<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:g="http://www.iochem-bd.org/dictionary/gaussian/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="grrm.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module cmlx:templateRef="final-geometry"/>
         <module cmlx:templateRef="frequencies"/>
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar cmlx:templateRef="program.name" dataType="xsd:string">GRRM</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:integer">23</scalar>
               </parameter>
               <parameter dictRef="cc:programDate">
                  <scalar dataType="xsd:string">January 23, 2023</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:jobtype">
                  <scalar dataType="xsd:string">Saddle</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">wB97XD</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">def2svpp</scalar>
               </parameter>
               <parameter dictRef="cc:charge">
                  <scalar dataType="xsd:integer">0</scalar>
               </parameter>
               <parameter dictRef="cc:multiplicity">
                  <scalar dataType="xsd:integer">1</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">1</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.53033014" y3="1.85671064" z3="3.31173547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.77890603" y3="1.0435818" z3="4.84806618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.74575736" y3="1.56608043" z3="3.88711002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.68822097" y3="2.90438164" z3="1.40218012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.52497959" y3="2.57290839" z3="2.07752747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.80965541" y3="2.90076957" z3="-0.89664817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58670917" y3="3.5345449" z3="0.05356422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.30969294" y3="4.53495683" z3="-2.57972001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="2.65516893" y3="3.38019892" z3="-2.22847226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="3.21632489" y3="4.9246061" z3="-3.59815422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09197339" y3="1.79698343" z3="-0.53721329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.31690075" y3="2.91851344" z3="1.55108602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.67623054" y3="2.11880496" z3="0.26087924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.21270275" y3="3.04736419" z3="-0.47265346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.19648014" y3="0.73515633" z3="0.67339062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.29757334" y3="-0.18131853" z3="-0.81159927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.54900357" y3="-4.35445432" z3="-2.22961721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.70750269" y3="-3.6792999" z3="-2.05051414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.56564781" y3="-1.93663533" z3="-1.56137214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.64566258" y3="-2.95519173" z3="-0.86658443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.70247144" y3="-3.53297666" z3="-3.00781258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.65034444" y3="-2.65616567" z3="-2.76084416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58740364" y3="-2.07695168" z3="-0.59259384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.42136744" y3="-3.04805909" z3="-0.10248627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.74608874" y3="-4.07724986" z3="-3.95457323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-0.10633414" y3="-2.48961374" z3="-3.53273905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.50186215" y3="-1.02549679" z3="-1.3643712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.75481446" y3="-1.20945973" z3="-1.81532535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.9090533" y3="-2.15845771" z3="-2.33756794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.54819905" y3="-0.08245087" z3="-2.34519615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-4.0491246" y3="1.9886557" z3="-3.48512326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.5300848" y3="-0.36075476" z3="-3.30897326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.31624452" y3="1.24626677" z3="-1.97159808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-3.07091788" y3="2.2724083" z3="-2.53309794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.27135825" y3="0.66819381" z3="-3.88002606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.69067673" y3="-1.39130728" z3="-3.63666161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.54276262" y3="1.53064887" z3="-1.25558639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.86368413" y3="3.30030654" z3="-2.22426678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-5.01347151" y3="0.4400461" z3="-4.64904114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.63036333" y3="2.797924" z3="-3.93621086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.59978428" y3="-1.4642408" z3="0.59573865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.08905094" y3="-0.60865982" z3="0.63498691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.74821029" y3="2.63700949" z3="-3.14208841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07925814" y3="-1.70526294" z3="-0.15038705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.23724083" y3="-2.77961518" z3="0.14645345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.38466399" y3="-3.914081" z3="-0.48992151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.71454223" y3="-5.45838644" z3="-0.03435911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.26661128" y3="-5.77056632" z3="1.72668513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.13473556" y3="-5.46228319" z3="-0.23362712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-2.55607621" y3="-6.59753575" z3="-1.25086471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.1660099" y3="-2.77049944" z3="0.90739657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-0.99319344" y3="-2.01934953" z3="2.11107838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.3611229" y3="-5.66268555" z3="1.82731515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-1.78404174" y3="-5.07526214" z3="2.43484894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.00111749" y3="-6.79803406" z3="2.03478598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.52754985" y3="-6.4857384" z3="-0.09001112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.62515688" y3="-4.79433327" z3="0.49283644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.42644583" y3="-5.12464193" z3="-1.24328286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-2.25603468" y3="-7.64586135" z3="-1.07348095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-2.27932058" y3="-6.33907303" z3="-2.28813928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.65492237" y3="-6.53776281" z3="-1.16449055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-1.88828999" y3="-2.10722289" z3="2.74643371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-0.74798669" y3="-0.97024251" z3="1.90342679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-0.13622475" y3="-2.4918607" z3="2.60637109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.25969531" y3="1.34038868" z3="3.8836822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.09808981" y3="2.12438189" z3="3.96728592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-1.09923725" y3="1.57847848" z3="4.41228516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-1.13010003" y3="0.23761861" z3="4.78409374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="0.01275992" y3="-0.55428325" z3="4.76255803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="1.20015228" y3="0.00271685" z3="4.30390614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.12506915" y3="3.16815401" z3="3.65353515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-2.0120928" y3="2.17345626" z3="4.4585163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.41037328" y3="-0.36872428" z3="5.17084534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-0.04557577" y3="-1.59873532" z3="5.0711114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="2.09033702" y3="-0.62632713" z3="4.2238351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="0.6622223" y3="3.28303127" z3="-3.74561661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-0.25145916" y3="2.57166712" z3="-4.51673243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.07549384" y3="1.20000261" z3="-4.6633479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="1.00765538" y3="0.53381187" z3="-4.09950295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="1.91841307" y3="1.25957908" z3="-3.34469339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.5026154" y3="4.3481581" z3="-3.56179016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-1.11830482" y3="3.05648943" z3="-4.96651758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-1.0779344" y3="0.42458343" z3="-5.40187688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="1.12818825" y3="-0.53973377" z3="-4.24272217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="2.76047429" y3="0.74104434" z3="-2.88122237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="-3.36127234" y3="0.36444034" z3="5.32440534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
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                        </atom>
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                        </atom>
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                        </atom>
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                        </atom>
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                        </atom>
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                        </atom>
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                        </atom>
