<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.643628"
                        y3="1.803583"
                        z3="0.275768"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.274588"
                        y3="-4.349677"
                        z3="-0.111382"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.107157"
                        y3="2.073951"
                        z3="-1.615334"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.365291"
                        y3="-1.703806"
                        z3="0.089987"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.881109"
                        y3="0.208504"
                        z3="1.294754"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.733912"
                        y3="-0.799624"
                        z3="1.251708"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.86791"
                        y3="1.949894"
                        z3="-0.33935"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.028453"
                        y3="3.280055"
                        z3="1.379287"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.796864"
                        y3="1.780601"
                        z3="-1.210705"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.545786"
                        y3="-1.463695"
                        z3="-0.11442"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.549306"
                        y3="1.749044"
                        z3="-1.681961"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.797892"
                        y3="2.206253"
                        z3="0.526161"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.270782"
                        y3="-2.257773"
                        z3="-0.175815"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.243041"
                        y3="1.778584"
                        z3="-2.153804"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.512665"
                        y3="2.240573"
                        z3="0.081235"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.802801"
                        y3="2.018557"
                        z3="-1.266587"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.050466"
                        y3="-1.593101"
                        z3="-0.061842"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.267501"
                        y3="-3.642709"
                        z3="-0.29857"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.140886"
                        y3="-2.296561"
                        z3="-0.017913"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.075348"
                        y3="-4.35746"
                        z3="-0.292679"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.113124"
                        y3="-3.679488"
                        z3="-0.139092"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.511013"
                        y3="1.617172"
                        z3="-2.903695"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.435641"
                        y3="0.112561"
                        z3="-3.05478"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.579758"
                        y3="-0.697383"
                        z3="0.996624"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.851427"
                        y3="-0.556437"
                        z3="2.171623"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.624161"
                        y3="0.169921"
                        z3="0.704689"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.16988"
                        y3="0.475702"
                        z3="3.04408"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.937139"
                        y3="1.188266"
                        z3="1.591739"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.207816"
                        y3="1.352974"
                        z3="2.7618"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.053515"
                        y3="0.503849"
                        z3="2.334539"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.810994"
                        y3="-0.273198"
                        z3="0.972056"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.895648"
                        y3="-1.584364"
                        z3="1.997119"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.803968"
                        y3="-0.302392"
                        z3="1.541925"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.339427"
                        y3="3.334238"
                        z3="2.224975"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.954844"
                        y3="4.223273"
                        z3="0.834808"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.038567"
                        y3="3.214405"
                        z3="1.789472"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.618057"
                        y3="0.913923"
                        z3="-1.850526"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.837639"
                        y3="1.72717"
