<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:g="http://www.iochem-bd.org/dictionary/gaussian/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:compchem="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        convention="convention:compchem"
        id="gaussian.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:hostname">
                  <scalar dataType="xsd:string">GINC-KIMIK2100</scalar>
               </parameter>
               <parameter dictRef="cc:jobname">
                  <scalar dataType="xsd:string">CBGUSER</scalar>
               </parameter>
               <parameter dictRef="cc:title">
                  <scalar dataType="xsd:string">000122085</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
               <parameter dictRef="cc:run.date">
                  <scalar dataType="xsd:string">27-Aug-2017</scalar>
               </parameter>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:program.date">
                  <scalar dataType="xsd:string">24-Apr-2013</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:diffuse">
                  <scalar dataType="xsd:string">(6D, 10F)</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">RPBEPBE</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="g:operation">
                  <scalar dataType="xsd:string">FOpt</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">#p</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">opt=(loose)</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">PBEPBE/SDD</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">pop=(full,Hirshfeld,</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">NPA)</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">GFInput</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">nosymm</scalar>
               </parameter>
            </parameterList>
            <molecule cmlx:templateRef="mol"
                      formalCharge="0"
                      id="zmat"
                      spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.7699"
                        y3="1.8397"
                        z3="-0.0665"/>
                  <atom elementType="F"
                        id="a2"
                        x3="-2.3963"
                        y3="-0.7552"
                        z3="1.3175"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-1.4670"
                        y3="-2.3184"
                        z3="0.1274"/>
                  <atom elementType="F"
                        id="a4"
                        x3="-3.2236"
                        y3="-1.2529"
                        z3="-0.6295"/>
                  <atom elementType="O"
                        id="a5"
                        x3="-0.7759"
                        y3="-0.2572"
                        z3="-1.7432"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.8300"
                        y3="1.0366"
                        z3="0.2076"/>
                  <atom elementType="C"
                        id="a7"
                        x3="2.0043"
                        y3="0.5602"
                        z3="-0.6594"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.2177"
                        y3="-0.6317"
                        z3="0.2805"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.5650"
                        y3="3.1886"
                        z3="-1.3514"/>
                  <atom elementType="C"
                        id="a10"
                        x3="1.4212"
                        y3="2.6121"
                        z3="1.5153"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.2041"
                        y3="-1.6380"
                        z3="-0.3146"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.6626"
                        y3="1.6240"
                        z3="1.2598"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.1583"
                        y3="-0.0669"
                        z3="-0.5848"/>
                  <atom elementType="C"
                        id="a14"
                        x3="3.3881"
                        y3="-2.8423"
                        z3="0.5950"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-2.0567"
                        y3="-1.0987"
                        z3="0.0463"/>
                  <atom elementType="H"
                        id="a16"
                        x3="2.9661"
                        y3="1.0682"
                        z3="-0.8041"/>
                  <atom elementType="H"
                        id="a17"
                        x3="1.7070"
                        y3="0.1989"
                        z3="-1.6499"/>
                  <atom elementType="H"
                        id="a18"
                        x3="2.5959"
                        y3="-0.2834"
                        z3="1.2501"/>
                  <atom elementType="H"
                        id="a19"
                        x3="1.2661"
                        y3="-1.1395"
                        z3="0.4782"/>
                  <atom elementType="H"
                        id="a20"
                        x3="1.5197"
                        y3="3.6870"
                        z3="-1.5441"/>
                  <atom elementType="H"
                        id="a21"
                        x3="0.2008"
                        y3="2.7719"
                        z3="-2.2952"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.1515"
                        y3="3.9420"
                        z3="-1.0111"/>
                  <atom elementType="H"
                        id="a23"
                        x3="2.4263"
                        y3="3.0151"
                        z3="1.3586"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.7765"
                        y3="3.4313"
                        z3="1.8468"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.4723"
                        y3="1.8702"
                        z3="2.3176"/>
                  <atom elementType="H"
                        id="a26"
                        x3="4.1750"
                        y3="-1.1559"
                        z3="-0.4771"/>
                  <atom elementType="H"
                        id="a27"
                        x3="2.8432"
                        y3="-1.9803"
                        z3="-1.2916"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-1.5656"
                        y3="2.7148"
                        z3="1.2745"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.3644"
                        y3="1.2120"
                        z3="2.2288"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.7167"
                        y3="1.4012"
                        z3="1.0691"/>
                  <atom elementType="H"
                        id="a31"
                        x3="2.4394"
                        y3="-3.3667"
                        z3="0.7487"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.0978"
                        y3="-3.5475"
                        z3="0.1513"/>
                  <atom elementType="H"
                        id="a33"
                        x3="3.7760"
                        y3="-2.5396"
                        z3="1.5728"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a6" order="S"/>
                  <bond atomRefs2="a2 a15" order="S"/>
                  <bond atomRefs2="a3 a15" order="S"/>
                  <bond atomRefs2="a4 a15" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a6 a13" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a16" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a9 a22" order="S"/>
                  <bond atomRefs2="a10 a23" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a24" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a27" order="S"/>
                  <bond atomRefs2="a11 a26" order="S"/>
                  <bond atomRefs2="a12 a28" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a12 a30" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a14 a33" order="S"/>
                  <bond atomRefs2="a14 a32" order="S"/>
               </bondArray>
               <formula concise="C 9 H 18 F 3 N 1 O 1 Si 1"/>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">223.1831095999999</scalar>
               </property>
               <list cmlx:templateRef="charge">
                  <list>
                     <scalar dataType="xsd:integer" dictRef="g:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:mult">1</scalar>
                  </list>
               </list>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="entering" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:link0">g09</scalar>
                  <array dataType="xsd:string" dictRef="g:command" size="3">/mnt/data/applications/G09/g09/l1.exe "/scratch/Gau-11743.inp" -scrdir="/scratch/"</array>
               </module>
               <module cmlx:templateRef="l1" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l1.end">
                     <array dataType="xsd:string" dictRef="g:kk" size="1">chk=000122085.chk</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">nprocshared=8</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">mem=21GB</array>
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">#p opt=(loose) PBEPBE/SDD pop=(full,Hirshfeld, NPA) GFInput nosymm</scalar>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,14=-1,18=20,19=15,26=3,38=1/1,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,12=2,15=1,17=6,18=5,40=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,24=10,25=1,30=1,71=1,74=1009/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4//1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=3,28=1,40=-1,79=1/1,7</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/30=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,14=-1,18=20,19=15,26=3/3(2)</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99//99</scalar>
                     </list>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,25=1,30=1,71=1,74=1009/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4/5=5,16=3,69=1/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/30=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,14=-1,18=20,19=15,26=3/3(-5)</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=3,19=2,28=1,40=-1,79=1/1,7</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99/9=1/99</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l101" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l101.title">
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">000122085</scalar>
                  </module>
                  <module cmlx:templateRef="l101.isotope2">
                     <array cmlx:templateRef="atom"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="33">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33</array>
                     <array cmlx:templateRef="iatwgt"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="33">28 19 19 19 16 14 12 12 12 12 12 12 12 12 12 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atmwgt"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="33">27.9769284 18.9984033 18.9984033 18.9984033 15.9949146 14.0030740 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250</array>
                     <array cmlx:templateRef="nucspn"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="33">0 1 1 1 0 2 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atzeff"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="33">0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000</array>
                  </module>
                  <list cmlx:templateRef="rest">
                     <scalar dataType="xsd:string" dictRef="x:l101">(Enter /mnt/data/applications/G09/g09/l101.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Initialization pass.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.init">
                     <list cmlx:templateRef="length">
                        <array dataType="xsd:string" dictRef="g:symbol" size="32">R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 R17 R18 R19 R20 R21 R22 R23 R24 R25 R26 R27 R28 R29 R30 R31 R32</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="32">1 1 1 1 2 3 4 5 6 6 7 7 7 8 8 8 9 9 9 10 10 10 11 11 11 12 12 12 13 14 14 14</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="32">6 7 9 10 15 15 15 13 12 13 8 16 17 11 18 19 20 21 22 23 24 25 14 26 27 28 29 30 15 31 32 33</array>
                        <array dataType="xsd:double" dictRef="cc:distance" size="32">1.811 1.8741 1.8742 1.8769 1.3599 1.3572 1.3573 1.2346 1.4647 1.3976 1.5328 1.0973 1.0955 1.5296 1.0975 1.0966 1.0941 1.0941 1.094 1.0942 1.0939 1.0939 1.5204 1.0961 1.0963 1.0952 1.0944 1.0941 1.5067 1.0948 1.0945 1.0946</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="32">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="angle">
                        <array dataType="xsd:string" dictRef="g:symbol" size="60">A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 A21 A22 A23 A24 A25 A26 A27 A28 A29 A30 A31 A32 A33 A34 A35 A36 A37 A38 A39 A40 A41 A42 A43 A44 A45 A46 A47 A48 A49 A50 A51 A52 A53 A54 A55 A56 A57 A58 A59 A60</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="60">6 6 6 7 7 9 1 1 12 1 1 1 8 8 16 7 7 7 11 11 18 1 1 1 20 20 21 1 1 1 23 23 24 8 8 8 14 14 26 6 6 6 28 28 29 5 5 6 11 11 11 31 31 32 2 2 2 3 3 4</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="60">1 1 1 1 1 1 6 6 6 7 7 7 7 7 7 8 8 8 8 8 8 9 9 9 9 9 9 10 10 10 10 10 10 11 11 11 11 11 11 12 12 12 12 12 12 13 13 13 14 14 14 14 14 14 15 15 15 15 15 15</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="60">7 9 10 9 10 10 12 13 13 8 16 17 16 17 17 11 18 19 18 19 19 20 21 22 21 22 22 23 24 25 24 25 25 14 26 27 26 27 27 28 29 30 29 30 30 6 15 15 31 32 33 32 33 33 3 4 13 4 13 13</array>
                        <array dataType="xsd:double" dictRef="cc:angle" size="60">109.0867 109.0473 111.1917 110.2728 108.6032 108.6347 115.6619 118.1532 126.1849 115.3773 107.636 109.4186 108.5914 109.6185 105.7439 111.2703 110.0554 110.4759 109.2854 108.9716 106.6622 110.6847 110.7127 110.7327 108.1821 108.2148 108.2166 110.4649 111.0427 110.8056 107.9966 108.1746 108.2497 111.493 109.8478 109.8661 109.2617 109.0066 107.265 111.0215 109.2811 109.9238 109.8125 106.8866 109.888 125.5131 118.1732 116.3136 111.0094 110.262 110.9937 108.0705 108.3078 108.0912 106.2395 106.2269 111.5605 107.5304 112.4199 112.4513</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="60">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="dihed">
                        <array dataType="xsd:string" dictRef="g:symbol" size="76">D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 D16 D17 D18 D19 D20 D21 D22 D23 D24 D25 D26 D27 D28 D29 D30 D31 D32 D33 D34 D35 D36 D37 D38 D39 D40 D41 D42 D43 D44 D45 D46 D47 D48 D49 D50 D51 D52 D53 D54 D55 D56 D57 D58 D59 D60 D61 D62 D63 D64 D65 D66 D67 D68 D69 D70 D71 D72 D73 D74 D75 D76</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="76">7 7 9 9 10 10 6 6 6 9 9 9 10 10 10 6 6 6 7 7 7 10 10 10 6 6 6 7 7 7 9 9 9 1 1 1 13 13 13 1 1 12 12 1 1 1 16 16 16 17 17 17 7 7 7 18 18 18 19 19 19 8 8 8 26 26 26 27 27 27 5 5 5 6 6 6</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="76">1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 6 6 6 6 6 6 6 6 6 6 7 7 7 7 7 7 7 7 7 8 8 8 8 8 8 8 8 8 11 11 11 11 11 11 11 11 11 13 13 13 13 13 13</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="76">6 6 6 6 6 6 7 7 7 7 7 7 7 7 7 9 9 9 9 9 9 9 9 9 10 10 10 10 10 10 10 10 10 12 12 12 12 12 12 13 13 13 13 8 8 8 8 8 8 8 8 8 11 11 11 11 11 11 11 11 11 14 14 14 14 14 14 14 14 14 15 15 15 15 15 15</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="76">12 13 12 13 12 13 8 16 17 8 16 17 8 16 17 20 21 22 20 21 22 20 21 22 23 24 25 23 24 25 23 24 25 28 29 30 28 29 30 5 15 5 15 11 18 19 11 18 19 11 18 19 14 26 27 14 26 27 14 26 27 31 32 33 31 32 33 31 32 33 2 3 4 2 3 4</array>
                        <array dataType="xsd:double" dictRef="cc:dihed" size="76">149.4865 -30.494 -90.0261 89.9934 29.737 -150.2435 -57.8166 -179.2206 66.3254 -177.549 61.047 -53.407 63.5208 -57.8832 -172.3372 -179.5256 -59.5685 60.4633 -59.7694 60.1877 -179.7805 59.1417 179.0988 -60.8695 174.9477 -65.2566 55.0831 54.9112 174.7069 -64.9534 -65.0442 54.7515 175.0912 36.8554 -84.418 154.9088 -143.1659 95.5607 -25.1125 -30.0276 150.0377 149.9942 -29.9405 178.07 -60.6372 56.8882 -61.0431 60.2497 177.7751 54.0327 175.3256 -67.149 -178.3157 60.4147 -57.3555 59.9426 -61.327 -179.0972 -56.2579 -177.5275 64.7023 60.3531 -179.9132 -60.1637 -178.0369 -58.3031 61.4464 -61.1077 58.626 178.3755 -179.9343 60.8367 -60.7001 0.0054 -119.2236 119.2396</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="76">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.trust">
                     <scalar dataType="xsd:double" dictRef="g:trustrad">3.00e-01</scalar>
                     <scalar dataType="xsd:double" dictRef="g:fncerr">1.00e-07</scalar>
                     <scalar dataType="xsd:double" dictRef="g:grderr">1.00e-06</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:nstep">178</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:allowedstep">198</scalar>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l301.basis" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="ernie">
                     <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                     <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                     <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                  </module>
                  <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                  <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                  <module cmlx:templateRef="natoms">
                     <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                     <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                     <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="l302.basis" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="basis">
                     <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 8515 NPrTT= 41984 LenC2= 7839 LenP2D= 24986.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 194 RedAO= T EigKep= 2.44D-03 NBF= 194</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 194 1.00D-06 EigRej= -1.00D+00 NBFU= 194</array>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Using GEDIIS/GDIIS optimizer.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.localminsaddle">
                     <scalar cmlx:templateRef="r" dataType="xsd:string" dictRef="cc:minmaxts">local minimum</scalar>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="9">Step number 20 out of a maximum of 178</array>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="7">All quantities printed in internal units (Hartrees-Bohrs-Radians)</array>
                     <array cmlx:templateRef="eigenvaluelist"
                            dataType="xsd:double"
