<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.692192"
                        y3="1.67519"
                        z3="0.389447"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.835889"
                        y3="-4.848914"
                        z3="-0.62989"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.244011"
                        y3="2.741672"
                        z3="0.960072"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.219967"
                        y3="-2.22496"
                        z3="-0.312384"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.067483"
                        y3="-0.0311"
                        z3="1.138182"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.956609"
                        y3="-1.072779"
                        z3="1.018492"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.852621"
                        y3="2.037356"
                        z3="0.573916"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.681406"
                        y3="2.956921"
                        z3="1.35001"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.172146"
                        y3="1.771432"
                        z3="-1.42878"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.637025"
                        y3="-1.462075"
                        z3="-0.424834"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.302886"
                        y3="2.330886"
                        z3="1.82244"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.962695"
                        y3="1.978865"
                        z3="-0.504128"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.45592"
                        y3="-2.384012"
                        z3="-0.510251"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.055206"
                        y3="2.561007"
                        z3="2.005384"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.39466"
                        y3="2.202733"
                        z3="-0.348413"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.91616"
                        y3="2.503005"
                        z3="0.91108"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.170619"
                        y3="-1.858788"
                        z3="-0.401592"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.609283"
                        y3="-3.75941"
                        z3="-0.649263"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.940337"
                        y3="-2.684787"
                        z3="-0.44982"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.504185"
                        y3="-4.599115"
                        z3="-0.682792"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.757501"
                        y3="-4.053202"
                        z3="-0.590433"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.88557"
                        y3="2.973133"
                        z3="2.209962"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.12153"
                        y3="1.701546"
                        z3="2.995598"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.623141"
                        y3="-1.116126"
                        z3="-1.015628"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.148947"
                        y3="-0.818977"
                        z3="-2.287571"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.586103"
                        y3="-0.318541"
                        z3="-0.413307"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.649714"
                        y3="0.292232"
                        z3="-2.951429"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.085369"
                        y3="0.781821"
                        z3="-1.094834"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.618354"
                        y3="1.0954"
                        z3="-2.363995"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.293413"
                        y3="0.123746"
                        z3="2.198538"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.993865"
                        y3="-0.414891"
                        z3="0.695813"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.229588"
                        y3="-1.977711"
                        z3="1.570278"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.048103"
                        y3="-0.692766"
                        z3="1.494979"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.553128"
                        y3="3.959966"
                        z3="0.938942"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.748644"
                        y3="2.725492"
                        z3="1.321722"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.38709"
                        y3="2.991002"
                        z3="2.40105"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.997688"
                        y3="2.771478"
                        z3="-1.831288"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.62596"