                        z3="-0.883594"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.695498"
                        y3="2.675139"
                        z3="-1.828136"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.399609"
                        y3="-2.110492"
                        z3="-0.328733"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.532079"
                        y3="-0.702356"
                        z3="-0.899451"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.334944"
                        y3="1.550534"
                        z3="-2.402006"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.979344"
                        y3="2.37508"
                        z3="1.5823"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.067111"
                        y3="1.609858"
                        z3="-3.207676"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.321907"
                        y3="2.432796"
                        z3="0.776365"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.032664"
                        y3="-0.511641"
                        z3="0.01593"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.203848"
                        y3="-4.177401"
                        z3="-0.395785"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.072686"
                        y3="-5.43551"
                        z3="-0.388927"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.544161"
                        y3="1.948559"
                        z3="-3.002584"/>
                  <atom elementType="H"
                        id="a50"
                        x3="1.940655"
                        y3="2.12228"
                        z3="-3.688189"/>
                  <atom elementType="H"
                        id="a51"
                        x3="1.422996"
                        y3="-0.274402"
                        z3="-2.938673"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.778158"
                        y3="-0.160325"
                        z3="-4.053409"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.080996"
                        y3="-0.390778"
                        z3="-2.33559"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.045168"
                        y3="-1.234884"
                        z3="2.417819"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.192011"
                        y3="0.042095"
                        z3="-0.208222"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.597923"
                        y3="0.586197"
                        z3="3.956118"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.752391"
                        y3="1.860688"
                        z3="1.358969"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.448394"
                        y3="2.153442"
                        z3="3.448441"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6436,1.8036,.2758;2.2746,-4.3497,-.1114;2.1072,2.074,-1.6153;2.3653,-1.7038,.09;-3.8811,.2085,1.2948;-2.7339,-.7996,1.2517;-1.8679,1.9499,-.3393;-4.0285,3.2801,1.3793;-4.7969,1.7806,-1.2107;-2.5458,-1.4637,-.1144;-1.5493,1.749,-1.682;-.7979,2.2063,.5262;-1.2708,-2.2578,-.1758;-.243,1.7786,-2.1538;.5127,2.2406,.0812;.8028,2.0186,-1.2666;-.0505,-1.5931,-.0618;-1.2675,-3.6427,-.2986;1.1409,-2.2966,-.0179;-.0753,-4.3575,-.2927;1.1131,-3.6795,-.1391;2.511,1.6172,-2.9037;2.4356,.1126,-3.0548;2.5798,-.6974,.9966;1.8514,-.5564,2.1716;3.6242,.1699,.7047;2.1699,.4757,3.0441;3.9371,1.1883,1.5917;3.2078,1.353,2.7618;-4.0535,.5038,2.3345;-4.811,-.2732,.9721;-2.8956,-1.5844,1.9971;-1.804,-.3024,1.5419;-3.3394,3.3342,2.225;-3.9548,4.2233,.8348;-5.0386,3.2144,1.7895;-4.6181,.9139,-1.8505;-5.8376,1.7272,-.8836;-4.6955,2.6751,-1.8281;-3.3996,-2.1105,-.3287;-2.5321,-.7024,-.8995;-2.3349,1.5505,-2.402;-.9793,2.3751,1.5823;-.0671,1.6099,-3.2077;1.3219,2.4328,.7764;-.0327,-.5116,.0159;-2.2038,-4.1774,-.3958;-.0727,-5.4355,-.3889;3.5442,1.9486,-3.0026;1.9407,2.1223,-3.6882;1.423,-.2744,-2.9387;2.7782,-.1603,-4.0534;3.081,-.3908,-2.3356;1.0452,-1.2349,2.4178;4.192,.0421,-.2082;1.5979,.5862,3.9561;4.7524,1.8607,1.359;3.4484,2.1534,3.4484;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3042.4652714598 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.994e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.393 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.445 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.848 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.64362772"
                                 y3="1.80358286"
                                 z3="0.27576819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.2745882"
                                 y3="-4.34967714"
                                 z3="-0.11138162">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.10715714"
                                 y3="2.07395125"
                                 z3="-1.61533424">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.36529074"
                                 y3="-1.70380555"
                                 z3="0.08998687">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.88110851"
