<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="44">1 2 2 2 2 3 4 1 2 2 2 2 2 2 2 2 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="N" id="a1" x3="1.753426" y3="0.096077" z3="0.036395"/>
                  <atom elementType="C" id="a2" x3="3.127407" y3="0.320114" z3="0.581564"/>
                  <atom elementType="C" id="a3" x3="3.376446" y3="-0.610989" z3="1.763811"/>
                  <atom elementType="C" id="a4" x3="4.09922" y3="-0.004684" z3="-0.549542"/>
                  <atom elementType="C" id="a5" x3="3.271628" y3="1.781046" z3="0.995214"/>
                  <atom elementType="Si" id="a6" x3="0.259302" y3="0.181507" z3="0.728621"/>
                  <atom elementType="F" id="a7" x3="0.307817" y3="0.527589" z3="2.273826"/>
                  <atom elementType="N" id="a8" x3="-1.175325" y3="-0.087235" z3="-0.061738"/>
                  <atom elementType="C" id="a9" x3="-1.577401" y3="-1.516708" z3="-0.238665"/>
                  <atom elementType="C" id="a10" x3="-3.066664" y3="-1.751803" z3="-0.013971"/>
                  <atom elementType="C" id="a11" x3="-1.156531" y3="-2.022011" z3="-1.617893"/>
                  <atom elementType="C" id="a12" x3="-0.817011" y3="-2.306304" z3="0.832171"/>
                  <atom elementType="C" id="a13" x3="-1.92784" y3="1.131905" z3="-0.48875"/>
                  <atom elementType="C" id="a14" x3="-0.944355" y3="2.299381" z3="-0.347341"/>
                  <atom elementType="C" id="a15" x3="-3.126376" y3="1.409052" z3="0.420408"/>
                  <atom elementType="C" id="a16" x3="-2.361472" y3="1.05338" z3="-1.948271"/>
                  <atom elementType="H" id="a17" x3="1.740304" y3="-0.101513" z3="-0.956605"/>
                  <atom elementType="H" id="a18" x3="2.719952" y3="-0.395114" z3="2.606665"/>
                  <atom elementType="H" id="a19" x3="4.398777" y3="-0.490484" z3="2.121051"/>
                  <atom elementType="H" id="a20" x3="3.248514" y3="-1.655669" z3="1.478301"/>
                  <atom elementType="H" id="a21" x3="4.009446" y3="-1.043475" z3="-0.871839"/>
                  <atom elementType="H" id="a22" x3="5.12435" y3="0.144117" z3="-0.214639"/>
                  <atom elementType="H" id="a23" x3="3.94432" y3="0.64514" z3="-1.413248"/>
                  <atom elementType="H" id="a24" x3="4.285056" y3="1.97509" z3="1.345969"/>
                  <atom elementType="H" id="a25" x3="3.0797" y3="2.451881" z3="0.156926"/>
                  <atom elementType="H" id="a26" x3="2.595716" y3="2.043303" z3="1.810646"/>
                  <atom elementType="H" id="a27" x3="-3.265638" y3="-2.821707" z3="-0.079723"/>
                  <atom elementType="H" id="a28" x3="-3.688819" y3="-1.272366" z3="-0.767427"/>
                  <atom elementType="H" id="a29" x3="-3.389367" y3="-1.418074" z3="0.97132"/>
                  <atom elementType="H" id="a30" x3="-1.39882" y3="-3.079419" z3="-1.727105"/>
                  <atom elementType="H" id="a31" x3="-1.657147" y3="-1.49118" z3="-2.42416"/>
                  <atom elementType="H" id="a32" x3="-0.079399" y3="-1.918574" z3="-1.765014"/>
                  <atom elementType="H" id="a33" x3="0.27826" y3="-2.219948" z3="0.731375"/>
                  <atom elementType="H" id="a34" x3="-1.11907" y3="-2.026787" z3="1.84397"/>
                  <atom elementType="H" id="a35" x3="-0.998327" y3="-3.376551" z3="0.731154"/>
                  <atom elementType="H" id="a36" x3="-0.086307" y3="2.217544" z3="-1.019366"/>
                  <atom elementType="H" id="a37" x3="-0.600266" y3="2.451373" z3="0.690174"/>
                  <atom elementType="H" id="a38" x3="-1.430494" y3="3.244405" z3="-0.590594"/>
                  <atom elementType="H" id="a39" x3="-3.925176" y3="0.684082" z3="0.294326"/>
                  <atom elementType="H" id="a40" x3="-2.835699" y3="1.414843" z3="1.471539"/>
                  <atom elementType="H" id="a41" x3="-3.547558" y3="2.387139" z3="0.186659"/>
                  <atom elementType="H" id="a42" x3="-2.828964" y3="1.994845" z3="-2.238062"/>
                  <atom elementType="H" id="a43" x3="-1.516701" y3="0.884729" z3="-2.616309"/>
                  <atom elementType="H" id="a44" x3="-3.099015" y3="0.272053" z3="-2.121722"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a17" order="S"/>
                  <bond atomRefs2="a1 a6" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a5" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a19" order="S"/>
                  <bond atomRefs2="a3 a18" order="S"/>
                  <bond atomRefs2="a3 a20" order="S"/>
                  <bond atomRefs2="a4 a22" order="S"/>
                  <bond atomRefs2="a4 a21" order="S"/>
                  <bond atomRefs2="a4 a23" order="S"/>
                  <bond atomRefs2="a5 a24" order="S"/>
                  <bond atomRefs2="a5 a26" order="S"/>
                  <bond atomRefs2="a5 a25" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a8" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a11" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a29" order="S"/>
                  <bond atomRefs2="a10 a28" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a31" order="S"/>
                  <bond atomRefs2="a11 a32" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a34" order="S"/>
                  <bond atomRefs2="a12 a35" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a16" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a38" order="S"/>
                  <bond atomRefs2="a14 a37" order="S"/>
                  <bond atomRefs2="a14 a36" order="S"/>
                  <bond atomRefs2="a15 a40" order="S"/>
                  <bond atomRefs2="a15 a41" order="S"/>
                  <bond atomRefs2="a15 a39" order="S"/>
                  <bond atomRefs2="a16 a44" order="S"/>
                  <bond atomRefs2="a16 a42" order="S"/>
                  <bond atomRefs2="a16 a43" order="S"/>
               </bondArray>
               <formula concise="C12H28FN2Si">