                        y3="1.065402"
                        z3="-2.05623"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.235294"
                        y3="1.553413"
                        z3="-1.552182"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.513181"
                        y3="-1.932528"
                        z3="-0.877773"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.4262"
                        y3="-0.566068"
                        z3="-1.01416"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.941483"
                        y3="2.385729"
                        z3="2.697736"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.328878"
                        y3="1.753396"
                        z3="-1.499545"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.416137"
                        y3="2.785367"
                        z3="3.000109"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.059756"
                        y3="2.153225"
                        z3="-1.203011"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.037948"
                        y3="-0.788264"
                        z3="-0.283539"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.600893"
                        y3="-4.185727"
                        z3="-0.733848"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.620442"
                        y3="-5.669664"
                        z3="-0.792181"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.331306"
                        y3="3.708937"
                        z3="2.799443"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.840153"
                        y3="3.43046"
                        z3="1.950737"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.194785"
                        y3="1.20794"
                        z3="3.288539"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.721205"
                        y3="0.992827"
                        z3="2.423448"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.669258"
                        y3="1.941553"
                        z3="3.90748"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.403648"
                        y3="-1.441104"
                        z3="-2.766377"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.945863"
                        y3="-0.562225"
                        z3="0.578615"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.280107"
                        y3="0.524237"
                        z3="-3.94179"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.839313"
                        y3="1.398873"
                        z3="-0.623698"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.00498"
                        y3="1.957339"
                        z3="-2.890878"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6922,1.6752,.3894;1.8359,-4.8489,-.6299;2.244,2.7417,.9601;2.22,-2.225,-.3124;-4.0675,-.0311,1.1382;-2.9566,-1.0728,1.0185;-1.8526,2.0374,.5739;-4.6814,2.9569,1.35;-4.1721,1.7714,-1.4288;-2.637,-1.4621,-.4248;-1.3029,2.3309,1.8224;-.9627,1.9789,-.5041;-1.4559,-2.384,-.5103;.0552,2.561,2.0054;.3947,2.2027,-.3484;.9162,2.503,.9111;-.1706,-1.8588,-.4016;-1.6093,-3.7594,-.6493;.9403,-2.6848,-.4498;-.5042,-4.5991,-.6828;.7575,-4.0532,-.5904;2.8856,2.9731,2.21;3.1215,1.7015,2.9956;2.6231,-1.1161,-1.0156;2.1489,-.819,-2.2876;3.5861,-.3185,-.4133;2.6497,.2922,-2.9514;4.0854,.7818,-1.0948;3.6184,1.0954,-2.364;-4.2934,.1237,2.1985;-4.9939,-.4149,.6958;-3.2296,-1.9777,1.5703;-2.0481,-.6928,1.495;-4.5531,3.96,.9389;-5.7486,2.7255,1.3217;-4.3871,2.991,2.4011;-3.9977,2.7715,-1.8313;-3.626,1.0654,-2.0562;-5.2353,1.5534,-1.5522;-3.5132,-1.9325,-.8778;-2.4262,-.5661,-1.0142;-1.9415,2.3857,2.6977;-1.3289,1.7534,-1.4995;.4161,2.7854,3.0001;1.0598,2.1532,-1.203;-.0379,-.7883,-.2835;-2.6009,-4.1857,-.7338;-.6204,-5.6697,-.7922;2.3313,3.7089,2.7994;3.8402,3.4305,1.9507;2.1948,1.2079,3.2885;3.7212,.9928,2.4234;3.6693,1.9416,3.9075;1.4036,-1.4411,-2.7664;3.9459,-.5622,.5786;2.2801,.5242,-3.9418;4.8393,1.3989,-.6237;4.005,1.9573,-2.8909;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2966.6705047371 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.074e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.389 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.453 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.851 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.69219161"
                                 y3="1.67519049"
                                 z3="0.38944714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.83588893"
                                 y3="-4.84891423"
                                 z3="-0.62989045">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.24401139"
                                 y3="2.74167215"
                                 z3="0.96007153">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.2199674"
                                 y3="-2.22495966"
                                 z3="-0.31238351">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-4.06748311"
                                 y3="-0.03109982"
