<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 10s7p1d 8s4p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s3p1d 4s2p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="49">1 2 3 4 4 4 4 4 4 4 4 4 4 4 4 1 3 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="-0.141045" y3="0.431766" z3="-3.007299"/>
                  <atom elementType="Si" id="a2" x3="0.168613" y3="-0.456906" z3="-1.706588"/>
                  <atom elementType="N" id="a3" x3="1.356727" y3="0.347728" z3="-0.765938"/>
                  <atom elementType="C" id="a4" x3="2.224843" y3="1.356661" z3="-1.262388"/>
                  <atom elementType="C" id="a5" x3="1.729162" y3="2.531381" z3="-1.815027"/>
                  <atom elementType="C" id="a6" x3="2.601538" y3="3.504286" z3="-2.281683"/>
                  <atom elementType="C" id="a7" x3="3.971748" y3="3.324832" z3="-2.18336"/>
                  <atom elementType="C" id="a8" x3="4.468618" y3="2.158997" z3="-1.616877"/>
                  <atom elementType="C" id="a9" x3="3.602666" y3="1.1780" z3="-1.165433"/>
                  <atom elementType="C" id="a10" x3="1.51994" y3="-0.02405" z3="0.592627"/>
                  <atom elementType="C" id="a11" x3="1.608694" y3="-1.362008" z3="0.961475"/>
                  <atom elementType="C" id="a12" x3="1.686191" y3="-1.712627" z3="2.302007"/>
                  <atom elementType="C" id="a13" x3="1.708091" y3="-0.733511" z3="3.281544"/>
                  <atom elementType="C" id="a14" x3="1.650399" y3="0.603606" z3="2.911198"/>
                  <atom elementType="C" id="a15" x3="1.548709" y3="0.958962" z3="1.578466"/>
                  <atom elementType="F" id="a16" x3="0.673016" y3="-1.857248" z3="-2.308328"/>
                  <atom elementType="N" id="a17" x3="-1.210483" y3="-0.753965" z3="-0.728596"/>
                  <atom elementType="C" id="a18" x3="-2.086444" y3="-1.859703" z3="-0.889247"/>
                  <atom elementType="C" id="a19" x3="-3.445672" y3="-1.627228" z3="-1.08707"/>
                  <atom elementType="C" id="a20" x3="-4.322513" y3="-2.688285" z3="-1.23245"/>
                  <atom elementType="C" id="a21" x3="-3.854224" y3="-3.994456" z3="-1.1966"/>
                  <atom elementType="C" id="a22" x3="-2.503119" y3="-4.22796" z3="-0.996749"/>
                  <atom elementType="C" id="a23" x3="-1.622276" y3="-3.168769" z3="-0.832227"/>
                  <atom elementType="C" id="a24" x3="-1.53872" y3="0.180972" z3="0.287501"/>
                  <atom elementType="C" id="a25" x3="-1.718198" y3="-0.259687" z3="1.596252"/>
                  <atom elementType="C" id="a26" x3="-1.976024" y3="0.648871" z3="2.606245"/>
                  <atom elementType="C" id="a27" x3="-2.044893" y3="2.008125" z3="2.32877"/>
                  <atom elementType="C" id="a28" x3="-1.873935" y3="2.448024" z3="1.026454"/>
                  <atom elementType="C" id="a29" x3="-1.636029" y3="1.538262" z3="0.005074"/>
                  <atom elementType="H" id="a30" x3="0.662247" y3="2.696614" z3="-1.866448"/>
                  <atom elementType="H" id="a31" x3="2.203175" y3="4.413007" z3="-2.713483"/>
                  <atom elementType="H" id="a32" x3="4.648815" y3="4.088938" z3="-2.540901"/>
                  <atom elementType="H" id="a33" x3="5.536869" y3="2.008356" z3="-1.533279"/>
                  <atom elementType="H" id="a34" x3="3.990054" y3="0.266539" z3="-0.728469"/>
                  <atom elementType="H" id="a35" x3="1.638648" y3="-2.133908" z3="0.20249"/>
                  <atom elementType="H" id="a36" x3="1.748287" y3="-2.757672" z3="2.576104"/>
                  <atom elementType="H" id="a37" x3="1.776923" y3="-1.008231" z3="4.325596"/>
                  <atom elementType="H" id="a38" x3="1.663599" y3="1.376838" z3="3.667943"/>
                  <atom elementType="H" id="a39" x3="1.470235" y3="2.000255" z3="1.295166"/>
                  <atom elementType="H" id="a40" x3="-3.811247" y3="-0.608946" z3="-1.123386"/>
                  <atom elementType="H" id="a41" x3="-5.375816" y3="-2.492624" z3="-1.384851"/>
                  <atom elementType="H" id="a42" x3="-4.538812" y3="-4.82288" z3="-1.319412"/>
                  <atom elementType="H" id="a43" x3="-2.127532" y3="-5.241926" z3="-0.957019"/>
                  <atom elementType="H" id="a44" x3="-0.576425" y3="-3.364811" z3="-0.6435"/>
                  <atom elementType="H" id="a45" x3="-1.631371" y3="-1.314979" z3="1.818614"/>
                  <atom elementType="H" id="a46" x3="-2.102445" y3="0.295031" z3="3.620799"/>
                  <atom elementType="H" id="a47" x3="-2.236035" y3="2.717485" z3="3.122882"/>
                  <atom elementType="H" id="a48" x3="-1.940668" y3="3.503342" z3="0.796334"/>
                  <atom elementType="H" id="a49" x3="-1.543684" y3="1.885402" z3="-1.016833"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a16" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a17" order="S"/>
                  <bond atomRefs2="a3 a10" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a31" order="S"/>
                  <bond atomRefs2="a7 a32" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a33" order="S"/>
                  <bond atomRefs2="a9 a34" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a11 a35" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a12 a36" order="S"/>
                  <bond atomRefs2="a13 a37" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a38" order="S"/>
                  <bond atomRefs2="a15 a39" order="S"/>
                  <bond atomRefs2="a17 a18" order="S"/>
                  <bond atomRefs2="a17 a24" order="S"/>
                  <bond atomRefs2="a18 a23" order="S"/>
                  <bond atomRefs2="a18 a19" order="S"/>
