<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:o="http://www.iochem-bd.org/dictionary/orca/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.4</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="4">1 2 3 4</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="4">8s4p1d 10s7p1d 8s4p1d 4s</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="4">4s2p1d 4s3p1d 4s2p1d 2s</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="17">1 2 3 1 1 1 1 1 1 4 4 4 4 4 4 4 4</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="C" id="a1" x3="3.148592" y3="0.333121" z3="-0.240015"/>
                  <atom elementType="Si" id="a2" x3="1.722693" y3="-0.706496" z3="0.225936"/>
                  <atom elementType="F" id="a3" x3="2.078392" y3="-2.12385" z3="0.819182"/>
                  <atom elementType="C" id="a4" x3="-0.007703" y3="-0.308804" z3="0.123959"/>
                  <atom elementType="C" id="a5" x3="-0.395468" y3="0.905446" z3="-0.474607"/>
                  <atom elementType="C" id="a6" x3="-1.734264" y3="1.223714" z3="-0.568233"/>
                  <atom elementType="C" id="a7" x3="-2.688355" y3="0.345757" z3="-0.06362"/>
                  <atom elementType="C" id="a8" x3="-2.316614" y3="-0.85356" z3="0.536514"/>
                  <atom elementType="C" id="a9" x3="-0.982477" y3="-1.189797" z3="0.630124"/>
                  <atom elementType="H" id="a10" x3="2.861573" y3="1.140616" z3="-0.913177"/>
                  <atom elementType="H" id="a11" x3="3.936733" y3="-0.255647" z3="-0.712014"/>
                  <atom elementType="H" id="a12" x3="3.584282" y3="0.788834" z3="0.65457"/>
                  <atom elementType="H" id="a13" x3="0.339201" y3="1.596948" z3="-0.869022"/>
                  <atom elementType="H" id="a14" x3="-2.039712" y3="2.15078" z3="-1.032492"/>
                  <atom elementType="H" id="a15" x3="-3.737201" y3="0.600084" z3="-0.139243"/>
                  <atom elementType="H" id="a16" x3="-3.070973" y3="-1.521693" z3="0.927252"/>
                  <atom elementType="H" id="a17" x3="-0.6989" y3="-2.125353" z3="1.094787"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a14" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a16" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a17" order="S"/>
               </bondArray>
               <formula concise="C7H8FSi">
                  <atomArray count="7 8 1 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">131.1588032</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1486,.3331,-.24;1.7227,-.7065,.2259;2.0784,-2.1239,.8192;-.0077,-.3088,.124;-.3955,.9054,-.4746;-1.7343,1.2237,-.5682;-2.6884,.3458,-.0636;-2.3166,-.8536,.5365;-.9825,-1.1898,.6301;2.8616,1.1406,-.9132;3.9367,-.2556,-.712;3.5843,.7888,.6546;.3392,1.5969,-.869;-2.0397,2.1508,-1.0325;-3.7372,.6001,-.1392;-3.071,-1.5217,.9273;-.6989,-2.1254,1.0948;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">531</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">531</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C7FH8Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">72</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">154</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">482.7252483397 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.853e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.002 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE kappa parameter   XKappa</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.024500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">XMuePBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.123457</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PBE</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PBE beta parameter  CBetaPBE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.030000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LDAOpt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">PW91-LDA</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.420000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">531</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-ON(X) (HFX calculated with O(N))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">531</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">C7FH8Si_opt_orca</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">72</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">154</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">482.7030954300 