                                 z3="1.13818222">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.95660927"
                                 y3="-1.07277894"
                                 z3="1.01849224">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.85262103"
                                 y3="2.03735643"
                                 z3="0.57391617">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.68140563"
                                 y3="2.95692145"
                                 z3="1.35001048">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.17214566"
                                 y3="1.77143213"
                                 z3="-1.42878044">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.63702462"
                                 y3="-1.46207484"
                                 z3="-0.42483373">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.30288645"
                                 y3="2.33088604"
                                 z3="1.82243961">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.96269477"
                                 y3="1.97886473"
                                 z3="-0.50412798">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.45592041"
                                 y3="-2.38401169"
                                 z3="-0.51025111">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.05520629"
                                 y3="2.56100671"
                                 z3="2.00538396">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.39465997"
                                 y3="2.20273255"
                                 z3="-0.34841276">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.91616005"
                                 y3="2.50300488"
                                 z3="0.91107984">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.17061868"
                                 y3="-1.85878753"
                                 z3="-0.40159209">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.60928294"
                                 y3="-3.7594102"
                                 z3="-0.64926315">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.94033662"
                                 y3="-2.68478749"
                                 z3="-0.44982041">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.50418457"
                                 y3="-4.5991148"
                                 z3="-0.68279243">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.75750077"
                                 y3="-4.05320219"
                                 z3="-0.59043298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.88557028"
                                 y3="2.97313307"
                                 z3="2.20996239">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.12153008"
                                 y3="1.70154564"
                                 z3="2.99559796">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.62314123"
                                 y3="-1.11612585"
                                 z3="-1.0156278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.14894746"
                                 y3="-0.81897657"
                                 z3="-2.28757113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.58610314"
                                 y3="-0.31854126"
                                 z3="-0.41330715">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.64971383"
                                 y3="0.29223169"
                                 z3="-2.95142915">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.08536887"
                                 y3="0.78182098"
                                 z3="-1.0948344">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.61835446"
                                 y3="1.0953997"
                                 z3="-2.36399534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.29341268"
                                 y3="0.12374641"
                                 z3="2.19853792">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.99386527"
                                 y3="-0.41489119"
                                 z3="0.69581337">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.22958797"
                                 y3="-1.97771148"
                                 z3="1.57027788">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.0481031"
                                 y3="-0.69276571"
                                 z3="1.49497938">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.55312828"
                                 y3="3.95996637"
                                 z3="0.93894177">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-5.74864444"
                                 y3="2.7254921"
                                 z3="1.32172238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.38708974"
                                 y3="2.99100203"
                                 z3="2.40105015">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.99768815"