                  <atomArray count="12 28 1 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">219.22570319999988</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C12H28FN2Si/c1-10(2,3)14-16(13)15(11(4,5)6)12(7,8)9/h14H,1-9H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:3,4,5,10,11,12,14,15,16,2,9,13,7,1,8,6/E:(1,2,3)(4,5,6,7,8,9)(11,12)/CRV:16.3/rA:44nNCCCCSi3FNCCCCCCCCHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s2;s2;s1;s6;s6;s8;s9;s9;s9;s8;s13;s13;s13;s1;s3;s3;s3;s4;s4;s4;s5;s5;s5;s10;s10;s10;s11;s11;s11;s12;s12;s12;s14;s14;s14;s15;s15;s15;s16;s16;s16;/rC:1.7534,.0961,.0364;3.1274,.3201,.5816;3.3764,-.611,1.7638;4.0992,-.0047,-.5495;3.2716,1.781,.9952;.2593,.1815,.7286;.3078,.5276,2.2738;-1.1753,-.0872,-.0617;-1.5774,-1.5167,-.2387;-3.0667,-1.7518,-.014;-1.1565,-2.022,-1.6179;-.817,-2.3063,.8322;-1.9278,1.1319,-.4888;-.9444,2.2994,-.3473;-3.1264,1.4091,.4204;-2.3615,1.0534,-1.9483;1.7403,-.1015,-.9566;2.72,-.3951,2.6067;4.3988,-.4905,2.1211;3.2485,-1.6557,1.4783;4.0094,-1.0435,-.8718;5.1243,.1441,-.2146;3.9443,.6451,-1.4132;4.2851,1.9751,1.346;3.0797,2.4519,.1569;2.5957,2.0433,1.8106;-3.2656,-2.8217,-.0797;-3.6888,-1.2724,-.7674;-3.3894,-1.4181,.9713;-1.3988,-3.0794,-1.7271;-1.6571,-1.4912,-2.4242;-.0794,-1.9186,-1.765;.2783,-2.2199,.7314;-1.1191,-2.0268,1.844;-.9983,-3.3766,.7312;-.0863,2.2175,-1.0194;-.6003,2.4514,.6902;-1.4305,3.2444,-.5906;-3.9252,.6841,.2943;-2.8357,1.4148,1.4715;-3.5476,2.3871,.1867;-2.829,1.9948,-2.2381;-1.5167,.8847,-2.6163;-3.099,.2721,-2.1217;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1094</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1094</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C12FH28N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">136</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">299</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1462.5298001935 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.849e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.014 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.025 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1094</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1094</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C12FH28N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">136</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">299</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1462.5195717360 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.846e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.014 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.025 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="N" id="a1" x3="1.75342633" y3="0.09607689" z3="0.03639462">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a2" x3="3.12740717" y3="0.32011382" z3="0.58156416">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a3" x3="3.37644635" y3="-0.61098869" z3="1.76381097">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="4.09921999" y3="-0.00468445" z3="-0.54954169">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="3.27162788" y3="1.78104604" z3="0.99521431">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="Si" id="a6" x3="0.25930202" y3="0.18150714" z3="0.72862141">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a7" x3="0.30781659" y3="0.52758851" z3="2.27382595">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a8" x3="-1.17532512" y3="-0.08723532" z3="-0.06173752">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="-1.57740085" y3="-1.51670776" z3="-0.23866468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="-3.06666428" y3="-1.75180297" z3="-0.01397133">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="-1.15653128" y3="-2.02201077" z3="-1.61789304">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a12" x3="-0.81701122" y3="-2.30630409" z3="0.83217051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a13" x3="-1.92783989" y3="1.13190479" z3="-0.48875028">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a14" x3="-0.94435511" y3="2.29938101" z3="-0.34734145">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a15" x3="-3.12637571" y3="1.40905208" z3="0.42040767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a16" x3="-2.36147212" y3="1.05338004" z3="-1.94827123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="1.74030401" y3="-0.10151293" z3="-0.95660467">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="2.71995152" y3="-0.39511366" z3="2.60666465">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a19" x3="4.39877744" y3="-0.49048357" z3="2.12105109">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a20" x3="3.2485143" y3="-1.65566904" z3="1.47830074">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a21" x3="4.00944603" y3="-1.04347496" z3="-0.87183949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a22" x3="5.12434999" y3="0.14411661" z3="-0.21463887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a23" x3="3.94432019" y3="0.64514006" z3="-1.4132483">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a24" x3="4.28505593" y3="1.97509014" z3="1.34596873">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a25" x3="3.07970011" y3="2.45188104" z3="0.15692586">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a26" x3="2.59571557" y3="2.0433028" z3="1.81064566">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a27" x3="-3.26563818" y3="-2.82170733" z3="-0.07972266">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a28" x3="-3.68881892" y3="-1.27236619" z3="-0.76742705">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a29" x3="-3.38936717" y3="-1.41807355" z3="0.97132006">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a30" x3="-1.39882002" y3="-3.07941854" z3="-1.72710488">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a31" x3="-1.65714669" y3="-1.49118022" z3="-2.42415968">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a32" x3="-0.07939947" y3="-1.91857404" z3="-1.76501366">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a33" x3="0.27825963" y3="-2.21994815" z3="0.73137497">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a34" x3="-1.11907004" y3="-2.02678743" z3="1.84396986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a35" x3="-0.99832712" y3="-3.37655056" z3="0.73115435">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a36" x3="-0.08630681" y3="2.21754401" z3="-1.01936622">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a37" x3="-0.60026588" y3="2.45137279" z3="0.69017444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a38" x3="-1.43049398" y3="3.2444054" z3="-0.59059441">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a39" x3="-3.92517558" y3="0.68408238" z3="0.29432639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a40" x3="-2.83569914" y3="1.41484319" z3="1.47153897">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a41" x3="-3.54755773" y3="2.38713896" z3="0.18665904">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a42" x3="-2.82896354" y3="1.99484491" z3="-2.23806196">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a43" x3="-1.51670055" y3="0.88472855" z3="-2.61630888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a44" x3="-3.09901464" y3="0.27205306" z3="-2.12172249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a17" order="S"/>
