<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">C N Si F F N C C H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="18">1 2 3 4 4 2 1 1 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="C" id="a1" x3="2.283897" y3="0.87742" z3="0.025809"/>
                  <atom elementType="N" id="a2" x3="1.79345" y3="-0.430605" z3="0.399499"/>
                  <atom elementType="Si" id="a3" x3="0.419914" y3="-1.174628" z3="-0.263266"/>
                  <atom elementType="F" id="a4" x3="0.515213" y3="-1.536749" z3="-1.831683"/>
                  <atom elementType="F" id="a5" x3="0.334175" y3="-2.614965" z3="0.455973"/>
                  <atom elementType="N" id="a6" x3="-0.941913" y3="-0.172364" z3="-0.096995"/>
                  <atom elementType="C" id="a7" x3="-1.140886" y3="0.667819" z3="1.06149"/>
                  <atom elementType="C" id="a8" x3="-2.102266" y3="-0.250537" z3="-0.954212"/>
                  <atom elementType="H" id="a9" x3="1.479983" y3="1.460852" z3="-0.421768"/>
                  <atom elementType="H" id="a10" x3="2.636984" y3="1.434781" z3="0.895895"/>
                  <atom elementType="H" id="a11" x3="3.099637" y3="0.836821" z3="-0.701333"/>
                  <atom elementType="H" id="a12" x3="2.472213" y3="-1.005079" z3="0.872114"/>
                  <atom elementType="H" id="a13" x3="-1.970028" y3="0.317156" z3="1.68552"/>
                  <atom elementType="H" id="a14" x3="-1.368963" y3="1.696586" z3="0.762891"/>
                  <atom elementType="H" id="a15" x3="-0.245631" y3="0.692823" z3="1.679949"/>
                  <atom elementType="H" id="a16" x3="-1.919483" y3="-0.893445" z3="-1.812065"/>
                  <atom elementType="H" id="a17" x3="-2.973922" y3="-0.64481" z3="-0.420577"/>
                  <atom elementType="H" id="a18" x3="-2.372476" y3="0.738824" z3="-1.337141"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a12" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a5" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a6" order="S"/>
                  <bond atomRefs2="a6 a8" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a13" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a7 a14" order="S"/>
                  <bond atomRefs2="a8 a17" order="S"/>
                  <bond atomRefs2="a8 a16" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
               </bondArray>
               <formula concise="C3H10F2N2Si">
                  <atomArray count="3 10 2 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">130.1278064</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C3H10F2N2Si/c1-6-8(4,5)7(2)3/h6H,1-3H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,8,4,5,2,6,3/E:(2,3)(4,5)/rA:18nCNSiFFNCCHHHHHHHHHH/rB:s1;s2;s3;s3;s3;s6;s6;s1;s1;s1;s2;s7;s7;s7;s8;s8;s8;/rC:2.2839,.8774,.0258;1.7934,-.4306,.3995;.4199,-1.1746,-.2633;.5152,-1.5367,-1.8317;.3342,-2.615,.456;-.9419,-.1724,-.097;-1.1409,.6678,1.0615;-2.1023,-.2505,-.9542;1.48,1.4609,-.4218;2.637,1.4348,.8959;3.0996,.8368,-.7013;2.4722,-1.0051,.8721;-1.97,.3172,1.6855;-1.369,1.6966,.7629;-.2456,.6928,1.6799;-1.9195,-.8934,-1.8121;-2.9739,-.6448,-.4206;-2.3725,.7388,-1.3371;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">504</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">504</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C3F2H10N2Si_hess_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">74</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">143</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">526.9289103565 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-10 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-11 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-03 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.061e-02</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.002 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="C" id="a1" x3="2.28389721" y3="0.87741976" z3="0.02580876">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="N" id="a2" x3="1.79345021" y3="-0.43060511" z3="0.39949878">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="Si" id="a3" x3="0.41991441" y3="-1.17462801" z3="-0.26326609">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a4" x3="0.51521313" y3="-1.5367491" z3="-1.83168286">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F" id="a5" x3="0.33417509" y3="-2.61496528" z3="0.45597346">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a6" x3="-0.94191252" y3="-0.17236388" z3="-0.09699486">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-1.14088591" y3="0.66781948" z3="1.06149008">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-2.10226569" y3="-0.25053734" z3="-0.95421245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a9" x3="1.47998315" y3="1.4608516" z3="-0.42176812">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a10" x3="2.63698398" y3="1.43478122