<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">8s4p1d 10s7p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">4s2p1d 4s3p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="20">1 2 3 4 4 3 4 4 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.192787" y3="2.557085" z3="-0.12628"/>
                  <atom elementType="Si" id="a2" x3="0.084497" y3="0.968629" z3="-0.111852"/>
                  <atom elementType="P" id="a3" x3="-1.833669" y3="0.289471" z3="-0.855485"/>
                  <atom elementType="C" id="a4" x3="-3.086948" y3="1.43955" z3="-0.147819"/>
                  <atom elementType="C" id="a5" x3="-2.14279" y3="-1.365658" z3="-0.10753"/>
                  <atom elementType="P" id="a6" x3="1.877334" y3="0.011095" z3="0.651971"/>
                  <atom elementType="C" id="a7" x3="3.297552" y3="0.89339" z3="-0.124031"/>
                  <atom elementType="C" id="a8" x3="1.875359" y3="-1.695745" z3="-0.046634"/>
                  <atom elementType="H" id="a9" x3="-4.036035" y3="1.225287" z3="-0.638187"/>
                  <atom elementType="H" id="a10" x3="-2.82438" y3="2.469647" z3="-0.381159"/>
                  <atom elementType="H" id="a11" x3="-3.210501" y3="1.327387" z3="0.926425"/>
                  <atom elementType="H" id="a12" x3="-3.087665" y3="-1.727919" z3="-0.511956"/>
                  <atom elementType="H" id="a13" x3="-1.376903" y3="-2.07454" z3="-0.417045"/>
                  <atom elementType="H" id="a14" x3="-2.214989" y3="-1.348017" z3="0.977007"/>
                  <atom elementType="H" id="a15" x3="4.204536" y3="0.530983" z3="0.359165"/>
                  <atom elementType="H" id="a16" x3="3.228834" y3="1.961817" z3="0.071058"/>
                  <atom elementType="H" id="a17" x3="3.374618" y3="0.719764" z3="-1.194394"/>
                  <atom elementType="H" id="a18" x3="2.740885" y3="-2.212177" z3="0.36801"/>
                  <atom elementType="H" id="a19" x3="1.942444" y3="-1.726925" z3="-1.131367"/>
                  <atom elementType="H" id="a20" x3="0.995136" y3="-2.243325" z3="0.285703"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a6" order="S"/>
                  <bond atomRefs2="a3 a5" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a4 a11" order="S"/>
                  <bond atomRefs2="a4 a10" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a5 a14" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a8" order="S"/>
                  <bond atomRefs2="a7 a16" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a8 a20" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
               </bondArray>
               <formula concise="C4H12FP2Si">
                  <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">157.0742252</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1928,2.5571,-.1263;.0845,.9686,-.1119;-1.8337,.2895,-.8555;-3.0869,1.4396,-.1478;-2.1428,-1.3657,-.1075;1.8773,.0111,.652;3.2976,.8934,-.124;1.8754,-1.6957,-.0466;-4.036,1.2253,-.6382;-2.8244,2.4696,-.3812;-3.2105,1.3274,.9264;-3.0877,-1.7279,-.512;-1.3769,-2.0745,-.417;-2.215,-1.348,.977;4.2045,.531,.3592;3.2288,1.9618,.0711;3.3746,.7198,-1.1944;2.7409,-2.2122,.368;1.9424,-1.7269,-1.1314;.9951,-2.2433,.2857;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">530</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">530</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C4FH12P2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">88</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">153</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">640.1408574660 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.566e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.002 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">530</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">530</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C4FH12P2Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">88</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">153</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">640.2465204273 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.538e-03</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.002 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.006 