<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 10s7p1d 8s4p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s3p1d 4s2p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">N Si F N C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="18">1 2 3 1 4 4 4 4 4 4 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="N" id="a1" x3="2.690663" y3="0.105125" z3="0.947596"/>
                  <atom elementType="Si" id="a2" x3="2.510238" y3="-0.377496" z3="-0.610953"/>
                  <atom elementType="F" id="a3" x3="3.806532" y3="-0.754713" z3="-1.407405"/>
                  <atom elementType="N" id="a4" x3="1.055245" y3="-0.485096" z3="-1.35971"/>
                  <atom elementType="C" id="a5" x3="-0.154833" y3="-0.178264" z3="-0.632834"/>
                  <atom elementType="C" id="a6" x3="-0.896539" y3="-1.211679" z3="-0.076729"/>
                  <atom elementType="C" id="a7" x3="-2.062774" y3="-0.91372" z3="0.610728"/>
                  <atom elementType="C" id="a8" x3="-2.47269" y3="0.405209" z3="0.74878"/>
                  <atom elementType="C" id="a9" x3="-1.721434" y3="1.431602" z3="0.195222"/>
                  <atom elementType="C" id="a10" x3="-0.557427" y3="1.143695" z3="-0.50245"/>
                  <atom elementType="H" id="a11" x3="1.906655" y3="0.372061" z3="1.527985"/>
                  <atom elementType="H" id="a12" x3="3.582491" y3="0.164275" z3="1.418902"/>
                  <atom elementType="H" id="a13" x3="0.954237" y3="-0.778495" z3="-2.324596"/>
                  <atom elementType="H" id="a14" x3="-0.575758" y3="-2.239363" z3="-0.191101"/>
                  <atom elementType="H" id="a15" x3="-2.651617" y3="-1.713771" z3="1.037473"/>
                  <atom elementType="H" id="a16" x3="-3.383887" y3="0.632804" z3="1.284675"/>
                  <atom elementType="H" id="a17" x3="-2.045357" y3="2.458251" z3="0.295599"/>
                  <atom elementType="H" id="a18" x3="0.016354" y3="1.939675" z3="-0.960983"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a13" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a14" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a8 a16" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a17" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a10 a18" order="S"/>
               </bondArray>
               <formula concise="C6H8FN2Si">
                  <atomArray count="6 8 1 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">147.16150319999997</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C6H8FN2Si/c7-10(8)9-6-4-2-1-3-5-6/h1-5,9H,8H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,5,3,1,4,2/E:(2,3)(4,5)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,10.3/rA:18nNSi3FNC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s8;s5s9;s1;s1;s4;s6;s7;s8;s9;s10;/rC:2.6907,.1051,.9476;2.5102,-.3775,-.611;3.8065,-.7547,-1.4074;1.0552,-.4851,-1.3597;-.1548,-.1783,-.6328;-.8965,-1.2117,-.0767;-2.0628,-.9137,.6107;-2.4727,.4052,.7488;-1.7214,1.4316,.1952;-.5574,1.1437,-.5024;1.9067,.3721,1.528;3.5825,.1643,1.4189;.9542,-.7785,-2.3246;-.5758,-2.2394,-.1911;-2.6516,-1.7138,1.0375;-3.3839,.6328,1.2847;-2.0454,2.4583,.2956;.0164,1.9397,-.961;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">580</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">580</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C6FH8N2Si_hess_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">80</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">169</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">584.4928609059 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-10 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-11 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-03 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.569e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.004 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.002 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.006 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="N" id="a1" x3="2.69066307" y3="0.1051247" z3="0.94759602">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="2.51023792" y3="-0.37749552" z3="-0.61095269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a3" x3="3.80653205" y3="-0.75471334" z3="-1.40740456">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a4" x3="1.05524502" y3="-0.48509567" z3="-1.35970989">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="-0.15483324" y3="-0.17826394" z3="-0.6328335">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="-0.89653877" y3="-1.21167878" z3="-0.07672876">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-2.06277436" y3="-0.91372032" z3="0.61072761">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-2.47269042" y3="0.40520905" z3="0.74877975">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="-1.72143358" y3="1.43160196" z3="0.19522238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="-0.55742663" y3="1.14369488" z3="-0.50245032">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a11" x3="1.90665527" y3="0.37206086" z3="1.52798451">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a12" x3="3.58249147" y3="0.16427489" z3="1.41890227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="0.95423746" y3="-0.77849526" z3="-2.3245959">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-0.57575799" y3="-2.23936261" z3="-0.19110097">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="-2.65161729" y3="-1.71377073" z3="1.0374732">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-3.38388734" y3="0.63280398" z3="1.28467515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-2.04535661" y3="2.4582507" z3="0.2955988">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="0.01635396" y3="1.93967516" z3="-0.96098312">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a12" order="S"/>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a13" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a10" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a6 a14" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a15" order="S"/>