                                 y3="0.20850391"
                                 z3="1.29475356">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.73391152"
                                 y3="-0.79962369"
                                 z3="1.25170776">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.86791024"
                                 y3="1.94989426"
                                 z3="-0.33934986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.02845255"
                                 y3="3.28005501"
                                 z3="1.37928677">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.79686434"
                                 y3="1.78060052"
                                 z3="-1.21070535">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.54578552"
                                 y3="-1.46369512"
                                 z3="-0.11442049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.54930556"
                                 y3="1.74904438"
                                 z3="-1.68196056">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.79789152"
                                 y3="2.20625322"
                                 z3="0.52616138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.27078179"
                                 y3="-2.25777291"
                                 z3="-0.17581534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.24304084"
                                 y3="1.77858399"
                                 z3="-2.15380411">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.51266481"
                                 y3="2.24057331"
                                 z3="0.0812354">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.80280083"
                                 y3="2.01855737"
                                 z3="-1.26658719">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.05046583"
                                 y3="-1.59310071"
                                 z3="-0.06184247">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.26750113"
                                 y3="-3.64270939"
                                 z3="-0.29857029">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.14088648"
                                 y3="-2.29656146"
                                 z3="-0.01791271">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.07534849"
                                 y3="-4.35746025"
                                 z3="-0.29267904">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.11312373"
                                 y3="-3.6794876"
                                 z3="-0.13909232">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.5110128"
                                 y3="1.61717237"
                                 z3="-2.90369463">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.43564099"
                                 y3="0.11256137"
                                 z3="-3.05477981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.57975814"
                                 y3="-0.69738266"
                                 z3="0.99662445">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.85142715"
                                 y3="-0.55643728"
                                 z3="2.171623">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.62416121"
                                 y3="0.16992113"
                                 z3="0.70468947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.16988017"
                                 y3="0.47570216"
                                 z3="3.04408047">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.9371388"
                                 y3="1.18826639"
                                 z3="1.59173925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.207816"
                                 y3="1.35297419"
                                 z3="2.76179979">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.05351523"
                                 y3="0.50384898"
                                 z3="2.33453882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.81099446"
                                 y3="-0.27319838"
                                 z3="0.9720561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.89564771"
                                 y3="-1.58436396"
                                 z3="1.99711885">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-1.80396778"
                                 y3="-0.3023923"
                                 z3="1.54192531">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.33942706"
                                 y3="3.33423846"
                                 z3="2.22497538">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.95484418"
                                 y3="4.2232728"
                                 z3="0.83480762">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.0385668"
                                 y3="3.21440452"
                                 z3="1.78947192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.61805677"
