<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="6">1 2 3 4 5 6</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="6">8s4p1d 8s4p1d 10s7p1d 8s4p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="6">4s2p1d 4s2p1d 4s3p1d 4s2p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">F N F Si N C C C C C O H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="17">1 2 1 3 2 4 4 4 4 4 5 6 6 6 6 6 6</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="4.19395" y3="-1.115697" z3="-0.319832"/>
                  <atom elementType="N" id="a2" x3="2.920196" y3="-0.844757" z3="-0.739446"/>
                  <atom elementType="F" id="a3" x3="3.081234" y3="0.122874" z3="-1.731417"/>
                  <atom elementType="Si" id="a4" x3="2.1106" y3="0.082516" z3="0.588117"/>
                  <atom elementType="N" id="a5" x3="0.459566" y3="-0.020784" z3="0.22183"/>
                  <atom elementType="C" id="a6" x3="-0.091124" y3="-0.67763" z3="-0.897096"/>
                  <atom elementType="C" id="a7" x3="-1.37225" y3="-0.583644" z3="-1.228911"/>
                  <atom elementType="C" id="a8" x3="-2.366335" y3="0.238033" z3="-0.470758"/>
                  <atom elementType="C" id="a9" x3="-1.74321" y3="0.774849" z3="0.779224"/>
                  <atom elementType="C" id="a10" x3="-0.453413" y3="0.65257" z3="1.06391"/>
                  <atom elementType="O" id="a11" x3="2.769123" y3="0.751414" z3="1.773198"/>
                  <atom elementType="H" id="a12" x3="0.591914" y3="-1.289887" z3="-1.466872"/>
                  <atom elementType="H" id="a13" x3="-1.708735" y3="-1.136885" z3="-2.095326"/>
                  <atom elementType="H" id="a14" x3="-2.742501" y3="1.058699" z3="-1.094067"/>
                  <atom elementType="H" id="a15" x3="-3.250213" y3="-0.362434" z3="-0.229728"/>
                  <atom elementType="H" id="a16" x3="-2.370653" y3="1.293197" z3="1.491638"/>
                  <atom elementType="H" id="a17" x3="-0.028249" y3="1.057568" z3="1.971936"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a4 a11" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a13" order="S"/>
                  <bond atomRefs2="a8 a15" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a14" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a16" order="S"/>
                  <bond atomRefs2="a10 a17" order="S"/>
               </bondArray>
               <formula concise="C5H6F2N2OSi">
                  <atomArray count="5 6 2 2 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">170.14860639999998</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C5H6F2N2OSi/c6-9(7)11(10)8-4-2-1-3-5-8/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,1,3,5,2,11,4/E:(2,3)(4,5)(6,7)/CRV:2.3,3.3,4.3,5.3,10.1,11.3/rA:17nFNFSi3NC3C3CC3C3O1HHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s8;s5s9;s4;s6;s7;s8;s8;s9;s10;/rC:4.194,-1.1157,-.3198;2.9202,-.8448,-.7394;3.0812,.1229,-1.7314;2.1106,.0825,.5881;.4596,-.0208,.2218;-.0911,-.6776,-.8971;-1.3722,-.5836,-1.2289;-2.3663,.238,-.4708;-1.7432,.7748,.7792;-.4534,.6526,1.0639;2.7691,.7514,1.7732;.5919,-1.2899,-1.4669;-1.7087,-1.1369,-2.0953;-2.7425,1.0587,-1.0941;-3.2502,-.3624,-.2297;-2.3707,1.2932,1.4916;-.0282,1.0576,1.9719;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">607</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">607</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C5F2H6N2OSi_hess_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">90</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">180</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">711.1646832790 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-10 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-11 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-03 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.856e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.004 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.007 