                                 y3="2.77147799"
                                 z3="-1.83128772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.62596047"
                                 y3="1.0654015"
                                 z3="-2.05623001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.23529381"
                                 y3="1.55341303"
                                 z3="-1.55218222">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.51318112"
                                 y3="-1.93252826"
                                 z3="-0.87777338">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.42619967"
                                 y3="-0.56606821"
                                 z3="-1.01415995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.9414826"
                                 y3="2.3857292"
                                 z3="2.6977358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.32887788"
                                 y3="1.75339612"
                                 z3="-1.49954507">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.41613669"
                                 y3="2.7853671"
                                 z3="3.00010872">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.05975605"
                                 y3="2.15322504"
                                 z3="-1.20301147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.03794781"
                                 y3="-0.78826427"
                                 z3="-0.28353885">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.60089253"
                                 y3="-4.18572729"
                                 z3="-0.73384772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.62044151"
                                 y3="-5.66966351"
                                 z3="-0.79218094">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.33130632"
                                 y3="3.70893733"
                                 z3="2.79944273">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.84015255"
                                 y3="3.43045995"
                                 z3="1.95073661">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.1947848"
                                 y3="1.20793964"
                                 z3="3.28853938">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.72120477"
                                 y3="0.99282711"
                                 z3="2.42344823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.66925839"
                                 y3="1.94155291"
                                 z3="3.90747983">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.40364789"
                                 y3="-1.44110369"
                                 z3="-2.76637744">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.94586305"
                                 y3="-0.56222479"
                                 z3="0.57861547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.28010687"
                                 y3="0.52423665"
                                 z3="-3.94178974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.83931288"
                                 y3="1.39887269"
                                 z3="-0.62369786">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.00497986"
                                 y3="1.9573386"
                                 z3="-2.89087805">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6922,1.6752,.3894;1.8359,-4.8489,-.6299;2.244,2.7417,.9601;2.22,-2.225,-.3124;-4.0675,-.0311,1.1382;-2.9566,-1.0728,1.0185;-1.8526,2.0374,.5739;-4.6814,2.9569,1.35;-4.1721,1.7714,-1.4288;-2.637,-1.4621,-.4248;-1.3029,2.3309,1.8224;-.9627,1.9789,-.5041;-1.4559,-2.384,-.5103;.0552,2.561,2.0054;.3947,2.2027,-.3484;.9162,2.503,.9111;-.1706,-1.8588,-.4016;-1.6093,-3.7594,-.6493;.9403,-2.6848,-.4498;-.5042,-4.5991,-.6828;.7575,-4.0532,-.5904;2.8856,2.9731,2.21;3.1215,1.7015,2.9956;2.6231,-1.1161,-1.0156;2.1489,-.819,-2.2876;3.5861,-.3185,-.4133;2.6497,.2922,-2.9514;4.0854,.7818,-1.0948;3.6184,1.0954,-2.364;-4.2934,.1237,2.1985;-4.9939,-.4149,.6958;-3.2296,-1.9777,1.5703;-2.0481,-.6928,1.495;-4.5531,3.96,.9389;-5.7486,2.7255,1.3217;-4.3871,2.991,2.4011;-3.9977,2.7715,-1.8313;-3.626,1.0654,-2.0562;-5.2353,1.5534,-1.5522;-3.5132,-1.9325,-.8778;-2.4262,-.5661,-1.0142;-1.9415,2.3857,2.6977;-1.3289,1.7534,-1.4995;.4161,2.7854,3.0001;1.0598,2.1532,-1.203;-.0379,-.7883,-.2835;-2.6009,-4.1857,-.7338;-.6204,-5.6697,-.7922;2.3313,3.7089,2.7994;3.8402,3.4305,1.9507;2.1948,1.2079,3.2885;3.7212,.9928,2.4234;3.6693,1.9416,3.9075;1.4036,-1.4411,-2.7664;3.9459,-.5622,.5786;2.2801,.5242,-3.9418;4.8393,1.3989,-.6237;4.005,1.9573,-2.8909;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.692192"
                        y3="1.67519"
                        z3="0.389447"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.835889"
                        y3="-4.848914"
                        z3="-0.62989"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.244011"
                        y3="2.741672"