                           <bond atomRefs2="a1 a6" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a5" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a3 a19" order="S"/>
                           <bond atomRefs2="a3 a18" order="S"/>
                           <bond atomRefs2="a3 a20" order="S"/>
                           <bond atomRefs2="a4 a22" order="S"/>
                           <bond atomRefs2="a4 a21" order="S"/>
                           <bond atomRefs2="a4 a23" order="S"/>
                           <bond atomRefs2="a5 a24" order="S"/>
                           <bond atomRefs2="a5 a26" order="S"/>
                           <bond atomRefs2="a5 a25" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a6 a8" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a11" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a29" order="S"/>
                           <bond atomRefs2="a10 a28" order="S"/>
                           <bond atomRefs2="a11 a30" order="S"/>
                           <bond atomRefs2="a11 a31" order="S"/>
                           <bond atomRefs2="a11 a32" order="S"/>
                           <bond atomRefs2="a12 a33" order="S"/>
                           <bond atomRefs2="a12 a34" order="S"/>
                           <bond atomRefs2="a12 a35" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a13 a16" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a38" order="S"/>
                           <bond atomRefs2="a14 a37" order="S"/>
                           <bond atomRefs2="a14 a36" order="S"/>
                           <bond atomRefs2="a15 a40" order="S"/>
                           <bond atomRefs2="a15 a41" order="S"/>
                           <bond atomRefs2="a15 a39" order="S"/>
                           <bond atomRefs2="a16 a44" order="S"/>
                           <bond atomRefs2="a16 a42" order="S"/>
                           <bond atomRefs2="a16 a43" order="S"/>
                        </bondArray>
                        <formula concise="C12H28FN2Si">
                           <atomArray count="12 28 1 2 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">219.22570319999988</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C12H28FN2Si/c1-10(2,3)14-16(13)15(11(4,5)6)12(7,8)9/h14H,1-9H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:3,4,5,10,11,12,14,15,16,2,9,13,7,1,8,6/E:(1,2,3)(4,5,6,7,8,9)(11,12)/CRV:16.3/rA:44nNCCCCSi3FNCCCCCCCCHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s2;s2;s1;s6;s6;s8;s9;s9;s9;s8;s13;s13;s13;s1;s3;s3;s3;s4;s4;s4;s5;s5;s5;s10;s10;s10;s11;s11;s11;s12;s12;s12;s14;s14;s14;s15;s15;s15;s16;s16;s16;/rC:1.7534,.0961,.0364;3.1274,.3201,.5816;3.3764,-.611,1.7638;4.0992,-.0047,-.5495;3.2716,1.781,.9952;.2593,.1815,.7286;.3078,.5276,2.2738;-1.1753,-.0872,-.0617;-1.5774,-1.5167,-.2387;-3.0667,-1.7518,-.014;-1.1565,-2.022,-1.6179;-.817,-2.3063,.8322;-1.9278,1.1319,-.4888;-.9444,2.2994,-.3473;-3.1264,1.4091,.4204;-2.3615,1.0534,-1.9483;1.7403,-.1015,-.9566;2.72,-.3951,2.6067;4.3988,-.4905,2.1211;3.2485,-1.6557,1.4783;4.0094,-1.0435,-.8718;5.1243,.1441,-.2146;3.9443,.6451,-1.4132;4.2851,1.9751,1.346;3.0797,2.4519,.1569;2.5957,2.0433,1.8106;-3.2656,-2.8217,-.0797;-3.6888,-1.2724,-.7674;-3.3894,-1.4181,.9713;-1.3988,-3.0794,-1.7271;-1.6571,-1.4912,-2.4242;-.0794,-1.9186,-1.765;.2783,-2.2199,.7314;-1.1191,-2.0268,1.844;-.9983,-3.3766,.7312;-.0863,2.2175,-1.0194;-.6003,2.4514,.6902;-1.4305,3.2444,-.5906;-3.9252,.6841,.2943;-2.8357,1.4148,1.4715;-3.5476,2.3871,.1867;-2.829,1.9948,-2.2381;-1.5167,.8847,-2.6163;-3.099,.2721,-2.1217;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="N" id="a1" x3="1.753624" y3="0.095158" z3="0.036153"/>
                        <atom elementType="C" id="a2" x3="3.127616" y3="0.321462" z3="0.580469"/>
                        <atom elementType="C" id="a3" x3="3.376877" y3="-0.604908" z3="1.766365"/>
                        <atom elementType="C" id="a4" x3="4.099503" y3="-0.00802" z3="-0.549129"/>
                        <atom elementType="C" id="a5" x3="3.271686" y3="1.784073" z3="0.988105"/>
                        <atom elementType="Si" id="a6" x3="0.260092" y3="0.178292" z3="0.729445"/>
                        <atom elementType="F" id="a7" x3="0.308998" y3="0.528201" z3="2.273722"/>
                        <atom elementType="N" id="a8" x3="-1.175141" y3="-0.08886" z3="-0.060263"/>
                        <atom elementType="C" id="a9" x3="-1.578516" y3="-1.517584" z3="-0.239014"/>
                        <atom elementType="C" id="a10" x3="-3.068166" y3="-1.750445" z3="-0.014333"/>
                        <atom elementType="C" id="a11" x3="-1.158994" y3="-2.021462" z3="-1.619101"/>
                        <atom elementType="C" id="a12" x3="-0.819077" y3="-2.30974" z3="0.830653"/>
                        <atom elementType="C" id="a13" x3="-1.92653" y3="1.130879" z3="-0.486658"/>
                        <atom elementType="C" id="a14" x3="-0.943539" y3="2.298192" z3="-0.340159"/>
                        <atom elementType="C" id="a15" x3="-3.127777" y3="1.405531" z3="0.419635"/>
                        <atom elementType="C" id="a16" x3="-2.355892" y3="1.05504" z3="-1.947593"/>
                        <atom elementType="H" id="a17" x3="1.740211" y3="-0.102105" z3="-0.956907"/>
                        <atom elementType="H" id="a18" x3="2.720727" y3="-0.386022" z3="2.608719"/>
                        <atom elementType="H" id="a19" x3="4.399272" y3="-0.48276" z3="2.122878"/>
                        <atom elementType="H" id="a20" x3="3.249222" y3="-1.650812" z3="1.485124"/>
                        <atom elementType="H" id="a21" x3="4.009699" y3="-1.048074" z3="-0.867339"/>
                        <atom elementType="H" id="a22" x3="5.124591" y3="0.141893" z3="-0.214579"/>
                        <atom elementType="H" id="a23" x3="3.945176" y3="0.638375" z3="-1.41554"/>
                        <atom elementType="H" id="a24" x3="4.285007" y3="1.979647" z3="1.338346"/>
                        <atom elementType="H" id="a25" x3="3.079943" y3="2.451423" z3="0.147019"/>
                        <atom elementType="H" id="a26" x3="2.59556" y3="2.049647" z3="1.802278"/>
                        <atom elementType="H" id="a27" x3="-3.269164" y3="-2.819813" z3="-0.082374"/>
                        <atom elementType="H" id="a28" x3="-3.68972" y3="-1.2682" z3="-0.766527"/>
                        <atom elementType="H" id="a29" x3="-3.390168" y3="-1.418256" z3="0.971733"/>
                        <atom elementType="H" id="a30" x3="-1.400672" y3="-3.078948" z3="-1.728815"/>
                        <atom elementType="H" id="a31" x3="-1.661067" y3="-1.49037" z3="-2.424379"/>
