<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.170353"
                        y3="1.038066"
                        z3="1.086842"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.882786"
                        y3="-5.04215"
                        z3="0.317338"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.683336"
                        y3="3.719602"
                        z3="-1.341862"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.374443"
                        y3="-2.513149"
                        z3="1.047455"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.52856"
                        y3="-0.706236"
                        z3="0.443122"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.648679"
                        y3="-0.905468"
                        z3="-1.069483"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.632974"
                        y3="1.83974"
                        z3="0.351819"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-2.941302"
                        y3="0.910699"
                        z3="2.951394"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.651013"
                        y3="2.125582"
                        z3="0.669687"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.312563"
                        y3="-0.948119"
                        z3="-1.821947"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.707226"
                        y3="2.618687"
                        z3="-0.809362"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.372552"
                        y3="1.699438"
                        z3="0.93181"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.411814"
                        y3="-2.037268"
                        z3="-1.313517"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.593188"
                        y3="3.226238"
                        z3="-1.35662"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.765467"
                        y3="2.297218"
                        z3="0.399656"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.655454"
                        y3="3.07581"
                        z3="-0.750344"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.376838"
                        y3="-1.742462"
                        z3="-0.43288"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.646243"
                        y3="-3.369859"
                        z3="-1.64628"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.402005"
                        y3="-2.75037"
                        z3="0.116174"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.875209"
                        y3="-4.386576"
                        z3="-1.104116"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.140404"
                        y3="-4.067095"
                        z3="-0.227045"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.963389"
                        y3="3.691497"
                        z3="-0.7201"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.907012"
                        y3="4.523704"
                        z3="-1.551311"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.30844"
                        y3="-1.530737"
                        z3="0.833956"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.849934"
                        y3="-0.93878"
                        z3="1.96743"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.752565"
                        y3="-1.173294"
                        z3="-0.432955"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.858353"
                        y3="0.004096"
                        z3="1.830567"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.75521"
                        y3="-0.220917"
                        z3="-0.553144"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.316354"
                        y3="0.368426"
                        z3="0.571542"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.803601"
                        y3="-1.409171"
                        z3="0.865136"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.483826"
                        y3="-0.976728"
                        z3="0.908632"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.264827"
                        y3="-0.115276"
                        z3="-1.509008"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.17928"
                        y3="-1.841143"
                        z3="-1.271216"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.096888"
                        y3="0.268671"
                        z3="3.211273"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.76422"
                        y3="1.886468"
                        z3="3.407688"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.827119"
                        y3="0.482564"
                        z3="3.425558"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.563336"
                        y3="1.720173"
                        z3="1.112664"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.527161"
