<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="4">1 2 3 4</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="4">8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="4">4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si F C C C C C C C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="23">1 2 1 3 3 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.533073" y3="3.371969" z3="-0.519404"/>
                  <atom elementType="Si" id="a2" x3="0.259413" y3="2.10936" z3="0.43385"/>
                  <atom elementType="F" id="a3" x3="0.204883" y3="2.738586" z3="1.911359"/>
                  <atom elementType="C" id="a4" x3="-1.220835" y3="1.078155" z3="0.035066"/>
                  <atom elementType="C" id="a5" x3="-0.777932" y3="-0.248141" z3="-0.105775"/>
                  <atom elementType="C" id="a6" x3="-1.70239" y3="-1.258171" z3="-0.33573"/>
                  <atom elementType="C" id="a7" x3="-3.051137" y3="-0.94826" z3="-0.438581"/>
                  <atom elementType="C" id="a8" x3="-3.488328" y3="0.362742" z3="-0.317778"/>
                  <atom elementType="C" id="a9" x3="-2.569978" y3="1.375778" z3="-0.074963"/>
                  <atom elementType="C" id="a10" x3="0.689364" y3="-0.451006" z3="0.001631"/>
                  <atom elementType="C" id="a11" x3="1.446938" y3="0.705319" z3="0.254235"/>
                  <atom elementType="C" id="a12" x3="2.828094" y3="0.627178" z3="0.337759"/>
                  <atom elementType="C" id="a13" x3="3.466738" y3="-0.596132" z3="0.181224"/>
                  <atom elementType="C" id="a14" x3="2.715994" y3="-1.73928" z3="-0.051273"/>
                  <atom elementType="C" id="a15" x3="1.33314" y3="-1.672691" z3="-0.143326"/>
                  <atom elementType="H" id="a16" x3="-1.387325" y3="-2.288839" z3="-0.435413"/>
                  <atom elementType="H" id="a17" x3="-3.767242" y3="-1.739944" z3="-0.616373"/>
                  <atom elementType="H" id="a18" x3="-4.541494" y3="0.592681" z3="-0.407447"/>
                  <atom elementType="H" id="a19" x3="-2.91627" y3="2.396775" z3="0.02523"/>
                  <atom elementType="H" id="a20" x3="3.417148" y3="1.516864" z3="0.521416"/>
                  <atom elementType="H" id="a21" x3="4.544889" y3="-0.659805" z3="0.241974"/>
                  <atom elementType="H" id="a22" x3="3.211591" y3="-2.694542" z3="-0.16576"/>
                  <atom elementType="H" id="a23" x3="0.771766" y3="-2.578597" z3="-0.331919"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a11" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a16" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a9 a19" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a12 a20" order="S"/>
                  <bond atomRefs2="a13 a21" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a22" order="S"/>
                  <bond atomRefs2="a15 a23" order="S"/>
               </bondArray>
               <formula concise="C12H8F2Si">
                  <atomArray count="12 8 2 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">210.21070639999994</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C12H8F2Si/c13-15(14)11-7-3-1-5-9(11)10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,14,8,13,6,15,9,12,5,10,4,11,1,3,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)(13,14)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3/rA:23nFSiFC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s5;s2s10;s11;s12;s13;s10s14;s6;s7;s8;s9;s12;s13;s14;s15;/rC:.5331,3.372,-.5194;.2594,2.1094,.4339;.2049,2.7386,1.9114;-1.2208,1.0782,.0351;-.7779,-.2481,-.1058;-1.7024,-1.2582,-.3357;-3.0511,-.9483,-.4386;-3.4883,.3627,-.3178;-2.57,1.3758,-.075;.6894,-.451,.0016;1.4469,.7053,.2542;2.8281,.6272,.3378;3.4667,-.5961,.1812;2.716,-1.7393,-.0513;1.3331,-1.6727,-.1433;-1.3873,-2.2888,-.4354;-3.7672,-1.7399,-.6164;-4.5415,.5927,-.4074;-2.9163,2.3968,.0252;3.4171,1.5169,.5214;4.5449,-.6598,.242;3.2116,-2.6945,-.1658;.7718,-2.5786,-.3319;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">825</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">825</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C12F2H8Si_hess_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">112</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">244</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1042.2073398635 