                  <bond atomRefs2="a19 a40" order="S"/>
                  <bond atomRefs2="a19 a20" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a41" order="S"/>
                  <bond atomRefs2="a21 a22" order="S"/>
                  <bond atomRefs2="a21 a42" order="S"/>
                  <bond atomRefs2="a22 a43" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a44" order="S"/>
                  <bond atomRefs2="a24 a29" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a26" order="S"/>
                  <bond atomRefs2="a25 a45" order="S"/>
                  <bond atomRefs2="a26 a27" order="S"/>
                  <bond atomRefs2="a26 a46" order="S"/>
                  <bond atomRefs2="a27 a28" order="S"/>
                  <bond atomRefs2="a27 a47" order="S"/>
                  <bond atomRefs2="a28 a48" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a49" order="S"/>
               </bondArray>
               <formula concise="C24H20F2N2Si">
                  <atomArray count="24 20 2 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">382.35250639999975</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,13,21,27,6,8,12,14,20,22,26,28,5,9,11,15,19,23,25,29,4,10,18,24,1,16,3,17,2/E:(1,2,3,4)(5,6,7,8,9,10,11,12)(13,14,15,16,17,18,19,20)(21,22,23,24)(25,26)(27,28)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3/rA:49nFSiNC3C3C3C3C3C3C3C3C3C3C3C3FNC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s7;s4s8;s3;s10;s11;s12;s13;s10s14;s2;s2;s17;s18;s19;s20;s21;s18s22;s17;s24;s25;s26;s27;s24s28;s5;s6;s7;s8;s9;s11;s12;s13;s14;s15;s19;s20;s21;s22;s23;s25;s26;s27;s28;s29;/rC:-.141,.4318,-3.0073;.1686,-.4569,-1.7066;1.3567,.3477,-.7659;2.2248,1.3567,-1.2624;1.7292,2.5314,-1.815;2.6015,3.5043,-2.2817;3.9717,3.3248,-2.1834;4.4686,2.159,-1.6169;3.6027,1.178,-1.1654;1.5199,-.024,.5926;1.6087,-1.362,.9615;1.6862,-1.7126,2.302;1.7081,-.7335,3.2815;1.6504,.6036,2.9112;1.5487,.959,1.5785;.673,-1.8572,-2.3083;-1.2105,-.754,-.7286;-2.0864,-1.8597,-.8892;-3.4457,-1.6272,-1.0871;-4.3225,-2.6883,-1.2325;-3.8542,-3.9945,-1.1966;-2.5031,-4.228,-.9967;-1.6223,-3.1688,-.8322;-1.5387,.181,.2875;-1.7182,-.2597,1.5963;-1.976,.6489,2.6062;-2.0449,2.0081,2.3288;-1.8739,2.448,1.0265;-1.636,1.5383,.0051;.6622,2.6966,-1.8664;2.2032,4.413,-2.7135;4.6488,4.0889,-2.5409;5.5369,2.0084,-1.5333;3.9901,.2665,-.7285;1.6386,-2.1339,.2025;1.7483,-2.7577,2.5761;1.7769,-1.0082,4.3256;1.6636,1.3768,3.6679;1.4702,2.0003,1.2952;-3.8112,-.6089,-1.1234;-5.3758,-2.4926,-1.3849;-4.5388,-4.8229,-1.3194;-2.1275,-5.2419,-.957;-.5764,-3.3648,-.6435;-1.6314,-1.315,1.8186;-2.1024,.295,3.6208;-2.236,2.7175,3.1229;-1.9407,3.5033,.7963;-1.5437,1.8854,-1.0168;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1643</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1643</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C24F2H20N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">210</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">478</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2981.0386376747 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.084e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.045 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.034 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.079 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1643</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1643</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C24F2H20N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">210</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">478</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2981.6421469975 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.087e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.045 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.035 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.083 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="-0.14104547" y3="0.4317655" z3="-3.00729942">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="0.16861337" y3="-0.4569064" z3="-1.7065877">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="N" id="a3" x3="1.35672732" y3="0.3477284" z3="-0.76593847">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="2.22484328" y3="1.35666116" z3="-1.26238771">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="1.72916163" y3="2.53138135" z3="-1.81502744">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="2.60153836" y3="3.50428627" z3="-2.28168259">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="3.97174776" y3="3.32483201" z3="-2.18335962">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="4.46861787" y3="2.15899657" z3="-1.6168766">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="3.60266632" y3="1.17800015" z3="-1.16543259">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="1.51993976" y3="-0.02405046" z3="0.59262668">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="1.60869429" y3="-1.36200827" z3="0.96147475">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a12" x3="1.68619137" y3="-1.7126274" z3="2.30200736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a13" x3="1.70809129" y3="-0.73351068" z3="3.28154434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a14" x3="1.65039932" y3="0.60360556" z3="2.91119814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a15" x3="1.54870897" y3="0.95896191" z3="1.578466">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="F" id="a16" x3="0.67301591" y3="-1.85724834" z3="-2.30832754">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a17" x3="-1.21048324" y3="-0.75396482" z3="-0.72859647">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a18" x3="-2.08644443" y3="-1.85970287" z3="-0.88924707">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a19" x3="-3.44567199" y3="-1.62722823" z3="-1.08707001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a20" x3="-4.32251337" y3="-2.68828451" z3="-1.23245036">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a21" x3="-3.85422414" y3="-3.99445607" z3="-1.19659971">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a22" x3="-2.50311925" y3="-4.22796038" z3="-0.99674889">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a23" x3="-1.62227565" y3="-3.16876927" z3="-0.83222706">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a24" x3="-1.53871968" y3="0.18097244" z3="0.28750112">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a25" x3="-1.71819763" y3="-0.25968732" z3="1.59625164">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a26" x3="-1.97602363" y3="0.64887073" z3="2.60624525">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a27" x3="-2.0448933" y3="2.00812485" z3="2.32877038">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a28" x3="-1.87393504" y3="2.44802416" z3="1.02645441">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a29" x3="-1.63602858" y3="1.5382622" z3="0.00507409">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a30" x3="0.66224716" y3="2.69661431" z3="-1.86644795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a31" x3="2.20317484" y3="4.41300689" z3="-2.71348337">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a32" x3="4.64881544" y3="4.08893776" z3="-2.54090114">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a33" x3="5.53686939" y3="2.00835597" z3="-1.53327948">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a34" x3="3.99005375" y3="0.26653887" z3="-0.72846879">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a35" x3="1.63864835" y3="-2.13390803" z3="0.20249011">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a36" x3="1.74828653" y3="-2.75767168" z3="2.57610367">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a37" x3="1.77692299" y3="-1.00823057" z3="4.32559574">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a38" x3="1.66359855" y3="1.37683842" z3="3.66794297">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a39" x3="1.47023534" y3="2.00025481" z3="1.29516577">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a40" x3="-3.81124664" y3="-0.60894575" z3="-1.12338624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a41" x3="-5.37581643" y3="-2.49262372" z3="-1.38485084">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a42" x3="-4.53881229" y3="-4.82287988" z3="-1.31941226">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a43" x3="-2.12753194" y3="-5.24192593" z3="-0.95701897">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a44" x3="-0.57642504" y3="-3.36481051" z3="-0.6435001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a45" x3="-1.6313708" y3="-1.31497908" z3="1.81861433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a46" x3="-2.10244465" y3="0.29503128" z3="3.62079875">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a47" x3="-2.23603464" y3="2.71748491" z3="3.1228818">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a48" x3="-1.94066759" y3="3.50334193" z3="0.79633418">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a49" x3="-1.54368378" y3="1.88540177" z3="-1.01683308">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a16" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a17" order="S"/>
                           <bond atomRefs2="a3 a10" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a6 a31" order="S"/>
                           <bond atomRefs2="a7 a32" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a33" order="S"/>
                           <bond atomRefs2="a9 a34" order="S"/>
                           <bond atomRefs2="a10 a15" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a11 a35" order="S"/>
                           <bond atomRefs2="a11 a12" order="S"/>
                           <bond atomRefs2="a12 a13" order="S"/>
                           <bond atomRefs2="a12 a36" order="S"/>
                           <bond atomRefs2="a13 a37" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a14 a15" order="S"/>
                           <bond atomRefs2="a14 a38" order="S"/>
                           <bond atomRefs2="a15 a39" order="S"/>
                           <bond atomRefs2="a17 a18" order="S"/>
                           <bond atomRefs2="a17 a24" order="S"/>
                           <bond atomRefs2="a18 a23" order="S"/>
                           <bond atomRefs2="a18 a19" order="S"/>
                           <bond atomRefs2="a19 a40" order="S"/>
                           <bond atomRefs2="a19 a20" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a41" order="S"/>
                           <bond atomRefs2="a21 a22" order="S"/>
                           <bond atomRefs2="a21 a42" order="S"/>
                           <bond atomRefs2="a22 a43" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a44" order="S"/>
                           <bond atomRefs2="a24 a29" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a26" order="S"/>
                           <bond atomRefs2="a25 a45" order="S"/>
                           <bond atomRefs2="a26 a27" order="S"/>
                           <bond atomRefs2="a26 a46" order="S"/>
                           <bond atomRefs2="a27 a28" order="S"/>
                           <bond atomRefs2="a27 a47" order="S"/>
                           <bond atomRefs2="a28 a48" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a49" order="S"/>
                        </bondArray>
                        <formula concise="C24H20F2N2Si">