                        y3="3.142846"
                        z3="1.046027"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.821046"
                        y3="2.194415"
                        z3="-0.40694"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.519014"
                        y3="-1.106977"
                        z3="-2.882924"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.80526"
                        y3="0.014247"
                        z3="-1.742445"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.659876"
                        y3="2.765667"
                        z3="-1.305911"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.252188"
                        y3="1.111109"
                        z3="1.835001"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.681491"
                        y3="3.829923"
                        z3="-2.25182"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.71553"
                        y3="2.151752"
                        z3="0.897314"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.183131"
                        y3="-0.711691"
                        z3="-0.158539"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.445369"
                        y3="-3.621975"
                        z3="-2.332322"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.056196"
                        y3="-5.422219"
                        z3="-1.361442"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.326321"
                        y3="2.66225"
                        z3="-0.648356"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.895479"
                        y3="4.090054"
                        z3="0.297529"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.017911"
                        y3="4.120145"
                        z3="-2.55799"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.572537"
                        y3="5.558802"
                        z3="-1.625271"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.89116"
                        y3="4.525045"
                        z3="-1.083404"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.492711"
                        y3="-1.224345"
                        z3="2.94878"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.338695"
                        y3="-1.632796"
                        z3="-1.321146"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.283573"
                        y3="0.457067"
                        z3="2.716581"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.103089"
                        y3="0.05399"
                        z3="-1.540285"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.102506"
                        y3="1.104291"
                        z3="0.467544"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.1704,1.0381,1.0868;.8828,-5.0422,.3173;1.6833,3.7196,-1.3419;1.3744,-2.5131,1.0475;-3.5286,-.7062,.4431;-3.6487,-.9055,-1.0695;-1.633,1.8397,.3518;-2.9413,.9107,2.9514;-4.651,2.1256,.6697;-2.3126,-.9481,-1.8219;-1.7072,2.6187,-.8094;-.3726,1.6994,.9318;-1.4118,-2.0373,-1.3135;-.5932,3.2262,-1.3566;.7655,2.2972,.3997;.6555,3.0758,-.7503;-.3768,-1.7425,-.4329;-1.6462,-3.3699,-1.6463;.402,-2.7504,.1162;-.8752,-4.3866,-1.1041;.1404,-4.0671,-.227;2.9634,3.6915,-.7201;3.907,4.5237,-1.5513;2.3084,-1.5307,.834;2.8499,-.9388,1.9674;2.7526,-1.1733,-.433;3.8584,.0041,1.8306;3.7552,-.2209,-.5531;4.3164,.3684,.5715;-2.8036,-1.4092,.8651;-4.4838,-.9767,.9086;-4.2648,-.1153,-1.509;-4.1793,-1.8411,-1.2712;-2.0969,.2687,3.2113;-2.7642,1.8865,3.4077;-3.8271,.4826,3.4256;-5.5633,1.7202,1.1127;-4.5272,3.1428,1.046;-4.821,2.1944,-.4069;-2.519,-1.107,-2.8829;-1.8053,.0142,-1.7424;-2.6599,2.7657,-1.3059;-.2522,1.1111,1.835;-.6815,3.8299,-2.2518;1.7155,2.1518,.8973;-.1831,-.7117,-.1585;-2.4454,-3.622,-2.3323;-1.0562,-5.4222,-1.3614;3.3263,2.6622,-.6484;2.8955,4.0901,.2975;4.0179,4.1201,-2.558;3.5725,5.5588,-1.6253;4.8912,4.525,-1.0834;2.4927,-1.2243,2.9488;2.3387,-1.6328,-1.3211;4.2836,.4571,2.7166;4.1031,.054,-1.5403;5.1025,1.1043,.4675;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2967.6841558585 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.060e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.410 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.805 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.17035268"
                                 y3="1.03806583"
                                 z3="1.08684217">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="0.88278568"
                                 y3="-5.04215034"
                                 z3="0.31733792">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.68333616"
                                 y3="3.71960168"
                                 z3="-1.34186233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.37444274"
                                 y3="-2.51314897"
                                 z3="1.04745471">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.52856004"
                                 y3="-0.70623611"