                        <atom elementType="H" id="a32" x3="-0.082137" y3="-1.917121" z3="-1.767592"/>
                        <atom elementType="H" id="a33" x3="0.2762" y3="-2.226383" z3="0.72878"/>
                        <atom elementType="H" id="a34" x3="-1.11952" y3="-2.030171" z3="1.842923"/>
                        <atom elementType="H" id="a35" x3="-1.00351" y3="-3.379427" z3="0.729301"/>
                        <atom elementType="H" id="a36" x3="-0.083353" y3="2.217501" z3="-1.009673"/>
                        <atom elementType="H" id="a37" x3="-0.602704" y3="2.448598" z3="0.698674"/>
                        <atom elementType="H" id="a38" x3="-1.428836" y3="3.243699" z3="-0.583197"/>
                        <atom elementType="H" id="a39" x3="-3.926442" y3="0.681185" z3="0.288425"/>
                        <atom elementType="H" id="a40" x3="-2.840526" y3="1.407491" z3="1.47172"/>
                        <atom elementType="H" id="a41" x3="-3.547983" y3="2.384549" z3="0.188087"/>
                        <atom elementType="H" id="a42" x3="-2.822596" y3="1.997003" z3="-2.237072"/>
                        <atom elementType="H" id="a43" x3="-1.50919" y3="0.887645" z3="-2.613501"/>
                        <atom elementType="H" id="a44" x3="-3.092887" y3="0.273997" z3="-2.124709"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a17" order="S"/>
                        <bond atomRefs2="a1 a6" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a5" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a19" order="S"/>
                        <bond atomRefs2="a3 a18" order="S"/>
                        <bond atomRefs2="a3 a20" order="S"/>
                        <bond atomRefs2="a4 a22" order="S"/>
                        <bond atomRefs2="a4 a21" order="S"/>
                        <bond atomRefs2="a4 a23" order="S"/>
                        <bond atomRefs2="a5 a24" order="S"/>
                        <bond atomRefs2="a5 a26" order="S"/>
                        <bond atomRefs2="a5 a25" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a12" order="S"/>
                        <bond atomRefs2="a9 a11" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a27" order="S"/>
                        <bond atomRefs2="a10 a29" order="S"/>
                        <bond atomRefs2="a10 a28" order="S"/>
                        <bond atomRefs2="a11 a30" order="S"/>
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</formula>
</molecule>
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                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H28FN2Si/c1-10(2,3)14-16(13)15(11(4,5)6)12(7,8)9/h14H,1-9H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:3,4,5,10,11,12,14,15,16,2,9,13,7,1,8,6/E:(1,2,3)(4,5,6,7,8,9)(11,12)/CRV:16.3/rA:44nNCCCCSi3FNCCCCCCCCHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s2;s2;s1;s6;s6;s8;s9;s9;s9;s8;s13;s13;s13;s1;s3;s3;s3;s4;s4;s4;s5;s5;s5;s10;s10;s10;s11;s11;s11;s12;s12;s12;s14;s14;s14;s15;s15;s15;s16;s16;s16;/rC:1.7519,.098,.0343;3.127,.3197,.5781;3.3662,-.5885,1.7799;4.0983,-.0394,-.5427;3.2837,1.7877,.9602;.2601,.1829,.7293;.3115,.5282,2.2743;-1.1772,-.0864,-.0556;-1.5732,-1.516,-.2435;-3.0625,-1.7567,-.0247;-1.148,-2.0118,-1.6246;-.8132,-2.3096,.8246;-1.9327,1.1322,-.4778;-.9544,2.3026,-.3243;-3.137,1.3995,.4267;-2.3582,1.0615,-1.9401;1.7374,-.093,-.96;2.713,-.3503,2.6191;4.3897,-.4695,2.1345;3.2298,-1.6381,1.5168;3.9985,-1.0837,-.8435;5.124,.105,-.2074;3.9549,.5936,-1.4209;4.2976,1.9801,1.3107;3.1012,2.4418,.1068;2.6072,2.0738,1.7672;-3.259,-2.8264,-.1016;-3.684,-1.2716,-.7751;-3.3896,-1.4334,.9627;-1.3749,-3.0725,-1.7352;-1.6585,-1.4871,-2.4288;-.073,-1.8921,-1.7744;.2818,-2.2263,.7223;-1.1138,-2.0321,1.8374;-.9985,-3.3791,.7222;-.0918,2.2275,-.9918;-.6178,2.4514,.7159;-1.4419,3.2474,-.5659;-3.9367,.6786,.2837;-2.8544,1.3886,1.4801;-3.5544,2.3819,.2051;-2.8261,2.0036,-2.2273;-1.5097,.8982,-2.6047;-3.0934,.2798,-2.1222;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="N" id="a1" x3="1.752278" y3="0.098601" z3="0.034032"/>
                        <atom elementType="C" id="a2" x3="3.127889" y3="0.318343" z3="0.577499"/>
                        <atom elementType="C" id="a3" x3="3.36444" y3="-0.585484" z3="1.783036"/>
                        <atom elementType="C" id="a4" x3="4.098644" y3="-0.048457" z3="-0.541283"/>
                        <atom elementType="C" id="a5" x3="3.28836" y3="1.787487" z3="0.953622"/>
                        <atom elementType="Si" id="a6" x3="0.260278" y3="0.185641" z3="0.728577"/>
                        <atom elementType="F" id="a7" x3="0.310991" y3="0.533916" z3="2.272947"/>
                        <atom elementType="N" id="a8" x3="-1.176998" y3="-0.084998" z3="-0.055963"/>
                        <atom elementType="C" id="a9" x3="-1.571423" y3="-1.514992" z3="-0.244759"/>
                        <atom elementType="C" id="a10" x3="-3.060755" y3="-1.756823" z3="-0.028011"/>
                        <atom elementType="C" id="a11" x3="-1.144285" y3="-2.010633" z3="-1.625427"/>
                        <atom elementType="C" id="a12" x3="-0.812101" y3="-2.308264" z3="0.824126"/>
                        <atom elementType="C" id="a13" x3="-1.934795" y3="1.132834" z3="-0.476335"/>
                        <atom elementType="C" id="a14" x3="-0.959514" y3="2.305334" z3="-0.319632"/>
                        <atom elementType="C" id="a15" x3="-3.140114" y3="1.394817" z3="0.428337"/>
                        <atom elementType="C" id="a16" x3="-2.359758" y3="1.064339" z3="-1.938995"/>
                        <atom elementType="H" id="a17" x3="1.737702" y3="-0.089314" z3="-0.960864"/>
                        <atom elementType="H" id="a18" x3="2.712535" y3="-0.341955" z3="2.621699"/>
                        <atom elementType="H" id="a19" x3="4.388442" y3="-0.468053" z3="2.136561"/>
                        <atom elementType="H" id="a20" x3="3.224871" y3="-1.635782" z3="1.524369"/>
                        <atom elementType="H" id="a21" x3="3.995646" y3="-1.093623" z3="-0.837796"/>
                        <atom elementType="H" id="a22" x3="5.124587" y3="0.094172" z3="-0.20602"/>
                        <atom elementType="H" id="a23" x3="3.957825" y3="0.581213" z3="-1.422357"/>
                        <atom elementType="H" id="a24" x3="4.302477" y3="1.978675" z3="1.304095"/>
                        <atom elementType="H" id="a25" x3="3.108127" y3="2.438442" z3="0.097369"/>
                        <atom elementType="H" id="a26" x3="2.611758" y3="2.078515" z3="1.758793"/>
                        <atom elementType="H" id="a27" x3="-3.256229" y3="-2.826587" z3="-0.105512"/>
                        <atom elementType="H" id="a28" x3="-3.681455" y3="-1.271887" z3="-0.779159"/>
