<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="4">1 2 3 4</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="4">8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="4">4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="18">1 2 1 3 1 1 1 3 3 3 3 3 3 4 4 4 4 4</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="-1.880686" y3="-0.641491" z3="-2.137046"/>
                  <atom elementType="Si" id="a2" x3="-1.544222" y3="-0.868021" z3="-0.586545"/>
                  <atom elementType="F" id="a3" x3="-1.645327" y3="-2.429631" z3="-0.23695"/>
                  <atom elementType="C" id="a4" x3="-2.945176" y3="-0.00577" z3="0.392472"/>
                  <atom elementType="F" id="a5" x3="-3.03538" y3="1.294157" z3="0.05566"/>
                  <atom elementType="F" id="a6" x3="-2.696013" y3="-0.055907" z3="1.710561"/>
                  <atom elementType="F" id="a7" x3="-4.152886" y3="-0.547264" z3="0.194103"/>
                  <atom elementType="C" id="a8" x3="0.132668" y3="-0.246756" z3="-0.148168"/>
                  <atom elementType="C" id="a9" x3="0.437517" y3="1.115278" z3="-0.22162"/>
                  <atom elementType="C" id="a10" x3="1.705971" y3="1.575167" z3="0.089828"/>
                  <atom elementType="C" id="a11" x3="2.690767" y3="0.679886" z3="0.480428"/>
                  <atom elementType="C" id="a12" x3="2.403977" y3="-0.674036" z3="0.562329"/>
                  <atom elementType="C" id="a13" x3="1.133602" y3="-1.134625" z3="0.253103"/>
                  <atom elementType="H" id="a14" x3="-0.314857" y3="1.835468" z3="-0.519533"/>
                  <atom elementType="H" id="a15" x3="1.926078" y3="2.63232" z3="0.030718"/>
                  <atom elementType="H" id="a16" x3="3.681925" y3="1.038767" z3="0.724225"/>
                  <atom elementType="H" id="a17" x3="3.170412" y3="-1.372746" z3="0.869006"/>
                  <atom elementType="H" id="a18" x3="0.93173" y3="-2.194695" z3="0.33053"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a8" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a4 a6" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a11 a16" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a17" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
               </bondArray>
               <formula concise="C7H5F5Si">
                  <atomArray count="7 5 5 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">207.1524159999999</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8807,-.6415,-2.137;-1.5442,-.868,-.5865;-1.6453,-2.4296,-.2369;-2.9452,-.0058,.3925;-3.0354,1.2942,.0557;-2.696,-.0559,1.7106;-4.1529,-.5473,.1941;.1327,-.2468,-.1482;.4375,1.1153,-.2216;1.706,1.5752,.0898;2.6908,.6799,.4804;2.404,-.674,.5623;1.1336,-1.1346,.2531;-.3149,1.8355,-.5195;1.9261,2.6323,.0307;3.6819,1.0388,.7242;3.1704,-1.3727,.869;.9317,-2.1947,.3305;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">694</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">694</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C7F5H5Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">106</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">208</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">953.5384711858 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.753e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.006 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.004 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">694</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">694</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C7F5H5Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">106</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">208</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">954.4509357881 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.740e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.006 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.004 