<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 10s7p1d 8s4p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s3p1d 4s2p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="27">1 2 3 4 4 4 4 4 1 3 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.073771" y3="-2.431831" z3="-1.544246"/>
                  <atom elementType="Si" id="a2" x3="0.033076" y3="-1.64403" z3="-0.149233"/>
                  <atom elementType="N" id="a3" x3="1.408793" y3="-0.667424" z3="0.151056"/>
                  <atom elementType="C" id="a4" x3="1.634743" y3="0.47996" z3="-0.62456"/>
                  <atom elementType="C" id="a5" x3="2.722772" y3="1.23502" z3="-0.521949"/>
                  <atom elementType="C" id="a6" x3="3.842288" y3="0.942078" z3="0.430433"/>
                  <atom elementType="C" id="a7" x3="3.514641" y3="-0.272854" z3="1.244748"/>
                  <atom elementType="C" id="a8" x3="2.404943" y3="-0.986395" z3="1.086736"/>
                  <atom elementType="F" id="a9" x3="0.024433" y3="-2.770483" z3="0.990709"/>
                  <atom elementType="N" id="a10" x3="-1.379053" y3="-0.672852" z3="-0.206823"/>
                  <atom elementType="C" id="a11" x3="-1.523776" y3="0.455152" z3="0.615171"/>
                  <atom elementType="C" id="a12" x3="-2.632112" y3="1.185936" z3="0.673084"/>
                  <atom elementType="C" id="a13" x3="-3.863816" y3="0.885105" z3="-0.126398"/>
                  <atom elementType="C" id="a14" x3="-3.64448" y3="-0.344308" z3="-0.95448"/>
                  <atom elementType="C" id="a15" x3="-2.503948" y3="-1.025689" z3="-0.968845"/>
                  <atom elementType="H" id="a16" x3="0.848517" y3="0.731327" z3="-1.325023"/>
                  <atom elementType="H" id="a17" x3="2.797318" y3="2.104473" z3="-1.161182"/>
                  <atom elementType="H" id="a18" x3="4.783122" y3="0.797183" z3="-0.114449"/>
                  <atom elementType="H" id="a19" x3="4.024222" y3="1.804302" z3="1.083131"/>
                  <atom elementType="H" id="a20" x3="4.216035" y3="-0.592182" z3="2.003948"/>
                  <atom elementType="H" id="a21" x3="2.214262" y3="-1.856638" z3="1.697797"/>
                  <atom elementType="H" id="a22" x3="-0.658239" y3="0.712806" z3="1.211065"/>
                  <atom elementType="H" id="a23" x3="-2.638314" y3="2.043459" z3="1.332643"/>
                  <atom elementType="H" id="a24" x3="-4.728897" y3="0.754348" z3="0.534796"/>
                  <atom elementType="H" id="a25" x3="-4.124026" y3="1.73707" z3="-0.766474"/>
                  <atom elementType="H" id="a26" x3="-4.452284" y3="-0.699448" z3="-1.580267"/>
                  <atom elementType="H" id="a27" x3="-2.393989" y3="-1.904086" z3="-1.588787"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a9" order="S"/>
                  <bond atomRefs2="a2 a10" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a16" order="S"/>
                  <bond atomRefs2="a5 a17" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a20" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a21" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a11 a22" order="S"/>
                  <bond atomRefs2="a12 a23" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a13 a25" order="S"/>
                  <bond atomRefs2="a13 a24" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a26" order="S"/>
                  <bond atomRefs2="a15 a27" order="S"/>
               </bondArray>
               <formula concise="C10H12F2N2Si">
                  <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">214.20270639999995</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0738,-2.4318,-1.5442;.0331,-1.644,-.1492;1.4088,-.6674,.1511;1.6347,.48,-.6246;2.7228,1.235,-.5219;3.8423,.9421,.4304;3.5146,-.2729,1.2447;2.4049,-.9864,1.0867;.0244,-2.7705,.9907;-1.3791,-.6729,-.2068;-1.5238,.4552,.6152;-2.6321,1.1859,.6731;-3.8638,.8851,-.1264;-3.6445,-.3443,-.9545;-2.5039,-1.0257,-.9688;.8485,.7313,-1.325;2.7973,2.1045,-1.1612;4.7831,.7972,-.1144;4.0242,1.8043,1.0831;4.216,-.5922,2.0039;2.2143,-1.8566,1.6978;-.6582,.7128,1.2111;-2.6383,2.0435,1.3326;-4.7289,.7543,.5348;-4.124,1.7371,-.7665;-4.4523,-.6994,-1.5803;-2.394,-1.9041,-1.5888;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">869</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">869</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C10F2H12N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">118</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">252</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1133.8784645813 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.828e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.009 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.006 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.016 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">869</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">869</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C10F2H12N2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">118</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">252</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1133.8710073428 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.827e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.009 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.006 