                        <atom elementType="H" id="a29" x3="-3.389438" y3="-1.433981" z3="0.959014"/>
                        <atom elementType="H" id="a30" x3="-1.369774" y3="-3.071573" z3="-1.736001"/>
                        <atom elementType="H" id="a31" x3="-1.654562" y3="-1.486729" z3="-2.4303"/>
                        <atom elementType="H" id="a32" x3="-0.06925" y3="-1.889637" z3="-1.774301"/>
                        <atom elementType="H" id="a33" x3="0.282924" y3="-2.224385" z3="0.722844"/>
                        <atom elementType="H" id="a34" x3="-1.113803" y3="-2.030443" z3="1.836547"/>
                        <atom elementType="H" id="a35" x3="-0.997166" y3="-3.377793" z3="0.721899"/>
                        <atom elementType="H" id="a36" x3="-0.096525" y3="2.234342" z3="-0.98715"/>
                        <atom elementType="H" id="a37" x3="-0.623877" y3="2.452285" z3="0.720997"/>
                        <atom elementType="H" id="a38" x3="-1.449139" y3="3.249419" z3="-0.559488"/>
                        <atom elementType="H" id="a39" x3="-3.938159" y3="0.672547" z3="0.282896"/>
                        <atom elementType="H" id="a40" x3="-2.858007" y3="1.381624" z3="1.481731"/>
                        <atom elementType="H" id="a41" x3="-3.5595" y3="2.376999" z3="0.209143"/>
                        <atom elementType="H" id="a42" x3="-2.830016" y3="2.005893" z3="-2.224158"/>
                        <atom elementType="H" id="a43" x3="-1.510498" y3="0.904825" z3="-2.603563"/>
                        <atom elementType="H" id="a44" x3="-3.092732" y3="0.281131" z3="-2.122958"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a6" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a17" order="S"/>
                        <bond atomRefs2="a2 a5" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a19" order="S"/>
                        <bond atomRefs2="a3 a18" order="S"/>
                        <bond atomRefs2="a3 a20" order="S"/>
                        <bond atomRefs2="a4 a21" order="S"/>
                        <bond atomRefs2="a4 a22" order="S"/>
                        <bond atomRefs2="a4 a23" order="S"/>
                        <bond atomRefs2="a5 a24" order="S"/>
                        <bond atomRefs2="a5 a26" order="S"/>
                        <bond atomRefs2="a5 a25" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a13" order="S"/>
                        <bond atomRefs2="a9 a12" order="S"/>
                        <bond atomRefs2="a9 a11" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a27" order="S"/>
                        <bond atomRefs2="a10 a29" order="S"/>
                        <bond atomRefs2="a10 a28" order="S"/>
                        <bond atomRefs2="a11 a30" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a11 a32" order="S"/>
                        <bond atomRefs2="a12 a33" order="S"/>
                        <bond atomRefs2="a12 a34" order="S"/>
                        <bond atomRefs2="a12 a35" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a16" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a14 a38" order="S"/>
                        <bond atomRefs2="a14 a37" order="S"/>
                        <bond atomRefs2="a14 a36" order="S"/>
                        <bond atomRefs2="a15 a40" order="S"/>
                        <bond atomRefs2="a15 a41" order="S"/>
                        <bond atomRefs2="a15 a39" order="S"/>
                        <bond atomRefs2="a16 a44" order="S"/>
                        <bond atomRefs2="a16 a42" order="S"/>
                        <bond atomRefs2="a16 a43" order="S"/>
                     </bondArray>
                     <formula concise="C12H28FN2Si">
                        <atomArray count="12 28 1 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">219.22570319999988</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H28FN2Si/c1-10(2,3)14-16(13)15(11(4,5)6)12(7,8)9/h14H,1-9H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:3,4,5,10,11,12,14,15,16,2,9,13,7,1,8,6/E:(1,2,3)(4,5,6,7,8,9)(11,12)/CRV:16.3/rA:44nNCCCCSi3FNCCCCCCCCHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s2;s2;s1;s6;s6;s8;s9;s9;s9;s8;s13;s13;s13;s1;s3;s3;s3;s4;s4;s4;s5;s5;s5;s10;s10;s10;s11;s11;s11;s12;s12;s12;s14;s14;s14;s15;s15;s15;s16;s16;s16;/rC:1.7523,.0986,.034;3.1279,.3183,.5775;3.3644,-.5855,1.783;4.0986,-.0485,-.5413;3.2884,1.7875,.9536;.2603,.1856,.7286;.311,.5339,2.2729;-1.177,-.085,-.056;-1.5714,-1.515,-.2448;-3.0608,-1.7568,-.028;-1.1443,-2.0106,-1.6254;-.8121,-2.3083,.8241;-1.9348,1.1328,-.4763;-.9595,2.3053,-.3196;-3.1401,1.3948,.4283;-2.3598,1.0643,-1.939;1.7377,-.0893,-.9609;2.7125,-.342,2.6217;4.3884,-.4681,2.1366;3.2249,-1.6358,1.5244;3.9956,-1.0936,-.8378;5.1246,.0942,-.206;3.9578,.5812,-1.4224;4.3025,1.9787,1.3041;3.1081,2.4384,.0974;2.6118,2.0785,1.7588;-3.2562,-2.8266,-.1055;-3.6815,-1.2719,-.7792;-3.3894,-1.434,.959;-1.3698,-3.0716,-1.736;-1.6546,-1.4867,-2.4303;-.0693,-1.8896,-1.7743;.2829,-2.2244,.7228;-1.1138,-2.0304,1.8365;-.9972,-3.3778,.7219;-.0965,2.2343,-.9871;-.6239,2.4523,.721;-1.4491,3.2494,-.5595;-3.9382,.6725,.2829;-2.858,1.3816,1.4817;-3.5595,2.377,.2091;-2.83,2.0059,-2.2242;-1.5105,.9048,-2.6036;-3.0927,.2811,-2.123;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-971.053138744779</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-971.053134534962</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-971.053125090269</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-971.053126847651</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-971.053125693674</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="44">-0.315825 -0.023904 -0.351612 -0.352214 -0.349690 0.755530 -0.183249 -0.226921 -0.014583 -0.345550 -0.346160 -0.362366 -0.012620 -0.365510 -0.348564 -0.345819 0.283642 0.137964 0.151300 0.136679 0.138169 0.154772 0.135893 0.150187 0.136338 0.134935 0.150199 0.136204 0.141978 0.145717 0.142655 0.122792 0.143065 0.155585 0.169941 0.149493 0.150174 0.174278 0.142601 0.137762 0.144283 0.149844 0.135527 0.137082</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="44">7.7138 5.9353 6.6376 6.6609 6.6253 12.7080 9.4003 7.5560 5.9403 6.6444 6.6033 6.7684 5.9330 6.7943 6.6163 6.6302 0.5992 0.7611 0.7408 0.7665 0.7599 0.7358 0.7651 0.7423 0.7676 0.7683 0.7430 0.7584 0.7532 0.7516 0.7461 0.7975 0.7616 0.7205 0.6915 0.7347 0.7484 0.6806 0.7481 0.7648 0.7559 0.7443 0.7685 0.7572</array>
