<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 10s7p1d 8s4p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s3p1d 4s2p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="23">1 2 3 3 3 3 3 3 4 3 3 3 3 3 3 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.085116" y3="-2.213975" z3="1.468053"/>
                  <atom elementType="Si" id="a2" x3="0.043481" y3="-1.118604" z3="0.765767"/>
                  <atom elementType="C" id="a3" x3="-1.194804" y3="-0.652188" z3="0.320995"/>
                  <atom elementType="C" id="a4" x3="-1.185847" y3="0.534914" z3="-0.442386"/>
                  <atom elementType="C" id="a5" x3="-2.366103" y3="1.081148" z3="-0.932739"/>
                  <atom elementType="C" id="a6" x3="-3.547372" y3="0.436041" z3="-0.651938"/>
                  <atom elementType="C" id="a7" x3="-3.583044" y3="-0.748529" z3="0.108851"/>
                  <atom elementType="C" id="a8" x3="-2.42749" y3="-1.291894" z3="0.591219"/>
                  <atom elementType="O" id="a9" x3="-0.044565" y3="1.167831" z3="-0.713637"/>
                  <atom elementType="C" id="a10" x3="1.137822" y3="0.726614" z3="-0.284525"/>
                  <atom elementType="C" id="a11" x3="1.238007" y3="-0.452222" z3="0.485256"/>
                  <atom elementType="C" id="a12" x3="2.511565" y3="-0.88599" z3="0.923486"/>
                  <atom elementType="C" id="a13" x3="3.617504" y3="-0.156745" z3="0.593612"/>
                  <atom elementType="C" id="a14" x3="3.491031" y3="1.015189" z3="-0.176906"/>
                  <atom elementType="C" id="a15" x3="2.268373" y3="1.46328" z3="-0.61825"/>
                  <atom elementType="H" id="a16" x3="-2.340503" y3="1.990885" z3="-1.516781"/>
                  <atom elementType="H" id="a17" x3="-4.473391" y3="0.85127" z3="-1.025891"/>
                  <atom elementType="H" id="a18" x3="-4.531391" y3="-1.225819" z3="0.309149"/>
                  <atom elementType="H" id="a19" x3="-2.446022" y3="-2.200968" z3="1.175646"/>
                  <atom elementType="H" id="a20" x3="2.599597" y3="-1.786427" z3="1.514873"/>
                  <atom elementType="H" id="a21" x3="4.595693" y3="-0.476503" z3="0.922689"/>
                  <atom elementType="H" id="a22" x3="4.378773" y3="1.579178" z3="-0.429198"/>
                  <atom elementType="H" id="a23" x3="2.173471" y3="2.363412" z3="-1.209945"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a11" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a16" order="S"/>
                  <bond atomRefs2="a6 a17" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a12 a20" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a21" order="S"/>
                  <bond atomRefs2="a14 a22" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a15 a23" order="S"/>
               </bondArray>
               <formula concise="C12H8FOSi">
                  <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">207.21170319999993</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0851,-2.214,1.4681;.0435,-1.1186,.7658;-1.1948,-.6522,.321;-1.1858,.5349,-.4424;-2.3661,1.0811,-.9327;-3.5474,.436,-.6519;-3.583,-.7485,.1089;-2.4275,-1.2919,.5912;-.0446,1.1678,-.7136;1.1378,.7266,-.2845;1.238,-.4522,.4853;2.5116,-.886,.9235;3.6175,-.1567,.5936;3.491,1.0152,-.1769;2.2684,1.4633,-.6182;-2.3405,1.9909,-1.5168;-4.4734,.8513,-1.0259;-4.5314,-1.2258,.3091;-2.446,-2.201,1.1756;2.5996,-1.7864,1.5149;4.5957,-.4765,.9227;4.3788,1.5792,-.4292;2.1735,2.3634,-1.2099;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">825</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">825</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">P_1_34_F_1_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">110</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">244</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1087.3359604157 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.707e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.028 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.007 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.035 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">825</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">825</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">P_1_34_F_1_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">110</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">244</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1019.9111300798 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.197e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.008 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.014 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="0.085116" y3="-2.213975" z3="1.468053">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="0.043481" y3="-1.118604" z3="0.765767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="C" id="a3" x3="-1.194804" y3="-0.652188" z3="0.320995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="-1.185847" y3="0.534914" z3="-0.442386">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="-2.366103" y3="1.081148" z3="-0.932739">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="-3.547372" y3="0.436041" z3="-0.651938">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-3.583044" y3="-0.748529" z3="0.108851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-2.42749" y3="-1.291894" z3="0.591219">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="O" id="a9" x3="-0.044565" y3="1.167831" z3="-0.713637">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C" id="a10" x3="1.137822" y3="0.726614" z3="-0.284525">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a11" x3="1.238007" y3="-0.452222" z3="0.485256">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a12" x3="2.511565" y3="-0.88599" z3="0.923486">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a13" x3="3.617504" y3="-0.156745" z3="0.593612">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a14" x3="3.491031" y3="1.015189" z3="-0.176906">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a15" x3="2.268373" y3="1.46328" z3="-0.61825">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-2.340503" y3="1.990885" z3="-1.516781">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-4.473391" y3="0.85127" z3="-1.025891">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="-4.531391" y3="-1.225819" z3="0.309149">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a19" x3="-2.446022" y3="-2.200968" z3="1.175646">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a20" x3="2.599597" y3="-1.786427" z3="1.514873">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a21" x3="4.595693" y3="-0.476503" z3="0.922689">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a22" x3="4.378773" y3="1.579178" z3="-0.429198">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a23" x3="2.173471" y3="2.363412" z3="-1.209945">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a11" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a3 a8" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a16" order="S"/>
                           <bond atomRefs2="a6 a17" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a18" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a8 a19" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a10 a15" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a11 a12" order="S"/>
                           <bond atomRefs2="a12 a13" order="S"/>
                           <bond atomRefs2="a12 a20" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a13 a21" order="S"/>
                           <bond atomRefs2="a14 a22" order="S"/>
                           <bond atomRefs2="a14 a15" order="S"/>
                           <bond atomRefs2="a15 a23" order="S"/>
                        </bondArray>
                        <formula concise="C12H8FOSi">