                                 z3="0.44312194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.64867932"
                                 y3="-0.9054676"
                                 z3="-1.06948257">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.63297373"
                                 y3="1.83973954"
                                 z3="0.35181893">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-2.94130216"
                                 y3="0.91069873"
                                 z3="2.95139399">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.6510131"
                                 y3="2.12558206"
                                 z3="0.66968671">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.31256323"
                                 y3="-0.94811926"
                                 z3="-1.8219473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.70722602"
                                 y3="2.6186872"
                                 z3="-0.80936247">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.37255172"
                                 y3="1.69943751"
                                 z3="0.93180972">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.41181375"
                                 y3="-2.03726823"
                                 z3="-1.31351678">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.59318798"
                                 y3="3.22623776"
                                 z3="-1.35661962">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.76546664"
                                 y3="2.29721769"
                                 z3="0.3996558">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.65545429"
                                 y3="3.0758097"
                                 z3="-0.75034401">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.37683786"
                                 y3="-1.74246198"
                                 z3="-0.43288006">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.6462434"
                                 y3="-3.36985875"
                                 z3="-1.64627969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.40200514"
                                 y3="-2.75037026"
                                 z3="0.11617427">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.87520896"
                                 y3="-4.38657608"
                                 z3="-1.10411557">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.14040419"
                                 y3="-4.06709459"
                                 z3="-0.22704504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.96338922"
                                 y3="3.69149697"
                                 z3="-0.72009981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.90701226"
                                 y3="4.52370383"
                                 z3="-1.55131136">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.3084403"
                                 y3="-1.53073741"
                                 z3="0.83395612">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.84993432"
                                 y3="-0.93878012"
                                 z3="1.96743005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.752565"
                                 y3="-1.17329419"
                                 z3="-0.43295514">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.85835267"
                                 y3="0.00409631"
                                 z3="1.83056668">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.75521027"
                                 y3="-0.2209167"
                                 z3="-0.55314424">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.3163536"
                                 y3="0.36842579"
                                 z3="0.57154211">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.80360125"
                                 y3="-1.40917129"
                                 z3="0.86513559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.48382609"
                                 y3="-0.97672796"
                                 z3="0.90863206">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.26482742"
                                 y3="-0.11527568"
                                 z3="-1.50900846">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.17927971"
                                 y3="-1.84114251"
                                 z3="-1.27121559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.09688824"
                                 y3="0.26867077"
                                 z3="3.21127255">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.76422001"
                                 y3="1.88646754"
                                 z3="3.40768772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.82711942"
                                 y3="0.48256384"
                                 z3="3.42555847">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.56333599"