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="F" id="a1" x3="0.19278701" y3="2.55708547" z3="-0.12628037">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="0.08449664" y3="0.96862925" z3="-0.11185187">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="P" id="a3" x3="-1.83366859" y3="0.289471" z3="-0.85548514">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="-3.08694768" y3="1.43955046" z3="-0.14781905">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="-2.1427898" y3="-1.36565794" z3="-0.10752958">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="P" id="a6" x3="1.87733374" y3="0.01109532" z3="0.65197082">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="3.29755175" y3="0.89338973" z3="-0.12403079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="1.87535873" y3="-1.69574499" z3="-0.04663369">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a9" x3="-4.03603509" y3="1.22528717" z3="-0.63818744">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a10" x3="-2.82437973" y3="2.46964725" z3="-0.38115863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a11" x3="-3.21050052" y3="1.3273874" z3="0.926425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a12" x3="-3.087665" y3="-1.72791946" z3="-0.51195588">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="-1.37690317" y3="-2.07454002" z3="-0.41704543">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-2.21498916" y3="-1.34801698" z3="0.97700665">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="4.20453594" y3="0.53098329" z3="0.35916546">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="3.22883357" y3="1.96181685" z3="0.07105822">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="3.37461772" y3="0.71976364" z3="-1.19439447">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a18" x3="2.74088456" y3="-2.21217706" z3="0.36800981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a19" x3="1.94244351" y3="-1.72692491" z3="-1.13136703">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a20" x3="0.99513559" y3="-2.24332546" z3="0.2857034">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a6" order="S"/>
                           <bond atomRefs2="a3 a5" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a4 a11" order="S"/>
                           <bond atomRefs2="a4 a10" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a5 a13" order="S"/>
                           <bond atomRefs2="a5 a14" order="S"/>
                           <bond atomRefs2="a5 a12" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a6 a8" order="S"/>
                           <bond atomRefs2="a7 a16" order="S"/>
                           <bond atomRefs2="a7 a17" order="S"/>
                           <bond atomRefs2="a7 a15" order="S"/>
                           <bond atomRefs2="a8 a20" order="S"/>
                           <bond atomRefs2="a8 a19" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                        </bondArray>
                        <formula concise="C4H12FP2Si">
                           <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">157.0742252</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1928,2.5571,-.1263;.0845,.9686,-.1119;-1.8337,.2895,-.8555;-3.0869,1.4396,-.1478;-2.1428,-1.3657,-.1075;1.8773,.0111,.652;3.2976,.8934,-.124;1.8754,-1.6957,-.0466;-4.036,1.2253,-.6382;-2.8244,2.4696,-.3812;-3.2105,1.3274,.9264;-3.0877,-1.7279,-.512;-1.3769,-2.0745,-.417;-2.215,-1.348,.977;4.2045,.531,.3592;3.2288,1.9618,.0711;3.3746,.7198,-1.1944;2.7409,-2.2122,.368;1.9424,-1.7269,-1.1314;.9951,-2.2433,.2857;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.190291" y3="2.554252" z3="-0.106245"/>
                        <atom elementType="Si" id="a2" x3="0.083982" y3="0.965658" z3="-0.096959"/>
                        <atom elementType="P" id="a3" x3="-1.829004" y3="0.285739" z3="-0.853713"/>
                        <atom elementType="C" id="a4" x3="-3.084993" y3="1.439921" z3="-0.156999"/>
                        <atom elementType="C" id="a5" x3="-2.144951" y3="-1.365035" z3="-0.099041"/>
                        <atom elementType="P" id="a6" x3="1.880966" y3="0.006564" z3="0.655611"/>
                        <atom elementType="C" id="a7" x3="3.296039" y3="0.894109" z3="-0.124143"/>
                        <atom elementType="C" id="a8" x3="1.877753" y3="-1.696229" z3="-0.052782"/>
                        <atom elementType="H" id="a9" x3="-4.031751" y3="1.224152" z3="-0.651228"/>
                        <atom elementType="H" id="a10" x3="-2.820874" y3="2.468909" z3="-0.393368"/>
                        <atom elementType="H" id="a11" x3="-3.214245" y3="1.33243" z3="0.917056"/>
                        <atom elementType="H" id="a12" x3="-3.088181" y3="-1.727473" z3="-0.507145"/>
                        <atom elementType="H" id="a13" x3="-1.378611" y3="-2.076663" z3="-0.400921"/>
                        <atom elementType="H" id="a14" x3="-2.2234" y3="-1.342144" z3="0.984964"/>
                        <atom elementType="H" id="a15" x3="4.205972" y3="0.53043" z3="0.35255"/>
                        <atom elementType="H" id="a16" x3="3.227548" y3="1.961584" z3="0.076082"/>
                        <atom elementType="H" id="a17" x3="3.367756" y3="0.725377" z3="-1.195661"/>
                        <atom elementType="H" id="a18" x3="2.746196" y3="-2.21353" z3="0.354632"/>
                        <atom elementType="H" id="a19" x3="1.939522" y3="-1.721242" z3="-1.137995"/>