" z3="0.89589533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a11" x3="3.09963694" y3="0.83682128" z3="-0.70133297">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a12" x3="2.47221329" y3="-1.00507929" z3="0.87211396">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="-1.97002812" y3="0.31715622" z3="1.68552039">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-1.36896318" y3="1.69658614" z3="0.76289142">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="-0.2456312" y3="0.69282333" z3="1.67994882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-1.91948319" y3="-0.89344505" z3="-1.81206541">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-2.97392182" y3="-0.64480981" z3="-0.42057747">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="-2.37247579" y3="0.73882382" z3="-1.33714076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a12" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a3 a5" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a3 a6" order="S"/>
                           <bond atomRefs2="a6 a8" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a13" order="S"/>
                           <bond atomRefs2="a7 a15" order="S"/>
                           <bond atomRefs2="a7 a14" order="S"/>
                           <bond atomRefs2="a8 a17" order="S"/>
                           <bond atomRefs2="a8 a16" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                        </bondArray>
                        <formula concise="C3H10F2N2Si">
                           <atomArray count="3 10 2 2 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">130.1278064</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C3H10F2N2Si/c1-6-8(4,5)7(2)3/h6H,1-3H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,8,4,5,2,6,3/E:(2,3)(4,5)/rA:18nCNSiFFNCCHHHHHHHHHH/rB:s1;s2;s3;s3;s3;s6;s6;s1;s1;s1;s2;s7;s7;s7;s8;s8;s8;/rC:2.2839,.8774,.0258;1.7935,-.4306,.3995;.4199,-1.1746,-.2633;.5152,-1.5367,-1.8317;.3342,-2.615,.456;-.9419,-.1724,-.097;-1.1409,.6678,1.0615;-2.1023,-.2505,-.9542;1.48,1.4609,-.4218;2.637,1.4348,.8959;3.0996,.8368,-.7013;2.4722,-1.0051,.8721;-1.97,.3172,1.6855;-1.369,1.6966,.7629;-.2456,.6928,1.6799;-1.9195,-.8934,-1.8121;-2.9739,-.6448,-.4206;-2.3725,.7388,-1.3371;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Freq RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="vibrations" dictRef="cc:vibrations">
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                  </module>
               </property>
               <property dictRef="cc:irspectrum">
                  <module cmlx:templateRef="irspectrum">
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                     <matrix cols="3" dataType="xsd:double" dictRef="cc:displacement" rows="48">0.001643 -0.016814 0.018518 0.000598 -0.033096 -0.017253 -0.004076 -0.009846 0.025869 0.007312 -0.005591 -0.013614 0.001113 -0.015705 0.000630 0.004372 -0.007173 0.002483 0.017492 -0.003833 0.013582 -0.013741 0.003985 -0.004980 -0.017949 -0.005523 -0.010026 -0.011141 0.050618 0.002775 -0.064453 -0.015614 0.005765 0.017073 -0.005236 0.049741 0.055893 -0.003300 -0.004584 -0.037366 -0.031300 0.040556 -0.033061 0.044832 0.103395 -0.015273 0.000139 0.004526 0.097774 -0.023948 -0.016469 0.025124 0.095575 0.022695 0.014101 -0.020034 0.097156 -0.088006 0.048398 0.013029 0.006326 0.007775 0.013028 0.008251 -0.029187 0.012253 0.000255 -0.002448 0.000495 0.006983 0.004582 0.005112 -0.052590 -0.055316 -0.003452 0.001309 -0.005059 0.003275 -0.027547 -0.023974 -0.051797 -0.051124 0.030473 0.006229 0.030734 0.047428 0.002494 -0.006482 -0.004867 -0.001428 0.008833 0.006993 0.001217 0.005513 0.000157 0.003839 -0.003179 0.002085 0.000751 0.010667 0.013130 -0.014780 0.003544 0.017284 -0.002369 0.009303 0.009117 0.024646 -0.015831 0.002360 -0.010688 0.013251 -0.011688 -0.002745 0.000608 -0.016129 -0.024640 0.040333 -0.011530 -0.001047 0.023025 0.025255 -0.005882 -0.012885 -0.028922 0.020081 0.000764 0.006928 -0.004813 -0.007601 0.011186 0.020915 -0.018518 0.002244 -0.008773 0.013153 -0.001151 0.006681 -0.003635 0.009078 0.009942 0.019060 -0.010367 0.012266</matrix>
                  </module>
               </property>
            </propertyList>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="C" id="a1" x3="2.283897" y3="0.87742" z3="0.025809"/>
                  <atom elementType="N" id="a2" x3="1.79345" y3="-0.430605" z3="0.399499"/>
                  <atom elementType="Si" id="a3" x3="0.419914" y3="-1.174628" z3="-0.263266"/>
                  <atom elementType="F" id="a4" x3="0.515213" y3="-1.536749" z3="-1.831683"/>
                  <atom elementType="F" id="a5" x3="0.334175" y3="-2.614965" z3="0.455973"/>
                  <atom elementType="N" id="a6" x3="-0.941913" y3="-0.172364" z3="-0.096995"/>
                  <atom elementType="C" id="a7" x3="-1.140886" y3="0.667819" z3="1.06149"/>