                            dictRef=""
                            size="93">0.00059 0.00144 0.00329 0.00374 0.00384 0.00496 0.00956 0.01053 0.01113 0.01268 0.02416 0.03381 0.03505 0.03564 0.03754 0.04097 0.04820 0.04881 0.05019 0.05557 0.05606 0.05635 0.06032 0.06136 0.06198 0.06465 0.06948 0.07264 0.07517 0.08386 0.08423 0.08822 0.10816 0.11137 0.12241 0.12261 0.12440 0.13443 0.15449 0.15739 0.15939 0.15986 0.15996 0.15998 0.16002 0.16015 0.16028 0.16108 0.16200 0.16311 0.16493 0.20717 0.21022 0.21060 0.21200 0.21902 0.21959 0.22188 0.24723 0.24962 0.25595 0.25808 0.27424 0.29216 0.29352 0.29689 0.31123 0.31609 0.33960 0.34023 0.34068 0.34081 0.34105 0.34182 0.34246 0.34268 0.34281 0.34303 0.34318 0.34328 0.34351 0.34357 0.34370 0.34415 0.34725 0.34767 0.36945 0.42718 0.48124 0.51583 0.53028 0.64365 0.88125</array>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="3">RFO step: Lambda=-3.40464015D-08.</array>
                     <list cmlx:templateRef="iterationList">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="3">1 2 3</array>
                        <array dataType="xsd:double" dictRef="g:rmscart" size="3">0.00197733 0.00000264 0.00000000</array>
                        <array dataType="xsd:double" dictRef="g:rmsint" size="3">0.00000242 0.00000007 0.00000007</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.deltas">
                     <list cmlx:templateRef="delta">
                        <array dataType="xsd:string" dictRef="cc:variable" size="168">R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 R17 R18 R19 R20 R21 R22 R23 R24 R25 R26 R27 R28 R29 R30 R31 R32 A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 A21 A22 A23 A24 A25 A26 A27 A28 A29 A30 A31 A32 A33 A34 A35 A36 A37 A38 A39 A40 A41 A42 A43 A44 A45 A46 A47 A48 A49 A50 A51 A52 A53 A54 A55 A56 A57 A58 A59 A60 D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 D16 D17 D18 D19 D20 D21 D22 D23 D24 D25 D26 D27 D28 D29 D30 D31 D32 D33 D34 D35 D36 D37 D38 D39 D40 D41 D42 D43 D44 D45 D46 D47 D48 D49 D50 D51 D52 D53 D54 D55 D56 D57 D58 D59 D60 D61 D62 D63 D64 D65 D66 D67 D68 D69 D70 D71 D72 D73 D74 D75 D76</array>
                        <array dataType="xsd:double" dictRef="g:lastval" size="168">3.54785 3.61447 3.59340 3.60716 2.69056 2.63057 2.69273 2.39766 2.81120 2.59512 2.93010 2.09915 2.09067 2.92484 2.09852 2.09740 2.09026 2.08304 2.08805 2.09118 2.08835 2.08722 2.91748 2.09611 2.09476 2.07839 2.08806 2.08100 2.95280 2.09070 2.08885 2.09134 1.88311 1.89041 1.83905 1.98411 1.93353 1.92678 2.12843 2.00385 2.14917 2.00025 1.88016 1.88285 1.91376 1.91919 1.86225 1.96980 1.92426 1.91439 1.89778 1.89634 1.85766 1.92499 1.92384 1.93833 1.89499 1.88419 1.89638 1.89185 1.95937 1.96874 1.87039 1.87417 1.89489 1.96927 1.90435 1.90004 1.91493 1.91541 1.85635 1.90324 1.94243 1.94616 1.89234 1.88061 1.89730 2.16610 2.05572 2.06134 1.93691 1.94464 1.93879 1.88053 1.87954 1.88068 1.86217 1.85823 1.96471 1.86200 1.95089 1.95889 2.00435 -1.07580 -2.12395 1.07909 -0.06193 3.14111 -0.95642 -3.09133 1.18752 -3.05329 1.09498 -0.90935 1.04832 -1.08660 -3.09093 3.11564 -1.07521 1.02747 -1.07480 1.01753 3.12022 1.11038 -3.08047 -0.97779 3.09377 -1.12680 1.02082 1.06162 3.12423 -1.01134 -1.15201 0.91061 3.05822 0.42175 -1.66504 2.49631 -2.78646 1.40994 -0.71190 -0.02135 3.12776 -3.10068 0.04844 3.13151 -1.02570 1.01446 -1.03509 1.09088 3.13105 1.00730 3.13328 -1.10975 -3.13385 1.01606 -1.00304 1.00848 -1.12479 3.13930 -1.00661 -3.13988 1.12421 1.04560 3.14122 -1.04487 -3.11027 -1.01465 1.08245 -1.07654 1.01908 3.11617 2.16424 0.06863 -2.02271 -0.98440 -3.08001 1.11185</array>
                        <array dataType="xsd:double" dictRef="cc:deriv" size="168">0.00002 0.00000 0.00000 0.00000 0.00001 0.00003 -0.00007 0.00000 -0.00001 0.00003 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00003 -0.00001 -0.00002 0.00003 -0.00001 0.00002 -0.00003 0.00001 0.00002 0.00000 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00001 -0.00001 0.00000 0.00001 0.00000 -0.00003 0.00001 0.00001 0.00000 0.00000 0.00000 0.00001 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00002 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00001 0.00000 0.00000 0.00001 -0.00001 0.00002 0.00001 0.00000 0.00000 -0.00001 -0.00001 0.00001 0.00000 0.00001 -0.00001 -0.00001 -0.00001 0.00000 0.00000 0.00000 -0.00001 -0.00001 0.00000 -0.00001 -0.00001 0.00000 0.00000 0.00000 0.00001 -0.00001 -0.00001 -0.00001 0.00000 -0.00001 -0.00001 0.00001 0.00001 0.00001 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00001 0.00000 0.00000 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000</array>
                        <array dataType="xsd:double" dictRef="cc:delta.linear" size="168">-0.00009 -0.00003 0.00004 0.00000 -0.00001 0.00009 -0.00022 -0.00001 0.00009 0.00011 0.00001 0.00000 0.00002 -0.00001 0.00000 0.00001 0.00002 -0.00001 0.00000 0.00001 0.00001 0.00000 0.00000 0.00001 0.00000 -0.00003 -0.00004 0.00004 0.00000 0.00001 0.00001 0.00001 0.00000 0.00018 0.00012 -0.00015 0.00010 -0.00022 0.00023 -0.00007 -0.00011 0.00006 0.00002 -0.00008 0.00008 -0.00001 -0.00008 0.00000 0.00008 -0.00006 -0.00004 0.00004 -0.00003 -0.00021 0.00013 0.00007 0.00001 -0.00002 0.00001 -0.00007 -0.00008 0.00017 -0.00002 -0.00003 0.00002 0.00002 -0.00004 0.00003 -0.00001 0.00001 -0.00002 -0.00005 0.00006 -0.00006 -0.00002 0.00004 0.00003 -0.00007 0.00015 -0.00009 0.00003 0.00002 -0.00001 -0.00002 -0.00002 0.00000 -0.00012 0.00011 0.00013 0.00007 0.00001 -0.00019 0.00077 -0.00011 0.00070 -0.00019 0.00059 -0.00029 -0.00142 -0.00157 -0.00145 -0.00155 -0.00170 -0.00158 -0.00122 -0.00137 -0.00124 -0.00064 -0.00067 -0.00053 -0.00061 -0.00064 -0.00050 -0.00077 -0.00080 -0.00066 -0.00053 -0.00064 -0.00055 -0.00065 -0.00077 -0.00067 -0.00036 -0.00047 -0.00038 -0.00354 -0.00353 -0.00357 -0.00258 -0.00257 -0.00261 0.00051 0.00083 -0.00040 -0.00007 0.00037 0.00037 0.00035 0.00049 0.00050 0.00048 0.00043 0.00044 0.00042 -0.00011 -0.00009 -0.00006 -0.00019 -0.00017 -0.00014 -0.00016 -0.00013 -0.00010 0.00003 0.00005 0.00005 -0.00001 0.00000 0.00001 -0.00003 -0.00002 -0.00002 0.00063 0.00069 0.00072 0.00032 0.00039 0.00042</array>
                        <array dataType="xsd:double" dictRef="cc:delta.quad" size="168">0.00010 0.00000 0.00000 0.00000 0.00002 0.00003 -0.00004 -0.00001 -0.00005 -0.00001 -0.00004 0.00000 -0.00001 0.00000 0.00000 -0.00001 0.00000 -0.00001 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00001 0.00000 0.00000 0.00000 0.00000 0.00005 0.00011 -0.00009 -0.00008 0.00008 -0.00006 0.00013 -0.00002 -0.00009 0.00005 0.00001 -0.00006 -0.00002 0.00002 0.00001 -0.00003 -0.00001 -0.00002 0.00004 0.00002 0.00000 -0.00010 0.00004 0.00005 0.00000 -0.00001 0.00002 0.00006 -0.00005 0.00000 0.00000 -0.00001 0.00001 0.00001 0.00000 0.00001 0.00000 -0.00001 -0.00001 0.00003 -0.00004 -0.00001 0.00000 0.00004 -0.00002 0.00005 -0.00001 -0.00004 0.00000 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00006 -0.00003 -0.00003 -0.00004 0.00001 0.00004 -0.00005 -0.00022 -0.00005 -0.00022 -0.00012 -0.00029 -0.00024 -0.00025 -0.00023 -0.00036 -0.00037 -0.00035 -0.00027 -0.00028 -0.00027 -0.00031 -0.00035 -0.00026 -0.00022 -0.00026 -0.00017 -0.00023 -0.00027 -0.00018 0.00011 0.00011 0.00008 0.00006 0.00006 0.00003 0.00015 0.00015 0.00012 -0.00077 -0.00077 -0.00071 -0.00058 -0.00058 -0.00052 0.00013 -0.00018 -0.00005 -0.00036 -0.00003 0.00000 -0.00002 0.00000 0.00003 0.00001 0.00001 0.00003 0.00002 0.00012 0.00012 0.00012 0.00012 0.00012 0.00013 0.00009 0.00009 0.00009 0.00003 0.00003 0.00003 0.00004 0.00004 0.00003 0.00002 0.00002 0.00002 -0.00040 -0.00046 -0.00044 -0.00011 -0.00017 -0.00015</array>
                        <array dataType="xsd:double" dictRef="cc:delta.total" size="168">0.00001 -0.00003 0.00004 0.00000 0.00001 0.00012 -0.00026 -0.00002 0.00004 0.00010 -0.00003 0.00000 0.00001 0.00000 0.00000 0.00000 0.00003 -0.00002 -0.00001 0.00000 0.00001 0.00000 0.00000 0.00001 0.00000 -0.00003 -0.00005 0.00006 0.00000 0.00001 0.00000 0.00001 0.00006 0.00029 0.00003 -0.00023 0.00018 -0.00029 0.00036 -0.00010 -0.00020 0.00011 0.00003 -0.00014 0.00005 0.00001 -0.00007 -0.00002 0.00007 -0.00008 -0.00001 0.00006 -0.00003 -0.00031 0.00018 0.00012 0.00001 -0.00003 0.00002 -0.00001 -0.00013 0.00017 -0.00002 -0.00004 0.00003 0.00003 -0.00004 0.00004 -0.00001 0.00001 -0.00003 -0.00002 0.00002 -0.00007 -0.00002 0.00007 0.00002 -0.00002 0.00014 -0.00012 0.00003 0.00001 -0.00001 -0.00001 -0.00002 0.00000 -0.00006 0.00008 0.00009 0.00003 0.00002 -0.00015 0.00072 -0.00033 0.00065 -0.00041 0.00047 -0.00058 -0.00166 -0.00182 -0.00168 -0.00191 -0.00207 -0.00193 -0.00149 -0.00165 -0.00151 -0.00095 -0.00102 -0.00080 -0.00083 -0.00090 -0.00067 -0.00100 -0.00107 -0.00084 -0.00043 -0.00053 -0.00047 -0.00060 -0.00071 -0.00065 -0.00021 -0.00032 -0.00026 -0.00431 -0.00429 -0.00428 -0.00316 -0.00315 -0.00313 0.00063 0.00065 -0.00046 -0.00044 0.00034 0.00037 0.00034 0.00049 0.00052 0.00049 0.00044 0.00047 0.00043 0.00001 0.00003 0.00006 -0.00007 -0.00005 -0.00001 -0.00007 -0.00005 -0.00001 0.00007 0.00008 0.00007 0.00003 0.00004 0.00004 -0.00001 0.00000 0.00000 0.00023 0.00024 0.00029 0.00021 0.00022 0.00027</array>
                        <array dataType="xsd:double" dictRef="cc:newval" size="168">3.54786 3.61445 3.59343 3.60716 2.69058 2.63069 2.69247 2.39765 2.81124 2.59522 2.93007 2.09915 2.09068 2.92483 2.09852 2.09740 2.09029 2.08302 2.08804 2.09118 2.08837 2.08721 2.91748 2.09612 2.09477 2.07836 2.08801 2.08106 2.95280 2.09071 2.08885 2.09135 1.88317 1.89070 1.83908 1.98388 1.93371 1.92650 2.12879 2.00375 2.14897 2.00037 1.88018 1.88271 1.91381 1.91919 1.86218 1.96978 1.92434 1.91431 1.89777 1.89640 1.85763 1.92468 1.92402 1.93845 1.89501 1.88416 1.89641 1.89184 1.95924 1.96891 1.87037 1.87413 1.89491 1.96930 1.90431 1.90008 1.91492 1.91542 1.85633 1.90322 1.94245 1.94609 1.89233 1.88068 1.89731 2.16608 2.05586 2.06122 1.93694 1.94465 1.93878 1.88051 1.87952 1.88068 1.86210 1.85831 1.96480 1.86203 1.95091 1.95875 2.00507 -1.07613 -2.12330 1.07868 -0.06146 3.14052 -0.95807 -3.09316 1.18584 -3.05520 1.09290 -0.91128 1.04683 -1.08825 -3.09244 3.11468 -1.07623 1.02668 -1.07564 1.01664 3.11954 1.10937 -3.08154 -0.97863 3.09335 -1.12733 1.02035 1.06102 3.12352 -1.01198 -1.15222 0.91029 3.05797 0.41743 -1.66934 2.49203 -2.78962 1.40679 -0.71503 -0.02072 3.12842 -3.10114 0.04800 3.13185 -1.02533 1.01480 -1.03460 1.09141 3.13154 1.00774 3.13374 -1.10931 -3.13385 1.01609 -1.00298 1.00842 -1.12483 3.13929 -1.00667 -3.13992 1.12420 1.04567 3.14130 -1.04479 -3.11024 -1.01461 1.08248 -1.07655 1.01908 3.11617 2.16447 0.06886 -2.02242 -0.98418 -3.07979 1.11212</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.itemconverge">
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">|Maximum Force|RMS     Force|Maximum Displacement|RMS     Displacement|</array>
                        <array dataType="xsd:double" dictRef="g:value" size="4">0.000069 0.000010 0.009978 0.001977</array>
                        <array dataType="xsd:double" dictRef="g:threshold" size="4">0.002500 0.001667 0.010000 0.006667</array>
                        <array dataType="xsd:string" dictRef="g:converged" size="4">YES YES YES YES</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="preddelta">
                     <list cmlx:templateRef="predicted">
                        <scalar dataType="xsd:double" dictRef="g:predchange">-8.073129e-08</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.optimizedparam">
                     <list cmlx:templateRef="completed">
                        <scalar dataType="xsd:string" dictRef="g:optimization">Optimization completed.</scalar>
                        <scalar dataType="xsd:string" dictRef="g:optimization">-- Stationary point found.</scalar>
                     </list>
                     <list cmlx:templateRef="length">
                        <array dataType="xsd:string" dictRef="g:symbol" size="32">R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 R17 R18 R19 R20 R21 R22 R23 R24 R25 R26 R27 R28 R29 R30 R31 R32</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="32">1 1 1 1 2 3 4 5 6 6 7 7 7 8 8 8 9 9 9 10 10 10 11 11 11 12 12 12 13 14 14 14</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="32">6 7 9 10 15 15 15 13 12 13 8 16 17 11 18 19 20 21 22 23 24 25 14 26 27 28 29 30 15 31 32 33</array>
                        <array dataType="xsd:double" dictRef="cc:distance" size="32">1.8774 1.9127 1.9015 1.9088 1.4238 1.392 1.4249 1.2688 1.4876 1.3733 1.5505 1.1108 1.1063 1.5478 1.1105 1.1099 1.1061 1.1023 1.1049 1.1066 1.1051 1.1045 1.5439 1.1092 1.1085 1.0998 1.105 1.1012 1.5626 1.1064 1.1054 1.1067</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="32">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =   -0.0001|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                     <list cmlx:templateRef="angle">
                        <array dataType="xsd:string" dictRef="g:symbol" size="60">A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 A21 A22 A23 A24 A25 A26 A27 A28 A29 A30 A31 A32 A33 A34 A35 A36 A37 A38 A39 A40 A41 A42 A43 A44 A45 A46 A47 A48 A49 A50 A51 A52 A53 A54 A55 A56 A57 A58 A59 A60</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="60">6 6 6 7 7 9 1 1 12 1 1 1 8 8 16 7 7 7 11 11 18 1 1 1 20 20 21 1 1 1 23 23 24 8 8 8 14 14 26 6 6 6 28 28 29 5 5 6 11 11 11 31 31 32 2 2 2 3 3 4</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="60">1 1 1 1 1 1 6 6 6 7 7 7 7 7 7 8 8 8 8 8 8 9 9 9 9 9 9 10 10 10 10 10 10 11 11 11 11 11 11 12 12 12 12 12 12 13 13 13 14 14 14 14 14 14 15 15 15 15 15 15</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="60">7 9 10 9 10 10 12 13 13 8 16 17 16 17 17 11 18 19 18 19 19 20 21 22 21 22 22 23 24 25 24 25 25 14 26 27 26 27 27 28 29 30 29 30 30 6 15 15 31 32 33 32 33 33 3 4 13 4 13 13</array>
                        <array dataType="xsd:double" dictRef="cc:angle" size="60">107.8944 108.3126 105.3698 113.6814 110.7833 110.3966 121.9502 114.8119 123.1384 114.606 107.7251 107.8793 109.6504 109.9613 106.6991 112.8612 110.2522 109.6865 108.7346 108.6524 106.4361 110.2939 110.228 111.0583 108.5752 107.956 108.6547 108.3952 112.2638 112.8003 107.1655 107.3823 108.569 112.8307 109.111 108.8645 109.7173 109.7448 106.3613 109.0477 111.2931 111.507 108.4232 107.7509 108.7072 124.1085 117.7838 118.1063 110.9766 111.4198 111.0846 107.7463 107.6895 107.7552 106.6944 106.4689 112.5696 106.6847 111.7776 112.2363</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="60">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                     <list cmlx:templateRef="dihed">
                        <array dataType="xsd:string" dictRef="g:symbol" size="75">D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 D16 D17 D18 D19 D20 D21 D22 D23 D24 D25 D26 D27 D28 D29 D30 D31 D32 D33 D34 D35 D36 D37 D38 D39 D40 D41 D42 D43 D44 D45 D46 D47 D48 D49 D50 D51 D52 D53 D54 D55 D56 D57 D58 D59 D60 D61 D62 D63 D64 D65 D66 D67 D68 D69 D70 D71 D72 D73 D74 D75</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="75">7 7 9 9 10 10 6 6 6 9 9 9 10 10 10 6 6 6 7 7 7 10 10 10 6 6 6 7 7 7 9 9 9 1 1 1 13 13 13 1 1 12 12 1 1 1 16 16 16 17 17 17 7 7 7 18 18 18 19 19 19 8 8 8 26 26 26 27 27 27 5 5 5 6 6</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="75">1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 6 6 6 6 6 6 6 6 6 6 7 7 7 7 7 7 7 7 7 8 8 8 8 8 8 8 8 8 11 11 11 11 11 11 11 11 11 13 13 13 13 13</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="75">6 6 6 6 6 6 7 7 7 7 7 7 7 7 7 9 9 9 9 9 9 9 9 9 10 10 10 10 10 10 10 10 10 12 12 12 12 12 12 13 13 13 13 8 8 8 8 8 8 8 8 8 11 11 11 11 11 11 11 11 11 14 14 14 14 14 14 14 14 14 15 15 15 15 15</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="75">12 13 12 13 12 13 8 16 17 8 16 17 8 16 17 20 21 22 20 21 22 20 21 22 23 24 25 23 24 25 23 24 25 28 29 30 28 29 30 5 15 5 15 11 18 19 11 18 19 11 18 19 14 26 27 14 26 27 14 26 27 31 32 33 31 32 33 31 32 33 2 3 4 2 3</array>
                        <array dataType="xsd:double" dictRef="cc:dihed" size="75">114.8406 -61.6388 -121.6931 61.8274 -3.5485 179.9721 -54.7986 -177.1204 68.0398 -174.9406 62.7376 -52.1022 60.0645 -62.2574 -177.0971 178.5128 -61.6051 58.8698 -61.5818 58.3003 178.7753 63.6199 -176.498 -56.0231 177.2601 -64.5608 58.4886 60.8262 179.0053 -57.9453 -66.0052 52.1739 175.2233 24.1643 -95.3998 143.028 -159.6524 80.7835 -40.7887 -1.2234 179.2077 -177.6559 2.7752 179.4222 -58.7683 58.1245 -59.3064 62.5031 179.3959 57.714 179.5234 -63.5838 -179.5566 58.216 -57.47 57.7819 -64.4455 179.8685 -57.6743 -179.9017 64.4123 59.9086 179.9788 -59.8666 -178.2052 -58.1349 62.0197 -61.6814 58.3888 178.5434 124.0017 3.9319 -115.8925 -56.4017 -176.4715</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="75">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
                  <scalar dictRef="l103.converged.count">1</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.7699"
                                 y3="1.8397"
                                 z3="-0.0665">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-2.3963"
                                 y3="-0.7552"
                                 z3="1.3175">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-1.4670"
                                 y3="-2.3184"
                                 z3="0.1274">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.2236"
                                 y3="-1.2529"
                                 z3="-0.6295">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="-0.7759"
                                 y3="-0.2572"
                                 z3="-1.7432">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-0.8300"
                                 y3="1.0366"
                                 z3="0.2076">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="2.0043"
                                 y3="0.5602"
                                 z3="-0.6594">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.2177"
                                 y3="-0.6317"
                                 z3="0.2805">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.5650"
                                 y3="3.1886"
                                 z3="-1.3514">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="1.4212"
                                 y3="2.6121"
                                 z3="1.5153">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="3.2041"
                                 y3="-1.6380"
                                 z3="-0.3146">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.6626"
                                 y3="1.6240"
                                 z3="1.2598">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.1583"
                                 y3="-0.0669"
                                 z3="-0.5848">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="3.3881"
                                 y3="-2.8423"
                                 z3="0.5950">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-2.0567"