                                 y3="0.91392273"
                                 z3="-1.85052575">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.83763895"
                                 y3="1.72716983"
                                 z3="-0.88359404">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.69549787"
                                 y3="2.67513901"
                                 z3="-1.82813581">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.39960921"
                                 y3="-2.1104918"
                                 z3="-0.32873283">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.53207882"
                                 y3="-0.70235552"
                                 z3="-0.89945056">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.33494429"
                                 y3="1.55053391"
                                 z3="-2.40200587">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.97934433"
                                 y3="2.37508014"
                                 z3="1.58229967">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-0.06711119"
                                 y3="1.60985833"
                                 z3="-3.20767565">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.32190697"
                                 y3="2.43279581"
                                 z3="0.77636513">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.03266407"
                                 y3="-0.51164071"
                                 z3="0.01593025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.20384781"
                                 y3="-4.17740067"
                                 z3="-0.39578476">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.0726856"
                                 y3="-5.43551017"
                                 z3="-0.38892679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.54416146"
                                 y3="1.94855901"
                                 z3="-3.00258428">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="1.94065463"
                                 y3="2.12228036"
                                 z3="-3.68818932">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="1.42299593"
                                 y3="-0.27440199"
                                 z3="-2.93867285">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="2.77815758"
                                 y3="-0.16032476"
                                 z3="-4.05340905">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.08099566"
                                 y3="-0.39077793"
                                 z3="-2.33559041">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.04516767"
                                 y3="-1.23488419"
                                 z3="2.417819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.19201109"
                                 y3="0.04209464"
                                 z3="-0.20822245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.59792277"
                                 y3="0.58619746"
                                 z3="3.95611818">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.75239061"
                                 y3="1.86068754"
                                 z3="1.3589688">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.44839412"
                                 y3="2.15344244"
                                 z3="3.44844056">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6436,1.8036,.2758;2.2746,-4.3497,-.1114;2.1072,2.074,-1.6153;2.3653,-1.7038,.09;-3.8811,.2085,1.2948;-2.7339,-.7996,1.2517;-1.8679,1.9499,-.3393;-4.0285,3.2801,1.3793;-4.7969,1.7806,-1.2107;-2.5458,-1.4637,-.1144;-1.5493,1.749,-1.682;-.7979,2.2063,.5262;-1.2708,-2.2578,-.1758;-.243,1.7786,-2.1538;.5127,2.2406,.0812;.8028,2.0186,-1.2666;-.0505,-1.5931,-.0618;-1.2675,-3.6427,-.2986;1.1409,-2.2966,-.0179;-.0753,-4.3575,-.2927;1.1131,-3.6795,-.1391;2.511,1.6172,-2.9037;2.4356,.1126,-3.0548;2.5798,-.6974,.9966;1.8514,-.5564,2.1716;3.6242,.1699,.7047;2.1699,.4757,3.0441;3.9371,1.1883,1.5917;3.2078,1.353,2.7618;-4.0535,.5038,2.3345;-4.811,-.2732,.9721;-2.8956,-1.5844,1.9971;-1.804,-.3024,1.5419;-3.3394,3.3342,2.225;-3.9548,4.2233,.8348;-5.0386,3.2144,1.7895;-4.6181,.9139,-1.8505;-5.8376,1.7272,-.8836;-4.6955,2.6751,-1.8281;-3.3996,-2.1105,-.3287;-2.5321,-.7024,-.8995;-2.3349,1.5505,-2.402;-.9793,2.3751,1.5823;-.0671,1.6099,-3.2077;1.3219,2.4328,.7764;-.0327,-.5116,.0159;-2.2038,-4.1774,-.3958;-.0727,-5.4355,-.3889;3.5442,1.9486,-3.0026;1.9407,2.1223,-3.6882;1.423,-.2744,-2.9387;2.7782,-.1603,-4.0534;3.081,-.3908,-2.3356;1.0452,-1.2349,2.4178;4.192,.0421,-.2082;1.5979,.5862,3.9561;4.7524,1.8607,1.359;3.4484,2.1534,3.4484;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.643628"
                        y3="1.803583"
                        z3="0.275768"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.274588"
                        y3="-4.349677"
                        z3="-0.111382"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.107157"
                        y3="2.073951"