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.015 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="0.07377129" y3="-2.43183103" z3="-1.5442461">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="0.03307551" y3="-1.64403034" z3="-0.14923271">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="N" id="a3" x3="1.40879265" y3="-0.66742433" z3="0.15105615">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="1.63474314" y3="0.4799597" z3="-0.62455964">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="2.72277164" y3="1.23502014" z3="-0.52194918">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="3.84228816" y3="0.94207799" z3="0.43043297">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="3.51464067" y3="-0.27285403" z3="1.24474766">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="2.4049434" y3="-0.98639469" z3="1.08673573">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="F" id="a9" x3="0.02443324" y3="-2.77048271" z3="0.99070868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N" id="a10" x3="-1.37905322" y3="-0.67285211" z3="-0.20682312">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="-1.52377563" y3="0.45515233" z3="0.61517092">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a12" x3="-2.63211222" y3="1.18593605" z3="0.67308377">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a13" x3="-3.86381613" y3="0.88510484" z3="-0.12639819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a14" x3="-3.6444797" y3="-0.34430775" z3="-0.95447955">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a15" x3="-2.50394819" y3="-1.02568881" z3="-0.96884518">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="0.84851702" y3="0.73132694" z3="-1.32502345">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="2.79731751" y3="2.10447314" z3="-1.16118226">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="4.78312182" y3="0.79718339" z3="-0.11444887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a19" x3="4.02422241" y3="1.80430212" z3="1.08313052">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a20" x3="4.21603452" y3="-0.59218241" z3="2.00394773">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a21" x3="2.21426204" y3="-1.85663824" z3="1.69779674">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a22" x3="-0.65823936" y3="0.71280608" z3="1.21106526">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a23" x3="-2.63831378" y3="2.04345881" z3="1.33264336">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a24" x3="-4.72889744" y3="0.75434826" z3="0.53479647">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a25" x3="-4.12402582" y3="1.73707039" z3="-0.76647424">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a26" x3="-4.4522844" y3="-0.69944782" z3="-1.58026668">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a27" x3="-2.3939891" y3="-1.90408591" z3="-1.58878682">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a9" order="S"/>
                           <bond atomRefs2="a2 a10" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a3 a8" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a16" order="S"/>
                           <bond atomRefs2="a5 a17" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a18" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a20" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a8 a21" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a10 a15" order="S"/>
                           <bond atomRefs2="a11 a12" order="S"/>
                           <bond atomRefs2="a11 a22" order="S"/>
                           <bond atomRefs2="a12 a23" order="S"/>
                           <bond atomRefs2="a12 a13" order="S"/>
                           <bond atomRefs2="a13 a25" order="S"/>
                           <bond atomRefs2="a13 a24" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a14 a15" order="S"/>
                           <bond atomRefs2="a14 a26" order="S"/>
                           <bond atomRefs2="a15 a27" order="S"/>
                        </bondArray>
                        <formula concise="C10H12F2N2Si">
                           <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">214.20270639999995</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0738,-2.4318,-1.5442;.0331,-1.644,-.1492;1.4088,-.6674,.1511;1.6347,.48,-.6246;2.7228,1.235,-.5219;3.8423,.9421,.4304;3.5146,-.2729,1.2447;2.4049,-.9864,1.0867;.0244,-2.7705,.9907;-1.3791,-.6729,-.2068;-1.5238,.4552,.6152;-2.6321,1.1859,.6731;-3.8638,.8851,-.1264;-3.6445,-.3443,-.9545;-2.5039,-1.0257,-.9688;.8485,.7313,-1.325;2.7973,2.1045,-1.1612;4.7831,.7972,-.1144;4.0242,1.8043,1.0831;4.216,-.5922,2.0039;2.2143,-1.8566,1.6978;-.6582,.7128,1.2111;-2.6383,2.0435,1.3326;-4.7289,.7543,.5348;-4.124,1.7371,-.7665;-4.4523,-.6994,-1.5803;-2.394,-1.9041,-1.5888;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.074423" y3="-2.431059" z3="-1.544566"/>
                        <atom elementType="Si" id="a2" x3="0.032946" y3="-1.643015" z3="-0.149725"/>
                        <atom elementType="N" id="a3" x3="1.40933" y3="-0.667137" z3="0.151334"/>
                        <atom elementType="C" id="a4" x3="1.637151" y3="0.478621" z3="-0.625949"/>
                        <atom elementType="C" id="a5" x3="2.725624" y3="1.233009" z3="-0.523923"/>
                        <atom elementType="C" id="a6" x3="3.84413" y3="0.941045" z3="0.42976"/>