                           <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">207.21170319999993</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0851,-2.214,1.4681;.0435,-1.1186,.7658;-1.1948,-.6522,.321;-1.1858,.5349,-.4424;-2.3661,1.0811,-.9327;-3.5474,.436,-.6519;-3.583,-.7485,.1089;-2.4275,-1.2919,.5912;-.0446,1.1678,-.7136;1.1378,.7266,-.2845;1.238,-.4522,.4853;2.5116,-.886,.9235;3.6175,-.1567,.5936;3.491,1.0152,-.1769;2.2684,1.4633,-.6182;-2.3405,1.9909,-1.5168;-4.4734,.8513,-1.0259;-4.5314,-1.2258,.3091;-2.446,-2.201,1.1756;2.5996,-1.7864,1.5149;4.5957,-.4765,.9227;4.3788,1.5792,-.4292;2.1735,2.3634,-1.2099;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 16</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.088644" y3="-2.311595" z3="1.530222"/>
                        <atom elementType="Si" id="a2" x3="0.044652" y3="-1.15116" z3="0.786438"/>
                        <atom elementType="C" id="a3" x3="-1.250323" y3="-0.655787" z3="0.316605"/>
                        <atom elementType="C" id="a4" x3="-1.203294" y3="0.523022" z3="-0.436884"/>
                        <atom elementType="C" id="a5" x3="-2.374748" y3="1.081687" z3="-0.934062"/>
                        <atom elementType="C" id="a6" x3="-3.566155" y3="0.446636" z3="-0.66089"/>
                        <atom elementType="C" id="a7" x3="-3.621172" y3="-0.737614" z3="0.097362"/>
                        <atom elementType="C" id="a8" x3="-2.470818" y3="-1.290741" z3="0.585269"/>
                        <atom elementType="O" id="a9" x3="-0.043859" y3="1.15008" z3="-0.702163"/>
                        <atom elementType="C" id="a10" x3="1.156061" y3="0.717607" z3="-0.276563"/>
                        <atom elementType="C" id="a11" x3="1.293288" y3="-0.446784" z3="0.488407"/>
                        <atom elementType="C" id="a12" x3="2.554495" y3="-0.877744" z3="0.923357"/>
                        <atom elementType="C" id="a13" x3="3.65458" y3="-0.139593" z3="0.587161"/>
                        <atom elementType="C" id="a14" x3="3.508945" y3="1.028839" z3="-0.183414"/>
                        <atom elementType="C" id="a15" x3="2.276973" y3="1.465212" z3="-0.618377"/>
                        <atom elementType="H" id="a16" x3="-2.33723" y3="1.991939" z3="-1.51695"/>
                        <atom elementType="H" id="a17" x3="-4.485227" y3="0.87208" z3="-1.040502"/>
                        <atom elementType="H" id="a18" x3="-4.575873" y3="-1.20539" z3="0.290853"/>
                        <atom elementType="H" id="a19" x3="-2.49955" y3="-2.200543" z3="1.168927"/>
                        <atom elementType="H" id="a20" x3="2.652882" y3="-1.777222" z3="1.515347"/>
                        <atom elementType="H" id="a21" x3="4.638405" y3="-0.448811" z3="0.910189"/>
                        <atom elementType="H" id="a22" x3="4.389005" y3="1.601868" z3="-0.442398"/>
                        <atom elementType="H" id="a23" x3="2.170217" y3="2.363912" z3="-1.210535"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0886,-2.3116,1.5302;.0447,-1.1512,.7864;-1.2503,-.6558,.3166;-1.2033,.523,-.4369;-2.3747,1.0817,-.9341;-3.5662,.4466,-.6609;-3.6212,-.7376,.0974;-2.4708,-1.2907,.5853;-.0439,1.1501,-.7022;1.1561,.7176,-.2766;1.2933,-.4468,.4884;2.5545,-.8777,.9234;3.6546,-.1396,.5872;3.5089,1.0288,-.1834;2.277,1.4652,-.6184;-2.3372,1.9919,-1.517;-4.4852,.8721,-1.0405;-4.5759,-1.2054,.2909;-2.4996,-2.2005,1.1689;2.6529,-1.7772,1.5153;4.6384,-.4488,.9102;4.389,1.6019,-.4424;2.1702,2.3639,-1.2105;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.091767" y3="-2.410689" z3="1.593302"/>
                        <atom elementType="Si" id="a2" x3="0.045983" y3="-1.187353" z3="0.809431"/>
                        <atom elementType="C" id="a3" x3="-1.305062" y3="-0.661113" z3="0.313416"/>
                        <atom elementType="C" id="a4" x3="-1.217499" y3="0.510549" z3="-0.430632"/>
                        <atom elementType="C" id="a5" x3="-2.379104" y3="1.083023" z3="-0.935374"/>
                        <atom elementType="C" id="a6" x3="-3.581071" y3="0.458765" z3="-0.67035"/>
                        <atom elementType="C" id="a7" x3="-3.658102" y3="-0.725449" z3="0.085219"/>
                        <atom elementType="C" id="a8" x3="-2.513633" y3="-1.290767" z3="0.580134"/>
                        <atom elementType="O" id="a9" x3="-0.043003" y3="1.130032" z3="-0.689209"/>
                        <atom elementType="C" id="a10" x3="1.171256" y3="0.707467" z3="-0.268266"/>
                        <atom elementType="C" id="a11" x3="1.348051" y3="-0.443239" z3="0.492697"/>
                        <atom elementType="C" id="a12" x3="2.597079" y3="-0.870788" z3="0.923999"/>
                        <atom elementType="C" id="a13" x3="3.69039" y3="-0.121389" z3="0.579879"/>
                        <atom elementType="C" id="a14" x3="3.52291" y3="1.043412" z3="-0.190971"/>
                        <atom elementType="C" id="a15" x3="2.281278" y3="1.467222" z3="-0.619081"/>
                        <atom elementType="H" id="a16" x3="-2.329192" y3="1.993619" z3="-1.516925"/>
                        <atom elementType="H" id="a17" x3="-4.492107" y3="0.895655" z3="-1.056268"/>
                        <atom elementType="H" id="a18" x3="-4.619921" y3="-1.181883" z3="0.270636"/>
                        <atom elementType="H" id="a19" x3="-2.553032" y3="-2.201007" z3="1.162771"/>
                        <atom elementType="H" id="a20" x3="2.706312" y3="-1.768933" z3="1.5164"/>
                        <atom elementType="H" id="a21" x3="4.680471" y3="-0.41805" z3="0.89565"/>
                        <atom elementType="H" id="a22" x3="4.394043" y3="1.626583" z3="-0.457471"/>
                        <atom elementType="H" id="a23" x3="2.162086" y3="2.36423" z3="-1.211588"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0918,-2.4107,1.5933;.046,-1.1874,.8094;-1.3051,-.6611,.3134;-1.2175,.5105,-.4306;-2.3791,1.083,-.9354;-3.5811,.4588,-.6704;-3.6581,-.7254,.0852;-2.5136,-1.2908,.5801;-.043,1.13,-.6892;1.1713,.7075,-.2683;1.3481,-.4432,.4927;2.5971,-.8708,.924;3.6904,-.1214,.5799;3.5229,1.0434,-.191;2.2813,1.4672,-.6191;-2.3292,1.9936,-1.5169;-4.4921,.8957,-1.0563;-4.6199,-1.1819,.2706;-2.553,-2.201,1.1628;2.7063,-1.7689,1.5164;4.6805,-.418,.8956;4.394,1.6266,-.4575;2.1621,2.3642,-1.2116;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.094591" y3="-2.511235" z3="1.65727"/>
                        <atom elementType="Si" id="a2" x3="0.047712" y3="-1.233054" z3="0.838495"/>
                        <atom elementType="C" id="a3" x3="-1.355073" y3="-0.673925" z3="0.315559"/>
                        <atom elementType="C" id="a4" x3="-1.228816" y3="0.495991" z3="-0.422708"/>
                        <atom elementType="C" id="a5" x3="-2.379355" y3="1.084176" z3="-0.936052"/>
                        <atom elementType="C" id="a6" x3="-3.593596" y3="0.473873" z3="-0.68142"/>
                        <atom elementType="C" id="a7" x3="-3.700281" y3="-0.709723" z3="0.070154"/>
                        <atom elementType="C" id="a8" x3="-2.565738" y3="-1.29346" z3="0.57559"/>
                        <atom elementType="O" id="a9" x3="-0.041969" y3="1.106011" z3="-0.673687"/>
                        <atom elementType="C" id="a10" x3="1.183822" y3="0.694792" z3="-0.258676"/>
                        <atom elementType="C" id="a11" x3="1.398795" y3="-0.447932" z3="0.501742"/>
                        <atom elementType="C" id="a12" x3="2.649185" y3="-0.864952" z3="0.926484"/>
                        <atom elementType="C" id="a13" x3="3.731137" y3="-0.098792" z3="0.570355"/>
                        <atom elementType="C" id="a14" x3="3.53428" y3="1.060559" z3="-0.200462"/>
                        <atom elementType="C" id="a15" x3="2.281525" y3="1.468386" z3="-0.61971"/>
                        <atom elementType="H" id="a16" x3="-2.315547" y3="1.995017" z3="-1.515979"/>
                        <atom elementType="H" id="a17" x3="-4.493781" y3="0.925711" z3="-1.075536"/>
                        <atom elementType="H" id="a18" x3="-4.671924" y3="-1.149704" z3="0.243886"/>
                        <atom elementType="H" id="a19" x3="-2.621615" y3="-2.204033" z3="1.156456"/>