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-10 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-11 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-03 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-06</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.939e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.009 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.007 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.016 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="0.5330726" y3="3.37196938" z3="-0.51940419">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="0.25941313" y3="2.10935951" z3="0.4338498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a3" x3="0.20488317" y3="2.73858588" z3="1.91135855">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="-1.22083483" y3="1.07815523" z3="0.03506553">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="-0.77793231" y3="-0.24814116" z3="-0.10577454">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="-1.7023901" y3="-1.25817102" z3="-0.33572991">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-3.05113719" y3="-0.94825965" z3="-0.43858061">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-3.48832805" y3="0.36274201" z3="-0.3177779">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="-2.56997765" y3="1.37577805" z3="-0.0749633">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="0.6893644" y3="-0.45100567" z3="0.00163095">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="1.44693839" y3="0.7053192" z3="0.25423532">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a12" x3="2.82809351" y3="0.62717814" z3="0.33775912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a13" x3="3.46673757" y3="-0.59613218" z3="0.18122357">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a14" x3="2.71599414" y3="-1.73927978" z3="-0.05127326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a15" x3="1.33314045" y3="-1.67269082" z3="-0.14332632">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-1.3873247" y3="-2.28883932" z3="-0.4354126">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-3.7672422" y3="-1.73994397" z3="-0.61637307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="-4.54149417" y3="0.5926806" z3="-0.4074469">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a19" x3="-2.91626959" y3="2.39677522" z3="0.02522966">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a20" x3="3.41714786" y3="1.51686398" z3="0.52141561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a21" x3="4.54488899" y3="-0.65980459" z3="0.24197395">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a22" x3="3.21159099" y3="-2.69454171" z3="-0.16575998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a23" x3="0.77176553" y3="-2.57859735" z3="-0.33191949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a11" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a10" order="S"/>
                           <bond atomRefs2="a6 a16" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a17" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a9 a19" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a10 a15" order="S"/>
                           <bond atomRefs2="a11 a12" order="S"/>
                           <bond atomRefs2="a12 a13" order="S"/>
                           <bond atomRefs2="a12 a20" order="S"/>
                           <bond atomRefs2="a13 a21" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a14 a15" order="S"/>
                           <bond atomRefs2="a14 a22" order="S"/>
                           <bond atomRefs2="a15 a23" order="S"/>
                        </bondArray>
                        <formula concise="C12H8F2Si">