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">COSX micro iterations for RIJONX calc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">250</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.854e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.002 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.005 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="C" id="a1" x3="3.14859242" y3="0.33312096" z3="-0.2400154">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="Si" id="a2" x3="1.72269273" y3="-0.70649554" z3="0.2259363">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F" id="a3" x3="2.07839176" y3="-2.12384968" z3="0.81918156">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C" id="a4" x3="-0.0077026" y3="-0.3088043" z3="0.12395885">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a5" x3="-0.39546796" y3="0.90544599" z3="-0.4746071">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a6" x3="-1.73426351" y3="1.22371359" z3="-0.56823349">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a7" x3="-2.68835532" y3="0.34575653" z3="-0.06361995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a8" x3="-2.31661432" y3="-0.85356002" z3="0.53651377">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C" id="a9" x3="-0.98247678" y3="-1.18979666" z3="0.630124">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H" id="a10" x3="2.86157286" y3="1.14061623" z3="-0.91317657">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a11" x3="3.93673344" y3="-0.25564739" z3="-0.71201389">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a12" x3="3.58428227" y3="0.78883382" z3="0.65456966">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a13" x3="0.33920138" y3="1.59694832" z3="-0.86902236">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a14" x3="-2.03971249" y3="2.15078006" z3="-1.03249183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a15" x3="-3.73720111" y3="0.6000837" z3="-0.13924269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a16" x3="-3.07097275" y3="-1.52169288" z3="0.92725181">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H" id="a17" x3="-0.69890002" y3="-2.12535272" z3="1.09478734">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a12" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a4" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a5 a13" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a6 a14" order="S"/>
                           <bond atomRefs2="a7 a15" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a8 a16" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a9 a17" order="S"/>
                        </bondArray>
                        <formula concise="C7H8FSi">
                           <atomArray count="7 8 1 1" elementType="C H F Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">131.1588032</scalar>
                        </property>
                     <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1486,.3331,-.24;1.7227,-.7065,.2259;2.0784,-2.1238,.8192;-.0077,-.3088,.124;-.3955,.9054,-.4746;-1.7343,1.2237,-.5682;-2.6884,.3458,-.0636;-2.3166,-.8536,.5365;-.9825,-1.1898,.6301;2.8616,1.1406,-.9132;3.9367,-.2556,-.712;3.5843,.7888,.6546;.3392,1.5969,-.869;-2.0397,2.1508,-1.0325;-3.7372,.6001,-.1392;-3.071,-1.5217,.9273;-.6989,-2.1254,1.0948;</scalar>
</formula>
</molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">Opt RIJCOSX PBEh-3c</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">xyzfile=True</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">scf</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">maxiter 250</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">Print[P_Hirshfeld] = 1</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">4800</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%pal nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.149388" y3="0.332215" z3="-0.241049"/>
                        <atom elementType="Si" id="a2" x3="1.722664" y3="-0.70333" z3="0.230595"/>
                        <atom elementType="F" id="a3" x3="2.07777" y3="-2.120839" z3="0.82385"/>
                        <atom elementType="C" id="a4" x3="-0.007564" y3="-0.306872" z3="0.126021"/>
                        <atom elementType="C" id="a5" x3="-0.396023" y3="0.90716" z3="-0.472639"/>
                        <atom elementType="C" id="a6" x3="-1.735067" y3="1.223924" z3="-0.568132"/>
                        <atom elementType="C" id="a7" x3="-2.688764" y3="0.344611" z3="-0.065193"/>
