<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="18">1 2 3 1 1 2 4 4 4 4 4 1 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="2.561671" y3="1.410417" z3="-1.182729"/>
                  <atom elementType="N" id="a2" x3="2.917764" y3="0.807311" z3="0.00739"/>
                  <atom elementType="Si" id="a3" x3="1.981654" y3="-0.731189" z3="0.045758"/>
                  <atom elementType="F" id="a4" x3="2.350811" y3="-1.664254" z3="-1.189655"/>
                  <atom elementType="F" id="a5" x3="2.437809" y3="-1.387024" z3="1.421205"/>
                  <atom elementType="N" id="a6" x3="0.321898" y3="-0.376803" z3="0.060712"/>
                  <atom elementType="C" id="a7" x3="-0.484821" y3="-0.458266" z3="-1.087923"/>
                  <atom elementType="C" id="a8" x3="-1.770409" y3="-0.128471" z3="-1.093282"/>
                  <atom elementType="C" id="a9" x3="-2.508259" y3="0.345473" z3="0.122443"/>
                  <atom elementType="C" id="a10" x3="-1.564411" y3="0.482767" z3="1.278274"/>
                  <atom elementType="C" id="a11" x3="-0.283707" y3="0.140896" z3="1.220071"/>
                  <atom elementType="F" id="a12" x3="4.245854" y3="0.485149" z3="-0.173271"/>
                  <atom elementType="H" id="a13" x3="0.008719" y3="-0.803281" z3="-1.985612"/>
                  <atom elementType="H" id="a14" x3="-2.30989" y3="-0.208838" z3="-2.027337"/>
                  <atom elementType="H" id="a15" x3="-3.319792" y3="-0.348216" z3="0.372644"/>
                  <atom elementType="H" id="a16" x3="-3.003818" y3="1.301498" z3="-0.080197"/>
                  <atom elementType="H" id="a17" x3="-1.942326" y3="0.880195" z3="2.210542"/>
                  <atom elementType="H" id="a18" x3="0.361352" y3="0.252635" z3="2.081266"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a12" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a6" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a5" order="S"/>
                  <bond atomRefs2="a6 a11" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a13" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a14" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a16" order="S"/>
                  <bond atomRefs2="a9 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a17" order="S"/>
                  <bond atomRefs2="a11 a18" order="S"/>
               </bondArray>
               <formula concise="C5H6F4N2Si">
                  <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">192.14601279999994</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.5617,1.4104,-1.1827;2.9178,.8073,.0074;1.9817,-.7312,.0458;2.3508,-1.6643,-1.1897;2.4378,-1.387,1.4212;.3219,-.3768,.0607;-.4848,-.4583,-1.0879;-1.7704,-.1285,-1.0933;-2.5083,.3455,.1224;-1.5644,.4828,1.2783;-.2837,.1409,1.2201;4.2459,.4851,-.1733;.0087,-.8033,-1.9856;-2.3099,-.2088,-2.0273;-3.3198,-.3482,.3726;-3.0038,1.3015,-.0802;-1.9423,.8802,2.2105;.3614,.2526,2.0813;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">656</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">656</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C5F4H6N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">195</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">877.1338441862 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.876e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.009 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">656</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">656</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C5F4H6N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">195</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">877.1545171547 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.880e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.009 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="2.56167127" y3="1.41041709" z3="-1.1827295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a2" x3="2.91776434" y3="0.80731069" z3="0.00738995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="Si" id="a3" x3="1.98165381" y3="-0.73118894" z3="0.04575827">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a4" x3="2.35081146" y3="-1.66425409" z3="-1.1896546">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F" id="a5" x3="2.43780911" y3="-1.38702434" z3="1.42120521">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a6" x3="0.32189759" y3="-0.37680294" z3="0.06071187">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-0.48482119" y3="-0.45826561" z3="-1.08792323">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-1.77040886" y3="-0.1284712" z3="-1.09328172">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="-2.5082585" y3="0.34547336" z3="0.1224428">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