                           <bond atomRefs2="a8 a16" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a9 a17" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a10 a18" order="S"/>
                        </bondArray>
                        <formula concise="C6H8FN2Si">
                           <atomArray count="6 8 1 2 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">147.16150319999997</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C6H8FN2Si/c7-10(8)9-6-4-2-1-3-5-6/h1-5,9H,8H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,5,3,1,4,2/E:(2,3)(4,5)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,10.3/rA:18nNSi3FNC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s8;s5s9;s1;s1;s4;s6;s7;s8;s9;s10;/rC:2.6907,.1051,.9476;2.5102,-.3775,-.611;3.8065,-.7547,-1.4074;1.0552,-.4851,-1.3597;-.1548,-.1783,-.6328;-.8965,-1.2117,-.0767;-2.0628,-.9137,.6107;-2.4727,.4052,.7488;-1.7214,1.4316,.1952;-.5574,1.1437,-.5025;1.9067,.3721,1.528;3.5825,.1643,1.4189;.9542,-.7785,-2.3246;-.5758,-2.2394,-.1911;-2.6516,-1.7138,1.0375;-3.3839,.6328,1.2847;-2.0454,2.4583,.2956;.0164,1.9397,-.961;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Freq RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="vibrations" dictRef="cc:vibrations">
                     <array dataType="xsd:double" dictRef="cc:frequency" size="54">0.00 0.00 0.00 0.00 0.00 0.00 22.58 74.76 78.75 205.69 256.76 304.60 318.49 381.52 430.60 449.11 499.11 551.25 569.12 592.68 643.13 730.39 782.85 822.05 855.75 892.73 898.48 988.80 1041.41 1046.11 1072.01 1083.23 1114.53 1141.40 1152.28 1224.76 1236.15 1272.91 1371.90 1395.98 1401.60 1538.42 1581.27 1634.10 1708.25 1713.37 3269.82 3275.09 3287.93 3296.79 3304.72 3622.34 3633.00 3729.62</array>
                     <matrix cols="54" dataType="xsd:double" dictRef="cc:displacement" rows="54">0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 -0.039662 -0.237598 0.071954 -0.008037 -0.024743 0.002315 0.001633 0.007728 0.002571 0.009652 0.138990 -0.053784 0.009703 0.085778 -0.027859 0.146575 0.062398 0.111567 0.147664 0.005724 0.139419 0.007428 -0.025372 0.013462 -0.131108 -0.000731 -0.131169 -0.126218 0.055936 -0.144719 -0.047091 -0.278820 0.080667 -0.052084 -0.328998 0.106742 0.016149 0.285366 -0.098899 0.245551 0.084349 0.188867 0.254988 -0.014007 0.250487 0.006310 -0.068376 0.029961 -0.239036 -0.025873 -0.222628 -0.218578 0.071056 -0.232376 -0.317881 0.067949 -0.021457 -0.087003 0.003676 -0.028984 0.027011 -0.013355 0.165762 -0.012971 -0.017639 -0.170370 0.006465 -0.020349 -0.136442 0.038980 -0.017832 -0.088005 0.128861 -0.006140 0.058732 0.188510 0.002387 0.156976 0.144614 -0.001620 0.089400 0.052554 -0.013394 -0.059112 -0.410993 0.088094 -0.156262 -0.391703 0.086622 0.115049 0.005198 -0.021900 -0.169554 0.004692 -0.022081 -0.147150 0.157156 -0.002147 0.105220 0.265517 0.012158 0.283719 0.184238 0.004102 0.158918 0.025874 -0.016099 -0.097692 -0.082659 -0.207174 0.068733 -0.016484 -0.017775 0.002086 0.043438 0.372934 -0.084667 -0.018984 -0.226889 0.036782 -0.007204 -0.128861 0.013210 -0.082894 -0.041504 0.073651 -0.059477 0.091849 0.058760 0.040768 0.131125 -0.015542 0.116052 0.042375 -0.077528 0.089739 -0.090987 -0.062552 -0.128828 -0.479988 0.131798 -0.078269 -0.023666 0.037181 -0.018756 -0.279095 0.052920 -0.159419 -0.072181 0.138142 -0.120421 0.162718 0.107653 0.059676 0.230732 -0.025604 0.195838 0.073407 -0.138110 0.147588 -0.161405 -0.113405 -0.224433 -0.003440 -0.095605 0.041934 -0.036793 -0.113436 0.114589 -0.015571 -0.006028 -0.013068 0.009104 -0.004462 0.088137 0.032260 0.173385 0.090393 0.030863 0.175988 -0.022498 0.005177 -0.002041 -0.124841 -0.011899 -0.147700 -0.029098 0.006611 0.015642 0.081906 0.031342 0.187884 -0.379355 -0.043192 -0.283795 -0.340030 0.060574 0.109758 -0.184783 0.057914 0.001707 0.128771 0.036719 0.231635 -0.052014 -0.006869 -0.065328 -0.252890 -0.036440 -0.354965 -0.062530 0.000761 -0.032073 0.114116 0.046192 0.253982 -0.157875 0.066609 0.174714 -0.055663 0.062719 0.158477 -0.386986 -0.062806 -0.289581 0.058321 0.008407 0.040778 0.121783 -0.008794 0.031514 0.179537 -0.029720 0.042889 0.130353 -0.040877 -0.058042 0.088117 -0.041375 -0.169493 0.133572 -0.013015 -0.056577 0.179500 -0.001792 0.037102 -0.266738 0.051808 0.042120 -0.237351 0.103445 0.318905 0.120751 -0.006527 0.039815 0.237649 -0.014737 0.070258 0.105931 -0.029237 -0.071073 0.012069 -0.054095 -0.294305 0.106787 -0.021388 -0.062271 0.224743 -0.020061 0.060972 0.146689 -0.066367 -0.037293 -0.169476 0.090914 -0.045871 -0.064439 0.016831 0.178444 -0.087088 -0.014541 -0.138292 0.026382 -0.039198 0.020990 0.087913 -0.036642 0.100404 0.042688 -0.011913 0.006592 -0.007316 -0.009769 -0.145736 0.084781 -0.002262 -0.005374 0.117543 -0.025065 0.077346 0.416872 0.072706 0.253090 0.330209 -0.301743 -0.346609 -0.132649 0.064540 -0.156422 0.114731 -0.033858 0.151275 0.017527 0.011571 0.015445 -0.097747 -0.005799 -0.301689 0.098652 0.001568 -0.004866 0.166603 -0.047401 0.098546 0.072538 0.189778 -0.088904 -0.116637 -0.385245 0.112793 -0.014932 0.215778 0.004529 -0.039287 0.016318 -0.063715 0.026322 0.131543 -0.027354 0.108426 0.091345 -0.026123 0.096436 -0.026376 -0.025914 0.001196 -0.056472 -0.052184 -0.030673 0.012649 0.022297 0.017179 0.129668 0.039516 0.154321 -0.042910 0.124074 0.190537 0.507214 -0.348579 -0.078362 -0.113728 -0.019350 0.185644 0.119766 -0.074064 