                        <atom elementType="C" id="a8" x3="-2.316567" y3="-0.854452" z3="0.535051"/>
                        <atom elementType="C" id="a9" x3="-0.98218" y3="-1.189271" z3="0.630343"/>
                        <atom elementType="H" id="a10" x3="2.861555" y3="1.142015" z3="-0.911099"/>
                        <atom elementType="H" id="a11" x3="3.932174" y3="-0.259069" z3="-0.718805"/>
                        <atom elementType="H" id="a12" x3="3.592126" y3="0.784126" z3="0.651947"/>
                        <atom elementType="H" id="a13" x3="0.338379" y3="1.599759" z3="-0.865707"/>
                        <atom elementType="H" id="a14" x3="-2.041009" y3="2.15076" z3="-1.032502"/>
                        <atom elementType="H" id="a15" x3="-3.737817" y3="0.597703" z3="-0.14223"/>
                        <atom elementType="H" id="a16" x3="-3.070777" y3="-1.523523" z3="0.92447"/>
                        <atom elementType="H" id="a17" x3="-0.698489" y3="-2.124818" z3="1.094979"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1494,.3322,-.241;1.7227,-.7033,.2306;2.0778,-2.1208,.8238;-.0076,-.3069,.126;-.396,.9072,-.4726;-1.7351,1.2239,-.5681;-2.6888,.3446,-.0652;-2.3166,-.8545,.5351;-.9822,-1.1893,.6303;2.8616,1.142,-.9111;3.9322,-.2591,-.7188;3.5921,.7841,.6519;.3384,1.5998,-.8657;-2.041,2.1508,-1.0325;-3.7378,.5977,-.1422;-3.0708,-1.5235,.9245;-.6985,-2.1248,1.095;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.153968" y3="0.328424" z3="-0.242918"/>
                        <atom elementType="Si" id="a2" x3="1.721839" y3="-0.693751" z3="0.237403"/>
                        <atom elementType="F" id="a3" x3="2.073964" y3="-2.103795" z3="0.850095"/>
                        <atom elementType="C" id="a4" x3="-0.007158" y3="-0.299852" z3="0.128252"/>
                        <atom elementType="C" id="a5" x3="-0.399916" y3="0.913077" z3="-0.470295"/>
                        <atom elementType="C" id="a6" x3="-1.740098" y3="1.224278" z3="-0.569464"/>
                        <atom elementType="C" id="a7" x3="-2.690892" y3="0.340323" z3="-0.069425"/>
                        <atom elementType="C" id="a8" x3="-2.315534" y3="-0.857297" z3="0.531205"/>
                        <atom elementType="C" id="a9" x3="-0.979992" y3="-1.186811" z3="0.629504"/>
                        <atom elementType="H" id="a10" x3="2.865829" y3="1.155693" z3="-0.891138"/>
                        <atom elementType="H" id="a11" x3="3.913016" y3="-0.269452" z3="-0.750119"/>
                        <atom elementType="H" id="a12" x3="3.625751" y3="0.752633" z3="0.648498"/>
                        <atom elementType="H" id="a13" x3="0.332417" y3="1.609451" z3="-0.860899"/>
                        <atom elementType="H" id="a14" x3="-2.049158" y3="2.149857" z3="-1.034172"/>
                        <atom elementType="H" id="a15" x3="-3.740911" y3="0.588806" z3="-0.148988"/>
                        <atom elementType="H" id="a16" x3="-3.068233" y3="-1.529392" z3="0.918324"/>
                        <atom elementType="H" id="a17" x3="-0.695092" y3="-2.122091" z3="1.094036"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.154,.3284,-.2429;1.7218,-.6938,.2374;2.074,-2.1038,.8501;-.0072,-.2999,.1283;-.3999,.9131,-.4703;-1.7401,1.2243,-.5695;-2.6909,.3403,-.0694;-2.3155,-.8573,.5312;-.98,-1.1868,.6295;2.8658,1.1557,-.8911;3.913,-.2695,-.7501;3.6258,.7526,.6485;.3324,1.6095,-.8609;-2.0492,2.1499,-1.0342;-3.7409,.5888,-.149;-3.0682,-1.5294,.9183;-.6951,-2.1221,1.094;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.15782" y3="0.330669" z3="-0.232613"/>
                        <atom elementType="Si" id="a2" x3="1.720935" y3="-0.690778" z3="0.232638"/>
                        <atom elementType="F" id="a3" x3="2.070252" y3="-2.110222" z3="0.825037"/>
                        <atom elementType="C" id="a4" x3="-0.007288" y3="-0.296598" z3="0.125504"/>
                        <atom elementType="C" id="a5" x3="-0.403685" y3="0.911276" z3="-0.48094"/>
                        <atom elementType="C" id="a6" x3="-1.744534" y3="1.219682" z3="-0.57984"/>
                        <atom elementType="C" id="a7" x3="-2.692652" y3="0.338144" z3="-0.070602"/>
                        <atom elementType="C" id="a8" x3="-2.314237" y3="-0.853997" z3="0.538769"/>
                        <atom elementType="C" id="a9" x3="-0.977973" y3="-1.180992" z3="0.636182"/>
                        <atom elementType="H" id="a10" x3="2.870854" y3="1.184482" z3="-0.845826"/>