                     <array dataType="xsd:double" dictRef="o:za" size="44">7.0000 6.0000 6.0000 6.0000 6.0000 14.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="44">-0.7138 0.0647 -0.6376 -0.6609 -0.6253 1.2920 -0.4003 -0.5560 0.0597 -0.6444 -0.6033 -0.7684 0.0670 -0.7943 -0.6163 -0.6302 0.4008 0.2389 0.2592 0.2335 0.2401 0.2642 0.2349 0.2577 0.2324 0.2317 0.2570 0.2416 0.2468 0.2484 0.2539 0.2025 0.2384 0.2795 0.3085 0.2653 0.2516 0.3194 0.2519 0.2352 0.2441 0.2557 0.2315 0.2428</array>
                     <array dataType="xsd:double" dictRef="o:va" size="44">3.0002 3.7443 3.6508 3.6645 3.6541 3.9263 1.0732 2.9940 3.7756 3.6510 3.6448 3.6009 3.7769 3.6043 3.6344 3.6482 0.8105 0.9139 0.9019 0.9112 0.9068 0.9027 0.9091 0.9021 0.9117 0.9145 0.9008 0.9112 0.9045 0.9037 0.9041 0.9245 0.9107 0.8882 0.8862 0.8959 0.8975 0.8821 0.9060 0.9123 0.9045 0.9010 0.9117 0.9112</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="44">3.0002 3.7443 3.6508 3.6645 3.6541 3.9263 1.0732 2.9940 3.7756 3.6510 3.6448 3.6009 3.7769 3.6043 3.6344 3.6482 0.8105 0.9139 0.9019 0.9112 0.9068 0.9027 0.9091 0.9021 0.9117 0.9145 0.9008 0.9112 0.9045 0.9037 0.9041 0.9245 0.9107 0.8882 0.8862 0.8959 0.8975 0.8821 0.9060 0.9123 0.9045 0.9010 0.9117 0.9112</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="44">0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="43">0.7938 1.3458 0.7902 0.9874 0.9882 0.9854 0.9102 0.9076 0.9184 0.9147 0.9083 0.9152 0.9077 0.9189 0.9141 0.9924 1.2366 0.8650 0.8806 0.9849 0.9768 0.9624 0.9030 0.9091 0.9117 0.9054 0.9093 0.9244 0.8601 0.8878 0.8859 0.9582 0.9732 0.9816 0.8852 0.8637 0.8805 0.9100 0.9172 0.9053 0.9042 0.9175 0.9087</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="43">0 1 0 5 0 16 1 2 1 3 1 4 2 17 2 18 2 19 3 20 3 21 3 22 4 23 4 24 4 25 5 6 5 7 7 8 7 12 8 9 8 10 8 11 9 26 9 27 9 28 10 29 10 30 10 31 11 32 11 33 11 34 12 13 12 14 12 15 13 35 13 36 13 37 14 38 14 39 14 40 15 41 15 42 15 43</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="44">-0.713755 0.064690 -0.637562 -0.660862 -0.625294 1.291960 -0.400266 -0.556044 0.059709 -0.644409 -0.603306 -0.768421 0.067014 -0.794280 -0.616290 -0.630232 0.400797 0.238879 0.259191 0.233511 0.240081 0.264218 0.234891 0.257707 0.232393 0.231685 0.256982 0.241610 0.246826 0.248436 0.253859 0.202480 0.238374 0.279541 0.308486 0.265257 0.251607 0.319444 0.251870 0.235186 0.244053 0.255741 0.231461 0.242783</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="299">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="299">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="299" units="nonsi:electronvolt">-1823.6031 -687.6945 -403.0587 -402.6906 -289.5321 -289.5078 -289.2923 -288.0712 -287.9428 -287.2260 -287.2095 -287.1837 -287.1434 -287.0606 -287.0501 -287.0395 -157.1455 -110.8092 -110.6591 -110.5696 -40.5218 -32.0453 -31.4632 -28.7984 -27.4574 -26.8266 -25.3206 -24.9445 -24.7392 -24.5614 -24.4459 -24.4063 -21.8800 -21.8708 -21.0955 -20.2313 -19.5559 -19.0612 -18.9385 -18.3411 -18.2706 -18.1823 -17.8746 -17.6361 -17.3449 -17.0821 -16.9717 -16.7648 -16.5427 -16.1997 -15.8306 -15.6556 -15.4276 -15.3881 -15.2326 -15.1934 -15.1491 -15.0618 -14.9790 -14.8044 -14.6563 -14.3646 -14.2053 -14.1144 -13.8936 -13.8524 -12.8880 -12.0791 -3.8775 -3.3317 -1.1569 -0.9733 -0.2859 0.2579 0.6183 0.6728 1.0117 1.0636 1.2592 1.4746 1.4954 1.5909 1.6716 1.9421 2.0494 2.1098 2.2270 2.3444 2.4201 2.6252 2.6560 2.8287 2.9240 3.1096 3.1399 3.2920 3.3686 3.3927 3.5751 3.7112 3.7402 3.9348 3.9795 4.1063 4.1981 4.4027 4.5416 4.6645 4.9155 5.0082 5.0422 5.9083 6.6897 8.3794 8.8943 9.4095 9.4299 9.7602 10.0193 10.6574 10.7224 10.9674 11.0896 11.2996 11.4410 11.5571 11.8192 12.3346 12.4058 12.7120 13.1004 13.2046 13.5352 13.6796 13.8763 14.0542 14.6869 14.8116 15.0614 15.3984 15.6414 16.2403 16.2955 16.6218 17.0720 17.4553 18.3218 18.4950 18.5734 18.7207 19.0180 19.5833 19.9141 20.1408 20.5675 21.2510 21.9957 22.5314 22.9787 23.3039 23.5070 23.7058 23.8670 24.0577 24.2723 24.3877 24.6625 24.7237 24.8151 24.9105 24.9447 25.0507 25.3685 25.4321 25.5189 25.6862 25.7719 25.9629 26.0816 26.3999 26.8282 26.9710 27.2514 27.2897 27.7358 27.8651 28.1007 28.3232 28.7426 29.2872 29.6736 29.9375 30.3677 31.1788 31.4824 31.9837 32.7302 33.4225 33.6451 34.0733 34.3211 35.4683 35.6102 35.8910 36.5746 36.8277 37.0297 37.0702 38.5597 38.8450 39.4700 40.3850 41.3519 41.5445 42.2110 43.3189 43.8230 44.9491 45.0797 45.3441 45.3575 45.7634 46.3209 46.7346 47.1981 47.3919 47.8248 48.0673 48.4670 48.6511 49.1143 49.1869 49.5837 49.8847 51.4565 52.3051 52.5037 52.8372 53.0977 53.8533 54.3746 54.6076 55.2931 55.5927 56.0106 56.4551 56.7910 57.0927 58.2252 58.9469 59.2836 59.3844 59.7568 59.7773 59.9399 59.9534 60.0272 60.1080 60.2368 60.3204 60.4474 60.6515 60.7879 61.2023 61.6469 62.0618 62.3418 65.1211 67.4151 67.9755 68.3278 68.8529 69.1667 70.3864 70.8186 71.0538 71.2857 71.3949 72.0299 72.7235 74.6897 74.9835 76.5155 78.2474 365.5760 366.2215 367.0571 373.8682 374.1523 374.2190 374.4936 374.6797 375.1567 379.7377 380.3778 381.3099 518.9521 523.8451 889.5703</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="N" id="a1" x3="1.751816" y3="0.09933" z3="0.034477"/>
                  <atom elementType="C" id="a2" x3="3.12814" y3="0.319176" z3="0.575883"/>
                  <atom elementType="C" id="a3" x3="3.363877" y3="-0.578362" z3="1.786115"/>
                  <atom elementType="C" id="a4" x3="4.097722" y3="-0.0559" z3="-0.541231"/>
                  <atom elementType="C" id="a5" x3="3.291267" y3="1.790094" z3="0.943995"/>
                  <atom elementType="Si" id="a6" x3="0.2602" y3="0.184155" z3="0.730735"/>
                  <atom elementType="F" id="a7" x3="0.311538" y3="0.530303" z3="2.275593"/>
                  <atom elementType="N" id="a8" x3="-1.177633" y3="-0.08572" z3="-0.053163"/>
                  <atom elementType="C" id="a9" x3="-1.571705" y3="-1.515564" z3="-0.245052"/>
                  <atom elementType="C" id="a10" x3="-3.061378" y3="-1.757636" z3="-0.031895"/>
                  <atom elementType="C" id="a11" x3="-1.142256" y3="-2.008525" z3="-1.626053"/>
                  <atom elementType="C" id="a12" x3="-0.814655" y3="-2.311124" z3="0.82382"/>
                  <atom elementType="C" id="a13" x3="-1.934924" y3="1.132519" z3="-0.473266"/>
                  <atom elementType="C" id="a14" x3="-0.960603" y3="2.305206" z3="-0.31185"/>
                  <atom elementType="C" id="a15" x3="-3.142677" y3="1.391977" z3="0.429008"/>
                  <atom elementType="C" id="a16" x3="-2.356084" y3="1.066178" z3="-1.937096"/>
                  <atom elementType="H" id="a17" x3="1.736066" y3="-0.082808" z3="-0.961505"/>
                  <atom elementType="H" id="a18" x3="2.713958" y3="-0.32888" z3="2.624525"/>
                  <atom elementType="H" id="a19" x3="4.388726" y3="-0.461224" z3="2.137245"/>
                  <atom elementType="H" id="a20" x3="3.221732" y3="-1.629756" z3="1.533378"/>