                                 y3="-1.0987"
                                 z3="0.0463">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a16"
                                 x3="2.9661"
                                 y3="1.0682"
                                 z3="-0.8041">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a17"
                                 x3="1.7070"
                                 y3="0.1989"
                                 z3="-1.6499">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a18"
                                 x3="2.5959"
                                 y3="-0.2834"
                                 z3="1.2501">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a19"
                                 x3="1.2661"
                                 y3="-1.1395"
                                 z3="0.4782">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="1.5197"
                                 y3="3.6870"
                                 z3="-1.5441">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="0.2008"
                                 y3="2.7719"
                                 z3="-2.2952">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.1515"
                                 y3="3.9420"
                                 z3="-1.0111">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="2.4263"
                                 y3="3.0151"
                                 z3="1.3586">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.7765"
                                 y3="3.4313"
                                 z3="1.8468">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="1.4723"
                                 y3="1.8702"
                                 z3="2.3176">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="4.1750"
                                 y3="-1.1559"
                                 z3="-0.4771">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="2.8432"
                                 y3="-1.9803"
                                 z3="-1.2916">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-1.5656"
                                 y3="2.7148"
                                 z3="1.2745">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-1.3644"
                                 y3="1.2120"
                                 z3="2.2288">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.7167"
                                 y3="1.4012"
                                 z3="1.0691">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="2.4394"
                                 y3="-3.3667"
                                 z3="0.7487">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.0978"
                                 y3="-3.5475"
                                 z3="0.1513">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="3.7760"
                                 y3="-2.5396"
                                 z3="1.5728">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a6" order="S"/>
                           <bond atomRefs2="a2 a15" order="S"/>
                           <bond atomRefs2="a3 a15" order="S"/>
                           <bond atomRefs2="a4 a15" order="S"/>
                           <bond atomRefs2="a5 a13" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a6 a13" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a16" order="S"/>
                           <bond atomRefs2="a7 a17" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a19" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a22" order="S"/>
                           <bond atomRefs2="a10 a23" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a24" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a27" order="S"/>
                           <bond atomRefs2="a11 a26" order="S"/>
                           <bond atomRefs2="a12 a28" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a12 a30" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a14 a33" order="S"/>
                           <bond atomRefs2="a14 a32" order="S"/>
                        </bondArray>
                        <formula concise="C 9 H 18 F 3 N 1 O 1 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">223.1831095999999</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="561">0.000000 4.321317 0.000000 4.725581 2.173369 0.000000 5.082242 2.173233 2.189482 0.000000 3.098033 3.498798 2.867980 2.867574 0.000000 1.811016 2.625970 3.415879 3.416412 2.341467 0.000000 1.874138 5.000369 4.577698 5.533459 3.093910 3.001983 0.000000 2.885195 4.730710 4.055294 5.551733 3.632802 3.475200 1.532833 0.000000 1.874162 5.607663 6.053340 5.882308 3.718206 3.001268 3.075538 4.470929 0.000000 1.876935 5.094226 5.880289 6.411908 4.866000 3.043055 3.046247 3.561093 3.046867 0.000000 4.252209 5.899794 4.741042 6.446921 4.448360 4.868279 2.527942 1.529630 5.597845 4.958893 0.000000 2.778966 2.490429 4.106471 3.779250 3.652829 1.464714 4.273307 4.593902 3.772074 3.248299 6.066642 0.000000 2.760745 2.371739 2.381549 2.382028 1.234639 1.397638 3.225036 3.530598 3.762409 4.270981 4.644556 2.552648 0.000000 5.404968 6.191710 4.905621 6.909426 5.430361 5.743545 3.881421 2.521011 6.937588 5.870786 1.520384 6.774907 5.455688 0.000000 4.078797 1.359879 1.357200 1.357254 2.356031 2.467857 4.443161 4.306209 5.216111 5.293750 5.300671 3.006824 1.506659 5.743436 0.000000 2.441835 6.048248 5.655893 6.612895 4.079358 3.928729 1.097297 2.150842 3.249756 3.185900 2.760394 5.098378 4.283365 4.174635 5.535987 0.000000 2.465266 5.152945 4.423785 5.240206 2.526168 3.253985 1.095452 2.162673 3.214276 3.990452 2.720025 4.674555 3.068392 4.136976 4.327389 1.748254 0.000000 3.094393 5.014898 4.680688 6.191882 4.508832 3.816543 2.169756 1.097485 4.790317 3.135948 2.157113 4.666164 4.184226 2.757663 4.874478 2.486686 3.071279 0.000000 3.068965 3.776941 2.997116 4.625718 3.143698 3.033524 2.174409 1.096580 4.750940 3.895399 2.152412 4.101843 2.856248 2.723243 3.351000 3.067284 2.552355 1.759859 0.000000 2.481536 6.577002 6.912244 6.909269 4.567946 3.951476 3.285485 4.739994 1.094069 3.244232 5.718785 4.716445 4.709958 7.120283 6.182470 3.081848 3.494727 4.972910 5.239190 0.000000 2.481930 5.677760 5.878920 5.540766 3.230185 3.215248 3.289388 4.720870 1.094093 4.004350 5.691204 4.174681 3.582095 7.073286 5.055737 3.573913 3.050472 5.257425 4.911788 1.772303 0.000000 2.482119 5.703086 6.497640 6.047347 4.308030 3.222878 4.025883 5.310374 1.093978 3.259558 6.548402 3.579600 4.155317 7.818891 5.491497 4.245115 4.227634 5.524060 5.481719 1.772575 1.772614 0.000000 2.481156 6.121627 6.717132 7.354572 5.530208 3.980296 3.205767 3.808538 3.292209 1.094162 5.005588 4.320188 5.111251 5.984754 6.224369 2.959573 4.183234 3.304639 4.402484 3.114328 4.285120 3.622109 0.000000 2.488765 5.279545 6.406924 6.638870 5.376158 3.316988 4.003966 4.586755 3.214361 1.093901 6.021851 3.091943 4.679053 6.909813 5.638238 4.172033 4.851922 4.179146 4.796351 3.480795 4.233486 3.047883 1.770142 0.000000 2.485604 4.781108 5.566043 6.363225 5.105911 3.232271 3.295702 3.311329 4.002866 1.093943 4.715408 3.317703 4.369936 5.370782 5.140721 3.552415 4.311541 2.653305 3.533299 4.267990 4.869055 4.243740 1.772172 1.772801 0.000000 4.553781 6.823718 5.792149 7.400805 5.188649 5.506895 2.773116 2.163277 5.715871 5.074534 1.096117 6.694941 5.444411 2.147686 6.253903 2.552448 3.049913 2.497605 3.061791 5.625192 5.875999 6.707633 4.881085 6.163823 4.926684 0.000000 4.515733 5.980019 4.550351 6.146019 4.033720 4.984143 2.749104 2.163671 5.649009 5.566948 1.096333 6.308950 4.491399 2.144579 5.155212 3.089678 2.483595 3.066083 2.515230 5.825264 5.529276 6.642330 5.670219 6.588340 5.452710 1.765428 0.000000 2.831721 3.568307 5.163203 4.702853 4.308471 2.120316 4.596353 5.147859 3.414571 2.998251 6.649973 1.095203 3.370570 7.475441 4.036389 5.250540 5.058832 5.129121 4.848530 4.290542 3.983238 2.954601 4.004063 2.515220 3.321181 7.141772 6.932990 0.000000 3.196505 2.401075 4.109761 4.207402 4.275706 2.097999 4.484939 4.475103 4.521876 3.198270 5.955046 1.094362 3.097484 6.457005 3.252986 5.288893 5.050167 4.344888 3.938741 5.355225 5.034850 4.406924 4.286936 3.107196 2.913414 6.604074 6.347274 1.791529 0.000000 3.693000 2.194179 4.035341 3.191620 3.798161 2.105885 5.097336 5.394708 4.452322 4.334465 6.797590 1.094136 2.705423 7.449876 2.780507 5.992828 5.329879 5.576231 4.760989 5.477297 4.659307 4.166911 5.398049 4.114434 4.396184 7.511659 6.922423 1.758626 1.791484 0.000000 5.527964 5.525166 4.092054 6.199771 5.120226 5.510972 4.194353 2.783628 7.134126 6.113138 2.168819 6.480333 5.060667 1.094829 5.084497 4.728312 4.359265 3.127720 2.531842 7.473785 7.208264 7.951525 6.410891 7.084057 5.551743 3.066354 2.499597 7.300762 6.133847 7.030000 0.000000 6.335951 7.164516 5.698970 7.712181 6.178038 6.730554 4.681151 3.471795 7.753311 6.853127 2.159156 7.820191 6.346890 1.094464 6.624614 4.847496 4.795389 3.757315 3.731468 7.865047 7.817083 8.689093 6.878896 7.912610 6.398248 2.473984 2.472266 8.517751 7.536874 8.471682 1.771967 0.000000 5.558976 6.430128 5.443084 7.449840 6.076594 5.989008 4.210748 2.781802 7.188445 5.664663 2.168463 6.856523 5.925943 1.094617 6.198934 4.395658 4.708072 2.566556 3.075391 7.319597 7.480342 8.007055 5.720338 6.687580 5.030715 2.505178 3.063939 7.498693 6.397543 7.611752 1.774749 1.772027 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">0.5310764 0.4182321 0.2910276</array>
                  </module>
               </module>
               <module cmlx:templateRef="l601.popanal" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="g:alphaocc" size="59">-14.03241 -10.15680 -10.03203 -9.94087 -9.88933 -9.88412 -9.88137 -9.87275 -9.87160 -9.87154 -5.08372 -3.49596 -3.49319 -3.49255 -1.23797 -1.14403 -1.14162 -0.99508 -0.85569 -0.72306 -0.70046 -0.66661 -0.65043 -0.64297 -0.62558 -0.58997 -0.56197 -0.54437 -0.54157 -0.51795 -0.50288 -0.46003 -0.43149 -0.42242 -0.41783 -0.41050 -0.40467 -0.39775 -0.38481 -0.38312 -0.37741 -0.37504 -0.37170 -0.36728 -0.36052 -0.35919 -0.35696 -0.35442 -0.34982 -0.34289 -0.31865 -0.31238 -0.30547 -0.29197 -0.28104 -0.27686 -0.25218 -0.23951 -0.22563</array>
                  <array dataType="xsd:double" dictRef="g:alphavirt" size="130">-0.08124 0.03001 0.05350 0.05827 0.06533 0.08053 0.08778 0.08952 0.09574 0.10841 0.11338 0.12124 0.12432 0.12983 0.13376 0.13809 0.14462 0.15108 0.15869 0.16876 0.17001 0.18425 0.18754 0.19263 0.19495 0.20110 0.21265 0.21364 0.21905 0.22757 0.23328 0.23888 0.24531 0.25185 0.25965 0.26594 0.27333 0.27514 0.28793 0.29518 0.30404 0.30698 0.32367 0.32791 0.34113 0.34926 0.36477 0.36807 0.37274 0.39854 0.40505 0.42135 0.43989 0.44453 0.45842 0.49125 0.49977 0.51210 0.51557 0.52892 0.54869 0.55273 0.59947 0.61167 0.63020 0.65941 0.69582 0.73139 0.75338 0.76881 0.81835 0.82478 0.83836 0.84979 0.86527 0.87491 0.88955 0.89496 0.92288 0.93687 0.95624 0.96156 0.99270 1.01036 1.01951 1.04066 1.04365 1.06917 1.07312 1.09420 1.09938 1.10969 1.11306 1.12284 1.13358 1.14607 1.16045 1.16638 1.18472 1.19153 1.21801 1.22232 1.23832 1.27672 1.32223 1.43292 1.46998 1.70371 1.83327 1.87569 2.15936 5.03426 5.05962 5.09747 5.67032 22.23852 22.46526 22.52679 22.54250 22.59877 22.62364 22.62597 22.67110 22.69327 31.50239 41.54518 52.91771 52.93114 53.04794 143.03967</array>
                  <module cmlx:templateRef="l601.orbital.closedshell">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="194">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                     <array dataType="xsd:string"
                            delimiter="|"
                            dictRef="cc:occupation"
                            size="194">O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V</array>
                     <array dataType="xsd:double" dictRef="cc:eigenvalues" size="194">-65.46123 -24.31543 -24.31505 -24.31295 -18.76994 -14.03241 -10.15680 -10.03203 -9.94087 -9.88933 -9.88412 -9.88137 -9.87275 -9.87160 -9.87154 -5.08372 -3.49596 -3.49319 -3.49255 -1.23797 -1.14403 -1.14162 -0.99508 -0.85569 -0.72306 -0.70046 -0.66661 -0.65043 -0.64297 -0.62558 -0.58997 -0.56197 -0.54437 -0.54157 -0.51795 -0.50288 -0.46003 -0.43149 -0.42242 -0.41783 -0.41050 -0.40467 -0.39775 -0.38481 -0.38312 -0.37741 -0.37504 -0.37170 -0.36728 -0.36052 -0.35919 -0.35696 -0.35442 -0.34982 -0.34289 -0.31865 -0.31238 -0.30547 -0.29197 -0.28104 -0.27686 -0.25218 -0.23951 -0.22563 -0.08124 0.03001 0.05350 0.05827 0.06533 0.08053 0.08778 0.08952 0.09574 0.10841 0.11338 0.12124 0.12432 0.12983 0.13376 0.13809 0.14462 0.15108 0.15869 0.16876 0.17001 0.18425 0.18754 0.19263 0.19495 0.20110 0.21265 0.21364 0.21905 0.22757 0.23328 0.23888 0.24531 0.25185 0.25965 0.26594 0.27333 0.27514 0.28793 0.29518 0.30404 0.30698 0.32367 0.32791 0.34113 0.34926 0.36477 0.36807 0.37274 0.39854 0.40505 0.42135 0.43989 0.44453 0.45842 0.49125 0.49977 0.51210 0.51557 0.52892 0.54869 0.55273 0.59947 0.61167 0.63020 0.65941 0.69582 0.73139 0.75338 0.76881 0.81835 0.82478 0.83836 0.84979 0.86527 0.87491 0.88955 0.89496 0.92288 0.93687 0.95624 0.96156 0.99270 1.01036 1.01951 1.04066 1.04365 1.06917 1.07312 1.09420 1.09938 1.10969 1.11306 1.12284 1.13358 1.14607 1.16045 1.16638 1.18472 1.19153 1.21801 1.22232 1.23832 1.27672 1.32223 1.43292 1.46998 1.70371 1.83327 1.87569 2.15936 5.03426 5.05962 5.09747 5.67032 22.23852 22.46526 22.52679 22.54250 22.59877 22.62364 22.62597 22.67110 22.69327 31.50239 41.54518 52.91771 52.93114 53.04794 143.03967</array>
                     <matrix cols="194"
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                        <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">15  C  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">16  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">17  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">18  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">19  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">20  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">21  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">22  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">23  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">24  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">25  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">26  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">27  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">28  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">29  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">30  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">31  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">32  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">33  H  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                     </list>
                  </module>
                  <array dataType="xsd:integer" dictRef="cc:serial" size="1">1</array>
                  <module cmlx:templateRef="l601.grossorbpop">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="194">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                     <array dataType="xsd:string"
                            delimiter="|"
                            dictRef="x:label"
                            size="194">1   Si 1S|2S|3S|4S|5S|6S|7PX|7PY|7PZ|8PX|8PY|8PZ|9PX|9PY|9PZ|10PX|10PY|10PZ|2   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|3   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|4   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|5   O  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|6   N  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|7   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|8   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|9   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|10  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|11  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|12  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|13  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|14  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|15  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|16  H  1S|2S|17  H  1S|2S|18  H  1S|2S|19  H  1S|2S|20  H  1S|2S|21  H  1S|2S|22  H  1S|2S|23  H  1S|2S|24  H  1S|2S|25  H  1S|2S|26  H  1S|2S|27  H  1S|2S|28  H  1S|2S|29  H  1S|2S|30  H  1S|2S|31  H  1S|2S|32  H  1S|2S|33  H  1S|2S</array>
                     <matrix cols="1"
                             dataType="xsd:double"
                             dictRef="g:totaloccup"
                             rows="194">0.74954 1.22055 0.89672 1.08377 0.80961 0.23163 1.97139 1.97635 1.97669 0.01276 0.00948 0.00925 0.38347 0.45721 0.46270 0.08725 0.13180 0.11045 1.13096 0.86127 1.02764 0.90067 1.39054 1.40459 1.14848 0.48539 0.47707 0.31658 1.13099 0.86126 1.03091 0.90082 1.36418 1.15704 1.41167 0.45725 0.32323 0.49071 1.13098 0.86126 1.03049 0.90078 1.17906 1.40835 1.34653 0.34323 0.48654 0.44406 1.13250 0.85915 0.97527 0.86025 1.08991 1.26233 1.03524 0.35616 0.40583 0.21744 1.15922 0.83112 0.80104 0.81510 1.01590 1.01961 1.04159 0.35873 0.27306 0.26400 1.17415 0.81427 0.69865 0.80058 0.91972 0.90263 0.91273 0.26481 0.16100 0.21388 1.17427 0.81421 0.72426 0.60530 0.90576 0.87308 0.88948 0.13693 0.05335 0.13824 1.17411 0.81437 0.70530 0.81980 0.91331 0.93471 0.93657 0.21231 0.25026 0.25096 1.17410 0.81439 0.70484 0.82358 0.91798 0.92173 0.94535 0.23680 0.23720 0.25452 1.17427 0.81424 0.72664 0.59163 0.90051 0.87531 0.89764 0.15726 0.06912 0.14760 1.17423 0.81436 0.73646 0.69647 0.90508 0.92573 0.86681 0.15559 0.16884 0.13492 1.17442 0.81419 0.79383 0.22654 0.81771 0.85278 0.86347 0.13861 0.10737 0.06712 1.17422 0.81433 0.72646 0.67040 0.92454 0.89550 0.90390 0.23287 0.17068 0.18991 1.17469 0.81379 0.83071 0.23557 0.79438 0.82776 0.74124 0.08376 0.09539 0.08104 0.51094 0.25618 0.50815 0.21156 0.51932 0.28543 0.51977 0.27716 0.50605 0.25767 0.50480 0.22759 0.50756 0.26184 0.50441 0.24218 0.50801 0.25455 0.50669 0.24708 0.51932 0.28659 0.51802 0.27289 0.51741 0.25841 0.51533 0.23756 0.51482 0.24121 0.51496 0.26686 0.51603 0.26428 0.51586 0.27759</matrix>
                  </module>
                  <list cmlx:templateRef="multipole" dictRef="cc:multipole">
                     <array dataType="xsd:double" dictRef="cc:dipole" size="3">1.7466 3.6142 2.5594</array>
                     <scalar dataType="xsd:double" dictRef="x:dipole">4.7606</scalar>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-97.4593 -95.8446 -102.3838</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-3.4957 -2.8416 1.5844</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="6">1.1033 2.7180 -3.8213 -3.4957 -2.8416 1.5844</array>
                     <array dataType="xsd:double" dictRef="cc:octapole" size="10">-51.0790 -42.9228 1.9562 -19.7617 -3.1274 -0.9555 -17.9683 -16.9239 0.4440 -1.4937</array>