                        <atom elementType="H" id="a11" x3="3.898197" y3="-0.260344" z3="-0.774609"/>
                        <atom elementType="H" id="a12" x3="3.65166" y3="0.713962" z3="0.665185"/>
                        <atom elementType="H" id="a13" x3="0.326626" y3="1.605625" z3="-0.878938"/>
                        <atom elementType="H" id="a14" x3="-2.056225" y3="2.140868" z3="-1.051424"/>
                        <atom elementType="H" id="a15" x3="-3.743285" y3="0.584294" z3="-0.149742"/>
                        <atom elementType="H" id="a16" x3="-3.065181" y3="-1.523731" z3="0.933321"/>
                        <atom elementType="H" id="a17" x3="-0.691485" y3="-2.112238" z3="1.107797"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1578,.3307,-.2326;1.7209,-.6908,.2326;2.0703,-2.1102,.825;-.0073,-.2966,.1255;-.4037,.9113,-.4809;-1.7445,1.2197,-.5798;-2.6927,.3381,-.0706;-2.3142,-.854,.5388;-.978,-1.181,.6362;2.8709,1.1845,-.8458;3.8982,-.2603,-.7746;3.6517,.714,.6652;.3266,1.6056,-.8789;-2.0562,2.1409,-1.0514;-3.7433,.5843,-.1497;-3.0652,-1.5237,.9333;-.6915,-2.1122,1.1078;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.157004" y3="0.330591" z3="-0.234878"/>
                        <atom elementType="Si" id="a2" x3="1.721141" y3="-0.692062" z3="0.233745"/>
                        <atom elementType="F" id="a3" x3="2.071432" y3="-2.10927" z3="0.831045"/>
                        <atom elementType="C" id="a4" x3="-0.007941" y3="-0.297813" z3="0.126137"/>
                        <atom elementType="C" id="a5" x3="-0.402905" y3="0.910797" z3="-0.47931"/>
                        <atom elementType="C" id="a6" x3="-1.743395" y3="1.220293" z3="-0.577922"/>
                        <atom elementType="C" id="a7" x3="-2.692706" y3="0.338859" z3="-0.070402"/>
                        <atom elementType="C" id="a8" x3="-2.314986" y3="-0.854626" z3="0.53723"/>
                        <atom elementType="C" id="a9" x3="-0.97897" y3="-1.182221" z3="0.635045"/>
                        <atom elementType="H" id="a10" x3="2.869645" y3="1.1803" z3="-0.853404"/>
                        <atom elementType="H" id="a11" x3="3.901455" y3="-0.260313" z3="-0.771624"/>
                        <atom elementType="H" id="a12" x3="3.647556" y3="0.720806" z3="0.661841"/>
                        <atom elementType="H" id="a13" x3="0.328171" y3="1.60502" z3="-0.87576"/>
                        <atom elementType="H" id="a14" x3="-2.053972" y3="2.142681" z3="-1.04796"/>
                        <atom elementType="H" id="a15" x3="-3.743069" y3="0.585966" z3="-0.149538"/>
                        <atom elementType="H" id="a16" x3="-3.066253" y3="-1.524847" z3="0.930316"/>
                        <atom elementType="H" id="a17" x3="-0.692406" y3="-2.114061" z3="1.105339"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.157,.3306,-.2349;1.7211,-.6921,.2337;2.0714,-2.1093,.831;-.0079,-.2978,.1261;-.4029,.9108,-.4793;-1.7434,1.2203,-.5779;-2.6927,.3389,-.0704;-2.315,-.8546,.5372;-.979,-1.1822,.635;2.8696,1.1803,-.8534;3.9015,-.2603,-.7716;3.6476,.7208,.6618;.3282,1.605,-.8758;-2.054,2.1427,-1.048;-3.7431,.586,-.1495;-3.0663,-1.5248,.9303;-.6924,-2.1141,1.1053;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.15799" y3="0.330638" z3="-0.234543"/>
                        <atom elementType="Si" id="a2" x3="1.721077" y3="-0.691007" z3="0.234974"/>
                        <atom elementType="F" id="a3" x3="2.071246" y3="-2.107448" z3="0.834399"/>
                        <atom elementType="C" id="a4" x3="-0.008636" y3="-0.297019" z3="0.126682"/>
                        <atom elementType="C" id="a5" x3="-0.403697" y3="0.910777" z3="-0.48007"/>
                        <atom elementType="C" id="a6" x3="-1.744258" y3="1.219414" z3="-0.57948"/>
                        <atom elementType="C" id="a7" x3="-2.693627" y3="0.338155" z3="-0.071559"/>
                        <atom elementType="C" id="a8" x3="-2.315368" y3="-0.854623" z3="0.537359"/>
                        <atom elementType="C" id="a9" x3="-0.979231" y3="-1.181363" z3="0.63603"/>
                        <atom elementType="H" id="a10" x3="2.870443" y3="1.187721" z3="-0.842622"/>
                        <atom elementType="H" id="a11" x3="3.896131" y3="-0.257881" z3="-0.782705"/>
                        <atom elementType="H" id="a12" x3="3.657581" y3="0.709425" z3="0.662088"/>
                        <atom elementType="H" id="a13" x3="0.327352" y3="1.604769" z3="-0.876876"/>