                           <atomArray count="12 8 2 1" elementType="C H F Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">210.21070639999994</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C12H8F2Si/c13-15(14)11-7-3-1-5-9(11)10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,14,8,13,6,15,9,12,5,10,4,11,1,3,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)(13,14)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3/rA:23nFSiFC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s5;s2s10;s11;s12;s13;s10s14;s6;s7;s8;s9;s12;s13;s14;s15;/rC:.5331,3.372,-.5194;.2594,2.1094,.4338;.2049,2.7386,1.9114;-1.2208,1.0782,.0351;-.7779,-.2481,-.1058;-1.7024,-1.2582,-.3357;-3.0511,-.9483,-.4386;-3.4883,.3627,-.3178;-2.57,1.3758,-.075;.6894,-.451,.0016;1.4469,.7053,.2542;2.8281,.6272,.3378;3.4667,-.5961,.1812;2.716,-1.7393,-.0513;1.3331,-1.6727,-.1433;-1.3873,-2.2888,-.4354;-3.7672,-1.7399,-.6164;-4.5415,.5927,-.4074;-2.9163,2.3968,.0252;3.4171,1.5169,.5214;4.5449,-.6598,.242;3.2116,-2.6945,-.1658;.7718,-2.5786,-.3319;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Freq RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 16</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="vibrations" dictRef="cc:vibrations">
                     <array dataType="xsd:double" dictRef="cc:frequency" size="69">0.00 0.00 0.00 0.00 0.00 0.00 76.45 77.08 104.34 149.70 198.64 206.40 274.63 285.52 302.77 406.19 438.28 449.17 455.89 483.19 514.50 523.60 582.74 646.97 712.25 746.04 766.78 771.99 788.50 794.05 836.23 926.46 929.53 929.73 973.54 1009.21 1009.83 1050.56 1052.58 1054.57 1093.06 1100.57 1118.58 1137.25 1197.85 1198.23 1218.41 1228.56 1304.58 1344.07 1356.51 1371.78 1401.06 1520.00 1526.73 1558.55 1560.27 1680.06 1693.47 1714.24 1724.07 3261.72 3262.94 3266.09 3268.99 3277.54 3280.28 3290.19 3290.88</array>
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                     <matrix cols="3" dataType="xsd:double" dictRef="cc:displacement" rows="63">0.001911 0.000346 -0.003289 -0.001350 -0.007242 0.023400 0.001170 0.001643 -0.023387 0.001154 0.000294 0.000286 0.049641 -0.006451 0.004285 -0.001485 -0.022540 -0.006262 -0.005006 -0.038733 -0.004311 -0.007348 -0.000300 -0.000701 0.005483 0.006240 -0.050141 0.004106 0.033031 0.004312 0.006939 0.022148 -0.035642 0.006843 0.056710 0.024086 0.005513 -0.010067 -0.001948 -0.052012 0.007402 -0.006596 0.075662 -0.010122 -0.000291 -0.011654 0.005753 -0.035136 0.001990 -0.000041 0.000246 -0.024798 0.003412 -0.001863 0.000711 0.007092 0.001779 -0.057063 0.007933 -0.005677 -0.002261 0.001455 0.000846 0.000625 -0.006492 0.024673 0.001536 0.004746 -0.012645 0.009157 0.011893 -0.096905 -0.003132 0.000955 -0.000334 -0.012618 -0.111776 -0.034462 -0.001717 -0.008133 -0.002514 -0.002196 -0.022482 -0.006327 0.013429 0.030546 -0.091781 -0.000263 -0.000127 0.005425 -0.000360 -0.000210 -0.000413 -0.010481 0.001489 -0.000771 0.001450 -0.000196 0.000019 -0.000095 -0.000075 -0.001384 -0.004027 0.000480 -0.000160 0.000148 0.001623 0.000738 0.005602 0.045466 0.008910 -0.024703 0.003094 -0.001307 0.001020 0.050397 0.009151 0.022167 0.009190 0.003453 -0.003661 0.000134 -0.000331 -0.001639 -0.013110 -0.002175 -0.000838 -0.007756 -0.002764 0.028798 -0.003935 0.002040 -0.000914 -0.005729 -0.000953 -0.001915 0.000239 -0.000222 0.000535 0.004511 0.001114 0.051194 -0.007214 0.003794 0.001699 0.009958 0.000772 -0.005333 0.001362 -0.000030 0.002597 0.018247 0.003038 -0.002365 -0.020462 -0.003290 0.013200 -0.001599 0.001128 0.002298 0.017015 0.002834 0.037353 -0.005286 0.002510 -0.011749 0.001735 -0.000951 0.000133 0.006058 0.000908 -0.001229 0.000047 -0.000027 -0.001081 -0.007340 -0.001246 -0.007240 0.000524 -0.000787 0.002418 0.017438 0.002547 0.021120 -0.004887 0.001067 0.006290 0.006743 0.001976</matrix>
                  </module>
               </property>
            </propertyList>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.533073" y3="3.371969" z3="-0.519404"/>
                  <atom elementType="Si" id="a2" x3="0.259413" y3="2.10936" z3="0.43385"/>
                  <atom elementType="F" id="a3" x3="0.204883" y3="2.738586" z3="1.911359"/>