                        <atom elementType="H" id="a20" x3="2.775106" y3="-1.760701" z3="1.519315"/>
                        <atom elementType="H" id="a21" x3="4.729764" y3="-0.377344" z3="0.875571"/>
                        <atom elementType="H" id="a22" x3="4.393375" y3="1.656908" z3="-0.476765"/>
                        <atom elementType="H" id="a23" x3="2.148304" y3="2.36333" z3="-1.212482"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0946,-2.5112,1.6573;.0477,-1.2331,.8385;-1.3551,-.6739,.3156;-1.2288,.496,-.4227;-2.3794,1.0842,-.9361;-3.5936,.4739,-.6814;-3.7003,-.7097,.0702;-2.5657,-1.2935,.5756;-.042,1.106,-.6737;1.1838,.6948,-.2587;1.3988,-.4479,.5017;2.6492,-.865,.9265;3.7311,-.0988,.5704;3.5343,1.0606,-.2005;2.2815,1.4684,-.6197;-2.3155,1.995,-1.516;-4.4938,.9257,-1.0755;-4.6719,-1.1497,.2439;-2.6216,-2.204,1.1565;2.7751,-1.7607,1.5193;4.7298,-.3773,.8756;4.3934,1.6569,-.4768;2.1483,2.3633,-1.2125;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.096695" y3="-2.611407" z3="1.720971"/>
                        <atom elementType="Si" id="a2" x3="0.049855" y3="-1.290348" z3="0.874965"/>
                        <atom elementType="C" id="a3" x3="-1.396061" y3="-0.69691" z3="0.325262"/>
                        <atom elementType="C" id="a4" x3="-1.23587" y3="0.476763" z3="-0.411282"/>
                        <atom elementType="C" id="a5" x3="-2.372568" y3="1.083708" z3="-0.934812"/>
                        <atom elementType="C" id="a6" x3="-3.600512" y3="0.49333" z3="-0.694596"/>
                        <atom elementType="C" id="a7" x3="-3.743694" y3="-0.688217" z3="0.051221"/>
                        <atom elementType="C" id="a8" x3="-2.625757" y3="-1.296833" z3="0.570527"/>
                        <atom elementType="O" id="a9" x3="-0.040608" y3="1.075306" z3="-0.653855"/>
                        <atom elementType="C" id="a10" x3="1.192631" y3="0.676749" z3="-0.246111"/>
                        <atom elementType="C" id="a11" x3="1.441457" y3="-0.464352" z3="0.517255"/>
                        <atom elementType="C" id="a12" x3="2.709333" y3="-0.858554" z3="0.929517"/>
                        <atom elementType="C" id="a13" x3="3.772706" y3="-0.070247" z3="0.557057"/>
                        <atom elementType="C" id="a14" x3="3.539787" y3="1.081185" z3="-0.212814"/>
                        <atom elementType="C" id="a15" x3="2.274949" y3="1.466806" z3="-0.619372"/>
                        <atom elementType="H" id="a16" x3="-2.2914" y3="1.994581" z3="-1.512524"/>
                        <atom elementType="H" id="a17" x3="-4.486287" y3="0.964261" z3="-1.099117"/>
                        <atom elementType="H" id="a18" x3="-4.727355" y3="-1.10655" z3="0.209664"/>
                        <atom elementType="H" id="a19" x3="-2.705611" y3="-2.207314" z3="1.148464"/>
                        <atom elementType="H" id="a20" x3="2.859503" y3="-1.750215" z3="1.522583"/>
                        <atom elementType="H" id="a21" x3="4.78169" y3="-0.325062" z3="0.848307"/>
                        <atom elementType="H" id="a22" x3="4.382917" y3="1.694332" z3="-0.501628"/>
                        <atom elementType="H" id="a23" x3="2.124101" y3="2.358884" z3="-1.212281"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0967,-2.6114,1.721;.0499,-1.2903,.875;-1.3961,-.6969,.3253;-1.2359,.4768,-.4113;-2.3726,1.0837,-.9348;-3.6005,.4933,-.6946;-3.7437,-.6882,.0512;-2.6258,-1.2968,.5705;-.0406,1.0753,-.6539;1.1926,.6767,-.2461;1.4415,-.4644,.5173;2.7093,-.8586,.9295;3.7727,-.0702,.5571;3.5398,1.0812,-.2128;2.2749,1.4668,-.6194;-2.2914,1.9946,-1.5125;-4.4863,.9643,-1.0991;-4.7274,-1.1065,.2097;-2.7056,-2.2073,1.1485;2.8595,-1.7502,1.5226;4.7817,-.3251,.8483;4.3829,1.6943,-.5016;2.1241,2.3589,-1.2123;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.09835" y3="-2.708991" z3="1.783478"/>
                        <atom elementType="Si" id="a2" x3="0.052467" y3="-1.358469" z3="0.918457"/>
                        <atom elementType="C" id="a3" x3="-1.426179" y3="-0.729918" z3="0.342675"/>
                        <atom elementType="C" id="a4" x3="-1.238401" y3="0.450294" z3="-0.394672"/>
                        <atom elementType="C" id="a5" x3="-2.356938" y3="1.0803" z3="-0.930602"/>
                        <atom elementType="C" id="a6" x3="-3.599854" y3="0.517975" z3="-0.710179"/>
                        <atom elementType="C" id="a7" x3="-3.782097" y3="-0.659911" z3="0.028524"/>
                        <atom elementType="C" id="a8" x3="-2.687406" y3="-1.297033" z3="0.563221"/>
                        <atom elementType="O" id="a9" x3="-0.038858" y3="1.035993" z3="-0.628575"/>
                        <atom elementType="C" id="a10" x3="1.197579" y3="0.650748" z3="-0.228957"/>
                        <atom elementType="C" id="a11" x3="1.474272" y3="-0.492555" z3="0.539047"/>
                        <atom elementType="C" id="a12" x3="2.770981" y3="-0.848779" z3="0.930404"/>
                        <atom elementType="C" id="a13" x3="3.808747" y3="-0.035822" z3="0.539214"/>
                        <atom elementType="C" id="a14" x3="3.537334" y3="1.105806" z3="-0.228465"/>
                        <atom elementType="C" id="a15" x3="2.259811" y3="1.460881" z3="-0.617264"/>
                        <atom elementType="H" id="a16" x3="-2.252098" y3="1.99074" z3="-1.505034"/>
                        <atom elementType="H" id="a17" x3="-4.467777" y3="1.011385" z3="-1.126827"/>
                        <atom elementType="H" id="a18" x3="-4.778118" y3="-1.054118" z3="0.169999"/>
                        <atom elementType="H" id="a19" x3="-2.797991" y3="-2.206754" z3="1.136894"/>
                        <atom elementType="H" id="a20" x3="2.952148" y3="-1.734614" z3="1.523157"/>
                        <atom elementType="H" id="a21" x3="4.828227" y3="-0.264416" z3="0.814778"/>
                        <atom elementType="H" id="a22" x3="4.360766" y3="1.738601" z3="-0.531822"/>
                        <atom elementType="H" id="a23" x3="2.084938" y3="2.348554" z3="-1.210048"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0984,-2.709,1.7835;.0525,-1.3585,.9185;-1.4262,-.7299,.3427;-1.2384,.4503,-.3947;-2.3569,1.0803,-.9306;-3.5999,.518,-.7102;-3.7821,-.6599,.0285;-2.6874,-1.297,.5632;-.0389,1.036,-.6286;1.1976,.6507,-.229;1.4743,-.4926,.539;2.771,-.8488,.9304;3.8087,-.0358,.5392;3.5373,1.1058,-.2285;2.2598,1.4609,-.6173;-2.2521,1.9907,-1.505;-4.4678,1.0114,-1.1268;-4.7781,-1.0541,.17;-2.798,-2.2068,1.1369;2.9521,-1.7346,1.5232;4.8282,-.2644,.8148;4.3608,1.7386,-.5318;2.0849,2.3486,-1.21;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.099097" y3="-2.780372" z3="1.829597"/>
                        <atom elementType="Si" id="a2" x3="0.054773" y3="-1.418081" z3="0.956541"/>
                        <atom elementType="C" id="a3" x3="-1.441018" y3="-0.761296" z3="0.360844"/>
                        <atom elementType="C" id="a4" x3="-1.237267" y3="0.423858" z3="-0.377695"/>
                        <atom elementType="C" id="a5" x3="-2.338076" y3="1.075305" z3="-0.925077"/>
                        <atom elementType="C" id="a6" x3="-3.593626" y3="0.541144" z3="-0.724128"/>
                        <atom elementType="C" id="a7" x3="-3.80442" y3="-0.63344" z3="0.009178"/>
                        <atom elementType="C" id="a8" x3="-2.730861" y3="-1.292427" z3="0.555041"/>
                        <atom elementType="O" id="a9" x3="-0.037185" y3="0.999476" z3="-0.605444"/>
                        <atom elementType="C" id="a10" x3="1.198858" y3="0.624041" z3="-0.211995"/>
                        <atom elementType="C" id="a11" x3="1.491875" y3="-0.521705" z3="0.559431"/>
                        <atom elementType="C" id="a12" x3="2.814267" y3="-0.837384" z3="0.927782"/>
                        <atom elementType="C" id="a13" x3="3.828936" y3="-0.005851" z3="0.522513"/>
                        <atom elementType="C" id="a14" x3="3.52934" y3="1.128156" z3="-0.243023"/>
                        <atom elementType="C" id="a15" x3="2.241529" y3="1.452799" z3="-0.614272"/>