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            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">2</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.53073032" y3="1.8593676" z3="3.31617731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.78013831" y3="1.04536545" z3="4.85139825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.74644375" y3="1.56791247" z3="3.89048638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.68749365" y3="2.90540194" z3="1.40508108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.52468643" y3="2.57491295" z3="2.0816278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.80644551" y3="2.90040044" z3="-0.8928078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58481626" y3="3.53458681" z3="0.05612022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.3061362" y3="4.53275199" z3="-2.5777106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="2.65109523" y3="3.37873486" z3="-2.2248923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="3.21250455" y3="4.92124176" z3="-3.59656202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08924203" y3="1.79682753" z3="-0.53216052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.31633037" y3="2.92019481" z3="1.55572529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.67432969" y3="2.11731984" z3="0.26791331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.21762446" y3="3.04363565" z3="-0.4647312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.19838225" y3="0.73322426" z3="0.6830704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.30023411" y3="-0.18346917" z3="-0.80431966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.54210847" y3="-4.35356431" z3="-2.24456988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.70122101" y3="-3.67879892" z3="-2.06132937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.56129891" y3="-1.93557234" z3="-1.56226045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.64418064" y3="-2.95529493" z3="-0.87658926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.6920383" y3="-3.53197655" z3="-3.01406475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.64119929" y3="-2.6548873" z3="-2.76227219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58699479" y3="-2.07753583" z3="-0.59768344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.42300143" y3="-3.04878631" z3="-0.11570521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.73119266" y3="-4.075675" z3="-3.96138958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-0.11828822" y3="-2.4876255" z3="-3.53121719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.50501811" y3="-1.02533896" z3="-1.35960295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.76199154" y3="-1.20993191" z3="-1.80732292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.91128067" y3="-2.15633547" z3="-2.33604095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.54928481" y3="-0.08127834" z3="-2.34624113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-4.03910505" y3="1.99242288" z3="-3.4967004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.5263024" y3="-0.35809734" z3="-3.31537413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.31682893" y3="1.24717965" z3="-1.97233084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-3.06593964" y3="2.27467398" z3="-2.53908929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.26213747" y3="0.67208695" z3="-3.8915478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.68732841" y3="-1.38844197" z3="-3.64367317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.54646501" y3="1.53046848" z3="-1.25243885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.85809932" y3="3.30239388" z3="-2.22999722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-5.00025087" y3="0.44507169" z3="-4.6648071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.61539864" y3="2.8026578" z3="-3.95243776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.60341494" y3="-1.46629122" z3="0.59185829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.09411679" y3="-0.61026532" z3="0.63408014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.74410948" y3="2.6352613" z3="-3.13821304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.07465098" y3="-1.70507836" z3="-0.15211374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.23758687" y3="-2.78405595" z3="0.1556836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.38912204" y3="-3.91834396" z3="-0.47670634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.7138874" y3="-5.46494414" z3="-0.02985058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.26272945" y3="-5.78688634" z3="1.73028487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.13461399" y3="-5.46090551" z3="-0.23417205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-2.55590742" y3="-6.59859133" z3="-1.25092844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.1715636" y3="-2.77795817" z3="0.92079781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-0.9849864" y3="-2.00950374" z3="2.1127512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.3572442" y3="-5.68133061" z3="1.83302452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-1.78016513" y3="-5.09453701" z3="2.44129891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.99535644" y3="-6.81566746" z3="2.03249053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.53151147" y3="-6.48389994" z3="-0.09823375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.62505816" y3="-4.79589401" z3="0.49495119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.42207148" y3="-5.11610359" z3="-1.24270002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-2.25516048" y3="-7.64763503" z3="-1.07880774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-2.28033533" y3="-6.33513421" z3="-2.28726237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.654681" y3="-6.5399106" z3="-1.16308954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-1.87386671" y3="-2.08831445" z3="2.75793631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-0.73977074" y3="-0.96399021" z3="1.88794667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-0.12351952" y3="-2.4767885" z3="2.60498676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.26003509" y3="1.34388103" z3="3.88864174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.09890666" y3="2.12854753" z3="3.97253919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-1.09883103" y3="1.58307642" z3="4.4169298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-1.13063125" y3="0.24189016" z3="4.78745647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="0.01178002" y3="-0.55068905" z3="4.76576115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="1.19968063" y3="0.00603763" z3="4.30813485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.12647739" y3="3.17243814" z3="3.65923256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-2.01138939" y3="2.17851926" z3="4.46327692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.41133086" y3="-0.36388342" z3="5.17321182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-0.04722901" y3="-1.59537682" z3="5.07341064">
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                        </atom>
                        <atom elementType="H" id="a75" x3="2.08968077" y3="-0.62329257" z3="4.22815133">
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                        </atom>
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                        </atom>
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                        </atom>
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               </module>
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               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000495447284 0.000069629022 0.022147268884 0.005337745846</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.022257882 0.000008402 0.000031525 0.000083211 0.000123363 0.000193806 0.000229252 0.000295362 0.000304110 0.000442311 0.000536438 0.000550032 0.000636338 0.000768622 0.000793943 0.000846065 0.000914467 0.000945575 0.001024715 0.001121302 0.001147508 0.001253540 0.001354404 0.001415844 0.001435669 0.001520868 0.001617494 0.001804711 0.002011207 0.002197048 0.002476568 0.002803228 0.003229198 0.003372059 0.003518252 0.003880332 0.004109304 0.004269695 0.004826266 0.005053906 0.005380186 0.005923125 0.006148397 0.006898657 0.006996702 0.007147605 0.008324943 0.008675257 0.009093153 0.009579619 0.009852045 0.010542325 0.012046917 0.012551076 0.013925001 0.014105582 0.014615105 0.014792123 0.014921675 0.015588277 0.015647534 0.015949630 0.016277662 0.016785490 0.017491881 0.017681084 0.018344623 0.019779715 0.020213251 0.020868866 0.021609608 0.022689099 0.023204999 0.024155919 0.025696883 0.026136236 0.026592243 0.027640397 0.028081973 0.029153755 0.029919589 0.030151018 0.030378475 0.031248828 0.033845923 0.036267786 0.036573738 0.037379833 0.038994241 0.039704141 0.040115861 0.045457141 0.045863737 0.046156619 0.047280694 0.048617770 0.049352899 0.050073070 0.050720300 0.051664730 0.051785810 0.052297343 0.052383361 0.052580181 0.053524712 0.053905979 0.054091348 0.056259664 0.056340259 0.056815850 0.057012431 0.057547595 0.059015468 0.059307199 0.059956756 0.060349189 0.060628556 0.063366115 0.063990503 0.064164781 0.064991151 0.065854687 0.066583443 0.067173067 0.071585060 0.073036614 0.075224926 0.075735041 0.081546713 0.085469565 0.086655893 0.089363185 0.089794485 0.092527358 0.093770676 0.094292263 0.094889313 0.095055653 0.095588648 0.096338160 0.097869846 0.098647300 0.098933754 0.099233165 0.099727348 0.100452492 0.100493961 0.100591961 0.101849875 0.103343113 0.104003054 0.104730386 0.105354448 0.106396946 0.106726582 0.108091125 0.109391310 0.112005422 0.112299215 0.115144289 0.116275077 0.117216026 0.119147811 0.122704287 0.125443010 0.126320291 0.127517726 0.128727283 0.132201961 0.133533238 0.136332760 0.138884434 0.141359598 0.143489412 0.145709725 0.146426753 0.146684433 0.147204245 0.151895118 0.156611753 0.160379549 0.169747827 0.174858487 0.176276504 0.180236651 0.182330545 0.185052259 0.187360569 0.187719022 0.190209309 0.199923466 0.202670310 0.205625628 0.207178893 0.207647707 0.208227380 0.212023161 0.212606538 0.213052175 0.215729194 0.220642164 0.224413148 0.226190354 0.228597238 0.232221766 0.233390141 0.236736248 0.240864034 0.243230228 0.253854735 0.254944494 0.256746171 0.261148534 0.271829725 0.278237701 0.288005911 0.292566939 0.292901615 0.296453235 0.298678745 0.303406657 0.308263160 0.318819917 0.321074623 0.321412054 0.327574708 0.343969779 0.347019186 0.348752441 0.354081293 0.354606020 0.357410472 0.360831270 0.363356072 0.379578097 0.404158489 0.405745823 0.423391867 0.427665738 0.444249208 0.462194052 0.464240429 0.472567426 0.473148205 0.477883854 0.479024013 0.500842663 0.505414354 0.542933699 0.558339864 0.565847426 0.569381033 0.582910843 0.585140990 0.607325945 0.609311915 0.643169518 0.666760017 0.669607095 0.670667654 0.676286008 0.681386208 0.691153222 0.693983294 0.704994040 0.705249154 0.714045005 0.737407573 0.750156216 0.772285507 0.776328107 0.795539783 0.804708934 0.808311440 0.812008727 0.818915350 0.820427992 0.824524939 0.824914360 0.829067027 0.830946229 0.833895714 0.834650037 0.839831045 0.847220569 0.854128602 0.859750582 0.862501788 0.867347537 0.870751357 0.873201785 0.884086288 0.894522491 0.905120796 0.915611701 0.921600803 0.923800729 0.932332483 0.960224047 0.966097093 0.976219290 0.986409988 1.000896509 1.016648814 1.032713516 1.041581988 1.048127317 1.053690662 1.061087159 1.084554975 1.089357938 1.107778487 1.109390173 1.114007777 1.122542556 1.123595991 1.131796632 1.133499454 1.159381608 1.168318816 1.176117676 1.179296889 1.200268715 1.202757129 1.205437037 1.243111983 1.246166026 1.296054551 1.305138060 1.316828878 1.324654464 1.328878930 1.329970154 1.332540277 1.334988792 1.340158893 1.347413116 1.373252767 1.377206344 1.380081579 1.381050247 1.381633965 1.553697751 1.675293802 