                           <atomArray count="24 20 2 2 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">382.35250639999975</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,13,21,27,6,8,12,14,20,22,26,28,5,9,11,15,19,23,25,29,4,10,18,24,1,16,3,17,2/E:(1,2,3,4)(5,6,7,8,9,10,11,12)(13,14,15,16,17,18,19,20)(21,22,23,24)(25,26)(27,28)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3/rA:49nFSiNC3C3C3C3C3C3C3C3C3C3C3C3FNC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s7;s4s8;s3;s10;s11;s12;s13;s10s14;s2;s2;s17;s18;s19;s20;s21;s18s22;s17;s24;s25;s26;s27;s24s28;s5;s6;s7;s8;s9;s11;s12;s13;s14;s15;s19;s20;s21;s22;s23;s25;s26;s27;s28;s29;/rC:-.141,.4318,-3.0073;.1686,-.4569,-1.7066;1.3567,.3477,-.7659;2.2248,1.3567,-1.2624;1.7292,2.5314,-1.815;2.6015,3.5043,-2.2817;3.9717,3.3248,-2.1834;4.4686,2.159,-1.6169;3.6027,1.178,-1.1654;1.5199,-.0241,.5926;1.6087,-1.362,.9615;1.6862,-1.7126,2.302;1.7081,-.7335,3.2815;1.6504,.6036,2.9112;1.5487,.959,1.5785;.673,-1.8572,-2.3083;-1.2105,-.754,-.7286;-2.0864,-1.8597,-.8892;-3.4457,-1.6272,-1.0871;-4.3225,-2.6883,-1.2325;-3.8542,-3.9945,-1.1966;-2.5031,-4.228,-.9967;-1.6223,-3.1688,-.8322;-1.5387,.181,.2875;-1.7182,-.2597,1.5963;-1.976,.6489,2.6062;-2.0449,2.0081,2.3288;-1.8739,2.448,1.0265;-1.636,1.5383,.0051;.6622,2.6966,-1.8664;2.2032,4.413,-2.7135;4.6488,4.0889,-2.5409;5.5369,2.0084,-1.5333;3.9901,.2665,-.7285;1.6386,-2.1339,.2025;1.7483,-2.7577,2.5761;1.7769,-1.0082,4.3256;1.6636,1.3768,3.6679;1.4702,2.0003,1.2952;-3.8112,-.6089,-1.1234;-5.3758,-2.4926,-1.3849;-4.5388,-4.8229,-1.3194;-2.1275,-5.2419,-.957;-.5764,-3.3648,-.6435;-1.6314,-1.315,1.8186;-2.1024,.295,3.6208;-2.236,2.7175,3.1229;-1.9407,3.5033,.7963;-1.5437,1.8854,-1.0168;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 16</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-0.144368" y3="0.436789" z3="-3.005867"/>
                        <atom elementType="Si" id="a2" x3="0.166132" y3="-0.45422" z3="-1.707188"/>
                        <atom elementType="N" id="a3" x3="1.355934" y3="0.348459" z3="-0.766943"/>
                        <atom elementType="C" id="a4" x3="2.224147" y3="1.357656" z3="-1.262543"/>
                        <atom elementType="C" id="a5" x3="1.729182" y3="2.533004" z3="-1.814364"/>
                        <atom elementType="C" id="a6" x3="2.602139" y3="3.505603" z3="-2.28042"/>
                        <atom elementType="C" id="a7" x3="3.972223" y3="3.325008" z3="-2.182588"/>
                        <atom elementType="C" id="a8" x3="4.468432" y3="2.15845" z3="-1.617164"/>
                        <atom elementType="C" id="a9" x3="3.601839" y3="1.177796" z3="-1.166323"/>
                        <atom elementType="C" id="a10" x3="1.518964" y3="-0.024929" z3="0.591355"/>
                        <atom elementType="C" id="a11" x3="1.602191" y3="-1.363707" z3="0.958636"/>
                        <atom elementType="C" id="a12" x3="1.678404" y3="-1.716271" z3="2.298685"/>
                        <atom elementType="C" id="a13" x3="1.703715" y3="-0.738762" z3="3.279454"/>
                        <atom elementType="C" id="a14" x3="1.651138" y3="0.599048" z3="2.910921"/>
                        <atom elementType="C" id="a15" x3="1.551785" y3="0.956643" z3="1.57864"/>
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</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
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                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a29 a49" order="S"/>
                     </bondArray>
                     <formula concise="C24H20F2N2Si">
                        <atomArray count="24 20 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">382.35250639999975</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
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</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
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                        <bond atomRefs2="a13 a37" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a38" order="S"/>
                        <bond atomRefs2="a15 a39" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a24" order="S"/>
                        <bond atomRefs2="a18 a23" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a19 a40" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a20 a21" order="S"/>
                        <bond atomRefs2="a20 a41" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a42" order="S"/>
                        <bond atomRefs2="a22 a43" order="S"/>
                        <bond atomRefs2="a22 a23" order="S"/>
                        <bond atomRefs2="a23 a44" order="S"/>
                        <bond atomRefs2="a24 a29" order="S"/>
                        <bond atomRefs2="a24 a25" order="S"/>
                        <bond atomRefs2="a25 a26" order="S"/>
                        <bond atomRefs2="a25 a45" order="S"/>
                        <bond atomRefs2="a26 a27" order="S"/>
                        <bond atomRefs2="a26 a46" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a27 a47" order="S"/>
                        <bond atomRefs2="a28 a48" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a29 a49" order="S"/>
                     </bondArray>
                     <formula concise="C24H20F2N2Si">
                        <atomArray count="24 20 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">382.35250639999975</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
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</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="-0.138794" y3="0.425732" z3="-3.008099"/>
                        <atom elementType="Si" id="a2" x3="0.167239" y3="-0.461659" z3="-1.706418"/>