                  <atom elementType="H" id="a21" x3="3.992131" y3="-1.102433" z3="-0.831786"/>
                  <atom elementType="H" id="a22" x3="5.124094" y3="0.086426" z3="-0.20714"/>
                  <atom elementType="H" id="a23" x3="3.958124" y3="0.569011" z3="-1.425917"/>
                  <atom elementType="H" id="a24" x3="4.305666" y3="1.981719" z3="1.293435"/>
                  <atom elementType="H" id="a25" x3="3.111994" y3="2.436616" z3="0.084194"/>
                  <atom elementType="H" id="a26" x3="2.614792" y3="2.086246" z3="1.747457"/>
                  <atom elementType="H" id="a27" x3="-3.256467" y3="-2.827242" z3="-0.112376"/>
                  <atom elementType="H" id="a28" x3="-3.680443" y3="-1.270957" z3="-0.783231"/>
                  <atom elementType="H" id="a29" x3="-3.392063" y3="-1.437189" z3="0.955241"/>
                  <atom elementType="H" id="a30" x3="-1.368496" y3="-3.069009" z3="-1.739297"/>
                  <atom elementType="H" id="a31" x3="-1.650518" y3="-1.482242" z3="-2.430699"/>
                  <atom elementType="H" id="a32" x3="-0.066833" y3="-1.888178" z3="-1.772515"/>
                  <atom elementType="H" id="a33" x3="0.280606" y3="-2.227351" z3="0.724687"/>
                  <atom elementType="H" id="a34" x3="-1.11789" y3="-2.034285" z3="1.836051"/>
                  <atom elementType="H" id="a35" x3="-1.00022" y3="-3.380368" z3="0.719717"/>
                  <atom elementType="H" id="a36" x3="-0.095639" y3="2.235986" z3="-0.97711"/>
                  <atom elementType="H" id="a37" x3="-0.628491" y3="2.450464" z3="0.730038"/>
                  <atom elementType="H" id="a38" x3="-1.449705" y3="3.249399" z3="-0.552376"/>
                  <atom elementType="H" id="a39" x3="-3.940097" y3="0.669677" z3="0.280248"/>
                  <atom elementType="H" id="a40" x3="-2.863046" y3="1.376897" z3="1.483023"/>
                  <atom elementType="H" id="a41" x3="-3.561741" y3="2.37444" z3="0.210455"/>
                  <atom elementType="H" id="a42" x3="-2.826581" y3="2.007729" z3="-2.221784"/>
                  <atom elementType="H" id="a43" x3="-1.504803" y3="0.908784" z3="-2.599591"/>
                  <atom elementType="H" id="a44" x3="-3.087604" y3="0.282423" z3="-2.124286"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a6" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a17" order="S"/>
                  <bond atomRefs2="a2 a5" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a19" order="S"/>
                  <bond atomRefs2="a3 a18" order="S"/>
                  <bond atomRefs2="a3 a20" order="S"/>
                  <bond atomRefs2="a4 a21" order="S"/>
                  <bond atomRefs2="a4 a22" order="S"/>
                  <bond atomRefs2="a4 a23" order="S"/>
                  <bond atomRefs2="a5 a24" order="S"/>
                  <bond atomRefs2="a5 a26" order="S"/>
                  <bond atomRefs2="a5 a25" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a8" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a11" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a29" order="S"/>
                  <bond atomRefs2="a10 a28" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a31" order="S"/>
                  <bond atomRefs2="a11 a32" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a34" order="S"/>
                  <bond atomRefs2="a12 a35" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a16" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a38" order="S"/>
                  <bond atomRefs2="a14 a37" order="S"/>
                  <bond atomRefs2="a14 a36" order="S"/>
                  <bond atomRefs2="a15 a40" order="S"/>
                  <bond atomRefs2="a15 a41" order="S"/>
                  <bond atomRefs2="a15 a39" order="S"/>
                  <bond atomRefs2="a16 a44" order="S"/>
                  <bond atomRefs2="a16 a42" order="S"/>
                  <bond atomRefs2="a16 a43" order="S"/>
               </bondArray>
               <formula concise="C12H28FN2Si">
                  <atomArray count="12 28 1 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">219.22570319999988</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C12H28FN2Si/c1-10(2,3)14-16(13)15(11(4,5)6)12(7,8)9/h14H,1-9H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:3,4,5,10,11,12,14,15,16,2,9,13,7,1,8,6/E:(1,2,3)(4,5,6,7,8,9)(11,12)/CRV:16.3/rA:44nNCCCCSi3FNCCCCCCCCHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s2;s2;s1;s6;s6;s8;s9;s9;s9;s8;s13;s13;s13;s1;s3;s3;s3;s4;s4;s4;s5;s5;s5;s10;s10;s10;s11;s11;s11;s12;s12;s12;s14;s14;s14;s15;s15;s15;s16;s16;s16;/rC:1.7518,.0993,.0345;3.1281,.3192,.5759;3.3639,-.5784,1.7861;4.0977,-.0559,-.5412;3.2913,1.7901,.944;.2602,.1842,.7307;.3115,.5303,2.2756;-1.1776,-.0857,-.0532;-1.5717,-1.5156,-.2451;-3.0614,-1.7576,-.0319;-1.1423,-2.0085,-1.6261;-.8147,-2.3111,.8238;-1.9349,1.1325,-.4733;-.9606,2.3052,-.3119;-3.1427,1.392,.429;-2.3561,1.0662,-1.9371;1.7361,-.0828,-.9615;2.714,-.3289,2.6245;4.3887,-.4612,2.1372;3.2217,-1.6298,1.5334;3.9921,-1.1024,-.8318;5.1241,.0864,-.2071;3.9581,.569,-1.4259;4.3057,1.9817,1.2934;3.112,2.4366,.0842;2.6148,2.0862,1.7475;-3.2565,-2.8272,-.1124;-3.6804,-1.271,-.7832;-3.3921,-1.4372,.9552;-1.3685,-3.069,-1.7393;-1.6505,-1.4822,-2.4307;-.0668,-1.8882,-1.7725;.2806,-2.2274,.7247;-1.1179,-2.0343,1.8361;-1.0002,-3.3804,.7197;-.0956,2.236,-.9771;-.6285,2.4505,.73;-1.4497,3.2494,-.5524;-3.9401,.6697,.2802;-2.863,1.3769,1.483;-3.5617,2.3744,.2105;-2.8266,2.0077,-2.2218;-1.5048,.9088,-2.5996;-3.0876,.2824,-2.1243;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-971.08832357</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1462.52980019</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2433.61812376</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-4215.36020360</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1781.74207984</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1935.90005721</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">964.81173364</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00650551</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">68.000538203705</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">68.000538203705</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">136.001076407409</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-64.529553722551</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-5.988700078401</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-70.518253800952</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.030647809</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.030650478</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.030653139</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.030650532</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.030648177</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="299">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="299">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="299" units="nonsi:electronvolt">-1823.6032 -687.6944 -403.0673 -402.6885 -289.5314 -289.5030 -289.2971 -288.0699 -287.9287 -287.2250 -287.2100 -287.1800 -287.1444 -287.0574 -287.0517 -287.0449 -157.1466 -110.8102 -110.6601 -110.5709 -40.5239 -32.0450 -31.4695 -28.7938 -27.4645 -26.8256 -25.3177 -24.9395 -24.7364 -24.5610 -24.4515 -24.4031 -21.8832 -21.8685 -21.0989 -20.2329 -19.5601 -19.0589 -18.9372 -18.3412 -18.2729 -18.1888 -17.8741 -17.6307 -17.3463 -17.0787 -16.9692 -16.7656 -16.5414 -16.1949 -15.8288 -15.6589 -15.4268 -15.3825 -15.2311 -15.1912 -15.1490 -15.0582 -14.9762 -14.8054 -14.6534 -14.3702 -14.2026 -14.1154 -13.8979 -13.8479 -12.8967 -12.0768 -3.8806 -3.3343 -1.1606 -0.9831 -0.2834 0.2573 0.6111 0.6761 1.0037 1.0668 1.2613 1.4764 1.4930 1.5915 1.6817 1.9265 2.0562 2.1157 2.2371 2.3398 2.4310 2.6206 2.6510 2.8327 2.9240 3.1021 3.1434 3.3055 3.3723 3.4029 3.5730 3.7180 3.7352 3.9413 3.9837 4.1030 4.2201 4.3962 4.5374 4.6550 4.9055 5.0169 5.0493 5.9138 6.6823 8.3608 8.9055 9.4198 9.4251 9.7617 10.0237 10.6384 10.7238 10.9556 11.0890 11.2730 11.4459 11.5401 11.8052 12.3428 12.4001 12.7022 13.0966 13.2188 13.5374 13.6749 13.8856 14.0689 14.6744 14.8077 15.0381 15.3958 15.6131 16.2417 16.2981 16.6138 17.0893 17.4608 18.3675 18.4714 18.5916 18.7247 19.0493 19.5950 19.9054 20.1600 20.5632 21.2499 21.9760 22.5142 22.9764 23.3186 23.5023 23.6920 23.8600 24.0707 24.2686 24.3964 24.6643 24.7277 24.8102 24.9184 24.9480 25.0500 25.3527 25.4177 25.5289 25.7070 25.7510 25.9791 26.0925 26.4063 26.7934 26.9525 27.2629 27.2774 27.7409 27.8679 28.1061 28.3291 28.7464 29.2780 29.6684 29.9417 30.3736 31.1007 31.4807 32.0342 32.7378 33.3743 33.6729 34.0924 34.3617 35.4573 35.5963 35.9147 36.5467 36.8673 37.0109 37.0714 38.5727 38.8760 39.4797 40.4048 41.3163 41.5577 42.2132 43.3013 43.8247 44.9576 45.0556 45.3311 45.3560 45.7705 46.3056 46.7093 47.1988 47.3826 47.8291 48.0703 48.4777 48.6528 49.0819 49.1830 49.5790 49.8948 51.4573 52.3063 52.5247 52.8490 53.0848 53.8551 54.3216 54.6211 55.2823 55.5731 56.0080 56.4778 56.7875 57.0986 58.2235 58.9686 59.2782 59.3794 59.7514 59.7707 59.9343 59.9421 60.0302 60.1128 60.2604 60.3266 60.4435 60.6537 60.7923 61.2142 61.6377 62.0702 62.3674 65.0880 67.4270 67.9744 68.3386 68.8833 69.1706 70.3901 70.8107 71.0552 71.2902 71.3938 72.0293 72.7227 74.6936 74.9915 76.5146 78.2463 365.5672 366.2192 367.0696 373.8567 374.1592 374.2248 374.5002 374.6738 375.1803 379.7336 380.3764 381.3322 518.9382 523.8310 889.5612</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="44">-0.712920 0.063861 -0.640971 -0.659966 -0.622212 1.292501 -0.400297 -0.555874 0.059136 -0.644270 -0.603182 -0.767138 0.067972 -0.798034 -0.616739 -0.629438 0.400597 0.240243 0.259890 0.233702 0.240866 0.263982 0.234146 0.257057 0.232045 0.231012 0.256997 0.241256 0.247095 0.248541 0.253554 0.202129 0.238560 0.278873 0.307791 0.264831 0.253783 0.320017 0.251552 0.235651 0.244104 0.255654 0.230981 0.242662</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="44">-0.315360 -0.023933 -0.352084 -0.352146 -0.349190 0.756005 -0.183083 -0.226903 -0.014692 -0.345380 -0.346149 -0.362589 -0.012452 -0.366782 -0.348590 -0.345823 0.283635 0.138447 0.151638 0.136767 0.138538 0.154705 0.135531 0.149965 0.136239 0.134664 0.150171 0.136030 0.142065 0.145771 0.142614 0.122566 0.142856 0.155308 0.169640 0.149490 0.150987 0.174566 0.142553 0.137990 0.144262 0.149803 0.135345 0.137003</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="44">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="44">N C C C C Si F N C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="44">7.7129 5.9361 6.6410 6.6600 6.6222 12.7075 9.4003 7.5559 5.9409 6.6443 6.6032 6.7671 5.9320 6.7980 6.6167 6.6294 0.5994 0.7598 0.7401 0.7663 0.7591 0.7360 0.7659 0.7429 0.7680 0.7690 0.7430 0.7587 0.7529 0.7515 0.7464 0.7979 0.7614 0.7211 0.6922 0.7352 0.7462 0.6800 0.7484 0.7643 0.7559 0.7443 0.7690 0.7573</array>
                     <array dataType="xsd:double" dictRef="o:za" size="44">7.0000 6.0000 6.0000 6.0000 6.0000 14.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="44">-0.7129 0.0639 -0.6410 -0.6600 -0.6222 1.2925 -0.4003 -0.5559 0.0591 -0.6443 -0.6032 -0.7671 0.0680 -0.7980 -0.6167 -0.6294 0.4006 0.2402 0.2599 0.2337 0.2409 0.2640 0.2341 0.2571 0.2320 0.2310 0.2570 0.2413 0.2471 0.2485 0.2536 0.2021 0.2386 0.2789 0.3078 0.2648 0.2538 0.3200 0.2516 0.2357 0.2441 0.2557 0.2310 0.2427</array>
                     <array dataType="xsd:double" dictRef="o:va" size="44">3.0011 3.7452 3.6502 3.6641 3.6544 3.9252 1.0732 2.9943 3.7761 3.6509 3.6447 3.6018 3.7763 3.6024 3.6342 3.6478 0.8106 0.9138 0.9017 0.9111 0.9065 0.9027 0.9096 0.9022 0.9118 0.9144 0.9008 0.9113 0.9044 0.9036 0.9043 0.9248 0.9107 0.8885 0.8865 0.8961 0.8969 0.8820 0.9062 0.9122 0.9045 0.9010 0.9119 0.9113</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="44">3.0011 3.7452 3.6502 3.6641 3.6544 3.9252 1.0732 2.9943 3.7761 3.6509 3.6447 3.6018 3.7763 3.6024 3.6342 3.6478 0.8106 0.9138 0.9017 0.9111 0.9065 0.9027 0.9096 0.9022 0.9118 0.9144 0.9008 0.9113 0.9044 0.9036 0.9043 0.9248 0.9107 0.8885 0.8865 0.8961 0.8969 0.8820 0.9062 0.9122 0.9045 0.9010 0.9119 0.9113</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="44">-0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="43">0.7942 1.3470 0.7901 0.9879 0.9883 0.9850 0.9095 0.9073 0.9182 0.9146 0.9082 0.9153 0.9078 0.9191 0.9147 0.9924 1.2369 0.8645 0.8816 0.9851 0.9768 0.9629 0.9031 0.9091 0.9117 0.9055 0.9096 0.9243 0.8612 0.8882 0.8863 0.9574 0.9727 0.9814 0.8844 0.8640 0.8803 0.9101 0.9172 0.9055 0.9042 0.9177 0.9087</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="43">0 1 0 5 0 16 1 2 1 3 1 4 2 17 2 18 2 19 3 20 3 21 3 22 4 23 4 24 4 25 5 6 5 7 7 8 7 12 8 9 8 10 8 11 9 26 9 27 9 28 10 29 10 30 10 31 11 32 11 33 11 34 12 13 12 14 12 15 13 35 13 36 13 37 14 38 14 39 14 40 15 41 15 42 15 43</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.030648032</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-971.053118843609</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.15563 1.30301 0.14737 -2.23002 2.16985 -0.06017 -9.88235 9.26694 -0.61541</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.63567</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.61573</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