                     <array dataType="xsd:double" dictRef="cc:hexadecapole" size="15">-2486.2730 -2087.8131 -659.3205 26.7319 -12.8326 33.7025 30.0751 -7.4302 -0.1803 -749.7546 -531.0650 -467.8906 6.9241 -21.4356 3.9521</array>
                  </list>
               </module>
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.806803"
                                 y3="1.810299"
                                 z3="-0.235565">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-2.488827"
                                 y3="-1.491008"
                                 z3="0.748427">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.092583"
                                 y3="-1.394619"
                                 z3="-1.426389">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.7361"
                                 y3="0.256854"
                                 z3="-0.024354">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="-0.902844"
                                 y3="0.073705"
                                 z3="-1.891253">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-0.768499"
                                 y3="0.927132"
                                 z3="0.277497">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="2.091945"
                                 y3="0.481727"
                                 z3="-0.727209">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.361645"
                                 y3="-0.589497"
                                 z3="0.360872">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.383205"
                                 y3="3.019922"
                                 z3="-1.640287">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="1.379248"
                                 y3="2.765414"
                                 z3="1.314818">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="3.39602"
                                 y3="-1.651394"
                                 z3="-0.084092">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.285737"
                                 y3="0.985817"
                                 z3="1.671068">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.352554"
                                 y3="0.170858"
                                 z3="-0.70882">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="3.655902"
                                 y3="-2.723816"
                                 z3="0.995673">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-2.658369"
                                 y3="-0.61298"
                                 z3="-0.359493">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a16"
                                 x3="3.039035"
                                 y3="1.00441"
                                 z3="-0.97969">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a17"
                                 x3="1.739548"
                                 y3="-0.004249"
                                 z3="-1.656519">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a18"
                                 x3="2.723934"
                                 y3="-0.107487"
                                 z3="1.293393">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a19"
                                 x3="1.413717"
                                 y3="-1.104663"
                                 z3="0.621458">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="1.285907"
                                 y3="3.578818"
                                 z3="-1.950557">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-0.00624"
                                 y3="2.469791"
                                 z3="-2.512495">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.377167"
                                 y3="3.753465"
                                 z3="-1.316779">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="2.337226"
                                 y3="3.267837"
                                 z3="1.081534">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.661813"
                                 y3="3.552271"
                                 z3="1.610468">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="1.555441"
                                 y3="2.105843"
                                 z3="2.183068">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="4.347595"
                                 y3="-1.144552"
                                 z3="-0.344799">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="3.035285"
                                 y3="-2.135655"
                                 z3="-1.013682">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-0.904676"
                                 y3="1.895746"
                                 z3="2.157346">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-0.95472"
                                 y3="0.110856"
                                 z3="2.259106">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.385887"
                                 y3="1.029616"
                                 z3="1.691862">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="2.724699"
                                 y3="-3.265051"
                                 z3="1.248536">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.396811"
                                 y3="-3.469529"
                                 z3="0.653895">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="4.042225"
                                 y3="-2.266282"
                                 z3="1.926361">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a6" order="S"/>
                           <bond atomRefs2="a2 a15" order="S"/>
                           <bond atomRefs2="a3 a15" order="S"/>
                           <bond atomRefs2="a4 a15" order="S"/>
                           <bond atomRefs2="a5 a13" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a6 a13" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a16" order="S"/>
                           <bond atomRefs2="a7 a17" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a19" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a22" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a10 a23" order="S"/>
                           <bond atomRefs2="a10 a24" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a26" order="S"/>
                           <bond atomRefs2="a11 a27" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a12 a30" order="S"/>
                           <bond atomRefs2="a12 a28" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a33" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a14 a32" order="S"/>
                        </bondArray>
                        <formula concise="C 9 H 18 F 3 N 1 O 1 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">223.1831095999999</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="561">0.000000 4.767394 0.000000 5.186017 2.259122 0.000000 4.805806 2.282082 2.259906 0.000000 2.946177 3.454211 2.677131 3.397968 0.000000 1.877443 3.004781 3.700692 3.057293 2.334494 0.000000 1.912696 5.201216 5.557774 5.874578 3.238864 3.064303 0.000000 2.921009 4.948738 5.795785 6.168242 4.021044 3.479212 1.550542 0.000000 1.901543 5.856877 5.622724 5.216748 3.224454 3.063346 3.193108 4.576764 0.000000 1.908828 5.779268 6.694577 5.852610 4.767823 3.011334 3.145320 3.623609 3.128822 0.000000 4.325541 5.945606 6.630962 7.383231 4.972125 4.911493 2.581553 1.547756 5.772347 5.052971 0.000000 2.948516 2.904024 4.304115 3.067592 3.697118 1.487622 4.173077 4.183495 4.229423 3.224287 5.652815 0.000000 2.752192 2.485253 2.448126 2.481366 1.268789 1.373278 3.458547 3.939246 3.463764 4.276632 5.124435 2.516444 0.000000 5.494680 6.272053 7.292132 8.035330 6.078045 5.781048 3.961033 2.575536 7.116836 5.951189 1.543865 6.215894 6.030677 0.000000 4.230255 1.423785 1.392037 1.424932 2.428928 2.519784 4.888668 5.071491 4.908114 5.524420 6.148965 2.926337 1.562557 6.794271 0.000000 2.487174 6.306406 6.599365 6.882874 4.151574 4.010462 1.110821 2.190092 3.398839 3.334785 2.825390 5.072525 4.478195 4.264065 5.954914 0.000000 2.486304 5.086587 5.033445 5.719690 2.653943 3.301240 1.106334 2.190750 3.314444 4.077952 2.815939 4.604934 3.238810 4.254712 4.625419 1.778808 0.000000 3.113038 5.420701 6.548724 6.603123 4.829940 3.781477 2.197593 1.110487 4.885303 3.172097 2.175503 4.173178 4.550175 2.793274 5.653029 2.550002 3.111536 0.000000 3.098360 3.923676 4.958274 5.365762 3.615068 3.001427 2.189869 1.109896 4.815562 3.931848 2.173992 3.571952 3.323980 2.790894 4.217333 3.107011 2.550736 1.778349 0.000000 2.509660 6.872864 6.646878 6.321887 4.132791 4.026939 3.426113 4.886181 1.106120 3.366454 5.940655 5.143264 4.485262 7.349853 5.971596 3.262455 3.623619 5.116638 5.344771 0.000000 2.506069 5.699542 5.063478 4.999979 2.632693 3.277940 3.397356 4.818959 1.102297 4.081090 5.869981 4.619685 3.217282 7.258931 4.601379 3.710867 3.146640 5.346120 4.961316 1.793141 0.000000 2.519267 6.019027 5.821363 5.017876 3.761249 3.268488 4.141060 5.401568 1.104948 3.314596 6.705890 4.172841 3.762456 7.972970 5.018578 4.397882 4.326237 5.597927 5.528601 1.788293 1.793082 0.000000 2.490253 6.785894 7.583600 6.868355 5.434887 3.971259 3.330784 3.924153 3.359758 1.106604 5.165130 4.322155 5.139176 6.135648 6.487933 3.140746 4.308213 3.404003 4.492582 3.224215 4.364145 3.654542 0.000000 2.542307 6.008686 6.913010 5.733590 5.177898 3.273218 4.115610 4.648135 3.305817 1.105109 6.117642 3.222314 4.568449 6.980817 5.679231 4.341854 4.948086 4.212684 4.819806 3.615397 4.314729 3.112674 1.779798 0.000000 2.549038 5.599254 6.847302 6.024275 5.174249 3.228197 3.375693 3.351898 4.102161 1.104507 4.758632 3.096595 4.534713 5.398838 5.622527 3.662956 4.385067 2.656262 3.572962 4.396494 4.961817 4.324184 1.781795 1.794044 0.000000 4.613056 6.931944 7.522541 8.210526 5.607386 5.554597 2.806952 2.179462 5.893854 5.182011 1.109213 6.351112 5.861272 2.183890 7.026117 2.594890 3.134136 2.528923 3.089156 5.853427 6.059559 6.874496 5.054224 6.282372 4.975068 0.000000 4.598059 5.834073 6.186293 7.249449 4.600029 5.051394 2.796899 2.175728 5.831478 5.673169 1.108501 5.968476 4.966495 2.183714 5.929941 3.140251 2.575862 3.087556 2.523115 6.049236 5.719042 6.813108 5.837374 6.698659 5.513570 1.775345 0.000000 2.943210 3.995584 5.334472 3.932270 4.439706 2.119101 4.393159 4.480246 4.164664 2.585051 6.008513 1.099838 3.375017 6.594597 3.962779 5.117454 5.014725 4.233931 4.091008 4.950379 4.790004 3.974788 3.681024 2.344577 2.469207 6.564335 6.467682 0.000000 3.494919 2.683581 4.518826 3.601608 4.150849 2.151223 4.282264 3.884850 5.045590 3.658656 5.246431 1.104952 2.995072 5.557829 3.206777 5.219034 4.754413 3.809563 3.125519 5.896476 5.406697 5.137035 4.710638 3.857103 3.207283 6.039115 5.628329 1.788489 0.000000 3.810212 2.693364 4.012458 2.316384 3.993982 2.151017 5.118893 5.189617 4.767851 4.163100 6.616062 1.101218 2.751093 7.146758 2.642049 6.047115 5.412924 5.249958 4.487527 5.766083 5.041175 4.528381 5.262122 3.957131 4.115048 7.363068 6.835789 1.777876 1.792799 0.000000 5.624949 5.529755 6.670420 7.467662 5.845052 5.542540 4.282789 2.842242 7.302655 6.179089 2.197830 5.859352 5.679850 1.106352 6.212621 4.826188 4.476906 3.157882 2.603686 7.690439 7.381855 8.090858 6.546498 7.131785 5.575573 3.109505 2.547475 6.374333 5.094715 6.690201 0.000000 6.446385 7.164879 8.045113 8.971632 6.864301 6.793580 4.778313 3.538692 7.967765 6.958234 2.202685 7.292195 6.940072 1.105372 7.678697 4.952604 4.940366 3.809305 3.806901 8.132655 8.042910 8.879531 7.058106 8.010675 6.441780 2.530875 2.532545 7.691054 6.635867 8.205162 1.786440 0.000000 5.635636 6.681558 7.931343 8.406773 6.671089 6.004974 4.289123 2.843714 7.352099 5.725679 2.199452 6.247280 6.479774 1.106690 7.270247 4.488758 4.822462 2.607477 3.156135 7.536111 7.650091 8.141643 5.852113 6.736655 5.036415 2.551410 3.110441 6.468977 5.543551 7.227625 1.786858 1.786814 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">0.5761185 0.3291498 0.2645035</array>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 191 191 191 191 191 MxSgAt= 33 MxSgA2= 33.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 8515 NPrTT= 41984 LenC2= 7741 LenP2D= 24520.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 194 RedAO= T EigKep= 2.45D-03 NBF= 194</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 194 1.00D-06 EigRej= -1.00D+00 NBFU= 194</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 188 188 188 188 188 MxSgAt= 33 MxSgA2= 33.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l303.basis">
                  <list cmlx:templateRef="l303">
                     <scalar dataType="xsd:integer" dictRef="g:dipdrv">1</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l401"/>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.18090832118</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.35209187356</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.171183552377</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.43807645661</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.085984583050</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1070.63383871292</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.804237743691</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.63429086096</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-1.000452148038</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70254549865</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.068254637692</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70574671478</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.003201216134</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70595634978</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000209634997</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70600805460</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000051704822</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614203870</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000133984098</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614091829</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000001120409</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614256065</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000001642363</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614268000</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000119344</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614274709</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000067091</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614274898</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000001886</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614274904</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000065</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.70614274906</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000020</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-1071.70614275</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">17</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">1.068219729598e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-5.074186536735e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">1.660689344088e+03</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Two-electron integral symmetry not used.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=182739650.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=      134240 IEndB=      134240 NGot=  2818572288 MDV=  2639539979</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=  2639539979 LenY=  2639501902</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=  18915 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l716.dipole">
                  <array cmlx:templateRef="dipole"
                         dataType="xsd:double"
                         dictRef="x:d"
                         size="3">6.87170779e-01 1.42193057e+00 1.00695372e+00</array>
               </module>
               <module cmlx:templateRef="l716.forces">
                  <list cmlx:templateRef="force">
                     <array dataType="xsd:integer" dictRef="x:serial" size="33">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33</array>
                     <array dataType="xsd:integer" dictRef="x:elementType" size="33">14 9 9 9 8 7 6 6 6 6 6 6 6 6 6 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <list>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.015787565 0.006957808 -0.017729454</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.014412396 0.000548821 0.048459262</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.022932383 -0.037965745 -0.001979288</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.037311883 -0.004523761 -0.026885703</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.019956668 -0.007993991 -0.035850512</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.008010378 -0.008246179 -0.011102991</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000168392 -0.003882646 -0.001244323</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.001872365 0.002087097 -0.005702968</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.003630320 0.001615247 -0.002185673</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.009296681 -0.002085759 0.007352170</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.002311680 -0.001550663 0.004071328</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.009064039 -0.004516161 0.004611072</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.005880399 0.033223716 0.027276270</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.003637525 -0.005136198 -0.000244285</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.005020091 0.012455161 -0.003185562</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.006747819 0.005549998 -0.000836594</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.002707174 -0.002442772 -0.005886882</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.002573161 0.001621476 0.007374978</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.006627763 -0.004448692 0.001533373</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.006282144 0.003964519 -0.001010400</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.002346064 -0.002373427 -0.005557675</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.004755545 0.006798146 0.000635025</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.005613525 0.001606095 -0.003047722</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.002406774 0.006186611 0.004440388</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.001657471 -0.003302238 0.007193337</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.006282134 0.004856938 -0.002610582</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.002697760 0.000033789 -0.007217555</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.004026257 0.005706512 -0.001559307</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.003707552 0.002548840 0.009094852</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.004329957 0.002141400 0.003655239</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.005739895 -0.003808468 0.001688600</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.004557617 -0.006552305 -0.000791285</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.002437172 0.000926831 0.007242866</array>