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                        <atom elementType="C" id="a8" x3="4.462096" y3="2.168361" z3="-1.619588"/>
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                     <bondArray>
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                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a17" order="S"/>
                        <bond atomRefs2="a3 a10" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a30" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a31" order="S"/>
                        <bond atomRefs2="a7 a32" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a33" order="S"/>
                        <bond atomRefs2="a9 a34" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a35" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a36" order="S"/>
                        <bond atomRefs2="a13 a37" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a38" order="S"/>
                        <bond atomRefs2="a15 a39" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a24" order="S"/>
                        <bond atomRefs2="a18 a23" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a19 a40" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a20 a21" order="S"/>
                        <bond atomRefs2="a20 a41" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a42" order="S"/>
                        <bond atomRefs2="a22 a43" order="S"/>
                        <bond atomRefs2="a22 a23" order="S"/>
                        <bond atomRefs2="a23 a44" order="S"/>
                        <bond atomRefs2="a24 a29" order="S"/>
                        <bond atomRefs2="a24 a25" order="S"/>
                        <bond atomRefs2="a25 a26" order="S"/>
                        <bond atomRefs2="a25 a45" order="S"/>
                        <bond atomRefs2="a26 a27" order="S"/>
                        <bond atomRefs2="a26 a46" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a27 a47" order="S"/>
                        <bond atomRefs2="a28 a48" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a29 a49" order="S"/>
                     </bondArray>
                     <formula concise="C24H20F2N2Si">
                        <atomArray count="24 20 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">382.35250639999975</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
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</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
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                        <atom elementType="H" id="a42" x3="-4.532682" y3="-4.823691" z3="-1.319028"/>
                        <atom elementType="H" id="a43" x3="-2.131861" y3="-5.239576" z3="-0.895039"/>
                        <atom elementType="H" id="a44" x3="-0.583988" y3="-3.355978" z3="-0.582391"/>
                        <atom elementType="H" id="a45" x3="-1.638452" y3="-1.313511" z3="1.821054"/>
                        <atom elementType="H" id="a46" x3="-2.097581" y3="0.297234" z3="3.624028"/>
                        <atom elementType="H" id="a47" x3="-2.216708" y3="2.720826" z3="3.129807"/>
                        <atom elementType="H" id="a48" x3="-1.92367" y3="3.507496" z3="0.80264"/>
                        <atom elementType="H" id="a49" x3="-1.537215" y3="1.888479" z3="-1.011966"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a17" order="S"/>
                        <bond atomRefs2="a3 a10" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a30" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a31" order="S"/>
                        <bond atomRefs2="a7 a32" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a33" order="S"/>
                        <bond atomRefs2="a9 a34" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a35" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a36" order="S"/>
                        <bond atomRefs2="a13 a37" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a38" order="S"/>
                        <bond atomRefs2="a15 a39" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a24" order="S"/>
                        <bond atomRefs2="a18 a23" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a19 a40" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a20 a21" order="S"/>
                        <bond atomRefs2="a20 a41" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a42" order="S"/>
                        <bond atomRefs2="a22 a43" order="S"/>
                        <bond atomRefs2="a22 a23" order="S"/>
                        <bond atomRefs2="a23 a44" order="S"/>
                        <bond atomRefs2="a24 a29" order="S"/>
                        <bond atomRefs2="a24 a25" order="S"/>
                        <bond atomRefs2="a25 a26" order="S"/>
                        <bond atomRefs2="a25 a45" order="S"/>
                        <bond atomRefs2="a26 a27" order="S"/>
                        <bond atomRefs2="a26 a46" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a27 a47" order="S"/>
                        <bond atomRefs2="a28 a48" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a29 a49" order="S"/>
                     </bondArray>
                     <formula concise="C24H20F2N2Si">