                        z3="0.960072"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.219967"
                        y3="-2.22496"
                        z3="-0.312384"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.067483"
                        y3="-0.0311"
                        z3="1.138182"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.956609"
                        y3="-1.072779"
                        z3="1.018492"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.852621"
                        y3="2.037356"
                        z3="0.573916"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.681406"
                        y3="2.956921"
                        z3="1.35001"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.172146"
                        y3="1.771432"
                        z3="-1.42878"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.637025"
                        y3="-1.462075"
                        z3="-0.424834"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.302886"
                        y3="2.330886"
                        z3="1.82244"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.962695"
                        y3="1.978865"
                        z3="-0.504128"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.45592"
                        y3="-2.384012"
                        z3="-0.510251"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.055206"
                        y3="2.561007"
                        z3="2.005384"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.39466"
                        y3="2.202733"
                        z3="-0.348413"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.91616"
                        y3="2.503005"
                        z3="0.91108"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.170619"
                        y3="-1.858788"
                        z3="-0.401592"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.609283"
                        y3="-3.75941"
                        z3="-0.649263"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.940337"
                        y3="-2.684787"
                        z3="-0.44982"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.504185"
                        y3="-4.599115"
                        z3="-0.682792"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.757501"
                        y3="-4.053202"
                        z3="-0.590433"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.88557"
                        y3="2.973133"
                        z3="2.209962"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.12153"
                        y3="1.701546"
                        z3="2.995598"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.623141"
                        y3="-1.116126"
                        z3="-1.015628"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.148947"
                        y3="-0.818977"
                        z3="-2.287571"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.586103"
                        y3="-0.318541"
                        z3="-0.413307"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.649714"
                        y3="0.292232"
                        z3="-2.951429"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.085369"
                        y3="0.781821"
                        z3="-1.094834"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.618354"
                        y3="1.0954"
                        z3="-2.363995"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.293413"
                        y3="0.123746"
                        z3="2.198538"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.993865"
                        y3="-0.414891"
                        z3="0.695813"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.229588"
                        y3="-1.977711"
                        z3="1.570278"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.048103"
                        y3="-0.692766"
                        z3="1.494979"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.553128"
                        y3="3.959966"
                        z3="0.938942"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.748644"
                        y3="2.725492"
                        z3="1.321722"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.38709"
                        y3="2.991002"
                        z3="2.40105"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.997688"
                        y3="2.771478"
                        z3="-1.831288"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.62596"
                        y3="1.065402"
                        z3="-2.05623"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.235294"
                        y3="1.553413"
                        z3="-1.552182"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.513181"
                        y3="-1.932528"
                        z3="-0.877773"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.4262"