                     </list>
                  </list>
                  <list cmlx:templateRef="cartesianforce">
                     <scalar dataType="xsd:double" dictRef="cc:maxforce">0.048459262</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:rmsforce">0.011392760</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73686152423</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688531279</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000023788556</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688514903</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000163761</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688535754</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000208506</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688536651</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000008978</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688537260</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000006083</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688537271</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000110</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73688537271</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000000000</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-1071.73688537</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">8</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">1.067049499763e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-4.999082812368e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">1.623970830267e+03</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Two-electron integral symmetry not used.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=182739650.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=      134240 IEndB=      134240 NGot=  2818572288 MDV=  2639539979</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=  2639539979 LenY=  2639501902</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=  18915 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l601.kinetic">
                  <module>
                     <scalar dataType="xsd:string" dictRef="g:spintype">alpha</scalar>
                     <array dataType="xsd:integer" dictRef="x:serial" size="194">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                     <array dataType="xsd:string" dictRef="x:label" size="194">O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V</array>
                     <array dataType="xsd:double" dictRef="g:orbitalener" size="194">-65.474771 -24.312167 -24.311973 -24.311456 -18.761777 -14.042013 -10.158352 -10.031603 -9.942465 -9.898863 -9.891677 -9.891642 -9.885809 -9.882155 -9.879611 -5.093805 -3.506694 -3.503349 -3.502582 -1.198025 -1.121925 -1.118440 -0.973100 -0.852118 -0.718809 -0.684921 -0.662527 -0.651638 -0.642611 -0.623852 -0.571126 -0.563160 -0.525399 -0.524888 -0.518719 -0.489190 -0.455587 -0.426230 -0.419822 -0.411893 -0.398127 -0.394948 -0.393574 -0.381995 -0.376911 -0.371586 -0.368093 -0.367347 -0.364722 -0.362234 -0.357108 -0.352933 -0.351115 -0.348238 -0.343902 -0.318640 -0.315403 -0.309127 -0.293793 -0.282695 -0.279333 -0.261135 -0.233009 -0.229225 -0.077040 0.016690 0.032335 0.040177 0.050849 0.055730 0.065080 0.079031 0.085529 0.088236 0.104853 0.106307 0.114285 0.120553 0.126787 0.128637 0.139565 0.145683 0.151702 0.158525 0.164680 0.171069 0.177101 0.179790 0.188526 0.191046 0.196884 0.201451 0.210336 0.218052 0.224744 0.230047 0.237428 0.244046 0.253057 0.261557 0.272056 0.279195 0.281368 0.289730 0.296406 0.302050 0.313968 0.319760 0.332510 0.338065 0.344292 0.355333 0.381958 0.397899 0.403037 0.407607 0.426803 0.451496 0.454528 0.473833 0.479509 0.491245 0.495489 0.524133 0.532715 0.554254 0.581368 0.628739 0.638178 0.657306 0.695761 0.710554 0.743749 0.759801 0.787681 0.792393 0.827078 0.840306 0.862266 0.872236 0.898712 0.916302 0.921851 0.947988 0.962827 0.981864 0.984241 1.001237 1.018724 1.025996 1.043708 1.057659 1.068392 1.079497 1.083394 1.087410 1.098182 1.110777 1.117368 1.134258 1.149238 1.151181 1.164343 1.175313 1.189837 1.206948 1.222023 1.246684 1.285916 1.429143 1.493408 1.702203 1.769716 1.881025 2.168985 4.985778 5.053161 5.074633 5.662082 22.262242 22.448304 22.515353 22.544102 22.585095 22.609690 22.613365 22.654320 22.673712 31.501844 41.546184 52.890139 52.941052 53.044910 143.018179</array>
                     <array dataType="xsd:double" dictRef="g:kineticener" size="194">92.155562 37.166976 37.167090 37.166148 29.117162 22.047305 15.964322 15.957215 15.957647 15.958847 15.955599 15.958748 15.956610 15.957687 15.955306 13.059379 12.094332 12.095898 12.096857 3.296764 3.870774 3.878889 2.525643 2.078588 1.324812 2.233252 1.383800 1.802268 1.361174 1.359620 1.975105 1.692379 2.641515 2.708948 1.230643 1.832901 1.611804 1.204762 0.952611 1.716586 2.833800 2.657450 2.390607 1.071036 1.115496 2.027784 1.745121 2.624444 1.606878 1.848983 1.480763 1.820200 3.263679 1.617989 1.373337 1.681360 1.222565 1.208770 1.209866 1.179875 1.194398 1.495897 2.475905 1.907020 2.368003 2.652321 3.041453 1.917767 2.161294 1.843138 1.896548 2.148890 1.519872 1.446692 1.486760 0.990063 1.171274 1.643653 1.300616 1.103294 1.027426 1.216927 0.913260 1.166882 1.480736 1.205134 1.248603 1.063856 1.220480 1.378292 1.422839 1.453494 1.223635 1.503227 1.438600 1.539447 1.310212 1.586212 1.664856 1.521035 1.511591 1.325473 1.579188 1.844606 1.828149 1.596679 1.564988 1.601386 1.480163 1.455571 1.657200 1.612455 2.295949 1.668365 1.749207 1.846900 2.262781 1.630653 2.149877 2.675726 2.828776 2.438029 2.039045 2.435041 2.370446 2.176326 2.065594 2.343278 2.415549 2.306451 2.350249 2.792109 2.868396 2.993777 2.912094 2.701695 2.833840 3.015512 2.994410 3.098164 3.188548 3.077192 3.060174 3.075089 3.147203 3.028947 3.056961 3.066699 3.007323 2.595519 2.745825 2.874496 2.885826 2.968188 2.611064 2.777549 2.688874 2.732453 2.843839 3.123124 2.670838 2.879050 2.832717 2.832505 2.681967 2.760639 2.784426 2.987200 2.844220 2.814808 3.872625 5.162837 6.285731 6.423027 6.448182 9.671236 9.916209 9.717542 22.036337 57.407276 57.380916 57.413498 57.394746 57.397659 57.396868 57.399368 57.389132 57.372579 80.070152 105.844154 135.442662 135.435327 135.433588 369.947475</array>
                  </module>
                  <scalar dataType="xsd:string" dictRef="g:totalkineticener">1.067049499763D+03</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:jobtime">
                  <scalar dataType="xsd:string">PT3685.200S</scalar>
               </property>
               <property dictRef="cc:jobdatetime.end">
                  <scalar dataType="xsd:date">2017-08-27T18:28:05.000+02:00</scalar>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="33">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="33">Si F F F O N C C C C C C C C C H H H H H H H H H H H H H H H H H H</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="33">1.419388 -0.143196 -0.128054 -0.131277 -0.194068 -0.579372 -0.862429 -0.314872 -1.011699 -1.030485 -0.354203 -0.578501 0.143966 -0.702795 0.321671 0.232880 0.280282 0.195252 0.203079 0.236278 0.267617 0.230598 0.253410 0.237440 0.246233 0.194094 0.209090 0.224179 0.247108 0.243972 0.218179 0.219684 0.206551</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property dictRef="cc:popanal">
                  <module cmlx:templateRef="l601.popanal">
                     <array dataType="xsd:double" dictRef="g:alphaocc" size="59">-14.04201 -10.15835 -10.03160 -9.94246 -9.89886 -9.89168 -9.89164 -9.88581 -9.88216 -9.87961 -5.09380 -3.50669 -3.50335 -3.50258 -1.19803 -1.12192 -1.11844 -0.97310 -0.85212 -0.71881 -0.68492 -0.66253 -0.65164 -0.64261 -0.62385 -0.57113 -0.56316 -0.52540 -0.52489 -0.51872 -0.48919 -0.45559 -0.42623 -0.41982 -0.41189 -0.39813 -0.39495 -0.39357 -0.38200 -0.37691 -0.37159 -0.36809 -0.36735 -0.36472 -0.36223 -0.35711 -0.35293 -0.35111 -0.34824 -0.34390 -0.31864 -0.31540 -0.30913 -0.29379 -0.28269 -0.27933 -0.26113 -0.23301 -0.22923</array>
                     <array dataType="xsd:double" dictRef="g:alphavirt" size="130">-0.07704 0.01669 0.03234 0.04018 0.05085 0.05573 0.06508 0.07903 0.08553 0.08824 0.10485 0.10631 0.11428 0.12055 0.12679 0.12864 0.13957 0.14568 0.15170 0.15853 0.16468 0.17107 0.17710 0.17979 0.18853 0.19105 0.19688 0.20145 0.21034 0.21805 0.22474 0.23005 0.23743 0.24405 0.25306 0.26156 0.27206 0.27920 0.28137 0.28973 0.29641 0.30205 0.31397 0.31976 0.33251 0.33806 0.34429 0.35533 0.38196 0.39790 0.40304 0.40761 0.42680 0.45150 0.45453 0.47383 0.47951 0.49124 0.49549 0.52413 0.53272 0.55425 0.58137 0.62874 0.63818 0.65731 0.69576 0.71055 0.74375 0.75980 0.78768 0.79239 0.82708 0.84031 0.86227 0.87224 0.89871 0.91630 0.92185 0.94799 0.96283 0.98186 0.98424 1.00124 1.01872 1.02600 1.04371 1.05766 1.06839 1.07950 1.08339 1.08741 1.09818 1.11078 1.11737 1.13426 1.14924 1.15118 1.16434 1.17531 1.18984 1.20695 1.22202 1.24668 1.28592 1.42914 1.49341 1.70220 1.76972 1.88102 2.16898 4.98578 5.05316 5.07463 5.66208 22.26224 22.44830 22.51535 22.54410 22.58509 22.60969 22.61336 22.65432 22.67371 31.50184 41.54618 52.89014 52.94105 53.04491 143.01818</array>
                     <module cmlx:templateRef="l601.orbital.closedshell">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="194">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                        <array dataType="xsd:string"
                               delimiter="|"
                               dictRef="cc:occupation"
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                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">11  C  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">12  C  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">13  C  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">14  C  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">15  C  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">16  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">17  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">18  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">19  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">20  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">21  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">22  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">23  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">24  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">25  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">26  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">27  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">28  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">29  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">30  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">31  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">32  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">33  H  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        </list>
                     </module>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1">1</array>
                     <module cmlx:templateRef="l601.grossorbpop">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="194">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194</array>
                        <array dataType="xsd:string"
                               delimiter="|"
                               dictRef="x:label"
                               size="194">1   Si 1S|2S|3S|4S|5S|6S|7PX|7PY|7PZ|8PX|8PY|8PZ|9PX|9PY|9PZ|10PX|10PY|10PZ|2   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|3   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|4   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|5   O  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|6   N  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|7   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|8   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|9   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|10  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|11  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|12  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|13  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|14  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|15  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|16  H  1S|2S|17  H  1S|2S|18  H  1S|2S|19  H  1S|2S|20  H  1S|2S|21  H  1S|2S|22  H  1S|2S|23  H  1S|2S|24  H  1S|2S|25  H  1S|2S|26  H  1S|2S|27  H  1S|2S|28  H  1S|2S|29  H  1S|2S|30  H  1S|2S|31  H  1S|2S|32  H  1S|2S|33  H  1S|2S</array>
                        <matrix cols="1"
                                dataType="xsd:double"
                                dictRef="g:totaloccup"
                                rows="194">0.74956 1.22052 0.89724 1.08344 0.81455 0.27927 1.97032 1.97486 1.97590 0.01316 0.01029 0.00964 0.37493 0.44134 0.45659 0.10806 0.12362 0.09516 1.13104 0.86124 1.02991 0.91777 1.40960 1.28241 1.21420 0.50074 0.43025 0.38970 1.13103 0.86120 1.03437 0.90688 1.38094 1.30342 1.22589 0.46799 0.43119 0.38209 1.13104 0.86124 1.03024 0.91660 1.22145 1.29633 1.38741 0.39211 0.44186 0.49225 1.13254 0.85914 0.97367 0.87806 1.18893 1.13453 1.04573 0.39206 0.40531 0.24633 1.15932 0.83100 0.81065 0.81882 1.03939 1.06083 0.94275 0.38240 0.37216 0.11106 1.17422 0.81429 0.69833 0.80882 0.90934 0.89308 0.89774 0.23885 0.19014 0.18835 1.17432 0.81424 0.72337 0.61659 0.89722 0.86912 0.87733 0.13369 0.06675 0.13140 1.17414 0.81440 0.70337 0.83877 0.91031 0.92065 0.93056 0.21417 0.24510 0.26086 1.17415 0.81442 0.70202 0.83942 0.91083 0.91723 0.92974 0.26388 0.25342 0.26047 1.17432 0.81426 0.72483 0.61072 0.89090 0.87074 0.88576 0.15181 0.08811 0.13413 1.17424 0.81440 0.73121 0.73070 0.94883 0.96441 0.77652 0.18742 0.21018 0.09186 1.17449 0.81427 0.79388 0.21670 0.83665 0.81089 0.86027 0.07656 0.11936 0.05481 1.17426 0.81436 0.72483 0.68511 0.91664 0.89375 0.88948 0.22920 0.18549 0.18087 1.17495 0.81361 0.81967 0.36659 0.83627 0.74013 0.68852 0.10211 0.08799 0.06639 0.50529 0.27342 0.50361 0.22439 0.51403 0.29958 0.51320 0.28690 0.50168 0.26621 0.49961 0.21580 0.50221 0.26106 0.50141 0.24834 0.50317 0.25465 0.50323 0.24879 0.51383 0.29507 0.51324 0.28462 0.51448 0.23694 0.50987 0.24017 0.51035 0.22802 0.51062 0.27727 0.51107 0.26967 0.51088 0.28325</matrix>
                     </module>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="33">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="33">Si F F F O N C C C C C C C C C H H H H H H H H H H H H H H H H H H</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="33">1.401546 -0.166857 -0.125002 -0.170524 -0.256304 -0.528381 -0.813163 -0.304048 -1.012330 -1.065585 -0.345564 -0.629763 0.242134 -0.693999 0.303793 0.221292 0.271999 0.186397 0.199895 0.232111 0.284586 0.236727 0.250246 0.242185 0.247984 0.191102 0.202137 0.248572 0.249958 0.261624 0.212106 0.219253 0.205874</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.dipole">
                     <array cmlx:templateRef="dipole"
                            dataType="xsd:double"
                            dictRef="x:d"
                            size="3">1.24962044e+00 1.11677587e+00 1.23307050e+00</array>
                  </module>
               </property>
               <property dictRef="cc:forces">
                  <scalar dictRef="cc:linkToAtoms">./ancestor::cml:module[@dictRef='cc:finalization']/cml:molecule[@id='mol9999']</scalar>
               </property>
               <property dictRef="cc:multipole">
                  <list cmlx:templateRef="multipole">
                     <array dataType="xsd:double" dictRef="cc:dipole" size="3">3.1762 2.8386 3.1342</array>
                     <scalar dataType="xsd:double" dictRef="x:dipole">5.2885</scalar>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-102.9768 -94.5929 -101.7933</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-1.6010 -4.5559 0.6006</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="6">-3.1891 5.1947 -2.0057 -1.6010 -4.5559 0.6006</array>
                     <array dataType="xsd:double" dictRef="cc:octapole" size="10">0.1513 -74.9526 37.5471 -4.1984 -17.4908 9.9164 -7.5916 -23.5564 5.5969 -1.4710</array>
                     <array dataType="xsd:double" dictRef="cc:hexadecapole" size="15">-3153.8714 -1804.6361 -814.6097 82.6279 -147.5389 82.8855 69.9104 -152.0981 62.5140 -807.8231 -653.9077 -444.7330 18.2135 -62.1108 19.4280</array>
                  </list>
               </property>
            </propertyList>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l9999.archive" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:zmat">0</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:hfenergy" units="nonsi:hartree">-1071.7368854</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsd" units="nonsi:unknown">5.203E-9</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsf" units="nonsi:unknown">1.641E-5</scalar>
                  <scalar dataType="xsd:string" dictRef="x:Quadrupole">-2.3710112,3.8621655,-1.4911543,-1.1902696,-3.387181,0.4465438</scalar>
                  <scalar dataType="xsd:string" dictRef="cc:pointgroup">C01 [X(C9H18F3N1O1Si1)]</scalar>
                  <array dataType="xsd:double"
                         dictRef="cc:dipole"
                         size="3"
                         units="nonsi:debye">1.2496204 1.1167759 1.2330705</array>
                  <array dataType="xsd:double" dictRef="cc:forceConstants" size="1">@</array>
               </module>
            </module>
            <molecule formalCharge="0" id="mol9999" spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.80680326"
                        y3="1.81029915"
                        z3="-0.23556501">