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="4.19394988" y3="-1.11569662" z3="-0.31983246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a2" x3="2.92019646" y3="-0.84475746" z3="-0.73944576">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="F" id="a3" x3="3.08123425" y3="0.12287368" z3="-1.73141728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a4" x3="2.11060005" y3="0.08251585" z3="0.5881175">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="N" id="a5" x3="0.45956555" y3="-0.02078436" z3="0.22183016">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="-0.09112373" y3="-0.67763026" z3="-0.89709613">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-1.37224985" y3="-0.58364392" z3="-1.22891115">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-2.3663349" y3="0.23803328" z3="-0.47075756">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="-1.74321008" y3="0.77484867" z3="0.77922414">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="-0.453413" y3="0.65256998" z3="1.06391028">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="O" id="a11" x3="2.76912252" y3="0.75141429" z3="1.77319814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="H" id="a12" x3="0.59191385" y3="-1.28988719" z3="-1.46687185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="-1.70873498" y3="-1.13688511" z3="-2.09532573">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-2.74250067" y3="1.05869907" z3="-1.09406735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="-3.25021291" y3="-0.36243449" z3="-0.22972815">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-2.37065312" y3="1.29319684" z3="1.49163755">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-0.02824931" y3="1.05756775" z3="1.97193569">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a4 a11" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a10" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a13" order="S"/>
                           <bond atomRefs2="a8 a15" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a14" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a16" order="S"/>
                           <bond atomRefs2="a10 a17" order="S"/>
                        </bondArray>
                        <formula concise="C5H6F2N2OSi">
                           <atomArray count="5 6 2 2 1 1" elementType="C H F N O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">170.14860639999998</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C5H6F2N2OSi/c6-9(7)11(10)8-4-2-1-3-5-8/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,1,3,5,2,11,4/E:(2,3)(4,5)(6,7)/CRV:2.3,3.3,4.3,5.3,10.1,11.3/rA:17nFNFSi3NC3C3CC3C3O1HHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s8;s5s9;s4;s6;s7;s8;s8;s9;s10;/rC:4.1939,-1.1157,-.3198;2.9202,-.8448,-.7394;3.0812,.1229,-1.7314;2.1106,.0825,.5881;.4596,-.0208,.2218;-.0911,-.6776,-.8971;-1.3722,-.5836,-1.2289;-2.3663,.238,-.4708;-1.7432,.7748,.7792;-.4534,.6526,1.0639;2.7691,.7514,1.7732;.5919,-1.2899,-1.4669;-1.7087,-1.1369,-2.0953;-2.7425,1.0587,-1.0941;-3.2502,-.3624,-.2297;-2.3707,1.2932,1.4916;-.0282,1.0576,1.9719;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Freq RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="vibrations" dictRef="cc:vibrations">
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-0.000541 -0.001084 -0.042205 0.034494 0.047174 -0.016376 -0.017163 -0.037690 -0.000144 0.000059 0.000046 -0.020779 0.018589 0.017166 -0.030637 -0.048939 -0.076591 0.002305 -0.003285 0.006097 0.009646 0.007476 0.000234 0.485897 -0.401246 -0.551797 0.204922 0.199692 0.445902 0.000035 0.000024 0.000019 0.000096 -0.000007 0.000015 0.000026 0.000008 0.000005 0.000044 -0.000028 -0.000034 -0.000434 -0.000246 -0.000514 0.013441 -0.014666 -0.014839 0.027510 0.041048 0.065193 0.002366 -0.000577 -0.000377 0.003779 -0.003442 -0.004867 0.001649 0.002352 0.004959 -0.000024 -0.000022 -0.000034 -0.195572 0.176225 0.165571 -0.293408 -0.481349 -0.753283 -0.004510 0.008604 -0.003600 -0.015365 -0.007144 0.005150 -0.044589 0.037668 0.051794 -0.024694 -0.024486 -0.054264 0.000052 -0.000010 -0.000001 0.000035 0.000006 0.000038 0.000014 0.000017 -0.000015 0.000065 -0.000206 -0.000275 -0.000200 0.000760 0.001183 0.003192 -0.002320 -0.001945 -0.000580 -0.000036 -0.000214 0.001472 0.000341 0.001210 0.034058 -0.022266 -0.027872 -0.035759 -0.026711 -0.062763 -0.000210 0.000081 0.000063 -0.035029 0.031224 0.029081 0.001682 0.002375 0.003856 -0.003113 0.004810 -0.005148 -0.008950 -0.005642 0.000196 -0.311203 0.253960 0.347836 0.330792 0.314538 0.705463 0.000071 0.000056 0.000049 0.000284 0.000025 0.000040 0.000062 0.000009 0.000040 0.000070 -0.000125 -0.000215 -0.000155 0.000699 0.000968 0.057984 -0.046690 -0.041737 -0.015354 -0.012777 -0.022635 -0.001375 0.000542 0.000163 -0.001748 0.001232 0.001541 0.001640 0.001824 0.004065 -0.000102 -0.000014 -0.000024 -0.602658 0.532726 0.496548 0.099409 0.156710 0.246803 0.002532 -0.004259 0.003003 0.007131 0.002902 -0.001775 0.016316 -0.013030 -0.017995 -0.017640 -0.016896 -0.037604</matrix>