                        <atom elementType="H" id="a20" x3="1.000084" y3="-2.247009" z3="0.280904"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a6" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a11" order="S"/>
                        <bond atomRefs2="a4 a10" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a14" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a7 a16" order="S"/>
                        <bond atomRefs2="a7 a17" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a8 a20" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a8 a18" order="S"/>
                     </bondArray>
                     <formula concise="C4H12FP2Si">
                        <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">157.0742252</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1903,2.5543,-.1062;.084,.9657,-.097;-1.829,.2857,-.8537;-3.085,1.4399,-.157;-2.145,-1.365,-.099;1.881,.0066,.6556;3.296,.8941,-.1241;1.8778,-1.6962,-.0528;-4.0318,1.2242,-.6512;-2.8209,2.4689,-.3934;-3.2142,1.3324,.9171;-3.0882,-1.7275,-.5071;-1.3786,-2.0767,-.4009;-2.2234,-1.3421,.985;4.206,.5304,.3525;3.2275,1.9616,.0761;3.3678,.7254,-1.1957;2.7462,-2.2135,.3546;1.9395,-1.7212,-1.138;1.0001,-2.247,.2809;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.183755" y3="2.553479" z3="-0.102891"/>
                        <atom elementType="Si" id="a2" x3="0.084125" y3="0.964497" z3="-0.106946"/>
                        <atom elementType="P" id="a3" x3="-1.829725" y3="0.282028" z3="-0.860834"/>
                        <atom elementType="C" id="a4" x3="-3.081583" y3="1.439029" z3="-0.159997"/>
                        <atom elementType="C" id="a5" x3="-2.143574" y3="-1.363662" z3="-0.09415"/>
                        <atom elementType="P" id="a6" x3="1.876735" y3="0.004597" z3="0.656283"/>
                        <atom elementType="C" id="a7" x3="3.293788" y3="0.893513" z3="-0.119152"/>
                        <atom elementType="C" id="a8" x3="1.876698" y3="-1.695552" z3="-0.05857"/>
                        <atom elementType="H" id="a9" x3="-4.03147" y3="1.220846" z3="-0.647209"/>
                        <atom elementType="H" id="a10" x3="-2.820118" y3="2.467339" z3="-0.402013"/>
                        <atom elementType="H" id="a11" x3="-3.204332" y3="1.335716" z3="0.915241"/>
                        <atom elementType="H" id="a12" x3="-3.089182" y3="-1.727015" z3="-0.495945"/>
                        <atom elementType="H" id="a13" x3="-1.379596" y3="-2.077898" z3="-0.395677"/>
                        <atom elementType="H" id="a14" x3="-2.217287" y3="-1.33462" z3="0.990013"/>
                        <atom elementType="H" id="a15" x3="4.202461" y3="0.528531" z3="0.359002"/>
                        <atom elementType="H" id="a16" x3="3.225896" y3="1.960716" z3="0.082629"/>
                        <atom elementType="H" id="a17" x3="3.368265" y3="0.726556" z3="-1.190762"/>
                        <atom elementType="H" id="a18" x3="2.744814" y3="-2.212997" z3="0.349372"/>
                        <atom elementType="H" id="a19" x3="1.941517" y3="-1.716744" z3="-1.143701"/>
                        <atom elementType="H" id="a20" x3="0.998911" y3="-2.248558" z3="0.270907"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a6" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a11" order="S"/>
                        <bond atomRefs2="a4 a10" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a14" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a7 a16" order="S"/>
                        <bond atomRefs2="a7 a17" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a8 a20" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a8 a18" order="S"/>
                     </bondArray>
                     <formula concise="C4H12FP2Si">
                        <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">157.0742252</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1838,2.5535,-.1029;.0841,.9645,-.1069;-1.8297,.282,-.8608;-3.0816,1.439,-.16;-2.1436,-1.3637,-.0941;1.8767,.0046,.6563;3.2938,.8935,-.1192;1.8767,-1.6956,-.0586;-4.0315,1.2208,-.6472;-2.8201,2.4673,-.402;-3.2043,1.3357,.9152;-3.0892,-1.727,-.4959;-1.3796,-2.0779,-.3957;-2.2173,-1.3346,.99;4.2025,.5285,.359;3.2259,1.9607,.0826;3.3683,.7266,-1.1908;2.7448,-2.213,.3494;1.9415,-1.7167,-1.1437;.9989,-2.2486,.2709;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.196786" y3="2.546302" z3="-0.201706"/>
                        <atom elementType="Si" id="a2" x3="0.081346" y3="0.959321" z3="-0.15714"/>
                        <atom elementType="P" id="a3" x3="-1.840101" y3="0.267968" z3="-0.891595"/>
                        <atom elementType="C" id="a4" x3="-3.068053" y3="1.43316" z3="-0.156312"/>
                        <atom elementType="C" id="a5" x3="-2.137348" y3="-1.358536" z3="-0.0777"/>
                        <atom elementType="P" id="a6" x3="1.849057" y3="-0.005121" z3="0.663085"/>