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="-1.88068608" y3="-0.64149126" z3="-2.13704619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="-1.54422181" y3="-0.86802138" z3="-0.58654541">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a3" x3="-1.64532703" y3="-2.42963099" z3="-0.23694999">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="-2.94517599" y3="-0.00576987" z3="0.39247231">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="F" id="a5" x3="-3.03538025" y3="1.29415679" z3="0.05565998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F" id="a6" x3="-2.6960134" y3="-0.05590701" z3="1.71056089">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F" id="a7" x3="-4.15288564" y3="-0.54726444" z3="0.19410272">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="0.13266837" y3="-0.24675587" z3="-0.14816828">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="0.43751662" y3="1.11527846" z3="-0.22161995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="1.70597129" y3="1.57516701" z3="0.08982823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="2.69076677" y3="0.67988554" z3="0.48042816">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a12" x3="2.40397705" y3="-0.67403563" z3="0.56232887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a13" x3="1.1336022" y3="-1.1346251" z3="0.25310316">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-0.31485686" y3="1.83546847" z3="-0.51953339">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="1.92607812" y3="2.63231953" z3="0.03071832">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="3.68192501" y3="1.03876709" z3="0.72422501">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="3.17041177" y3="-1.37274586" z3="0.86900554">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="0.93172989" y3="-2.19469548" z3="0.33053001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a8" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a4 a6" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a10 a15" order="S"/>
                           <bond atomRefs2="a11 a16" order="S"/>
                           <bond atomRefs2="a11 a12" order="S"/>
                           <bond atomRefs2="a12 a17" order="S"/>
                           <bond atomRefs2="a12 a13" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                        </bondArray>
                        <formula concise="C7H5F5Si">
                           <atomArray count="7 5 5 1" elementType="C H F Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">207.1524159999999</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8807,-.6415,-2.137;-1.5442,-.868,-.5865;-1.6453,-2.4296,-.2369;-2.9452,-.0058,.3925;-3.0354,1.2942,.0557;-2.696,-.0559,1.7106;-4.1529,-.5473,.1941;.1327,-.2468,-.1482;.4375,1.1153,-.2216;1.706,1.5752,.0898;2.6908,.6799,.4804;2.404,-.674,.5623;1.1336,-1.1346,.2531;-.3149,1.8355,-.5195;1.9261,2.6323,.0307;3.6819,1.0388,.7242;3.1704,-1.3727,.869;.9317,-2.1947,.3305;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-1.902189" y3="-0.553086" z3="-2.141659"/>
                        <atom elementType="Si" id="a2" x3="-1.544267" y3="-0.849851" z3="-0.60826"/>
                        <atom elementType="F" id="a3" x3="-1.634191" y3="-2.427827" z3="-0.338644"/>
                        <atom elementType="C" id="a4" x3="-2.934512" y3="-0.038224" z3="0.428969"/>
                        <atom elementType="F" id="a5" x3="-2.985604" y3="1.288501" z3="0.207932"/>
                        <atom elementType="F" id="a6" x3="-2.701548" y3="-0.212393" z3="1.738813"/>
                        <atom elementType="F" id="a7" x3="-4.150516" y3="-0.531167" z3="0.170135"/>
                        <atom elementType="C" id="a8" x3="0.131323" y3="-0.236029" z3="-0.162527"/>
                        <atom elementType="C" id="a9" x3="0.451913" y3="1.118802" z3="-0.280604"/>
                        <atom elementType="C" id="a10" x3="1.720138" y3="1.575173" z3="0.036844"/>
                        <atom elementType="C" id="a11" x3="2.685263" y3="0.683774" z3="0.482968"/>
                        <atom elementType="C" id="a12" x3="2.380519" y3="-0.662968" z3="0.610858"/>
                        <atom elementType="C" id="a13" x3="1.112369" y3="-1.120991" z3="0.289492"/>
                        <atom elementType="H" id="a14" x3="-0.286027" y3="1.833708" z3="-0.624076"/>
                        <atom elementType="H" id="a15" x3="1.955379" y3="2.62636" z3="-0.061772"/>
                        <atom elementType="H" id="a16" x3="3.676008" y3="1.040142" z3="0.732673"/>
                        <atom elementType="H" id="a17" x3="3.131486" y3="-1.35824" z3="0.961395"/>
                        <atom elementType="H" id="a18" x3="0.894555" y3="-2.175583" z3="0.400562"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a8" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a6" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a14" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a16" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a17" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a18" order="S"/>