                                 y3="1.72017318"
                                 z3="1.11266417">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.52716084"
                                 y3="3.14284602"
                                 z3="1.04602667">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.82104624"
                                 y3="2.19441489"
                                 z3="-0.40694048">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.51901416"
                                 y3="-1.1069768"
                                 z3="-2.88292392">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-1.8052602"
                                 y3="0.01424689"
                                 z3="-1.7424454">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.65987563"
                                 y3="2.76566707"
                                 z3="-1.30591124">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.25218757"
                                 y3="1.11110886"
                                 z3="1.83500057">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-0.68149121"
                                 y3="3.82992347"
                                 z3="-2.25182016">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.7155299"
                                 y3="2.15175186"
                                 z3="0.89731358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.18313138"
                                 y3="-0.71169096"
                                 z3="-0.15853945">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.44536858"
                                 y3="-3.62197451"
                                 z3="-2.33232244">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.05619609"
                                 y3="-5.42221937"
                                 z3="-1.36144245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.32632111"
                                 y3="2.66225038"
                                 z3="-0.64835562">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.89547935"
                                 y3="4.09005377"
                                 z3="0.29752906">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.01791121"
                                 y3="4.12014494"
                                 z3="-2.55799025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.57253692"
                                 y3="5.5588022"
                                 z3="-1.62527067">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.89115989"
                                 y3="4.52504472"
                                 z3="-1.08340426">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="2.49271106"
                                 y3="-1.22434509"
                                 z3="2.94877977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.33869452"
                                 y3="-1.63279611"
                                 z3="-1.32114619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.28357348"
                                 y3="0.45706713"
                                 z3="2.71658103">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.10308946"
                                 y3="0.05398968"
                                 z3="-1.54028474">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.10250616"
                                 y3="1.10429105"
                                 z3="0.46754368">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.1704,1.0381,1.0868;.8828,-5.0422,.3173;1.6833,3.7196,-1.3419;1.3744,-2.5131,1.0475;-3.5286,-.7062,.4431;-3.6487,-.9055,-1.0695;-1.633,1.8397,.3518;-2.9413,.9107,2.9514;-4.651,2.1256,.6697;-2.3126,-.9481,-1.8219;-1.7072,2.6187,-.8094;-.3726,1.6994,.9318;-1.4118,-2.0373,-1.3135;-.5932,3.2262,-1.3566;.7655,2.2972,.3997;.6555,3.0758,-.7503;-.3768,-1.7425,-.4329;-1.6462,-3.3699,-1.6463;.402,-2.7504,.1162;-.8752,-4.3866,-1.1041;.1404,-4.0671,-.227;2.9634,3.6915,-.7201;3.907,4.5237,-1.5513;2.3084,-1.5307,.834;2.8499,-.9388,1.9674;2.7526,-1.1733,-.433;3.8584,.0041,1.8306;3.7552,-.2209,-.5531;4.3164,.3684,.5715;-2.8036,-1.4092,.8651;-4.4838,-.9767,.9086;-4.2648,-.1153,-1.509;-4.1793,-1.8411,-1.2712;-2.0969,.2687,3.2113;-2.7642,1.8865,3.4077;-3.8271,.4826,3.4256;-5.5633,1.7202,1.1127;-4.5272,3.1428,1.046;-4.821,2.1944,-.4069;-2.519,-1.107,-2.8829;-1.8053,.0142,-1.7424;-2.6599,2.7657,-1.3059;-.2522,1.1111,1.835;-.6815,3.8299,-2.2518;1.7155,2.1518,.8973;-.1831,-.7117,-.1585;-2.4454,-3.622,-2.3323;-1.0562,-5.4222,-1.3614;3.3263,2.6623,-.6484;2.8955,4.0901,.2975;4.0179,4.1201,-2.558;3.5725,5.5588,-1.6253;4.8912,4.525,-1.0834;2.4927,-1.2243,2.9488;2.3387,-1.6328,-1.3211;4.2836,.4571,2.7166;4.1031,.054,-1.5403;5.1025,1.1043,.4675;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.170353"
                        y3="1.038066"
                        z3="1.086842"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.882786"
                        y3="-5.04215"
                        z3="0.317338"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.683336"
                        y3="3.719602"
