<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="4">1 2 3 4</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="4">8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="4">4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="15">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="15">F Si F F C C C C C C H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="15">1 2 1 1 3 3 3 3 3 3 4 4 4 4 4</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="-3.119744" y3="-0.970971" z3="-0.871536"/>
                  <atom elementType="Si" id="a2" x3="-2.41875" y3="0.181669" z3="-0.015361"/>
                  <atom elementType="F" id="a3" x3="-3.000616" y3="0.029236" z3="1.465489"/>
                  <atom elementType="F" id="a4" x3="-2.890561" y3="1.588251" z3="-0.610484"/>
                  <atom elementType="C" id="a5" x3="-0.586022" y3="0.055034" z3="-0.020912"/>
                  <atom elementType="C" id="a6" x3="0.039865" y3="-0.916166" z3="0.763978"/>
                  <atom elementType="C" id="a7" x3="1.420365" y3="-1.028101" z3="0.783362"/>
                  <atom elementType="C" id="a8" x3="2.195624" y3="-0.168663" z3="0.018444"/>
                  <atom elementType="C" id="a9" x3="1.588788" y3="0.798899" z3="-0.768164"/>
                  <atom elementType="C" id="a10" x3="0.206589" y3="0.910318" z3="-0.788829"/>
                  <atom elementType="H" id="a11" x3="-0.547909" y3="-1.591368" z3="1.373809"/>
                  <atom elementType="H" id="a12" x3="1.891366" y3="-1.782661" z3="1.399064"/>
                  <atom elementType="H" id="a13" x3="3.274505" y3="-0.251638" z3="0.039054"/>
                  <atom elementType="H" id="a14" x3="2.194157" y3="1.470398" z3="-1.362643"/>
                  <atom elementType="H" id="a15" x3="-0.247657" y3="1.675864" z3="-1.40527"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a5" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a11" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
               </bondArray>
               <formula concise="C6H5F3Si">
                  <atomArray count="6 5 3 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">157.14490959999995</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C6H5F3Si/c7-10(8,9)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,5,1,3,4,2/E:(2,3)(4,5)(7,8,9)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:15nFSiFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s2;s5;s6;s7;s8;s5s9;s6;s7;s8;s9;s10;/rC:-3.1197,-.971,-.8715;-2.4188,.1817,-.0154;-3.0006,.0292,1.4655;-2.8906,1.5883,-.6105;-.586,.055,-.0209;.0399,-.9162,.764;1.4204,-1.0281,.7834;2.1956,-.1687,.0184;1.5888,.7989,-.7682;.2066,.9103,-.7888;-.5479,-1.5914,1.3738;1.8914,-1.7827,1.3991;3.2745,-.2516,.0391;2.1942,1.4704,-1.3626;-.2477,1.6759,-1.4053;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">547</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">547</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C6F3H5Si_hess_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">82</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">163</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">609.9744974255 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-10 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-11 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-03 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.752e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.004 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.007 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="-3.11974391" y3="-0.97097079" z3="-0.87153584">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="-2.41874985" y3="0.18166886" z3="-0.01536102">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a3" x3="-3.00061614" y3="0.02923552" z3="1.46548893">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F" id="a4" x3="-2.89056074" y3="1.58825109" z3="-0.61048413">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="-0.58602188" y3="0.05503367" z3="-0.02091249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="0.03986527" y3="-0.91616575" z3="0.76397846">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="1.42036547" y3="-1.02810056" z3="0.78336175">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="2.1956239" y3="-0.16866335" z3="0.01844369">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="1.58878771" y3="0.79889927" z3="-0.76816396">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