                     </bondArray>
                     <formula concise="C7H5F5Si">
                        <atomArray count="7 5 5 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.1524159999999</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.9022,-.5531,-2.1417;-1.5443,-.8499,-.6083;-1.6342,-2.4278,-.3386;-2.9345,-.0382,.429;-2.9856,1.2885,.2079;-2.7015,-.2124,1.7388;-4.1505,-.5312,.1701;.1313,-.236,-.1625;.4519,1.1188,-.2806;1.7201,1.5752,.0368;2.6853,.6838,.483;2.3805,-.663,.6109;1.1124,-1.121,.2895;-.286,1.8337,-.6241;1.9554,2.6264,-.0618;3.676,1.0401,.7327;3.1315,-1.3582,.9614;.8946,-2.1756,.4006;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-1.89352" y3="-0.607102" z3="-2.134935"/>
                        <atom elementType="Si" id="a2" x3="-1.541926" y3="-0.865247" z3="-0.593466"/>
                        <atom elementType="F" id="a3" x3="-1.638311" y3="-2.435992" z3="-0.287455"/>
                        <atom elementType="C" id="a4" x3="-2.932308" y3="-0.019354" z3="0.416417"/>
                        <atom elementType="F" id="a5" x3="-2.953379" y3="1.306074" z3="0.184413"/>
                        <atom elementType="F" id="a6" x3="-2.722302" y3="-0.187471" z3="1.730546"/>
                        <atom elementType="F" id="a7" x3="-4.153327" y3="-0.49105" z3="0.142336"/>
                        <atom elementType="C" id="a8" x3="0.132366" y3="-0.244645" z3="-0.157991"/>
                        <atom elementType="C" id="a9" x3="0.440293" y3="1.114157" z3="-0.262444"/>
                        <atom elementType="C" id="a10" x3="1.706199" y3="1.576737" z3="0.055747"/>
                        <atom elementType="C" id="a11" x3="2.681833" y3="0.686704" z3="0.482135"/>
                        <atom elementType="C" id="a12" x3="2.390121" y3="-0.66459" z3="0.591413"/>
                        <atom elementType="C" id="a13" x3="1.123031" y3="-1.128121" z3="0.27466"/>
                        <atom elementType="H" id="a14" x3="-0.306822" y3="1.826643" z3="-0.590662"/>
                        <atom elementType="H" id="a15" x3="1.931825" y3="2.631347" z3="-0.028173"/>
                        <atom elementType="H" id="a16" x3="3.671399" y3="1.047644" z3="0.730011"/>
                        <atom elementType="H" id="a17" x3="3.150185" y3="-1.359103" z3="0.923497"/>
                        <atom elementType="H" id="a18" x3="0.914742" y3="-2.18653" z3="0.367051"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a8" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a6" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a14" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a16" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a17" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a18" order="S"/>
                     </bondArray>
                     <formula concise="C7H5F5Si">
                        <atomArray count="7 5 5 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.1524159999999</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8935,-.6071,-2.1349;-1.5419,-.8652,-.5935;-1.6383,-2.436,-.2875;-2.9323,-.0194,.4164;-2.9534,1.3061,.1844;-2.7223,-.1875,1.7305;-4.1533,-.491,.1423;.1324,-.2446,-.158;.4403,1.1142,-.2624;1.7062,1.5767,.0557;2.6818,.6867,.4821;2.3901,-.6646,.5914;1.123,-1.1281,.2747;-.3068,1.8266,-.5907;1.9318,2.6313,-.0282;3.6714,1.0476,.73;3.1502,-1.3591,.9235;.9147,-2.1865,.3671;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-1.887468" y3="-0.651631" z3="-2.132767"/>
                        <atom elementType="Si" id="a2" x3="-1.540501" y3="-0.877516" z3="-0.585178"/>
                        <atom elementType="F" id="a3" x3="-1.644025" y3="-2.441864" z3="-0.250492"/>
                        <atom elementType="C" id="a4" x3="-2.928576" y3="-0.001389" z3="0.402733"/>
                        <atom elementType="F" id="a5" x3="-2.954821" y3="1.314835" z3="0.123441"/>
                        <atom elementType="F" id="a6" x3="-2.709845" y3="-0.120926" z3="1.720497"/>
                        <atom elementType="F" id="a7" x3="-4.150386" y3="-0.484984" z3="0.153457"/>
                        <atom elementType="C" id="a8" x3="0.133174" y3="-0.252712" z3="-0.156671"/>
                        <atom elementType="C" id="a9" x3="0.429604" y3="1.110301" z3="-0.239847"/>
                        <atom elementType="C" id="a10" x3="1.69412" y3="1.576538" z3="0.078893"/>
                        <atom elementType="C" id="a11" x3="2.678715" y3="0.68661" z3="0.484179"/>