                        <atom elementType="C" id="a7" x3="3.514279" y3="-0.271684" z3="1.246304"/>
                        <atom elementType="C" id="a8" x3="2.404139" y3="-0.984496" z3="1.088603"/>
                        <atom elementType="F" id="a9" x3="0.020795" y3="-2.769341" z3="0.990195"/>
                        <atom elementType="N" id="a10" x3="-1.378521" y3="-0.670622" z3="-0.208731"/>
                        <atom elementType="C" id="a11" x3="-1.524669" y3="0.456107" z3="0.614678"/>
                        <atom elementType="C" id="a12" x3="-2.634116" y3="1.184962" z3="0.674543"/>
                        <atom elementType="C" id="a13" x3="-3.866207" y3="0.882937" z3="-0.123705"/>
                        <atom elementType="C" id="a14" x3="-3.644649" y3="-0.343722" z3="-0.954959"/>
                        <atom elementType="C" id="a15" x3="-2.502988" y3="-1.023022" z3="-0.971111"/>
                        <atom elementType="H" id="a16" x3="0.851846" y3="0.729279" z3="-1.327571"/>
                        <atom elementType="H" id="a17" x3="2.801273" y3="2.101038" z3="-1.16483"/>
                        <atom elementType="H" id="a18" x3="4.785338" y3="0.794014" z3="-0.1141"/>
                        <atom elementType="H" id="a19" x3="4.026459" y3="1.804509" z3="1.080852"/>
                        <atom elementType="H" id="a20" x3="4.214475" y3="-0.59005" z3="2.006909"/>
                        <atom elementType="H" id="a21" x3="2.2121" y3="-1.853231" z3="1.701327"/>
                        <atom elementType="H" id="a22" x3="-0.659161" y3="0.714409" z3="1.210124"/>
                        <atom elementType="H" id="a23" x3="-2.640966" y3="2.041688" z3="1.334987"/>
                        <atom elementType="H" id="a24" x3="-4.730078" y3="0.748291" z3="0.538474"/>
                        <atom elementType="H" id="a25" x3="-4.129587" y3="1.735782" z3="-0.761461"/>
                        <atom elementType="H" id="a26" x3="-4.451752" y3="-0.698642" z3="-1.581666"/>
                        <atom elementType="H" id="a27" x3="-2.391612" y3="-1.899669" z3="-1.593195"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a10" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a16" order="S"/>
                        <bond atomRefs2="a5 a17" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a18" order="S"/>
                        <bond atomRefs2="a6 a19" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a20" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a21" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a22" order="S"/>
                        <bond atomRefs2="a12 a23" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a25" order="S"/>
                        <bond atomRefs2="a13 a24" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a26" order="S"/>
                        <bond atomRefs2="a15 a27" order="S"/>
                     </bondArray>
                     <formula concise="C10H12F2N2Si">
                        <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">214.20270639999995</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0744,-2.4311,-1.5446;.0329,-1.643,-.1497;1.4093,-.6671,.1513;1.6372,.4786,-.6259;2.7256,1.233,-.5239;3.8441,.941,.4298;3.5143,-.2717,1.2463;2.4041,-.9845,1.0886;.0208,-2.7693,.9902;-1.3785,-.6706,-.2087;-1.5247,.4561,.6147;-2.6341,1.185,.6745;-3.8662,.8829,-.1237;-3.6446,-.3437,-.955;-2.503,-1.023,-.9711;.8518,.7293,-1.3276;2.8013,2.101,-1.1648;4.7853,.794,-.1141;4.0265,1.8045,1.0809;4.2145,-.59,2.0069;2.2121,-1.8532,1.7013;-.6592,.7144,1.2101;-2.641,2.0417,1.335;-4.7301,.7483,.5385;-4.1296,1.7358,-.7615;-4.4518,-.6986,-1.5817;-2.3916,-1.8997,-1.5932;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.077122" y3="-2.431299" z3="-1.543579"/>
                        <atom elementType="Si" id="a2" x3="0.032187" y3="-1.640935" z3="-0.150238"/>
                        <atom elementType="N" id="a3" x3="1.410887" y3="-0.667817" z3="0.153179"/>
                        <atom elementType="C" id="a4" x3="1.641652" y3="0.475699" z3="-0.626428"/>
                        <atom elementType="C" id="a5" x3="2.730891" y3="1.22899" z3="-0.525743"/>
                        <atom elementType="C" id="a6" x3="3.848473" y3="0.938155" z3="0.429087"/>
                        <atom elementType="C" id="a7" x3="3.514827" y3="-0.270829" z3="1.249485"/>
                        <atom elementType="C" id="a8" x3="2.403717" y3="-0.982193" z3="1.092693"/>
                        <atom elementType="F" id="a9" x3="0.00606" y3="-2.765068" z3="0.991184"/>
                        <atom elementType="N" id="a10" x3="-1.376009" y3="-0.663366" z3="-0.216378"/>
                        <atom elementType="C" id="a11" x3="-1.524524" y3="0.462201" z3="0.608006"/>
                        <atom elementType="C" id="a12" x3="-2.637498" y3="1.18491" z3="0.674408"/>
                        <atom elementType="C" id="a13" x3="-3.872899" y3="0.875916" z3="-0.115763"/>
                        <atom elementType="C" id="a14" x3="-3.645691" y3="-0.343675" z3="-0.955376"/>
                        <atom elementType="C" id="a15" x3="-2.500391" y3="-1.01636" z3="-0.977703"/>
                        <atom elementType="H" id="a16" x3="0.857151" y3="0.726083" z3="-1.328957"/>
                        <atom elementType="H" id="a17" x3="2.807464" y3="2.0952" z3="-1.168871"/>