                  </module>
               </property>
               <property dictRef="cc:irspectrum">
                  <module cmlx:templateRef="irspectrum">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="45">6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="45">42.70 65.93 74.33 116.64 151.62 195.56 213.90 274.00 335.91 359.11 441.54 469.84 520.25 546.92 648.68 656.57 731.03 780.05 789.97 933.28 1001.34 1015.70 1019.19 1021.57 1026.29 1042.63 1140.39 1170.21 1185.96 1261.65 1291.10 1340.70 1363.41 1411.09 1468.06 1502.67 1539.79 1776.29 1836.88 3072.14 3102.51 3276.12 3277.97 3295.86 3308.53</array>
                     <array dataType="xsd:double" dictRef="o:t2" size="45">0.000481 0.000181 0.000910 0.000393 0.003176 0.006784 0.000166 0.000542 0.003766 0.003976 0.000005 0.008044 0.000105 0.006147 0.000347 0.001485 0.007729 0.003348 0.000448 0.000348 0.000084 0.003805 0.001635 0.003452 0.000684 0.001222 0.005110 0.002001 0.003917 0.000001 0.000536 0.006571 0.008755 0.000021 0.000006 0.000874 0.000042 0.000605 0.001666 0.000744 0.000380 0.000046 0.000043 0.000078 0.000066</array>
                     <matrix cols="3" dataType="xsd:double" dictRef="cc:displacement" rows="45">0.014077 0.014071 -0.009212 -0.002351 -0.009980 0.008712 0.012811 0.021548 -0.016793 -0.007944 -0.004036 -0.017703 0.001874 0.050358 -0.025228 0.079088 -0.016402 -0.016112 0.001807 -0.011214 0.006068 -0.019192 -0.006626 0.011399 -0.025971 0.053951 -0.013427 -0.026033 -0.035659 0.045023 0.000261 0.000983 -0.001890 -0.087467 0.013239 0.014791 0.000213 0.001371 0.010135 -0.023947 -0.063615 0.039077 -0.014526 0.005057 0.010522 0.029437 -0.012912 -0.021244 0.078448 -0.009915 -0.038432 -0.004390 -0.049608 0.029457 -0.001046 -0.020109 0.006517 -0.016367 0.001017 -0.008910 -0.006278 0.006547 -0.001336 -0.027066 0.036891 -0.041372 0.016656 0.028414 -0.023452 -0.055581 0.011787 -0.014977 -0.024200 0.005249 -0.008419 0.032306 0.012491 -0.004738 0.067715 -0.020111 -0.010961 -0.024431 0.022647 0.029860 0.062114 -0.007432 0.001882 -0.000694 0.000763 0.000638 -0.020530 -0.005670 -0.009055 0.076987 0.002545 0.025257 -0.036415 -0.042684 -0.074882 0.000682 -0.001886 -0.004155 -0.000124 0.000549 0.002396 0.028039 0.001441 0.009274 0.006026 -0.001371 0.001978 0.002585 -0.013614 -0.020310 -0.039235 0.002102 -0.011066 -0.023711 0.008652 -0.010334 0.014146 0.012212 -0.005545 0.001023 0.003248 0.005858 -0.001532 0.004083 0.004895 0.006472 -0.003917 -0.004506 -0.004490 -0.003207 -0.006000</matrix>
                  </module>
               </property>
            </propertyList>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="F" id="a1" x3="4.19395" y3="-1.115697" z3="-0.319832"/>
                  <atom elementType="N" id="a2" x3="2.920196" y3="-0.844757" z3="-0.739446"/>
                  <atom elementType="F" id="a3" x3="3.081234" y3="0.122874" z3="-1.731417"/>
                  <atom elementType="Si" id="a4" x3="2.1106" y3="0.082516" z3="0.588117"/>
                  <atom elementType="N" id="a5" x3="0.459566" y3="-0.020784" z3="0.22183"/>
                  <atom elementType="C" id="a6" x3="-0.091124" y3="-0.67763" z3="-0.897096"/>
                  <atom elementType="C" id="a7" x3="-1.37225" y3="-0.583644" z3="-1.228911"/>
                  <atom elementType="C" id="a8" x3="-2.366335" y3="0.238033" z3="-0.470758"/>
                  <atom elementType="C" id="a9" x3="-1.74321" y3="0.774849" z3="0.779224"/>
                  <atom elementType="C" id="a10" x3="-0.453413" y3="0.65257" z3="1.06391"/>
                  <atom elementType="O" id="a11" x3="2.769123" y3="0.751414" z3="1.773198"/>
                  <atom elementType="H" id="a12" x3="0.591914" y3="-1.289887" z3="-1.466872"/>
                  <atom elementType="H" id="a13" x3="-1.708735" y3="-1.136885" z3="-2.095326"/>
                  <atom elementType="H" id="a14" x3="-2.742501" y3="1.058699" z3="-1.094067"/>
                  <atom elementType="H" id="a15" x3="-3.250213" y3="-0.362434" z3="-0.229728"/>
                  <atom elementType="H" id="a16" x3="-2.370653" y3="1.293197" z3="1.491638"/>
                  <atom elementType="H" id="a17" x3="-0.028249" y3="1.057568" z3="1.971936"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a4 a11" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a13" order="S"/>