                        <atom elementType="H" id="a16" x3="-2.208001" y3="1.984676" z3="-1.495894"/>
                        <atom elementType="H" id="a17" x3="-4.445824" y3="1.053192" z3="-1.150724"/>
                        <atom elementType="H" id="a18" x3="-4.808745" y3="-1.010225" z3="0.138653"/>
                        <atom elementType="H" id="a19" x3="-2.868937" y3="-2.201053" z3="1.124514"/>
                        <atom elementType="H" id="a20" x3="3.023159" y3="-1.71776" z3="1.51958"/>
                        <atom elementType="H" id="a21" x3="4.855386" y3="-0.215649" z3="0.786761"/>
                        <atom elementType="H" id="a22" x3="4.335505" y3="1.777277" z3="-0.558091"/>
                        <atom elementType="H" id="a23" x3="2.041136" y3="2.335219" z3="-1.206692"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0991,-2.7804,1.8296;.0548,-1.4181,.9565;-1.441,-.7613,.3608;-1.2373,.4239,-.3777;-2.3381,1.0753,-.9251;-3.5936,.5411,-.7241;-3.8044,-.6334,.0092;-2.7309,-1.2924,.555;-.0372,.9995,-.6054;1.1989,.624,-.212;1.4919,-.5217,.5594;2.8143,-.8374,.9278;3.8289,-.0059,.5225;3.5293,1.1282,-.243;2.2415,1.4528,-.6143;-2.208,1.9847,-1.4959;-4.4458,1.0532,-1.1507;-4.8087,-1.0102,.1387;-2.8689,-2.2011,1.1245;3.0232,-1.7178,1.5196;4.8554,-.2156,.7868;4.3355,1.7773,-.5581;2.0411,2.3352,-1.2067;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.098881" y3="-2.816195" z3="1.853002"/>
                        <atom elementType="Si" id="a2" x3="0.05625" y3="-1.456048" z3="0.980769"/>
                        <atom elementType="C" id="a3" x3="-1.443786" y3="-0.781588" z3="0.373363"/>
                        <atom elementType="C" id="a4" x3="-1.235023" y3="0.405786" z3="-0.365926"/>
                        <atom elementType="C" id="a5" x3="-2.324086" y3="1.071352" z3="-0.920863"/>
                        <atom elementType="C" id="a6" x3="-3.587721" y3="0.556705" z3="-0.733274"/>
                        <atom elementType="C" id="a7" x3="-3.81227" y3="-0.616506" z3="-0.002252"/>
                        <atom elementType="C" id="a8" x3="-2.751055" y3="-1.286447" z3="0.548796"/>
                        <atom elementType="O" id="a9" x3="-0.036086" y3="0.976527" z3="-0.591176"/>
                        <atom elementType="C" id="a10" x3="1.198267" y3="0.605372" z3="-0.200423"/>
                        <atom elementType="C" id="a11" x3="1.496625" y3="-0.541817" z3="0.572435"/>
                        <atom elementType="C" id="a12" x3="2.834366" y3="-0.828505" z3="0.923922"/>
                        <atom elementType="C" id="a13" x3="3.835507" y3="0.012364" z3="0.511892"/>
                        <atom elementType="C" id="a14" x3="3.522182" y3="1.142918" z3="-0.252799"/>
                        <atom elementType="C" id="a15" x3="2.227901" y3="1.446507" z3="-0.611867"/>
                        <atom elementType="H" id="a16" x3="-2.174337" y3="1.979466" z3="-1.488797"/>
                        <atom elementType="H" id="a17" x3="-4.430486" y3="1.079322" z3="-1.165509"/>
                        <atom elementType="H" id="a18" x3="-4.819929" y3="-0.985982" z3="0.122451"/>
                        <atom elementType="H" id="a19" x3="-2.906666" y3="-2.194239" z3="1.115447"/>
                        <atom elementType="H" id="a20" x3="3.060932" y3="-1.705397" z3="1.514765"/>
                        <atom elementType="H" id="a21" x3="4.86473" y3="-0.189544" z3="0.771534"/>
                        <atom elementType="H" id="a22" x3="4.318024" y3="1.801367" z3="-0.57429"/>
                        <atom elementType="H" id="a23" x3="2.00768" y3="2.32448" z3="-1.203802"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0989,-2.8162,1.853;.0563,-1.456,.9808;-1.4438,-.7816,.3734;-1.235,.4058,-.3659;-2.3241,1.0714,-.9209;-3.5877,.5567,-.7333;-3.8123,-.6165,-.0023;-2.7511,-1.2864,.5488;-.0361,.9765,-.5912;1.1983,.6054,-.2004;1.4966,-.5418,.5724;2.8344,-.8285,.9239;3.8355,.0124,.5119;3.5222,1.1429,-.2528;2.2279,1.4465,-.6119;-2.1743,1.9795,-1.4888;-4.4305,1.0793,-1.1655;-4.8199,-.986,.1225;-2.9067,-2.1942,1.1154;3.0609,-1.7054,1.5148;4.8647,-.1895,.7715;4.318,1.8014,-.5743;2.0077,2.3245,-1.2038;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.097915" y3="-2.832552" z3="1.863941"/>
                        <atom elementType="Si" id="a2" x3="0.057314" y3="-1.483162" z3="0.997967"/>
                        <atom elementType="C" id="a3" x3="-1.440396" y3="-0.795159" z3="0.382258"/>
                        <atom elementType="C" id="a4" x3="-1.232425" y3="0.393045" z3="-0.35756"/>
                        <atom elementType="C" id="a5" x3="-2.313733" y3="1.068249" z3="-0.917701"/>
                        <atom elementType="C" id="a6" x3="-3.583016" y3="0.567758" z3="-0.739691"/>
                        <atom elementType="C" id="a7" x3="-3.813469" y3="-0.605267" z3="-0.009207"/>
                        <atom elementType="C" id="a8" x3="-2.758985" y3="-1.280104" z3="0.543835"/>
                        <atom elementType="O" id="a9" x3="-0.035364" y3="0.96237" z3="-0.582672"/>
                        <atom elementType="C" id="a10" x3="1.196826" y3="0.591877" z3="-0.192269"/>
                        <atom elementType="C" id="a11" x3="1.49479" y3="-0.5563" z3="0.580956"/>
                        <atom elementType="C" id="a12" x3="2.842338" y3="-0.821315" z3="0.919651"/>
                        <atom elementType="C" id="a13" x3="3.835962" y3="0.023887" z3="0.504882"/>
                        <atom elementType="C" id="a14" x3="3.516539" y3="1.153382" z3="-0.259736"/>
                        <atom elementType="C" id="a15" x3="2.217736" y3="1.441673" z3="-0.609904"/>
                        <atom elementType="H" id="a16" x3="-2.147357" y3="1.975028" z3="-1.483137"/>
                        <atom elementType="H" id="a17" x3="-4.420137" y3="1.096391" z3="-1.175156"/>
                        <atom elementType="H" id="a18" x3="-4.821752" y3="-0.973287" z3="0.114902"/>
                        <atom elementType="H" id="a19" x3="-2.926853" y3="-2.187296" z3="1.108499"/>
                        <atom elementType="H" id="a20" x3="3.081235" y3="-1.695821" z3="1.509697"/>
                        <atom elementType="H" id="a21" x3="4.86569" y3="-0.176386" z3="0.763862"/>
                        <atom elementType="H" id="a22" x3="4.306225" y3="1.817199" z3="-0.58477"/>
                        <atom elementType="H" id="a23" x3="1.980817" y3="2.315689" z3="-1.201249"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0979,-2.8326,1.8639;.0573,-1.4832,.998;-1.4404,-.7952,.3823;-1.2324,.393,-.3576;-2.3137,1.0682,-.9177;-3.583,.5678,-.7397;-3.8135,-.6053,-.0092;-2.759,-1.2801,.5438;-.0354,.9624,-.5827;1.1968,.5919,-.1923;1.4948,-.5563,.581;2.8423,-.8213,.9197;3.836,.0239,.5049;3.5165,1.1534,-.2597;2.2177,1.4417,-.6099;-2.1474,1.975,-1.4831;-4.4201,1.0964,-1.1752;-4.8218,-.9733,.1149;-2.9269,-2.1873,1.1085;3.0812,-1.6958,1.5097;4.8657,-.1764,.7639;4.3062,1.8172,-.5848;1.9808,2.3157,-1.2012;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.096465" y3="-2.829983" z3="1.862543"/>
                        <atom elementType="Si" id="a2" x3="0.057806" y3="-1.495188" z3="1.005339"/>
                        <atom elementType="C" id="a3" x3="-1.4339" y3="-0.798936" z3="0.38516"/>
                        <atom elementType="C" id="a4" x3="-1.230347" y3="0.388859" z3="-0.35486"/>
                        <atom elementType="C" id="a5" x3="-2.309868" y3="1.066895" z3="-0.916581"/>
                        <atom elementType="C" id="a6" x3="-3.581179" y3="0.571626" z3="-0.741873"/>
                        <atom elementType="C" id="a7" x3="-3.810284" y3="-0.601962" z3="-0.010551"/>
                        <atom elementType="C" id="a8" x3="-2.755862" y3="-1.275782" z3="0.541588"/>
                        <atom elementType="O" id="a9" x3="-0.035179" y3="0.96015" z3="-0.581895"/>
                        <atom elementType="C" id="a10" x3="1.195134" y3="0.58704" z3="-0.189707"/>
                        <atom elementType="C" id="a11" x3="1.489074" y3="-0.561505" z3="0.583013"/>
                        <atom elementType="C" id="a12" x3="2.83942" y3="-0.817877" z3="0.916611"/>