                        <atom elementType="H" id="a18" x3="4.789838" y3="0.787374" z3="-0.113752"/>
                        <atom elementType="H" id="a19" x3="4.032371" y3="1.803499" z3="1.077454"/>
                        <atom elementType="H" id="a20" x3="4.213054" y3="-0.587614" z3="2.012436"/>
                        <atom elementType="H" id="a21" x3="2.209453" y3="-1.84827" z3="1.708583"/>
                        <atom elementType="H" id="a22" x3="-0.657048" y3="0.725407" z3="1.198294"/>
                        <atom elementType="H" id="a23" x3="-2.644628" y3="2.041836" z3="1.334429"/>
                        <atom elementType="H" id="a24" x3="-4.730593" y3="0.729577" z3="0.552262"/>
                        <atom elementType="H" id="a25" x3="-4.149149" y3="1.729752" z3="-0.746876"/>
                        <atom elementType="H" id="a26" x3="-4.451433" y3="-0.698862" z3="-1.583553"/>
                        <atom elementType="H" id="a27" x3="-2.385282" y3="-1.888312" z3="-1.605684"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a10" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a16" order="S"/>
                        <bond atomRefs2="a5 a17" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a18" order="S"/>
                        <bond atomRefs2="a6 a19" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a20" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a21" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a22" order="S"/>
                        <bond atomRefs2="a12 a23" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a25" order="S"/>
                        <bond atomRefs2="a13 a24" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a26" order="S"/>
                        <bond atomRefs2="a15 a27" order="S"/>
                     </bondArray>
                     <formula concise="C10H12F2N2Si">
                        <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">214.20270639999995</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0771,-2.4313,-1.5436;.0322,-1.6409,-.1502;1.4109,-.6678,.1532;1.6417,.4757,-.6264;2.7309,1.229,-.5257;3.8485,.9382,.4291;3.5148,-.2708,1.2495;2.4037,-.9822,1.0927;.0061,-2.7651,.9912;-1.376,-.6634,-.2164;-1.5245,.4622,.608;-2.6375,1.1849,.6744;-3.8729,.8759,-.1158;-3.6457,-.3437,-.9554;-2.5004,-1.0164,-.9777;.8572,.7261,-1.329;2.8075,2.0952,-1.1689;4.7898,.7874,-.1138;4.0324,1.8035,1.0775;4.2131,-.5876,2.0124;2.2095,-1.8483,1.7086;-.657,.7254,1.1983;-2.6446,2.0418,1.3344;-4.7306,.7296,.5523;-4.1491,1.7298,-.7469;-4.4514,-.6989,-1.5836;-2.3853,-1.8883,-1.6057;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.077668" y3="-2.433739" z3="-1.541284"/>
                        <atom elementType="Si" id="a2" x3="0.031583" y3="-1.641013" z3="-0.149377"/>
                        <atom elementType="N" id="a3" x3="1.411276" y3="-0.669021" z3="0.153777"/>
                        <atom elementType="C" id="a4" x3="1.642683" y3="0.473318" z3="-0.62772"/>
                        <atom elementType="C" id="a5" x3="2.731832" y3="1.226871" z3="-0.52749"/>
                        <atom elementType="C" id="a6" x3="3.848903" y3="0.937519" z3="0.428451"/>
                        <atom elementType="C" id="a7" x3="3.514492" y3="-0.26997" z3="1.250904"/>
                        <atom elementType="C" id="a8" x3="2.403422" y3="-0.981637" z3="1.094582"/>
                        <atom elementType="F" id="a9" x3="-0.00096" y3="-2.763107" z3="0.993725"/>
                        <atom elementType="N" id="a10" x3="-1.374453" y3="-0.660475" z3="-0.219297"/>
                        <atom elementType="C" id="a11" x3="-1.523668" y3="0.464177" z3="0.606249"/>
                        <atom elementType="C" id="a12" x3="-2.638025" y3="1.184503" z3="0.675485"/>
                        <atom elementType="C" id="a13" x3="-3.874745" y3="0.872961" z3="-0.111718"/>
                        <atom elementType="C" id="a14" x3="-3.644938" y3="-0.342474" z3="-0.956831"/>
                        <atom elementType="C" id="a15" x3="-2.498268" y3="-1.012791" z3="-0.981861"/>
                        <atom elementType="H" id="a16" x3="0.85857" y3="0.722901" z3="-1.331007"/>
                        <atom elementType="H" id="a17" x3="2.808454" y3="2.092286" z3="-1.171772"/>
                        <atom elementType="H" id="a18" x3="4.790518" y3="0.785668" z3="-0.113573"/>
                        <atom elementType="H" id="a19" x3="4.032664" y3="1.803979" z3="1.075313"/>
                        <atom elementType="H" id="a20" x3="4.211939" y3="-0.585146" z3="2.015276"/>
                        <atom elementType="H" id="a21" x3="2.208492" y3="-1.846345" z3="1.712307"/>
                        <atom elementType="H" id="a22" x3="-0.655195" y3="0.729323" z3="1.194305"/>
                        <atom elementType="H" id="a23" x3="-2.645126" y3="2.041536" z3="1.33545"/>
                        <atom elementType="H" id="a24" x3="-4.729537" y3="0.72042" z3="0.558616"/>
                        <atom elementType="H" id="a25" x3="-4.156884" y3="1.727924" z3="-0.738549"/>
                        <atom elementType="H" id="a26" x3="-4.449594" y3="-0.696233" z3="-1.58724"/>
                        <atom elementType="H" id="a27" x3="-2.381103" y3="-1.881437" z3="-1.614121"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a10" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a16" order="S"/>