                        <atom elementType="H" id="a14" x3="-2.054908" y3="2.141316" z3="-1.050462"/>
                        <atom elementType="H" id="a15" x3="-3.744032" y3="0.584767" z3="-0.151337"/>
                        <atom elementType="H" id="a16" x3="-3.066302" y3="-1.525044" z3="0.93075"/>
                        <atom elementType="H" id="a17" x3="-0.691959" y3="-2.112497" z3="1.107272"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.158,.3306,-.2345;1.7211,-.691,.235;2.0712,-2.1074,.8344;-.0086,-.297,.1267;-.4037,.9108,-.4801;-1.7443,1.2194,-.5795;-2.6936,.3382,-.0716;-2.3154,-.8546,.5374;-.9792,-1.1814,.636;2.8704,1.1877,-.8426;3.8961,-.2579,-.7827;3.6576,.7094,.6621;.3274,1.6048,-.8769;-2.0549,2.1413,-1.0505;-3.744,.5848,-.1513;-3.0663,-1.525,.9307;-.692,-2.1125,1.1073;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.159264" y3="0.330892" z3="-0.233402"/>
                        <atom elementType="Si" id="a2" x3="1.721027" y3="-0.689259" z3="0.236556"/>
                        <atom elementType="F" id="a3" x3="2.071026" y3="-2.105432" z3="0.836916"/>
                        <atom elementType="C" id="a4" x3="-0.00926" y3="-0.295725" z3="0.127491"/>
                        <atom elementType="C" id="a5" x3="-0.404743" y3="0.910712" z3="-0.481614"/>
                        <atom elementType="C" id="a6" x3="-1.745527" y3="1.217922" z3="-0.582358"/>
                        <atom elementType="C" id="a7" x3="-2.694632" y3="0.336968" z3="-0.073371"/>
                        <atom elementType="C" id="a8" x3="-2.315689" y3="-0.854328" z3="0.538049"/>
                        <atom elementType="C" id="a9" x3="-0.979349" y3="-1.179885" z3="0.638001"/>
                        <atom elementType="H" id="a10" x3="2.871271" y3="1.199569" z3="-0.824495"/>
                        <atom elementType="H" id="a11" x3="3.886986" y3="-0.253641" z3="-0.799633"/>
                        <atom elementType="H" id="a12" x3="3.672632" y3="0.691031" z3="0.663108"/>
                        <atom elementType="H" id="a13" x3="0.326092" y3="1.604419" z3="-0.879302"/>
                        <atom elementType="H" id="a14" x3="-2.056566" y3="2.138712" z3="-1.055284"/>
                        <atom elementType="H" id="a15" x3="-3.745159" y3="0.582661" z3="-0.154232"/>
                        <atom elementType="H" id="a16" x3="-3.066222" y3="-1.524666" z3="0.932368"/>
                        <atom elementType="H" id="a17" x3="-0.691349" y3="-2.109851" z3="1.111103"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1593,.3309,-.2334;1.721,-.6893,.2366;2.071,-2.1054,.8369;-.0093,-.2957,.1275;-.4047,.9107,-.4816;-1.7455,1.2179,-.5824;-2.6946,.337,-.0734;-2.3157,-.8543,.538;-.9793,-1.1799,.638;2.8713,1.1996,-.8245;3.887,-.2536,-.7996;3.6726,.691,.6631;.3261,1.6044,-.8793;-2.0566,2.1387,-1.0553;-3.7452,.5827,-.1542;-3.0662,-1.5247,.9324;-.6913,-2.1099,1.1111;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="3.159115" y3="0.331205" z3="-0.233163"/>
                        <atom elementType="Si" id="a2" x3="1.721107" y3="-0.689145" z3="0.237024"/>
                        <atom elementType="F" id="a3" x3="2.071488" y3="-2.10528" z3="0.837229"/>
                        <atom elementType="C" id="a4" x3="-0.009322" y3="-0.295734" z3="0.127936"/>
                        <atom elementType="C" id="a5" x3="-0.404634" y3="0.910394" z3="-0.481941"/>
                        <atom elementType="C" id="a6" x3="-1.745446" y3="1.217421" z3="-0.583251"/>
                        <atom elementType="C" id="a7" x3="-2.694609" y3="0.33675" z3="-0.073971"/>
                        <atom elementType="C" id="a8" x3="-2.315828" y3="-0.854104" z3="0.538335"/>
                        <atom elementType="C" id="a9" x3="-0.979502" y3="-1.179639" z3="0.638795"/>
                        <atom elementType="H" id="a10" x3="2.870417" y3="1.203131" z3="-0.819092"/>
                        <atom elementType="H" id="a11" x3="3.884071" y3="-0.251558" z3="-0.804763"/>
                        <atom elementType="H" id="a12" x3="3.676215" y3="0.68601" z3="0.663331"/>
                        <atom elementType="H" id="a13" x3="0.326273" y3="1.603898" z3="-0.879858"/>
                        <atom elementType="H" id="a14" x3="-2.056424" y3="2.137871" z3="-1.056877"/>
                        <atom elementType="H" id="a15" x3="-3.745121" y3="0.582363" z3="-0.1553"/>
                        <atom elementType="H" id="a16" x3="-3.066449" y3="-1.524182" z3="0.932939"/>