="0.2065887" y3="0.91031777" z3="-0.78882935">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a11" x3="-0.54790907" y3="-1.5913685" z3="1.37380902">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a12" x3="1.89136575" y3="-1.78266112" z3="1.39906443">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="3.2745055" y3="-0.251638" z3="0.03905363">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="2.19415671" y3="1.47039775" z3="-1.36264341">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="-0.2476574" y3="1.67586416" z3="-1.40526975">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a5" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a10" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a6 a11" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a15" order="S"/>
                        </bondArray>
                        <formula concise="C6H5F3Si">
                           <atomArray count="6 5 3 1" elementType="C H F Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">157.14490959999995</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C6H5F3Si/c7-10(8,9)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,5,1,3,4,2/E:(2,3)(4,5)(7,8,9)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:15nFSiFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s2;s5;s6;s7;s8;s5s9;s6;s7;s8;s9;s10;/rC:-3.1197,-.971,-.8715;-2.4187,.1817,-.0154;-3.0006,.0292,1.4655;-2.8906,1.5883,-.6105;-.586,.055,-.0209;.0399,-.9162,.764;1.4204,-1.0281,.7834;2.1956,-.1687,.0184;1.5888,.7989,-.7682;.2066,.9103,-.7888;-.5479,-1.5914,1.3738;1.8914,-1.7827,1.3991;3.2745,-.2516,.0391;2.1942,1.4704,-1.3626;-.2477,1.6759,-1.4053;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Freq RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="vibrations" dictRef="cc:vibrations">
                     <array dataType="xsd:double" dictRef="cc:frequency" size="45">0.00 0.00 0.00 0.00 0.00 0.00 17.62 100.56 124.22 230.75 254.57 269.33 331.27 375.37 411.77 470.29 497.54 644.86 717.90 734.86 782.03 880.50 903.60 978.49 994.69 1005.86 1035.44 1043.68 1063.91 1087.99 1143.33 1193.96 1220.57 1258.24 1364.20 1411.44 1516.78 1580.07 1693.23 1719.34 3259.05 3264.81 3272.79 3283.69 3291.41</array>
                     <matrix cols="45" dataType="xsd:double" dictRef="cc:displacement" rows="45">0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 -0.011318 -0.120882 0.169476 -0.000196 -0.000142 -0.003376 0.012701 0.197893 0.022078 0.000213 -0.070746 -0.171207 -0.000722 -0.008227 -0.018619 -0.013012 -0.153786 -0.187973 -0.013181 -0.145336 -0.171416 0.000206 0.007920 0.013309 0.012863 0.149454 0.178617 0.011913 0.141136 0.161846 -0.022569 -0.278974 -0.335054 -0.023209 -0.259110 -0.303228 0.000453 0.014455 0.027733 0.022702 0.265533 0.319760 0.021008 0.249291 0.290161 -0.335474 0.075713 0.035053 -0.004149 -0.052619 -0.065498 0.245692 -0.011736 0.038566 0.090882 0.022346 0.034431 -0.011281 -0.180160 -0.220267 -0.007725 -0.096296 -0.118363 0.003767 0.084927 0.102722 0.013292 0.187246 0.227622 0.009503 0.071883 0.088651 -0.001855 -0.109341 -0.132303 -0.013146 -0.148972 -0.182343 0.004822 0.163125 0.197746 0.022207 0.352381 0.427505 0.015346 0.139895 0.171416 -0.002287 -0.169858 -0.206908 0.099681 -0.058264 0.034584 0.006804 0.061794 -0.050806 0.275720 -0.065131 0.044881 -0.359471 -0.028002 0.043440 0.010408 0.170490 -0.134256 -0.155135 0.111178 -0.073423 -0.173311 -0.047545 0.043588 -0.021219 -0.134607 0.103757 0.146310 -0.070485 0.048922 0.156941 0.081448 -0.076528 -0.274125 0.181447 -0.109621 -0.310431 -0.097227 0.087292 -0.031688 -0.249128 0.191296 0.274024 -0.140436 0.099607 0.281429 0.120546 -0.121510 -0.279032 0.119781 -0.007525 -0.001707 -0.028170 -0.031895 0.194423 -0.201728 0.029242 0.065665 -0.100460 -0.262080 0.009663 0.137659 0.177051 0.016452 0.157154 0.198072 0.006292 -0.002554 -0.000905 -0.006210 -0.132526 -0.160258 -0.001119 0.028908 0.034330 0.007441 0.159131 0.197622 0.024061 0.231047 0.286094 0.008076 -0.054954 -0.066473 -0.016256 -0.320500 -0.389252 -0.005621 0.005601 0.003456 0.006861 0.217626 0.271687 0.055207 0.204440 -0.327918 -0.009616 -0.003814 0.004880 0.187237 0.274698 0.109166 -0.331724 -0.135418 -0.047222 0.001619 -0.196635 0.153799 0.140522 -0.162361 0.116593 0.160643 -0.044359 0.001901 0.045557 0.041400 -0.028901 -0.094237 -0.005770 0.032731 -0.104032 -0.149345 0.119897 0.244542 -0.216388 0.155418 0.271596 -0.017391 -0.048763 0.054348 0.139035 -0.098035 -0.206415 0.068870 0.003729 -0.201678 -0.184793 0.145720 0.289434 -0.063567 -0.096931 0.051197 -0.003771 0.006904 0.312203 -0.001889 0.106450 0.277831 0.046005 -0.051633 -0.128737 -0.020751 0.025599 -0.215388 -0.034914 0.036834 -0.233205 -0.007693 0.015659 -0.297642 0.036635 -0.005208 -0.273371 0.041489 -0.017258 -0.253441 0.017575 -0.006981 -0.248670 -0.014156 0.026720 -0.173651 0.012874 -0.005556 -0.296217 0.059197 -0.010637 -0.256591 0.034886 -0.006357 -0.323733 -0.006474 0.017561 -0.120819 -0.239083 -0.076505 -0.012080 -0.173524 -0.201295 0.094207 0.280438 -0.135239 0.049736 0.068786 0.348652 -0.001686 -0.004877 -0.011288 0.002996 0.127581 0.146454 -0.002792 0.049170 0.057210 -0.013040 -0.134681 -0.159274 0.000498 0.047794 0.054466 0.005954 0.126852 0.144094 0.006379 0.212988 0.244355 -0.001936 0.073615 0.086509 -0.023649 -0.327961 -0.385526 0.004676 0.068059 0.081560 0.011453 0.208153 0.241043 0.038843 -0.120724 0.269091 0.012903 0.226583 -0.197542 0.126675 -0.181015 -0.233771 -0.160352 0.295142 -0.025261 -0.015239 -0.182617 0.153075 0.096008 -0.176113 0.138913 0.123870 -0.021954 0.028709 0.006415 0.044162 -0.042946 -0.124420 -0.017388 0.008508 -0.123872 -0.149269 0.145590 0.184163 -0.230298 0.158200 0.257663 0.030793 -0.006808 0.014757 0.132300 -0.125343 -0.248372 0.041733 -0.048617 -0.221360 -0.167780 0.191333 0.003152 -0.006337 0.007037 0.000566 0.002265 -0.002251 -0.006276 -0.000394 -0.005744 0.002264 0.007051 0.006272 0.000289 -0.000522 0.001084 0.008428 0.124815 0.148623 -0.007447 -0.132851 -0.158078 0.000243 0.005372 0.005603 0.007158 0.128990 0.151617 -0.008637 -0.132357 -0.156004 0.019959 0.302148 0.355685 -0.015800 -0.287719 -0.341429 0.000705 0.014358 0.016900 0.015442 0.285158 0.336422 -0.020287 -0.304996 -0.362151 0.074141 -0.258643 -0.182115 -0.487077 0.038097 0.002908 0.103836 -0.044781 0.298756 0.126236 0.273027 -0.121293 -0.174340 0.023112 0.002909 0.098380 0.087957 -0.080109 0.143478 0.064620 -0.067921 0.297946 -0.021042 0.008657 0.136293 -0.089491 0.064148 0.087128 -0.098687 0.075264 0.246917 0.002063 -0.030236 0.005895 0.009103 -0.027239 0.298916 -0.022324 0.013576 0.014370 -0.027164 0.006766 0.254869 -0.050724 0.008645 0.066072 0.045126 0.021820 -0.000472 0.037997 0.045434 -0.044104 -0.033838 0.037613 -0.017095 0.001520 -0.044460 -0.018583 -0.244336 -0.289751 0.000945 0.018093 0.019358 0.006407 0.098411 0.114563 -0.006415 -0.146978 -0.173552 0.006656 0.101782 0.122616 0.000746 0.010998 0.014232 0.012323 0.173608 0.202093 0.016172 0.288832 0.340483 -0.013950 -0.284909 -0.336552 0.016885 0.296475 0.352862 0.011930 0.156581 0.187138 -0.001600 -0.000694 -0.004083 -0.000586 -0.002138 0.001792 -0.004595 0.001085 0.010732 0.005123 -0.013599 0.004744 -0.007736 -0.108555 0.091757 -0.248099 -0.149094 0.140593 -0.231367 0.202883 -0.159026 0.008273 0.113851 -0.096474 0.265727 0.165399 -0.153678 0.217652 -0.185484 0.143765 -0.113786 -0.223281 0.188844 -0.065172 0.259843 -0.217889 -0.021485 -0.206455 0.174328 0.117926 0.246716 -0.213786 0.066041 -0.232990 0.197823 0.052768 0.105032 0.077841 0.045877 -0.002760 -0.000265 0.042909 0.013481 -0.132815 0.035444 -0.129439 0.054611 -0.278974 0.022479 -0.001572 -0.069439 0.190270 -0.154720 -0.056906 0.201801 -0.166109 0.302656 -0.022306 0.004901 -0.090986 -0.187487 0.164456 -0.102477 -0.179058 0.158209 0.147237 0.071946 -0.085380 -0.393107 0.079783 -0.064194 0.301287 -0.031174 -0.003236 -0.405174 -0.029298 0.029558 0.128772 -0.114656 0.075942 -0.003375 -0.001482 -0.001336 -0.000519 0.000305 0.000315 0.002945 0.000886 -0.002113 0.001209 -0.000462 0.002238 0.006376 0.075397 0.089156 -0.003353 -0.053684 -0.061970 0.005564 0.091202 0.110030 -0.004517 -0.045915 -0.054491 0.005660 0.093505 0.108890 -0.003401 -0.055695 -0.067609 -0.022530 -0.338621 -0.395609 -0.004674 -0.099712 -0.116198 -0.022720 -0.379279 -0.449495 -0.003650 -0.090450 -0.108263 -0.022074 -0.329373 -0.394002 0.010231 0.007722 0.004768 -0.000711 0.001907 0.002146 -0.006329 -0.002905 0.006622 -0.002281 0.001585 -0.003520 -0.005970 -0.103376 -0.122363 0.004849 0.068704 0.082961 -0.000597 -0.009224 -0.009414 0.002625 0.076050 0.090059 -0.000524 -0.008433 -0.011306 0.004600 0.066250 0.076238 -0.005801 -0.117362 -0.133057 -0.022984 -0.393141 -0.462840 -0.015686 -0.259258 -0.307139 -0.021008 -0.382304 -0.454326 -0.004606 -0.093778 -0.115899 -0.182641 -0.255279 -0.192042 0.415844 -0.049169 -0.006925 -0.164565 -0.030680 0.348303 -0.147454 0.350865 -0.145305 0.056830 -0.003738 0.001753 -0.058524 0.067133 -0.059972 -0.096046 0.146946 -0.115054 0.140069 -0.008736 0.005182 -0.118360 -0.124846 0.116098 -0.068968 -0.064808 0.053674 -0.009160 0.061386 -0.035015 -0.311042 0.066682 -0.061210 0.135461 -0.032613 -0.019291 -0.318234 -0.038774 0.022678 -0.032991 -0.052385 0.059256 -0.000877 -0.001144 -0.001127 0.000233 -0.000504 0.003119 0.001111 0.000238 -0.002413 -0.000460 0.001207 -0.000774 0.000078 0.000384 -0.001082 0.003709 0.051656 0.060073 0.002160 0.045554 0.053961 -0.000374 -0.004204 -0.004366 -0.002569 -0.048485 -0.056910 -0.003229 -0.044960 -0.054719 -0.016951 -0.329819 -0.381921 -0.021239 -0.314252 -0.369207 0.001068 0.022506 0.027274 0.021542 0.336402 0.402156 0.016052 0.294185 0.352378 0.004589 0.005913 0.004140 0.001023 -0.003278 -0.005562 -0.003849 -0.001108 0.008037 -0.001189 0.002572 -0.000888 -0.001737 -0.023539 -0.028081 0.004700 0.062775 0.074638 -0.002094 -0.016463 -0.022058 -0.005303 -0.061968 -0.073296 -0.001152 -0.005428 -0.004014 0.004188 0.059075 0.069334 -0.015099 -0.374442 -0.428258 0.007226 0.115981 0.132970 0.017435 0.357366 0.423370 0.002840 0.032707 0.043306 -0.015758 -0.351484 -0.426060 0.245343 0.405637 0.312498 -0.041624 -0.299058 -0.533561 -0.173424 -0.032056 0.451727 -0.014660 0.057783 0.001653 -0.003139 0.047149 0.048831 -0.005844 -0.031026 -0.016196 0.013249 0.001622 0.022221 0.007493 0.012584 0.005917 -0.002964 -0.010743 -0.015181 -0.002556 -0.012364 -0.014436 -0.032558 0.096176 0.098353 0.025908 -0.078862 -0.083714 0.007220 -0.020683 -0.077553 -0.006148 0.065442 0.067134 0.011851 0.054554 0.056542 0.110943 0.195465 0.120943 -0.052545 -0.522359 0.296405 0.130519 0.051412 -0.329447 -0.167662 0.499327 -0.213045 -0.007755 -0.009404 0.023226 0.008623 0.027444 -0.016980 -0.033914 0.009044 -0.025565 0.001430 -0.024685 0.022270 0.047483 0.032044 -0.010886 -0.007469 0.022894 -0.033862 0.110879 -0.050948 0.001023 -0.096227 0.052621 0.071463 -0.008894 -0.144153 0.114848 0.110786 -0.063908 -0.061567 -0.143447 0.013825 0.058534 -0.000740 -0.001415 -0.001241 -0.000088 -0.002076 0.006853 0.002302 0.000696 -0.006428 -0.001425 0.004168 -0.001854 -0.000128 -0.003702 -0.002873 -0.005280 -0.058720 -0.067548 0.004339 0.063032 0.074787 0.000956 -0.009478 -0.012523 -0.003631 -0.054572 -0.065524 0.004226 0.064086 0.075964 0.010391 0.308669 0.354437 -0.020365 -0.334572 -0.393562 0.004902 0.059828 0.066444 0.015362 0.284749 0.336829 -0.016165 -0.333512 -0.402821 0.006240 0.005863 0.004339 -0.017868 0.004041 0.001947 0.007380 0.001084 -0.012079 0.007203 -0.012780 0.005175 0.037555 -0.002557 -0.000269 -0.209477 -0.255805 0.228467 -0.017184 0.048992 -0.041153 0.371685 -0.030000 0.004110 -0.023972 -0.044975 0.041970 -0.162100 0.284723 -0.234003 -0.188011 -0.286158 0.248018 0.043865 0.057825 -0.051457 0.387940 -0.023990 0.016627 0.032407 -0.072404 0.041782 -0.129179 0.317569 -0.250381 -0.000434 -0.000435 -0.000254 0.000201 0.000184 -0.000395 0.000093 0.000073 -0.000043 0.000190 -0.000500 0.000183 -0.001087 -0.000419 -0.000818 -0.001997 -0.014499 -0.021500 0.004139 0.046299 0.064262 -0.000904 -0.071155 -0.084118 0.005185 0.064212 0.067239 -0.002655 -0.028984 -0.029884 -0.004584 0.126772 0.132452 -0.026375 -0.300906 -0.337319 0.025384 0.400607 0.472436 -0.027481 -0.327393 -0.408749 -0.001644 0.166180 0.211797 -0.004500 -0.006146 -0.004711 0.024286 0.000236 0.000179 -0.003418 -0.000476 0.006506 -0.002413 0.004903 -0.001998 -0.077719 0.006118 -0.002387 -0.050558 0.047011 -0.031942 0.026391 -0.171935 0.136912 0.151681 -0.008609 0.005520 0.060076 0.158210 -0.143060 -0.061867 -0.033813 0.036446 -0.285150 0.146134 -0.139383 -0.341080 -0.290673 0.299716 0.170200 -0.031162 -0.015961 -0.268718 0.371036 -0.265322 -0.329225 -0.133554 0.102028 -0.000705 -0.003143 0.000072 0.000540 0.015374 -0.012751 -0.001635 -0.002268 0.007480 0.001783 -0.009593 0.004737 -0.001384 -0.055404 0.046987 0.115849 0.027573 -0.031833 -0.060424 0.055231 -0.041508 -0.007150 -0.065017 0.055047 0.068583 0.039704 -0.038164 -0.109728 0.046658 -0.032143 0.404748 -0.105939 0.081626 -0.300558 -0.023780 0.028802 -0.044496 -0.465637 0.396873 0.298713 -0.074452 0.050543 -0.431435 -0.056605 0.061681 0.008747 0.011428 0.008753 -0.075157 0.005003 0.000224 0.007589 0.000909 -0.014342 0.006872 -0.013885 0.005493 0.379196 -0.034455 0.007284 0.027417 0.030011 -0.024969 -0.103754 0.050125 -0.038344 0.050182 -0.005103 0.002249 -0.118062 -0.032694 0.032545 0.030820 -0.028386 0.023868 -0.282231 0.197938 -0.161163 -0.496986 -0.075134 0.097119 0.048562 -0.001777 -0.001878 -0.484882 0.162936 -0.106818 -0.294922 -0.149897 0.136941 -0.000017 0.000123 -0.000033 -0.000553 0.000044 0.000010 -0.000205 -0.000027 0.000027 0.000395 -0.000342 0.000172 0.002248 -0.001024 0.000753 0.012601 -0.009706 0.007332 -0.046395 -0.013122 0.013146 0.004484 0.052939 -0.044862 0.043029 -0.022133 0.016729 -0.014632 -0.007916 0.007502 0.119421 -0.062989 0.050553 -0.447226 -0.150483 0.151699 0.046335 0.505639 -0.429632 0.419279 -0.226476 0.168981 -0.141549 -0.050797 0.047816 0.000245 0.000187 0.000210 0.002257 -0.000679 -0.000383 -0.000014 -0.000064 0.000317 -0.000397 0.000720 -0.000233 -0.028375 0.000284 0.002329 0.049305 -0.034213 0.024497 -0.038005 -0.010488 0.011788 -0.015310 0.001364 -0.000555 -0.033978 0.018657 -0.013258 0.051920 0.025238 -0.025377 0.440051 -0.232259 0.183480 -0.425208 -0.144850 0.141606 -0.015945 0.001311 -0.000056 -0.367657 0.196964 -0.149837 0.481106 0.171849 -0.163214 -0.000897 0.001398 -0.001461 -0.002391 -0.005330 0.004698 -0.003047 0.001146 0.000183 0.004216 -0.001289 0.000052 0.027226 0.243759 -0.207565 0.090655 -0.084970 0.065826 -0.132828 -0.060053 0.058147 0.005309 0.079098 -0.067088 0.115576 -0.084497 0.065169 -0.096301 -0.066415 0.062250 0.373997 -0.230721 0.187316 0.360423 0.105273 -0.110531 -0.008749 -0.067192 0.057118 -0.370981 0.175400 -0.127976 -0.408049 -0.178697 0.163450 0.000171 0.000540 0.000022 -0.000281 -0.002350 0.001948 0.000605 0.000382 -0.001440 -0.000969 0.001982 -0.000916 0.003252 -0.003810 0.002988 0.112247 -0.044134 0.032641 -0.048586 -0.010547 0.010856 0.009627 0.100813 -0.085670 0.046256 -0.016818 0.012333 -0.123070 -0.030133 0.030876 -0.502357 0.275456 -0.214014 -0.174514 -0.051155 0.054887 -0.024577 -0.268615 0.228199 0.173039 -0.085350 0.060922 0.543140 0.195556 -0.188227 -0.000400 0.000601 -0.000755 -0.000440 -0.003302 0.002834 -0.001345 0.000699 0.000149 0.001868 -0.000450 -0.000159 0.007223 0.110032 -0.093371 -0.082254 -0.045610 0.042838 0.158218 -0.000275 -0.008149 0.006239 0.075270 -0.063860 -0.155890 0.022108 -0.010608 0.079580 -0.054578 0.042096 0.067027 -0.140972 0.117502 -0.385193 -0.200028 0.189533 -0.044211 -0.465941 0.395744 0.330093 -0.255685 0.198656 -0.114050 -0.135755 0.118994 -0.000192 0.000475 0.000389 -0.009114 0.000287 -0.000073 -0.000285 -0.000135 -0.000211 -0.000244 0.000043 -0.000110 0.123322 -0.006350 -0.001387 -0.071429 0.079935 -0.064316 -0.106881 -0.073804 0.068263 0.098853 -0.006353 0.000395 -0.096192 0.089339 -0.070256 -0.080537 -0.069685 0.062774 0.451748 -0.180819 0.133850 0.422658 0.097861 -0.106036 0.121664 -0.015803 0.007735 0.401761 -0.170567 0.122650 0.452839 0.098250 -0.103525 0.000393 -0.000927 0.000909 0.000952 0.004381 -0.003758 0.001340 -0.001101 0.000425 -0.001824 -0.000362 0.000688 -0.022134 -0.184134 0.156851 -0.095522 0.135529 -0.109673 -0.075717 -0.153292 0.133696 0.028309 0.289100 -0.245600 0.039218 -0.161763 0.134385 0.128831 0.120938 -0.108926 0.317375 -0.069674 0.044225 0.215041 -0.077853 0.053979 -0.036333 -0.409172 0.347331 -0.219892 -0.048377 0.052137 -0.336564 -0.024563 0.036818 0.000086 0.000722 0.000646 -0.009288 0.000539 -0.000017 0.000243 -0.000198 -0.000809 0.000449 -0.000733 0.000106 0.181878 -0.014770 0.002471 -0.285127 0.085387 -0.056765 0.286724 0.031866 -0.041844 -0.144360 0.016454 -0.006994 0.272471 -0.081672 0.055065 -0.286868 -0.036348 0.046115 0.299664 -0.231279 0.182614 -0.260173 -0.169115 0.156163 -0.170875 0.003454 0.005752 -0.230894 0.202377 -0.159467 0.311858 0.172556 -0.160279 0.000052 0.000054 -0.000007 0.000039 -0.000194 0.000182 -0.000005 0.000080 -0.000093 0.000051 -0.000026 0.000003 -0.001554 0.001718 -0.001354 -0.040671 -0.047484 0.042809 -0.011645 0.022384 -0.018390 0.018797 -0.001698 0.000576 -0.007685 -0.008286 0.007338 -0.004006 0.008381 -0.006787 0.471451 0.541854 -0.489790 0.162243 -0.264235 0.215612 -0.224354 0.017301 -0.004229 0.090146 0.100106 -0.088697 0.054790 -0.093945 0.075598 -0.000014 0.000030 -0.000029 -0.000057 -0.000246 0.000204 -0.000044 0.000052 -0.000030 0.000108 0.000077 -0.000079 0.000936 0.001984 -0.001735 -0.015308 -0.016632 0.015044 0.003213 -0.001803 0.001363 -0.028755 0.001360 0.000176 0.023715 0.027996 -0.024721 0.025011 -0.043841 0.035403 0.168242 0.192119 -0.173674 -0.018966 0.027139 -0.022043 0.336867 -0.025123 0.005674 -0.291360 -0.325458 0.288200 -0.299109 0.503804 -0.405454 0.000067 0.000022 0.000022 -0.000032 0.000067 -0.000041 0.000051 0.000011 -0.000047 -0.000026 -0.000082 0.000066 -0.001261 -0.000459 0.000464 -0.013317 -0.014379 0.013035 0.014947 -0.018539 0.014940 -0.060661 0.005075 -0.001468 0.009638 0.005237 -0.004894 -0.021021 0.034790 -0.028029 0.141174 0.161378 -0.145973 -0.144605 0.225694 -0.183969 0.698396 -0.053991 0.013444 -0.076789 -0.079406 0.070534 0.235024 -0.394310 0.317244 -0.000011 0.000015 -0.000018 -0.000004 -0.000127 0.000106 -0.000028 0.000029 -0.000015 0.000050 0.000037 -0.000038 0.000386 0.001663 -0.001430 -0.012576 -0.011055 0.010136 0.025323 -0.038697 0.031487 -0.002049 0.003693 -0.003027 -0.033828 -0.035807 0.031815 0.015369 -0.021301 0.017032 0.116033 0.129181 -0.116954 -0.275739 0.439648 -0.358623 0.025737 -0.005972 0.003870 0.368651 0.407496 -0.360951 -0.146898 0.241151 -0.193872 0.000065 0.000034 0.000025 -0.000098 0.000005 0.000003 0.000053 0.000010 -0.000050 0.000033 -0.000053 0.000030 -0.000664 0.000040 0.000002 -0.010558 -0.008858 0.008164 0.021782 -0.037818 0.030919 0.053122 -0.003859 0.000791 0.023853 0.028749 -0.025387 -0.009365 0.012086 -0.009619 0.092610 0.102209 -0.092599 -0.254487 0.411253 -0.335667 -0.578392 0.044220 -0.010650 -0.274425 -0.307567 0.272220 0.083166 -0.134980 0.108462</matrix>
                  </module>
               </property>
               <property dictRef="cc:irspectrum">
                  <module cmlx:templateRef="irspectrum">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="39">6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="39">17.62 100.56 124.22 230.75 254.57 269.33 331.27 375.37 411.77 470.29 497.54 644.86 717.90 734.86 782.03 880.50 903.60 978.49 994.69 1005.86 1035.44 1043.68 1063.91 1087.99 1143.33 1193.96 1220.57 1258.24 1364.20 1411.44 1516.78 1580.07 1693.23 1719.34 3259.05 3264.81 3272.79 3283.69 3291.41</array>
                     <array dataType="xsd:double" dictRef="o:t2" size="39">0.000038 0.000009 0.000396 0.000013 0.000458 0.003659 0.003464 0.002693 0.000003 0.014839 0.002839 0.000002 0.000002 0.004020 0.003033 0.015409 0.000013 0.000139 0.010805 0.009549 0.000013 0.000003 0.000000 0.000028 0.000005 0.005315 0.000019 0.000227 0.000040 0.000099 0.000953 0.000037 0.000005 0.000430 0.000028 0.000008 0.000043 0.000226 0.000131</array>
                     <matrix cols="3" dataType="xsd:double" dictRef="cc:displacement" rows="39">-0.000489 -0.000515 -0.006142 0.000174 -0.001494 -0.002577 -0.000908 0.014962 -0.013098 0.003012 -0.001956 -0.000482 0.002325 -0.016447 0.013488 -0.060341 0.002686 0.003307 -0.005325 -0.037964 -0.044654 0.001186 0.039127 -0.034063 0.000359 0.001123 -0.001298 -0.121510 0.008609 -0.000116 -0.001428 0.034456 0.040623 -0.000026 0.000938 -0.000850 0.000662 -0.000529 -0.000916 -0.002034 -0.040884 -0.048419 -0.003980 -0.035322 -0.042071 0.123417 -0.013226 -0.001455 0.000175 0.000126 0.003530 0.000643 -0.007082 -0.009392 -0.009455 -0.051724 -0.089668 -0.011526 -0.085051 0.046715 -0.000201 -0.001706 0.003173 -0.000674 0.001198 0.000799 -0.000472 0.000393 -0.000058 0.005248 0.000402 -0.000177 -0.002240 -0.000315 0.000377 -0.072686 0.005591 -0.000491 -0.000595 0.003404 -0.002571 0.014980 -0.001569 -0.000016 -0.001495 -0.004606 0.004062 0.000850 0.007512 -0.006497 -0.002148 -0.023505 0.019888 0.005856 -0.001320 0.000860 0.000340 0.001673 -0.001564 -0.020687 0.001411 0.000064 -0.003756 -0.002704 0.002479 -0.000452 -0.002152 0.001888 -0.006545 0.000516 -0.000213 -0.001674 -0.011331 0.009740 0.011326 -0.001476 0.000549</matrix>
                  </module>
               </property>
            </propertyList>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="F" id="a1" x3="-3.119744" y3="-0.970971" z3="-0.871536"/>
                  <atom elementType="Si" id="a2" x3="-2.41875" y3="0.181669" z3="-0.015361"/>
                  <atom elementType="F" id="a3" x3="-3.000616" y3="0.029236" z3="1.465489"/>
                  <atom elementType="F" id="a4" x3="-2.890561" y3="1.588251" z3="-0.610484"/>
                  <atom elementType="C" id="a5" x3="-0.586022" y3="0.055034" z3="-0.020912"/>
                  <atom elementType="C" id="a6" x3="0.039865" y3="-0.916166" z3="0.763978"/>
                  <atom elementType="C" id="a7" x3="1.420365" y3="-1.028101" z3="0.783362"/>
                  <atom elementType="C" id="a8" x3="2.195624" y3="-0.168663" z3="0.018444"/>
                  <atom elementType="C" id="a9" x3="1.588788" y3="0.798899" z3="-0.768164"/>
                  <atom elementType="C" id="a10" x3="0.206589" y3="0.910318" z3="-0.788829"/>
                  <atom elementType="H" id="a11" x3="-0.547909" y3="-1.591368" z3="1.373809"/>