                        <atom elementType="C" id="a7" x3="3.279048" y3="0.892995" z3="-0.081529"/>
                        <atom elementType="C" id="a8" x3="1.86963" y3="-1.690886" z3="-0.085694"/>
                        <atom elementType="H" id="a9" x3="-4.034536" y3="1.207491" z3="-0.606499"/>
                        <atom elementType="H" id="a10" x3="-2.820897" y3="2.459999" z3="-0.418011"/>
                        <atom elementType="H" id="a11" x3="-3.154195" y3="1.341319" z3="0.923581"/>
                        <atom elementType="H" id="a12" x3="-3.096006" y3="-1.723657" z3="-0.445824"/>
                        <atom elementType="H" id="a13" x3="-1.386281" y3="-2.08288" z3="-0.386749"/>
                        <atom elementType="H" id="a14" x3="-2.18165" y3="-1.307706" z3="1.00711"/>
                        <atom elementType="H" id="a15" x3="4.179329" y3="0.520407" z3="0.406806"/>
                        <atom elementType="H" id="a16" x3="3.212604" y3="1.958145" z3="0.130977"/>
                        <atom elementType="H" id="a17" x3="3.372051" y3="0.738038" z3="-1.153476"/>
                        <atom elementType="H" id="a18" x3="2.734259" y3="-2.209398" z3="0.328368"/>
                        <atom elementType="H" id="a19" x3="1.954883" y3="-1.69155" z3="-1.169675"/>
                        <atom elementType="H" id="a20" x3="0.990174" y3="-2.255611" z3="0.217583"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a6" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a11" order="S"/>
                        <bond atomRefs2="a4 a10" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a14" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a7 a16" order="S"/>
                        <bond atomRefs2="a7 a17" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a8 a20" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a8 a18" order="S"/>
                     </bondArray>
                     <formula concise="C4H12FP2Si">
                        <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">157.0742252</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1968,2.5463,-.2017;.0813,.9593,-.1571;-1.8401,.268,-.8916;-3.0681,1.4332,-.1563;-2.1373,-1.3585,-.0777;1.8491,-.0051,.6631;3.279,.893,-.0815;1.8696,-1.6909,-.0857;-4.0345,1.2075,-.6065;-2.8209,2.46,-.418;-3.1542,1.3413,.9236;-3.096,-1.7237,-.4458;-1.3863,-2.0829,-.3867;-2.1816,-1.3077,1.0071;4.1793,.5204,.4068;3.2126,1.9581,.131;3.3721,.738,-1.1535;2.7343,-2.2094,.3284;1.9549,-1.6916,-1.1697;.9902,-2.2556,.2176;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.190574" y3="2.547071" z3="-0.134427"/>
                        <atom elementType="Si" id="a2" x3="0.082659" y3="0.95883" z3="-0.116654"/>
                        <atom elementType="P" id="a3" x3="-1.833805" y3="0.274127" z3="-0.865296"/>
                        <atom elementType="C" id="a4" x3="-3.07879" y3="1.439592" z3="-0.164428"/>
                        <atom elementType="C" id="a5" x3="-2.147714" y3="-1.363176" z3="-0.079667"/>
                        <atom elementType="P" id="a6" x3="1.870885" y3="-0.003254" z3="0.656582"/>
                        <atom elementType="C" id="a7" x3="3.290576" y3="0.895934" z3="-0.103208"/>
                        <atom elementType="C" id="a8" x3="1.880143" y3="-1.696321" z3="-0.075941"/>
                        <atom elementType="H" id="a9" x3="-4.032531" y3="1.218728" z3="-0.642904"/>
                        <atom elementType="H" id="a10" x3="-2.818285" y3="2.465707" z3="-0.41663"/>
                        <atom elementType="H" id="a11" x3="-3.194422" y3="1.345209" z3="0.912409"/>
                        <atom elementType="H" id="a12" x3="-3.097428" y3="-1.726787" z3="-0.47153"/>
                        <atom elementType="H" id="a13" x3="-1.38865" y3="-2.083348" z3="-0.379623"/>
                        <atom elementType="H" id="a14" x3="-2.21414" y3="-1.323686" z3="1.0046"/>
                        <atom elementType="H" id="a15" x3="4.197312" y3="0.527958" z3="0.376386"/>
                        <atom elementType="H" id="a16" x3="3.22032" y3="1.961166" z3="0.108044"/>
                        <atom elementType="H" id="a17" x3="3.371448" y3="0.739068" z3="-1.175874"/>
                        <atom elementType="H" id="a18" x3="2.748045" y3="-2.214588" z3="0.33149"/>
                        <atom elementType="H" id="a19" x3="1.951161" y3="-1.706385" z3="-1.160799"/>
                        <atom elementType="H" id="a20" x3="1.002741" y3="-2.256044" z3="0.243072"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a6" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a11" order="S"/>
                        <bond atomRefs2="a4 a10" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a14" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a7 a16" order="S"/>
                        <bond atomRefs2="a7 a17" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a8 a20" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a8 a18" order="S"/>