                        y3="-0.566068"
                        z3="-1.01416"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.941483"
                        y3="2.385729"
                        z3="2.697736"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.328878"
                        y3="1.753396"
                        z3="-1.499545"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.416137"
                        y3="2.785367"
                        z3="3.000109"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.059756"
                        y3="2.153225"
                        z3="-1.203011"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.037948"
                        y3="-0.788264"
                        z3="-0.283539"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.600893"
                        y3="-4.185727"
                        z3="-0.733848"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.620442"
                        y3="-5.669664"
                        z3="-0.792181"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.331306"
                        y3="3.708937"
                        z3="2.799443"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.840153"
                        y3="3.43046"
                        z3="1.950737"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.194785"
                        y3="1.20794"
                        z3="3.288539"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.721205"
                        y3="0.992827"
                        z3="2.423448"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.669258"
                        y3="1.941553"
                        z3="3.90748"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.403648"
                        y3="-1.441104"
                        z3="-2.766377"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.945863"
                        y3="-0.562225"
                        z3="0.578615"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.280107"
                        y3="0.524237"
                        z3="-3.94179"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.839313"
                        y3="1.398873"
                        z3="-0.623698"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.00498"
                        y3="1.957339"
                        z3="-2.890878"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6922,1.6752,.3894;1.8359,-4.8489,-.6299;2.244,2.7417,.9601;2.22,-2.225,-.3124;-4.0675,-.0311,1.1382;-2.9566,-1.0728,1.0185;-1.8526,2.0374,.5739;-4.6814,2.9569,1.35;-4.1721,1.7714,-1.4288;-2.637,-1.4621,-.4248;-1.3029,2.3309,1.8224;-.9627,1.9789,-.5041;-1.4559,-2.384,-.5103;.0552,2.561,2.0054;.3947,2.2027,-.3484;.9162,2.503,.9111;-.1706,-1.8588,-.4016;-1.6093,-3.7594,-.6493;.9403,-2.6848,-.4498;-.5042,-4.5991,-.6828;.7575,-4.0532,-.5904;2.8856,2.9731,2.21;3.1215,1.7015,2.9956;2.6231,-1.1161,-1.0156;2.1489,-.819,-2.2876;3.5861,-.3185,-.4133;2.6497,.2922,-2.9514;4.0854,.7818,-1.0948;3.6184,1.0954,-2.364;-4.2934,.1237,2.1985;-4.9939,-.4149,.6958;-3.2296,-1.9777,1.5703;-2.0481,-.6928,1.495;-4.5531,3.96,.9389;-5.7486,2.7255,1.3217;-4.3871,2.991,2.4011;-3.9977,2.7715,-1.8313;-3.626,1.0654,-2.0562;-5.2353,1.5534,-1.5522;-3.5132,-1.9325,-.8778;-2.4262,-.5661,-1.0142;-1.9415,2.3857,2.6977;-1.3289,1.7534,-1.4995;.4161,2.7854,3.0001;1.0598,2.1532,-1.203;-.0379,-.7883,-.2835;-2.6009,-4.1857,-.7338;-.6204,-5.6697,-.7922;2.3313,3.7089,2.7994;3.8402,3.4305,1.9507;2.1948,1.2079,3.2885;3.7212,.9928,2.4234;3.6693,1.9416,3.9075;1.4036,-1.4411,-2.7664;3.9459,-.5622,.5786;2.2801,.5242,-3.9418;4.8393,1.3989,-.6237;4.005,1.9573,-2.8909;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3388</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2923.5366</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1641.1434</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.8s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05148969</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2966.67050474</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4476.72199443</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7964.04607272</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3487.32407829</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02855386</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95920287</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90771318</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408521</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000123184651</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000123184651</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000246369303</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.233533057115</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.2758 127.4399 127.8201 127.8779 128.2577 128.3716 128.4162 128.5467 128.6982 129.0594 129.2515 129.4283 129.5323 129.7744 129.9090 130.0404 130.1058 130.4548 130.7783 130.8064 131.0790 131.3629 131.4691 131.5265 131.6286 131.8822 132.0880 132.1098 132.2528 132.3635 132.6026 132.7380 