                  <atom elementType="H" id="a12" x3="1.891366" y3="-1.782661" z3="1.399064"/>
                  <atom elementType="H" id="a13" x3="3.274505" y3="-0.251638" z3="0.039054"/>
                  <atom elementType="H" id="a14" x3="2.194157" y3="1.470398" z3="-1.362643"/>
                  <atom elementType="H" id="a15" x3="-0.247657" y3="1.675864" z3="-1.40527"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a5" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a11" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
               </bondArray>
               <formula concise="C6H5F3Si">
                  <atomArray count="6 5 3 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">157.14490959999995</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C6H5F3Si/c7-10(8,9)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,5,1,3,4,2/E:(2,3)(4,5)(7,8,9)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:15nFSiFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s2;s5;s6;s7;s8;s5s9;s6;s7;s8;s9;s10;/rC:-3.1197,-.971,-.8715;-2.4188,.1817,-.0154;-3.0006,.0292,1.4655;-2.8906,1.5883,-.6105;-.586,.055,-.0209;.0399,-.9162,.764;1.4204,-1.0281,.7834;2.1956,-.1687,.0184;1.5888,.7989,-.7682;.2066,.9103,-.7888;-.5479,-1.5914,1.3738;1.8914,-1.7827,1.3991;3.2745,-.2516,.0391;2.1942,1.4704,-1.3626;-.2477,1.6759,-1.4053;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-819.46424940</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">609.97449743</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1429.43874682</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-2343.52313395</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">914.08438713</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1634.51598906</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">815.05173966</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00541378</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">41.000007698233</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">41.000007698233</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">82.000015396467</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-46.755534954296</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-3.769972190248</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-50.525507144544</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="163">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="163">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="163" units="nonsi:electronvolt">-1819.7036 -683.1931 -683.0890 -683.0364 -285.0036 -284.9977 -284.9034 -284.8231 -284.7939 -284.7920 -153.1028 -106.6919 -106.6838 -106.5846 -36.4623 -35.7693 -35.6546 -26.5860 -23.3920 -23.3735 -19.2161 -19.1123 -17.7545 -16.5702 -15.8173 -15.7201 -15.0701 -14.6019 -14.4725 -14.2691 -14.2465 -13.7678 -13.6176 -13.5072 -13.2026 -12.9054 -12.0928 -11.3841 -10.7559 -8.7087 -8.5520 -0.5624 -0.0037 2.3481 2.8926 3.7208 3.8659 4.9950 5.2371 5.3587 5.6022 6.5336 6.6758 7.2607 8.4069 8.4766 8.6018 9.2090 11.5048 12.1096 12.2752 12.6537 13.9308 14.7318 14.9324 15.4090 16.0602 16.3654 16.5344 16.6016 16.6776 16.7493 17.3170 18.1457 18.5856 19.8095 20.4836 20.9952 21.3695 22.6841 22.9762 23.4465 25.3679 25.7057 25.8661 26.2466 27.3560 28.1241 28.1952 29.0725 29.2294 29.3165 30.8754 31.7389 32.2082 32.4128 32.6567 33.4753 33.6585 33.8184 33.9541 34.0591 34.1114 34.4000 34.7871 34.8959 35.2636 36.3086 36.9474 37.1607 37.3792 38.5093 38.9190 39.5151 40.0465 40.2704 41.2593 41.5682 42.0971 42.1598 43.5444 45.9707 46.9483 47.6887 48.0876 49.2009 49.9410 50.5315 51.5577 51.8644 55.0198 55.7719 57.8500 58.9950 59.4608 59.5517 59.9791 60.4848 64.0254 64.2042 64.9311 69.6446 71.1931 73.8825 74.5009 74.9778 75.2016 75.8632 76.8082 80.1639 80.8529 81.7040 83.6148 93.4166 360.1146 370.9396 371.3835 383.5850 384.0791 395.4619 891.6152 892.7978 893.8398</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="15">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="15">F Si F F C C C C C C H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="15">-0.449288 1.529084 -0.453216 -0.453158 -0.183104 -0.266854 -0.204993 -0.223349 -0.202636 -0.264508 0.236370 0.230834 0.232781 0.230786 0.241253</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="15">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="15">F Si F F C C C C C C H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="15">-0.222118 0.748773 -0.222442 -0.221340 -0.203316 -0.109291 -0.131105 -0.112391 -0.131479 -0.110396 0.144456 0.141661 0.141386 0.141551 0.146050</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="15">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="15">F Si F F C C C C C C H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="15">9.4493 12.4709 9.4532 9.4532 6.1831 6.2669 6.2050 6.2233 6.2026 6.2645 0.7636 0.7692 0.7672 0.7692 0.7587</array>