="-1.56441086" y3="0.48276713" z3="1.27827383">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="-0.2837074" y3="0.14089608" z3="1.22007133">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="F" id="a12" x3="4.24585386" y3="0.48514897" z3="-0.17327057">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="0.00871934" y3="-0.8032809" z3="-1.98561248">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-2.30989014" y3="-0.20883848" z3="-2.02733686">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="-3.31979195" y3="-0.3482156" z3="0.37264392">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-3.00381841" y3="1.30149842" z3="-0.080197">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-1.94232566" y3="0.88019531" z3="2.21054248">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="0.36135221" y3="0.25263505" z3="2.08126631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a12" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a3 a6" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a3 a5" order="S"/>
                           <bond atomRefs2="a6 a11" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a13" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a8 a14" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a16" order="S"/>
                           <bond atomRefs2="a9 a15" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a10 a17" order="S"/>
                           <bond atomRefs2="a11 a18" order="S"/>
                        </bondArray>
                        <formula concise="C5H6F4N2Si">
                           <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">192.14601279999994</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.5617,1.4104,-1.1827;2.9178,.8073,.0074;1.9817,-.7312,.0458;2.3508,-1.6643,-1.1897;2.4378,-1.387,1.4212;.3219,-.3768,.0607;-.4848,-.4583,-1.0879;-1.7704,-.1285,-1.0933;-2.5083,.3455,.1224;-1.5644,.4828,1.2783;-.2837,.1409,1.2201;4.2459,.4851,-.1733;.0087,-.8033,-1.9856;-2.3099,-.2088,-2.0273;-3.3198,-.3482,.3726;-3.0038,1.3015,-.0802;-1.9423,.8802,2.2105;.3614,.2526,2.0813;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 16</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.578487" y3="1.337408" z3="-1.298088"/>
                        <atom elementType="N" id="a2" x3="2.915213" y3="0.820064" z3="-0.059323"/>
                        <atom elementType="Si" id="a3" x3="1.985285" y3="-0.716186" z3="0.064007"/>
                        <atom elementType="F" id="a4" x3="2.350029" y3="-1.705457" z3="-1.127615"/>
                        <atom elementType="F" id="a5" x3="2.454958" y3="-1.301196" z3="1.46679"/>
                        <atom elementType="N" id="a6" x3="0.322055" y3="-0.371921" z3="0.071546"/>
                        <atom elementType="C" id="a7" x3="-0.475961" y3="-0.430876" z3="-1.084603"/>
                        <atom elementType="C" id="a8" x3="-1.761132" y3="-0.099327" z3="-1.095739"/>
                        <atom elementType="C" id="a9" x3="-2.511008" y3="0.350017" z3="0.12153"/>
                        <atom elementType="C" id="a10" x3="-1.580707" y3="0.450035" z3="1.291536"/>
                        <atom elementType="C" id="a11" x3="-0.298809" y3="0.111889" z3="1.236994"/>
                        <atom elementType="F" id="a12" x3="4.25086" y3="0.492488" z3="-0.187902"/>
                        <atom elementType="H" id="a13" x3="0.024478" y3="-0.756402" z3="-1.985667"/>
                        <atom elementType="H" id="a14" x3="-2.291039" y3="-0.160285" z3="-2.036648"/>
                        <atom elementType="H" id="a15" x3="-3.330796" y3="-0.343979" z3="0.343428"/>
                        <atom elementType="H" id="a16" x3="-2.997397" y3="1.314751" z3="-0.062438"/>
                        <atom elementType="H" id="a17" x3="-1.969086" y3="0.815005" z3="2.232578"/>
                        <atom elementType="H" id="a18" x3="0.33467" y3="0.19397" z3="2.109915"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.5785,1.3374,-1.2981;2.9152,.8201,-.0593;1.9853,-.7162,.064;2.35,-1.7055,-1.1276;2.455,-1.3012,1.4668;.3221,-.3719,.0715;-.476,-.4309,-1.0846;-1.7611,-.0993,-1.0957;-2.511,.35,.1215;-1.5807,.45,1.2915;-.2988,.1119,1.237;4.2509,.4925,-.1879;.0245,-.7564,-1.9857;-2.291,-.1603,-2.0366;-3.3308,-.344,.3434;-2.9974,1.3148,-.0624;-1.9691,.815,2.2326;.3347,.194,2.1099;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.543461" y3="1.240712" z3="-1.428321"/>
                        <atom elementType="N" id="a2" x3="2.915488" y3="0.827553" z3="-0.155558"/>
                        <atom elementType="Si" id="a3" x3="1.995649" y3="-0.695235" z3="0.102839"/>
                        <atom elementType="F" id="a4" x3="2.349122" y3="-1.766083" z3="-1.017814"/>