                        <atom elementType="H" id="a17" x3="-0.69155" y3="-2.109301" z3="1.112526"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a10" order="S"/>
                        <bond atomRefs2="a1 a12" order="S"/>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a11" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a4" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a9" order="S"/>
                        <bond atomRefs2="a5 a13" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a14" order="S"/>
                        <bond atomRefs2="a7 a15" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a8 a16" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a17" order="S"/>
                     </bondArray>
                     <formula concise="C7H8FSi">
                        <atomArray count="7 8 1 1" elementType="C H F Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">131.1588032</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1591,.3312,-.2332;1.7211,-.6891,.237;2.0715,-2.1053,.8372;-.0093,-.2957,.1279;-.4046,.9104,-.4819;-1.7454,1.2174,-.5833;-2.6946,.3367,-.074;-2.3158,-.8541,.5383;-.9795,-1.1796,.6388;2.8704,1.2031,-.8191;3.8841,-.2516,-.8048;3.6762,.686,.6633;.3263,1.6039,-.8799;-2.0564,2.1379,-1.0569;-3.7451,.5824,-.1553;-3.0664,-1.5242,.9329;-.6915,-2.1093,1.1125;</scalar>
</formula>
</molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.540984196293</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.540994858218</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541045353957</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541020688366</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541031587036</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541039341751</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541045742822</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541046964970</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="17">-0.556827 0.960182 -0.170746 -0.245446 -0.079034 -0.109841 -0.043270 -0.107124 -0.069580 0.190281 0.203303 0.205705 0.154058 0.166532 0.168716 0.167490 0.165601</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="17">7.0176 12.6676 9.4007 6.2104 6.2346 6.1940 6.1952 6.1943 6.2418 0.6904 0.6704 0.6734 0.7466 0.7175 0.7097 0.7154 0.7203</array>
                     <array dataType="xsd:double" dictRef="o:za" size="17">6.0000 14.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="17">-1.0176 1.3324 -0.4007 -0.2104 -0.2346 -0.1940 -0.1952 -0.1943 -0.2418 0.3096 0.3296 0.3266 0.2534 0.2825 0.2903 0.2846 0.2797</array>
                     <array dataType="xsd:double" dictRef="o:va" size="17">3.6515 3.3697 1.0759 3.6731 3.7841 3.7954 3.7572 3.7767 3.7912 0.8762 0.8661 0.8669 0.9005 0.8870 0.8829 0.8862 0.8903</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="17">3.6515 3.3697 1.0759 3.6731 3.7841 3.7954 3.7572 3.7767 3.7912 0.8762 0.8661 0.8669 0.9005 0.8870 0.8829 0.8862 0.8903</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="17">0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="17">1.0162 0.8685 0.8582 0.8529 1.0290 1.1136 1.2592 1.2737 1.4804 0.9061 1.3824 0.8955 1.3778 0.8921 1.4712 0.8952 0.8968</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="17">0 1 0 9 0 10 0 11 1 2 1 3 3 4 3 8 4 5 4 12 5 6 5 13 6 7 6 14 7 8 7 15 8 16</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="17">-1.017583 1.332428 -0.400735 -0.210400 -0.234557 -0.194007 -0.195192 -0.194253 -0.241842 0.309560 0.329584 0.326644 0.253357 0.282487 0.290262 0.284570 0.279677</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="154">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="154">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="154" units="nonsi:electronvolt">-1824.0830 -688.5823 -289.5854 -289.5009 -289.3832 -289.2809 -289.0751 -288.7890 -288.7500 -157.8204 -111.4568 -111.3208 -111.1885 -41.4107 -30.8450 -27.7594 -27.6047 -26.9873 -23.5263 -23.2787 -21.9110 -20.7749 -19.6075 -19.5684 -19.0297 -18.7163 -18.2017 -17.9624 -17.8746 -17.7152 -16.7043 -16.3570 -15.5037 -15.1463 -13.0875 -12.6883 -6.8118 -4.2319 -4.0254 -3.7860 -2.7103 -0.6220 -0.1396 0.3879 0.5982 0.7470 1.1671 1.5417 1.7421 2.6582 3.0707 3.4207 4.1582 4.6036 4.9359 5.5377 6.6329 6.9092 7.8923 8.1059 8.9744 9.2945 9.9971 10.1991 10.5399 11.5420 11.6593 11.7526 12.0865 12.5479 12.6757 12.7491 12.9154 13.4751 13.7526 14.2949 14.6482 15.0538 16.2837 16.9852 18.2667 19.9209 21.0076 