132.9793 133.0488 133.2393 133.5114 133.8193 134.1921 134.5180 134.7823 135.0871 135.2006 135.4990 135.6400 135.8848 135.9276 136.2004 136.4237 136.4985 136.6438 136.8821 137.1098 137.3466 137.7320 137.9169 138.0793 138.3222 138.5388 138.7571 138.8259 138.9717 139.0724 139.2031 139.5675 139.6892 140.2566 140.3441 140.5150 141.0402 141.2036 141.3734 141.4037 141.7276 142.1663 142.3566 142.3886 143.1392 143.2457 143.4436 143.5388 143.7673 143.9021 143.9755 144.2200 144.3764 144.5476 144.6044 144.9359 145.1006 145.2742 145.7827 145.9271 146.2850 146.6483 147.0657 147.1936 147.4764 147.8211 147.8789 148.0163 148.2025 148.4308 148.6972 148.8039 148.8995 148.9186 149.2432 149.3270 149.4176 149.6242 149.7638 150.1043 150.3113 150.3544 150.5735 150.8179 150.9815 151.1103 151.2018 151.4414 151.6823 151.9285 152.2500 152.4309 152.8635 153.0405 153.2106 153.4135 153.8276 154.4843 154.7093 155.0673 155.5451 155.6583 155.8680 156.0146 156.1362 156.3882 156.6261 156.8913 157.0260 157.1672 157.2815 157.4182 157.4825 157.8399 158.1092 158.2969 159.0391 159.2041 159.4028 159.5178 159.6147 160.1491 160.6049 161.2451 161.5118 161.8687 162.3839 163.5647 163.7280 164.0944 164.6160 167.9172 168.8001 169.6128 170.3140 171.7210 172.7372 174.1422 174.6613 176.5198 180.1577 181.1542 182.4319 186.1067 186.6699 187.5143 188.3677 188.8101 188.8705 189.4375 190.1703 190.7980 191.1215 192.3694 192.7474 193.8207 195.3671 195.9961 200.0228 201.7524 202.6352 205.8692 206.4892 207.9036 212.5164 229.8578 235.8708 241.0686 247.9925 248.9455 338.3365 617.6740 620.8713 624.0361 629.5885 630.3727 631.6875 632.3758 632.6611 634.4605 634.8408 635.3055 635.6784 636.8581 637.0656 637.2356 638.1129 639.3496 641.1137 643.1944 644.1091 645.6091 647.0782 654.0778 655.8399 658.1658 1213.4602 1214.7200 1563.1059</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.478821 -0.220097 -0.345832 -0.342912 -0.277180 -0.121901 -0.132542 -0.466112 -0.428181 -0.084356 -0.165838 -0.115973 -0.001676 -0.239848 -0.299438 0.340688 -0.178402 -0.189743 0.190154 -0.176639 0.186314 0.036504 -0.267606 0.313028 -0.188954 -0.271967 -0.156028 -0.147048 -0.175626 0.096501 0.084953 0.094391 0.077449 0.101175 0.102651 0.100542 0.110002 0.103412 0.108752 0.095515 0.084190 0.137072 0.143251 0.143966 0.155533 0.133508 0.142438 0.149764 0.094950 0.111138 0.094567 0.085763 0.101558 0.155893 0.158792 0.161114 0.161098 0.158450</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5212 9.2201 8.3458 8.3429 6.2772 6.1219 6.1325 6.4661 6.4282 6.0844 6.1658 6.1160 6.0017 6.2398 6.2994 5.6593 6.1784 6.1897 5.8098 6.1766 5.8137 5.9635 6.2676 5.6870 6.1890 6.2720 6.1560 6.1470 6.1756 0.9035 0.9150 0.9056 0.9226 0.8988 0.8973 0.8995 0.8900 0.8966 0.8912 0.9045 0.9158 0.8629 0.8567 0.8560 0.8445 0.8665 0.8576 0.8502 0.9050 0.8889 0.9054 0.9142 0.8984 0.8441 0.8412 0.8389 0.8389 0.8416</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4788 -0.2201 -0.3458 -0.3429 -0.2772 -0.1219 -0.1325 -0.4661 -0.4282 -0.0844 -0.1658 -0.1160 -0.0017 -0.2398 -0.2994 0.3407 -0.1784 -0.1897 0.1902 -0.1766 0.1863 0.0365 -0.2676 0.3130 -0.1890 -0.2720 -0.1560 -0.1470 -0.1756 0.0965 0.0850 0.0944 0.0774 0.1012 0.1027 0.1005 0.1100 0.1034 0.1088 0.0955 0.0842 0.1371 0.1433 0.1440 0.1555 0.1335 0.1424 0.1498 0.0950 0.1111 0.0946 0.0858 0.1016 0.1559 0.1588 0.1611 0.1611 0.1584</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0788 1.0650 2.0493 2.0668 3.8491 3.8651 3.6903 3.9062 3.8866 3.7424 3.9008 3.8180 3.6733 3.9052 3.9606 3.7597 3.8912 3.8967 3.6878 3.8796 4.0440 3.8430 3.9158 3.6484 3.8699 3.9349 3.8642 3.8395 3.8585 1.0086 1.0140 1.0082 1.0096 1.0118 1.0105 1.0126 1.0069 1.0111 1.0106 1.0151 1.0173 0.9943 0.9904 1.0021 1.0029 1.0108 1.0034 0.9980 0.9983 0.9922 1.0014 1.0039 1.0107 0.9978 0.9989 0.9900 0.9882 0.9902</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0788 1.0650 2.0493 2.0668 3.8491 3.8651 3.6903 3.9062 3.8866 3.7424 3.9008 3.8180 3.6733 3.9052 3.9606 3.7597 3.8912 3.8967 3.6878 3.8796 4.0440 3.8430 3.9158 3.6484 3.8699 3.9349 3.8642 3.8395 3.8585 1.0086 1.0140 1.0082 1.0096 1.0118 1.0105 1.0126 1.0069 1.0111 1.0106 1.0151 1.0173 0.9943 0.9904 1.0021 1.0029 1.0108 1.0034 0.9980 0.9983 0.9922 1.0014 1.0039 1.0107 0.9978 0.9989 0.9900 0.9882 0.9902</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9473 0.9745 0.9528 0.9536 1.0741 1.0845 0.8860 0.9392 0.9470 0.9294 0.9818 0.9824 0.8964 0.9919 1.0191 1.3593 1.2852 0.9756 0.9775 0.9793 0.9729 0.9794 0.9725 0.8727 0.9896 1.0198 1.4393 0.9784 1.4548 1.0045 1.3629 1.3695 1.3198 0.9814 1.3324 0.9854 1.3893 0.9594 1.4055 0.9864 1.3637 1.4319 0.9862 0.9451 0.9937 0.9827 0.9918 0.9878 0.9866 1.3367 1.3598 1.4060 0.9776 1.4001 0.9923 1.3954 0.9853 1.3782 0.9955 0.9961</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034124396</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085614087165</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-20.91228 19.91440 -0.99788 24.49252 -23.52984 0.96268 9.62197 -9.06082 0.56115</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.49579</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.80200</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