                        <atom elementType="C" id="a12" x3="2.398252" y3="-0.668512" z3="0.572255"/>
                        <atom elementType="C" id="a13" x3="1.132375" y3="-1.136055" z3="0.256356"/>
                        <atom elementType="H" id="a14" x3="-0.325345" y3="1.822043" z3="-0.550284"/>
                        <atom elementType="H" id="a15" x3="1.91124" y3="2.634166" z3="0.013153"/>
                        <atom elementType="H" id="a16" x3="3.666757" y3="1.050881" z3="0.733193"/>
                        <atom elementType="H" id="a17" x3="3.16561" y3="-1.362686" z3="0.887711"/>
                        <atom elementType="H" id="a18" x3="0.931219" y3="-2.196999" z3="0.33247"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a8" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a6" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a14" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a16" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a17" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a18" order="S"/>
                     </bondArray>
                     <formula concise="C7H5F5Si">
                        <atomArray count="7 5 5 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.1524159999999</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8875,-.6516,-2.1328;-1.5405,-.8775,-.5852;-1.644,-2.4419,-.2505;-2.9286,-.0014,.4027;-2.9548,1.3148,.1234;-2.7098,-.1209,1.7205;-4.1504,-.485,.1535;.1332,-.2527,-.1567;.4296,1.1103,-.2398;1.6941,1.5765,.0789;2.6787,.6866,.4842;2.3983,-.6685,.5723;1.1324,-1.1361,.2564;-.3253,1.822,-.5503;1.9112,2.6342,.0132;3.6668,1.0509,.7332;3.1656,-1.3627,.8877;.9312,-2.197,.3325;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-1.890794" y3="-0.637439" z3="-2.135422"/>
                        <atom elementType="Si" id="a2" x3="-1.54082" y3="-0.874425" z3="-0.590093"/>
                        <atom elementType="F" id="a3" x3="-1.64318" y3="-2.441698" z3="-0.269206"/>
                        <atom elementType="C" id="a4" x3="-2.927112" y3="-0.005714" z3="0.407419"/>
                        <atom elementType="F" id="a5" x3="-2.960128" y3="1.310881" z3="0.130292"/>
                        <atom elementType="F" id="a6" x3="-2.700552" y3="-0.126683" z3="1.723793"/>
                        <atom elementType="F" id="a7" x3="-4.148842" y3="-0.493004" z3="0.164628"/>
                        <atom elementType="C" id="a8" x3="0.132781" y3="-0.251263" z3="-0.158677"/>
                        <atom elementType="C" id="a9" x3="0.4319" y3="1.110967" z3="-0.246282"/>
                        <atom elementType="C" id="a10" x3="1.696468" y3="1.576152" z3="0.073777"/>
                        <atom elementType="C" id="a11" x3="2.678154" y3="0.686279" z3="0.485867"/>
                        <atom elementType="C" id="a12" x3="2.395123" y3="-0.667957" z3="0.578726"/>
                        <atom elementType="C" id="a13" x3="1.129513" y3="-1.134741" z3="0.26032"/>
                        <atom elementType="H" id="a14" x3="-0.320625" y3="1.822665" z3="-0.562516"/>
                        <atom elementType="H" id="a15" x3="1.915869" y3="2.633032" z3="0.003768"/>
                        <atom elementType="H" id="a16" x3="3.666041" y3="1.049935" z3="0.736415"/>
                        <atom elementType="H" id="a17" x3="3.160261" y3="-1.36197" z3="0.899836"/>
                        <atom elementType="H" id="a18" x3="0.926044" y3="-2.194919" z3="0.340456"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a8" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a6" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a14" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a16" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a17" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a18" order="S"/>
                     </bondArray>
                     <formula concise="C7H5F5Si">
                        <atomArray count="7 5 5 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.1524159999999</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8908,-.6374,-2.1354;-1.5408,-.8744,-.5901;-1.6432,-2.4417,-.2692;-2.9271,-.0057,.4074;-2.9601,1.3109,.1303;-2.7006,-.1267,1.7238;-4.1488,-.493,.1646;.1328,-.2513,-.1587;.4319,1.111,-.2463;1.6965,1.5762,.0738;2.6782,.6863,.4859;2.3951,-.668,.5787;1.1295,-1.1347,.2603;-.3206,1.8227,-.5625;1.9159,2.633,.0038;3.666,1.0499,.7364;3.1603,-1.362,.8998;.926,-2.1949,.3405;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-1.894539" y3="-0.625441" z3="-2.138036"/>