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.0" size="3">0.000001373 0.000000894 -0.000017082</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.1" size="3">0.000001550 -0.000010686 -0.000001391</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.2" size="3">-0.000014728 -0.000014145 -0.000031668</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.3" size="3">0.000053308 -0.000036187 -0.000025865</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.4" size="3">0.000015756 0.000009127 0.000006886</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.5" size="3">0.000017251 -0.000015785 0.000076994</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.6" size="3">-0.000003744 -0.000002122 -0.000000101</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.7" size="3">0.000006671 -0.000002240 -0.000007060</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.8" size="3">-0.000006228 0.000003957 0.000000726</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.9" size="3">0.000003112 0.000000158 0.000001619</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.10" size="3">-0.000002783 0.000002851 0.000000948</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.11" size="3">-0.000009916 0.000003355 -0.000010572</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.12" size="3">-0.000022608 -0.000003811 -0.000051753</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.13" size="3">-0.000003192 -0.000004122 -0.000005576</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.14" size="3">-0.000036631 0.000070619 0.000034986</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.15" size="3">0.000002145 -0.000001332 -0.000001443</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.16" size="3">-0.000005607 0.000005442 0.000001578</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.17" size="3">-0.000002623 -0.000005504 0.000006691</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.18" size="3">-0.000002565 0.000003978 -0.000005949</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.19" size="3">0.000016852 0.000004338 0.000019478</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.20" size="3">0.000011647 0.000012277 0.000001667</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.21" size="3">0.000006740 0.000006203 0.000000226</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.22" size="3">-0.000000526 -0.000002208 0.000014955</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.23" size="3">-0.000003078 -0.000000546 0.000001504</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.24" size="3">-0.000006663 -0.000002526 0.000007834</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.25" size="3">0.000000782 0.000000376 0.000001112</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.26" size="3">0.000002238 0.000000060 -0.000003995</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.27" size="3">0.000001187 -0.000005893 0.000002768</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.28" size="3">-0.000006591 -0.000001848 -0.000006391</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.29" size="3">-0.000002874 -0.000000583 -0.000002060</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.30" size="3">-0.000003460 -0.000004672 -0.000004709</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.31" size="3">-0.000002723 -0.000003876 -0.000003683</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.32" size="3">-0.000004071 -0.000005549 -0.000000674</array>
                     </property>
                  </atom>
                  <atom elementType="F"
                        id="a2"
                        x3="-2.48882717"
                        y3="-1.49100772"
                        z3="0.74842676"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.09258289"
                        y3="-1.39461876"
                        z3="-1.42638857"/>
                  <atom elementType="F"
                        id="a4"
                        x3="-3.7360997"
                        y3="0.2568536"
                        z3="-0.02435428"/>
                  <atom elementType="O"
                        id="a5"
                        x3="-0.90284432"
                        y3="0.07370486"
                        z3="-1.89125284"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.76849878"
                        y3="0.92713243"
                        z3="0.277497"/>
                  <atom elementType="C"
                        id="a7"
                        x3="2.09194455"
                        y3="0.48172697"
                        z3="-0.72720854"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.3616454"
                        y3="-0.58949699"
                        z3="0.36087232"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.38320516"
                        y3="3.01992189"
                        z3="-1.64028718"/>
                  <atom elementType="C"
                        id="a10"
                        x3="1.37924841"
                        y3="2.76541404"
                        z3="1.31481828"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.39601954"
                        y3="-1.65139433"
                        z3="-0.08409213"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.28573712"
                        y3="0.98581743"
                        z3="1.67106784"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.35255413"
                        y3="0.1708577"
                        z3="-0.70881967"/>
                  <atom elementType="C"
                        id="a14"
                        x3="3.65590214"
                        y3="-2.72381555"
                        z3="0.99567265"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-2.65836904"
                        y3="-0.61297986"
                        z3="-0.35949259"/>
                  <atom elementType="H"
                        id="a16"
                        x3="3.03903466"
                        y3="1.00440988"
                        z3="-0.97968991"/>
                  <atom elementType="H"
                        id="a17"
                        x3="1.73954776"
                        y3="-0.00424939"
                        z3="-1.65651884"/>
                  <atom elementType="H"
                        id="a18"
                        x3="2.72393409"
                        y3="-0.10748707"
                        z3="1.29339347"/>
                  <atom elementType="H"
                        id="a19"
                        x3="1.41371659"
                        y3="-1.1046625"
                        z3="0.62145769"/>
                  <atom elementType="H"
                        id="a20"
                        x3="1.28590665"
                        y3="3.57881754"
                        z3="-1.95055706"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-0.00623971"
                        y3="2.46979113"
                        z3="-2.51249529"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.37716723"
                        y3="3.7534653"
                        z3="-1.31677945"/>
                  <atom elementType="H"
                        id="a23"
                        x3="2.33722622"
                        y3="3.26783676"
                        z3="1.0815345"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.66181331"
                        y3="3.55227063"
                        z3="1.61046818"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.55544139"
                        y3="2.10584327"
                        z3="2.18306828"/>
                  <atom elementType="H"
                        id="a26"
                        x3="4.34759502"
                        y3="-1.1445517"
                        z3="-0.34479859"/>
                  <atom elementType="H"
                        id="a27"
                        x3="3.03528481"
                        y3="-2.13565494"
                        z3="-1.01368207"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-0.9046763"
                        y3="1.89574587"
                        z3="2.15734629"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.95471966"
                        y3="0.11085575"
                        z3="2.25910622"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.38588735"
                        y3="1.02961644"
                        z3="1.69186163"/>
                  <atom elementType="H"
                        id="a31"
                        x3="2.72469897"
                        y3="-3.26505063"
                        z3="1.24853558"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.39681065"
                        y3="-3.469529"
                        z3="0.65389453"/>
                  <atom elementType="H"
                        id="a33"
                        x3="4.04222482"
                        y3="-2.26628219"
                        z3="1.92636081"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a6" order="S"/>
                  <bond atomRefs2="a2 a15" order="S"/>
                  <bond atomRefs2="a3 a15" order="S"/>
                  <bond atomRefs2="a4 a15" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a6 a13" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a16" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a9 a22" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a10 a23" order="S"/>
                  <bond atomRefs2="a10 a24" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a26" order="S"/>
                  <bond atomRefs2="a11 a27" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a12 a30" order="S"/>
                  <bond atomRefs2="a12 a28" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a33" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a14 a32" order="S"/>
               </bondArray>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">223.1831095999999</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
         </module>
      </module>
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:hostname">
                  <scalar dataType="xsd:string">GINC-KIMIK2156</scalar>
               </parameter>
               <parameter dictRef="cc:jobname">
                  <scalar dataType="xsd:string">CBGUSER</scalar>
               </parameter>
               <parameter dictRef="cc:title">
                  <scalar dataType="xsd:string">000122085</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
               <parameter dictRef="cc:run.date">
                  <scalar dataType="xsd:string">27-Aug-2017</scalar>
               </parameter>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:program.date">
                  <scalar dataType="xsd:string">24-Apr-2013</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:degfreedom">
                  <scalar cmlx:templateRef="degfreedom" dataType="xsd:integer">93</scalar>
               </parameter>
               <parameter dictRef="cc:frameworkgroup">
                  <scalar cmlx:templateRef="framework" dataType="xsd:string">C1[X(C9H18F3NOSi)]</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">RPBEPBE</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="g:operation">
                  <scalar dataType="xsd:string">Freq</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">#p</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">freq=noraman</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">PBEPBE/SDD</scalar>
               </parameter>
            </parameterList>
            <molecule cmlx:templateRef="mol"
                      formalCharge="0"
                      id="zmat"
                      spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.8068"
                        y3="1.8103"
                        z3="-0.23557"/>
                  <atom elementType="F"
                        id="a2"
                        x3="-2.48883"
                        y3="-1.49101"
                        z3="0.74843"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.09258"
                        y3="-1.39462"
                        z3="-1.42639"/>
                  <atom elementType="F"
                        id="a4"
                        x3="-3.7361"
                        y3="0.25685"
                        z3="-0.02435"/>
                  <atom elementType="O"
                        id="a5"
                        x3="-0.90284"
                        y3="0.07371"
                        z3="-1.89125"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.7685"
                        y3="0.92713"
                        z3="0.2775"/>
                  <atom elementType="C"
                        id="a7"
                        x3="2.09194"
                        y3="0.48173"
                        z3="-0.72721"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.36165"
                        y3="-0.5895"
                        z3="0.36087"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.38321"
                        y3="3.01992"
                        z3="-1.64029"/>
                  <atom elementType="C"
                        id="a10"
                        x3="1.37925"
                        y3="2.76541"
                        z3="1.31482"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.39602"
                        y3="-1.65139"
                        z3="-0.08409"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.28574"
                        y3="0.98582"
                        z3="1.67107"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.35255"
                        y3="0.17086"
                        z3="-0.70882"/>
                  <atom elementType="C"
                        id="a14"
                        x3="3.6559"
                        y3="-2.72382"
                        z3="0.99567"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-2.65837"
                        y3="-0.61298"
                        z3="-0.35949"/>
                  <atom elementType="H"
                        id="a16"
                        x3="3.03904"
                        y3="1.00441"
                        z3="-0.97969"/>
                  <atom elementType="H"
                        id="a17"
                        x3="1.73955"
                        y3="-0.00425"
                        z3="-1.65652"/>
                  <atom elementType="H"
                        id="a18"
                        x3="2.72393"
                        y3="-0.10749"
                        z3="1.29339"/>
                  <atom elementType="H"
                        id="a19"
                        x3="1.41372"
                        y3="-1.10466"
                        z3="0.62146"/>
                  <atom elementType="H"
                        id="a20"
                        x3="1.28591"
                        y3="3.57882"
                        z3="-1.95056"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-0.00624"
                        y3="2.46979"
                        z3="-2.5125"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.37717"
                        y3="3.75347"
                        z3="-1.31678"/>
                  <atom elementType="H"
                        id="a23"
                        x3="2.33723"
                        y3="3.26784"
                        z3="1.08153"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.66181"
                        y3="3.55227"
                        z3="1.61047"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.55544"
                        y3="2.10584"
                        z3="2.18307"/>
                  <atom elementType="H"
                        id="a26"
                        x3="4.3476"
                        y3="-1.14455"
                        z3="-0.3448"/>
                  <atom elementType="H"
                        id="a27"
                        x3="3.03529"
                        y3="-2.13565"
                        z3="-1.01368"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-0.90468"
                        y3="1.89575"
                        z3="2.15735"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.95472"
                        y3="0.11086"
                        z3="2.25911"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.38589"
                        y3="1.02962"
                        z3="1.69186"/>
                  <atom elementType="H"
                        id="a31"
                        x3="2.7247"
                        y3="-3.26505"
                        z3="1.24854"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.39681"
                        y3="-3.46953"
                        z3="0.6539"/>
                  <atom elementType="H"
                        id="a33"
                        x3="4.04223"
                        y3="-2.26628"
                        z3="1.92636"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a6" order="S"/>
                  <bond atomRefs2="a2 a15" order="S"/>
                  <bond atomRefs2="a3 a15" order="S"/>
                  <bond atomRefs2="a4 a15" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a6 a13" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a16" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a9 a22" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a10 a23" order="S"/>
                  <bond atomRefs2="a10 a24" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a26" order="S"/>
                  <bond atomRefs2="a11 a27" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a12 a30" order="S"/>
                  <bond atomRefs2="a12 a28" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a33" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a14 a32" order="S"/>
               </bondArray>
               <formula concise="C 9 H 18 F 3 N 1 O 1 Si 1"/>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">223.1831095999999</scalar>
               </property>
               <list cmlx:templateRef="charge">
                  <list>
                     <scalar dataType="xsd:integer" dictRef="g:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:mult">1</scalar>
                  </list>
               </list>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="entering" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:link0">g09</scalar>
                  <array dataType="xsd:string" dictRef="g:command" size="3">/mnt/data/applications/G09/g09/l1.exe "/scratch/Gau-21346.inp" -scrdir="/scratch/"</array>
               </module>
               <module cmlx:templateRef="l1" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l1.end">
                     <array dataType="xsd:string" dictRef="g:kk" size="1">chk=000122085-Freq.chk</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">nprocshared=12</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">mem=21GB</array>
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">#p freq=noraman PBEPBE/SDD</scalar>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">1/10=4,30=1,38=1/1,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/12=2,17=6,18=5,40=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,25=1,30=1,71=2,74=1009,140=1/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4//1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5,98=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">8/6=4,10=90,11=11/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">11/6=1,8=1,9=11,15=111,16=1/1,2,10</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">10/6=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=2,8=2,9=2,10=2,18=1,28=1/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/8=1,10=1,25=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/10=4,30=1/3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99//99</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l101" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l101.title">