1.689350558</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">3</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.53171484" y3="1.86096755" z3="3.32029697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.78213072" y3="1.04842079" z3="4.85539967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.7477624" y3="1.56976299" z3="3.89384397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.68663389" y3="2.90467729" z3="1.40676167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.52451126" y3="2.57421937" z3="2.08448079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.8041159" y3="2.89897056" z3="-0.89066097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.58293622" y3="3.53350252" z3="0.05763565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.3011632" y3="4.53157102" z3="-2.57589052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="2.64680773" y3="3.37733223" z3="-2.22250077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="3.2064726" y3="4.92000981" z3="-3.5946575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08840422" y3="1.79471938" z3="-0.52940265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.31527164" y3="2.917197" z3="1.55900468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.67379654" y3="2.11349879" z3="0.27166671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.21993271" y3="3.03883573" z3="-0.46002445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.20030059" y3="0.72809456" z3="0.68546259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.29883364" y3="-0.18608454" z3="-0.80158669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.53989242" y3="-4.35426857" z3="-2.25746857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.69940421" y3="-3.67994879" z3="-2.0708774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.56117377" y3="-1.9378191" z3="-1.5637066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.64562075" y3="-2.95801462" z3="-0.88503521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.68762019" y3="-3.53225861" z3="-3.02074472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.63758539" y3="-2.65562746" z3="-2.76490031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.5891047" y3="-2.08066924" z3="-0.6018727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.426738" y3="-3.05245545" z3="-0.12666201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.72401736" y3="-4.07479551" z3="-3.96883027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-0.12389944" y3="-2.4873321" z3="-3.53162895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.50427868" y3="-1.0272504" z3="-1.35829372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.75938158" y3="-1.20974627" z3="-1.80846136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.91099987" y3="-2.15709491" z3="-2.33418057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.54728112" y3="-0.08144573" z3="-2.34452578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-4.02696979" y3="1.99383893" z3="-3.50479545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.51998556" y3="-0.35752793" z3="-3.31833569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.31548529" y3="1.2468164" z3="-1.96918307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-3.05959361" y3="2.27509884" z3="-2.5409276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.25048185" y3="0.67358043" z3="-3.8996772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.68066253" y3="-1.38775947" z3="-3.64717273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.54868326" y3="1.52937417" z3="-1.24518833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.85177421" y3="3.30269744" z3="-2.23143953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.98403945" y3="0.44746515" z3="-4.67753533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.59816844" y3="2.80487383" z3="-3.96558059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.60852203" y3="-1.47066154" z3="0.58817825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.09915144" y3="-0.61484592" z3="0.63257618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.73985525" y3="2.63405358" z3="-3.13594694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.08087336" y3="-1.70929385" z3="-0.14448382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.24155097" y3="-2.78568341" z3="0.1603197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.39269314" y3="-3.92100884" z3="-0.4718341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.71379919" y3="-5.46668346" z3="-0.03039006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.25703089" y3="-5.79966904" z3="1.7295524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.13450048" y3="-5.45829395" z3="-0.23750806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-2.55446646" y3="-6.59864182" z3="-1.25413797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.17387994" y3="-2.77887822" z3="0.92424018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-0.9835294" y3="-2.00795751" z3="2.11294068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.35176182" y3="-5.70033898" z3="1.83618734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-1.77579751" y3="-5.10893696" z3="2.44304785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-1.98347496" y3="-6.82890548" z3="2.0250675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.53365289" y3="-6.48100177" z3="-0.10633704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.62479023" y3="-4.7953053" z3="0.49357481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.41960986" y3="-5.10914405" z3="-1.24514295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-2.24951632" y3="-7.64731937" z3="-1.0871582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-2.28230848" y3="-6.32979741" z3="-2.29001674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.65326316" y3="-6.54432039" z3="-1.16351728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-1.87587816" y3="-2.07137965" z3="2.75461576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-0.72336346" y3="-0.9671889" z3="1.88382566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-0.13078225" y3="-2.48428335" z3="2.61148173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.26082519" y3="1.34812081" z3="3.89467585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.10255446" y3="2.13655043" z3="3.98237455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-1.09601289" y3="1.59434044" z3="4.42853222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-1.13152848" y3="0.25237827" z3="4.79590944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="0.00800865" y3="-0.54417068" z3="4.76979603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="1.1970612" y3="0.00968502" z3="4.31152348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.1330356" y3="3.18094188" z3="3.67084164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-2.00644653" y3="2.1927829" z3="4.47847902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.41340068" y3="-0.34967189" z3="5.18366962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-0.05402333" y3="-1.58938753" z3="5.07508686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="2.08509078" y3="-0.62212346" z3="4.22887878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="0.66042049" y3="3.28272747" z3="-3.7485561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-0.24960393" y3="2.57350594" z3="-4.52597107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.07710996" y3="1.2011004" z3="-4.66956866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
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                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
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                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
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                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a73 a87" order="S"/>
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                        <bond atomRefs2="a76 a77" order="S"/>
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                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
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                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
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                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
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                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
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                        <bond atomRefs2="a103 a107" order="S"/>
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                        <bond atomRefs2="a106 a107" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                     <formula concise="C53H48N3O11PSi">
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                     <formula concise="C53H48N3O11PSi">
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                     <formula concise="C53H48N3O11PSi">
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            <module cmlx:templateRef="geometry.cycle">
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               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.60829055" y3="1.79391021" z3="3.32853506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.93414713" y3="0.9187289" z3="4.76151457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.85152832" y3="1.47500628" z3="3.82270855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.65948546" y3="2.89145973" z3="1.38835389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.53540317" y3="2.54634675" z3="2.1193983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6696993" y3="2.91757331" z3="-0.86312898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.48712969" y3="3.54362113" z3="0.05799991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.12569954" y3="4.5509536" z3="-2.55918129">
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                        </atom>
                        <atom elementType="C" id="a9" x3="2.48401707" y3="3.39294117" z3="-2.192517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="3.01345442" y3="4.93499717" z3="-3.57785341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
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                        <atom elementType="O" id="a11" x3="1.95643963" y3="1.81993258" z3="-0.47777495">
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                        </atom>