                        <atom elementType="C" id="a13" x3="3.832698" y3="0.026779" z3="0.502921"/>
                        <atom elementType="C" id="a14" x3="3.51432" y3="1.157164" z3="-0.262062"/>
                        <atom elementType="C" id="a15" x3="2.213864" y3="1.439717" z3="-0.608994"/>
                        <atom elementType="H" id="a16" x3="-2.134719" y3="1.972847" z3="-1.480726"/>
                        <atom elementType="H" id="a17" x3="-4.417412" y3="1.101049" z3="-1.177777"/>
                        <atom elementType="H" id="a18" x3="-4.817045" y3="-0.973185" z3="0.116233"/>
                        <atom elementType="H" id="a19" x3="-2.928389" y3="-2.182794" z3="1.105622"/>
                        <atom elementType="H" id="a20" x3="3.082989" y3="-1.691611" z3="1.506335"/>
                        <atom elementType="H" id="a21" x3="4.861138" y3="-0.176856" z3="0.764336"/>
                        <atom elementType="H" id="a22" x3="4.303007" y3="1.821827" z3="-0.587368"/>
                        <atom elementType="H" id="a23" x3="1.968169" y3="2.311623" z3="-1.199909"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0965,-2.83,1.8625;.0578,-1.4952,1.0053;-1.4339,-.7989,.3852;-1.2303,.3889,-.3549;-2.3099,1.0669,-.9166;-3.5812,.5716,-.7419;-3.8103,-.602,-.0106;-2.7559,-1.2758,.5416;-.0352,.9601,-.5819;1.1951,.587,-.1897;1.4891,-.5615,.583;2.8394,-.8179,.9166;3.8327,.0268,.5029;3.5143,1.1572,-.2621;2.2139,1.4397,-.609;-2.1347,1.9728,-1.4807;-4.4174,1.101,-1.1778;-4.817,-.9732,.1162;-2.9284,-2.1828,1.1056;3.083,-1.6916,1.5063;4.8611,-.1769,.7643;4.303,1.8218,-.5874;1.9682,2.3116,-1.1999;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.095323" y3="-2.819739" z3="1.855803"/>
                        <atom elementType="Si" id="a2" x3="0.057776" y3="-1.493583" z3="1.003904"/>
                        <atom elementType="C" id="a3" x3="-1.429849" y3="-0.794536" z3="0.382533"/>
                        <atom elementType="C" id="a4" x3="-1.229602" y3="0.392336" z3="-0.357311"/>
                        <atom elementType="C" id="a5" x3="-2.312041" y3="1.067374" z3="-0.917427"/>
                        <atom elementType="C" id="a6" x3="-3.582076" y3="0.568982" z3="-0.740251"/>
                        <atom elementType="C" id="a7" x3="-3.806929" y3="-0.604991" z3="-0.007899"/>
                        <atom elementType="C" id="a8" x3="-2.748627" y3="-1.275149" z3="0.542242"/>
                        <atom elementType="O" id="a9" x3="-0.035401" y3="0.966478" z3="-0.586449"/>
                        <atom elementType="C" id="a10" x3="1.19411" y3="0.590251" z3="-0.192177"/>
                        <atom elementType="C" id="a11" x3="1.484957" y3="-0.5580" z3="0.579807"/>
                        <atom elementType="C" id="a12" x3="2.832434" y3="-0.818585" z3="0.916039"/>
                        <atom elementType="C" id="a13" x3="3.829711" y3="0.023253" z3="0.505002"/>
                        <atom elementType="C" id="a14" x3="3.51539" y3="1.154846" z3="-0.260208"/>
                        <atom elementType="C" id="a15" x3="2.21593" y3="1.44063" z3="-0.609263"/>
                        <atom elementType="H" id="a16" x3="-2.138069" y3="1.973384" z3="-1.481889"/>
                        <atom elementType="H" id="a17" x3="-4.420602" y3="1.095891" z3="-1.174786"/>
                        <atom elementType="H" id="a18" x3="-4.811928" y3="-0.979877" z3="0.121772"/>
                        <atom elementType="H" id="a19" x3="-2.918906" y3="-2.182292" z3="1.106878"/>
                        <atom elementType="H" id="a20" x3="3.073741" y3="-1.692898" z3="1.505946"/>
                        <atom elementType="H" id="a21" x3="4.856661" y3="-0.184277" z3="0.769062"/>
                        <atom elementType="H" id="a22" x3="4.306489" y3="1.817486" z3="-0.58377"/>
                        <atom elementType="H" id="a23" x3="1.971408" y3="2.312911" z3="-1.200157"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0953,-2.8197,1.8558;.0578,-1.4936,1.0039;-1.4298,-.7945,.3825;-1.2296,.3923,-.3573;-2.312,1.0674,-.9174;-3.5821,.569,-.7403;-3.8069,-.605,-.0079;-2.7486,-1.2751,.5422;-.0354,.9665,-.5864;1.1941,.5903,-.1922;1.485,-.558,.5798;2.8324,-.8186,.916;3.8297,.0233,.505;3.5154,1.1548,-.2602;2.2159,1.4406,-.6093;-2.1381,1.9734,-1.4819;-4.4206,1.0959,-1.1748;-4.8119,-.9799,.1218;-2.9189,-2.1823,1.1069;3.0737,-1.6929,1.5059;4.8567,-.1843,.7691;4.3065,1.8175,-.5838;1.9714,2.3129,-1.2002;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.094465" y3="-2.812506" z3="1.850683"/>
                        <atom elementType="Si" id="a2" x3="0.057668" y3="-1.489785" z3="1.001045"/>
                        <atom elementType="C" id="a3" x3="-1.428543" y3="-0.788541" z3="0.37857"/>
                        <atom elementType="C" id="a4" x3="-1.229439" y3="0.397525" z3="-0.360967"/>
                        <atom elementType="C" id="a5" x3="-2.315538" y3="1.068355" z3="-0.918764"/>
                        <atom elementType="C" id="a6" x3="-3.583508" y3="0.564976" z3="-0.737811"/>
                        <atom elementType="C" id="a7" x3="-3.805006" y3="-0.608953" z3="-0.00483"/>
                        <atom elementType="C" id="a8" x3="-2.742848" y3="-1.275979" z3="0.54366"/>
                        <atom elementType="O" id="a9" x3="-0.035668" y3="0.973696" z3="-0.591511"/>
                        <atom elementType="C" id="a10" x3="1.193536" y3="0.595362" z3="-0.195797"/>
                        <atom elementType="C" id="a11" x3="1.48337" y3="-0.552381" z3="0.575614"/>
                        <atom elementType="C" id="a12" x3="2.826892" y3="-0.820404" z3="0.916499"/>
                        <atom elementType="C" id="a13" x3="3.828205" y3="0.018993" z3="0.507722"/>
                        <atom elementType="C" id="a14" x3="3.517134" y3="1.151213" z3="-0.257466"/>
                        <atom elementType="C" id="a15" x3="2.219328" y3="1.442262" z3="-0.609878"/>
                        <atom elementType="H" id="a16" x3="-2.146316" y3="1.974723" z3="-1.484133"/>
                        <atom elementType="H" id="a17" x3="-4.424484" y3="1.089287" z3="-1.170894"/>
                        <atom elementType="H" id="a18" x3="-4.808959" y3="-0.985937" z3="0.126602"/>
                        <atom elementType="H" id="a19" x3="-2.909281" y3="-2.183248" z3="1.10917"/>
                        <atom elementType="H" id="a20" x3="3.064352" y3="-1.695521" z3="1.506709"/>
                        <atom elementType="H" id="a21" x3="4.85426" y3="-0.190772" z3="0.773361"/>
                        <atom elementType="H" id="a22" x3="4.310777" y3="1.811764" z3="-0.579258"/>
                        <atom elementType="H" id="a23" x3="1.979504" y3="2.315769" z3="-1.200926"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0945,-2.8125,1.8507;.0577,-1.4898,1.001;-1.4285,-.7885,.3786;-1.2294,.3975,-.361;-2.3155,1.0684,-.9188;-3.5835,.565,-.7378;-3.805,-.609,-.0048;-2.7428,-1.276,.5437;-.0357,.9737,-.5915;1.1935,.5954,-.1958;1.4834,-.5524,.5756;2.8269,-.8204,.9165;3.8282,.019,.5077;3.5171,1.1512,-.2575;2.2193,1.4423,-.6099;-2.1463,1.9747,-1.4841;-4.4245,1.0893,-1.1709;-4.809,-.9859,.1266;-2.9093,-2.1832,1.1092;3.0644,-1.6955,1.5067;4.8543,-.1908,.7734;4.3108,1.8118,-.5793;1.9795,2.3158,-1.2009;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.093802" y3="-2.810925" z3="1.849021"/>
                        <atom elementType="Si" id="a2" x3="0.057663" y3="-1.488561" z3="0.999874"/>
                        <atom elementType="C" id="a3" x3="-1.428906" y3="-0.784111" z3="0.375443"/>
                        <atom elementType="C" id="a4" x3="-1.229431" y3="0.401508" z3="-0.36388"/>
                        <atom elementType="C" id="a5" x3="-2.318189" y3="1.069161" z3="-0.919868"/>
                        <atom elementType="C" id="a6" x3="-3.58461" y3="0.562111" z3="-0.736016"/>
                        <atom elementType="C" id="a7" x3="-3.804566" y3="-0.611516" z3="-0.002808"/>
                        <atom elementType="C" id="a8" x3="-2.740068" y3="-1.276921" z3="0.544772"/>