                        z3="-1.615334"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.365291"
                        y3="-1.703806"
                        z3="0.089987"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.881109"
                        y3="0.208504"
                        z3="1.294754"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.733912"
                        y3="-0.799624"
                        z3="1.251708"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.86791"
                        y3="1.949894"
                        z3="-0.33935"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.028453"
                        y3="3.280055"
                        z3="1.379287"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.796864"
                        y3="1.780601"
                        z3="-1.210705"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.545786"
                        y3="-1.463695"
                        z3="-0.11442"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.549306"
                        y3="1.749044"
                        z3="-1.681961"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.797892"
                        y3="2.206253"
                        z3="0.526161"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.270782"
                        y3="-2.257773"
                        z3="-0.175815"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.243041"
                        y3="1.778584"
                        z3="-2.153804"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.512665"
                        y3="2.240573"
                        z3="0.081235"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.802801"
                        y3="2.018557"
                        z3="-1.266587"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.050466"
                        y3="-1.593101"
                        z3="-0.061842"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.267501"
                        y3="-3.642709"
                        z3="-0.29857"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.140886"
                        y3="-2.296561"
                        z3="-0.017913"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.075348"
                        y3="-4.35746"
                        z3="-0.292679"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.113124"
                        y3="-3.679488"
                        z3="-0.139092"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.511013"
                        y3="1.617172"
                        z3="-2.903695"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.435641"
                        y3="0.112561"
                        z3="-3.05478"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.579758"
                        y3="-0.697383"
                        z3="0.996624"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.851427"
                        y3="-0.556437"
                        z3="2.171623"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.624161"
                        y3="0.169921"
                        z3="0.704689"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.16988"
                        y3="0.475702"
                        z3="3.04408"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.937139"
                        y3="1.188266"
                        z3="1.591739"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.207816"
                        y3="1.352974"
                        z3="2.7618"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.053515"
                        y3="0.503849"
                        z3="2.334539"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.810994"
                        y3="-0.273198"
                        z3="0.972056"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.895648"
                        y3="-1.584364"
                        z3="1.997119"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.803968"
                        y3="-0.302392"
                        z3="1.541925"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.339427"
                        y3="3.334238"
                        z3="2.224975"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.954844"
                        y3="4.223273"
                        z3="0.834808"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.038567"
                        y3="3.214405"
                        z3="1.789472"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.618057"
                        y3="0.913923"
                        z3="-1.850526"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.837639"
                        y3="1.72717"
                        z3="-0.883594"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.695498"
                        y3="2.675139"
                        z3="-1.828136"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.399609"
                        y3="-2.110492"
                        z3="-0.328733"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.532079"