                        <atom elementType="O" id="a12" x3="1.29991167" y3="2.90887539" z3="1.67294098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.58635531" y3="2.1490444" z3="0.39785618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.10775066" y3="0.76139437" z3="0.800998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.30328686" y3="-0.16236705" z3="-0.69563135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.62563581" y3="-4.31720432" z3="-1.91846467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.77229916" y3="-3.64698505" z3="-1.78264548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.60083674" y3="-1.9126654" z3="-1.40609174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.64906631" y3="-2.9182432" z3="-0.60612743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.81257776" y3="-3.51297401" z3="-2.78685503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.74562458" y3="-2.64053692" z3="-2.59501708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.57378658" y3="-2.0455799" z3="-0.38670484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.38796887" y3="-3.00361302" z3="0.194391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.90211779" y3="-4.06375572" z3="-3.72656705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.02130989" y3="-2.49291618" z3="-3.40124871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.47564758" y3="-1.00316335" z3="-1.26527957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.69582145" y3="-1.17535004" z3="-1.80326755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.81766162" y3="-2.11719377" z3="-2.34622555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-3.81273686" y3="2.06127539" z3="-3.6248482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.32220198" y3="-0.29426443" z3="-3.44045684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-2.93961547" y3="2.32258786" z3="-2.56886655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.99774506" y3="0.74953298" z3="-4.06540644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.45214175" y3="-1.31738651" z3="-3.80355119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.56035775" y3="1.54851393" z3="-1.15068892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.76244729" y3="3.34281943" z3="-2.21852524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.65601472" y3="0.53941751" z3="-4.91223899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.34032162" y3="2.88164379" z3="-4.12000628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.52242106" y3="-1.42968115" z3="0.79952137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.00792543" y3="-0.57478564" z3="0.81142072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.6043942" y3="2.62851669" z3="-3.11391523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.13936023" y3="-1.69465771" z3="-0.24077431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.31314923" y3="-2.76326214" z3="0.11821578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.40446109" y3="-3.89616331" z3="-0.53061163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.75229822" y3="-5.44078985" z3="-0.04887854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.45931769" y3="-5.80329193" z3="1.64582724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.10755704" y3="-5.41525722" z3="-0.07189423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.30299523" y3="-2.75065924" z3="0.95705411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-1.19454925" y3="-1.97899345" z3="2.15575666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.56101384" y3="-5.72712141" z3="1.64552048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
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                        </atom>
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                        </atom>
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                        </atom>
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               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004528069711 0.000458086532 0.022663016633 0.005338148509</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.022603833 -0.001167343 0.000027288 0.000085810 0.000131897 0.000216018 0.000277743 0.000313383 0.000337660 0.000505574 0.000547353 0.000563044 0.000737452 0.000796467 0.000861571 0.000885373 0.000947887 0.000997277 0.001073131 0.001164103 0.001204612 0.001264760 0.001384472 0.001433291 0.001548807 0.001642427 0.001755403 0.002099428 0.002213080 0.002493875 0.002846006 0.003264252 0.003490254 0.003879704 0.004041885 0.004191856 0.004701739 0.004898081 0.005065496 0.005508701 0.006055291 0.006665555 0.006912809 0.007168235 0.007295972 0.008316269 0.008676196 0.009198496 0.009648180 0.009887691 0.010554911 0.011847268 0.012155838 0.012586518 0.013982976 0.014139150 0.014660011 0.014815843 0.014947900 0.015598460 0.015659792 0.016019177 0.016569324 0.016972237 0.017600271 0.017770740 0.018814312 0.019797086 0.020223336 0.020924842 0.021640867 0.022701982 0.023220620 0.024238281 0.025701445 0.026142407 0.026649394 0.027641520 0.028091320 0.029154386 0.029997199 0.030372487 0.030694605 0.031264277 0.033884578 0.036267956 0.036770327 0.037472303 0.038990617 0.039749128 0.040122699 0.045459087 0.045868401 0.046207534 0.047280758 0.048618648 0.049353725 0.050074829 0.050741784 0.051664789 0.051785889 0.052297456 0.052383568 0.052581576 0.053535074 0.053928452 0.054106265 0.056263314 0.056341549 0.056817940 0.057015010 0.057561476 0.059024067 0.059308243 0.059961752 0.060374039 0.060668888 0.063390418 0.063998999 0.064180079 0.065028945 0.065864617 0.066584557 0.067179932 0.071689383 0.073036690 0.075235679 0.075981759 0.081613213 0.085502397 0.086728114 0.089366837 0.089806150 0.092618809 0.093773892 0.094298491 0.094895976 0.095072760 0.095686279 0.096359762 0.097888150 0.098648049 0.098962094 0.099269457 0.099792906 0.100454667 0.100498271 0.100593350 0.101913626 0.103348081 0.104038943 0.104732114 0.105357799 0.106481307 0.106747645 0.108094562 0.109406894 0.112020091 0.112306633 0.115164507 0.116311624 0.117246666 0.119171535 0.123050416 0.125473253 0.126550374 0.127617249 0.128732221 0.132204236 0.133541739 0.136352938 0.138930758 0.141401565 0.143533177 0.145751405 0.146685838 0.147172689 0.147219516 0.151887053 0.156876668 0.160417183 0.169930444 0.174953338 0.176315382 0.180285058 0.182338456 0.185118998 0.187370748 0.187876765 0.190255732 0.199966004 0.202671734 0.205643659 0.207225549 0.207704435 0.208484084 0.212025296 0.212709078 0.213323819 0.215735416 0.220646306 0.224433878 0.226194076 0.228656492 0.232328192 0.233392289 0.236757952 0.241032760 0.243303056 0.253922720 0.254950888 0.256784031 0.261280446 0.271831209 0.278334583 0.288056050 0.292757276 0.292949700 0.296456035 0.298793915 0.303490199 0.308365321 0.318854112 0.321098573 0.321762981 0.327837213 0.344873371 0.348279412 0.348805595 0.354098206 0.354641083 0.357423752 0.360832721 0.363378062 0.380351690 0.404620921 0.406281946 0.423523481 0.427723920 0.444253112 0.462881647 0.464255380 0.473282860 0.474259466 0.477889579 0.480855230 0.500843349 0.507002748 0.543761931 0.561183079 0.566047496 0.571045103 0.583134380 0.585244373 0.607370576 0.609388511 0.643461269 0.666766127 0.670055803 0.670673843 0.676311431 0.681393610 0.691155804 0.694227219 0.704996797 0.705425135 0.714326211 0.737480210 0.750156601 0.772286757 0.776335893 0.795737786 0.804711436 0.808313232 0.812029863 0.818935315 0.820543192 0.824527483 0.824915420 0.829114670 0.831177632 0.833898338 0.834653778 0.839831824 0.847221298 0.854130790 0.859754991 0.862513872 0.867372188 0.870973328 0.873348068 0.884105111 0.894626305 0.905142696 0.915617369 0.921614932 0.923804690 0.932339469 0.960227760 0.966109828 0.976258642 0.986426077 1.000899625 1.016651892 1.032738541 1.041585354 1.048134519 1.053692069 1.061102200 1.084591327 1.089368085 1.107787597 1.109384557 1.114008237 1.122543151 1.123596601 1.131798320 1.133501297 1.159382303 1.168330011 1.176119219 1.179302910 1.200272668 1.202771997 1.205440152 1.246167411 1.274859174 1.296107027 1.305151337 1.316885079 1.324722576 1.328891997 1.332526465 1.335010150 1.336446772 1.340193954 1.347459236 1.373262908 1.378828492 1.380194565 1.381067928 1.381780458 1.553701153 1.676056210 1.703470344</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">31</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.61073184" y3="1.79095533" z3="3.32782642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.93889425" y3="0.912783" z3="4.75683212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.85470387" y3="1.47041804" z3="3.81898298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.65868715" y3="2.89012983" z3="1.38693333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.5359281" y3="2.54515077" z3="2.11994073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66472272" y3="2.91781107" z3="-0.86258216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.48394336" y3="3.54321257" z3="0.05739874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.11927201" y3="4.55119624" z3="-2.55900362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="2.47781706" y3="3.39319501" z3="-2.19180876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="3.0062795" y3="4.93521237" z3="-3.57760543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.95105827" y3="1.8207943" z3="-0.47615902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.29982004" y3="2.9093773" z3="1.67646235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.58299762" y3="2.15130652" z3="0.40223164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.32329502" y3="3.10776877" z3="-0.27016123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.10350848" y3="0.76399137" z3="0.80551805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.30380013" y3="-0.16067993" z3="-0.6914276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.62932078" y3="-4.31435479" z3="-1.90376299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.77536307" y3="-3.6444933" z3="-1.77013814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.6020914" y3="-1.91099249" z3="-1.39912342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.64927942" y3="-2.9150602" z3="-0.59434377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.81752509" y3="-3.51171968" z3="-2.77629269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.74969742" y3="-2.63974783" z3="-2.58717719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.57308221" y3="-2.04285146" z3="-0.37770143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.38653131" y3="-2.99953069" z3="0.20780628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.90917224" y3="-4.0631385" z3="-3.71543588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.02677583" y3="-2.49350589" z3="-3.39486859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.47488938" y3="-1.00167264" z3="-1.26104976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.6939309" y3="-1.17362395" z3="-1.80189529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.81436805" y3="-2.11500612" z3="-2.34595143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.43654797" y3="-0.03500573" z3="-2.37921273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-3.80537077" y3="2.065088" z3="-3.62694648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.31413159" y3="-0.29054162" z3="-3.44448884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.24811213" y3="1.28432816" z3="-1.9520147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-2.93574437" y3="2.32515278" z3="-2.56824238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.98776923" y3="0.75398244" z3="-4.0704375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.44252999" y3="-1.31315437" z3="-3.80939911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.56029517" y3="1.54956905" z3="-1.14819672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.7602594" y3="3.34485998" z3="-2.21592043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.6436019" y3="0.54474994" z3="-4.91890813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.33235423" y3="2.88585325" z3="-4.12180088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51905272" y3="-1.42634648" z3="0.80806