                  <bond atomRefs2="a8 a15" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a14" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a16" order="S"/>
                  <bond atomRefs2="a10 a17" order="S"/>
               </bondArray>
               <formula concise="C5H6F2N2OSi">
                  <atomArray count="5 6 2 2 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">170.14860639999998</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C5H6F2N2OSi/c6-9(7)11(10)8-4-2-1-3-5-8/h2-5H,1H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:8,7,9,6,10,1,3,5,2,11,4/E:(2,3)(4,5)(6,7)/CRV:2.3,3.3,4.3,5.3,10.1,11.3/rA:17nFNFSi3NC3C3CC3C3O1HHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s8;s5s9;s4;s6;s7;s8;s8;s9;s10;/rC:4.194,-1.1157,-.3198;2.9202,-.8448,-.7394;3.0812,.1229,-1.7314;2.1106,.0825,.5881;.4596,-.0208,.2218;-.0911,-.6776,-.8971;-1.3722,-.5836,-1.2289;-2.3663,.238,-.4708;-1.7432,.7748,.7792;-.4534,.6526,1.0639;2.7691,.7514,1.7732;.5919,-1.2899,-1.4669;-1.7087,-1.1369,-2.0953;-2.7425,1.0587,-1.0941;-3.2502,-.3624,-.2297;-2.3707,1.2932,1.4916;-.0282,1.0576,1.9719;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-866.37266705</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">711.16468328</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1577.53735033</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-2606.44225448</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1028.90490415</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1728.33597109</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">861.96330404</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00511549</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">45.000238021758</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">45.000238021758</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">90.000476043516</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-50.343409348112</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-4.124449849440</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-54.467859197552</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="180">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="180">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="180" units="nonsi:electronvolt">-1818.4596 -684.5165 -684.4727 -529.7318 -403.3321 -400.2681 -285.7799 -285.7328 -284.7802 -284.7079 -284.6832 -152.3008 -105.9312 -105.7856 -105.7196 -38.9836 -36.6712 -29.5185 -28.1697 -25.0564 -24.7078 -23.9123 -20.8626 -19.6395 -18.4723 -17.8682 -17.2088 -16.6213 -15.7469 -15.1994 -14.5183 -14.2888 -14.0947 -14.0363 -13.6960 -13.2739 -12.7695 -12.1728 -11.6485 -11.2582 -10.2363 -10.1399 -9.3821 -9.2113 -7.2390 -0.7695 -0.1512 0.3301 1.6383 1.9653 2.9148 3.7606 4.1298 4.5437 4.8145 5.5103 5.8317 6.0202 6.0776 6.3081 7.2621 7.5338 8.3936 9.0143 10.7476 11.1374 11.9943 12.6845 12.8695 13.6166 13.7918 14.4415 14.6011 15.2979 15.4348 15.6363 16.1542 16.4791 17.2498 17.5817 17.8652 18.6931 19.0665 19.8374 20.0624 21.2352 21.6270 22.7139 24.6901 25.0600 25.2840 25.4480 25.8534 26.1170 26.4206 26.5042 27.1032 27.7182 28.0286 28.1242 29.0133 30.0577 30.6765 30.8246 31.2016 31.6774 32.1342 32.4231 32.7715 33.0281 33.2933 33.5532 33.7387 33.9065 34.3365 35.0895 35.1400 36.2880 37.3397 38.4492 39.1540 39.6258 40.6320 41.1109 41.7904 42.1248 43.8319 44.3649 45.4622 45.9210 48.5859 49.0049 50.9286 51.7143 51.9309 52.3021 52.7890 53.4185 53.8923 54.8743 56.0651 57.7025 58.0958 58.2642 58.6802 58.8586 59.3398 59.7744 60.3023 60.7969 61.7658 61.9160 62.7170 65.1038 65.5627 66.0714 66.3361 67.0152 71.2183 71.9541 72.6588 73.0056 73.5111 75.5748 75.7926 77.9113 82.7094 83.6213 87.8023 90.2984 364.6553 368.3881 378.4078 385.8761 387.0462 518.7182 525.6447 695.2318 890.5764 898.5926</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">F N F Si N C C C C C O H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="17">-0.266675 0.238094 -0.287635 1.038826 -0.654096 0.015254 -0.299698 -0.441466 -0.302512 0.026891 -0.571823 0.273350 0.234824 0.242323 0.237057 0.235802 0.281485</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="17">F N F Si N C C C C C O H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="17">-0.158175 0.176247 -0.184837 0.585011 -0.178870 -0.077895 -0.165477 -0.231513 -0.165069 -0.070363 -0.404050 0.150142 0.144735 0.139010 0.137721 0.145331 0.158053</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">F N F Si N C C C C C O H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="17">9.2667 6.7619 9.2876 12.9612 7.6541 5.9847 6.2997 6.4415 6.3025 5.9731 8.5718 0.7267 0.7652 0.7577 0.7629 0.7642 0.7185</array>