                        z3="-1.341862"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.374443"
                        y3="-2.513149"
                        z3="1.047455"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.52856"
                        y3="-0.706236"
                        z3="0.443122"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.648679"
                        y3="-0.905468"
                        z3="-1.069483"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.632974"
                        y3="1.83974"
                        z3="0.351819"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-2.941302"
                        y3="0.910699"
                        z3="2.951394"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.651013"
                        y3="2.125582"
                        z3="0.669687"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.312563"
                        y3="-0.948119"
                        z3="-1.821947"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.707226"
                        y3="2.618687"
                        z3="-0.809362"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.372552"
                        y3="1.699438"
                        z3="0.93181"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.411814"
                        y3="-2.037268"
                        z3="-1.313517"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.593188"
                        y3="3.226238"
                        z3="-1.35662"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.765467"
                        y3="2.297218"
                        z3="0.399656"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.655454"
                        y3="3.07581"
                        z3="-0.750344"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.376838"
                        y3="-1.742462"
                        z3="-0.43288"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.646243"
                        y3="-3.369859"
                        z3="-1.64628"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.402005"
                        y3="-2.75037"
                        z3="0.116174"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.875209"
                        y3="-4.386576"
                        z3="-1.104116"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.140404"
                        y3="-4.067095"
                        z3="-0.227045"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.963389"
                        y3="3.691497"
                        z3="-0.7201"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.907012"
                        y3="4.523704"
                        z3="-1.551311"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.30844"
                        y3="-1.530737"
                        z3="0.833956"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.849934"
                        y3="-0.93878"
                        z3="1.96743"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.752565"
                        y3="-1.173294"
                        z3="-0.432955"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.858353"
                        y3="0.004096"
                        z3="1.830567"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.75521"
                        y3="-0.220917"
                        z3="-0.553144"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.316354"
                        y3="0.368426"
                        z3="0.571542"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.803601"
                        y3="-1.409171"
                        z3="0.865136"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.483826"
                        y3="-0.976728"
                        z3="0.908632"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.264827"
                        y3="-0.115276"
                        z3="-1.509008"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.17928"
                        y3="-1.841143"
                        z3="-1.271216"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.096888"
                        y3="0.268671"
                        z3="3.211273"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.76422"
                        y3="1.886468"
                        z3="3.407688"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.827119"
                        y3="0.482564"
                        z3="3.425558"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.563336"
                        y3="1.720173"
                        z3="1.112664"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.527161"
                        y3="3.142846"
                        z3="1.046027"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.821046"
                        y3="2.194415"
                        z3="-0.40694"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.519014"
                        y3="-1.106977"
                        z3="-2.882924"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.80526"