                        y3="-0.702356"
                        z3="-0.899451"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.334944"
                        y3="1.550534"
                        z3="-2.402006"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.979344"
                        y3="2.37508"
                        z3="1.5823"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.067111"
                        y3="1.609858"
                        z3="-3.207676"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.321907"
                        y3="2.432796"
                        z3="0.776365"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.032664"
                        y3="-0.511641"
                        z3="0.01593"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.203848"
                        y3="-4.177401"
                        z3="-0.395785"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.072686"
                        y3="-5.43551"
                        z3="-0.388927"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.544161"
                        y3="1.948559"
                        z3="-3.002584"/>
                  <atom elementType="H"
                        id="a50"
                        x3="1.940655"
                        y3="2.12228"
                        z3="-3.688189"/>
                  <atom elementType="H"
                        id="a51"
                        x3="1.422996"
                        y3="-0.274402"
                        z3="-2.938673"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.778158"
                        y3="-0.160325"
                        z3="-4.053409"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.080996"
                        y3="-0.390778"
                        z3="-2.33559"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.045168"
                        y3="-1.234884"
                        z3="2.417819"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.192011"
                        y3="0.042095"
                        z3="-0.208222"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.597923"
                        y3="0.586197"
                        z3="3.956118"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.752391"
                        y3="1.860688"
                        z3="1.358969"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.448394"
                        y3="2.153442"
                        z3="3.448441"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6436,1.8036,.2758;2.2746,-4.3497,-.1114;2.1072,2.074,-1.6153;2.3653,-1.7038,.09;-3.8811,.2085,1.2948;-2.7339,-.7996,1.2517;-1.8679,1.9499,-.3393;-4.0285,3.2801,1.3793;-4.7969,1.7806,-1.2107;-2.5458,-1.4637,-.1144;-1.5493,1.749,-1.682;-.7979,2.2063,.5262;-1.2708,-2.2578,-.1758;-.243,1.7786,-2.1538;.5127,2.2406,.0812;.8028,2.0186,-1.2666;-.0505,-1.5931,-.0618;-1.2675,-3.6427,-.2986;1.1409,-2.2966,-.0179;-.0753,-4.3575,-.2927;1.1131,-3.6795,-.1391;2.511,1.6172,-2.9037;2.4356,.1126,-3.0548;2.5798,-.6974,.9966;1.8514,-.5564,2.1716;3.6242,.1699,.7047;2.1699,.4757,3.0441;3.9371,1.1883,1.5917;3.2078,1.353,2.7618;-4.0535,.5038,2.3345;-4.811,-.2732,.9721;-2.8956,-1.5844,1.9971;-1.804,-.3024,1.5419;-3.3394,3.3342,2.225;-3.9548,4.2233,.8348;-5.0386,3.2144,1.7895;-4.6181,.9139,-1.8505;-5.8376,1.7272,-.8836;-4.6955,2.6751,-1.8281;-3.3996,-2.1105,-.3287;-2.5321,-.7024,-.8995;-2.3349,1.5505,-2.402;-.9793,2.3751,1.5823;-.0671,1.6099,-3.2077;1.3219,2.4328,.7764;-.0327,-.5116,.0159;-2.2038,-4.1774,-.3958;-.0727,-5.4355,-.3889;3.5442,1.9486,-3.0026;1.9407,2.1223,-3.6882;1.423,-.2744,-2.9387;2.7782,-.1603,-4.0534;3.081,-.3908,-2.3356;1.0452,-1.2349,2.4178;4.192,.0421,-.2082;1.5979,.5862,3.9561;4.7524,1.8607,1.359;3.4484,2.1534,3.4484;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3370</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2917.8964</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1605.8804</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04997568</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3042.46527146</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4552.51524714</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8115.56172161</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3563.04647447</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02662604</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95913820</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90916251</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408323</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000065813780</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000065813780</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000131627559</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.238369143035</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4522 127.4884 127.7484 128.0256 128.2560 128.3807 128.4382 128.6548 128.9089 129.1408 129.4720 129.6264 129.6709 129.9043 130.0680 130.2437 130.4319 130.6573 131.0003 131.2363 131.3442 131.4342 131.6366 131.7030 131.9028 132.0487 132.2845 132.4874 132.5746 