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">000122085</scalar>
                  </module>
                  <module cmlx:templateRef="l101.isotope2">
                     <array cmlx:templateRef="atom"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="33">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33</array>
                     <array cmlx:templateRef="iatwgt"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="33">28 19 19 19 16 14 12 12 12 12 12 12 12 12 12 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atmwgt"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="33">27.9769284 18.9984033 18.9984033 18.9984033 15.9949146 14.0030740 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250</array>
                     <array cmlx:templateRef="nucspn"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="33">0 1 1 1 0 2 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atzeff"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="33">0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000</array>
                  </module>
                  <list cmlx:templateRef="rest">
                     <scalar dataType="xsd:string" dictRef="x:l101">(Enter /mnt/data/applications/G09/g09/l101.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Initialization pass.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.trust">
                     <scalar dataType="xsd:double" dictRef="g:trustrad">3.00e-01</scalar>
                     <scalar dataType="xsd:double" dictRef="g:fncerr">1.00e-07</scalar>
                     <scalar dataType="xsd:double" dictRef="g:grderr">1.00e-07</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:nstep">2</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:allowedstep">2</scalar>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Search for a local minimum.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.itemconverge">
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">|Maximum Force|RMS     Force|Maximum Displacement|RMS     Displacement|</array>
                        <array dataType="xsd:double" dictRef="g:value" size="4">0.000416 0.000072 0.045901 0.018153</array>
                        <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000450 0.000300 0.001800 0.001200</array>
                        <array dataType="xsd:string" dictRef="g:converged" size="4">YES YES NO NO</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="preddelta">
                     <list cmlx:templateRef="predicted">
                        <scalar dataType="xsd:double" dictRef="g:predchange">-5.829404e-06</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:double" dictRef="cc:nucrepener">1236.3255352666</scalar>
                     <module cmlx:templateRef="symaddnuc">
                        <scalar dataType="xsd:integer" dictRef="cc:basiscount">194</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:primbasis">444</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:cartesianbasis">194</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:alphae">64</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:betae">64</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">33</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">33</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.806803"
                                 y3="1.810299"
                                 z3="-0.235565">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-2.488827"
                                 y3="-1.491008"
                                 z3="0.748427">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.092583"
                                 y3="-1.394619"
                                 z3="-1.426389">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.7361"
                                 y3="0.256854"
                                 z3="-0.024354">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="-0.902844"
                                 y3="0.073705"
                                 z3="-1.891253">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-0.768499"
                                 y3="0.927132"
                                 z3="0.277497">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="2.091945"
                                 y3="0.481727"
                                 z3="-0.727209">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.361645"
                                 y3="-0.589497"
                                 z3="0.360872">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.383205"
                                 y3="3.019922"
                                 z3="-1.640287">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="1.379248"
                                 y3="2.765414"
                                 z3="1.314818">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="3.39602"
                                 y3="-1.651394"
                                 z3="-0.084092">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.285737"
                                 y3="0.985817"
                                 z3="1.671068">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.352554"
                                 y3="0.170858"
                                 z3="-0.70882">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="3.655902"
                                 y3="-2.723816"
                                 z3="0.995673">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-2.658369"
                                 y3="-0.61298"
                                 z3="-0.359493">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a16"
                                 x3="3.039035"
                                 y3="1.00441"
                                 z3="-0.97969">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a17"
                                 x3="1.739548"
                                 y3="-0.004249"
                                 z3="-1.656519">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a18"
                                 x3="2.723934"
                                 y3="-0.107487"
                                 z3="1.293393">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a19"
                                 x3="1.413717"
                                 y3="-1.104663"
                                 z3="0.621458">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="1.285907"
                                 y3="3.578818"
                                 z3="-1.950557">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-0.00624"
                                 y3="2.469791"
                                 z3="-2.512495">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.377167"
                                 y3="3.753465"
                                 z3="-1.316779">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="2.337226"
                                 y3="3.267837"
                                 z3="1.081534">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.661813"
                                 y3="3.552271"
                                 z3="1.610468">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="1.555441"
                                 y3="2.105843"
                                 z3="2.183068">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="4.347595"
                                 y3="-1.144552"
                                 z3="-0.344799">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="3.035285"
                                 y3="-2.135655"
                                 z3="-1.013682">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-0.904676"
                                 y3="1.895746"
                                 z3="2.157346">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-0.95472"
                                 y3="0.110856"
                                 z3="2.259106">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.385887"
                                 y3="1.029616"
                                 z3="1.691862">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="2.724699"
                                 y3="-3.265051"
                                 z3="1.248536">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.396811"
                                 y3="-3.469529"
                                 z3="0.653895">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="4.042225"
                                 y3="-2.266282"
                                 z3="1.926361">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a6" order="S"/>
                           <bond atomRefs2="a2 a15" order="S"/>
                           <bond atomRefs2="a3 a15" order="S"/>
                           <bond atomRefs2="a4 a15" order="S"/>
                           <bond atomRefs2="a5 a13" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a6 a13" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a16" order="S"/>
                           <bond atomRefs2="a7 a17" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a19" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a22" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a10 a23" order="S"/>
                           <bond atomRefs2="a10 a24" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a26" order="S"/>
                           <bond atomRefs2="a11 a27" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a12 a30" order="S"/>
                           <bond atomRefs2="a12 a28" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a33" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a14 a32" order="S"/>
                        </bondArray>
                        <formula concise="C 9 H 18 F 3 N 1 O 1 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">223.1831095999999</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="561">0.000000 4.767394 0.000000 5.186017 2.259123 0.000000 4.805806 2.282083 2.259907 0.000000 2.946176 3.454212 2.677131 3.397969 0.000000 1.877443 3.004780 3.700692 3.057293 2.334494 0.000000 1.912696 5.201217 5.557775 5.874579 3.238864 3.064304 0.000000 2.921009 4.948737 5.795785 6.168241 4.021044 3.479212 1.550542 0.000000 1.901543 5.856877 5.622724 5.216748 3.224454 3.063346 3.193108 4.576764 0.000000 1.908828 5.779267 6.694577 5.852610 4.767823 3.011334 3.145320 3.623609 3.128821 0.000000 4.325541 5.945606 6.630962 7.383232 4.972125 4.911493 2.581553 1.547756 5.772347 5.052971 0.000000 2.948515 2.904024 4.304115 3.067592 3.697119 1.487622 4.173077 4.183494 4.229423 3.224287 5.652815 0.000000 2.752192 2.485253 2.448127 2.481367 1.268789 1.373278 3.458548 3.939245 3.463763 4.276631 5.124436 2.516444 0.000000 5.494680 6.272052 7.292133 8.035331 6.078045 5.781049 3.961034 2.575537 7.116836 5.951189 1.543865 6.215893 6.030677 0.000000 4.230255 1.423785 1.392037 1.424933 2.428928 2.519784 4.888669 5.071491 4.908114 5.524420 6.148965 2.926337 1.562557 6.794271 0.000000 2.487175 6.306406 6.599365 6.882874 4.151574 4.010462 1.110821 2.190092 3.398840 3.334786 2.825390 5.072526 4.478195 4.264065 5.954915 0.000000 2.486304 5.086588 5.033446 5.719690 2.653943 3.301240 1.106333 2.190750 3.314444 4.077952 2.815939 4.604934 3.238810 4.254713 4.625419 1.778808 0.000000 3.113038 5.420701 6.548725 6.603124 4.829940 3.781477 2.197593 1.110487 4.885302 3.172097 2.175503 4.173178 4.550174 2.793274 5.653029 2.550002 3.111536 0.000000 3.098360 3.923676 4.958275 5.365763 3.615069 3.001427 2.189870 1.109896 4.815563 3.931848 2.173992 3.571952 3.323981 2.790894 4.217333 3.107012 2.550736 1.778349 0.000000 2.509661 6.872865 6.646879 6.321887 4.132791 4.026940 3.426113 4.886181 1.106121 3.366454 5.940655 5.143265 4.485262 7.349853 5.971597 3.262456 3.623619 5.116637 5.344772 0.000000 2.506068 5.699542 5.063477 4.999979 2.632692 3.277940 3.397356 4.818958 1.102297 4.081090 5.869981 4.619685 3.217281 7.258931 4.601378 3.710867 3.146640 5.346120 4.961316 1.793142 0.000000 2.519266 6.019027 5.821363 5.017876 3.761249 3.268488 4.141060 5.401567 1.104947 3.314595 6.705890 4.172841 3.762455 7.972970 5.018578 4.397882 4.326236 5.597926 5.528602 1.788293 1.793082 0.000000 2.490253 6.785894 7.583601 6.868355 5.434887 3.971260 3.330784 3.924153 3.359757 1.106604 5.165129 4.322155 5.139175 6.135649 6.487933 3.140745 4.308213 3.404003 4.492582 3.224214 4.364144 3.654541 0.000000 2.542307 6.008686 6.913010 5.733590 5.177898 3.273218 4.115611 4.648135 3.305817 1.105109 6.117643 3.222314 4.568449 6.980817 5.679232 4.341854 4.948086 4.212684 4.819806 3.615397 4.314728 3.112673 1.779798 0.000000 2.549037 5.599253 6.847302 6.024274 5.174248 3.228197 3.375693 3.351898 4.102161 1.104507 4.758632 3.096594 4.534713 5.398838 5.622527 3.662956 4.385067 2.656262 3.572962 4.396494 4.961816 4.324183 1.781795 1.794045 0.000000 4.613056 6.931943 7.522541 8.210527 5.607386 5.554597 2.806952 2.179462 5.893855 5.182012 1.109212 6.351112 5.861272 2.183891 7.026117 2.594890 3.134136 2.528923 3.089156 5.853428 6.059559 6.874496 5.054225 6.282373 4.975068 0.000000 4.598059 5.834073 6.186294 7.249450 4.600029 5.051394 2.796899 2.175728 5.831478 5.673169 1.108502 5.968476 4.966495 2.183714 5.929941 3.140251 2.575862 3.087556 2.523115 6.049236 5.719043 6.813107 5.837375 6.698659 5.513570 1.775344 0.000000 2.943210 3.995584 5.334472 3.932270 4.439706 2.119101 4.393159 4.480246 4.164664 2.585050 6.008513 1.099838 3.375017 6.594597 3.962780 5.117454 5.014725 4.233931 4.091009 4.950379 4.790003 3.974787 3.681023 2.344576 2.469206 6.564335 6.467682 0.000000 3.494918 2.683580 4.518826 3.601608 4.150849 2.151223 4.282265 3.884851 5.045590 3.658656 5.246431 1.104951 2.995072 5.557829 3.206777 5.219034 4.754414 3.809563 3.125519 5.896476 5.406696 5.137034 4.710638 3.857103 3.207283 6.039115 5.628329 1.788489 0.000000 3.810211 2.693364 4.012459 2.316384 3.993982 2.151017 5.118893 5.189617 4.767851 4.163100 6.616062 1.101218 2.751094 7.146758 2.642049 6.047115 5.412924 5.249957 4.487527 5.766083 5.041175 4.528381 5.262122 3.957131 4.115047 7.363068 6.835789 1.777876 1.792798 0.000000 5.624950 5.529755 6.670420 7.467663 5.845052 5.542540 4.282790 2.842243 7.302656 6.179089 2.197830 5.859352 5.679851 1.106352 6.212621 4.826189 4.476907 3.157883 2.603685 7.690440 7.381856 8.090858 6.546499 7.131786 5.575573 3.109505 2.547475 6.374333 5.094715 6.690201 0.000000 6.446385 7.164879 8.045114 8.971633 6.864301 6.793580 4.778313 3.538693 7.967765 6.958234 2.202685 7.292195 6.940073 1.105372 7.678697 4.952604 4.940367 3.809305 3.806901 8.132656 8.042910 8.879531 7.058106 8.010675 6.441780 2.530875 2.532545 7.691054 6.635868 8.205161 1.786440 0.000000 5.635636 6.681558 7.931344 8.406774 6.671089 6.004974 4.289123 2.843715 7.352099 5.725679 2.199452 6.247280 6.479774 1.106690 7.270247 4.488758 4.822462 2.607477 3.156134 7.536111 7.650091 8.141642 5.852113 6.736656 5.036414 2.551411 3.110441 6.468977 5.543552 7.227625 1.786858 1.786814 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.stoich">
                     <scalar cmlx:templateRef="stoich"
                             dataType="xsd:string"
                             dictRef="g:stoichiometry">C9H18F3NOSi</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:pointgroup">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:largestabelian">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:largestconciseabelian">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                  </module>
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.764473"
                                 y3="1.641916"
                                 z3="-0.111466">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-2.215204"
                                 y3="-1.927005"
                                 z3="0.943226">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.062969"
                                 y3="-1.703234"
                                 z3="-1.138807">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.634652"
                                 y3="-0.207753"
                                 z3="0.456152">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="-1.022438"
                                 y3="-0.067949"
                                 z3="-1.712486">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-0.69294"
                                 y3="0.624139"
                                 z3="0.492578">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="2.057076"
                                 y3="0.438853"
                                 z3="-0.846467">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.504932"
                                 y3="-0.693103"
                                 z3="0.113887">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.12092"
                                 y3="2.926023"
                                 z3="-1.357571">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="1.453892"
                                 y3="2.510168"
                                 z3="1.442389">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="3.539392"
                                 y3="-1.650256"
                                 z3="-0.525878">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.053357"
                                 y3="0.543338"
                                 z3="1.933616">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.341587"
                                 y3="-0.090069"
                                 z3="-0.484691">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="3.976642"
                                 y3="-2.78339"
                                 z3="0.42719">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-2.55536"
                                 y3="-0.979432"
                                 z3="-0.063534">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a16"
                                 x3="2.940008"
                                 y3="1.038231"
                                 z3="-1.154852">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a17"
                                 x3="1.629914"
                                 y3="0.003929"
                                 z3="-1.769694">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a18"
                                 x3="2.942484"
                                 y3="-0.261744"
                                 z3="1.038906">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a19"
                                 x3="1.621665"
                                 y3="-1.285673"
                                 z3="0.431014">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="0.951365"
                                 y3="3.563037"
                                 z3="-1.71545">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-0.333108"