                  <atom elementType="C" id="a8" x3="-2.102266" y3="-0.250537" z3="-0.954212"/>
                  <atom elementType="H" id="a9" x3="1.479983" y3="1.460852" z3="-0.421768"/>
                  <atom elementType="H" id="a10" x3="2.636984" y3="1.434781" z3="0.895895"/>
                  <atom elementType="H" id="a11" x3="3.099637" y3="0.836821" z3="-0.701333"/>
                  <atom elementType="H" id="a12" x3="2.472213" y3="-1.005079" z3="0.872114"/>
                  <atom elementType="H" id="a13" x3="-1.970028" y3="0.317156" z3="1.68552"/>
                  <atom elementType="H" id="a14" x3="-1.368963" y3="1.696586" z3="0.762891"/>
                  <atom elementType="H" id="a15" x3="-0.245631" y3="0.692823" z3="1.679949"/>
                  <atom elementType="H" id="a16" x3="-1.919483" y3="-0.893445" z3="-1.812065"/>
                  <atom elementType="H" id="a17" x3="-2.973922" y3="-0.64481" z3="-0.420577"/>
                  <atom elementType="H" id="a18" x3="-2.372476" y3="0.738824" z3="-1.337141"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a12" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a5" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a6" order="S"/>
                  <bond atomRefs2="a6 a8" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a13" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a7 a14" order="S"/>
                  <bond atomRefs2="a8 a17" order="S"/>
                  <bond atomRefs2="a8 a16" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
               </bondArray>
               <formula concise="C3H10F2N2Si">
                  <atomArray count="3 10 2 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">130.1278064</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C3H10F2N2Si/c1-6-8(4,5)7(2)3/h6H,1-3H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,8,4,5,2,6,3/E:(2,3)(4,5)/rA:18nCNSiFFNCCHHHHHHHHHH/rB:s1;s2;s3;s3;s3;s6;s6;s1;s1;s1;s2;s7;s7;s7;s8;s8;s8;/rC:2.2839,.8774,.0258;1.7934,-.4306,.3995;.4199,-1.1746,-.2633;.5152,-1.5367,-1.8317;.3342,-2.615,.456;-.9419,-.1724,-.097;-1.1409,.6678,1.0615;-2.1023,-.2505,-.9542;1.48,1.4609,-.4218;2.637,1.4348,.8959;3.0996,.8368,-.7013;2.4722,-1.0051,.8721;-1.97,.3172,1.6855;-1.369,1.6966,.7629;-.2456,.6928,1.6799;-1.9195,-.8934,-1.8121;-2.9739,-.6448,-.4206;-2.3725,.7388,-1.3371;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-717.99911945</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">526.92891036</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1244.92802981</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-2038.46049873</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">793.53246892</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1432.19464217</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">714.19552272</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00532571</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">36.999951774511</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">36.999951774511</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">73.999903549022</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-40.818385555723</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-3.374952632522</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-44.193338188245</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="143">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="143">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="143" units="nonsi:electronvolt">-1818.4629 -682.2030 -682.1936 -398.1422 -397.9692 -284.7865 -284.6549 -284.6174 -151.8877 -105.4839 -105.4415 -105.4004 -35.3173 -34.7677 -27.4086 -26.6205 -21.6494 -20.5627 -19.4399 -16.7920 -15.4397 -15.0273 -14.8378 -14.2080 -13.9749 -13.8736 -13.3855 -13.2882 -12.9303 -12.7785 -12.5151 -12.1621 -11.7346 -11.5707 -11.1132 -8.1938 -7.6737 2.6574 3.6391 3.9733 4.0782 4.9131 5.1666 5.2872 5.5530 5.7243 5.9867 6.0532 6.2454 6.3884 7.0538 7.2617 7.4831 7.8820 9.5927 12.1076 12.4070 12.9393 13.7625 14.1060 14.6613 15.2138 15.6673 16.4115 16.9006 17.6605 18.0818 18.8063 19.9184 21.7735 22.9258 23.3022 24.5557 25.6491 26.4377 26.9458 27.4099 27.5020 27.8150 27.9665 28.3232 28.4338 28.7677 29.1681 29.4657 29.8033 30.3969 31.5605 32.0063 32.3838 33.5414 34.3343 34.7031 35.1175 35.6281 36.2268 36.5624 37.4914 38.0954 38.2771 39.4740 40.4632 40.7826 41.3107 41.4613 42.6302 44.0243 45.4981 47.3843 48.4536 49.3418 49.7588 51.7286 53.2343 54.5598 55.1240 57.1025 57.5522 57.9518 58.3193 59.0501 59.8567 61.9726 63.0370 63.6938 64.2467 66.2092 66.7974 69.2125 69.9822 71.4034 73.6786 74.4252 77.2917 81.1380 82.2507 372.9727 373.6568 376.3021 521.1669 524.0150 892.8737 893.3879</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">C N Si F F N C C H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="18">-0.482255 -0.747622 1.371556 -0.464868 -0.462334 -0.551996 -0.489529 -0.487564 0.224576 0.213315 0.216500 0.357608 0.210238 0.205459 0.234347 0.238623 0.206269 0.207677</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="18">C N Si F F N C C H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="18">-0.257651 -0.407543 0.605953 -0.247301 -0.247644 -0.278053 -0.250821 -0.249000 0.130729 0.114997 0.112889 0.254489 0.111866 0.111916 0.134754 0.136041 0.111203 0.113175</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">C N Si F F N C C H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="18">6.4823 7.7476 12.6284 9.4649 9.4623 7.5520 6.4895 6.4876 0.7754 0.7867 0.7835 0.6424 0.7898 0.7945 0.7657 0.7614 0.7937 0.7923</array>