                     </bondArray>
                     <formula concise="C4H12FP2Si">
                        <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">157.0742252</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1906,2.5471,-.1344;.0827,.9588,-.1167;-1.8338,.2741,-.8653;-3.0788,1.4396,-.1644;-2.1477,-1.3632,-.0797;1.8709,-.0033,.6566;3.2906,.8959,-.1032;1.8801,-1.6963,-.0759;-4.0325,1.2187,-.6429;-2.8183,2.4657,-.4166;-3.1944,1.3452,.9124;-3.0974,-1.7268,-.4715;-1.3886,-2.0833,-.3796;-2.2141,-1.3237,1.0046;4.1973,.528,.3764;3.2203,1.9612,.108;3.3714,.7391,-1.1759;2.748,-2.2146,.3315;1.9512,-1.7064,-1.1608;1.0027,-2.256,.2431;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.18969" y3="2.560026" z3="-0.117246"/>
                        <atom elementType="Si" id="a2" x3="0.083847" y3="0.97154" z3="-0.106246"/>
                        <atom elementType="P" id="a3" x3="-1.828689" y3="0.287001" z3="-0.865414"/>
                        <atom elementType="C" id="a4" x3="-3.081658" y3="1.436714" z3="-0.153482"/>
                        <atom elementType="C" id="a5" x3="-2.135062" y3="-1.363388" z3="-0.104184"/>
                        <atom elementType="P" id="a6" x3="1.874667" y3="0.008925" z3="0.660425"/>
                        <atom elementType="C" id="a7" x3="3.292534" y3="0.891401" z3="-0.121601"/>
                        <atom elementType="C" id="a8" x3="1.868394" y3="-1.693866" z3="-0.049595"/>
                        <atom elementType="H" id="a9" x3="-4.032629" y3="1.217742" z3="-0.638268"/>
                        <atom elementType="H" id="a10" x3="-2.82486" y3="2.46724" z3="-0.391065"/>
                        <atom elementType="H" id="a11" x3="-3.200325" y3="1.327284" z3="0.921592"/>
                        <atom elementType="H" id="a12" x3="-3.081183" y3="-1.727683" z3="-0.504002"/>
                        <atom elementType="H" id="a13" x3="-1.370514" y3="-2.074651" z3="-0.411499"/>
                        <atom elementType="H" id="a14" x3="-2.20488" y3="-1.339311" z3="0.980316"/>
                        <atom elementType="H" id="a15" x3="4.201334" y3="0.525604" z3="0.355696"/>
                        <atom elementType="H" id="a16" x3="3.228224" y3="1.959545" z3="0.076418"/>
                        <atom elementType="H" id="a17" x3="3.364167" y3="0.720351" z3="-1.192771"/>
                        <atom elementType="H" id="a18" x3="2.735874" y3="-2.212423" z3="0.358354"/>
                        <atom elementType="H" id="a19" x3="1.931401" y3="-1.718453" z3="-1.134698"/>
                        <atom elementType="H" id="a20" x3="0.989767" y3="-2.243797" z3="0.282868"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a6" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a11" order="S"/>
                        <bond atomRefs2="a4 a10" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a14" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a7 a16" order="S"/>
                        <bond atomRefs2="a7 a17" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a8 a20" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a8 a18" order="S"/>
                     </bondArray>
                     <formula concise="C4H12FP2Si">
                        <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">157.0742252</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1897,2.56,-.1172;.0838,.9715,-.1062;-1.8287,.287,-.8654;-3.0817,1.4367,-.1535;-2.1351,-1.3634,-.1042;1.8747,.0089,.6604;3.2925,.8914,-.1216;1.8684,-1.6939,-.0496;-4.0326,1.2177,-.6383;-2.8249,2.4672,-.3911;-3.2003,1.3273,.9216;-3.0812,-1.7277,-.504;-1.3705,-2.0747,-.4115;-2.2049,-1.3393,.9803;4.2013,.5256,.3557;3.2282,1.9595,.0764;3.3642,.7204,-1.1928;2.7359,-2.2124,.3584;1.9314,-1.7185,-1.1347;.9898,-2.2438,.2829;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="F" id="a1" x3="0.188794" y3="2.551597" z3="-0.122855"/>
                        <atom elementType="Si" id="a2" x3="0.083097" y3="0.963141" z3="-0.111477"/>
                        <atom elementType="P" id="a3" x3="-1.831973" y3="0.278071" z3="-0.864667"/>
                        <atom elementType="C" id="a4" x3="-3.080242" y3="1.439028" z3="-0.162428"/>
                        <atom elementType="C" id="a5" x3="-2.143749" y3="-1.363404" z3="-0.086365"/>
                        <atom elementType="P" id="a6" x3="1.873125" y3="0.000327" z3="0.657358"/>
                        <atom elementType="C" id="a7" x3="3.29191" y3="0.89456" z3="-0.109757"/>
                        <atom elementType="C" id="a8" x3="1.876631" y3="-1.695967" z3="-0.068168"/>
                        <atom elementType="H" id="a9" x3="-4.032438" y3="1.218901" z3="-0.644284"/>
                        <atom elementType="H" id="a10" x3="-2.820079" y3="2.466373" z3="-0.409916"/>