                        <atomArray count="24 20 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">382.35250639999975</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,13,21,27,6,8,12,14,20,22,26,28,5,9,11,15,19,23,25,29,4,10,18,24,1,16,3,17,2/E:(1,2,3,4)(5,6,7,8,9,10,11,12)(13,14,15,16,17,18,19,20)(21,22,23,24)(25,26)(27,28)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3/rA:49nFSiNC3C3C3C3C3C3C3C3C3C3C3C3FNC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s7;s4s8;s3;s10;s11;s12;s13;s10s14;s2;s2;s17;s18;s19;s20;s21;s18s22;s17;s24;s25;s26;s27;s24s28;s5;s6;s7;s8;s9;s11;s12;s13;s14;s15;s19;s20;s21;s22;s23;s25;s26;s27;s28;s29;/rC:-.1387,.4252,-3.0089;.1671,-.4619,-1.7069;1.3597,.3419,-.7706;2.2215,1.357,-1.265;1.7206,2.5317,-1.8127;2.5886,3.5097,-2.2766;3.9596,3.335,-2.1809;4.4619,2.169,-1.6198;3.6001,1.1832,-1.171;1.5228,-.0302,.5879;1.6031,-1.3691,.956;1.6784,-1.7213,2.2962;1.7058,-.7438,3.2768;1.6566,.594,2.9075;1.5584,.9515,1.5751;.6629,-1.8686,-2.3031;-1.2123,-.7494,-.7276;-2.0873,-1.8568,-.8884;-3.4409,-1.6258,-1.1217;-4.316,-2.6882,-1.2674;-3.8498,-3.9939,-1.1962;-2.5042,-4.2258,-.9615;-1.6258,-3.1645,-.7967;-1.5386,.1833,.2904;-1.7195,-.2578,1.5985;-1.9707,.6516,2.6097;-2.0321,2.0114,2.3342;-1.862,2.4517,1.0319;-1.6307,1.5415,.0098;.653,2.6928,-1.863;2.1864,4.4185,-2.7045;4.6332,4.1031,-2.5364;5.5308,2.022,-1.5386;3.9913,.2713,-.7383;1.6293,-2.1408,.1969;1.7348,-2.767,2.569;1.7726,-1.0201,4.3205;1.6734,1.3666,3.6647;1.4868,1.9939,1.294;-3.8024,-.6073,-1.185;-5.3654,-2.4951,-1.4473;-4.5327,-4.8237,-1.319;-2.1319,-5.2396,-.895;-.584,-3.356,-.5824;-1.6385,-1.3135,1.8211;-2.0976,.2972,3.624;-2.2167,2.7208,3.1298;-1.9237,3.5075,.8026;-1.5372,1.8885,-1.012;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465492399385</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465502833767</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465489596902</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465486368497</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465514783262</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465502195971</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465500547909</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="49">-0.226935 0.660610 -0.196807 0.019476 -0.140547 -0.129317 -0.140734 -0.128444 -0.131870 0.023998 -0.156726 -0.130860 -0.145607 -0.122099 -0.125384 -0.227991 -0.197965 0.019730 -0.133121 -0.128352 -0.141624 -0.129032 -0.142232 0.022154 -0.122676 -0.122097 -0.143779 -0.131550 -0.155107 0.141159 0.137473 0.136703 0.138002 0.146896 0.144012 0.136701 0.135337 0.137196 0.149411 0.146589 0.137777 0.136554 0.137409 0.142682 0.149021 0.137482 0.135536 0.136719 0.142229</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="49">9.4399 12.5859 7.7906 5.6827 6.2684 6.2192 6.2275 6.2168 6.2468 5.6783 6.3067 6.2268 6.2309 6.2115 6.2225 9.4415 7.7907 5.6782 6.2481 6.2162 6.2289 6.2176 6.2738 5.6845 6.2189 6.2095 6.2307 6.2261 6.3025 0.7747 0.7791 0.7795 0.7779 0.7629 0.7615 0.7796 0.7823 0.7801 0.7602 0.7633 0.7784 0.7797 0.7792 0.7719 0.7621 0.7799 0.7818 0.7797 0.7645</array>
                     <array dataType="xsd:double" dictRef="o:za" size="49">9.0000 14.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="49">-0.4399 1.4141 -0.7906 0.3173 -0.2684 -0.2192 -0.2275 -0.2168 -0.2468 0.3217 -0.3067 -0.2268 -0.2309 -0.2115 -0.2225 -0.4415 -0.7907 0.3218 -0.2481 -0.2162 -0.2289 -0.2176 -0.2738 0.3155 -0.2189 -0.2095 -0.2307 -0.2261 -0.3025 0.2253 0.2209 0.2205 0.2221 0.2371 0.2385 0.2204 0.2177 0.2199 0.2398 0.2367 0.2216 0.2203 0.2208 0.2281 0.2379 0.2201 0.2182 0.2203 0.2355</array>
                     <array dataType="xsd:double" dictRef="o:va" size="49">0.9978 3.9897 2.9183 3.6955 3.8299 3.8215 3.8148 3.8188 3.8010 3.6883 3.8222 3.8312 3.8192 3.8336 3.7955 0.9947 2.9159 3.6918 3.8004 3.8203 3.8156 3.8208 3.8288 3.6892 3.7985 3.8304 3.8195 3.8282 3.8264 0.9144 0.9113 0.9114 0.9109 0.9085 0.9126 0.9119 0.9121 0.9118 0.9105 0.9087 0.9111 0.9115 0.9111 0.9144 0.9120 0.9119 0.9120 0.9119 0.9119</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="49">0.9978 3.9897 2.9183 3.6955 3.8299 3.8215 3.8148 3.8188 3.8010 3.6883 3.8222 3.8312 3.8192 3.8336 3.7955 0.9947 2.9159 3.6918 3.8004 3.8203 3.8156 3.8208 3.8288 3.6892 3.7985 3.8304 3.8195 3.8282 3.8264 0.9144 0.9113 0.9114 0.9109 0.9085 0.9126 0.9119 0.9121 0.9118 0.9105 0.9087 0.9111 0.9115 0.9111 0.9144 0.9120 0.9119 0.9120 0.9119 0.9119</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="49">-0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="52">0.9325 1.0188 0.9220 1.0220 0.8595 0.8752 1.4021 1.3903 1.4144 0.9118 1.4324 0.9192 1.4154 0.9192 1.4321 0.9188 0.9090 1.3911 1.3891 1.4119 0.9028 1.4389 0.9194 1.4115 0.9197 1.4416 0.9190 0.9035 0.8613 0.8698 1.3885 1.4013 1.4333 0.9085 1.4158 0.9190 1.4323 0.9192 1.4144 0.9192 0.9119 1.3921 1.3959 1.4401 0.9047 1.4106 0.9189 1.4399 0.9196 1.4080 0.9193 0.9051</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="52">0 1 1 2 1 15 1 16 2 3 2 9 3 4 3 8 4 5 4 29 5 6 5 30 6 7 6 31 7 8 7 32 8 33 9 10 9 14 10 11 10 34 11 12 11 35 12 13 12 36 13 14 13 37 14 38 16 17 16 23 17 18 17 22 18 19 18 39 19 20 19 40 20 21 20 41 21 22 21 42 22 43 23 24 23 28 24 25 24 44 25 26 25 45 26 27 26 46 27 28 27 47 28 48</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="49">-0.439920 1.414062 -0.790641 0.317295 -0.268425 -0.219227 -0.227498 -0.216753 -0.246764 0.321689 -0.306697 -0.226770 -0.230872 -0.211466 -0.222528 -0.441484 -0.790711 0.321834 -0.248074 -0.216234 -0.228900 -0.217650 -0.273800 0.315488 -0.218943 -0.209538 -0.230652 -0.226063 -0.302522 0.225270 0.220881 0.220493 0.222123 0.237138 0.238466 0.220373 0.217725 0.219897 0.239834 0.236659 0.221646 0.220277 0.220836 0.228143 0.237868 0.220126 0.218241 0.220303 0.235461</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
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               </bondArray>
               <formula concise="C24H20F2N2Si">
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               </formula>
               <property dictRef="cml:molmass">