21.2944 21.8004 22.2887 22.3823 23.0467 23.3512 23.8415 24.0390 24.2891 25.0261 25.3391 25.8015 26.0000 27.2707 28.7262 28.9807 29.3020 29.5259 30.0234 30.6198 30.7286 31.4137 32.3124 33.0739 35.2873 36.1740 37.3836 37.4666 37.7903 37.8892 38.5017 39.8268 41.9276 44.1648 44.9922 45.8860 46.8952 48.0984 51.2235 51.3846 53.5949 53.6956 54.7293 55.1393 55.4758 55.4955 56.0962 57.6875 58.6161 59.5392 59.7374 60.2359 65.4624 67.2229 69.5293 69.9999 70.5046 70.9562 71.6573 72.6724 76.1718 79.0269 89.0240 356.2047 366.5510 367.5478 368.5343 378.7842 380.0174 390.8759 887.4411</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="C" id="a1" x3="3.158263" y3="0.331848" z3="-0.233017"/>
                  <atom elementType="Si" id="a2" x3="1.721275" y3="-0.689449" z3="0.237641"/>
                  <atom elementType="F" id="a3" x3="2.072642" y3="-2.105488" z3="0.837372"/>
                  <atom elementType="C" id="a4" x3="-0.009223" y3="-0.296214" z3="0.128721"/>
                  <atom elementType="C" id="a5" x3="-0.404005" y3="0.909615" z3="-0.48219"/>
                  <atom elementType="C" id="a6" x3="-1.744773" y3="1.216781" z3="-0.584348"/>
                  <atom elementType="C" id="a7" x3="-2.694198" y3="0.336662" z3="-0.074762"/>
                  <atom elementType="C" id="a8" x3="-2.316005" y3="-0.853725" z3="0.538706"/>
                  <atom elementType="C" id="a9" x3="-0.979789" y3="-1.179568" z3="0.639916"/>
                  <atom elementType="H" id="a10" x3="2.867965" y3="1.207424" z3="-0.81265"/>
                  <atom elementType="H" id="a11" x3="3.880231" y3="-0.24823" z3="-0.811103"/>
                  <atom elementType="H" id="a12" x3="3.67952" y3="0.680571" z3="0.663459"/>
                  <atom elementType="H" id="a13" x3="0.327147" y3="1.60276" z3="-0.880287"/>
                  <atom elementType="H" id="a14" x3="-2.05544" y3="2.136868" z3="-1.058872"/>
                  <atom elementType="H" id="a15" x3="-3.744633" y3="0.582413" z3="-0.15678"/>
                  <atom elementType="H" id="a16" x3="-3.066965" y3="-1.52324" z3="0.933626"/>
                  <atom elementType="H" id="a17" x3="-0.692211" y3="-2.108927" z3="1.114468"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a4" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a14" order="S"/>
                  <bond atomRefs2="a7 a15" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a8 a16" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a17" order="S"/>
               </bondArray>
               <formula concise="C7H8FSi">
                  <atomArray count="7 8 1 1" elementType="C H F Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">131.1588032</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C7H8FSi/c1-9(8)7-5-3-2-4-6-7/h2-6H,1H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,7,6,8,5,9,4,3,2/E:(3,4)(5,6)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,9.3/rA:17nCSi3FC3C3C3C3C3C3HHHHHHHH/rB:s1;s2;s2;s4;s5;s6;s7;s4s8;s1;s1;s1;s5;s6;s7;s8;s9;/rC:3.1583,.3318,-.233;1.7213,-.6894,.2376;2.0726,-2.1055,.8374;-.0092,-.2962,.1287;-.404,.9096,-.4822;-1.7448,1.2168,-.5843;-2.6942,.3367,-.0748;-2.316,-.8537,.5387;-.9798,-1.1796,.6399;2.868,1.2074,-.8126;3.8802,-.2482,-.8111;3.6795,.6806,.6635;.3271,1.6028,-.8803;-2.0554,2.1369,-1.0589;-3.7446,.5824,-.1568;-3.067,-1.5232,.9336;-.6922,-2.1089,1.1145;</scalar>
</formula>
</molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-659.55092441</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">482.72524834</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-1142.27617275</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:oneelecener" units="nonsi:hartree">-1849.93881641</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">707.66264365</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:potentialEnergy" units="nonsi:hartree">-1315.69689367</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:kineticenergy" units="nonsi:hartree">656.14596926</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00518933</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">35.999927043996</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">35.999927043996</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">71.999854087991</scalar>
                     <scalar dataType="xsd:double" dictRef="o:exchangeener" units="nonsi:hartree">-38.733018903181</scalar>