                        <atom elementType="H" id="a11" x3="-3.198425" y3="1.340147" z3="0.913722"/>
                        <atom elementType="H" id="a12" x3="-3.091979" y3="-1.727752" z3="-0.481117"/>
                        <atom elementType="H" id="a13" x3="-1.382638" y3="-2.0808" z3="-0.387814"/>
                        <atom elementType="H" id="a14" x3="-2.211866" y3="-1.328336" z3="0.997955"/>
                        <atom elementType="H" id="a15" x3="4.199577" y3="0.527505" z3="0.368746"/>
                        <atom elementType="H" id="a16" x3="3.223132" y3="1.960676" z3="0.097476"/>
                        <atom elementType="H" id="a17" x3="3.369452" y3="0.733332" z3="-1.182027"/>
                        <atom elementType="H" id="a18" x3="2.744403" y3="-2.214703" z3="0.338942"/>
                        <atom elementType="H" id="a19" x3="1.944569" y3="-1.710521" z3="-1.153173"/>
                        <atom elementType="H" id="a20" x3="0.998801" y3="-2.252374" z3="0.255451"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a6" order="S"/>
                        <bond atomRefs2="a3 a5" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a4 a11" order="S"/>
                        <bond atomRefs2="a4 a10" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a14" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a8" order="S"/>
                        <bond atomRefs2="a7 a16" order="S"/>
                        <bond atomRefs2="a7 a17" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a8 a20" order="S"/>
                        <bond atomRefs2="a8 a19" order="S"/>
                        <bond atomRefs2="a8 a18" order="S"/>
                     </bondArray>
                     <formula concise="C4H12FP2Si">
                        <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">157.0742252</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1888,2.5516,-.1229;.0831,.9631,-.1115;-1.832,.2781,-.8647;-3.0802,1.439,-.1624;-2.1437,-1.3634,-.0864;1.8731,.0003,.6574;3.2919,.8946,-.1098;1.8766,-1.696,-.0682;-4.0324,1.2189,-.6443;-2.8201,2.4664,-.4099;-3.1984,1.3401,.9137;-3.092,-1.7278,-.4811;-1.3826,-2.0808,-.3878;-2.2119,-1.3283,.998;4.1996,.5275,.3687;3.2231,1.9607,.0975;3.3695,.7333,-1.182;2.7444,-2.2147,.3389;1.9446,-1.7105,-1.1532;.9988,-2.2524,.2555;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813299047883</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813298685212</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813299248337</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813287300005</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813326961397</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813310555169</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813320892363</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="20">-0.201969 0.545773 0.344314 -0.499525 -0.507066 0.343624 -0.499996 -0.507789 0.172400 0.170751 0.158686 0.174815 0.158028 0.157448 0.172568 0.170454 0.158341 0.174732 0.157081 0.157331</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="20">9.4126 13.0314 14.8066 6.8587 6.8668 14.8056 6.8592 6.8690 0.6960 0.7040 0.7140 0.6901 0.7260 0.7142 0.6957 0.7042 0.7145 0.6897 0.7146 0.7270</array>
                     <array dataType="xsd:double" dictRef="o:za" size="20">9.0000 14.0000 15.0000 6.0000 6.0000 15.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="20">-0.4126 0.9686 0.1934 -0.8587 -0.8668 0.1944 -0.8592 -0.8690 0.3040 0.2960 0.2860 0.3099 0.2740 0.2858 0.3043 0.2958 0.2855 0.3103 0.2854 0.2730</array>
                     <array dataType="xsd:double" dictRef="o:va" size="20">1.0479 3.4586 3.2588 3.6599 3.6651 3.2475 3.6600 3.6643 0.8743 0.8811 0.8790 0.8719 0.8912 0.8783 0.8742 0.8809 0.8792 0.8718 0.8787 0.8914</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="20">1.0479 3.4586 3.2588 3.6599 3.6651 3.2475 3.6600 3.6643 0.8743 0.8811 0.8790 0.8719 0.8912 0.8783 0.8742 0.8809 0.8792 0.8718 0.8787 0.8914</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="20">-0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="19">0.9841 1.1751 1.1643 0.9810 0.9806 0.8763 0.8822 0.8836 0.8748 0.8898 0.8837 0.9810 0.9800 0.8761 0.8826 0.8838 0.8749 0.8838 0.8901</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="19">0 1 1 2 1 5 2 3 2 4 3 8 3 9 3 10 4 11 4 12 4 13 5 6 5 7 6 14 6 15 6 16 7 17 7 18 7 19</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="20">-0.412582 0.968630 0.193378 -0.858697 -0.866844 0.194372 -0.859197 -0.868954 0.304037 0.295988 0.286026 0.309880 0.273973 0.285841 0.304257 0.295806 0.285473 0.310272 0.285356 0.272986</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="153">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="153">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="153" units="nonsi:electronvolt">-2120.4329 -2120.4250 -1823.2172 -687.9138 -288.6491 -288.6456 -288.4916 -288.4882 -190.4526 -190.4478 -157.0503 -138.5032 -138.4989 -138.4866 -138.4822 -138.4500 -138.4457 -110.6480 -110.5442 -110.4195 -40.6887 -27.4659 -27.3072 -25.6842 -25.6350 -22.9611 -21.6614 -20.6168 -19.0096 -18.8773 -18.3190 -17.6655 -17.6571 -17.5219 -17.1117 -17.0184 -16.8661 -16.7583 -16.2471 -15.4610 -15.3578 -14.7055 -12.2336 -12.1414 -6.4806 -4.8505 -4.2898 -2.4536 -1.6732 -0.6693 -0.6298 -0.5107 -0.1679 -0.1220 0.7720 1.2545 1.3165 1.5032 1.5108 1.9448 2.2597 2.4746 2.5824 3.0455 3.2007 5.7444 5.8684 6.1890 6.8699 7.1904 7.8417 8.1798 8.5233 8.7876 8.7921 9.2360 9.4002 9.9982 10.4403 10.8292 11.8913 12.1853 12.8568 13.4569 13.7165 14.4357 14.6269 14.6953 15.1086 15.3402 15.6694 15.7650 16.0032 16.9882 17.0049 18.4512 18.6991 19.1415 19.9914 22.9412 23.0430 23.1171 23.3261 23.4885 23.5941 23.8999 24.2060 24.5229 24.8552 24.9225 25.8864 26.4675 26.5067 26.7455 27.9802 29.4635 29.7342 29.8986 30.5989 30.6612 31.2455 31.5166 32.4268 33.4526 37.3115 39.9462 41.6788 43.0865 43.1630 44.1469 44.4848 45.7590 45.8200 46.1475 46.2887 54.2155 54.2527 56.7656 56.8099 58.1616 58.2200 58.5534 58.9343 58.9869 59.1337 59.4013 59.7345 74.3497 368.7776 368.8063 369.4793 369.6132 887.3356</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="F" id="a1" x3="0.1893" y3="2.551486" z3="-0.125957"/>
                  <atom elementType="Si" id="a2" x3="0.082957" y3="0.963105" z3="-0.112985"/>
                  <atom elementType="P" id="a3" x3="-1.832537" y3="0.277498" z3="-0.865534"/>
                  <atom elementType="C" id="a4" x3="-3.080126" y3="1.438906" z3="-0.162656"/>
                  <atom elementType="C" id="a5" x3="-2.143523" y3="-1.363244" z3="-0.085192"/>
                  <atom elementType="P" id="a6" x3="1.872329" y3="-0.000241" z3="0.657236"/>
                  <atom elementType="C" id="a7" x3="3.291704" y3="0.894554" z3="-0.108216"/>
                  <atom elementType="C" id="a8" x3="1.876429" y3="-1.695972" z3="-0.069713"/>
                  <atom elementType="H" id="a9" x3="-4.032799" y3="1.218464" z3="-0.64343"/>
                  <atom elementType="H" id="a10" x3="-2.820245" y3="2.466108" z3="-0.411029"/>
                  <atom elementType="H" id="a11" x3="-3.197282" y3="1.340668" z3="0.913667"/>
                  <atom elementType="H" id="a12" x3="-3.092123" y3="-1.7280" z3="-0.478682"/>
                  <atom elementType="H" id="a13" x3="-1.382708" y3="-2.080941" z3="-0.386667"/>
                  <atom elementType="H" id="a14" x3="-2.210625" y3="-1.32712" z3="0.999152"/>
                  <atom elementType="H" id="a15" x3="4.199018" y3="0.527291" z3="0.370794"/>
                  <atom elementType="H" id="a16" x3="3.222668" y3="1.960544" z3="0.099596"/>
                  <atom elementType="H" id="a17" x3="3.37013" y3="0.733968" z3="-1.180519"/>
                  <atom elementType="H" id="a18" x3="2.743921" y3="-2.21497" z3="0.33766"/>
                  <atom elementType="H" id="a19" x3="1.945236" y3="-1.709612" z3="-1.154672"/>
                  <atom elementType="H" id="a20" x3="0.998379" y3="-2.252692" z3="0.252747"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a6" order="S"/>
                  <bond atomRefs2="a3 a5" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a4 a11" order="S"/>
                  <bond atomRefs2="a4 a10" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a5 a14" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a8" order="S"/>
                  <bond atomRefs2="a7 a16" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a8 a20" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
               </bondArray>
               <formula concise="C4H12FP2Si">
                  <atomArray count="4 12 1 2 1" elementType="C H F P Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">157.0742252</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C4H12FP2Si/c1-6(2)8(5)7(3)4/h1-4H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:4,5,7,8,1,3,6,2/E:(1,2,3,4)(6,7)/CRV:8.3/rA:20nFSi3PCCPCCHHHHHHHHHHHH/rB:s1;s2;s3;s3;s2;s6;s6;s4;s4;s4;s5;s5;s5;s7;s7;s7;s8;s8;s8;/rC:.1893,2.5515,-.126;.083,.9631,-.113;-1.8325,.2775,-.8655;-3.0801,1.4389,-.1627;-2.1435,-1.3632,-.0852;1.8723,-.0002,.6572;3.2917,.8946,-.1082;1.8764,-1.696,-.0697;-4.0328,1.2185,-.6434;-2.8202,2.4661,-.411;-3.1973,1.3407,.9137;-3.0921,-1.728,-.4787;-1.3827,-2.0809,-.3867;-2.2106,-1.3271,.9992;4.199,.5273,.3708;3.2227,1.9605,.0996;3.3701,.734,-1.1805;2.7439,-2.215,.3377;1.9452,-1.7096,-1.1547;.9984,-2.2527,.2527;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1229.81871760</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">640.14085747</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1869.95957506</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-2956.62221910</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">1086.66264403</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-2456.05509400</