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               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C24H20F2N2Si/c25-29(26,27(21-13-5-1-6-14-21)22-15-7-2-8-16-22)28(23-17-9-3-10-18-23)24-19-11-4-12-20-24/h1-20H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,13,21,27,6,8,12,14,20,22,26,28,5,9,11,15,19,23,25,29,4,10,18,24,1,16,3,17,2/E:(1,2,3,4)(5,6,7,8,9,10,11,12)(13,14,15,16,17,18,19,20)(21,22,23,24)(25,26)(27,28)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3/rA:49nFSiNC3C3C3C3C3C3C3C3C3C3C3C3FNC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s7;s4s8;s3;s10;s11;s12;s13;s10s14;s2;s2;s17;s18;s19;s20;s21;s18s22;s17;s24;s25;s26;s27;s24s28;s5;s6;s7;s8;s9;s11;s12;s13;s14;s15;s19;s20;s21;s22;s23;s25;s26;s27;s28;s29;/rC:-.1387,.4255,-3.0096;.1666,-.4615,-1.7075;1.3597,.342,-.7714;2.2215,1.3571,-1.2655;1.7207,2.5318,-1.8133;2.5889,3.5099,-2.2769;3.9598,3.3353,-2.1808;4.462,2.1692,-1.6197;3.6002,1.1833,-1.1713;1.5227,-.0304,.5871;1.6034,-1.3694,.9548;1.6786,-1.7219,2.2949;1.7054,-.7446,3.2758;1.6557,.5932,2.9068;1.5577,.951,1.5745;.6617,-1.8686,-2.3032;-1.2126,-.7485,-.7279;-2.0873,-1.8563,-.8883;-3.4405,-1.6257,-1.1237;-4.3154,-2.6884,-1.2688;-3.8492,-3.9939,-1.1949;-2.5038,-4.2254,-.9582;-1.6258,-3.1637,-.794;-1.5387,.1838,.2905;-1.7204,-.2579,1.5984;-1.9715,.6511,2.61;-2.0321,2.0111,2.3352;-1.8612,2.452,1.0332;-1.6299,1.5422,.0107;.6532,2.6929,-1.8638;2.1866,4.4187,-2.7048;4.6334,4.1035,-2.5361;5.5309,2.0224,-1.5383;3.9913,.2714,-.7385;1.6301,-2.1408,.1954;1.7352,-2.7677,2.5675;1.772,-1.0212,4.3194;1.672,1.3656,3.6642;1.4857,1.9934,1.2937;-3.802,-.6073,-1.1891;-5.3646,-2.4957,-1.4503;-4.5319,-4.824,-1.3173;-2.1316,-5.2391,-.8897;-.5841,-3.3547,-.5782;-1.6399,-1.3138,1.8204;-2.099,.2962,3.624;-2.2169,2.7201,3.131;-1.9221,3.5079,.8045;-1.5358,1.8897,-1.0109;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1522.49730999</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2981.03863767</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4503.53594766</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-8013.24929991</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3509.71335225</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-3034.89426797</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">1512.39695798</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00667837</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">105.000646571654</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">105.000646571654</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">210.001293143309</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-103.569545862138</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-9.349487223913</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-112.919033086052</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044418501</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044427102</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044417175</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044485404</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044400508</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044427200</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044437485</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="478">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="478">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="478" units="nonsi:electronvolt">-1819.2166 -682.7361 -682.7292 -398.8496 -398.8245 -285.5126 -285.5028 -285.4981 -285.4892 -284.3957 -284.3834 -284.3691 -284.3579 -284.3576 -284.3549 -284.3487 -284.3377 -284.3292 -284.3258 -284.3197 -284.3003 -284.2916 -284.2857 -284.2815 -284.2754 -284.2720 -284.2516 -284.2334 -284.2208 -152.5987 -106.1886 -106.1581 -106.1203 -35.8568 -35.2978 -28.7547 -28.3712 -26.2069 -26.1505 -25.6274 -25.5228 -23.1549 -23.0996 -22.9261 -22.9009 -22.8820 -22.8705 -22.0403 -21.8385 -19.1887 -19.0605 -19.0220 -18.7982 -18.7140 -18.6971 -18.2398 -17.8862 -17.2220 -16.5500 -16.5383 -15.9446 -15.7725 -15.3198 -15.2443 -15.1539 -14.8269 -14.7912 -14.4814 -14.4124 -14.1203 -14.0658 -13.7979 -13.7684 -13.6951 -13.5741 -13.5483 -13.3779 -13.3033 -13.1950 -13.1377 -13.1264 -13.0084 -12.9214 -12.0540 -11.6938 -11.6439 -11.4885 -11.3884 -11.3412 -11.3062 -11.2437 -11.1190 -11.0346 -10.9503 -10.7843 -9.6922 -9.4006 -8.3525 -8.2072 -8.0759 -8.0386 -8.0302 -7.9615 -7.1189 -6.9009 0.0681 0.1988 0.3326 0.3692 0.4436 0.5157 0.8023 0.9568 3.0862 3.2887 3.4739 3.9293 3.9775 4.2957 4.5253 4.7886 4.9415 4.9800 5.0974 5.2542 5.2961 5.5369 5.5627 5.6273 5.6380 5.6941 5.8611 6.0088 6.2469 6.4188 6.4756 6.5215 6.5544 6.6738 7.2584 7.3063 7.7883 7.8148 7.8362 8.0925 8.1787 8.2542 8.7190 8.8048 9.0367 9.1049 9.3999 9.4386 9.4674 9.5310 9.6672 10.0775 10.2826 10.6553 10.8665 11.1559 11.2182 11.9080 12.0094 12.2586 12.6146 12.8680 13.1327 13.2716 13.7402 14.0435 14.1436 14.2291 14.3100 14.4096 14.9035 14.9389 15.4672 15.5401 15.6827 15.7532 15.9794 16.0708 16.1875 16.2216 16.4739 16.5632 16.5975 16.6769 16.7358 16.8127 16.8552 16.9155 16.9372 16.9701 17.0347 17.1693 17.2964 17.4630 17.5220 17.6471 17.7720 17.8362 17.9735 18.0961 18.2949 18.3527 18.4838 18.7211 18.8820 19.0942 19.1443 19.2650 19.4538 19.6035 19.8168 19.9333 20.0820 20.3928 20.4655 20.6637 20.9600 21.3036 21.5806 21.8340 22.1814 22.2138 23.3421 24.0635 24.1556 24.5176 24.7293 24.7412 25.1927 25.3060 25.5094 25.5875 25.6130 25.8729 25.9146 25.9471 26.2630 26.4176 26.5585 26.5976 26.6886 26.8842 26.9470 27.1693 27.3161 27.3776 27.4234 27.6517 27.9105 28.0138 28.2558 28.5309 28.5983 28.6791 28.7798 28.8409 29.0110 29.1779 29.5188 29.5795 29.6740 29.7560 29.8045 29.9857 30.1326 30.2948 30.4187 30.5646 30.9494 31.3458 31.6381 31.8833 32.2261 32.6744 32.8235 32.8863 33.3393 33.7735 33.9627 34.0184 34.1133 34.3881 34.5409 34.6816 35.0244 35.2599 35.5027 35.5790 