                        <atom elementType="F" id="a5" x3="2.486956" y3="-1.172663" z3="1.539152"/>
                        <atom elementType="N" id="a6" x3="0.326456" y3="-0.367419" z3="0.097769"/>
                        <atom elementType="C" id="a7" x3="-0.452703" y3="-0.389149" z3="-1.072678"/>
                        <atom elementType="C" id="a8" x3="-1.736306" y3="-0.052357" z3="-1.09975"/>
                        <atom elementType="C" id="a9" x3="-2.51043" y3="0.361188" z3="0.114104"/>
                        <atom elementType="C" id="a10" x3="-1.607239" y3="0.400683" z3="1.30812"/>
                        <atom elementType="C" id="a11" x3="-0.32367" y3="0.065921" z3="1.266703"/>
                        <atom elementType="F" id="a12" x3="4.252658" y3="0.492598" z3="-0.287316"/>
                        <atom elementType="H" id="a13" x3="0.061726" y3="-0.686267" z3="-1.975887"/>
                        <atom elementType="H" id="a14" x3="-2.246171" y3="-0.083592" z3="-2.053129"/>
                        <atom elementType="H" id="a15" x3="-3.344579" y3="-0.329883" z3="0.287455"/>
                        <atom elementType="H" id="a16" x3="-2.980294" y3="1.339239" z3="-0.042798"/>
                        <atom elementType="H" id="a17" x3="-2.016269" y3="0.714618" z3="2.258551"/>
                        <atom elementType="H" id="a18" x3="0.286248" y3="0.100137" z3="2.158857"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.5435,1.2407,-1.4283;2.9155,.8276,-.1556;1.9956,-.6952,.1028;2.3491,-1.7661,-1.0178;2.487,-1.1727,1.5392;.3265,-.3674,.0978;-.4527,-.3891,-1.0727;-1.7363,-.0524,-1.0998;-2.5104,.3612,.1141;-1.6072,.4007,1.3081;-.3237,.0659,1.2667;4.2527,.4926,-.2873;.0617,-.6863,-1.9759;-2.2462,-.0836,-2.0531;-3.3446,-.3299,.2875;-2.9803,1.3392,-.0428;-2.0163,.7146,2.2586;.2862,.1001,2.1589;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.521654" y3="1.292953" z3="-1.366055"/>
                        <atom elementType="N" id="a2" x3="2.920485" y3="0.824427" z3="-0.121904"/>
                        <atom elementType="Si" id="a3" x3="1.996347" y3="-0.702731" z3="0.094649"/>
                        <atom elementType="F" id="a4" x3="2.342272" y3="-1.743232" z3="-1.056712"/>
                        <atom elementType="F" id="a5" x3="2.488349" y3="-1.223794" z3="1.515236"/>
                        <atom elementType="N" id="a6" x3="0.327813" y3="-0.370701" z3="0.099027"/>
                        <atom elementType="C" id="a7" x3="-0.453347" y3="-0.404634" z3="-1.069155"/>
                        <atom elementType="C" id="a8" x3="-1.737178" y3="-0.06998" z3="-1.098064"/>
                        <atom elementType="C" id="a9" x3="-2.507726" y3="0.364352" z3="0.110631"/>
                        <atom elementType="C" id="a10" x3="-1.602252" y3="0.417485" z3="1.302778"/>
                        <atom elementType="C" id="a11" x3="-0.319924" y3="0.07657" z3="1.264723"/>
                        <atom elementType="F" id="a12" x3="4.251726" y3="0.489773" z3="-0.297209"/>
                        <atom elementType="H" id="a13" x3="0.057651" y3="-0.719601" z3="-1.968297"/>
                        <atom elementType="H" id="a14" x3="-2.249863" y3="-0.120274" z3="-2.04905"/>
                        <atom elementType="H" id="a15" x3="-3.344277" y3="-0.320681" z3="0.295441"/>
                        <atom elementType="H" id="a16" x3="-2.974075" y3="1.341602" z3="-0.060638"/>
                        <atom elementType="H" id="a17" x3="-2.008872" y3="0.746147" z3="2.249407"/>
                        <atom elementType="H" id="a18" x3="0.291317" y3="0.122319" z3="2.155492"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.5217,1.293,-1.3661;2.9205,.8244,-.1219;1.9963,-.7027,.0946;2.3423,-1.7432,-1.0567;2.4883,-1.2238,1.5152;.3278,-.3707,.099;-.4533,-.4046,-1.0692;-1.7372,-.07,-1.0981;-2.5077,.3644,.1106;-1.6023,.4175,1.3028;-.3199,.0766,1.2647;4.2517,.4898,-.2972;.0577,-.7196,-1.9683;-2.2499,-.1203,-2.049;-3.3443,-.3207,.2954;-2.9741,1.3416,-.0606;-2.0089,.7461,2.2494;.2913,.1223,2.1555;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.503696" y3="1.294337" z3="-1.365242"/>
                        <atom elementType="N" id="a2" x3="2.918329" y3="0.827123" z3="-0.127058"/>
                        <atom elementType="Si" id="a3" x3="1.998413" y3="-0.70196" z3="0.09682"/>
                        <atom elementType="F" id="a4" x3="2.333403" y3="-1.741417" z3="-1.058785"/>
                        <atom elementType="F" id="a5" x3="2.500761" y3="-1.227291" z3="1.512111"/>
                        <atom elementType="N" id="a6" x3="0.328951" y3="-0.373807" z3="0.109606"/>
                        <atom elementType="C" id="a7" x3="-0.446677" y3="-0.40566" z3="-1.062077"/>
                        <atom elementType="C" id="a8" x3="-1.730043" y3="-0.070416" z3="-1.097348"/>