                        y3="0.014247"
                        z3="-1.742445"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.659876"
                        y3="2.765667"
                        z3="-1.305911"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.252188"
                        y3="1.111109"
                        z3="1.835001"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.681491"
                        y3="3.829923"
                        z3="-2.25182"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.71553"
                        y3="2.151752"
                        z3="0.897314"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.183131"
                        y3="-0.711691"
                        z3="-0.158539"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.445369"
                        y3="-3.621975"
                        z3="-2.332322"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.056196"
                        y3="-5.422219"
                        z3="-1.361442"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.326321"
                        y3="2.66225"
                        z3="-0.648356"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.895479"
                        y3="4.090054"
                        z3="0.297529"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.017911"
                        y3="4.120145"
                        z3="-2.55799"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.572537"
                        y3="5.558802"
                        z3="-1.625271"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.89116"
                        y3="4.525045"
                        z3="-1.083404"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.492711"
                        y3="-1.224345"
                        z3="2.94878"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.338695"
                        y3="-1.632796"
                        z3="-1.321146"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.283573"
                        y3="0.457067"
                        z3="2.716581"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.103089"
                        y3="0.05399"
                        z3="-1.540285"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.102506"
                        y3="1.104291"
                        z3="0.467544"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.1704,1.0381,1.0868;.8828,-5.0422,.3173;1.6833,3.7196,-1.3419;1.3744,-2.5131,1.0475;-3.5286,-.7062,.4431;-3.6487,-.9055,-1.0695;-1.633,1.8397,.3518;-2.9413,.9107,2.9514;-4.651,2.1256,.6697;-2.3126,-.9481,-1.8219;-1.7072,2.6187,-.8094;-.3726,1.6994,.9318;-1.4118,-2.0373,-1.3135;-.5932,3.2262,-1.3566;.7655,2.2972,.3997;.6555,3.0758,-.7503;-.3768,-1.7425,-.4329;-1.6462,-3.3699,-1.6463;.402,-2.7504,.1162;-.8752,-4.3866,-1.1041;.1404,-4.0671,-.227;2.9634,3.6915,-.7201;3.907,4.5237,-1.5513;2.3084,-1.5307,.834;2.8499,-.9388,1.9674;2.7526,-1.1733,-.433;3.8584,.0041,1.8306;3.7552,-.2209,-.5531;4.3164,.3684,.5715;-2.8036,-1.4092,.8651;-4.4838,-.9767,.9086;-4.2648,-.1153,-1.509;-4.1793,-1.8411,-1.2712;-2.0969,.2687,3.2113;-2.7642,1.8865,3.4077;-3.8271,.4826,3.4256;-5.5633,1.7202,1.1127;-4.5272,3.1428,1.046;-4.821,2.1944,-.4069;-2.519,-1.107,-2.8829;-1.8053,.0142,-1.7424;-2.6599,2.7657,-1.3059;-.2522,1.1111,1.835;-.6815,3.8299,-2.2518;1.7155,2.1518,.8973;-.1831,-.7117,-.1585;-2.4454,-3.622,-2.3323;-1.0562,-5.4222,-1.3614;3.3263,2.6622,-.6484;2.8955,4.0901,.2975;4.0179,4.1201,-2.558;3.5725,5.5588,-1.6253;4.8912,4.525,-1.0834;2.4927,-1.2243,2.9488;2.3387,-1.6328,-1.3211;4.2836,.4571,2.7166;4.1031,.054,-1.5403;5.1025,1.1043,.4675;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3370</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2906.0922</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1612.8068</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05198308</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2967.68415586</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4477.73613894</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7965.46729951</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3487.73116058</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02556495</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96182758</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90984450</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408411</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999904289599</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999904289599</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999808579198</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234797313631</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.6516 127.6866 127.7466 127.8768 128.0942 128.3073 128.3913 128.5764 128.8148 129.0010 129.1503 129.5159 129.6535 129.7562 130.0045 130.4264 130.5380 130.6595 130.9619 131.0243 131.1885 131.2809 131.5148 131.6385 131.7973 131.9776 132.0739 132.1281 132.4607 132.7408 132.8415 132.9381 133.0379 133.4295 