                        <atom elementType="O" id="a9" x3="-0.03582" y3="0.978427" z3="-0.594997"/>
                        <atom elementType="C" id="a10" x3="1.193232" y3="0.599329" z3="-0.198658"/>
                        <atom elementType="C" id="a11" x3="1.483546" y3="-0.548015" z3="0.572484"/>
                        <atom elementType="C" id="a12" x3="2.824311" y3="-0.821794" z3="0.91711"/>
                        <atom elementType="C" id="a13" x3="3.828065" y3="0.016365" z3="0.509613"/>
                        <atom elementType="C" id="a14" x3="3.518473" y3="1.148626" z3="-0.255433"/>
                        <atom elementType="C" id="a15" x3="2.221927" y3="1.443558" z3="-0.610416"/>
                        <atom elementType="H" id="a16" x3="-2.153673" y3="1.975852" z3="-1.486136"/>
                        <atom elementType="H" id="a17" x3="-4.427014" y3="1.084971" z3="-1.168222"/>
                        <atom elementType="H" id="a18" x3="-4.808287" y3="-0.988892" z3="0.12918"/>
                        <atom elementType="H" id="a19" x3="-2.903485" y3="-2.184245" z3="1.110947"/>
                        <atom elementType="H" id="a20" x3="3.058786" y3="-1.697502" z3="1.507526"/>
                        <atom elementType="H" id="a21" x3="4.853906" y3="-0.19381" z3="0.775696"/>
                        <atom elementType="H" id="a22" x3="4.313531" y3="1.808072" z3="-0.576188"/>
                        <atom elementType="H" id="a23" x3="1.986709" y3="2.318211" z3="-1.201647"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0938,-2.8109,1.849;.0577,-1.4886,.9999;-1.4289,-.7841,.3754;-1.2294,.4015,-.3639;-2.3182,1.0692,-.9199;-3.5846,.5621,-.736;-3.8046,-.6115,-.0028;-2.7401,-1.2769,.5448;-.0358,.9784,-.595;1.1932,.5993,-.1987;1.4835,-.548,.5725;2.8243,-.8218,.9171;3.8281,.0164,.5096;3.5185,1.1486,-.2554;2.2219,1.4436,-.6104;-2.1537,1.9759,-1.4861;-4.427,1.085,-1.1682;-4.8083,-.9889,.1292;-2.9035,-2.1842,1.1109;3.0588,-1.6975,1.5075;4.8539,-.1938,.7757;4.3135,1.8081,-.5762;1.9867,2.3182,-1.2016;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.09347" y3="-2.813296" z3="1.850035"/>
                        <atom elementType="Si" id="a2" x3="0.057753" y3="-1.490076" z3="1.000635"/>
                        <atom elementType="C" id="a3" x3="-1.429531" y3="-0.783008" z3="0.374532"/>
                        <atom elementType="C" id="a4" x3="-1.229422" y3="0.40259" z3="-0.364808"/>
                        <atom elementType="C" id="a5" x3="-2.318875" y3="1.069398" z3="-0.920256"/>
                        <atom elementType="C" id="a6" x3="-3.584967" y3="0.561575" z3="-0.73561"/>
                        <atom elementType="C" id="a7" x3="-3.804975" y3="-0.61184" z3="-0.002407"/>
                        <atom elementType="C" id="a8" x3="-2.740172" y3="-1.277199" z3="0.545037"/>
                        <atom elementType="O" id="a9" x3="-0.03581" y3="0.979143" z3="-0.595809"/>
                        <atom elementType="C" id="a10" x3="1.193164" y3="0.600408" z3="-0.19956"/>
                        <atom elementType="C" id="a11" x3="1.484182" y3="-0.546867" z3="0.571624"/>
                        <atom elementType="C" id="a12" x3="2.824507" y3="-0.822036" z3="0.917343"/>
                        <atom elementType="C" id="a13" x3="3.828558" y3="0.01612" z3="0.510039"/>
                        <atom elementType="C" id="a14" x3="3.518882" y3="1.148186" z3="-0.254942"/>
                        <atom elementType="C" id="a15" x3="2.222619" y3="1.443922" z3="-0.610618"/>
                        <atom elementType="H" id="a16" x3="-2.156392" y3="1.976199" z3="-1.486944"/>
                        <atom elementType="H" id="a17" x3="-4.427466" y3="1.084413" z3="-1.167709"/>
                        <atom elementType="H" id="a18" x3="-4.808972" y3="-0.988594" z3="0.129335"/>
                        <atom elementType="H" id="a19" x3="-2.902601" y3="-2.184534" z3="1.111413"/>
                        <atom elementType="H" id="a20" x3="3.058037" y3="-1.697939" z3="1.507785"/>
                        <atom elementType="H" id="a21" x3="4.854612" y3="-0.193386" z3="0.775847"/>
                        <atom elementType="H" id="a22" x3="4.313954" y3="1.807693" z3="-0.5756"/>
                        <atom elementType="H" id="a23" x3="1.989346" y3="2.319027" z3="-1.201961"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0935,-2.8133,1.85;.0578,-1.4901,1.0006;-1.4295,-.783,.3745;-1.2294,.4026,-.3648;-2.3189,1.0694,-.9203;-3.585,.5616,-.7356;-3.805,-.6118,-.0024;-2.7402,-1.2772,.545;-.0358,.9791,-.5958;1.1932,.6004,-.1996;1.4842,-.5469,.5716;2.8245,-.822,.9173;3.8286,.0161,.51;3.5189,1.1482,-.2549;2.2226,1.4439,-.6106;-2.1564,1.9762,-1.4869;-4.4275,1.0844,-1.1677;-4.809,-.9886,.1293;-2.9026,-2.1845,1.1114;3.058,-1.6979,1.5078;4.8546,-.1934,.7758;4.314,1.8077,-.5756;1.9893,2.319,-1.202;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.093328" y3="-2.815212" z3="1.850914"/>
                        <atom elementType="Si" id="a2" x3="0.057827" y3="-1.491433" z3="1.001402"/>
                        <atom elementType="C" id="a3" x3="-1.429618" y3="-0.783222" z3="0.374606"/>
                        <atom elementType="C" id="a4" x3="-1.229395" y3="0.402451" z3="-0.364844"/>
                        <atom elementType="C" id="a5" x3="-2.318751" y3="1.069369" z3="-0.920293"/>
                        <atom elementType="C" id="a6" x3="-3.584979" y3="0.561865" z3="-0.735717"/>
                        <atom elementType="C" id="a7" x3="-3.805196" y3="-0.611503" z3="-0.002497"/>
                        <atom elementType="C" id="a8" x3="-2.740646" y3="-1.277088" z3="0.544959"/>
                        <atom elementType="O" id="a9" x3="-0.035759" y3="0.978556" z3="-0.59568"/>
                        <atom elementType="C" id="a10" x3="1.193168" y3="0.600263" z3="-0.199597"/>
                        <atom elementType="C" id="a11" x3="1.484336" y3="-0.547086" z3="0.571684"/>
                        <atom elementType="C" id="a12" x3="2.825006" y3="-0.821836" z3="0.91732"/>
                        <atom elementType="C" id="a13" x3="3.828773" y3="0.016506" z3="0.509971"/>
                        <atom elementType="C" id="a14" x3="3.518873" y3="1.148488" z3="-0.255042"/>
                        <atom elementType="C" id="a15" x3="2.222517" y3="1.44387" z3="-0.610656"/>
                        <atom elementType="H" id="a16" x3="-2.156683" y3="1.976172" z3="-1.487099"/>
                        <atom elementType="H" id="a17" x3="-4.427251" y3="1.084981" z3="-1.167895"/>
                        <atom elementType="H" id="a18" x3="-4.809402" y3="-0.987802" z3="0.129043"/>
                        <atom elementType="H" id="a19" x3="-2.90288" y3="-2.184435" z3="1.111364"/>
                        <atom elementType="H" id="a20" x3="3.058369" y3="-1.697791" z3="1.507746"/>
                        <atom elementType="H" id="a21" x3="4.854987" y3="-0.192515" z3="0.775585"/>
                        <atom elementType="H" id="a22" x3="4.313661" y3="1.808262" z3="-0.57582"/>
                        <atom elementType="H" id="a23" x3="1.989616" y3="2.319038" z3="-1.202054"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a16" order="S"/>
                        <bond atomRefs2="a6 a17" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a18" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a10 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a12 a20" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a21" order="S"/>
                        <bond atomRefs2="a14 a22" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a15 a23" order="S"/>
                     </bondArray>
                     <formula concise="C12H8FOSi">