                        <atom elementType="C" id="a9" x3="-2.504493" y3="0.370979" z3="0.106353"/>
                        <atom elementType="C" id="a10" x3="-1.605987" y3="0.415476" z3="1.304434"/>
                        <atom elementType="C" id="a11" x3="-0.324595" y3="0.069862" z3="1.273558"/>
                        <atom elementType="F" id="a12" x3="4.246374" y3="0.497559" z3="-0.320034"/>
                        <atom elementType="H" id="a13" x3="0.066378" y3="-0.726309" z3="-1.958098"/>
                        <atom elementType="H" id="a14" x3="-2.238816" y3="-0.126445" z3="-2.050126"/>
                        <atom elementType="H" id="a15" x3="-3.348384" y3="-0.306112" z3="0.285761"/>
                        <atom elementType="H" id="a16" x3="-2.960828" y3="1.35228" z3="-0.068321"/>
                        <atom elementType="H" id="a17" x3="-2.017418" y3="0.740918" z3="2.250238"/>
                        <atom elementType="H" id="a18" x3="0.281037" y3="0.110881" z3="2.168509"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.5037,1.2943,-1.3652;2.9183,.8271,-.1271;1.9984,-.702,.0968;2.3334,-1.7414,-1.0588;2.5008,-1.2273,1.5121;.329,-.3738,.1096;-.4467,-.4057,-1.0621;-1.73,-.0704,-1.0973;-2.5045,.371,.1064;-1.606,.4155,1.3044;-.3246,.0699,1.2736;4.2464,.4976,-.32;.0664,-.7263,-1.9581;-2.2388,-.1264,-2.0501;-3.3484,-.3061,.2858;-2.9608,1.3523,-.0683;-2.0174,.7409,2.2502;.281,.1109,2.1685;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.489804" y3="1.292927" z3="-1.370912"/>
                        <atom elementType="N" id="a2" x3="2.913701" y3="0.831565" z3="-0.134603"/>
                        <atom elementType="Si" id="a3" x3="1.999458" y3="-0.700362" z3="0.098078"/>
                        <atom elementType="F" id="a4" x3="2.32554" y3="-1.73991" z3="-1.060455"/>
                        <atom elementType="F" id="a5" x3="2.511667" y3="-1.227516" z3="1.509034"/>
                        <atom elementType="N" id="a6" x3="0.329353" y3="-0.377463" z3="0.120081"/>
                        <atom elementType="C" id="a7" x3="-0.441015" y3="-0.40919" z3="-1.055557"/>
                        <atom elementType="C" id="a8" x3="-1.723522" y3="-0.071116" z3="-1.096734"/>
                        <atom elementType="C" id="a9" x3="-2.500494" y3="0.378605" z3="0.102549"/>
                        <atom elementType="C" id="a10" x3="-1.609269" y3="0.412011" z3="1.306564"/>
                        <atom elementType="C" id="a11" x3="-0.328944" y3="0.062213" z3="1.282121"/>
                        <atom elementType="F" id="a12" x3="4.240723" y3="0.509716" z3="-0.334903"/>
                        <atom elementType="H" id="a13" x3="0.07364" y3="-0.735915" z3="-1.948427"/>
                        <atom elementType="H" id="a14" x3="-2.228929" y3="-0.13124" z3="-2.05108"/>
                        <atom elementType="H" id="a15" x3="-3.353393" y3="-0.288236" z3="0.27652"/>
                        <atom elementType="H" id="a16" x3="-2.943939" y3="1.365339" z3="-0.074726"/>
                        <atom elementType="H" id="a17" x3="-2.025847" y3="0.732379" z3="2.251891"/>
                        <atom elementType="H" id="a18" x3="0.271565" y3="0.096195" z3="2.180858"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.4898,1.2929,-1.3709;2.9137,.8316,-.1346;1.9995,-.7004,.0981;2.3255,-1.7399,-1.0605;2.5117,-1.2275,1.509;.3294,-.3775,.1201;-.441,-.4092,-1.0556;-1.7235,-.0711,-1.0967;-2.5005,.3786,.1025;-1.6093,.412,1.3066;-.3289,.0622,1.2821;4.2407,.5097,-.3349;.0736,-.7359,-1.9484;-2.2289,-.1312,-2.0511;-3.3534,-.2882,.2765;-2.9439,1.3653,-.0747;-2.0258,.7324,2.2519;.2716,.0962,2.1809;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.486086" y3="1.294284" z3="-1.372409"/>
                        <atom elementType="N" id="a2" x3="2.911555" y3="0.833449" z3="-0.136334"/>
                        <atom elementType="Si" id="a3" x3="1.999531" y3="-0.699711" z3="0.097877"/>
                        <atom elementType="F" id="a4" x3="2.325711" y3="-1.738986" z3="-1.061214"/>
                        <atom elementType="F" id="a5" x3="2.513422" y3="-1.226578" z3="1.508303"/>
                        <atom elementType="N" id="a6" x3="0.329253" y3="-0.37916" z3="0.122382"/>
                        <atom elementType="C" id="a7" x3="-0.440354" y3="-0.412371" z3="-1.054171"/>
                        <atom elementType="C" id="a8" x3="-1.722338" y3="-0.072166" z3="-1.096524"/>
                        <atom elementType="C" id="a9" x3="-2.498814" y3="0.381907" z3="0.10151"/>
                        <atom elementType="C" id="a10" x3="-1.609692" y3="0.410738" z3="1.307115"/>
                        <atom elementType="C" id="a11" x3="-0.329785" y3="0.059517" z3="1.283889"/>