                        <bond atomRefs2="a5 a17" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a18" order="S"/>
                        <bond atomRefs2="a6 a19" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a20" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a21" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a22" order="S"/>
                        <bond atomRefs2="a12 a23" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a25" order="S"/>
                        <bond atomRefs2="a13 a24" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a26" order="S"/>
                        <bond atomRefs2="a15 a27" order="S"/>
                     </bondArray>
                     <formula concise="C10H12F2N2Si">
                        <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">214.20270639999995</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0777,-2.4337,-1.5413;.0316,-1.641,-.1494;1.4113,-.669,.1538;1.6427,.4733,-.6277;2.7318,1.2269,-.5275;3.8489,.9375,.4285;3.5145,-.27,1.2509;2.4034,-.9816,1.0946;-.001,-2.7631,.9937;-1.3745,-.6605,-.2193;-1.5237,.4642,.6062;-2.638,1.1845,.6755;-3.8747,.873,-.1117;-3.6449,-.3425,-.9568;-2.4983,-1.0128,-.9819;.8586,.7229,-1.331;2.8085,2.0923,-1.1718;4.7905,.7857,-.1136;4.0327,1.804,1.0753;4.2119,-.5851,2.0153;2.2085,-1.8463,1.7123;-.6552,.7293,1.1943;-2.6451,2.0415,1.3355;-4.7295,.7204,.5586;-4.1569,1.7279,-.7385;-4.4496,-.6962,-1.5872;-2.3811,-1.8814,-1.6141;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.077565" y3="-2.439018" z3="-1.539373"/>
                        <atom elementType="Si" id="a2" x3="0.03102" y3="-1.643574" z3="-0.149079"/>
                        <atom elementType="N" id="a3" x3="1.411265" y3="-0.672264" z3="0.152982"/>
                        <atom elementType="C" id="a4" x3="1.641436" y3="0.470129" z3="-0.629308"/>
                        <atom elementType="C" id="a5" x3="2.72916" y3="1.225734" z3="-0.528008"/>
                        <atom elementType="C" id="a6" x3="3.845558" y3="0.938846" z3="0.429606"/>
                        <atom elementType="C" id="a7" x3="3.512483" y3="-0.268885" z3="1.252498"/>
                        <atom elementType="C" id="a8" x3="2.402861" y3="-0.982851" z3="1.095289"/>
                        <atom elementType="F" id="a9" x3="-0.006662" y3="-2.763609" z3="0.995806"/>
                        <atom elementType="N" id="a10" x3="-1.372333" y3="-0.659593" z3="-0.222131"/>
                        <atom elementType="C" id="a11" x3="-1.519493" y3="0.465723" z3="0.602945"/>
                        <atom elementType="C" id="a12" x3="-2.634116" y3="1.185456" z3="0.674837"/>
                        <atom elementType="C" id="a13" x3="-3.87343" y3="0.871477" z3="-0.107485"/>
                        <atom elementType="C" id="a14" x3="-3.643481" y3="-0.340971" z3="-0.957271"/>
                        <atom elementType="C" id="a15" x3="-2.496466" y3="-1.010786" z3="-0.985171"/>
                        <atom elementType="H" id="a16" x3="0.85769" y3="0.718248" z3="-1.333555"/>
                        <atom elementType="H" id="a17" x3="2.80484" y3="2.091245" z3="-1.172403"/>
                        <atom elementType="H" id="a18" x3="4.788028" y3="0.788434" z3="-0.111163"/>
                        <atom elementType="H" id="a19" x3="4.026996" y3="1.806024" z3="1.076046"/>
                        <atom elementType="H" id="a20" x3="4.209442" y3="-0.581903" z3="2.018274"/>
                        <atom elementType="H" id="a21" x3="2.208406" y3="-1.847179" z3="1.713787"/>
                        <atom elementType="H" id="a22" x3="-0.648792" y3="0.732919" z3="1.186925"/>
                        <atom elementType="H" id="a23" x3="-2.639227" y3="2.044084" z3="1.332871"/>
                        <atom elementType="H" id="a24" x3="-4.724433" y3="0.714233" z3="0.566493"/>
                        <atom elementType="H" id="a25" x3="-4.161538" y3="1.727139" z3="-0.730405"/>
                        <atom elementType="H" id="a26" x3="-4.44798" y3="-0.692394" z3="-1.589246"/>
                        <atom elementType="H" id="a27" x3="-2.378802" y3="-1.876664" z3="-1.621164"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a10" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a16" order="S"/>
                        <bond atomRefs2="a5 a17" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a18" order="S"/>
                        <bond atomRefs2="a6 a19" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a20" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a21" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a22" order="S"/>
                        <bond atomRefs2="a12 a23" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a25" order="S"/>
                        <bond atomRefs2="a13 a24" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a26" order="S"/>
                        <bond atomRefs2="a15 a27" order="S"/>
                     </bondArray>
                     <formula concise="C10H12F2N2Si">