                        <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">207.21170319999993</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0933,-2.8152,1.8509;.0578,-1.4914,1.0014;-1.4296,-.7832,.3746;-1.2294,.4025,-.3648;-2.3188,1.0694,-.9203;-3.585,.5619,-.7357;-3.8052,-.6115,-.0025;-2.7406,-1.2771,.545;-.0358,.9786,-.5957;1.1932,.6003,-.1996;1.4843,-.5471,.5717;2.825,-.8218,.9173;3.8288,.0165,.51;3.5189,1.1485,-.255;2.2225,1.4439,-.6107;-2.1567,1.9762,-1.4871;-4.4273,1.085,-1.1679;-4.8094,-.9878,.129;-2.9029,-2.1844,1.1114;3.0584,-1.6978,1.5077;4.855,-.1925,.7756;4.3137,1.8083,-.5758;1.9896,2.319,-1.2021;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.354019964762</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.524143941267</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.627640669954</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.684349408286</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.712741494154</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.725724828845</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.730036304632</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.731474814792</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.732403860672</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.732974590089</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.733214508872</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.733337019354</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.733394194734</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.733403871823</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.733402383060</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="23">-0.021578 0.540247 -0.246812 0.150814 -0.129905 -0.039236 -0.114963 -0.045340 -0.025683 0.150874 -0.246711 -0.045383 -0.114989 -0.039263 -0.129912 0.174987 0.170168 0.165585 0.168211 0.168131 0.165646 0.170142 0.174968</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="23">9.5233 12.6036 6.1593 5.6664 6.3172 6.1975 6.2143 6.3080 8.4232 5.6662 6.1588 6.3077 6.2154 6.1962 6.3174 0.7085 0.7086 0.7202 0.7254 0.7256 0.7198 0.7089 0.7086</array>
                     <array dataType="xsd:double" dictRef="o:za" size="23">9.0000 14.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="23">-0.5233 1.3964 -0.1593 0.3336 -0.3172 -0.1975 -0.2143 -0.3080 -0.4232 0.3338 -0.1588 -0.3077 -0.2154 -0.1962 -0.3174 0.2915 0.2914 0.2798 0.2746 0.2744 0.2802 0.2911 0.2914</array>
                     <array dataType="xsd:double" dictRef="o:va" size="23">0.9668 3.6807 3.6478 3.7418 3.7426 3.7741 3.7854 3.7746 2.2890 3.7417 3.6493 3.7742 3.7853 3.7743 3.7429 0.8850 0.8829 0.8892 0.8931 0.8931 0.8890 0.8830 0.8850</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="23">0.9668 3.6807 3.6478 3.7418 3.7426 3.7741 3.7854 3.7746 2.2890 3.7417 3.6493 3.7742 3.7853 3.7743 3.7429 0.8850 0.8829 0.8892 0.8931 0.8931 0.8890 0.8830 0.8850</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="23">0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="26">0.9611 1.2193 1.2195 1.2238 1.1543 0.1158 1.3317 1.0534 1.4590 0.8914 1.3222 0.8935 1.5376 0.8980 0.9022 1.0528 1.2240 1.3316 1.1547 1.5373 0.9022 1.3222 0.8979 1.4591 0.8936 0.8915</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="26">0 1 1 2 1 10 2 3 2 7 2 10 3 4 3 8 4 5 4 15 5 6 5 16 6 7 6 17 7 18 8 9 9 10 9 14 10 11 11 12 11 19 12 13 12 20 13 14 13 21 14 22</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="23">-0.523266 1.396368 -0.159301 0.333618 -0.317181 -0.197469 -0.214257 -0.307975 -0.423182 0.333780 -0.158843 -0.307680 -0.215370 -0.196238 -0.317399 0.291528 0.291439 0.279761 0.274599 0.274437 0.280156 0.291107 0.291367</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="244">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="244">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="244" units="nonsi:electronvolt">-1819.1226 -688.2412 -537.3243 -291.4162 -291.4146 -289.2160 -289.2149 -289.0680 -289.0671 -288.7312 -288.7303 -288.5412 -288.5389 -287.8254 -287.8232 -154.8341 -108.4130 -108.2146 -108.1146 -43.4988 -38.7126 -31.0956 -30.7560 -28.5421 -28.3799 -27.6217 -27.0423 -24.7213 -24.4401 -23.3021 -23.0949 -22.3002 -21.9009 -21.1206 -20.5231 -20.4799 -19.9631 -19.5257 -19.3807 -18.5883 -18.5510 -18.0986 -17.8143 -17.0336 -16.9875 -16.3762 -16.1510 -15.8411 -15.6991 -15.1691 -14.7684 -13.8029 -12.9215 -12.7278 -11.7802 -5.7141 -4.9541 -3.8455 -3.4575 -2.6096 -0.9780 -0.7528 0.3593 0.3656 0.5584 1.3292 1.3322 1.5544 1.9375 2.0601 2.2938 2.3552 3.3447 3.3468 3.3956 3.9287 4.2575 4.5756 4.7301 5.5244 5.5550 5.8750 6.8959 7.5773 7.6620 7.9151 8.8017 9.6629 9.7902 9.9288 10.4747 10.6744 11.0440 11.1528 11.5076 12.0404 12.1822 12.2436 12.3136 12.4464 12.4704 12.8368 13.0247 13.1241 13.1760 13.6242 13.9239 14.0318 14.1993 14.4541 15.3550 15.3775 15.8489 15.9986 16.5210 16.8894 17.5431 17.8344 19.1956 19.9041 20.9790 21.3436 21.6148 21.8747 22.1091 22.4849 22.5770 23.0488 23.3727 23.5750 23.7353 23.9596 24.2454 24.2506 24.7769 24.8537 25.6012 26.1402 26.2928 26.7112 26.8073 26.9636 28.2778 29.2442 29.3758 30.0037 30.0870 30.4384 30.5084 30.6140 31.1238 31.5262 31.8399 32.8271 33.0499 33.3938 34.6207 35.3290 35.8768 36.5459 36.6994 37.0097 37.0515 37.2052 37.7018 37.7824 37.8719 38.5054 40.1233 40.8740 41.6865 42.1823 42.5410 43.0260 43.2732 44.9669 45.6464 46.7001 48.2973 48.8117 49.5189 49.5724 50.5315 50.8282 51.6172 52.7414 52.8770 53.9494 53.9718 54.6060 55.4331 55.6981 55.8971 56.1553 56.3519 56.9524 57.2319 58.0068 58.0707 59.3272 59.4303 59.7552 59.9424 59.9876 61.6223 63.8179 66.4958 66.5796 66.9650 67.3518 67.9167 69.4313 69.6881 70.5981 70.7512 71.0912 71.4171 71.7309 72.0232 73.2179 74.6363 75.4162 76.2227 79.4955 79.7306 82.4160 88.2657 91.7048 91.9866 93.1226 357.6403 359.8440 367.9331 369.8621 371.6729 373.4215 381.7545 382.3137 382.9877 384.0248 391.9153 393.1101 697.2933 906.3075</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.093212" y3="-2.816079" z3="1.851119"/>
                  <atom elementType="Si" id="a2" x3="0.057871" y3="-1.492021" z3="1.001678"/>
                  <atom elementType="C" id="a3" x3="-1.429397" y3="-0.783355" z3="0.374676"/>
                  <atom elementType="C" id="a4" x3="-1.229358" y3="0.402354" z3="-0.364882"/>
                  <atom elementType="C" id="a5" x3="-2.318652" y3="1.069339" z3="-0.920315"/>
                  <atom elementType="C" id="a6" x3="-3.584964" y3="0.562035" z3="-0.735755"/>
                  <atom elementType="C" id="a7" x3="-3.805146" y3="-0.611337" z3="-0.002467"/>
                  <atom elementType="C" id="a8" x3="-2.740676" y3="-1.276941" z3="0.54491"/>
                  <atom elementType="O" id="a9" x3="-0.035723" y3="0.978223" z3="-0.595694"/>
                  <atom elementType="C" id="a10" x3="1.193155" y3="0.600156" z3="-0.199647"/>
                  <atom elementType="C" id="a11" x3="1.484165" y3="-0.547269" z3="0.571695"/>
                  <atom elementType="C" id="a12" x3="2.82505" y3="-0.821678" z3="0.917267"/>
                  <atom elementType="C" id="a13" x3="3.828719" y3="0.016679" z3="0.509992"/>
                  <atom elementType="C" id="a14" x3="3.518844" y3="1.148664" z3="-0.255086"/>
                  <atom elementType="C" id="a15" x3="2.222436" y3="1.443821" z3="-0.610693"/>
                  <atom elementType="H" id="a16" x3="-2.156788" y3="1.976133" z3="-1.487193"/>
                  <atom elementType="H" id="a17" x3="-4.427151" y3="1.085261" z3="-1.167941"/>
                  <atom elementType="H" id="a18" x3="-4.80942" y3="-0.987474" z3="0.129067"/>
                  <atom elementType="H" id="a19" x3="-2.902648" y3="-2.184307" z3="1.111371"/>
                  <atom elementType="H" id="a20" x3="3.058165" y3="-1.697696" z3="1.507709"/>
                  <atom elementType="H" id="a21" x3="4.854973" y3="-0.192168" z3="0.775608"/>
                  <atom elementType="H" id="a22" x3="4.313518" y3="1.808549" z3="-0.575887"/>
                  <atom elementType="H" id="a23" x3="1.989716" y3="2.319008" z3="-1.202133"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a11" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a16" order="S"/>
                  <bond atomRefs2="a6 a17" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a10 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a12 a20" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a21" order="S"/>