                        <atom elementType="F" id="a12" x3="4.239232" y3="0.514792" z3="-0.336869"/>
                        <atom elementType="H" id="a13" x3="0.073998" y3="-0.742066" z3="-1.94604"/>
                        <atom elementType="H" id="a14" x3="-2.227606" y3="-0.133624" z3="-2.050855"/>
                        <atom elementType="H" id="a15" x3="-3.355697" y3="-0.280069" z3="0.274293"/>
                        <atom elementType="H" id="a16" x3="-2.936348" y3="1.371188" z3="-0.076624"/>
                        <atom elementType="H" id="a17" x3="-2.027747" y3="0.728851" z3="2.25254"/>
                        <atom elementType="H" id="a18" x3="0.269694" y3="0.090005" z3="2.183431"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.4861,1.2943,-1.3724;2.9116,.8334,-.1363;1.9995,-.6997,.0979;2.3257,-1.739,-1.0612;2.5134,-1.2266,1.5083;.3293,-.3792,.1224;-.4404,-.4124,-1.0542;-1.7223,-.0722,-1.0965;-2.4988,.3819,.1015;-1.6097,.4107,1.3071;-.3298,.0595,1.2839;4.2392,.5148,-.3369;.074,-.7421,-1.946;-2.2276,-.1336,-2.0509;-3.3557,-.2801,.2743;-2.9363,1.3712,-.0766;-2.0277,.7289,2.2525;.2697,.09,2.1834;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.482345" y3="1.295921" z3="-1.375666"/>
                        <atom elementType="N" id="a2" x3="2.90815" y3="0.83651" z3="-0.138956"/>
                        <atom elementType="Si" id="a3" x3="1.999686" y3="-0.698322" z3="0.097391"/>
                        <atom elementType="F" id="a4" x3="2.3292" y3="-1.737973" z3="-1.060916"/>
                        <atom elementType="F" id="a5" x3="2.514658" y3="-1.222367" z3="1.508475"/>
                        <atom elementType="N" id="a6" x3="0.329007" y3="-0.381822" z3="0.124187"/>
                        <atom elementType="C" id="a7" x3="-0.44044" y3="-0.417249" z3="-1.052989"/>
                        <atom elementType="C" id="a8" x3="-1.721565" y3="-0.073676" z3="-1.096159"/>
                        <atom elementType="C" id="a9" x3="-2.4964" y3="0.387254" z3="0.100304"/>
                        <atom elementType="C" id="a10" x3="-1.609994" y3="0.408324" z3="1.307943"/>
                        <atom elementType="C" id="a11" x3="-0.330747" y3="0.054839" z3="1.28556"/>
                        <atom elementType="F" id="a12" x3="4.237238" y3="0.522049" z3="-0.337793"/>
                        <atom elementType="H" id="a13" x3="0.072853" y3="-0.751557" z3="-1.943655"/>
                        <atom elementType="H" id="a14" x3="-2.227572" y3="-0.137271" z3="-2.049959"/>
                        <atom elementType="H" id="a15" x3="-3.359614" y3="-0.26685" z3="0.27138"/>
                        <atom elementType="H" id="a16" x3="-2.924453" y3="1.380634" z3="-0.078707"/>
                        <atom elementType="H" id="a17" x3="-2.029901" y3="0.722386" z3="2.253877"/>
                        <atom elementType="H" id="a18" x3="0.267651" y3="0.079171" z3="2.185983"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.4823,1.2959,-1.3757;2.9082,.8365,-.139;1.9997,-.6983,.0974;2.3292,-1.738,-1.0609;2.5147,-1.2224,1.5085;.329,-.3818,.1242;-.4404,-.4172,-1.053;-1.7216,-.0737,-1.0962;-2.4964,.3873,.1003;-1.61,.4083,1.3079;-.3307,.0548,1.2856;4.2372,.522,-.3378;.0729,-.7516,-1.9437;-2.2276,-.1373,-2.05;-3.3596,-.2668,.2714;-2.9245,1.3806,-.0787;-2.0299,.7224,2.2539;.2677,.0792,2.186;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="2.479466" y3="1.2965" z3="-1.377677"/>
                        <atom elementType="N" id="a2" x3="2.906573" y3="0.83806" z3="-0.140959"/>
                        <atom elementType="Si" id="a3" x3="2.000124" y3="-0.697355" z3="0.097716"/>
                        <atom elementType="F" id="a4" x3="2.332312" y3="-1.738446" z3="-1.058639"/>
                        <atom elementType="F" id="a5" x3="2.515378" y3="-1.217985" z3="1.510007"/>
                        <atom elementType="N" id="a6" x3="0.329037" y3="-0.383259" z3="0.12458"/>
                        <atom elementType="C" id="a7" x3="-0.440543" y3="-0.419062" z3="-1.052561"/>
                        <atom elementType="C" id="a8" x3="-1.721209" y3="-0.073911" z3="-1.096024"/>
                        <atom elementType="C" id="a9" x3="-2.495173" y3="0.390376" z3="0.099616"/>
                        <atom elementType="C" id="a10" x3="-1.610239" y3="0.40646" z3="1.308413"/>
                        <atom elementType="C" id="a11" x3="-0.33138" y3="0.051571" z3="1.286316"/>
                        <atom elementType="F" id="a12" x3="4.236081" y3="0.524962" z3="-0.340222"/>
                        <atom elementType="H" id="a13" x3="0.072179" y3="-0.755586" z3="-1.942742"/>
                        <atom elementType="H" id="a14" x3="-2.227747" y3="-0.138771" z3="-2.049461"/>
                        <atom elementType="H" id="a15" x3="-3.361871" y3="-0.259455" z3="0.26926"/>