                        <atom elementType="Si" id="a2" x3="-1.541039" y3="-0.872133" z3="-0.594854"/>
                        <atom elementType="F" id="a3" x3="-1.64183" y3="-2.442208" z3="-0.287783"/>
                        <atom elementType="C" id="a4" x3="-2.92477" y3="-0.010172" z3="0.41285"/>
                        <atom elementType="F" id="a5" x3="-2.955242" y3="1.309055" z3="0.147582"/>
                        <atom elementType="F" id="a6" x3="-2.696484" y3="-0.144068" z3="1.727788"/>
                        <atom elementType="F" id="a7" x3="-4.148198" y3="-0.492262" z3="0.168088"/>
                        <atom elementType="C" id="a8" x3="0.132142" y3="-0.249934" z3="-0.160573"/>
                        <atom elementType="C" id="a9" x3="0.433714" y3="1.111407" z3="-0.254087"/>
                        <atom elementType="C" id="a10" x3="1.698243" y3="1.576012" z3="0.066886"/>
                        <atom elementType="C" id="a11" x3="2.677047" y3="0.686748" z3="0.48687"/>
                        <atom elementType="C" id="a12" x3="2.39155" y3="-0.6665" z3="0.58604"/>
                        <atom elementType="C" id="a13" x3="1.126339" y3="-1.132939" z3="0.265488"/>
                        <atom elementType="H" id="a14" x3="-0.316546" y3="1.822593" z3="-0.576979"/>
                        <atom elementType="H" id="a15" x3="1.919914" y3="2.632048" z3="-0.008639"/>
                        <atom elementType="H" id="a16" x3="3.664733" y3="1.050153" z3="0.738592"/>
                        <atom elementType="H" id="a17" x3="3.154513" y3="-1.359931" z3="0.913512"/>
                        <atom elementType="H" id="a18" x3="0.920553" y3="-2.192326" z3="0.350357"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a8" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a6" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a14" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a16" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a17" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a18" order="S"/>
                     </bondArray>
                     <formula concise="C7H5F5Si">
                        <atomArray count="7 5 5 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.1524159999999</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8945,-.6254,-2.138;-1.541,-.8721,-.5949;-1.6418,-2.4422,-.2878;-2.9248,-.0102,.4128;-2.9552,1.3091,.1476;-2.6965,-.1441,1.7278;-4.1482,-.4923,.1681;.1321,-.2499,-.1606;.4337,1.1114,-.2541;1.6982,1.576,.0669;2.677,.6867,.4869;2.3916,-.6665,.586;1.1263,-1.1329,.2655;-.3165,1.8226,-.577;1.9199,2.632,-.0086;3.6647,1.0502,.7386;3.1545,-1.3599,.9135;.9206,-2.1923,.3504;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-1.894132" y3="-0.631079" z3="-2.138248"/>
                        <atom elementType="Si" id="a2" x3="-1.540958" y3="-0.873554" z3="-0.594261"/>
                        <atom elementType="F" id="a3" x3="-1.642307" y3="-2.442969" z3="-0.284216"/>
                        <atom elementType="C" id="a4" x3="-2.92417" y3="-0.00822" z3="0.411401"/>
                        <atom elementType="F" id="a5" x3="-2.954687" y3="1.310015" z3="0.141139"/>
                        <atom elementType="F" id="a6" x3="-2.694571" y3="-0.137166" z3="1.726595"/>
                        <atom elementType="F" id="a7" x3="-4.147926" y3="-0.491038" z3="0.169785"/>
                        <atom elementType="C" id="a8" x3="0.132024" y3="-0.250692" z3="-0.160263"/>
                        <atom elementType="C" id="a9" x3="0.432502" y3="1.111049" z3="-0.251703"/>
                        <atom elementType="C" id="a10" x3="1.696829" y3="1.576045" z3="0.0695"/>
                        <atom elementType="C" id="a11" x3="2.676592" y3="0.68678" z3="0.487242"/>
                        <atom elementType="C" id="a12" x3="2.392263" y3="-0.666876" z3="0.584097"/>
                        <atom elementType="C" id="a13" x3="1.127183" y3="-1.133667" z3="0.263617"/>
                        <atom elementType="H" id="a14" x3="-0.318524" y3="1.822232" z3="-0.572736"/>
                        <atom elementType="H" id="a15" x3="1.917636" y3="2.632395" z3="-0.004122"/>
                        <atom elementType="H" id="a16" x3="3.664143" y3="1.050514" z3="0.739019"/>
                        <atom elementType="H" id="a17" x3="3.15602" y3="-1.360306" z3="0.909708"/>