                     <array dataType="xsd:double" dictRef="o:za" size="17">9.0000 7.0000 9.0000 14.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 8.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="17">-0.2667 0.2381 -0.2876 1.0388 -0.6541 0.0153 -0.2997 -0.4415 -0.3025 0.0269 -0.5718 0.2733 0.2348 0.2423 0.2371 0.2358 0.2815</array>
                     <array dataType="xsd:double" dictRef="o:va" size="17">1.0717 2.7251 1.0544 4.2274 3.1685 3.6787 3.8111 3.7038 3.8120 3.6622 2.1725 0.8920 0.9169 0.8862 0.8908 0.9165 0.8870</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="17">1.0717 2.7251 1.0544 4.2274 3.1685 3.6787 3.8111 3.7038 3.8120 3.6622 2.1725 0.8920 0.9169 0.8862 0.8908 0.9165 0.8870</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="17">-0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="17">0.9428 0.9016 0.8129 1.1053 2.0681 0.9585 0.9443 1.8425 0.8865 0.9905 0.9166 0.9898 0.8945 0.9013 1.8470 0.9160 0.8858</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="17">0 1 1 2 1 3 3 4 3 10 4 5 4 9 5 6 5 11 6 7 6 12 7 8 7 13 7 14 8 9 8 15 9 16</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009900800</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-866.351140658568</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-20.12502 18.49954 -1.62548 1.74076 -2.07967 -0.33891 0.80713 -1.46255 -0.65542</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.78511</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.53740</scalar>
               </module>
               <module cmlx:templateRef="thermochemistry" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:totalmass">176.20</scalar>
               </module>
               <module cmlx:templateRef="innerenergy" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="contributions">
                     <scalar dataType="xsd:double" dictRef="o:electronic" units="nonsi:hartree">-866.35114066</scalar>
                     <scalar dataType="xsd:double" dictRef="o:zeropoint" units="nonsi:hartree">0.11868314</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalvibcorrection" units="nonsi:hartree">0.00789970</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalrotcorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltrasncorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltotal" units="nonsi:hartree">-866.22172528</scalar>
                  </module>
                  <module cmlx:templateRef="corrections">
                     <scalar dataType="xsd:double" dictRef="o:thermalcorr" units="nonsi:hartree">0.01073224</scalar>
                     <scalar dataType="xsd:double" dictRef="o:nonthermalcorr" units="nonsi:hartree">0.11868314</scalar>
                     <scalar dataType="xsd:double" dictRef="o:totalcorr" units="nonsi:hartree">0.12941538</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="enthalpy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalfree" units="nonsi:hartree">-866.22172528</scalar>
                  <scalar dataType="xsd:double" dictRef="o:thermalcorrenthalpy" units="nonsi:hartree">0.00094421</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-866.22078107</scalar>
               </module>
               <module cmlx:templateRef="entropy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:elect" units="nonsi:hartree">0.00000000</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:vibrat" units="nonsi:hartree">0.01396539</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rotat" units="nonsi:hartree">0.01457659</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:transl" units="nonsi:hartree">0.01967347</scalar>
                  <scalar dataType="xsd:double" dictRef="o:total" units="nonsi:hartree">0.04821545</scalar>
               </module>
               <module cmlx:templateRef="gibbs" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-866.22078107</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalentropycorr" units="nonsi:hartree">-0.04821545</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsenthalpy" units="nonsi:hartree">-866.26899652</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsminuselec" units="nonsi:hartree">0.08214414</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