                     <scalar dataType="xsd:double" dictRef="o:correlationener" units="nonsi:hartree">-3.238173089547</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-41.971191992727</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009711939</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009711391</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009708146</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009705012</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009705373</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009704255</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009702887</scalar>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009702903</scalar>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="154">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="154">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double" dictRef="cc:energy" size="154" units="nonsi:electronvolt">-1824.0768 -688.5688 -289.5882 -289.5017 -289.3863 -289.2808 -289.0764 -288.7891 -288.7506 -157.8149 -111.4508 -111.3161 -111.1828 -41.3980 -30.8451 -27.7578 -27.6054 -26.9895 -23.5281 -23.2787 -21.9038 -20.7729 -19.5982 -19.5600 -19.0257 -18.7178 -18.1993 -17.9513 -17.8805 -17.7210 -16.7037 -16.3577 -15.5044 -15.1480 -13.0895 -12.6885 -6.8134 -4.2065 -4.0287 -3.7819 -2.7293 -0.6399 -0.0870 0.3842 0.5958 0.7304 1.1483 1.5481 1.7498 2.6542 3.0727 3.4630 4.1765 4.6080 4.9408 5.5687 6.6145 6.9281 7.8703 8.1263 8.9540 9.3032 9.9929 10.1981 10.6185 11.5857 11.6992 11.7331 12.0826 12.5100 12.5602 12.7005 12.8608 13.4630 13.7421 14.2860 14.6528 15.0200 16.2841 16.9722 18.2543 20.0553 21.0270 21.3185 21.8070 22.2993 22.3828 22.8641 23.3603 23.8549 24.0404 24.2982 25.0370 25.3481 25.7792 26.0564 27.2839 28.7110 28.9861 29.3238 29.5248 30.0112 30.6185 30.7781 31.4193 32.3568 33.1130 35.2850 36.1824 37.4228 37.4660 37.7927 37.9091 38.4889 39.7835 41.9030 44.2132 44.9628 45.8762 46.9139 48.0711 51.1996 51.3860 53.5860 53.7012 54.7203 55.1431 55.4708 55.4975 56.1000 57.7125 58.6393 59.5357 59.7339 60.2332 65.4681 67.2196 69.5242 70.0169 70.4991 70.9549 71.6525 72.6725 76.1418 79.0215 89.0204 356.2139 366.5497 367.5472 368.5648 378.7800 380.0131 390.8708 887.4347</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="17">-1.017179 1.334062 -0.401259 -0.210226 -0.235051 -0.193800 -0.195263 -0.194132 -0.242434 0.309102 0.328713 0.326948 0.253254 0.282552 0.290310 0.284606 0.279797</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="17">-0.556438 0.960118 -0.171326 -0.245666 -0.078665 -0.109847 -0.043119 -0.107221 -0.069476 0.189420 0.203919 0.205683 0.154105 0.166569 0.168729 0.167508 0.165709</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="17">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="17">C Si F C C C C C C H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="17">7.0172 12.6659 9.4013 6.2102 6.2351 6.1938 6.1953 6.1941 6.2424 0.6909 0.6713 0.6731 0.7467 0.7174 0.7097 0.7154 0.7202</array>
                     <array dataType="xsd:double" dictRef="o:za" size="17">6.0000 14.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="17">-1.0172 1.3341 -0.4013 -0.2102 -0.2351 -0.1938 -0.1953 -0.1941 -0.2424 0.3091 0.3287 0.3269 0.2533 0.2826 0.2903 0.2846 0.2798</array>
                     <array dataType="xsd:double" dictRef="o:va" size="17">3.6525 3.3678 1.0749 3.6730 3.7853 3.7947 3.7571 3.7767 3.7918 0.8764 0.8663 0.8670 0.9010 0.8869 0.8829 0.8861 0.8904</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="17">3.6525 3.3678 1.0749 3.6730 3.7853 3.7947 3.7571 3.7767 3.7918 0.8764 0.8663 0.8670 0.9010 0.8869 0.8829 0.8861 0.8904</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="17">0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="17">1.0157 0.8693 0.8571 0.8537 1.0276 1.1136 1.2594 1.2734 1.4804 0.9063 1.3821 0.8955 1.3778 0.8921 1.4714 0.8952 0.8966</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="17">0 1 0 9 0 10 0 11 1 2 1 3 3 4 3 8 4 5 4 12 5 6 5 13 6 7 6 14 7 8 7 15 8 16</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dispersion" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispersion" units="nonsi:hartree">-0.009703479</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-659.541048155917</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-2.25489 3.12789 0.87300 6.58470 -5.88570 0.69900 -2.70779 2.39534 -0.31245</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.16119</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.95150</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