                        <atom elementType="H" id="a16" x3="-2.918048" y3="1.386009" z3="-0.079489"/>
                        <atom elementType="H" id="a17" x3="-2.031071" y3="0.717773" z3="2.254827"/>
                        <atom elementType="H" id="a18" x3="0.266231" y3="0.072118" z3="2.187336"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a12" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a6" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a13" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a14" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a16" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a17" order="S"/>
                        <bond atomRefs2="a11 a18" order="S"/>
                     </bondArray>
                     <formula concise="C5H6F4N2Si">
                        <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">192.14601279999994</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.4795,1.2965,-1.3777;2.9066,.8381,-.141;2.0001,-.6974,.0977;2.3323,-1.7384,-1.0586;2.5154,-1.218,1.51;.329,-.3833,.1246;-.4405,-.4191,-1.0526;-1.7212,-.0739,-1.096;-2.4952,.3904,.0996;-1.6102,.4065,1.3084;-.3314,.0516,1.2863;4.2361,.525,-.3402;.0722,-.7556,-1.9427;-2.2277,-.1388,-2.0495;-3.3619,-.2595,.2693;-2.918,1.386,-.0795;-2.0311,.7178,2.2548;.2662,.0721,2.1873;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.735901451642</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.735956606447</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.735894186045</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.735989555133</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.736016224298</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.736017120635</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.736022678332</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.736037742267</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.736045791520</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="18">-0.181065 0.188222 0.651306 -0.205711 -0.206196 -0.190321 -0.069126 -0.176773 -0.229968 -0.174757 -0.069768 -0.178422 0.145792 0.141724 0.133589 0.133735 0.142019 0.145719</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="18">9.2867 6.7408 12.6024 9.4355 9.4334 7.6498 5.9695 6.3124 6.4358 6.3111 5.9700 9.2874 0.7437 0.7720 0.7658 0.7675 0.7714 0.7448</array>
                     <array dataType="xsd:double" dictRef="o:za" size="18">9.0000 7.0000 14.0000 9.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="18">-0.2867 0.2592 1.3976 -0.4355 -0.4334 -0.6498 0.0305 -0.3124 -0.4358 -0.3111 0.0300 -0.2874 0.2563 0.2280 0.2342 0.2325 0.2286 0.2552</array>
                     <array dataType="xsd:double" dictRef="o:va" size="18">1.0616 2.7313 4.0350 1.0118 1.0098 3.1374 3.7121 3.8203 3.7114 3.8260 3.7138 1.0564 0.8951 0.9193 0.8889 0.8913 0.9189 0.8940</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="18">1.0616 2.7313 4.0350 1.0118 1.0098 3.1374 3.7121 3.8203 3.7114 3.8260 3.7138 1.0564 0.8951 0.9193 0.8889 0.8913 0.9189 0.8940</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="18">0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="18">0.9143 0.8472 0.9197 0.9492 0.9477 1.0446 0.9651 0.9626 1.8485 0.8993 0.9897 0.9182 0.9904 0.8994 0.9027 1.8528 0.9177 0.8987</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="18">0 1 1 2 1 11 2 3 2 4 2 5 5 6 5 10 6 7 6 12 7 8 7 13 8 9 8 14 8 15 9 10 9 16 10 17</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="18">-0.286732 0.259172 1.397614 -0.435456 -0.433396 -0.649809 0.030521 -0.312377 -0.435835 -0.311132 0.030018 -0.287405 0.256322 0.228011 0.234199 0.232465 0.228602 0.255216</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="195">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="195">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="195" units="nonsi:electronvolt">-1820.1812 -684.1703 -684.1315 -683.8748 -683.7842 -402.8769 -399.7395 -285.5975 -285.5734 -284.5409 -284.4165 -284.3968 -153.6506 -107.2509 -107.2034 -107.1450 -38.6872 -36.9169 -36.4614 -36.3317 -29.1908 -24.7629 -24.4343 -23.7030 -20.6697 -19.4123 -18.7673 -17.6131 -17.2805 -16.8911 -16.5165 -16.0482 -15.4831 -15.0457 -14.9830 -14.8468 -14.4679 -14.3085 -14.1122 -13.7937 -13.7730 -13.5593 -13.3161 -12.9996 -12.2968 -11.7130 -11.0073 -9.3153 -8.9910 -6.8884 0.5155 1.4299 1.5100 1.8863 2.2699 3.7894 4.0703 4.2449 4.6555 4.8712 5.3430 5.9069 6.1867 6.2183 6.7661 7.5697 7.6884 8.4956 9.5487 11.0110 11.4673 11.7208 11.8278 12.6342 13.6623 13.9513 14.4510 14.8599 15.1844 15.8422 16.1970 16.5499 17.1497 17.5111 17.8726 18.2494 18.8874 19.5102 20.4913 20.5989 21.0956 22.4424 22.7232 23.3789 23.9650 25.1869 25.6723 25.9397 26.2039 26.7206 26.9932 27.3919 27.4310 28.1364 28.5224 29.2630 