                        <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">214.20270639999995</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0776,-2.439,-1.5394;.031,-1.6436,-.1491;1.4113,-.6723,.153;1.6414,.4701,-.6293;2.7292,1.2257,-.528;3.8456,.9388,.4296;3.5125,-.2689,1.2525;2.4029,-.9829,1.0953;-.0067,-2.7636,.9958;-1.3723,-.6596,-.2221;-1.5195,.4657,.6029;-2.6341,1.1855,.6748;-3.8734,.8715,-.1075;-3.6435,-.341,-.9573;-2.4965,-1.0108,-.9852;.8577,.7182,-1.3336;2.8048,2.0912,-1.1724;4.788,.7884,-.1112;4.027,1.806,1.076;4.2094,-.5819,2.0183;2.2084,-1.8472,1.7138;-.6488,.7329,1.1869;-2.6392,2.0441,1.3329;-4.7244,.7142,.5665;-4.1615,1.7271,-.7304;-4.448,-.6924,-1.5892;-2.3788,-1.8767,-1.6212;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-985.275202751887</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-985.275207021873</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-985.275218632347</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-985.275227120412</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-985.275235052450</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="27">-0.225511 0.668885 -0.195455 -0.073537 -0.181605 -0.230325 -0.186197 -0.070257 -0.225222 -0.194084 -0.073017 -0.184462 -0.230352 -0.184424 -0.069787 0.145217 0.139137 0.130607 0.129561 0.138644 0.145541 0.145861 0.138555 0.130023 0.129418 0.138464 0.144323</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="27">9.4388 12.6101 7.6596 5.9737 6.3133 6.4335 6.3155 5.9752 9.4404 7.6564 5.9759 6.3162 6.4332 6.3137 5.9707 0.7423 0.7773 0.7707 0.7740 0.7779 0.7429 0.7396 0.7783 0.7726 0.7735 0.7784 0.7465</array>
                     <array dataType="xsd:double" dictRef="o:za" size="27">9.0000 14.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="27">-0.4388 1.3899 -0.6596 0.0263 -0.3133 -0.4335 -0.3155 0.0248 -0.4404 -0.6564 0.0241 -0.3162 -0.4332 -0.3137 0.0293 0.2577 0.2227 0.2293 0.2260 0.2221 0.2571 0.2604 0.2217 0.2274 0.2265 0.2216 0.2535</array>
                     <array dataType="xsd:double" dictRef="o:va" size="27">1.0007 4.0212 3.1222 3.7151 3.8249 3.7167 3.8115 3.7186 0.9996 3.1242 3.7172 3.8227 3.7172 3.8163 3.7180 0.8940 0.9211 0.8910 0.8926 0.9213 0.8975 0.8924 0.9215 0.8922 0.8918 0.9213 0.8982</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="27">1.0007 4.0212 3.1222 3.7151 3.8249 3.7167 3.8115 3.7186 0.9996 3.1242 3.7172 3.8227 3.7172 3.8163 3.7180 0.8940 0.9211 0.8910 0.8926 0.9213 0.8975 0.8924 0.9215 0.8922 0.8918 0.9213 0.8982</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="27">0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="28">0.9436 0.9938 0.9403 0.9982 0.9724 0.9822 1.8493 0.8944 0.9907 0.9201 0.9895 0.9019 0.9041 1.8385 0.9207 0.8991 0.9779 0.9790 1.8469 0.8942 0.9904 0.9205 0.9899 0.9035 0.9030 1.8425 0.9205 0.9001</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="28">0 1 1 2 1 8 1 9 2 3 2 7 3 4 3 15 4 5 4 16 5 6 5 17 5 18 6 7 6 19 7 20 9 10 9 14 10 11 10 21 11 12 11 22 12 13 12 23 12 24 13 14 13 25 14 26</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="27">-0.438775 1.389946 -0.659582 0.026336 -0.313260 -0.433516 -0.315523 0.024831 -0.440417 -0.656446 0.024141 -0.316244 -0.433159 -0.313736 0.029272 0.257736 0.222701 0.229294 0.225990 0.222077 0.257134 0.260430 0.221743 0.227416 0.226514 0.221574 0.253520</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="252">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="252">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="252" units="nonsi:electronvolt">-1819.5548 -683.1252 -683.1042 -399.3207 -399.2890 -285.2977 -285.2523 -285.2374 -285.2284 -284.3126 -284.2804 -284.1503 -284.1081 -284.0958 -284.0910 -152.9616 -106.5514 -106.5179 -106.4840 -36.2357 -35.7024 -28.9657 -28.6138 -24.3785 -24.2009 -23.4026 -23.3312 -20.5029 -20.1639 -19.1355 -19.0015 -18.0948 -16.6967 -16.4047 -15.6225 -15.2170 -15.0722 -14.6768 -14.5923 -14.3927 -14.3256 -13.9400 -13.6912 -13.6146 -13.4024 -13.3867 -13.3655 -13.2957 -12.7657 -12.0506 -11.8603 -11.4765 -11.2969 -10.7171 -10.6729 -8.7576 -8.6318 -6.5821 -6.5422 0.6221 0.9633 2.2648 2.2743 2.4266 3.5719 3.6901 4.0614 4.5916 4.6969 5.0233 5.0855 5.1573 5.2132 6.0782 6.2219 6.2966 6.3469 6.3533 6.4380 6.5974 7.0475 7.8439 7.8979 8.0789 8.6138 8.8772 9.5566 9.8379 11.0766 11.2690 11.5454 11.8779 13.1706 13.2339 13.5640 13.9109 14.5600 14.6205 15.0153 15.2969 15.4058 15.6048 15.8933 16.0720 16.2940 16.3237 16.5450 16.8242 17.2488 17.3958 17.6169 17.8804 18.0904 18.1954 18.8786 19.1416 19.5087 20.5712 20.6277 21.4991 21.5533 22.1733 22.4519 23.3192 23.5957 24.6127 25.1525 25.5884 25.8305 25.9902 26.2863 26.3860 26.5277 26.6939 26.9234 27.0440 27.2237 27.5508 27.7012 28.2576 28.3215 28.4202 28.6415 28.9510 30.1615 30.3930 31.1870 31.3966 32.2844 32.3849 32.5242 33.6056 33.8755 34.1269 34.5574 34.7745 34.9947 35.5007 35.6446 35.9364 36.3670 36.8009 37.1645 37.7552 38.1827 38.6175 39.0255 39.4926 39.9531 40.4249 40.9674 41.2507 41.5124 41.8383 41.9504 42.5736 42.6386 43.3796 44.4138 45.9271 46.3061 47.5017 48.7316 48.9598 49.3124 49.3739 49.5181 49.6716 50.4354 51.0877 52.4389 52.9274 53.2808 53.4272 55.4179 55.4549 56.0684 57.0471 58.5109 59.0244 59.1227 59.3111 59.4343 59.9894 60.4763 60.8909 61.1068 61.4690 61.6897 61.8003 63.2788 63.9208 66.0989 66.1828 67.0194 67.1566 67.2792 67.4054 71.6947 71.7695 72.1970 72.5274 73.2423 73.3568 74.1292 74.2727 74.3678 74.6465 76.0397 76.3056 76.9761 77.5403 80.7140 81.4046 83.7139 83.8790 90.8033 91.1416 365.4028 365.5352 368.9821 369.0097 378.9058 378.9879 386.1147 386.7085 387.2830 387.7537 526.5830 527.2050 892.2206 893.7529</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.076673" y3="-2.44137" z3="-1.539624"/>