133.4930 133.9247 134.2225 134.3139 134.4412 134.6167 134.8553 135.2180 135.5249 135.6444 135.6999 135.8068 135.9317 136.1872 136.5699 136.8227 137.1088 137.1529 137.3094 137.4714 138.0255 138.0866 138.3381 138.5200 138.6447 138.7177 139.0145 139.2806 139.5656 139.6324 139.8755 140.2282 140.2612 140.3342 140.4635 140.9189 141.3937 141.5190 141.7703 142.0772 142.2506 142.7271 143.1306 143.3921 143.6469 143.6862 143.7412 143.9707 144.1795 144.3263 144.3701 144.5292 144.7415 144.8339 145.0682 145.2994 145.3808 145.8517 146.3216 146.5675 147.1420 147.3130 147.5148 147.7240 147.9889 148.0523 148.2205 148.3634 148.4972 148.6977 148.7992 148.9774 149.0910 149.3850 149.4773 149.7838 149.8406 150.1410 150.2749 150.3930 150.5431 150.6305 150.7760 150.9773 151.3705 151.5892 151.8413 152.2924 152.6757 152.8342 152.9051 153.2519 153.5571 153.9516 154.0466 154.5369 154.7267 154.8625 155.3447 155.4276 156.0796 156.3550 156.4551 156.6069 156.7098 156.7636 156.9458 157.1801 157.4324 157.4875 157.6416 157.9014 158.0454 158.2992 158.6929 159.0015 159.1962 159.2948 159.6268 160.5668 160.7102 161.1764 161.8354 161.8718 162.5016 163.4578 163.8417 164.4886 164.7438 168.6095 169.0138 169.5361 170.2072 171.8194 172.7738 174.0510 174.3730 176.5704 179.5783 180.2603 182.3533 186.1717 186.5447 187.4603 188.3732 188.6634 188.9004 189.4402 190.1832 190.2122 191.0902 192.7266 192.7498 193.1374 195.3626 195.9955 200.0206 201.7605 203.4229 205.9357 206.6017 207.8456 212.5006 229.8546 235.8952 241.0806 248.0205 248.9117 338.1380 618.7564 620.6959 624.4283 629.9512 630.4595 631.8120 632.5937 633.1110 634.4089 634.9874 635.2915 635.5735 637.3429 637.4885 638.1313 639.4760 640.7447 641.0187 644.2295 644.6182 644.7886 646.8347 654.2843 656.1085 658.2177 1213.7037 1214.8067 1563.1336</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.507774 -0.220255 -0.340604 -0.340349 -0.281594 -0.157349 -0.215613 -0.456733 -0.440200 -0.084415 -0.090954 -0.088324 -0.046399 -0.292522 -0.309482 0.366227 -0.146324 -0.181214 0.195775 -0.190775 0.203196 0.086282 -0.278976 0.303144 -0.268734 -0.180332 -0.096733 -0.142834 -0.222396 0.087295 0.102804 0.087322 0.094411 0.101190 0.106518 0.105444 0.106937 0.109379 0.099959 0.099938 0.084100 0.143549 0.150866 0.135061 0.143922 0.135068 0.145587 0.149861 0.066922 0.100326 0.088218 0.090427 0.091274 0.146117 0.152134 0.158826 0.163379 0.163875</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4922 9.2203 8.3406 8.3403 6.2816 6.1573 6.2156 6.4567 6.4402 6.0844 6.0910 6.0883 6.0464 6.2925 6.3095 5.6338 6.1463 6.1812 5.8042 6.1908 5.7968 5.9137 6.2790 5.6969 6.2687 6.1803 6.0967 6.1428 6.2224 0.9127 0.8972 0.9127 0.9056 0.8988 0.8935 0.8946 0.8931 0.8906 0.9000 0.9001 0.9159 0.8565 0.8491 0.8649 0.8561 0.8649 0.8544 0.8501 0.9331 0.8997 0.9118 0.9096 0.9087 0.8539 0.8479 0.8412 0.8366 0.8361</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5078 -0.2203 -0.3406 -0.3403 -0.2816 -0.1573 -0.2156 -0.4567 -0.4402 -0.0844 -0.0910 -0.0883 -0.0464 -0.2925 -0.3095 0.3662 -0.1463 -0.1812 0.1958 -0.1908 0.2032 0.0863 -0.2790 0.3031 -0.2687 -0.1803 -0.0967 -0.1428 -0.2224 0.0873 0.1028 0.0873 0.0944 0.1012 0.1065 0.1054 0.1069 0.1094 0.1000 0.0999 0.0841 0.1435 0.1509 0.1351 0.1439 0.1351 0.1456 0.1499 0.0669 0.1003 0.0882 0.0904 0.0913 0.1461 0.1521 0.1588 0.1634 0.1639</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1412 1.0652 2.0752 2.0695 3.8227 3.9037 3.7267 3.9136 3.9014 3.8246 3.8016 3.8166 3.7291 4.0661 3.8642 3.7252 3.7756 3.8769 3.6611 3.8949 4.0406 3.7885 3.9736 3.6437 3.9804 3.8696 3.8372 3.8165 3.8584 1.0109 1.0085 1.0044 0.9987 1.0101 1.0093 1.0096 1.0084 1.0066 1.0097 1.0089 1.0130 0.9861 0.9871 1.0136 1.0141 1.0079 0.9994 0.9980 0.9873 0.9902 1.0034 1.0049 1.0056 1.0087 1.0005 0.9887 0.9893 0.9882</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1412 1.0652 2.0752 2.0695 3.8227 3.9037 3.7267 3.9136 3.9014 3.8246 3.8016 3.8166 3.7291 4.0661 3.8642 3.7252 3.7756 3.8769 3.6611 3.8949 4.0406 3.7885 3.9736 3.6437 3.9804 3.8696 3.8372 3.8165 3.8584 1.0109 1.0085 1.0044 0.9987 1.0101 1.0093 1.0096 1.0084 1.0066 1.0097 1.0089 1.0130 0.9861 0.9871 1.0136 1.0141 1.0079 0.9994 0.9980 0.9873 0.9902 1.0034 1.0049 1.0056 1.0087 1.0005 0.9887 0.9893 0.9882</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9608 1.0146 0.9693 0.9678 1.0740 1.0855 0.8811 0.9460 0.9541 0.9070 0.9774 0.9720 0.9192 1.0092 1.0066 1.2582 1.3293 0.9758 0.9755 0.9751 0.9733 0.9729 0.9767 0.8996 1.0042 1.0134 1.4955 0.9989 1.3844 0.9844 1.3522 1.3774 1.3406 0.9994 1.3040 0.9721 1.3447 0.9592 1.4129 0.9859 1.3833 1.4226 0.9870 0.9678 0.9679 0.9823 0.9926 0.9970 0.9897 1.3607 1.3300 1.4251 0.9958 1.4041 0.9819 1.3777 0.9892 1.3717 0.9857 0.9932</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.033840660</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085823738969</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-12.03950 12.03522 -0.00428 27.46315 -26.54741 0.91574 -1.05620 0.66135 -0.39485</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.99725</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.53480</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