0.153429 -0.074495 -0.039203 -0.041662 -0.122802 -0.097156 -0.103613 -0.014598 0.068225 0.000762 0.180504 0.109959 -0.003940 -0.045343 0.009471 -0.002504 0.044568 -0.017787 -0.005810 -0.038167 0.017848 -0.009714 -0.062458 0.016447 0.006873 0.056893 -0.011723 0.039832 0.046996 0.002238 0.010954 -0.015511 -0.037059 -0.000219 -0.024925 0.001696 -0.006335 0.001391 0.037844 -0.019833 0.053182 -0.020919 -0.043322 -0.505572 0.167722 0.064285 0.554776 -0.194735 -0.051797 -0.518641 0.159801 0.094635 0.062039 0.017164 0.022525 -0.043265 -0.073846 -0.003881 -0.048177 0.005167 -0.022767 -0.008210 0.084932 -0.063306 0.076207 -0.034419 0.000949 0.001356 -0.001447 -0.001455 -0.015341 0.004322 0.002695 0.019755 -0.006055 -0.002440 -0.015889 0.006284 0.002447 0.010740 0.002433 0.098516 0.024515 0.149805 -0.091516 -0.016374 -0.157738 0.003539 -0.004928 0.005076 0.088385 0.014200 0.151824 -0.099266 -0.001999 -0.158162 0.032010 0.303285 -0.098518 -0.031438 -0.313693 0.099266 -0.008303 -0.051968 0.017833 0.226938 0.043549 0.338157 -0.197423 -0.037131 -0.343128 0.007903 -0.007073 0.013451 0.186952 0.027755 0.333267 -0.231236 -0.019292 -0.353269 -0.002910 -0.027772 -0.001801 -0.009945 0.022142 -0.014141 -0.002796 0.018149 0.003884 -0.025492 -0.199454 0.065759 0.016305 0.094003 -0.003238 0.014815 0.081241 -0.071841 0.057863 -0.022688 0.006519 0.009907 -0.043374 0.010480 -0.055727 -0.004433 -0.019843 0.018386 0.105684 0.026470 0.065531 0.514959 -0.159846 -0.049887 -0.581170 0.156617 -0.059988 -0.335187 0.111057 0.063767 0.106690 -0.152460 0.126658 -0.064499 0.021505 0.011317 -0.077018 0.026926 -0.150866 -0.032674 -0.033047 -0.015454 0.159934 0.074413 0.013292 0.007191 0.048759 0.047959 0.004377 0.031952 0.018987 -0.007848 -0.035565 0.065868 -0.040249 -0.097514 -0.100956 -0.029514 -0.286186 -0.010611 0.056881 0.024792 0.033633 0.055268 0.134106 -0.198023 0.005160 -0.108620 0.020394 -0.020954 0.147177 -0.018484 -0.024376 0.041384 -0.010791 0.101672 -0.024309 -0.018165 -0.043899 0.116252 0.251047 -0.232765 -0.062083 0.057776 0.050793 0.267222 0.225010 0.031977 0.356205 -0.281121 -0.005617 -0.243937 0.205007 0.018001 0.351789 0.042554 0.059164 0.260537 0.007355 0.069867 -0.019791 0.001720 0.011754 -0.002076 -0.002835 -0.014727 0.003259 -0.003796 -0.136706 0.033517 -0.001624 0.021270 -0.019639 0.010567 0.036925 0.005251 -0.002899 -0.005752 -0.002522 -0.010485 -0.014347 -0.002059 0.002895 -0.005510 0.017428 -0.006841 0.030546 -0.020870 -0.055051 -0.538194 0.175569 -0.014505 -0.142402 0.048405 0.069495 0.737681 -0.240446 0.042279 0.049668 -0.008989 0.012615 -0.024019 -0.015765 -0.007589 -0.011674 0.002041 0.013744 -0.007603 0.076008 -0.005012 0.063137 0.035872 0.009339 0.094324 -0.031205 -0.000482 -0.006079 0.001218 0.000689 -0.001648 0.000860 0.001414 0.060756 -0.014274 -0.000313 -0.006231 0.006718 -0.004709 -0.014229 0.000202 -0.000164 0.000425 0.002794 0.004457 0.005233 0.000448 0.000157 0.000151 -0.007645 0.002811 -0.011540 0.005000 -0.054821 -0.531495 0.169864 -0.065256 -0.629718 0.200816 -0.039645 -0.452336 0.146238 -0.020821 -0.020531 0.001758 -0.007858 0.007707 0.006322 0.003738 0.006588 -0.001443 -0.000961 0.001370 -0.026221 0.009963 -0.024026 -0.005068 -0.000496 -0.014805 -0.039372 0.009581 -0.008022 -0.029406 0.051654 -0.002261 0.010195 -0.158305 0.093249 0.265237 -0.283145 0.026757 -0.030099 -0.034682 -0.148151 -0.028412 0.076334 -0.128243 0.068888 0.155984 -0.058128 -0.232697 0.115953 0.122713 0.025149 -0.000838 0.108372 -0.075155 -0.082109 -0.031992 -0.139515 -0.065371 0.037922 0.069060 -0.089877 0.119007 0.250302 0.237582 -0.071060 0.046513 0.091356 0.024463 0.374392 0.155540 -0.059496 -0.237362 0.118502 0.090546 0.354197 0.247757 -0.019607 0.015997 -0.000496 0.003223 -0.005827 -0.003232 -0.001117 -0.001246 -0.003434 0.000505 0.002107 -0.001396 -0.102121 0.024718 -0.010941 -0.120023 0.015957 0.181320 -0.222724 -0.093056 0.265676 0.186614 -0.175997 0.007989 0.131084 -0.022882 -0.194076 0.290881 0.097821 -0.234430 -0.129698 0.150351 -0.000315 -0.036517 0.012349 0.000693 -0.022483 -0.004902 0.010949 0.009494 -0.010612 0.054585 -0.270819 -0.010560 0.187569 0.276368 -0.124856 -0.052891 -0.297597 0.055769 -0.070581 0.339770 0.036972 -0.134076 -0.224479 0.109650 -0.001521 0.000105 -0.002426 -0.001564 -0.000258 0.000615 -0.006547 0.001496 0.003072 0.006812 -0.002488 -0.000979 0.095876 0.011629 0.129803 -0.052628 0.003330 -0.094185 0.081886 0.018631 0.126604 -0.062582 -0.005806 -0.078618 0.080829 0.000773 0.129985 -0.055690 -0.016547 -0.093953 0.001448 -0.007600 0.004811 0.003147 -0.001147 -0.011110 -0.070244 0.014131 0.002477 -0.286988 -0.028917 -0.461147 -0.005755 -0.006270 -0.041478 -0.293774 -0.036701 -0.458182 -0.008586 -0.011191 -0.037316 -0.290705 -0.053311 -0.451308 -0.014726 -0.034684 -0.111705 -0.017639 -0.005046 -0.019761 -0.068321 0.023391 0.053186 0.032806 0.051091 0.149597 0.100163 -0.005442 0.048244 0.003039 0.064952 -0.092640 0.042430 0.082015 -0.047758 -0.115951 0.013866 -0.020674 0.023442 -0.109620 -0.019014 -0.016459 -0.096567 -0.067261 -0.017138 -0.033384 -0.120254 -0.017570 -0.033855 -0.114183 -0.001159 0.043986 0.159698 0.103731 0.066568 0.200627 0.389456 0.031421 0.330374 0.135626 0.057698 0.388168 0.394735 -0.030015 0.336405 0.103340 -0.025377 0.213276 -0.045769 0.037928 0.104865 0.000567 0.002155 0.007073 0.061586 -0.023555 -0.055502 -0.001717 -0.031839 -0.119731 0.066058 0.013712 0.128661 -0.053508 -0.038103 -0.028875 -0.045602 -0.049666 0.007198 -0.003157 -0.015497 -0.088742 -0.032649 0.060984 -0.012966 -0.042614 0.040962 -0.042899 0.171353 0.105634 0.363390 0.113616 -0.066100 -0.169883 -0.166395 -0.039653 -0.100742 0.050114 -0.021236 0.092767 0.148681 0.031316 0.431292 0.267993 0.021056 0.357294 0.155962 0.078654 0.433898 