35.7225 35.7843 35.9389 36.0706 36.2214 36.5981 36.9611 36.9840 37.0952 37.3004 37.5871 38.4049 38.5195 39.1005 39.5775 39.7884 40.2876 40.3621 40.6238 40.6480 41.0603 41.2815 41.3242 41.6944 41.9102 41.9879 42.0233 42.3395 42.3818 42.5217 42.6573 42.6975 42.7325 42.9250 43.1412 43.5235 44.0396 44.1375 45.1235 45.7044 46.3326 46.8314 48.1010 48.3047 48.4301 49.0100 49.3508 50.2062 50.3923 50.7939 50.8157 51.1265 51.2827 51.7703 51.9519 52.0554 52.5106 52.8204 53.1501 53.5775 54.0027 54.1697 54.7751 54.8695 55.1387 55.2688 55.4796 55.5931 56.2204 56.4384 56.5199 56.6359 56.7529 58.2951 58.3540 58.6407 58.6438 59.4033 59.5521 59.7201 59.9276 60.0046 60.0421 60.1471 60.3199 60.3957 60.4491 60.6945 60.7949 60.9288 61.3404 61.4497 61.7393 62.4126 62.7334 62.8100 62.8905 63.9144 63.9866 64.6566 64.6992 64.7782 64.8276 64.9529 65.0204 65.2767 65.7605 66.4001 66.5116 68.3470 68.4081 69.1426 69.2174 71.1511 71.5996 71.7696 72.1475 72.5977 72.9481 73.2318 73.3634 73.4376 73.6986 74.5301 74.5419 74.9990 75.0973 75.3092 75.4248 75.7486 75.8180 76.0442 76.1262 76.3177 76.4203 76.8890 76.9541 77.0861 77.1214 77.5229 77.6447 78.7348 78.9792 80.7762 81.6197 81.6981 81.9199 82.8274 82.9671 85.5676 85.6012 87.8790 88.0903 94.8041 94.9284 95.0862 95.1665 360.4827 360.8196 360.9093 362.4236 371.8403 372.0613 372.1297 372.5386 372.6530 373.0486 373.5327 374.8588 384.6502 384.9106 384.9169 385.1681 385.5492 385.8888 386.1960 387.0182 396.6726 396.8357 397.1779 397.4258 532.3729 533.6236 892.8616 895.7014</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="49">-0.439997 1.413785 -0.790545 0.317222 -0.268527 -0.219220 -0.227579 -0.216719 -0.246685 0.322652 -0.308256 -0.226410 -0.231162 -0.211130 -0.223347 -0.441338 -0.791507 0.319423 -0.246157 -0.216785 -0.228061 -0.218242 -0.271408 0.319202 -0.220053 -0.209276 -0.230876 -0.225756 -0.302987 0.225118 0.220878 0.220483 0.222128 0.237207 0.238900 0.220174 0.217609 0.219864 0.239973 0.235767 0.221861 0.220501 0.220882 0.227683 0.237503 0.219973 0.218104 0.220135 0.234998</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="49">-0.226576 0.660440 -0.196716 0.019452 -0.140523 -0.129371 -0.140710 -0.128513 -0.131739 0.024412 -0.157344 -0.130842 -0.145879 -0.121927 -0.125860 -0.228314 -0.198283 0.019026 -0.131989 -0.128508 -0.140767 -0.129268 -0.141068 0.022692 -0.123098 -0.122008 -0.143954 -0.131469 -0.155130 0.141045 0.137469 0.136689 0.138013 0.146895 0.144056 0.136591 0.135303 0.137179 0.149427 0.146403 0.137876 0.136628 0.137474 0.142490 0.148848 0.137399 0.135481 0.136678 0.141888</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="49">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="49">F Si N C C C C C C C C C C C C F N C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="49">9.4400 12.5862 7.7905 5.6828 6.2685 6.2192 6.2276 6.2167 6.2467 5.6773 6.3083 6.2264 6.2312 6.2111 6.2233 9.4413 7.7915 5.6806 6.2462 6.2168 6.2281 6.2182 6.2714 5.6808 6.2201 6.2093 6.2309 6.2258 6.3030 0.7749 0.7791 0.7795 0.7779 0.7628 0.7611 0.7798 0.7824 0.7801 0.7600 0.7642 0.7781 0.7795 0.7791 0.7723 0.7625 0.7800 0.7819 0.7799 0.7650</array>
                     <array dataType="xsd:double" dictRef="o:za" size="49">9.0000 14.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="49">-0.4400 1.4138 -0.7905 0.3172 -0.2685 -0.2192 -0.2276 -0.2167 -0.2467 0.3227 -0.3083 -0.2264 -0.2312 -0.2111 -0.2233 -0.4413 -0.7915 0.3194 -0.2462 -0.2168 -0.2281 -0.2182 -0.2714 0.3192 -0.2201 -0.2093 -0.2309 -0.2258 -0.3030 0.2251 0.2209 0.2205 0.2221 0.2372 0.2389 0.2202 0.2176 0.2199 0.2400 0.2358 0.2219 0.2205 0.2209 0.2277 0.2375 0.2200 0.2181 0.2201 0.2350</array>
                     <array dataType="xsd:double" dictRef="o:va" size="49">0.9978 3.9900 2.9190 3.6963 3.8298 3.8216 3.8149 3.8186 3.8009 3.6880 3.8223 3.8316 3.8195 3.8340 3.7954 0.9948 2.9141 3.6915 3.8019 3.8189 3.8153 3.8200 3.8295 3.6867 3.7991 3.8308 3.8196 3.8284 3.8271 0.9145 0.9113 0.9114 0.9109 0.9085 0.9126 0.9119 0.9122 0.9119 0.9104 0.9091 0.9110 0.9114 0.9112 0.9142 0.9121 0.9119 0.9120 0.9120 0.9120</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="49">0.9978 3.9900 2.9190 3.6963 3.8298 3.8216 3.8149 3.8186 3.8009 3.6880 3.8223 3.8316 3.8195 3.8340 3.7954 0.9948 2.9141 3.6915 3.8019 3.8189 3.8153 3.8200 3.8295 3.6867 3.7991 3.8308 3.8196 3.8284 3.8271 0.9145 0.9113 0.9114 0.9109 0.9085 0.9126 0.9119 0.9122 0.9119 0.9104 0.9091 0.9110 0.9114 0.9112 0.9142 0.9121 0.9119 0.9120 0.9120 0.9120</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="49">-0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="52">0.9328 1.0182 0.9224 1.0229 0.8598 0.8759 1.4022 1.3903 1.4143 0.9117 1.4326 0.9192 1.4153 0.9192 1.4322 0.9188 0.9090 1.3905 1.3886 1.4124 0.9022 1.4390 0.9195 1.4114 0.9197 1.4419 0.9190 0.9034 0.8588 0.8695 1.3903 1.4032 1.4321 0.9092 1.4157 0.9190 1.4326 0.9191 1.4132 0.9192 0.9121 1.3923 1.3952 1.4398 0.9048 1.4113 0.9190 1.4393 0.9196 1.4090 0.9194 0.9053</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="52">0 1 1 2 1 15 1 16 2 3 2 9 3 4 3 8 4 5 4 29 5 6 5 30 6 7 6 31 7 8 7 32 8 33 9 10 9 14 10 11 10 34 11 12 11 35 12 13 12 36 13 14 13 37 14 38 16 17 16 23 17 18 17 22 18 19 18 39 19 20 19 40 20 21 20 41 21 22 21 42 22 43 23 24 23 28 24 25 24 44 25 26 25 45 26 27 26 46 27 28 27 47 28 48</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.044439243</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1522.465500431885</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.52286 1.43137 -0.09149 4.25194 -3.96788 0.28407 15.68185 -14.66665 1.01520</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.05816</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.68963</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