                  <atom elementType="C" id="a4" x3="-1.220835" y3="1.078155" z3="0.035066"/>
                  <atom elementType="C" id="a5" x3="-0.777932" y3="-0.248141" z3="-0.105775"/>
                  <atom elementType="C" id="a6" x3="-1.70239" y3="-1.258171" z3="-0.33573"/>
                  <atom elementType="C" id="a7" x3="-3.051137" y3="-0.94826" z3="-0.438581"/>
                  <atom elementType="C" id="a8" x3="-3.488328" y3="0.362742" z3="-0.317778"/>
                  <atom elementType="C" id="a9" x3="-2.569978" y3="1.375778" z3="-0.074963"/>
                  <atom elementType="C" id="a10" x3="0.689364" y3="-0.451006" z3="0.001631"/>
                  <atom elementType="C" id="a11" x3="1.446938" y3="0.705319" z3="0.254235"/>
                  <atom elementType="C" id="a12" x3="2.828094" y3="0.627178" z3="0.337759"/>
                  <atom elementType="C" id="a13" x3="3.466738" y3="-0.596132" z3="0.181224"/>
                  <atom elementType="C" id="a14" x3="2.715994" y3="-1.73928" z3="-0.051273"/>
                  <atom elementType="C" id="a15" x3="1.33314" y3="-1.672691" z3="-0.143326"/>
                  <atom elementType="H" id="a16" x3="-1.387325" y3="-2.288839" z3="-0.435413"/>
                  <atom elementType="H" id="a17" x3="-3.767242" y3="-1.739944" z3="-0.616373"/>
                  <atom elementType="H" id="a18" x3="-4.541494" y3="0.592681" z3="-0.407447"/>
                  <atom elementType="H" id="a19" x3="-2.91627" y3="2.396775" z3="0.02523"/>
                  <atom elementType="H" id="a20" x3="3.417148" y3="1.516864" z3="0.521416"/>
                  <atom elementType="H" id="a21" x3="4.544889" y3="-0.659805" z3="0.241974"/>
                  <atom elementType="H" id="a22" x3="3.211591" y3="-2.694542" z3="-0.16576"/>
                  <atom elementType="H" id="a23" x3="0.771766" y3="-2.578597" z3="-0.331919"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a11" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a10" order="S"/>
                  <bond atomRefs2="a6 a16" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a9 a19" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a12 a20" order="S"/>
                  <bond atomRefs2="a13 a21" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a22" order="S"/>
                  <bond atomRefs2="a15 a23" order="S"/>
               </bondArray>
               <formula concise="C12H8F2Si">
                  <atomArray count="12 8 2 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">210.21070639999994</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C12H8F2Si/c13-15(14)11-7-3-1-5-9(11)10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:7,14,8,13,6,15,9,12,5,10,4,11,1,3,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)(13,14)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3/rA:23nFSiFC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s5;s2s10;s11;s12;s13;s10s14;s6;s7;s8;s9;s12;s13;s14;s15;/rC:.5331,3.372,-.5194;.2594,2.1094,.4339;.2049,2.7386,1.9114;-1.2208,1.0782,.0351;-.7779,-.2481,-.1058;-1.7024,-1.2582,-.3357;-3.0511,-.9483,-.4386;-3.4883,.3627,-.3178;-2.57,1.3758,-.075;.6894,-.451,.0016;1.4469,.7053,.2542;2.8281,.6272,.3378;3.4667,-.5961,.1812;2.716,-1.7393,-.0513;1.3331,-1.6727,-.1433;-1.3873,-2.2888,-.4354;-3.7672,-1.7399,-.6164;-4.5415,.5927,-.4074;-2.9163,2.3968,.0252;3.4171,1.5169,.5214;4.5449,-.6598,.242;3.2116,-2.6945,-.1658;.7718,-2.5786,-.3319;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-949.69234106</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1042.20733986</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1991.89968092</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-3374.24895791</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1382.34927698</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1893.84296404</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">944.15062298</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00586953</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">56.000059655837</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">56.000059655837</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">112.000119311675</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-59.065733233052</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-5.057399970127</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-64.123133203178</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="244">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="244">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="244" units="nonsi:electronvolt">-1818.4747 -682.7210 -682.6285 -285.0831 -285.0758 -284.7816 -284.7809 -284.7511 -284.7505 -284.6775 -284.6758 -284.6019 -284.6013 -284.3797 -284.3792 -152.0017 -105.5913 -105.5320 -105.4884 -35.7697 -35.2159 -26.9503 -26.1615 -24.2473 -23.3786 -23.0102 -22.3449 -19.8114 -19.4618 -18.3123 -18.0371 -17.3105 -16.3479 -15.5508 -15.1129 -15.0652 -14.7346 -14.3149 -14.1665 -13.8432 -13.6699 -13.5467 -13.4198 -13.0699 -12.9572 -12.5963 -12.5154 -11.6010 -11.4971 -11.0855 -11.0653 -9.6249 -9.3774 -8.6196 -8.3243 -7.4078 -1.1821 -0.5726 0.3783 1.3627 2.2944 3.3589 3.5423 3.7705 4.3265 4.6438 5.0408 5.5010 5.5512 5.8969 5.9115 6.2792 6.6748 6.7662 7.0882 7.5151 7.6969 8.1586 8.4546 8.6387 9.7002 9.9461 10.8719 10.9373 11.9425 12.0583 12.3654 13.3127 13.8866 13.9993 14.6805 14.8926 15.0663 15.1845 15.5475 15.5882 16.0193 16.2479 16.2563 16.6128 16.7113 16.7418 16.9296 17.2761 17.2837 17.4019 18.2911 18.4733 18.5882 18.9424 19.2369 19.6207 19.9655 20.1630 20.9307 21.7611 22.2596 22.9408 23.0941 23.3530 23.4346 23.7649 24.6966 25.2323 25.4946 25.6942 26.2880 26.8038 26.9173 27.2118 27.4940 27.9530 28.2069 28.3971 28.8092 29.0888 29.2820 29.6512 30.4939 30.9158 31.5867 31.9791 32.8490 33.1772 33.5722 33.8744 34.2396 34.3485 34.4143 34.9780 35.1906 35.3969 35.4481 35.5802 35.9004 36.5746 36.9141 37.6743 37.8788 38.0058 38.5015 38.6025 40.2527 40.3533 40.6850 40.8460 41.2178 41.7182 41.8757 41.9762 42.1889 42.2270 43.3417 44.0263 46.8647 47.0699 47.7400 47.8726 48.3600 49.2082 49.7819 51.2632 51.2873 51.4574 52.0336 53.7548 54.5500 54.5620 55.9023 56.5318 57.7257 58.3681 58.4946 59.0269 59.5563 59.8307 60.2913 60.5261 61.2766 61.7282 61.9290 62.8659 63.5521 63.9795 64.2720 64.8774 65.3956 68.5570 69.4255 70.4419 71.0233 72.2671 73.2826 73.7180 73.9221 75.0037 75.1168 75.7376 76.1583 76.4045 77.0876 77.7696 78.8649 79.4185 81.5541 81.6299 83.7414 89.8179 92.1545 96.0634 359.7480 363.9904 370.8382 372.8792 373.4808 377.6003 383.5162 385.1405 385.1557 386.8270 395.5810 395.9081 892.5389 892.6324</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si F C C C C C C C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="23">-0.450215 1.367241 -0.449174 -0.260222 0.122098 -0.302239 -0.208956 -0.216628 -0.267720 0.124050 -0.260762 -0.267809 -0.217000 -0.208233 -0.302589 0.211241 0.229231 0.226644 0.232045 0.231994 0.226607 0.229183 0.211212</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si F C C C C C C C C C C C C H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="23">-0.232710 0.721024 -0.234494 -0.186988 -0.020558 -0.126408 -0.112205 -0.134503 -0.104622 -0.020420 -0.187135 -0.104599 -0.134573 -0.112043 -0.126505 0.137138 0.140020 0.139722 0.141516 0.141530 0.139722 0.139987 0.137103</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si F C C C C C C C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="23">9.4502 12.6328 9.4492 6.2602 5.8779 6.3022 6.2090 6.2166 6.2677 5.8759 6.2608 6.2678 6.2170 6.2082 6.3026 0.7888 0.7708 0.7734 0.7680 0.7680 0.7734 0.7708 0.7888</array>
                     <array dataType="xsd:double" dictRef="o:za" size="23">9.0000 14.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="23">-0.4502 1.3672 -0.4492 -0.2602 0.1221 -0.3022 -0.2090 -0.2166 -0.2677 0.1241 -0.2608 -0.2678 -0.2170 -0.2082 -0.3026 0.2112 0.2292 0.2266 0.2320 0.2320 0.2266 0.2292 0.2112</array>