0.070244 0.041968 0.095849 0.125671 -0.023249 -0.032863 0.007870 0.000731 0.004267 -0.065460 0.022404 0.050359 0.028246 -0.027878 -0.087878 0.034787 0.002868 0.046048 -0.025904 -0.029842 0.005286 -0.039180 -0.041681 0.013851 0.012129 -0.009281 -0.038949 -0.027249 0.054521 -0.001308 -0.013547 0.039504 -0.003728 -0.328664 -0.150359 -0.575881 -0.205867 0.197812 0.552838 0.011133 -0.039711 -0.085392 -0.007713 -0.027209 0.012178 0.004429 0.009319 0.174183 0.114956 0.003436 0.131429 -0.000973 0.048893 0.161721 -0.009070 0.033954 -0.013888 -0.012453 -0.009052 -0.023742 0.006513 0.001288 0.001251 -0.017154 0.004739 0.008971 0.032073 0.000921 0.002308 0.004612 -0.001270 -0.004544 0.035812 -0.003942 0.073887 0.020209 -0.008697 0.061684 0.009228 -0.001351 -0.003688 -0.037316 0.012102 -0.048292 -0.046833 0.003106 -0.067976 0.022701 0.028520 0.003848 0.011682 -0.025657 -0.068209 0.057360 -0.050885 0.015600 -0.284340 -0.047323 -0.445264 -0.258126 -0.031418 -0.363020 0.002088 0.000799 -0.016450 0.202062 0.046671 0.376091 0.286031 0.067691 0.459404 0.102805 0.045313 0.175622 -0.048216 -0.000105 -0.017137 0.114172 -0.029290 -0.057857 -0.227652 0.009767 -0.019046 -0.034788 0.008276 0.021147 0.058433 0.063771 -0.001401 0.091735 0.093449 -0.046812 -0.054116 0.011834 0.022680 0.033767 -0.127154 -0.045405 0.008670 -0.078182 -0.024754 -0.176098 -0.023647 -0.150686 -0.113548 0.195156 0.571369 -0.403149 0.024272 -0.007791 -0.078712 0.050448 -0.215961 0.115729 -0.003521 -0.208812 -0.015394 0.014416 0.083825 0.264635 -0.072164 0.081051 0.097357 -0.061686 0.127441 -0.010913 -0.004670 -0.019464 0.004490 0.001966 0.007965 0.001935 -0.000422 -0.000770 -0.002334 0.003098 0.019487 -0.039010 -0.001705 -0.042779 0.054524 0.001993 0.081942 -0.003713 0.004389 -0.018260 -0.052742 -0.004792 -0.066164 -0.011501 -0.008911 -0.021196 0.060847 0.013548 0.081848 0.013319 -0.004643 0.011608 0.010730 -0.020108 -0.059984 0.092936 0.003725 0.009075 -0.288766 -0.042181 -0.486902 0.066807 0.009043 0.087560 0.246651 0.034754 0.426267 0.081122 0.005701 0.129155 -0.300468 -0.065170 -0.507885 0.000436 -0.000798 0.000470 0.000861 0.000463 -0.000456 -0.000423 0.000275 0.000441 -0.002820 0.000486 0.000969 0.003240 -0.000759 -0.005865 0.035460 0.035886 0.073964 -0.052775 -0.010462 -0.079312 0.022090 -0.006379 -0.024314 0.054294 0.010426 0.085557 -0.060438 -0.031786 -0.050496 0.000617 0.008975 -0.003608 -0.001221 -0.000300 0.003734 0.000282 -0.012633 0.004442 -0.236776 0.002256 -0.377390 0.266064 0.038088 0.448723 0.058782 0.003461 0.030381 -0.283732 -0.041697 -0.483157 0.190807 0.024740 0.366834 0.001631 0.001651 0.007524 -0.014611 -0.000153 -0.005652 0.005736 -0.001919 -0.004606 0.024895 -0.002040 -0.000120 -0.043656 0.013768 0.039679 0.107081 -0.356631 -0.007081 0.007045 0.053909 -0.059843 -0.265937 0.071851 0.179447 0.025966 -0.066683 0.023079 0.169079 0.283077 -0.174378 -0.002274 0.005602 0.000155 -0.001087 0.004330 0.010881 0.049491 -0.005291 -0.001338 -0.016971 -0.403639 -0.101321 0.113953 0.105502 0.209052 -0.348193 0.067915 0.075569 -0.104998 -0.086689 -0.088581 0.245515 0.366562 0.026234 0.001934 0.001194 0.004586 -0.003084 -0.000690 -0.003212 0.000689 -0.000165 -0.000283 0.001407 0.000370 0.000260 0.000544 -0.000424 -0.001746 -0.011159 -0.013954 -0.027935 0.045584 0.003496 0.077161 -0.073562 -0.005457 -0.093089 0.044313 0.009124 0.068304 -0.006725 0.006051 -0.024613 -0.001283 0.001433 0.000584 -0.001995 0.003799 0.012034 -0.000913 -0.000620 0.001111 0.112102 0.002370 0.164326 -0.259230 -0.043914 -0.430223 0.328829 0.053285 0.567943 -0.229727 -0.030658 -0.400866 0.090686 0.028752 0.135448 -0.005219 -0.001329 -0.005832 0.020421 -0.001290 0.002304 -0.017116 0.004395 0.008578 0.009051 -0.007407 -0.022101 -0.021691 0.004886 0.017039 -0.057772 -0.040937 0.034370 0.051198 0.170697 -0.040106 0.126283 -0.034767 -0.081076 -0.002144 -0.179278 0.018024 -0.038997 0.066412 0.018793 0.009679 0.002446 0.010566 0.006735 -0.009700 -0.027694 -0.010191 -0.002515 -0.021878 -0.345248 -0.150810 0.250588 -0.203496 0.429076 0.056265 0.158099 -0.040773 -0.060780 -0.305416 -0.308451 0.209058 -0.287555 0.310015 0.138825 -0.031852 0.045504 0.131846 0.268056 -0.066841 -0.130860 -0.254684 0.071822 0.149665 -0.107731 -0.014488 -0.072679 -0.089697 0.017458 0.005350 0.018195 0.002197 -0.001135 0.021276 0.000319 -0.014115 -0.033753 0.010412 0.017650 0.020006 -0.013319 -0.011074 0.012796 -0.013566 0.001695 0.166247 0.103575 0.372248 0.074772 -0.021956 -0.042314 -0.702322 0.049805 -0.029475 0.115332 0.047463 -0.116835 0.072090 -0.054194 -0.045966 -0.026772 0.017089 0.030776 0.091516 0.014390 -0.066765 0.089800 -0.120100 -0.079053 -0.001730 -0.002069 -0.007074 0.004838 0.002523 0.006117 -0.000370 -0.000436 0.000003 -0.006083 0.011203 -0.005841 -0.008150 -0.040881 0.009327 -0.077036 0.063922 0.042538 0.056369 0.037965 -0.038840 -0.013147 -0.078963 0.014868 -0.039031 0.062955 0.022858 0.089048 0.019240 -0.061915 -0.000670 -0.005435 -0.004366 0.001970 -0.004043 -0.014210 -0.005165 0.016943 -0.007881 -0.421243 -0.057715 0.262227 0.231446 -0.127107 -0.127652 -0.074095 -0.500489 0.090538 -0.250981 -0.006244 0.136281 0.403501 -0.270370 -0.192943 0.041743 0.078607 0.258010 -0.112800 -0.070003 -0.251318 -0.029411 0.013007 0.032462 0.171222 0.033210 0.147125 0.086830 -0.025354 -0.060786 -0.008433 -0.000063 0.016043 -0.030874 -0.017344 0.019522 0.023818 -0.014040 -0.014079 -0.029538 0.040752 0.012716 0.010827 0.011241 0.007816 0.055930 0.087077 0.287758 -0.037140 0.136968 0.416737 0.593346 -0.012079 0.117893 -0.232471 -0.079840 0.078963 -0.056581 0.015875 0.050282 0.014156 -0.053010 -0.014630 -0.093976 0.016965 0.079903 -0.132453 0.096902 -0.032282 0.000062 0.000083 -0.000010 -0.000294 0.000030 0.000249 0.000304 -0.000009 -0.000191 -0.000544 -0.002391 0.001475 0.003948 0.008617 -0.004452 -0.004316 -0.011457 0.004230 0.028770 -0.037573 -0.014678 0.010606 0.071281 -0.013115 -0.038105 -0.019583 0.026171 0.001385 -0.012985 -0.000222 -0.000585 -0.001278 -0.000370 0.000201 0.000580 -0.000360 -0.011461 0.009056 -0.000925 -0.130201 -0.059708 0.085364 0.303059 -0.318013 -0.158221 0.101238 0.683355 -0.119108 -0.381534 -0.150466 0.241991 0.101167 -0.111844 -0.047427 -0.001434 -0.001316 -0.004431 0.006702 0.001100 0.005675 -0.001517 0.000299 0.000597 -0.016053 0.001773 0.003068 0.017614 -0.004255 -0.014576 -0.035671 -0.016447 0.024320 0.027461 -0.043607 -0.013549 0.001964 -0.000488 -0.000347 0.036304 0.026962 -0.027112 -0.027266 0.032645 0.016552 -0.000595 -0.000861 -0.004367 0.002805 -0.003900 -0.012781 -0.068706 0.011470 0.006223 -0.421352 -0.163580 0.266961 0.302123 -0.322778 -0.155807 -0.000669 -0.003661 -0.000441 0.375395 0.155155 -0.237153 -0.347313 0.347340 0.162233 0.001768 -0.002116 -0.006417 0.008324 0.004676 0.017660 0.006691 -0.001366 -0.002097 -0.104260 0.028754 0.074271 0.232958 -0.053475 -0.186904 0.053389 -0.022328 -0.022218 -0.064243 -0.045370 0.044115 -0.002536 0.002379 0.001085 -0.051612 0.068676 0.025908 0.058500 -0.014141 -0.027077 -0.011968 -0.007294 -0.019742 0.008430 -0.005078 -0.016999 -0.648978 0.095029 0.118346 -0.206630 -0.133836 0.100890 -0.320901 0.197986 0.172515 -0.010682 -0.021626 0.007835 -0.301566 -0.014929 0.182103 -0.139896 0.180735 0.026793 -0.004282 0.000003 -0.001668 0.020385 -0.001625 0.000128 -0.006262 0.001479 0.005273 -0.081863 0.022165 -0.004063 0.010811 -0.215731 0.037235 0.028725 0.041773 -0.025033 -0.062220 0.081141 0.030375 -0.009841 -0.041970 0.010095 0.075562 0.063580 -0.054441 -0.001612 0.046464 -0.005074 0.008115 -0.000241 0.015790 0.003818 -0.005449 -0.015889 0.344616 -0.055044 -0.030687 0.316914 0.153141 -0.196322 0.274375 -0.254812 -0.141420 -0.016360 -0.079226 0.017167 -0.389686 -0.107451 0.253543 -0.288310 0.353290 0.156065 -0.009389 -0.000787 -0.005067 0.043846 -0.003457 0.001459 -0.012944 0.004607 0.010329 -0.184860 0.004095 -0.011067 0.085134 0.056842 0.004366 0.010129 -0.007445 -0.012927 0.017434 -0.043334 -0.009250 -0.005471 0.006462 0.003910 -0.031476 -0.007014 0.017413 0.004660 -0.011134 -0.008779 0.018414 0.008261 0.028402 0.005243 -0.010457 -0.030967 0.879289 -0.089432 -0.108328 -0.163387 -0.081700 0.147820 -0.171826 0.148353 0.096820 0.005052 0.088501 -0.008679 0.098265 0.042259 -0.059346 0.092315 -0.075239 -0.014092 0.001052 -0.000134 -0.000150 -0.003598 0.000741 0.000488 0.001210 -0.000481 -0.000964 0.013627 -0.008047 0.002651 -0.014908 -0.067564 0.008671 0.163729 0.046324 -0.104322 -0.077972 0.062664 0.042851 -0.026502 -0.177837 0.031413 0.090348 0.020492 -0.057169 -0.138800 0.123678 0.075762 -0.000653 0.001770 -0.002787 -0.001491 -0.001130 0.004899 -0.085802 -0.001825 0.012782 -0.430085 -0.181230 0.272613 -0.115339 0.098773 0.063199 0.062717 0.435857 -0.077293 0.139593 0.037418 -0.088380 0.353444 -0.379953 -0.181923 0.000299 0.000478 0.001468 -0.001627 0.000346 -0.000826 0.000292 -0.000738 -0.000037 0.011343 0.017001 -0.001170 -0.025545 -0.151655 0.025772 -0.072201 0.076050 0.037852 0.123918 -0.018291 -0.074074 -0.019121 -0.137328 0.023714 -0.122290 0.043054 0.071658 0.090286 0.033588 -0.059127 -0.005405 -0.006084 -0.003009 0.004213 -0.000539 -0.005961 -0.054067 0.006566 0.009738 0.125914 0.174504 -0.094933 -0.203700 0.339738 0.095508 0.095308 0.642597 -0.113163 0.287841 0.219352 -0.197810 -0.074723 0.227206 0.021844 0.000616 0.001792 0.005829 0.000622 -0.000505 -0.001467 0.000545 0.000116 0.000610 -0.035135 0.008581 0.019759 0.132398 -0.033924 -0.080851 -0.080924 -0.090498 0.058202 -0.074884 0.130522 0.034619 0.087360 -0.023968 -0.051508 -0.104886 -0.082919 0.072449 -0.049838 0.122458 0.019631 -0.022810 -0.004434 -0.021711 0.019635 -0.010955 -0.027830 -0.013941 0.005970 0.017434 0.372445 0.063344 -0.233290 0.347321 -0.285235 -0.188386 0.108667 -0.023022 -0.064480 0.399977 0.097633 -0.255649 0.322394 -0.233800 -0.178330 -0.009777 -0.028295 -0.091320 0.000432 0.003132 0.009813 0.002439 -0.000843 -0.001875 -0.002262 -0.000487 -0.002277 0.003263 -0.000495 -0.001725 -0.001504 -0.002975 0.001235 -0.002578 0.004274 0.001199 0.002281 -0.002498 -0.001308 -0.004290 -0.000801 0.002749 0.001249 0.002066 -0.000584 0.474756 0.113333 0.504565 -0.364253 0.217931 0.562816 -0.017029 0.001239 -0.000617 0.007747 -0.000050 -0.005397 0.009220 -0.007017 -0.004422 0.003916 0.003763 -0.002523 0.010778 0.005051 -0.006258 0.002960 -0.000567 -0.004297 -0.000270 -0.000539 -0.001297 -0.000195 0.000880 -0.000282 0.000018 -0.000931 0.000173 0.007165 0.014176 -0.001800 -0.057498 -0.314643 0.061342 0.129590 0.177520 -0.095067 0.019965 -0.214127 0.006174 0.064542 0.365085 -0.071691 -0.119274 -0.192901 0.091460 -0.036984 0.207611 0.003028 0.007783 -0.002525 0.010837 -0.005459 0.005333 0.007995 -0.035921 0.008111 0.005115 -0.258890 0.053322 0.150266 -0.216276 -0.013072 0.132130 -0.054661 -0.468577 0.074233 0.238263 -0.086284 -0.140391 0.230400 -0.032905 -0.135911 -0.000755 0.000174 0.000162 0.004243 0.000407 0.003088 -0.001514 0.000304 -0.000063 0.005767 -0.006459 -0.015153 -0.154493 0.066826 0.096285 0.253066 0.010681 -0.157453 -0.236533 0.149677 0.132085 0.121570 -0.055615 -0.070195 -0.244469 0.000696 0.151444 0.235774 -0.164744 -0.133262 -0.012365 -0.003990 -0.015584 0.008888 -0.007098 -0.020209 0.052561 -0.006953 -0.016570 -0.259769 -0.194191 0.178467 0.187229 -0.299039 -0.089288 0.154942 -0.008928 -0.092600 0.223769 0.196372 -0.157568 -0.215696 0.304475 0.111553 -0.000014 0.000074 0.000049 0.000057 -0.000121 -0.000037 0.000003 0.000011 0.000007 0.000539 -0.000110 -0.000376 -0.002151 0.003572 0.001125 -0.000400 0.004025 -0.000073 -0.002808 -0.003454 0.001989 0.006093 -0.001874 -0.003529 -0.004257 0.021781 0.000527 -0.043573 -0.062615 0.034795 0.000406 -0.000671 0.000134 -0.000678 0.000087 -0.000459 0.001194 -0.000826 0.000167 0.012666 -0.043048 -0.004199 0.031621 0.042908 -0.022924 -0.073138 0.018329 0.043080 0.077990 -0.256082 -0.023518 0.502179 0.702483 -0.401924 -0.000022 -0.000027 0.000052 0.000054 0.000073 -0.000044 0.000006 -0.000008 0.000005 0.000427 -0.000108 -0.000274 -0.002532 -0.002707 0.001860 -0.023085 0.077955 0.007722 -0.013024 -0.022111 0.009840 0.008563 -0.001508 -0.005083 -0.001661 0.003062 0.000706 0.004538 0.005070 -0.003426 0.000342 0.000212 -0.000388 -0.000340 -0.000124 -0.000232 0.001198 0.000907 -0.000627 0.271869 -0.882166 -0.095586 0.177170 0.244981 -0.128841 -0.100308 0.024795 0.059011 0.012489 -0.037945 -0.004009 -0.045528 -0.062751 0.036463 0.000010 0.000007 0.000022 -0.000002 -0.000014 -0.000038 0.000013 0.000003 0.000003 0.000300 -0.000048 -0.000101 -0.001258 0.000188 0.000861 -0.007774 0.022440 0.002902 0.020008 0.021993 -0.014071 -0.053399 0.013580 0.031436 0.014270 -0.036498 -0.005291 -0.010600 -0.013008 0.008181 -0.000107 -0.000059 0.000109 -0.000102 -0.000012 -0.000092 0.000691 -0.000210 -0.001253 0.078138 -0.250022 -0.027702 -0.207156 -0.276256 0.149727 0.616165 -0.154136 -0.362560 -0.138203 0.429404 0.043658 0.107880 0.148589 -0.085989 -0.000015 -0.000016 0.000016 0.000003 0.000025 -0.000006 0.000002 -0.000003 -0.000001 0.000035 0.000055 0.000002 -0.000361 -0.001863 0.000393 -0.007392 0.017108 0.003136 0.033624 0.043886 -0.024256 -0.004061 -0.003976 0.002828 -0.018695 0.057533 0.006034 0.009374 0.009265 -0.007021 0.000224 0.000116 -0.000199 -0.000050 0.000054 -0.000019 0.000073 0.000298 -0.000420 0.060786 -0.189197 -0.022097 -0.370342 -0.500939 0.268333 0.038444 -0.004390 -0.023048 0.205017 -0.647976 -0.063856 -0.083370 -0.112279 0.066270 0.000011 -0.000007 -0.000018 -0.000020 -0.000006 -0.000027 0.000010 -0.000002 0.000003 0.000198 -0.000036 -0.000101 -0.000981 0.000150 0.000635 -0.005392 0.011605 0.002351 0.025034 0.037130 -0.018411 0.050733 -0.012783 -0.029873 0.011904 -0.043911 -0.003139 -0.006683 -0.006359 0.004960 -0.000516 0.000098 0.000262 0.000390 0.000050 0.000170 0.000406 -0.000054 -0.000089 0.040889 -0.125789 -0.014927 -0.286942 -0.393324 0.208269 -0.555282 0.138897 0.326649 -0.147404 0.473706 0.045105 0.056847 0.076043 -0.045038 -0.000160 -0.003777 -0.011837 0.000495 0.000046 0.000279 -0.000034 0.000006 0.000001 -0.008412 -0.020406 -0.067336 -0.000170 0.000109 0.000252 -0.000374 -0.000024 0.000151 0.000153 -0.000068 -0.000077 -0.000100 0.000086 0.000055 0.000061 -0.000012 -0.000027 -0.000329 0.000182 0.000044 -0.128708 0.043090 0.092913 0.135737 0.008652 0.070740 0.106907 0.280497 0.924205 0.000411 -0.000156 -0.000312 -0.000185 -0.000272 0.000379 0.000605 -0.000127 -0.000523 -0.000055 0.000087 0.000296 0.000306 -0.000375 -0.000039 0.000625 0.016950 0.053039 0.000103 -0.000163 -0.000495 0.000112 -0.000121 -0.000320 -0.002368 -0.004644 -0.015453 0.000258 -0.000128 -0.000214 -0.000099 0.000024 0.000028 0.000014 0.000020 -0.000003 -0.000040 -0.000002 0.000045 0.000023 -0.000032 0.000020 -0.000089 0.000079 0.000034 0.568896 -0.191920 -0.415497 -0.572624 -0.035192 -0.294201 0.023093 0.063201 0.208078 0.000222 0.000661 -0.000184 -0.000453 -0.000329 0.000248 -0.000243 0.000026 -0.000011 -0.000436 0.000710 0.000041 -0.000022 -0.000870 0.000126 0.083607 -0.009232 -0.001933 0.000029 -0.000048 -0.000127 0.000004 0.000068 0.000208 -0.000038 -0.000239 -0.000761 0.000042 0.000047 0.000071 -0.000036 0.000003 0.000016 0.000026 -0.000008 -0.000024 0.000024 0.000013 -0.000026 0.000006 -0.000014 -0.000025 -0.000026 0.000000 -0.000011 -0.504758 0.175367 0.384568 -0.657847 -0.045435 -0.353043 -0.000055 0.001558 0.004950 0.000032 0.000068 0.000093 0.000037 -0.000002 0.000019 0.000012 0.000010 0.000067 0.000109 -0.000146 0.000066 -0.000102 -0.000254 0.000328</matrix>
                  </module>
               </property>
               <property dictRef="cc:irspectrum">
                  <module cmlx:templateRef="irspectrum">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="48">6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="48">22.58 74.76 78.75 205.69 256.76 304.60 318.49 381.52 430.60 449.11 499.11 551.25 569.12 592.68 643.13 730.39 782.85 822.05 855.75 892.73 898.48 988.80 1041.41 1046.11 1072.01 1083.23 1114.53 1141.40 1152.28 1224.76 1236.15 1272.91 1371.90 1395.98 1401.60 1538.42 1581.27 1634.10 1708.25 1713.37 3269.82 3275.09 3287.93 3296.79 3304.72 3622.34 3633.00 3729.62</array>
                     <array dataType="xsd:double" dictRef="o:t2" size="48">0.000407 0.002888 0.001675 0.003643 0.002874 0.003641 0.006104 0.000172 0.000149 0.000092 0.003223 0.000382 0.034119 0.000378 0.000020 0.002900 0.002399 0.003574 0.003042 0.000086 0.001683 0.000131 0.000025 0.000661 0.000006 0.000037 0.011550 0.000393 0.007472 0.000010 0.000045 0.000683 0.001227 0.006216 0.000237 0.000454 0.001985 0.004709 0.000191 0.000095 0.000021 0.000007 0.000004 0.000001 0.000000 0.004220 0.001646 0.003195</array>