368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.00407905" y3="-0.57172402" z3="0.8186113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.59855819" y3="2.62804152" z3="-3.11294578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.14054376" y3="-1.69377259" z3="-0.24503017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.31483386" y3="-2.76225732" z3="0.11637626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.4029168" y3="-3.89459757" z3="-0.5335653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.75161098" y3="-5.4392499" z3="-0.05003814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.46780802" y3="-5.80403291" z3="1.64042498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.10827624" y3="-5.41224554" z3="-0.06252428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-2.44721306" y3="-6.55822149" z3="-1.37257264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.30776675" y3="-2.74970932" z3="0.959181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-1.20275143" y3="-1.9755209" z3="2.15676598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.56973978" y3="-5.72987412" z3="1.63372373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-2.07837791" y3="-5.11051711" z3="2.40577578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.20242359" y3="-6.82983104" z3="1.954552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.50053901" y3="-6.43512824" z3="0.08690464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.51323747" y3="-4.76349715" z3="0.73072919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.49334317" y3="-5.03899729" z3="-1.02707606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-2.14767785" y3="-7.60636274" z3="-1.19330086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-2.07267653" y3="-6.26698129" z3="-2.36968684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.55003246" y3="-6.51757952" z3="-1.39558989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.14268133" y3="-2.02426031" z3="2.7271547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-0.91072134" y3="-0.93938568" z3="1.94415426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-0.39963737" y3="-2.46166092" z3="2.72355554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.37099459" y3="1.2725739" z3="3.96050549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.25062377" y3="2.08567117" z3="4.19051067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-0.92161588" y3="1.55062039" z3="4.70918512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-0.96863938" y3="0.18924813" z3="4.99609208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="0.13499278" y3="-0.63654496" z3="4.81700182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="1.29937576" y3="-0.08786963" z3="4.29408948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.29040597" y3="3.14654164" z3="3.93970996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-1.80314639" y3="2.17084186" z3="4.88124901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.22765674" y3="-0.39809221" z3="5.47240744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="0.06447062" y3="-1.69606216" z3="5.06466103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="2.15603881" y3="-0.73556268" z3="4.09469727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="0.57378295" y3="3.26287712" z3="-3.8262728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-0.26612666" y3="2.538737" z3="-4.66762855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.08031055" y3="1.1649821" z3="-4.77421561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="0.93597984" y3="0.50716646" z3="-4.08902117">
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</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649290235697</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006020947275 0.000644356184 0.023980760391 0.005335420834</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.022629709 -0.001756753 0.000032261 0.000086285 0.000132365 0.000216261 0.000279138 0.000316702 0.000339783 0.000513837 0.000547005 0.000568739 0.000738021 0.000798220 0.000863807 0.000887142 0.000948539 0.000996675 0.001072540 0.001165669 0.001216979 0.001264353 0.001386856 0.001442606 0.001563203 0.001644749 0.001813663 0.002134500 0.002229459 0.002509275 0.002845809 0.003264596 0.003492765 0.003881419 0.004075979 0.004200729 0.004776516 0.004957517 0.005108866 0.005507795 0.006063261 0.006876028 0.007105514 0.007172742 0.007665730 0.008331191 0.008679321 0.009296504 0.009653775 0.009889232 0.010567835 0.012034727 0.012429373 0.012599598 0.013990328 0.014140837 0.014669638 0.014832598 0.014953606 0.015602123 0.015669321 0.016024217 0.016600018 0.017000031 0.017604748 0.017846045 0.018815797 0.019797000 0.020226136 0.020925389 0.021647388 0.022705392 0.023221820 0.024246651 0.025703339 0.026142298 0.026655355 0.027642359 0.028091752 0.029154409 0.029997848 0.030381791 0.030774644 0.031280598 0.033894485 0.036268663 0.036780229 0.037496687 0.038990130 0.039750536 0.040129937 0.045460284 0.045870765 0.046214901 0.047280773 0.048618881 0.049353633 0.050075536 0.050741774 0.051664791 0.051785850 0.052297484 0.052383607 0.052581511 0.053539208 0.053946333 0.054106992 0.056268690 0.056341633 0.056819318 0.057014965 0.057561748 0.059025741 0.059308268 0.059961945 0.060374810 0.060671135 0.063390713 0.064003057 0.064183230 0.065038541 0.065867678 0.066584747 0.067182678 0.071699652 0.073037721 0.075235461 0.075988298 0.081623043 0.085502934 0.086728794 0.089366776 0.089806411 0.092623066 0.093773988 0.094298401 0.094897225 0.095074115 0.095688707 0.096361975 0.097889299 0.098648107 0.098963269 0.099269581 0.099792593 0.100456017 0.100499921 0.100593572 0.101921542 0.103348039 0.104040343 0.104733842 0.105359779 0.106482542 0.106750222 0.108096155 0.109408548 0.112022286 0.112307579 0.115172304 0.116311747 0.117247518 0.119180650 0.123058542 0.125477778 0.126675658 0.127630453 0.128735401 0.132205290 0.133543171 0.136354979 0.138942864 0.141401457 0.143532940 0.145752658 0.146686374 0.147175177 0.147217161 0.151887336 0.156874208 0.160436006 0.169930223 0.174958214 0.176337660 0.180285303 0.182342098 0.185118095 0.187371001 0.187924306 0.190280677 0.199966220 0.202671788 0.205643656 0.207225532 0.207707191 0.208484729 0.212025354 0.212711313 0.213407977 0.215737197 0.220646347 0.224436014 0.226194549 0.228665808 0.232331744 0.233392289 0.236758573 0.241077633 0.243304427 0.253927510 0.254954250 0.256785120 0.261305716 0.271831231 0.278343847 0.288066982 0.292765691 0.292954822 0.296456031 0.298825900 0.303494857 0.308368921 0.318856083 0.321118298 0.321801518 0.327849233 0.344874375 0.348340585 0.348878723 0.354102195 0.354658529 0.357423758 0.360833738 0.363384224 0.380467613 0.404641150 0.406407802 0.423549854 0.427723989 0.444253952 0.463114302 0.464260249 0.473372651 0.474275144 0.477900385 0.480872000 0.500843628 0.507274132 0.543898834 0.561188041 0.566062533 0.571325312 0.583175287 0.585276431 0.607371076 0.609423024 0.643466666 0.666767349 0.670139421 0.670676877 0.676319402 0.681395529 0.691157920 0.694294409 0.705000918 0.705444487 0.714328719 0.737489416 0.750156612 0.772286776 0.776337359 0.795810277 0.804711949 0.808315136 0.812035792 0.818940201 0.820567237 0.824527464 0.824915473 0.829129031 0.831180176 0.833898542 0.834653762 0.839831839 0.847221318 0.854132245 0.859755129 0.862515864 0.867372602 0.870991677 0.873378432 0.884110906 0.894626543 0.905144971 0.915621387 0.921615841 0.923805798 0.932340167 0.960228093 0.966110055 0.976258711 0.986429768 1.000900277 1.016654779 1.032750996 1.041587829 1.048134542 1.053692562 1.061102915 1.084601050 1.089375064 1.107789183 1.109386734 1.114008336 1.122543169 1.123596821 1.131800416 1.133501473 1.159382544 1.168332144 1.176121265 1.179303095 1.200272728 1.202773632 1.205447632 1.246968844 1.276545212 1.296109106 1.305151387 1.316890435 1.324726951 1.328899141 1.332526821 1.335045348 1.337199531 1.340203044 1.347461505 1.373263128 1.378830859 1.380242433 1.381087383 1.381785578 1.553703633 1.677041420 1.703744850</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">32</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.6123904" y3="1.7878798" z3="3.32660216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.94234126" y3="0.90634923" z3="4.75170674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.85698183" y3="1.4654963" z3="3.81488684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.65754661" y3="2.88883657" z3="1.38530471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.53594505" y3="2.54395201" z3="2.12007183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6599472" y3="2.91801189" z3="-0.86244342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.48077114" y3="3.5428047" z3="0.05649938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.11311869" y3="4.55150368" z3="-2.55910157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="2.47205499" y3="3.39339759" z3="-2.1914951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="2.99927593" y3="4.93555981" z3="-3.57759527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.94578138" y3="1.82164099" z3="-0.47507939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.29927249" y3="2.90982258" z3="1.67944749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.57963047" y3="2.15361388" z3="0.40585288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.32641588" y3="3.11147399" z3="-0.26480687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.09916046" y3="0.76655504" z3="0.80905248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.30335629" y3="-0.15864932" z3="-0.68735661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.6335473" y3="-4.31189412" z3="-1.88880723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.77905199" y3="-3.64225787" z3="-1.75753288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.60457602" y3="-1.90903738" z3="-1.39263442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.65040381" y3="-2.9116969" z3="-0.5827655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.82304436" y3="-3.51101003" z3="-2.76563687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.75459344" y3="-2.6392222" z3="-2.57945927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.57350604" y3="-2.03961685" z3="-0.36904921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.38610659" y3="-2.9950855" z3="0.22089329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.91660422" y3="-4.06347178" z3="-3.70395276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.03286627" y3="-2.49468918" z3="-3.38849688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.47276712" y3="-0.99952764" z3="-1.25791965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.68990517" y3="-1.17106864" z3="-1.80246539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.80954817" y3="-2.11242832" z3="-2.34662727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.43243973" y3="-0.03253728" z3="-2.37887319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-3.79913046" y3="2.06816117" z3="-3.62775803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.30777783" y3="-0.28748046" z3="-3.44570103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.24539171" y3="1.28660127" z3="-