                  <atom elementType="Si" id="a2" x3="0.031033" y3="-1.645371" z3="-0.149603"/>
                  <atom elementType="N" id="a3" x3="1.41109" y3="-0.673809" z3="0.151402"/>
                  <atom elementType="C" id="a4" x3="1.640518" y3="0.468757" z3="-0.63093"/>
                  <atom elementType="C" id="a5" x3="2.727164" y3="1.225773" z3="-0.528256"/>
                  <atom elementType="C" id="a6" x3="3.842665" y3="0.940444" z3="0.430921"/>
                  <atom elementType="C" id="a7" x3="3.510605" y3="-0.26798" z3="1.253241"/>
                  <atom elementType="C" id="a8" x3="2.402139" y3="-0.983524" z3="1.094759"/>
                  <atom elementType="F" id="a9" x3="-0.005236" y3="-2.765421" z3="0.995388"/>
                  <atom elementType="N" id="a10" x3="-1.371919" y3="-0.66097" z3="-0.221929"/>
                  <atom elementType="C" id="a11" x3="-1.517277" y3="0.465004" z3="0.602621"/>
                  <atom elementType="C" id="a12" x3="-2.631133" y3="1.185975" z3="0.674569"/>
                  <atom elementType="C" id="a13" x3="-3.871271" y3="0.872398" z3="-0.106653"/>
                  <atom elementType="C" id="a14" x3="-3.642709" y3="-0.340074" z3="-0.956892"/>
                  <atom elementType="C" id="a15" x3="-2.496442" y3="-1.011248" z3="-0.985022"/>
                  <atom elementType="H" id="a16" x3="0.85742" y3="0.715642" z3="-1.336343"/>
                  <atom elementType="H" id="a17" x3="2.802735" y3="2.091321" z3="-1.17265"/>
                  <atom elementType="H" id="a18" x3="4.786026" y3="0.791553" z3="-0.10865"/>
                  <atom elementType="H" id="a19" x3="4.021881" y3="1.807832" z3="1.077648"/>
                  <atom elementType="H" id="a20" x3="4.207349" y3="-0.580114" z3="2.019608"/>
                  <atom elementType="H" id="a21" x3="2.208176" y3="-1.848292" z3="1.712795"/>
                  <atom elementType="H" id="a22" x3="-0.645877" y3="0.731881" z3="1.185734"/>
                  <atom elementType="H" id="a23" x3="-2.634993" y3="2.045328" z3="1.331703"/>
                  <atom elementType="H" id="a24" x3="-4.721616" y3="0.715345" z3="0.568173"/>
                  <atom elementType="H" id="a25" x3="-4.159715" y3="1.728229" z3="-0.729103"/>
                  <atom elementType="H" id="a26" x3="-4.447644" y3="-0.690255" z3="-1.58904"/>
                  <atom elementType="H" id="a27" x3="-2.379643" y3="-1.877054" z3="-1.621268"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a9" order="S"/>
                  <bond atomRefs2="a2 a10" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a16" order="S"/>
                  <bond atomRefs2="a5 a17" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a20" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a21" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a11 a22" order="S"/>
                  <bond atomRefs2="a12 a23" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a13 a25" order="S"/>
                  <bond atomRefs2="a13 a24" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a26" order="S"/>
                  <bond atomRefs2="a15 a27" order="S"/>
               </bondArray>
               <formula concise="C10H12F2N2Si">
                  <atomArray count="10 12 2 2 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">214.20270639999995</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C10H12F2N2Si/c11-15(12,13-7-3-1-4-8-13)14-9-5-2-6-10-14/h3-10H,1-2H2">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,13,5,7,12,14,4,8,11,15,1,9,3,10,2/E:(1,2)(3,4,5,6)(7,8,9,10)(11,12)(13,14)/CRV:3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3/rA:27nFSiNC3C3CC3C3FNC3C3CC3C3HHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s2;s2;s10;s11;s12;s13;s10s14;s4;s5;s6;s6;s7;s8;s11;s12;s13;s13;s14;s15;/rC:.0767,-2.4414,-1.5396;.031,-1.6454,-.1496;1.4111,-.6738,.1514;1.6405,.4688,-.6309;2.7272,1.2258,-.5283;3.8427,.9404,.4309;3.5106,-.268,1.2532;2.4021,-.9835,1.0948;-.0052,-2.7654,.9954;-1.3719,-.661,-.2219;-1.5173,.465,.6026;-2.6311,1.186,.6746;-3.8713,.8724,-.1067;-3.6427,-.3401,-.9569;-2.4964,-1.0112,-.985;.8574,.7156,-1.3363;2.8027,2.0913,-1.1726;4.786,.7916,-.1086;4.0219,1.8078,1.0776;4.2073,-.5801,2.0196;2.2082,-1.8483,1.7128;-.6459,.7319,1.1857;-2.635,2.0453,1.3317;-4.7216,.7153,.5682;-4.1597,1.7282,-.7291;-4.4476,-.6903,-1.589;-2.3796,-1.8771,-1.6213;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-985.30618326</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1133.87846458</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2119.18464784</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-3605.68692886</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1486.50228101</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1964.69698123</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">979.39079797</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00603986</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">58.999958201948</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">58.999958201948</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">117.999916403897</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-61.469375988714</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-5.319036504312</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-66.788412493026</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.017945724</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.017943221</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.017940801</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.017941194</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.017947139</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="252">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="252">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="252" units="nonsi:electronvolt">-1819.5610 -683.1323 -683.1103 -399.3290 -399.2802 -285.3009 -285.2618 -285.2304 -285.2218 -284.3173 -284.2761 -284.1549 -284.1137 -284.0909 -284.0855 -152.9673 -106.5572 -106.5232 -106.4901 -36.2428 -35.7084 -28.9689 -28.6133 -24.3801 -24.1999 -23.4056 -23.3272 -20.5035 -20.1631 -19.1382 -18.9989 -18.0972 -16.6922 -16.4095 -15.6259 -15.2210 -15.0766 -14.6777 -14.5899 -14.3981 -14.3290 -13.9425 -13.6910 -13.6130 -13.4106 -13.3824 -13.3682 -13.2980 -12.7687 -12.0512 -11.8596 -11.4766 -11.2943 -10.7206 -10.6673 -8.7585 -8.6307 -6.5868 -6.5372 0.6200 0.9592 2.2616 2.2818 2.4319 3.5545 3.7095 4.0614 4.5833 4.7013 5.0223 5.0896 5.1555 5.2169 6.0783 6.2295 6.2973 6.3481 6.3539 6.4172 6.5948 7.0476 7.8415 7.8982 8.0785 8.6113 8.8750 9.5511 9.8348 11.0482 11.2531 11.5419 11.8923 13.1644 13.2260 13.5804 13.9169 14.5597 14.6132 15.0232 15.3041 15.4081 15.6315 15.8998 16.0572 16.3032 16.3233 16.5441 16.8533 17.2273 17.4004 17.6188 17.8958 18.0496 18.2041 18.8744 19.1463 19.5093 20.5677 20.6411 21.5046 21.5533 22.1587 22.4588 23.3533 23.6055 24.6108 25.1558 25.5997 25.8361 26.0017 26.2727 26.3780 26.5263 26.6599 26.9230 27.0398 27.2214 27.5488 27.6946 28.2673 28.3226 28.4185 28.6433 28.9816 30.1549 30.4026 31.1952 31.3886 32.2835 32.3701 32.5349 33.6013 33.8749 34.1239 34.5678 34.7425 34.9786 35.5025 35.6646 35.9327 36.3428 36.7775 37.1016 37.7187 38.1442 38.5654 39.0000 39.4915 39.9273 40.4391 40.9618 41.2497 41.5509 41.8439 41.9539 42.5815 42.6457 43.4283 44.3913 45.9398 46.3151 47.5121 48.7278 48.9784 49.3110 49.3745 49.4998 49.6771 50.4562 51.0628 52.4303 52.9537 53.2868 53.4254 55.4094 55.4633 56.0634 57.0647 58.4833 59.0008 59.0890 59.2978 59.4287 59.9976 60.4611 60.8704 61.1840 61.4798 61.6526 61.7336 63.3331 63.9574 66.0953 66.1877 67.0030 67.2327 67.2781 67.3881 71.6903 71.7749 72.1989 72.5295 73.2368 73.3822 74.1494 74.2788 74.3796 74.6423 76.0245 76.2868 76.9770 77.5334 80.7063 81.4226 83.6869 83.8886 90.8033 91.1468 365.4081 365.5383 368.9795 369.0193 378.9048 378.9949 386.1248 386.7025 387.2876 387.7651 526.5885 527.2193 892.2365 893.7493</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="27">-0.438671 1.390764 -0.659831 0.025513 -0.312887 -0.433570 -0.315625 0.025436 -0.440021 -0.656766 0.023709 -0.315957 -0.433102 -0.313520 0.028557 0.258132 0.222820 0.229404 0.226007 0.222177 0.256506 0.260541 0.221619 0.227691 0.226039 0.221436 0.253599</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="27">-0.225397 0.669530 -0.195712 -0.073710 -0.181495 -0.230327 -0.186232 -0.070152 -0.224687 -0.194359 -0.073124 -0.184416 -0.230327 -0.184516 -0.070089 0.145392 0.139205 0.130625 0.129593 0.138682 0.145218 0.145824 0.138503 0.129978 0.129325 0.138405 0.144262</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="27">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="27">F Si N C C C C C F N C C C C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="27">9.4387 12.6092 7.6598 5.9745 6.3129 6.4336 6.3156 5.9746 9.4400 7.6568 5.9763 6.3160 6.4331 6.3135 5.9714 0.7419 0.7772 0.7706 0.7740 0.7778 0.7435 0.7395 0.7784 0.7723 0.7740 0.7786 0.7464</array>
                     <array dataType="xsd:double" dictRef="o:za" size="27">9.0000 14.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="27">-0.4387 1.3908 -0.6598 0.0255 -0.3129 -0.4336 -0.3156 0.0254 -0.4400 -0.6568 0.0237 -0.3160 -0.4331 -0.3135 0.0286 0.2581 0.2228 0.2294 0.2260 0.2222 0.2565 0.2605 0.2216 0.2277 0.2260 0.2214 0.2536</array>
                     <array dataType="xsd:double" dictRef="o:va" size="27">1.0009 4.0208 3.1217 3.7149 3.8249 3.7166 3.8118 3.7192 1.0003 3.1232 3.7175 3.8229 3.7172 3.8161 3.7181 0.8940 0.9211 0.8909 0.8926 0.9213 0.8974 0.8922 0.9216 0.8919 0.8922 0.9214 0.8983</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="27">1.0009 4.0208 3.1217 3.7149 3.8249 3.7166 3.8118 3.7192 1.0003 3.1232 3.7175 3.8229 3.7172 3.8161 3.7181 0.8940 0.9211 0.8909 0.8926 0.9213 0.8974 0.8922 0.9216 0.8919 0.8922 0.9214 0.8983</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="27">-0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="28">0.9435 0.9931 0.9423 0.9964 0.9718 0.9829 1.8496 0.8941 0.9906 0.9200 0.9895 0.9018 0.9041 1.8385 0.9206 0.8996 0.9779 0.9794 1.8471 0.8942 0.9903 0.9205 0.9899 0.9030 0.9036 1.8422 0.9206 0.9001</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="28">0 1 1 2 1 8 1 9 2 3 2 7 3 4 3 15 4 5 4 16 5 6 5 17 5 18 6 7 6 19 7 20 9 10 9 14 10 11 10 21 11 12 11 22 12 13 12 23 12 24 13 14 13 25 14 26</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.017950253</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-985.275236762641</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-0.25979 0.27854 0.01875 15.46505 -14.83168 0.63336 1.93325 -1.83785 0.09540</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.64078</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.62874</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