                     <array dataType="xsd:double" dictRef="o:za" size="15">9.0000 14.0000 9.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="15">-0.4493 1.5291 -0.4532 -0.4532 -0.1831 -0.2669 -0.2050 -0.2233 -0.2026 -0.2645 0.2364 0.2308 0.2328 0.2308 0.2413</array>
                     <array dataType="xsd:double" dictRef="o:va" size="15">0.9811 3.7789 0.9754 0.9780 3.6830 3.8425 3.8095 3.8150 3.8037 3.8338 0.9060 0.9074 0.9068 0.9074 0.9064</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="15">0.9811 3.7789 0.9754 0.9780 3.6830 3.8425 3.8095 3.8150 3.8037 3.8338 0.9060 0.9074 0.9068 0.9074 0.9064</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="15">-0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="15">0.9436 0.9282 0.9218 0.9131 1.3735 1.3775 1.4422 0.9128 1.4164 0.9160 1.4221 0.9152 1.4327 0.9161 0.9100</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="15">0 1 1 2 1 3 1 4 4 5 4 9 5 6 5 10 6 7 6 11 7 8 7 12 8 9 8 13 9 14</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.008502359</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-819.447104444975</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">16.63550 -15.41705 1.21845 -1.20449 1.13748 -0.06701 0.06717 -0.07101 -0.00384</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.22029</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.10174</scalar>
               </module>
               <module cmlx:templateRef="thermochemistry" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:totalmass">162.19</scalar>
               </module>
               <module cmlx:templateRef="innerenergy" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="contributions">
                     <scalar dataType="xsd:double" dictRef="o:electronic" units="nonsi:hartree">-819.44710444</scalar>
                     <scalar dataType="xsd:double" dictRef="o:zeropoint" units="nonsi:hartree">0.10349712</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalvibcorrection" units="nonsi:hartree">0.00613318</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalrotcorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltrasncorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltotal" units="nonsi:hartree">-819.33464160</scalar>
                  </module>
                  <module cmlx:templateRef="corrections">
                     <scalar dataType="xsd:double" dictRef="o:thermalcorr" units="nonsi:hartree">0.00896573</scalar>
                     <scalar dataType="xsd:double" dictRef="o:nonthermalcorr" units="nonsi:hartree">0.10349712</scalar>
                     <scalar dataType="xsd:double" dictRef="o:totalcorr" units="nonsi:hartree">0.11246284</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="enthalpy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalfree" units="nonsi:hartree">-819.33464160</scalar>
                  <scalar dataType="xsd:double" dictRef="o:thermalcorrenthalpy" units="nonsi:hartree">0.00094421</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-819.33369739</scalar>
               </module>
               <module cmlx:templateRef="entropy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:elect" units="nonsi:hartree">0.00000000</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:vibrat" units="nonsi:hartree">0.01080592</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rotat" units="nonsi:hartree">0.01427708</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:transl" units="nonsi:hartree">0.01955611</scalar>
                  <scalar dataType="xsd:double" dictRef="o:total" units="nonsi:hartree">0.04463912</scalar>
               </module>
               <module cmlx:templateRef="gibbs" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-819.33369739</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalentropycorr" units="nonsi:hartree">-0.04463912</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsenthalpy" units="nonsi:hartree">-819.37833651</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsminuselec" units="nonsi:hartree">0.06876793</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