1.95043711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-2.9317661" y3="2.32768759" z3="-2.56740033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-3.98065669" y3="0.75733602" z3="-4.07174656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.4347644" y3="-1.30975512" z3="-3.81191241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.56001105" y3="1.55123549" z3="-1.14417176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.75685299" y3="3.34720033" z3="-2.21461612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.63395845" y3="0.54870314" z3="-4.92232782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.32471365" y3="2.88930289" z3="-4.12375352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.5171272" y3="-1.42204566" z3="0.81595315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.00090398" y3="-0.5681604" z3="0.8252635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.59365717" y3="2.62778352" z3="-3.11306127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.14196721" y3="-1.69430396" z3="-0.24719483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.31545464" y3="-2.76119232" z3="0.11501654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.39936832" y3="-3.89324371" z3="-0.53653394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.75044966" y3="-5.43790643" z3="-0.05084443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.47603135" y3="-5.80442967" z3="1.63519608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.10948938" y3="-5.4107574" z3="-0.05294043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-2.43803688" y3="-6.55601277" z3="-1.37829273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.3109515" y3="-2.74757411" z3="0.96091403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-1.210902" y3="-1.97307929" z3="2.15874729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.57797569" y3="-5.73176417" z3="1.62194244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-2.09217705" y3="-5.1105607" z3="2.40296455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.21100248" y3="-6.82991497" z3="1.95064683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.50098329" y3="-6.43333839" z3="0.10058264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.51007665" y3="-4.76047889" z3="0.74121528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.49971236" y3="-5.03926928" z3="-1.01609224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-2.13862639" y3="-7.60411783" z3="-1.19856809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-2.0581287" y3="-6.26326226" z3="-2.37300412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.54080507" y3="-6.51619709" z3="-1.40746223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.15413311" y3="-2.01905987" z3="2.72457344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-0.91545099" y3="-0.93762414" z3="1.94642796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-0.4115599" y3="-2.46049906" z3="2.73010412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.3735456" y3="1.27003754" z3="3.96171183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.25509583" y3="2.08469523" z3="4.19769665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-0.91609386" y3="1.55094671" z3="4.72100231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-0.96409513" y3="0.1894417" z3="5.00624387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="0.13758027" y3="-0.63902397" z3="4.81840967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="1.30109539" y3="-0.09155673" z3="4.29136828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.29540438" y3="3.14547497" z3="3.94748275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-1.79618074" y3="2.17089252" z3="4.89433543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.22251123" y3="-0.39745228" z3="5.48291338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="0.06621861" y3="-1.7001278" z3="5.06143177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="2.15603286" y3="-0.7413039" z3="4.08421615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="0.57018457" y3="3.26224883" z3="-3.82875704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-0.26737477" y3="2.53784235" z3="-4.67225889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.08012129" y3="1.16439751" z3="-4.77991859">
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</molecule>
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                        <bond atomRefs2="a107 a109" order="S"/>
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                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
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                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
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</molecule>
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                        <bond atomRefs2="a76 a77" order="S"/>
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                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
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                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
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                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</molecule>
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                        <bond atomRefs2="a106 a107" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                        <bond atomRefs2="a67 a68" order="S"/>
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                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
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                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
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                        <bond atomRefs2="a66 a71" order="S"/>
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                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
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                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
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                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
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                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
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                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</formula>
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                     <formula concise="C53H48N3O11PSi">
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                     <formula concise="C53H48N3O11PSi">
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                     <formula concise="C53H48N3O11PSi">
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            </module>
            <module cmlx:templateRef="geometry.cycle">
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               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.66192654" y3="2.87638898" z3="1.39018123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.52342062" y3="2.54859339" z3="2.10714095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70106233" y3="2.90548042" z3="-0.87395034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.51497311" y3="3.52463827" z3="0.05474954">
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                        <atom elementType="C" id="a8" x3="3.17967898" y3="4.53786131" z3="-2.56475953">
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                        </atom>
                        <atom elementType="C" id="a9" x3="2.52517303" y3="3.38598863" z3="-2.202584">
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                        </atom>
                        <atom elementType="H" id="a10" x3="3.07308188" y3="4.92631539" z3="-3.58236015">
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                        </atom>
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                        </atom>
                        <atom elementType="P" id="a13" x3="0.59813159" y3="2.14907739" z3="0.36050194">
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                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.63147881" y3="-4.27422437" z3="-2.03284168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.77460108" y3="-3.61259713" z3="-1.8784366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.59440594" y3="-1.90053693" z3="-1.45468804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.66766456" y3="-2.88802957" z3="-0.69778189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.79406217" y3="-3.48520496" z3="-2.86331349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58830095" y3="-2.02668267" z3="-0.45504638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.42280723" y3="-2.9682167" z3="0.0879913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.87084998" y3="-4.03235131" z3="-3.8062995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-0.01689318" y3="-2.47732197" z3="-3.44093822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.48693092" y3="-1.00089639" z3="-1.29064339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.08703194" y3="0.72449673" z3="-4.00828044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.52553659" y3="-1.33909165" z3="-3.75459684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.57242816" y3="1.54311899" z3="-1.16673689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.8111979" y3="3.32935878" z3="-2.2075554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.76730364" y3="0.50898391" z3="-4.83577772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.43830975" y3="2.85526062" z3="-4.06219772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55401346" y3="-1.41477291" z3="0.73382373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.03010127" y3="-0.56642141" z3="0.75810604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.63044138" y3="2.63517373" z3="-3.12099213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.12221043" y3="-1.71577206" z3="-0.21188193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
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                        </atom>
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                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