                     <array dataType="xsd:double" dictRef="o:va" size="23">0.9872 3.7477 0.9861 3.6592 3.7216 3.7606 3.8230 3.8124 3.8128 3.7205 3.6589 3.8127 3.8121 3.8227 3.7605 0.9212 0.9075 0.9089 0.9072 0.9072 0.9089 0.9076 0.9213</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="23">0.9872 3.7477 0.9861 3.6592 3.7216 3.7606 3.8230 3.8124 3.8128 3.7205 3.6589 3.8127 3.8121 3.8227 3.7605 0.9212 0.9075 0.9089 0.9072 0.9072 0.9089 0.9076 0.9213</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="23">0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="25">0.9571 0.9630 0.8636 0.8638 1.3686 1.3791 1.3753 0.9822 1.4205 0.9219 1.4230 0.9165 1.4226 0.9166 0.9200 1.3680 1.3755 1.3790 1.4226 0.9201 1.4227 0.9166 1.4205 0.9166 0.9218</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="25">0 1 1 2 1 3 1 10 3 4 3 8 4 5 4 9 5 6 5 15 6 7 6 16 7 8 7 17 8 18 9 10 9 14 10 11 11 12 11 19 12 13 12 20 13 14 13 21 14 22</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016768720</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-949.678361082897</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.75143 1.62453 -0.12691 -14.40227 13.32822 -1.07405 -3.16807 2.89933 -0.26874</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.11441</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.83261</scalar>
               </module>
               <module cmlx:templateRef="thermochemistry" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:totalmass">218.28</scalar>
               </module>
               <module cmlx:templateRef="innerenergy" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="contributions">
                     <scalar dataType="xsd:double" dictRef="o:electronic" units="nonsi:hartree">-949.67836108</scalar>
                     <scalar dataType="xsd:double" dictRef="o:zeropoint" units="nonsi:hartree">0.17262687</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalvibcorrection" units="nonsi:hartree">0.00860247</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermalrotcorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltrasncorrection" units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double" dictRef="o:thermaltotal" units="nonsi:hartree">-949.49429920</scalar>
                  </module>
                  <module cmlx:templateRef="corrections">
                     <scalar dataType="xsd:double" dictRef="o:thermalcorr" units="nonsi:hartree">0.01143502</scalar>
                     <scalar dataType="xsd:double" dictRef="o:nonthermalcorr" units="nonsi:hartree">0.17262687</scalar>
                     <scalar dataType="xsd:double" dictRef="o:totalcorr" units="nonsi:hartree">0.18406189</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="enthalpy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalfree" units="nonsi:hartree">-949.49429920</scalar>
                  <scalar dataType="xsd:double" dictRef="o:thermalcorrenthalpy" units="nonsi:hartree">0.00094421</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-949.49335499</scalar>
               </module>
               <module cmlx:templateRef="entropy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:elect" units="nonsi:hartree">0.00000000</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:vibrat" units="nonsi:hartree">0.01442316</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rotat" units="nonsi:hartree">0.01525703</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:transl" units="nonsi:hartree">0.01997678</scalar>
                  <scalar dataType="xsd:double" dictRef="o:total" units="nonsi:hartree">0.04965697</scalar>
               </module>
               <module cmlx:templateRef="gibbs" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalenthalpy" units="nonsi:hartree">-949.49335499</scalar>
                  <scalar dataType="xsd:double" dictRef="o:totalentropycorr" units="nonsi:hartree">-0.04965697</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsenthalpy" units="nonsi:hartree">-949.54301196</scalar>
                  <scalar dataType="xsd:double" dictRef="o:gibbsminuselec" units="nonsi:hartree">0.13534913</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