132.6696 132.9351 132.9837 133.2453 133.3315 133.5266 133.6027 133.8951 134.5966 134.7806 135.0088 135.2106 135.4558 135.6911 135.7906 135.9644 136.0817 136.3330 136.8403 136.9128 136.9859 137.1421 137.2569 137.7312 137.8623 138.2290 138.4355 138.4820 138.5882 138.7238 138.9157 138.9893 139.0949 139.3630 139.7922 140.1420 140.2900 140.6132 140.7221 140.8719 141.3784 141.4773 141.7168 141.8174 142.1540 142.4096 142.8061 143.0825 143.2984 143.5535 143.7425 143.8968 144.0361 144.0951 144.2298 144.3730 144.5990 144.7598 144.9551 145.1711 145.3663 145.5114 146.0555 146.3856 146.5277 146.9341 147.4556 147.5627 147.8186 147.9555 148.2667 148.4083 148.4584 148.7428 148.9852 149.1137 149.3160 149.4383 149.5398 149.7105 149.8525 150.1191 150.2766 150.4114 150.6826 150.7328 150.8910 151.0973 151.2243 151.5585 151.6346 151.7495 152.0291 152.2854 152.5865 153.1664 153.3508 153.4184 153.5274 153.9868 154.3677 154.8005 155.1337 155.4420 155.8387 156.0075 156.2122 156.3790 156.5355 156.7840 156.9027 157.0478 157.1847 157.4926 157.6362 157.7567 157.9104 158.0825 158.1961 158.9805 159.1109 159.4859 159.6304 160.0068 160.2861 160.5887 161.1391 161.4692 162.1526 162.7390 163.4890 164.1574 164.2371 164.8262 167.8339 169.1143 169.5719 170.1347 171.9941 172.7356 174.3598 174.6096 176.7215 180.5850 181.1153 182.8023 187.0277 187.3910 187.4479 188.1001 188.7634 188.8884 189.4564 190.2600 190.7811 191.2408 192.4696 192.7336 193.9907 195.2785 196.0033 200.0354 202.2525 202.6029 206.1631 207.2030 208.3305 212.5512 229.8542 235.8779 241.0707 248.0288 248.9933 337.8454 618.0884 622.0443 626.4078 629.7251 630.5669 631.9135 632.8094 633.1585 634.5421 634.9149 635.3336 635.6473 636.5629 637.1028 637.3312 638.5619 639.5296 642.3268 643.2174 644.1619 645.6867 647.2074 654.2717 655.9266 658.2648 1213.7873 1217.3990 1563.1950</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.500224 -0.219874 -0.350114 -0.345457 -0.305396 -0.093102 -0.124065 -0.456818 -0.436462 -0.102751 -0.153409 -0.129000 0.021823 -0.254754 -0.284884 0.332723 -0.191756 -0.178059 0.230826 -0.173552 0.169907 0.042398 -0.276771 0.351453 -0.212713 -0.306848 -0.156447 -0.103453 -0.196999 0.100062 0.087268 0.092338 0.066560 0.102058 0.101733 0.104231 0.103017 0.110445 0.108413 0.094967 0.094409 0.148656 0.135143 0.142208 0.151553 0.084558 0.141699 0.149495 0.111638 0.094959 0.091990 0.106822 0.081753 0.156225 0.163642 0.160647 0.159001 0.157839</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4998 9.2199 8.3501 8.3455 6.3054 6.0931 6.1241 6.4568 6.4365 6.1028 6.1534 6.1290 5.9782 6.2548 6.2849 5.6673 6.1918 6.1781 5.7692 6.1736 5.8301 5.9576 6.2768 5.6485 6.2127 6.3068 6.1564 6.1035 6.1970 0.8999 0.9127 0.9077 0.9334 0.8979 0.8983 0.8958 0.8970 0.8896 0.8916 0.9050 0.9056 0.8513 0.8649 0.8578 0.8484 0.9154 0.8583 0.8505 0.8884 0.9050 0.9080 0.8932 0.9182 0.8438 0.8364 0.8394 0.8410 0.8422</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5002 -0.2199 -0.3501 -0.3455 -0.3054 -0.0931 -0.1241 -0.4568 -0.4365 -0.1028 -0.1534 -0.1290 0.0218 -0.2548 -0.2849 0.3327 -0.1918 -0.1781 0.2308 -0.1736 0.1699 0.0424 -0.2768 0.3515 -0.2127 -0.3068 -0.1564 -0.1035 -0.1970 0.1001 0.0873 0.0923 0.0666 0.1021 0.1017 0.1042 0.1030 0.1104 0.1084 0.0950 0.0944 0.1487 0.1351 0.1422 0.1516 0.0846 0.1417 0.1495 0.1116 0.0950 0.0920 0.1068 0.0818 0.1562 0.1636 0.1606 0.1590 0.1578</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0575 1.0660 2.0481 2.0461 3.8824 3.8481 3.6946 3.8986 3.9016 3.7565 3.8389 3.8459 3.6571 3.8953 3.9389 3.7096 3.8797 3.8853 3.5713 3.8811 4.0720 3.8418 3.9175 3.5956 3.8858 3.9245 3.8575 3.8664 3.8849 1.0060 1.0078 1.0068 1.0092 1.0100 1.0107 1.0085 1.0086 1.0093 1.0081 1.0159 1.0171 0.9888 0.9962 1.0020 1.0049 1.0197 1.0037 0.9982 0.9924 0.9965 0.9994 1.0132 1.0117 0.9952 0.9937 0.9902 0.9901 0.9908</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0575 1.0660 2.0481 2.0461 3.8824 3.8481 3.6946 3.8986 3.9016 3.7565 3.8389 3.8459 3.6571 3.8953 3.9389 3.7096 3.8797 3.8853 3.5713 3.8811 4.0720 3.8418 3.9175 3.5956 3.8858 3.9245 3.8575 3.8664 3.8849 1.0060 1.0078 1.0068 1.0092 1.0100 1.0107 1.0085 1.0086 1.0093 1.0081 1.0159 1.0171 0.9888 0.9962 1.0020 1.0049 1.0197 1.0037 0.9982 0.9924 0.9965 0.9994 1.0132 1.0117 0.9952 0.9937 0.9902 0.9901 0.9908</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9426 0.9842 0.9466 0.9600 1.0792 1.0819 0.8901 0.9021 0.9742 0.9359 0.9865 0.9827 0.8859 0.9867 1.0214 1.3090 1.3168 0.9768 0.9742 0.9766 0.9747 0.9723 0.9752 0.8898 0.9941 1.0208 1.4392 0.9854 1.4425 1.0033 1.3541 1.3805 1.3060 0.9924 1.3116 0.9932 1.3532 0.9914 1.3965 0.9804 1.3677 1.4422 0.9897 0.9428 0.9807 0.9944 0.9883 0.9880 0.9904 1.3347 1.3142 1.4047 0.9839 1.4246 0.9906 1.3993 0.9869 1.3924 0.9874 0.9939</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.037171751</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087147434569</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-23.79803 22.50824 -1.28979 19.07746 -18.74688 0.33058 -3.10414 2.72437 -0.37977</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.38458</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.51932</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
