 139.0016 139.1845 139.3628 139.5693 139.9497 140.2228 140.5066 140.6387 140.6878 140.8759 141.4969 141.6943 141.8831 142.1183 142.3283 142.7848 142.9277 143.2401 143.6223 143.7187 143.9067 143.9276 144.0719 144.1614 144.2891 144.4901 144.7165 144.9038 145.0373 145.1460 145.5415 145.9920 146.4455 146.5916 147.1089 147.2896 147.5191 147.6899 148.0262 148.1586 148.3518 148.5720 148.7276 148.8369 148.9930 149.1348 149.3732 149.6744 149.7959 149.9553 150.0503 150.1536 150.3200 150.4091 150.6952 151.0761 151.1038 151.2208 151.2694 151.5066 151.7577 151.9146 152.3994 152.8044 152.9373 153.0615 153.2828 153.5514 153.6397 154.2420 154.6046 154.8050 154.9229 155.5588 155.7366 155.9819 156.1182 156.4602 156.5799 156.7433 156.9082 157.0657 157.4350 157.5127 157.6837 157.9371 158.0248 158.3348 158.5278 159.3983 159.6524 159.8504 160.1059 160.1696 160.5470 161.2079 161.5394 162.1212 163.0672 163.4595 163.9296 164.1685 165.6888 167.5271 167.8011 169.4931 170.8929 171.4873 171.7585 174.4151 175.6623 177.4309 180.6202 180.8440 182.5934 186.1758 186.6227 187.3209 188.5837 188.8178 189.0654 189.4575 190.2288 190.4264 191.6096 192.8044 192.9611 194.0690 195.8566 196.3049 199.8350 201.4896 202.1389 206.1555 207.1149 207.5934 212.3971 230.2455 235.9295 241.2090 248.0899 249.1037 338.3270 618.1580 621.0436 623.4206 629.7758 630.3813 631.5048 632.7092 632.9597 634.3695 634.7457 635.1456 635.6335 637.2429 637.5412 638.0061 638.6440 639.3145 641.4121 643.6836 643.7555 646.0829 647.4751 654.1626 656.0652 658.2984 1212.7188 1216.1163 1564.4391</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.487943 -0.219970 -0.351396 -0.335691 -0.261091 -0.165049 -0.166100 -0.451892 -0.451362 -0.083662 -0.164541 -0.086798 -0.041523 -0.250459 -0.291773 0.363559 -0.181995 -0.155115 0.148512 -0.202027 0.290426 0.058913 -0.250008 0.300734 -0.274157 -0.209050 -0.112131 -0.163217 -0.189408 0.078213 0.099700 0.090112 0.095240 0.104042 0.101134 0.102402 0.113264 0.114393 0.102709 0.103927 0.080407 0.138664 0.145553 0.133786 0.133864 0.137810 0.143173 0.149642 0.086160 0.108907 0.056289 0.098425 0.092938 0.156840 0.158209 0.160607 0.161406 0.160516</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5121 9.2200 8.3514 8.3357 6.2611 6.1650 6.1661 6.4519 6.4514 6.0837 6.1645 6.0868 6.0415 6.2505 6.2918 5.6364 6.1820 6.1551 5.8515 6.2020 5.7096 5.9411 6.2500 5.6993 6.2742 6.2091 6.1121 6.1632 6.1894 0.9218 0.9003 0.9099 0.9048 0.8960 0.8989 0.8976 0.8867 0.8856 0.8973 0.8961 0.9196 0.8613 0.8544 0.8662 0.8661 0.8622 0.8568 0.8504 0.9138 0.8911 0.9437 0.9016 0.9071 0.8432 0.8418 0.8394 0.8386 0.8395</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4879 -0.2200 -0.3514 -0.3357 -0.2611 -0.1650 -0.1661 -0.4519 -0.4514 -0.0837 -0.1645 -0.0868 -0.0415 -0.2505 -0.2918 0.3636 -0.1820 -0.1551 0.1485 -0.2020 0.2904 0.0589 -0.2500 0.3007 -0.2742 -0.2091 -0.1121 -0.1632 -0.1894 0.0782 0.0997 0.0901 0.0952 0.1040 0.1011 0.1024 0.1133 0.1144 0.1027 0.1039 0.0804 0.1387 0.1456 0.1338 0.1339 0.1378 0.1432 0.1496 0.0862 0.1089 0.0563 0.0984 0.0929 0.1568 0.1582 0.1606 0.1614 0.1605</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1180 1.0665 2.0612 2.0377 3.8364 3.9069 3.6935 3.9002 3.9199 3.7977 3.8248 3.7967 3.6714 3.8413 4.0519 3.7160 3.9014 3.8658 3.7393 3.9395 3.9750 3.8545 3.9218 3.5333 3.9669 3.8459 3.8844 3.9174 3.9059 1.0189 1.0064 1.0011 1.0006 1.0095 1.0102 1.0087 1.0064 1.0085 1.0036 1.0059 1.0161 0.9906 0.9862 1.0065 1.0141 0.9979 1.0011 0.9990 0.9976 0.9918 1.0040 1.0095 1.0096 0.9995 1.0020 0.9883 0.9899 0.9890</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1180 1.0665 2.0612 2.0377 3.8364 3.9069 3.6935 3.9002 3.9199 3.7977 3.8248 3.7967 3.6714 3.8413 4.0519 3.7160 3.9014 3.8658 3.7393 3.9395 3.9750 3.8545 3.9218 3.5333 3.9669 3.8459 3.8844 3.9174 3.9059 1.0189 1.0064 1.0011 1.0006 1.0095 1.0102 1.0087 1.0064 1.0085 1.0036 1.0059 1.0161 0.9906 0.9862 1.0065 1.0141 0.9979 1.0011 0.9990 0.9976 0.9918 1.0040 1.0095 1.0096 0.9995 1.0020 0.9883 0.9899 0.9890</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9574 1.0035 0.9566 0.9776 1.0312 1.0662 0.8885 0.9106 0.9352 0.9131 0.9813 0.9746 0.9143 1.0089 1.0102 1.3330 1.2636 0.9761 0.9776 0.9747 0.9723 0.9752 0.9725 0.8862 0.9931 1.0224 1.3753 0.9856 1.4889 0.9961 1.3472 1.3573 1.2995 0.9895 1.3424 0.9981 1.3741 0.9699 1.4190 0.9874 1.3883 1.4289 0.9870 0.9545 0.9945 0.9804 0.9831 0.9943 0.9859 1.3329 1.2960 1.4479 0.9923 1.4115 0.9811 1.3974 0.9809 1.4327 0.9788 0.9851</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035773373</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087389736308</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-17.88269 17.30414 -0.57855 15.23197 -15.44329 -0.21132 9.25640 -8.62161 0.63479</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.88450</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.24822</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