                     <matrix cols="3" dataType="xsd:double" dictRef="cc:displacement" rows="48">-0.010705 -0.014573 0.008956 -0.051862 0.004112 -0.013454 -0.013897 -0.037165 0.010030 -0.034488 -0.007882 -0.048898 0.017164 0.014609 0.048642 -0.051429 0.021583 -0.023028 -0.022896 -0.071875 0.020351 0.005444 0.011056 -0.004456 -0.002872 -0.011122 0.004115 -0.007504 -0.002542 -0.005364 0.036926 -0.003294 0.042990 0.000826 0.019472 0.001551 -0.014025 -0.175708 0.055218 0.019064 -0.002812 -0.002515 0.000313 0.004438 -0.000616 -0.030629 -0.003314 -0.044168 0.042591 -0.004203 0.023828 0.015566 0.008186 0.057134 -0.051115 0.006606 0.019649 0.009089 -0.001555 0.000946 -0.040617 0.003176 -0.004816 0.004185 -0.002285 -0.010428 0.004702 -0.000041 -0.001733 -0.025261 0.002927 0.003771 -0.002456 0.000304 -0.000279 -0.000878 0.001608 0.005832 0.096591 -0.020784 -0.042283 0.001470 -0.018665 0.006531 -0.047899 -0.018492 -0.069538 0.000055 0.003072 -0.001022 0.006685 -0.000049 -0.000432 0.026088 -0.001478 -0.000764 0.033592 -0.009821 -0.001600 0.078406 -0.005809 -0.005906 -0.007225 -0.012991 0.003959 0.000158 0.020910 -0.004072 0.038752 -0.009019 -0.020040 0.018524 0.019743 0.063053 -0.003298 -0.013062 0.003043 -0.009526 0.001819 0.000696 -0.004302 0.000753 0.001238 -0.002488 0.000236 0.000905 -0.001737 0.000159 0.000727 0.000283 0.001071 -0.000234 0.000273 -0.000122 -0.000201 0.013741 0.017144 0.061130 -0.013098 -0.010410 -0.036966 -0.056328 0.004615 -0.001120</matrix>
                  </module>
               </property>
            </propertyList>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="N" id="a1" x3="2.690663" y3="0.105125" z3="0.947596"/>
                  <atom elementType="Si" id="a2" x3="2.510238" y3="-0.377496" z3="-0.610953"/>
                  <atom elementType="F" id="a3" x3="3.806532" y3="-0.754713" z3="-1.407405"/>
                  <atom elementType="N" id="a4" x3="1.055245" y3="-0.485096" z3="-1.35971"/>
                  <atom elementType="C" id="a5" x3="-0.154833" y3="-0.178264" z3="-0.632834"/>
                  <atom elementType="C" id="a6" x3="-0.896539" y3="-1.211679" z3="-0.076729"/>
                  <atom elementType="C" id="a7" x3="-2.062774" y3="-0.91372" z3="0.610728"/>
                  <atom elementType="C" id="a8" x3="-2.47269" y3="0.405209" z3="0.74878"/>
                  <atom elementType="C" id="a9" x3="-1.721434" y3="1.431602" z3="0.195222"/>
                  <atom elementType="C" id="a10" x3="-0.557427" y3="1.143695" z3="-0.50245"/>
                  <atom elementType="H" id="a11" x3="1.906655" y3="0.372061" z3="1.527985"/>
                  <atom elementType="H" id="a12" x3="3.582491" y3="0.164275" z3="1.418902"/>
                  <atom elementType="H" id="a13" x3="0.954237" y3="-0.778495" z3="-2.324596"/>
                  <atom elementType="H" id="a14" x3="-0.575758" y3="-2.239363" z3="-0.191101"/>
                  <atom elementType="H" id="a15" x3="-2.651617" y3="-1.713771" z3="1.037473"/>
                  <atom elementType="H" id="a16" x3="-3.383887" y3="0.632804" z3="1.284675"/>
                  <atom elementType="H" id="a17" x3="-2.045357" y3="2.458251" z3="0.295599"/>
                  <atom elementType="H" id="a18" x3="0.016354" y3="1.939675" z3="-0.960983"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a13" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a14" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a8 a16" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a17" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a10 a18" order="S"/>
               </bondArray>
               <formula concise="C6H8FN2Si">
                  <atomArray count="6 8 1 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">147.16150319999997</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C6H8FN2Si/c7-10(8)9-6-4-2-1-3-5-6/h1-5,9H,8H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,5,3,1,4,2/E:(2,3)(4,5)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,10.3/rA:18nNSi3FNC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s8;s5s9;s1;s1;s4;s6;s7;s8;s9;s10;/rC:2.6907,.1051,.9476;2.5102,-.3775,-.611;3.8065,-.7547,-1.4074;1.0552,-.4851,-1.3597;-.1548,-.1783,-.6328;-.8965,-1.2117,-.0767;-2.0628,-.9137,.6107;-2.4727,.4052,.7488;-1.7214,1.4316,.1952;-.5574,1.1437,-.5024;1.9067,.3721,1.528;3.5825,.1643,1.4189;.9542,-.7785,-2.3246;-.5758,-2.2394,-.1911;-2.6516,-1.7138,1.0375;-3.3839,.6328,1.2847;-2.0454,2.4583,.2956;.0164,1.9397,-.961;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-730.85399373</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">584.49286091</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1315.34685464</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-2149.48987317</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">834.14301853</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1457.76494169</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">726.91094795</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00542439</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">39.999830680980</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">39.999830680980</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">79.999661361960</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-43.291556272619</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-3.624343500182</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-46.915899772801</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="169">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="169">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="169" units="nonsi:electronvolt">-1824.6810 -688.9013 -404.2610 -404.1001 -289.7673 -288.4001 -288.3570 -288.0970 -288.0828 -288.0169 -158.3486 -111.9635 -111.8851 -111.7872 -41.7678 -32.8778 -31.8337 -29.7649 -26.8277 -26.5331 -23.0390 -22.7165 -22.5398 -21.5652 -20.8446 -20.2892 -20.2322 -19.8830 -19.2606 -18.6730 -18.3912 -17.3821 -17.0815 -15.7280 -15.4966 -15.0978 -15.0207 -14.1308 -12.0101 -11.9440 -4.9539 -4.4982 -3.6422 -3.3558 -2.1823 -1.1528 -0.1869 0.2935 0.7882 1.0628 1.8104 1.9583 2.0879 2.4074 2.9039 3.3047 3.9618 5.0301 5.2813 5.7992 6.1447 6.2565 8.1123 8.2344 8.6732 8.9658 10.1270 10.4925 11.4517 12.0402 12.2173 12.3048 12.6860 13.1393 13.2128 13.6183 13.7787 14.2101 14.4965 14.5586 15.3211 16.5164 16.7719 17.5175 