29.9004 30.6523 31.3654 31.4810 32.0045 32.3021 32.8072 32.9192 33.0498 33.2251 33.2944 33.4469 33.7138 33.8965 33.9547 34.0383 34.5173 34.7488 34.8644 35.0247 35.3892 36.3488 36.6640 36.9329 37.0874 37.7678 38.1464 38.8196 39.3245 40.4525 41.2848 42.2568 42.2964 43.3860 44.5057 45.2263 46.0605 46.3986 47.3392 48.5331 48.9140 49.2988 49.7877 51.0108 52.0235 52.5821 53.6374 53.9530 55.1423 56.0777 58.6210 59.0759 59.1125 59.7033 60.5073 60.5644 61.0847 61.5549 62.5948 63.5499 64.2500 65.8834 66.3233 66.6423 67.1997 71.4419 72.0504 72.9925 73.9348 74.1558 75.9638 76.9583 80.2237 80.6323 82.8206 83.7807 87.2274 90.6875 365.0661 368.5729 378.6232 386.0159 387.1303 519.6759 526.1206 889.3615 891.3535 893.6679 898.9581</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="2.478373" y3="1.296164" z3="-1.379779"/>
                  <atom elementType="N" id="a2" x3="2.905815" y3="0.839076" z3="-0.142794"/>
                  <atom elementType="Si" id="a3" x3="2.000544" y3="-0.696507" z3="0.098157"/>
                  <atom elementType="F" id="a4" x3="2.334455" y3="-1.739594" z3="-1.055825"/>
                  <atom elementType="F" id="a5" x3="2.515888" y3="-1.213984" z3="1.511631"/>
                  <atom elementType="N" id="a6" x3="0.329126" y3="-0.383851" z3="0.124347"/>
                  <atom elementType="C" id="a7" x3="-0.440644" y3="-0.41928" z3="-1.052484"/>
                  <atom elementType="C" id="a8" x3="-1.721125" y3="-0.073656" z3="-1.095988"/>
                  <atom elementType="C" id="a9" x3="-2.494603" y3="0.392265" z3="0.09927"/>
                  <atom elementType="C" id="a10" x3="-1.610485" y3="0.404864" z3="1.308773"/>
                  <atom elementType="C" id="a11" x3="-0.33183" y3="0.049213" z3="1.286715"/>
                  <atom elementType="F" id="a12" x3="4.235339" y3="0.526167" z3="-0.342111"/>
                  <atom elementType="H" id="a13" x3="0.071812" y3="-0.756897" z3="-1.942463"/>
                  <atom elementType="H" id="a14" x3="-2.228082" y3="-0.139529" z3="-2.049139"/>
                  <atom elementType="H" id="a15" x3="-3.363385" y3="-0.255061" z3="0.26772"/>
                  <atom elementType="H" id="a16" x3="-2.914431" y3="1.389243" z3="-0.079591"/>
                  <atom elementType="H" id="a17" x3="-2.031819" y3="0.714024" z3="2.255672"/>
                  <atom elementType="H" id="a18" x3="0.265154" y3="0.067343" z3="2.18819"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a12" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a6" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a5" order="S"/>
                  <bond atomRefs2="a6 a11" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a13" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a14" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a16" order="S"/>
                  <bond atomRefs2="a9 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a17" order="S"/>
                  <bond atomRefs2="a11 a18" order="S"/>
               </bondArray>
               <formula concise="C5H6F4N2Si">
                  <atomArray count="5 6 4 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">192.14601279999994</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C5H6F4N2Si/c6-11(7)12(8,9)10-4-2-1-3-5-10/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:9,8,10,7,11,1,12,4,5,6,2,3/E:(2,3)(4,5)(6,7)(8,9)/CRV:2.3,3.3,4.3,5.3/rA:18nFNSiFFNC3C3CC3C3FHHHHHH/rB:s1;s2;s3;s3;s3;s6;s7;s8;s9;s6s10;s2;s7;s8;s9;s9;s10;s11;/rC:2.4784,1.2962,-1.3798;2.9058,.8391,-.1428;2.0005,-.6965,.0982;2.3345,-1.7396,-1.0558;2.5159,-1.214,1.5116;.3291,-.3839,.1243;-.4406,-.4193,-1.0525;-1.7211,-.0737,-1.096;-2.4946,.3923,.0993;-1.6105,.4049,1.3088;-.3318,.0492,1.2867;4.2353,.5262,-.3421;.0718,-.7569,-1.9425;-2.2281,-.1395,-2.0491;-3.3634,-.2551,.2677;-2.9144,1.3892,-.0796;-2.0318,.714,2.2557;.2652,.0673,2.1882;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-990.76450425</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">877.13384419</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1867.89834843</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-3112.99069121</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1245.09234278</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1976.25659636</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">985.49209212</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00535003</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">49.999968680101</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">49.999968680101</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">99.999937360201</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-57.058513223168</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-4.616818796378</