                        <atom elementType="H" id="a18" x3="0.922183" y3="-2.193363" z3="0.346546"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a8" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a6" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a14" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a16" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a17" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a18" order="S"/>
                     </bondArray>
                     <formula concise="C7H5F5Si">
                        <atomArray count="7 5 5 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.1524159999999</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8941,-.6311,-2.1382;-1.541,-.8736,-.5943;-1.6423,-2.443,-.2842;-2.9242,-.0082,.4114;-2.9547,1.31,.1411;-2.6946,-.1372,1.7266;-4.1479,-.491,.1698;.132,-.2507,-.1603;.4325,1.111,-.2517;1.6968,1.576,.0695;2.6766,.6868,.4872;2.3923,-.6669,.5841;1.1272,-1.1337,.2636;-.3185,1.8222,-.5727;1.9176,2.6324,-.0041;3.6641,1.0505,.739;3.156,-1.3603,.9097;.9222,-2.1934,.3465;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718061946926</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718252376115</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718283396121</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718246422418</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718251445219</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718265173525</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718260127691</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="18">-0.221318 0.662385 -0.223399 0.264676 -0.140891 -0.133942 -0.127627 -0.209307 -0.109696 -0.130043 -0.109868 -0.130797 -0.108720 0.144544 0.142498 0.142084 0.142140 0.147281</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="18">9.4362 12.7419 9.4432 5.2748 9.3131 9.3068 9.3008 6.2076 6.2635 6.2045 6.2231 6.2016 6.2629 0.7627 0.7675 0.7656 0.7683 0.7559</array>
                     <array dataType="xsd:double" dictRef="o:za" size="18">9.0000 14.0000 9.0000 6.0000 9.0000 9.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="18">-0.4362 1.2581 -0.4432 0.7252 -0.3131 -0.3068 -0.3008 -0.2076 -0.2635 -0.2045 -0.2231 -0.2016 -0.2629 0.2373 0.2325 0.2344 0.2317 0.2441</array>
                     <array dataType="xsd:double" dictRef="o:va" size="18">1.0085 3.8770 0.9994 3.8105 1.0910 1.0970 1.1051 3.6784 3.8303 3.8141 3.8134 3.8058 3.8377 0.9094 0.9066 0.9061 0.9069 0.9073</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="18">1.0085 3.8770 0.9994 3.8105 1.0910 1.0970 1.1051 3.6784 3.8303 3.8141 3.8134 3.8058 3.8377 0.9094 0.9066 0.9061 0.9069 0.9073</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="18">0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="18">0.9680 0.9358 0.8275 0.9023 0.9679 0.9718 0.9894 1.3664 1.3770 1.4486 0.9110 1.4147 0.9152 1.4219 0.9146 1.4355 0.9157 0.9078</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="18">0 1 1 2 1 3 1 7 3 4 3 5 3 6 7 8 7 12 8 9 8 13 9 10 9 14 10 11 10 15 11 12 11 16 12 17</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="18">-0.436159 1.258082 -0.443226 0.725173 -0.313111 -0.306842 -0.300803 -0.207588 -0.263480 -0.204485 -0.223093 -0.201594 -0.262914 0.237328 0.232548 0.234362 0.231707 0.244095</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="208">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="208">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="208" units="nonsi:electronvolt">-1819.1841 -683.9925 -683.9418 -683.9384 -683.3994 -683.3289 -290.7941 -285.0922 -285.0701 -284.9749 -284.9156 -284.8585 -284.8510 -152.7637 -106.3607 -106.2996 -106.2247 -39.3230 -36.8062 -36.7939 -36.4129 -35.9464 -26.6649 -23.4861 -23.4509 -21.6630 -19.4072 -19.1887 -18.5447 -18.1630 -18.1430 -17.0939 -16.5523 -15.7912 -15.0766 -14.8859 -14.8001 -14.7520 -14.6102 -14.5117 -14.1212 -13.8994 -13.7942 -13.6337 -13.6276 -13.1972 -13.1525 -12.1945 -11.5902 -11.4363 -10.3503 -8.7863 -8.6233 -0.7376 -0.0819 1.5327 2.3693 2.6970 3.9415 4.2063 4.8379 4.9777 5.3579 5.9878 6.2515 6.6011 6.8244 7.2072 7.7183 8.3869 8.4076 8.8162 9.0848 10.8414 11.8162 11.9995 12.4403 12.9837 13.6205 14.0956 14.6815 15.2664 15.4848 16.0815 16.2895 16.5360 16.6510 16.6693 17.0371 17.4280 17.7375 18.0783 18.7809 19.7204 20.4330 20.9306 21.2408 21.9016 22.4715 23.2929 24.1404 25.1226 25.5467 25.8033 26.1641 27.0181 27.4464 27.7414 28.0582 28.2272 28.7108 29.1519 29.2730 30.5806 30.9959 31.1365 31.2173 31.3547 32.0813 32.2731 32.5154 33.0031 33.0455 33.2514 33.3326 33.6191 33.7267 33.9691 34.0410 34.2084 34.3058 34.7993 34.9809 35.3416 35.6154 36.0599 36.5625 36.8701 37.2594 37.3012 37.7342 37.8263 38.4188 39.0220 39.8219 41.1474 41.3079 41.5140 42.0330 42.8040 43.9375 45.0176 45.8807 46.1631 47.0500 48.2633 49.0857 49.9304 50.4714 51.2889 51.4592 51.9145 54.8141 55.7243 55.8944 57.2114 57.5242 58.0396 59.2597 59.3977 59.6019 59.8544 59.9704 61.5133 61.9305 63.9137 64.1546 64.8040 67.9178 68.3384 68.6145 69.8425 71.3198 73.8467 74.4586 74.8355 75.2799 75.8446 76.7908 79.9752 80.3742 81.6355 81.8425 83.4356 85.1688 93.3520 360.4140 370.8554 371.6315 382.5743 383.5135 384.0440 395.4085 890.4521 890.8900 892.1485 894.4159 898.8370</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="-1.894458" y3="-0.633942" z3="-2.139015"/>