                  <bond atomRefs2="a14 a22" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a15 a23" order="S"/>
               </bondArray>
               <formula concise="C12H8FOSi">
                  <atomArray count="12 8 1 1 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">207.21170319999993</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C12H8FOSi/c13-15-11-7-3-1-5-9(11)14-10-6-2-4-8-12(10)15/h1-8H">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:6,14,7,13,5,15,8,12,4,10,3,11,1,9,2/E:(1,2)(3,4)(5,6)(7,8)(9,10)(11,12)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,15.3/rA:23nFSi3C3C3C3C3C3C3OC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s3s7;s4;s9;s2s10;s11;s12;s13;s10s14;s5;s6;s7;s8;s12;s13;s14;s15;/rC:.0932,-2.8161,1.8511;.0579,-1.492,1.0017;-1.4294,-.7834,.3747;-1.2294,.4024,-.3649;-2.3187,1.0693,-.9203;-3.585,.562,-.7358;-3.8051,-.6113,-.0025;-2.7407,-1.2769,.5449;-.0357,.9782,-.5957;1.1932,.6002,-.1996;1.4842,-.5473,.5717;2.8251,-.8217,.9173;3.8287,.0167,.51;3.5188,1.1487,-.2551;2.2224,1.4438,-.6107;-2.1568,1.9761,-1.4872;-4.4272,1.0853,-1.1679;-4.8094,-.9875,.1291;-2.9026,-2.1843,1.1114;3.0582,-1.6977,1.5077;4.855,-.1922,.7756;4.3135,1.8085,-.5759;1.9897,2.319,-1.2021;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-924.37381089</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1087.33596042</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2011.70977131</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-3408.34344661</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1396.63367531</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1847.65232991</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">923.27851902</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00118631</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">54.999978020224</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">54.999978020224</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">109.999956040448</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-58.201516886255</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-5.000590601647</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-63.202107487902</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016559869</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016538425</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016507061</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016476623</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016450609</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016444429</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016469641</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016500268</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016531487</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016555675</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016565458</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016569912</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016573728</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016576681</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016578264</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="244">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="244">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="244" units="nonsi:electronvolt">-1823.4042 -688.4292 -537.0598 -291.3007 -291.2882 -289.3559 -289.3300 -289.0540 -289.0451 -288.8337 -288.8303 -288.5830 -288.5786 -288.4546 -288.4480 -157.1627 -110.7757 -110.6669 -110.5670 -41.2426 -38.1146 -30.9781 -30.4481 -28.2607 -27.8266 -27.3354 -26.7961 -24.4749 -24.0580 -22.9651 -22.7121 -21.5011 -21.4669 -20.2370 -19.6016 -19.5083 -19.3876 -19.2343 -19.0759 -18.4520 -18.4416 -17.8997 -17.7297 -16.9337 -16.6829 -16.1980 -16.0802 -15.6153 -15.4437 -15.0239 -14.7462 -13.2754 -12.6889 -12.5727 -11.5599 -6.2940 -4.6522 -4.3044 -3.7627 -3.4931 -2.4498 -1.4578 -0.5327 -0.0698 0.6994 0.8313 1.3214 1.4103 1.4869 1.7483 2.2182 2.3520 2.7748 3.1386 3.2693 3.7223 4.0820 4.5824 4.6622 5.0582 5.5537 5.9563 6.3007 6.7829 7.3720 7.7859 7.9575 8.8053 9.0387 9.1812 9.9973 10.1803 10.2876 10.6849 11.0686 11.7610 11.7983 12.0772 12.1251 12.3238 12.7510 12.7753 12.8792 12.9129 13.0697 13.1410 13.2684 13.5118 13.6655 14.2151 14.6376 14.7410 14.8279 14.8834 15.6424 16.8345 17.0917 17.5176 18.0914 18.1892 18.3320 19.8577 19.9028 21.8742 21.9326 22.1780 22.4037 22.6151 22.7087 22.9990 23.2020 23.5242 23.7045 23.9051 24.3471 24.6899 24.9020 25.0939 25.9792 26.2432 26.2671 26.6048 27.1742 27.8842 28.8062 28.9040 29.1519 29.7539 29.8600 30.3266 30.4078 30.6632 31.7024 31.7184 31.9114 32.0880 32.3921 32.7538 33.5917 35.2733 35.6023 35.9915 36.6209 36.9297 37.3576 37.8798 37.9051 38.4518 38.7797 39.1328 40.1231 40.1963 40.3736 41.7014 42.6193 44.6998 44.9492 45.3657 46.9239 47.9889 48.6427 49.2424 49.2893 50.4599 50.5519 51.1562 51.4143 51.7432 52.5599 54.2190 54.3829 54.5151 55.1125 55.3839 55.4368 55.9896 56.5322 57.0796 57.5404 57.9236 58.4773 59.3438 59.5157 60.1401 60.3097 62.8205 63.7284 65.3951 67.1895 67.4072 67.4635 68.5039 69.7181 70.0620 70.2301 70.3337 71.0672 71.2494 71.4742 71.7373 71.7575 73.1678 75.1148 77.5012 77.7729 78.5993 82.0003 88.9336 90.3092 91.7384 356.8327 357.5449 367.7611 368.2663 369.7693 369.8693 380.1738 380.3583 381.7059 382.2863 391.4408 391.6348 696.9230 887.9543</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="23">-0.394876 1.282699 -0.280211 0.390754 -0.299572 -0.204293 -0.200326 -0.256432 -0.451285 0.389931 -0.280412 -0.256134 -0.200999 -0.203173 -0.300099 0.290230 0.287199 0.279972 0.274647 0.274527 0.280328 0.287049 0.290474</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="23">-0.165746 0.886814 -0.249353 0.119120 -0.130250 -0.053134 -0.114326 -0.079703 -0.048708 0.119583 -0.249593 -0.079907 -0.114278 -0.053162 -0.130131 0.173618 0.168128 0.165957 0.163578 0.163549 0.166008 0.168195 0.173742</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="23">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="23">F Si C C C C C C O C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="23">9.3949 12.7173 6.2802 5.6092 6.2996 6.2043 6.2003 6.2564 8.4513 5.6101 6.2804 6.2561 6.2010 6.2032 6.3001 0.7098 0.7128 0.7200 0.7254 0.7255 0.7197 0.7130 0.7095</array>
                     <array dataType="xsd:double" dictRef="o:za" size="23">9.0000 14.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="23">-0.3949 1.2827 -0.2802 0.3908 -0.2996 -0.2043 -0.2003 -0.2564 -0.4513 0.3899 -0.2804 -0.2561 -0.2010 -0.2032 -0.3001 0.2902 0.2872 0.2800 0.2746 0.2745 0.2803 0.2870 0.2905</array>
                     <array dataType="xsd:double" dictRef="o:va" size="23">1.0886 3.4994 3.6811 3.7444 3.7559 3.7811 3.7841 3.7884 2.2529 3.7450 3.6823 3.7869 3.7839 3.7809 3.7563 0.8852 0.8850 0.8884 0.8912 0.8913 0.8882 0.8850 0.8851</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="23">1.0886 3.4994 3.6811 3.7444 3.7559 3.7811 3.7841 3.7884 2.2529 3.7450 3.6823 3.7869 3.7839 3.7809 3.7563 0.8852 0.8850 0.8884 0.8912 0.8913 0.8882 0.8850 0.8851</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="23">-0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="25">1.0408 1.1177 1.1179 1.2554 1.2291 1.3353 1.0265 1.4632 0.8906 1.3255 0.8948 1.5308 0.8966 0.9018 1.0265 1.2557 1.3351 1.2285 1.5309 0.9021 1.3253 0.8965 1.4635 0.8949 0.8904</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="25">0 1 1 2 1 10 2 3 2 7 3 4 3 8 4 5 4 15 5 6 5 16 6 7 6 17 7 18 8 9 9 10 9 14 10 11 11 12 11 19 12 13 12 20 13 14 13 21 14 22</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.016579165</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-924.733401399953</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-0.23516 0.24639 0.01123 6.62242 -6.59210 0.03033 -4.17689 4.16812 -0.00877</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.03351</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">0.08517</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