                     <array dataType="xsd:double" dictRef="o:za" size="18">6.0000 7.0000 14.0000 9.0000 9.0000 7.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="18">-0.4823 -0.7476 1.3716 -0.4649 -0.4623 -0.5520 -0.4895 -0.4876 0.2246 0.2133 0.2165 0.3576 0.2102 0.2055 0.2343 0.2386 0.2063 0.2077</array>
                     <array dataType="xsd:double" dictRef="o:va" size="18">3.7353 2.9100 4.0383 0.9557 0.9599 3.0370 3.7080 3.7115 0.9144 0.9071 0.9027 0.8386 0.9066 0.9098 0.9186 0.9164 0.9072 0.9090</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="18">3.7353 2.9100 4.0383 0.9557 0.9599 3.0370 3.7080 3.7115 0.9144 0.9071 0.9027 0.8386 0.9066 0.9098 0.9186 0.9164 0.9072 0.9090</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="18">-0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="17">0.9693 0.9204 0.9205 0.9152 1.0795 0.8245 0.9032 0.9187 1.0650 0.9751 0.9730 0.9103 0.9142 0.9179 0.9204 0.9114 0.9140</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="17">0 1 0 8 0 9 0 10 1 2 1 11 2 3 2 4 2 5 5 6 5 7 6 12 6 13 6 14 7 15 7 16 7 17</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.008749547</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-717.973829489024</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-3.34585 3.46188 0.11603 13.59985 -12.68685 0.91300 3.83364 -3.41610 0.41754</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.01063</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.56881</scalar>
               </module>
               <module cmlx:templateRef="thermochemistry" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:totalmass">140.21</scalar>
               </module>
               <module cmlx:templateRef="innerenergy" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="contributions">
                     <scalar dataType="xsd:double" dictRef="o:electronic" units="nonsi:hartree">-717.97382949</scalar>
                     <scalar dataType="xsd:double" dictRef="o:zeropoint" units="nonsi:hartree">0.14906276</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalvibcorrection" units="nonsi:hartree">0.00800378</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalrotcorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltrasncorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltotal" units="nonsi:hartree">-717.81393040</scalar>
                  </module>
                  <module cmlx:templateRef="corrections">
                     <scalar dataType="xsd:double" dictRef="o:thermalcorr" units="nonsi:hartree">0.01083632</scalar>
                     <scalar dataType="xsd:double" dictRef="o:nonthermalcorr" units="nonsi:hartree">0.14906276</scalar>
                     <scalar dataType="xsd:double" dictRef="o:totalcorr" units="nonsi:hartree">0.15989909</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="enthalpy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalfree" units="nonsi:hartree">-717.81393040</scalar>
                  <scalar dataType="xsd:double" dictRef="o:thermalcorrenthalpy" units="nonsi:hartree">0.00094421</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-717.81298619</scalar>
               </module>
               <module cmlx:templateRef="entropy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:elect" units="nonsi:hartree">0.00000000</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:vibrat" units="nonsi:hartree">0.01415758</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rotat" units="nonsi:hartree">0.01377403</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:transl" units="nonsi:hartree">0.01934989</scalar>
                  <scalar dataType="xsd:double" dictRef="o:total" units="nonsi:hartree">0.04728150</scalar>
               </module>
               <module cmlx:templateRef="gibbs" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-717.81298619</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalentropycorr" units="nonsi:hartree">-0.04728150</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsenthalpy" units="nonsi:hartree">-717.86026769</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsminuselec" units="nonsi:hartree">0.11356180</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