                  <atom elementType="Si" id="a2" x3="-1.541003" y3="-0.874177" z3="-0.594649"/>
                  <atom elementType="F" id="a3" x3="-1.642155" y3="-2.443451" z3="-0.284015"/>
                  <atom elementType="C" id="a4" x3="-2.923526" y3="-0.007647" z3="0.411044"/>
                  <atom elementType="F" id="a5" x3="-2.953524" y3="1.310289" z3="0.139135"/>
                  <atom elementType="F" id="a6" x3="-2.692613" y3="-0.135111" z3="1.726168"/>
                  <atom elementType="F" id="a7" x3="-4.147796" y3="-0.490049" z3="0.171412"/>
                  <atom elementType="C" id="a8" x3="0.131723" y3="-0.250781" z3="-0.160231"/>
                  <atom elementType="C" id="a9" x3="0.431971" y3="1.111065" z3="-0.2510"/>
                  <atom elementType="C" id="a10" x3="1.69622" y3="1.576121" z3="0.070392"/>
                  <atom elementType="C" id="a11" x3="2.676208" y3="0.686834" z3="0.487573"/>
                  <atom elementType="C" id="a12" x3="2.392144" y3="-0.66693" z3="0.583728"/>
                  <atom elementType="C" id="a13" x3="1.127139" y3="-1.133737" z3="0.263085"/>
                  <atom elementType="H" id="a14" x3="-0.319166" y3="1.822344" z3="-0.571525"/>
                  <atom elementType="H" id="a15" x3="1.916848" y3="2.632546" z3="-0.002657"/>
                  <atom elementType="H" id="a16" x3="3.663708" y3="1.050636" z3="0.739443"/>
                  <atom elementType="H" id="a17" x3="3.156076" y3="-1.360389" z3="0.908864"/>
                  <atom elementType="H" id="a18" x3="0.922305" y3="-2.193522" z3="0.345349"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a8" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a4 a6" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a11 a16" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a17" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
               </bondArray>
               <formula concise="C7H5F5Si">
                  <atomArray count="7 5 5 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">207.1524159999999</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C7H5F5Si/c8-7(9,10)13(11,12)6-4-2-1-3-5-6/h1-5H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:11,10,12,9,13,8,4,5,6,7,1,3,2/E:(2,3)(4,5)(8,9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3/rA:18nFSiFCFFFC3C3C3C3C3C3HHHHH/rB:s1;s2;s2;s4;s4;s4;s2;s8;s9;s10;s11;s8s12;s9;s10;s11;s12;s13;/rC:-1.8945,-.6339,-2.139;-1.541,-.8742,-.5946;-1.6422,-2.4435,-.284;-2.9235,-.0076,.411;-2.9535,1.3103,.1391;-2.6926,-.1351,1.7262;-4.1478,-.49,.1714;.1317,-.2508,-.1602;.432,1.1111,-.251;1.6962,1.5761,.0704;2.6762,.6868,.4876;2.3921,-.6669,.5837;1.1271,-1.1337,.2631;-.3192,1.8223,-.5715;1.9168,2.6325,-.0027;3.6637,1.0506,.7394;3.1561,-1.3604,.9089;.9223,-2.1935,.3453;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1056.74693125</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">953.53847119</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2010.28540243</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-3358.28948268</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1348.00408025</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-2107.89549417</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">1051.14856292</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00532595</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">52.999999007555</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">52.999999007555</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">105.999998015111</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-60.926033103038</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-4.901244021786</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-65.827277124823</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010547939</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010546430</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010556486</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010565996</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010564708</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010564246</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010565405</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="208">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="208">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="208" units="nonsi:electronvolt">-1819.1603 -684.0036 -683.9473 -683.9437 -683.3984 -683.2987 -290.7937 -285.0933 -285.0740 -284.9802 -284.9011 -284.8640 -284.8561 -152.7430 -106.3413 -106.2765 -106.2045 -39.3334 -36.8199 -36.8064 -36.4094 -35.9246 -26.6682 -23.4890 -23.4565 -21.6614 -19.4094 -19.1969 -18.5379 -18.1743 -18.1522 -17.0917 -16.5587 -15.7725 -15.0719 -14.8929 -14.8057 -14.7489 -14.6143 -14.5159 -14.1029 -13.9034 -13.8005 -13.6414 -13.6157 -13.2068 -13.1528 -12.2010 -11.5903 -11.4428 -10.3296 -8.7871 -8.6285 -0.7401 -0.0875 1.5486 2.4042 2.7288 3.9371 4.2218 4.8485 4.9804 5.3620 5.9549 6.2669 6.5917 6.8272 7.2358 7.7174 8.3999 8.4063 8.8170 9.0726 10.8292 11.8629 12.0282 12.4576 12.9577 13.6160 14.1038 14.6810 15.2890 15.4688 16.0808 16.2795 16.5275 16.6523 16.6654 17.0083 17.4440 17.7167 18.0723 18.7885 19.7079 20.4461 20.8806 21.2588 21.9107 22.4743 23.3661 24.2156 25.1435 25.5368 25.8218 26.1583 27.0150 27.4301 27.7299 28.0484 28.2106 28.6971 29.1585 29.2394 30.5658 30.9771 31.1559 31.2772 31.3764 32.0949 32.2870 32.5434 33.0236 33.0843 33.1866 33.3713 33.5591 33.6626 33.8947 34.0522 34.1714 34.2855 34.7881 35.0033 35.4612 35.6838 36.0540 36.6624 36.8467 37.2849 37.3190 37.7219 37.8707 38.4268 39.2184 39.8487 41.1214 41.3335 41.5132 42.0117 42.8541 43.9102 45.0489 45.8517 46.1457 47.1631 48.2646 48.9633 50.0242 50.5077 51.2436 51.4749 51.8689 54.8563 55.6819 55.8784 57.2135 57.5585 58.0563 59.2394 59.4235 59.6017 59.8395 59.9563 61.4965 61.9873 63.9370 64.1447 64.7951 67.9834 68.3433 68.6117 69.8379 71.3151 73.8469 74.4662 74.8582 75.2689 75.8165 76.7995 79.9029 80.5294 81.6092 81.8499 83.4359 85.2196 93.3614 360.4251 370.8559 371.6388 382.6255 383.5417 384.0374 395.4229 890.3747 890.9979 892.2625 894.4054 898.8519</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="18">-0.437012 1.257880 -0.443258 0.723963 -0.313280 -0.306282 -0.300279 -0.207462 -0.262727 -0.205704 -0.222261 -0.202491 -0.262125 0.238262 0.232538 0.234338 0.231724 0.244176</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="18">-0.222009 0.661006 -0.223201 0.264031 -0.140909 -0.133258 -0.127217 -0.209555 -0.109273 -0.129802 -0.109756 -0.130621 -0.108732 0.145082 0.142531 0.142110 0.142194 0.147379</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F Si F C F F F C C C C C C H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="18">9.4370 12.7421 9.4433 5.2760 9.3133 9.3063 9.3003 6.2075 6.2627 6.2057 6.2223 6.2025 6.2621 0.7617 0.7675 0.7657 0.7683 0.7558</array>
                     <array dataType="xsd:double" dictRef="o:za" size="18">9.0000 14.0000 9.0000 6.0000 9.0000 9.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="18">-0.4370 1.2579 -0.4433 0.7240 -0.3133 -0.3063 -0.3003 -0.2075 -0.2627 -0.2057 -0.2223 -0.2025 -0.2621 0.2383 0.2325 0.2343 0.2317 0.2442</array>
                     <array dataType="xsd:double" dictRef="o:va" size="18">1.0070 3.8779 0.9994 3.8111 1.0912 1.0977 1.1058 3.6799 3.8308 3.8139 3.8127 3.8061 3.8360 0.9094 0.9067 0.9061 0.9070 0.9072</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="18">1.0070 3.8779 0.9994 3.8111 1.0912 1.0977 1.1058 3.6799 3.8308 3.8139 3.8127 3.8061 3.8360 0.9094 0.9067 0.9061 0.9070 0.9072</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="18">0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="18">0.9661 0.9364 0.8276 0.9041 0.9674 0.9719 0.9904 1.3667 1.3769 1.4481 0.9104 1.4144 0.9152 1.4220 0.9147 1.4349 0.9157 0.9078</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="18">0 1 1 2 1 3 1 7 3 4 3 5 3 6 7 8 7 12 8 9 8 13 9 10 9 14 10 11 10 15 11 12 11 16 12 17</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010566100</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1056.718257650100</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">21.20263 -19.89384 1.30879 4.09757 -3.79862 0.29895 1.72355 -1.56032 0.16323</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.35238</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.43748</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