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               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002218258139 0.000213600861 0.014815658393 0.005340407679</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.022857024 -0.000241176 0.000044012 0.000108986 0.000171066 0.000228616 0.000287243 0.000323948 0.000379381 0.000533279 0.000591317 0.000626024 0.000815257 0.000880871 0.000935291 0.000991096 0.001032460 0.001106748 0.001210088 0.001229121 0.001376677 0.001422522 0.001483363 0.001561602 0.001825031 0.002094725 0.002245641 0.002342261 0.002574718 0.002933586 0.003134952 0.003611975 0.003901550 0.004201458 0.004383800 0.004519909 0.005350129 0.005621099 0.005787046 0.006203362 0.006705975 0.007077758 0.007279040 0.008248766 0.008541443 0.008827197 0.009585648 0.009832798 0.009939608 0.010395584 0.010706124 0.012522145 0.012630350 0.014017002 0.014136771 0.014373390 0.014771420 0.014899661 0.015087527 0.015664638 0.015757613 0.016115101 0.016903291 0.017556955 0.017832436 0.018260957 0.019240820 0.019961950 0.020320813 0.021125248 0.021731566 0.022756058 0.023292573 0.024380450 0.025713819 0.026172423 0.026742882 0.027659990 0.028168150 0.029695811 0.030334340 0.030518663 0.031319637 0.032097706 0.034060308 0.036453443 0.037121774 0.038477422 0.039075858 0.039827542 0.040244526 0.045900348 0.046118330 0.046418539 0.048287034 0.048630417 0.050081624 0.050298982 0.050768862 0.051666502 0.051805630 0.052298091 0.052384382 0.052628239 0.053618060 0.054165748 0.054226796 0.056291247 0.056346041 0.056825859 0.057034356 0.057573619 0.059075490 0.059319507 0.059974581 0.060400328 0.060821746 0.063467972 0.064056599 0.064206969 0.065152378 0.065901517 0.066593439 0.067390632 0.071989925 0.073080228 0.075299630 0.076889906 0.082003735 0.085613142 0.087128144 0.089373875 0.089853467 0.093037383 0.093817166 0.094351901 0.094974012 0.095340164 0.095978019 0.096481592 0.097920258 0.098698074 0.099080223 0.099337215 0.099846423 0.100531808 0.100562928 0.100653339 0.102035618 0.103490024 0.104709013 0.104891765 0.105552131 0.106734754 0.106947421 0.108119049 0.109423363 0.112088292 0.112319852 0.115366345 0.116346163 0.117340507 0.119339588 0.123478722 0.125822138 0.127564448 0.128129559 0.128793680 0.132356458 0.133735237 0.136788962 0.139133014 0.141511732 0.143570143 0.145870446 0.146825243 0.147642841 0.147725955 0.151961333 0.157020632 0.160688414 0.170683271 0.175345756 0.176596877 0.180406698 0.182419682 0.185989894 0.187755906 0.188533907 0.190773572 0.200111221 0.202733529 0.205715577 0.207291668 0.207912732 0.209727684 0.212038018 0.212796706 0.214100724 0.215833185 0.220878870 0.224480129 0.226286298 0.228822229 0.232782250 0.233403392 0.237452296 0.242873340 0.243511636 0.253974473 0.254984398 0.256827349 0.261904772 0.271838043 0.278830140 0.288177769 0.293236725 0.293420266 0.296465817 0.299004200 0.303592707 0.308922259 0.318950248 0.321494711 0.322666535 0.328756551 0.345810922 0.349186842 0.354256788 0.354608651 0.357514762 0.360803367 0.363429124 0.366224240 0.380879506 0.404825150 0.407909878 0.425129070 0.427871014 0.444342175 0.463674377 0.464396143 0.474282363 0.475849833 0.478350912 0.484125117 0.500847918 0.507990776 0.544281909 0.563109671 0.566145537 0.572200366 0.583901641 0.586790496 0.607422731 0.611046381 0.643705169 0.666847556 0.670411996 0.672739893 0.676941478 0.681428034 0.691282200 0.695089744 0.705132911 0.706451838 0.714552029 0.737517981 0.750157983 0.772287802 0.776341806 0.796127751 0.805000015 0.811256662 0.815592970 0.819653366 0.820678355 0.824902754 0.824971205 0.829601772 0.831435197 0.833975594 0.834724151 0.839944797 0.847229401 0.854192926 0.859823763 0.862652121 0.867518457 0.871989450 0.873686079 0.884179559 0.894887373 0.905293137 0.916129603 0.922356793 0.923827544 0.932364557 0.960278656 0.966146378 0.976593339 0.986667140 1.000952409 1.016674018 1.033055067 1.041680626 1.048227332 1.053703957 1.061118337 1.085115012 1.089539961 1.107916522 1.109424832 1.114013034 1.122548911 1.123607376 1.131839758 1.133527689 1.159389847 1.168614811 1.176179750 1.179345124 1.200347732 1.203498378 1.205537508 1.254266700 1.285465514 1.296199542 1.305415954 1.316937994 1.324935975 1.328979985 1.332541118 1.335491779 1.339883261 1.340868360 1.348865748 1.373834890 1.380368517 1.381012667 1.382292486 1.383075929 1.553713116 1.689117965 1.744422479</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">61</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.56940109" y3="1.81028872" z3="3.32451792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.86343662" y3="0.9414636" z3="4.79030862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.80127784" y3="1.48677906" z3="3.8435374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="3.66396406" y3="2.87863508" z3="1.39130455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.52430924" y3="2.54986424" z3="2.10584736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7074123" y3="2.90494112" z3="-0.87469213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.51895194" y3="3.52560685" z3="0.05509882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="3.18590336" y3="4.53763354" z3="-2.56523367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="2.53235039" y3="3.38509667" z3="-2.20351751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="3.07965828" y3="4.92597462" z3="-3.5829119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.98459773" y3="1.81050606" z3="-0.4982438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.30016493" y3="2.91758911" z3="1.63319087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="0.60318535" y3="2.14603785" z3="0.35565481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="-0.29564929" y3="3.09532302" z3="-0.33703794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.12087806" y3="0.76143583" z3="0.76475259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-0.30975351" y3="-0.16201451" z3="-0.72732795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="3.6246989" y3="-4.28180393" z3="-2.0468064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.76910291" y3="-3.61902374" z3="-1.89025659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.59234269" y3="-1.90388999" z3="-1.46110453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.6659973" y3="-2.89435633" z3="-0.70933576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.78639775" y3="-3.49014513" z3="-2.87272776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="0.71696931" y3="-2.62691102" z3="-2.65510521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58849937" y3="-2.0314028" z3="-0.46398483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="3.42293234" y3="-2.97566807" z3="0.07457192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.86005059" y3="-4.03718054" z3="-3.81599089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-0.02461102" y3="-2.47983815" z3="-3.44541216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-0.48768548" y3="-1.00303716" z3="-1.29464511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-1.71904791" y3="-1.18475026" z3="-1.80366384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-1.84597986" y3="-2.12736029" z3="-2.34420165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-2.48532603" y3="-0.05222961" z3="-2.36136111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-3.90075819" y3="2.0364171" z3="-3.5758879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-3.39600154" y3="-0.31636233" z3="-3.39661424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.287295" y3="1.27012855" z3="-1.94752623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-2.99819831" y3="2.30521302" z3="-2.54721552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.0934916" y3="0.72215687" z3="-4.00562048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-3.53151629" y3="-1.34133235" z3="-3.75223302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.57278955" y3="1.54209565" z3="-1.16886269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-2.81477132" y3="3.32774677" z3="-2.20703925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-4.77540984" y3="0.50630949" z3="-4.83185982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-4.44539743" y3="2.85283257" z3="-4.05874372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55800921" y3="-1.41939138" z3="0.72489762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.0351479" y3="-0.57046319" z3="0.75033983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="1.63750241" y3="2.63377786" z3="-3.12151432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.12030031" y3="-1.71415146" z3="-0.20821083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.27838411" y3="-2.77633566" z3="0.13391634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-2.37669227" y3="-3.91106805" z3="-0.51041849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-1.69832259" y3="-5.44872886" z3="-0.04259086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-2.35815506" y3="-5.81466496" z3="1.67041107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="0.15969065" y3="-5.40674764" z3="-0.11570822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-2.42581572" y3="-6.57828779" z3="-1.3391426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-1.24982751" y3="-2.75574322" z3="0.94970684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-1.11745184" y3="-1.97690458" z3="2.14144506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.46058056" y3="-5.75142413" z3="1.69749262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-1.95241037" y3="-5.11450209" z3="2.42122184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-2.0727939" y3="-6.83688443" z3="1.97890739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="0.56518944" y3="-6.42487949" z3="0.03067429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="0.58588204" y3="-4.74659793" z3="0.65593829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="0.50866108" y3="-5.04045708" z3="-1.09619015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-2.1127154" y3="-7.62334319" z3="-1.16514372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-2.08357003" y3="-6.28808527" z3="-2.34847762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.52950482" y3="-6.54637494" z3="-1.32920532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-2.04046624" y3="-2.0303331" z3="2.73852259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-0.83971646" y3="-0.93928674" z3="1.91776624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-0.29432594" y3="-2.45465015" z3="2.68604982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.31355216" y3="1.30968006" z3="3.93990292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.19019607" y3="2.1306089" z3="4.12501814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-0.99699697" y3="1.61033127" z3="4.62507825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-1.05629073" y3="0.25582484" z3="4.93992464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="0.0496233" y3="-0.57691197" z3="4.80721893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="1.22887368" y3="-0.04294915" z3="4.30203404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.23923966" y3="3.18583878" z3="3.85345541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-1.8807179" y3="2.23664196" z3="4.76014877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.3299159" y3="-0.31807948" z3="5.39271975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-0.03088807" y3="-1.63118721" z3="5.07448944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="2.08888646" y3="-0.69686825" z3="4.14072675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="0.58570851" y3="3.27683248" z3="-3.78584619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-0.28332569" y3="2.56287885" z3="-4.60574136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.09835771" y3="1.19137727" z3="-4.74005263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="0.94608585" y3="0.52643753" z3="-4.10632334">