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">1226.23637640</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00292141</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">44.000112156550</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">44.000112156550</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">88.000224313101</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-56.195980483086</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-4.123881802091</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-60.319862285177</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011440441</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011442399</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011451551</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011495665</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011454617</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011460371</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011454615</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="153">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="153">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="153" units="nonsi:electronvolt">-2120.4355 -2120.4222 -1823.2321 -687.9313 -288.6472 -288.6457 -288.4925 -288.4829 -190.4544 -190.4436 -157.0644 -138.5048 -138.4942 -138.4881 -138.4778 -138.4516 -138.4410 -110.6627 -110.5579 -110.4325 -40.7063 -27.4638 -27.3040 -25.6776 -25.6288 -22.9589 -21.6589 -20.6306 -19.0237 -18.8935 -18.3205 -17.6667 -17.6604 -17.5192 -17.1075 -17.0140 -16.8609 -16.7516 -16.2362 -15.4521 -15.3493 -14.6925 -12.2406 -12.1660 -6.5011 -4.8402 -4.3118 -2.4663 -1.6745 -0.6768 -0.6366 -0.5337 -0.1834 -0.1239 0.7770 1.2403 1.3199 1.4925 1.5076 1.9620 2.2650 2.4755 2.5874 3.0781 3.1979 5.7300 5.8689 6.2046 6.8755 7.2029 7.8311 8.1797 8.5247 8.7763 8.7948 9.2033 9.4037 9.9989 10.4461 10.8515 11.9014 12.2009 12.9082 13.4724 13.7215 14.4138 14.6326 14.7119 15.0814 15.3232 15.6751 15.7538 16.0147 16.9773 17.0014 18.4200 18.6558 19.1561 19.9786 22.9266 23.0646 23.0971 23.3237 23.4916 23.6026 23.8769 24.2053 24.5175 24.8547 24.9178 25.8915 26.4760 26.4981 26.7114 28.0980 29.4455 29.7232 29.8990 30.5794 30.6693 31.2583 31.5167 32.4286 33.4440 37.3056 39.9314 41.6725 43.0806 43.1610 44.1422 44.4693 45.7651 45.8249 46.1471 46.2672 54.1983 54.2328 56.7476 56.7918 58.1784 58.2318 58.5510 58.9335 58.9939 59.1448 59.4128 59.7241 74.3439 368.7991 368.8090 369.4841 369.6331 887.3311</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="20">-0.412334 0.971832 0.193736 -0.859746 -0.867668 0.194318 -0.859844 -0.869224 0.304108 0.295945 0.285449 0.309928 0.273966 0.285517 0.304352 0.295786 0.285187 0.310302 0.285262 0.273129</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="20">-0.201478 0.550341 0.342871 -0.499912 -0.507191 0.342545 -0.500186 -0.507655 0.172278 0.170530 0.158292 0.174754 0.157748 0.157200 0.172500 0.170319 0.158130 0.174727 0.157003 0.157183</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="20">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="20">F Si P C C P C C H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="20">9.4123 13.0282 14.8063 6.8597 6.8677 14.8057 6.8598 6.8692 0.6959 0.7041 0.7146 0.6901 0.7260 0.7145 0.6956 0.7042 0.7148 0.6897 0.7147 0.7269</array>
                     <array dataType="xsd:double" dictRef="o:za" size="20">9.0000 14.0000 15.0000 6.0000 6.0000 15.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="20">-0.4123 0.9718 0.1937 -0.8597 -0.8677 0.1943 -0.8598 -0.8692 0.3041 0.2959 0.2854 0.3099 0.2740 0.2855 0.3044 0.2958 0.2852 0.3103 0.2853 0.2731</array>
                     <array dataType="xsd:double" dictRef="o:va" size="20">1.0486 3.4492 3.2502 3.6597 3.6647 3.2426 3.6597 3.6639 0.8744 0.8812 0.8792 0.8718 0.8912 0.8785 0.8741 0.8809 0.8793 0.8718 0.8787 0.8915</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="20">1.0486 3.4492 3.2502 3.6597 3.6647 3.2426 3.6597 3.6639 0.8744 0.8812 0.8792 0.8718 0.8912 0.8785 0.8741 0.8809 0.8793 0.8718 0.8787 0.8915</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="20">-0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="19">0.9849 1.1684 1.1609 0.9804 0.9801 0.8764 0.8823 0.8840 0.8749 0.8898 0.8839 0.9805 0.9797 0.8762 0.8827 0.8840 0.8750 0.8839 0.8900</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="19">0 1 1 2 1 5 2 3 2 4 3 8 3 9 3 10 4 11 4 12 4 13 5 6 5 7 6 14 6 15 6 16 7 17 7 18 7 19</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.011455450</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-1229.813322983319</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-0.76899 0.70899 -0.06000 -9.17090 8.32891 -0.84199 0.03144 -0.02917 0.00227</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.84413</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.14560</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