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-61.675332019545</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010371168</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010364227</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010366359</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010367733</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010370598</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010373095</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010373402</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010373276</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010373159</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="195">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="195">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="195" units="nonsi:electronvolt">-1820.2030 -684.2044 -684.1608 -683.8582 -683.8323 -402.9089 -399.7382 -285.5809 -285.5572 -284.5307 -284.4030 -284.3872 -153.6698 -107.2708 -107.2243 -107.1624 -38.6509 -36.9284 -36.4750 -36.3427 -29.1756 -24.7779 -24.4531 -23.6844 -20.6625 -19.3946 -18.7708 -17.6135 -17.2861 -16.8746 -16.5354 -16.0466 -15.4608 -15.0532 -14.9665 -14.8637 -14.4737 -14.3236 -14.1262 -13.8212 -13.7410 -13.5222 -13.3538 -13.0304 -12.2920 -11.6989 -10.9864 -9.3583 -8.9803 -6.8794 0.5018 1.3569 1.4715 1.9043 2.3146 3.5945 4.1004 4.3796 4.6490 4.8927 5.3243 5.9752 6.1561 6.2189 6.7523 7.5351 7.6887 8.4919 9.5459 10.9277 11.4431 11.5366 11.8435 12.6959 13.8640 13.9105 14.4459 14.9098 15.1870 15.8855 16.1864 16.6577 17.1412 17.5440 17.8328 18.2242 18.8919 19.6153 20.2351 20.5533 21.0225 22.3893 22.7289 23.3725 23.9021 25.2355 25.7695 25.8747 26.2145 26.7262 27.0875 27.3194 27.5030 28.1177 28.4555 29.2512 30.1345 30.6978 31.3850 31.4797 32.0020 32.2382 32.8724 32.9432 33.0324 33.1875 33.3669 33.5034 33.7718 33.8605 33.9962 34.1330 34.5586 34.6437 34.8593 35.1770 35.4304 36.3260 36.6860 36.9043 37.0631 37.5967 38.0487 38.7105 39.4327 40.4169 41.3300 42.2568 42.4058 43.3816 44.1531 45.0782 46.1559 46.3361 47.2926 48.4259 48.9149 49.2534 49.7763 50.9359 51.9968 52.6130 53.5087 53.6197 55.1391 56.1095 58.7455 58.9939 59.0956 59.5160 60.5349 60.8643 61.0634 61.1316 62.5466 63.4987 64.1138 65.8972 66.2892 66.9028 67.0881 71.4466 72.1039 73.0891 74.0148 74.1561 75.8795 76.8455 80.2572 80.5774 82.9744 83.5458 87.3576 90.7065 365.1157 368.5983 378.6632 386.0633 387.1928 519.5365 526.1854 889.1192 891.3399 893.6668 898.9924</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="18">-0.289247 0.262824 1.400508 -0.435144 -0.434487 -0.650806 0.027915 -0.309870 -0.435589 -0.310008 0.028033 -0.287005 0.256673 0.227834 0.232416 0.233619 0.227881 0.254453</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="18">-0.182598 0.190733 0.653544 -0.206326 -0.205366 -0.191114 -0.069827 -0.175987 -0.230016 -0.176016 -0.070252 -0.178168 0.146151 0.141739 0.133244 0.133746 0.141697 0.144817</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="18">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="18">F N Si F F N C C C C C F H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="18">9.2892 6.7372 12.5995 9.4351 9.4345 7.6508 5.9721 6.3099 6.4356 6.3100 5.9720 9.2870 0.7433 0.7722 0.7676 0.7664 0.7721 0.7455</array>
                     <array dataType="xsd:double" dictRef="o:za" size="18">9.0000 7.0000 14.0000 9.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="18">-0.2892 0.2628 1.4005 -0.4351 -0.4345 -0.6508 0.0279 -0.3099 -0.4356 -0.3100 0.0280 -0.2870 0.2567 0.2278 0.2324 0.2336 0.2279 0.2545</array>
                     <array dataType="xsd:double" dictRef="o:va" size="18">1.0602 2.7321 4.0292 1.0111 1.0094 3.1352 3.7161 3.8220 3.7112 3.8220 3.7140 1.0574 0.8949 0.9192 0.8904 0.8901 0.9192 0.8951</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="18">1.0602 2.7321 4.0292 1.0111 1.0094 3.1352 3.7161 3.8220 3.7112 3.8220 3.7140 1.0574 0.8949 0.9192 0.8904 0.8901 0.9192 0.8951</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="18">-0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="18">0.9119 0.8511 0.9197 0.9493 0.9448 1.0414 0.9630 0.9664 1.8512 0.8987 0.9897 0.9180 0.9898 0.9012 0.9008 1.8499 0.9181 0.8998</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="18">0 1 1 2 1 11 2 3 2 4 2 5 5 6 5 10 6 7 6 12 7 8 7 13 8 9 8 14 8 15 9 10 9 16 10 17</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.010372863</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-990.736051255213</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-22.57457 21.59864 -0.97592 2.32491 -2.44623 -0.12132 1.90405 -1.77384 0.13021</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.99202</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.52151</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