17.8097 18.2863 19.7526 20.4582 20.7513 21.4737 21.9217 22.1161 22.6050 22.7984 23.1843 23.5681 23.8821 24.7569 24.9483 25.3332 26.0803 26.5018 27.0679 27.9184 28.1356 28.6436 28.9674 29.3446 29.6445 30.2542 30.8251 31.3753 31.8369 32.6617 33.9378 36.5374 36.5881 37.4911 37.7720 38.2816 38.6909 40.7974 41.3504 41.9480 43.3957 44.5016 45.4281 46.3625 46.7229 46.9697 47.4919 49.4311 50.9260 52.1933 54.4673 54.5741 54.7476 55.5324 56.0247 56.2309 58.0792 59.3162 60.1152 60.5485 60.8788 61.8622 63.8993 64.1567 67.0964 67.5420 68.7049 70.6680 71.2729 71.6829 72.9136 74.1474 76.0727 77.5834 81.2316 90.8385 356.2285 367.9603 368.0463 380.8325 381.2922 392.7444 512.3946 520.3439 887.7945</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">N Si F N C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="18">-0.884463 1.367722 -0.400538 -0.813297 0.247866 -0.234994 -0.221374 -0.204940 -0.223002 -0.248600 0.437528 0.435016 0.422251 0.257752 0.268357 0.269999 0.267341 0.257376</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="18">N Si F N C C C C C C H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="18">-0.464361 0.848804 -0.158305 -0.301280 -0.033095 -0.130574 -0.106874 -0.100124 -0.109762 -0.137787 0.303108 0.301650 0.303723 0.154172 0.159309 0.159701 0.158834 0.152858</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">N Si F N C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="18">7.8845 12.6323 9.4005 7.8133 5.7521 6.2350 6.2214 6.2049 6.2230 6.2486 0.5625 0.5650 0.5777 0.7422 0.7316 0.7300 0.7327 0.7426</array>
                     <array dataType="xsd:double" dictRef="o:za" size="18">7.0000 14.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="18">-0.8845 1.3677 -0.4005 -0.8133 0.2479 -0.2350 -0.2214 -0.2049 -0.2230 -0.2486 0.4375 0.4350 0.4223 0.2578 0.2684 0.2700 0.2673 0.2574</array>
                     <array dataType="xsd:double" dictRef="o:va" size="18">2.9582 3.8053 1.0762 2.9726 3.4986 3.7920 3.8041 3.7770 3.8063 3.8023 0.7927 0.7930 0.7988 0.8978 0.8938 0.8926 0.8943 0.8972</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="18">2.9582 3.8053 1.0762 2.9726 3.4986 3.7920 3.8041 3.7770 3.8063 3.8023 0.7927 0.7930 0.7988 0.8978 0.8938 0.8926 0.8943 0.8972</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="18">0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="18">1.3398 0.7737 0.7776 1.0258 1.3548 0.7255 0.7793 1.3769 1.3801 1.4277 0.9063 1.4139 0.9009 1.4210 0.9013 1.4235 0.9012 0.9048</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="18">0 1 0 10 0 11 1 2 1 3 3 4 3 12 4 5 4 9 5 6 5 13 6 7 6 14 7 8 7 15 8 9 8 16 9 17</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010888325</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-730.840487603432</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-9.85991 11.21901 1.35910 2.39852 -2.36360 0.03491 5.12398 -4.64349 0.48049</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.44195</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.66516</scalar>
               </module>
               <module cmlx:templateRef="thermochemistry" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:totalmass">155.23</scalar>
               </module>
               <module cmlx:templateRef="innerenergy" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="contributions">
                     <scalar dataType="xsd:double" dictRef="o:electronic" units="nonsi:hartree">-730.84048760</scalar>
                     <scalar dataType="xsd:double" dictRef="o:zeropoint" units="nonsi:hartree">0.14238136</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalvibcorrection" units="nonsi:hartree">0.00679188</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalrotcorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltrasncorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltotal" units="nonsi:hartree">-730.68848182</scalar>
                  </module>
                  <module cmlx:templateRef="corrections">
                     <scalar dataType="xsd:double" dictRef="o:thermalcorr" units="nonsi:hartree">0.00962442</scalar>
                     <scalar dataType="xsd:double" dictRef="o:nonthermalcorr" units="nonsi:hartree">0.14238136</scalar>
                     <scalar dataType="xsd:double" dictRef="o:totalcorr" units="nonsi:hartree">0.15200578</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="enthalpy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalfree" units="nonsi:hartree">-730.68848182</scalar>
                  <scalar dataType="xsd:double" dictRef="o:thermalcorrenthalpy" units="nonsi:hartree">0.00094421</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-730.68753761</scalar>
               </module>
               <module cmlx:templateRef="entropy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:elect" units="nonsi:hartree">0.00000000</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:vibrat" units="nonsi:hartree">0.01170629</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rotat" units="nonsi:hartree">0.01430209</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:transl" units="nonsi:hartree">0.01949401</scalar>
                  <scalar dataType="xsd:double" dictRef="o:total" units="nonsi:hartree">0.04550239</scalar>
               </module>
               <module cmlx:templateRef="gibbs" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-730.68753761</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalentropycorr" units="nonsi:hartree">-0.04550239</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsenthalpy" units="nonsi:hartree">-730.73304000</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsminuselec" units="nonsi:hartree">0.10744761</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