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                        <bond atomRefs2="a110 a111" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</formula>
</molecule>
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                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
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                        <bond atomRefs2="a100 a102" order="S"/>
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                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
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                        <bond atomRefs2="a106 a107" order="S"/>
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                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
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                        <bond atomRefs2="a114 a116" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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</formula>
</molecule>
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                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
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</formula>
</molecule>
               </module>
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                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
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                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
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                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
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                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
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                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
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                        <bond atomRefs2="a114 a115" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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               </module>
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                        <bond atomRefs2="a79 a84" order="S"/>
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                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
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                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
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                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
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                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
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                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
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                     </formula>
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                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a93 a98" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a98 a99" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
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</formula>
</molecule>
                  <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" id="irc-center.0" units="nonsi:hartree">-3667.649359824112</scalar>
                  <scalar dictRef="cc:ircStep" id="step">0</scalar>
               </module>
               <module cmlx:templateRef="irc-path">
                  <scalar cmlx:templateRef="direction" dataType="xsd:string" dictRef="g:ircDirection">FORWARD</scalar>
               </module>
               <module cmlx:templateRef="irc-path">
                  <scalar cmlx:templateRef="direction" dataType="xsd:string" dictRef="g:ircDirection">BACKWARD</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module dictRef="cc:vibrations">
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                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
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</formula>
</molecule>
               </property>
               <property dictRef="cc:thermochemistry">
                  <module cmlx:templateRef="thermo">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                     <list cmlx:templateRef="state"/>
                     <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649359824112</scalar>
                     <scalar cmlx:templateRef="zpe" dataType="xsd:double" dictRef="cc:zpe.correction" units="nonsi:hartree">0.923425269977</scalar>
                     <scalar cmlx:templateRef="elec-zpe" dataType="xsd:double" dictRef="cc:zpe.sumelectzpe" units="nonsi:hartree">-3666.725934554135</scalar>
                     <scalar cmlx:templateRef="thermal-tr" dataType="xsd:double" dictRef="cc:ethermo.trans" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-rot" dataType="xsd:double" dictRef="cc:ethermo.rot" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-vib" dataType="xsd:double" dictRef="cc:ethermo.vib" units="nonsi:hartree">0.981738850146</scalar>
                     <scalar cmlx:templateRef="enthalpy-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrenthalpy" units="nonsi:hartree">0.985515588423</scalar>
                     <scalar cmlx:templateRef="enthalpy" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalent" units="nonsi:hartree">-3666.663844235689</scalar>
                     <scalar cmlx:templateRef="entropy-el" dataType="xsd:double" dictRef="cc:s.elect" units="nonsi2:hartree.K-1">0.000000000000</scalar>
                     <scalar cmlx:templateRef="entropy-tr" dataType="xsd:double" dictRef="cc:s.trans" units="nonsi2:hartree.K-1">0.000074044432</scalar>
                     <scalar cmlx:templateRef="entropy-rot" dataType="xsd:double" dictRef="cc:s.rot" units="nonsi2:hartree.K-1">0.000064591374</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber" units="nonsi2:hartree.K-1">1</scalar>
                     <list cmlx:templateRef="entropy-rot"/>
                     <scalar cmlx:templateRef="entropy-vib" dataType="xsd:double" dictRef="cc:s.vib" units="nonsi2:hartree.K-1">0.000381598728</scalar>
                     <scalar cmlx:templateRef="gibbs-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrgfe" units="nonsi:hartree">0.830407662278</scalar>
                     <scalar cmlx:templateRef="gibbs" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalfe" units="nonsi:hartree">-3666.818952161834</scalar>
                  </module>
                  <module cmlx:templateRef="thermo">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                     <list cmlx:templateRef="state"/>
                     <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.649359824112</scalar>
                     <scalar cmlx:templateRef="zpe" dataType="xsd:double" dictRef="cc:zpe.correction" units="nonsi:hartree">0.923425269977</scalar>
                     <scalar cmlx:templateRef="elec-zpe" dataType="xsd:double" dictRef="cc:zpe.sumelectzpe" units="nonsi:hartree">-3666.725934554135</scalar>
                     <scalar cmlx:templateRef="thermal-tr" dataType="xsd:double" dictRef="cc:ethermo.trans" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-rot" dataType="xsd:double" dictRef="cc:ethermo.rot" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-vib" dataType="xsd:double" dictRef="cc:ethermo.vib" units="nonsi:hartree">0.981738850146</scalar>
                     <scalar cmlx:templateRef="enthalpy-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrenthalpy" units="nonsi:hartree">0.985515588423</scalar>
                     <scalar cmlx:templateRef="enthalpy" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalent" units="nonsi:hartree">-3666.663844235689</scalar>
                     <scalar cmlx:templateRef="entropy-el" dataType="xsd:double" dictRef="cc:s.elect" units="nonsi2:hartree.K-1">0.000000000000</scalar>
                     <scalar cmlx:templateRef="entropy-tr" dataType="xsd:double" dictRef="cc:s.trans" units="nonsi2:hartree.K-1">0.000074044432</scalar>
                     <scalar cmlx:templateRef="entropy-rot" dataType="xsd:double" dictRef="cc:s.rot" units="nonsi2:hartree.K-1">0.000064591374</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber" units="nonsi2:hartree.K-1">1</scalar>
                     <list cmlx:templateRef="entropy-rot"/>
                     <scalar cmlx:templateRef="entropy-vib" dataType="xsd:double" dictRef="cc:s.vib" units="nonsi2:hartree.K-1">0.000381598728</scalar>
                     <scalar cmlx:templateRef="gibbs-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrgfe" units="nonsi:hartree">0.830407662278</scalar>
                     <scalar cmlx:templateRef="gibbs" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalfe" units="nonsi:hartree">-3666.818952161834</scalar>
                  </module>
               </property>
            </propertyList>
            <molecule cmlx:templateRef="atom" id="molecule">
               <atomArray>
                  <atom elementType="C" id="a1" x3="2.54939808" y3="1.83324903" z3="3.32530862">
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                  </atom>
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                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
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                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a4" x3="3.67288582" y3="2.88745821" z3="1.40006833">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a5" x3="2.52242627" y3="2.5600029" z3="2.09814507">
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                  </atom>
                  <atom elementType="C" id="a6" x3="2.74956874" y3="2.90141035" z3="-0.88052397">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
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                  </atom>
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                  </atom>
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                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
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                  </atom>
                  <atom elementType="P" id="a13" x3="0.63304656" y3="2.12999905" z3="0.31946032">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                  </atom>
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                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a15" x3="0.1568871" y3="0.74423946" z3="0.73085341">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="H" id="a16" x3="-0.3046268" y3="-0.17529241" z3="-0.75978061">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a17" x3="3.59354102" y3="-4.3064791" z3="-2.15543728">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a18" x3="2.74355422" y3="-3.64056352" z3="-1.9824297">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
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                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a20" x3="2.66401998" y3="-2.91845443" z3="-0.79813778">
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                  </atom>
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