                                 y3="2.420552"
                                 z3="-2.225566">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.637348"
                                 y3="3.583074"
                                 z3="-0.894731">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="2.350882"
                                 y3="3.088609"
                                 z3="1.150178">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.732199"
                                 y3="3.225118"
                                 z3="1.877442">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="1.761898"
                                 y3="1.7987"
                                 z3="2.229079">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="4.426718"
                                 y3="-1.065729"
                                 z3="-0.844206">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="3.103833"
                                 y3="-2.08398"
                                 z3="-1.448346">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-0.670483"
                                 y3="1.435775"
                                 z3="2.449957">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-0.611346"
                                 y3="-0.351249"
                                 z3="2.40823">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.145006"
                                 y3="0.515647"
                                 z3="2.075806">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="3.110528"
                                 y3="-3.400251"
                                 z3="0.732712">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.714217"
                                 y3="-3.452389"
                                 z3="-0.052673">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="4.439171"
                                 y3="-2.374724"
                                 z3="1.345787">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a6" order="S"/>
                           <bond atomRefs2="a2 a15" order="S"/>
                           <bond atomRefs2="a3 a15" order="S"/>
                           <bond atomRefs2="a4 a15" order="S"/>
                           <bond atomRefs2="a5 a13" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a6 a13" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a16" order="S"/>
                           <bond atomRefs2="a7 a17" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a19" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a22" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a10 a23" order="S"/>
                           <bond atomRefs2="a10 a24" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a26" order="S"/>
                           <bond atomRefs2="a11 a27" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a12 a30" order="S"/>
                           <bond atomRefs2="a12 a28" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a33" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a14 a32" order="S"/>
                        </bondArray>
                        <formula concise="C 9 H 18 F 3 N 1 O 1 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">223.1831095999999</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">0.5761184 0.3291498 0.2645034</array>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 8515 NPrTT= 41984 LenC2= 7741 LenP2D= 24520.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 194 RedAO= T EigKep= 2.45D-03 NBF= 194</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 194 1.00D-06 EigRej= -1.00D+00 NBFU= 194</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 188 188 188 188 188 MxSgAt= 33 MxSgA2= 33.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l303.basis">
                  <list cmlx:templateRef="l303">
                     <scalar dataType="xsd:integer" dictRef="g:dipdrv">1</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l401"/>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.21414517142</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.35498830890</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.140843137483</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.41065816104</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.055669852135</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1070.63432026241</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.776337898625</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.68743974859</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-1.053119486183</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.72978265250</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.042342903911</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73612624739</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.006343594888</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73661088580</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000484638404</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73664903112</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000038145328</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73665121769</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000002186564</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693655412</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000285336435</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693605157</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000502557</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693683533</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000783761</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693703919</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000203865</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693707708</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000037889</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693707745</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000370</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693707748</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000029</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1071.73693707750</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000024</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-1071.73693708</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">18</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">1.067049237047e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-4.999081877366e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">1.623970167975e+03</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral symmetry usage will be decided dynamically.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=182740750.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=      135340 IEndB=      135340 NGot=  2818572288 MDV=  2639538879</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=  2639538879 LenY=  2639500802</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=  18915 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l1101">
                  <list cmlx:templateRef="l1101">
                     <scalar dataType="xsd:string" dictRef="g:l1101">Using compressed storage, NAtomX=    33.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l1101">Will process     34 centers per pass.</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l1002.minotr">
                  <list cmlx:templateRef="l1002">
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="4">Minotr: Closed shell wavefunction.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="1">IDoAtm=111111111111111111111111111111111</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="3">Direct CPHF calculation.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Differentiating once with respect to electric field.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">with respect to dipole field.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Differentiating once with respect to nuclear coordinates.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">Requested convergence is 1.0D-08 RMS, and 1.0D-07 maximum.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">Secondary convergence is 1.0D-12 RMS, and 1.0D-12 maximum.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">NewPWx=T KeepS1=F KeepF1=F KeepIn=T MapXYZ=F SortEE=F KeepMc=T.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">MDV= 2818571760 using IRadAn= 2.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">Generate precomputed XC quadrature information.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="9">Keep J ints in memory in canonical form, NReq=182615130.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">FoFCou: FMM=F IPFlag= 0 FMFlag= 0 FMFlg1= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">NFxFlg= 0 DoJE=F BraDBF=F KetDBF=F FulRan=T</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">wScrn= 0.000000 ICntrl= 600 IOpCl= 0 I1Cent= 0 NGrid= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">NMat0= 1 NMatS0= 18915 NMatT0= 0 NMatD0= 1 NMtDS0= 0 NMtDT0= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">Symmetry not used in FoFCou.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">Solving linear equations simultaneously, MaxMat= 0.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="14">There are 102 degrees of freedom in the 1st order CPHF. IDoFFX=6 NUNeed= 3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">99 vectors produced by pass 0 Test12= 8.32D-15 1.00D-09 XBig12= 1.82D+02 6.72D+00.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">AX will form 99 AO Fock derivatives at one time.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">99 vectors produced by pass 1 Test12= 8.32D-15 1.00D-09 XBig12= 1.06D+02 2.69D+00.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">99 vectors produced by pass 2 Test12= 8.32D-15 1.00D-09 XBig12= 2.90D-01 5.62D-02.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">99 vectors produced by pass 3 Test12= 8.32D-15 1.00D-09 XBig12= 8.26D-05 1.15D-03.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">52 vectors produced by pass 4 Test12= 8.32D-15 1.00D-09 XBig12= 7.26D-09 1.10D-05.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">5 vectors produced by pass 5 Test12= 8.32D-15 1.00D-09 XBig12= 1.15D-12 2.03D-07.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">3 vectors produced by pass 6 Test12= 8.32D-15 1.00D-09 XBig12= 3.95D-16 2.55D-09.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">InvSVY: IOpt=1 It= 1 EMax= 1.07D-14</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="9">Solved reduced A of dimension 456 with 102 vectors.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">FullF1: Do perturbations 1 to 3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Isotropic polarizability for W= 0.000000 131.36 Bohr**3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">End of Minotr F.D. properties file 721 does not exist.</array>
                  </list>
               </module>
               <module cmlx:templateRef="l601.polariz">
                  <array dataType="xsd:double" dictRef="g:l601.pol.exact" size="6">133.600 -0.909 132.730 2.404 1.561 127.736</array>
                  <array dataType="xsd:double" dictRef="g:l601.pol.approx" size="6">197.726 6.659 198.258 4.874 14.023 248.968</array>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:jobtime">
                  <scalar dataType="xsd:string">PT1558S</scalar>
               </property>
               <property dictRef="cc:jobdatetime.end">
                  <scalar dataType="xsd:date">2017-08-27T18:30:43.000+02:00</scalar>
               </property>
               <property dictRef="cc:popanal">
                  <module cmlx:templateRef="l601.popanal">
                     <array dataType="xsd:double" dictRef="g:alphaocc" size="64">-65.47477 -24.31217 -24.31199 -24.31147 -18.76178 -14.04205 -10.15836 -10.03160 -9.94247 -9.89887 -9.89168 -9.89166 -9.88579 -9.88217 -9.87962 -5.09381 -3.50669 -3.50335 -3.50258 -1.19803 -1.12193 -1.11845 -0.97311 -0.85213 -0.71882 -0.68493 -0.66253 -0.65164 -0.64261 -0.62385 -0.57113 -0.56316 -0.52541 -0.52490 -0.51872 -0.48920 -0.45559 -0.42624 -0.41983 -0.41190 -0.39813 -0.39496 -0.39358 -0.38200 -0.37692 -0.37159 -0.36810 -0.36736 -0.36472 -0.36224 -0.35711 -0.35294 -0.35112 -0.34824 -0.34391 -0.31864 -0.31539 -0.30913 -0.29379 -0.28270 -0.27933 -0.26113 -0.23301 -0.22924</array>
                     <array dataType="xsd:double" dictRef="g:alphavirt" size="130">-0.07706 0.01666 0.03232 0.04018 0.05084 0.05573 0.06502 0.07902 0.08552 0.08822 0.10485 0.10630 0.11426 0.12055 0.12678 0.12862 0.13956 0.14569 0.15167 0.15853 0.16466 0.17106 0.17710 0.17979 0.18852 0.19104 0.19687 0.20145 0.21035 0.21805 0.22475 0.23004 0.23741 0.24404 0.25305 0.26155 0.27206 0.27919 0.28134 0.28971 0.29638 0.30206 0.31395 0.31976 0.33250 0.33804 0.34430 0.35540 0.38194 0.39787 0.40304 0.40757 0.42680 0.45152 0.45450 0.47381 0.47950 0.49123 0.49546 0.52412 0.53272 0.55424 0.58135 0.62870 0.63816 0.65728 0.69580 0.71054 0.74376 0.75978 0.78767 0.79241 0.82708 0.84030 0.86224 0.87223 0.89875 0.91628 0.92184 0.94798 0.96280 0.98185 0.98424 1.00123 1.01872 1.02601 1.04370 1.05767 1.06838 1.07950 1.08340 1.08741 1.09818 1.11078 1.11737 1.13426 1.14924 1.15119 1.16434 1.17532 1.18984 1.20694 1.22203 1.24668 1.28591 1.42914 1.49341 1.70222 1.76973 1.88102 2.16897 4.98576 5.05315 5.07462 5.66208 22.26223 22.44830 22.51534 22.54410 22.58509 22.60968 22.61335 22.65431 22.67370 31.50181 41.54618 52.89013 52.94104 53.04490 143.01818</array>
                     <module cmlx:templateRef="l601.state">
                        <scalar dataType="xsd:string" dictRef="g:l601.state">1-A.</scalar>
                     </module>
                     <module cmlx:templateRef="mulliken">
                        <module cmlx:templateRef="l601.mullik">
                           <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                           <list cmlx:templateRef="row">
                              <array dataType="xsd:integer" dictRef="cc:serial" size="33">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33</array>
                              <array dataType="xsd:string" dictRef="cc:elementType" size="33">Si F F F O N C C C C C C C C C H H H H H H H H H H H H H H H H H H</array>
                              <array dataType="xsd:double" dictRef="x:charge" size="33">1.401393 -0.166827 -0.124993 -0.170487 -0.256406 -0.528436 -0.812915 -0.304386 -1.012180 -1.065743 -0.345697 -0.629855 0.242500 -0.693961 0.303681 0.221237 0.271872 0.186456 0.199942 0.232150 0.284590 0.236748 0.250284 0.242222 0.247991 0.191163 0.202188 0.248592 0.249974 0.261640 0.212120 0.219257 0.205885</array>
                           </list>
                           <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                        </module>
                     </module>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges with hydrogens summed into heavy atoms:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="15">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="15">Si F F F O N C C C C C C C C C</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="15">1.401393 -0.166827 -0.124993 -0.170487 -0.256406 -0.528436 -0.319806 0.082012 -0.258692 -0.325246 0.047655 0.130351 0.242500 -0.056698 0.303681</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.dipole">
                     <array cmlx:templateRef="dipole"
                            dataType="xsd:double"
                            dictRef="x:d"
                            size="3">1.31674318e+00 1.09591046e+00 1.18025060e+00</array>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.polarizability">
                     <array cmlx:templateRef="polariz"
                            dataType="xsd:double"
                            dictRef="cc:polarizability"
                            size="6">1.33599797e+02 -9.08798896e-01 1.32729711e+02 2.40358673e+00 1.56058697e+00 1.27735953e+02</array>
                  </module>
               </property>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="l716.forcematrix">
                     <module cmlx:templateRef="lowfreq">
                        <array cmlx:templateRef="lowfreq"
                               dataType="xsd:double"
                               dictRef="g:1716.lowfreq"
                               size="9">-2.3108 -0.0002 0.0009 0.0012 3.9005 12.0339 19.5808 35.5883 48.6473</array>
                     </module>
                     <module cmlx:templateRef="l716.freq.chunkx" dictRef="cc:vibrations">
                        <array dataType="xsd:integer" dictRef="x:serial" size="93">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93</array>
                        <array dataType="xsd:string"
                               delimiter="|"
                               dictRef="cc:irrep"
                               size="93">A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A</array>
                        <array dataType="xsd:double" dictRef="cc:frequency" size="93">18.6865 35.5510 48.4846 67.9281 83.9052 94.0295 107.2769 112.2481 129.1238 134.5502 163.1118 175.0450 191.3098 198.8230 223.0459 227.6176 234.0002 237.0841 253.0996 285.4087 320.9311 339.6533 364.3573 381.7424 403.1816 459.5684 480.3072 600.5704 619.2947 648.2913 691.3383 705.9533 711.1880 717.8341 729.7142 752.2290 808.9741 822.5044 867.5035 890.5796 906.4408 917.2885 979.7042 1012.7449 1017.5844 1037.0161 1058.9671 1070.6127 1092.8394 1106.8683 1141.8953 1168.9725 1202.7743 1206.9655 1269.6011 1293.4095 1298.1015 1300.5442 1310.6218 1344.9745 1347.9362 1389.1530 1432.1677 1439.4152 1443.4542 1450.5709 1458.3185 1463.8826 1466.1827 1475.4279 1477.6860 1486.4151 1489.0230 1500.8939 1596.2318 2953.4116 2969.6734 2972.5009 2973.4918 2984.6086 2988.4537 2997.6525 2999.9920 3027.8565 3052.6135 3069.4295 3073.3338 3080.1774 3086.0798 3094.2980 3095.4700 3114.3281 3125.3986</array>
                        <array dataType="xsd:double" dictRef="cc:redmass" size="93">4.3796 6.7279 3.0939 1.9211 4.3663 3.2143 2.4147 1.2012 1.4814 1.8031 3.2516 2.9490 3.0818 2.6054 1.7855 1.4641 1.9139 2.3071 3.5441 4.6577 6.0839 3.6684 5.6403 6.4084 3.2702 14.9979 10.1794 6.6301 6.1663 4.7123 1.5423 5.1587 3.3871 3.6989 2.0470 1.3452 1.2514 1.6428 1.4232 1.7351 1.4303 1.5064 12.2357 4.3100 3.9498 1.2089 5.1403 2.6112 1.9056 1.3231 10.1079 2.0793 1.5023 1.4001 1.1978 1.0796 1.2427 1.2761 1.1948 1.6795 4.5166 1.2123 1.0817 1.0703 1.1268 1.0598 1.0535 1.0511 1.0694 1.0649 1.0430 1.0791 1.0666 1.0535 9.5435 1.0586 1.0611 1.0418 1.0568 1.0352 1.0350 1.0958 1.0390 1.1021 1.0976 1.1007 1.0994 1.0968 1.0976 1.0986 1.0966 1.0986 1.1005</array>
                        <array dataType="xsd:double" dictRef="cc:forceconst" size="93">0.0009 0.0050 0.0043 0.0052 0.0181 0.0167 0.0164 0.0089 0.0146 0.0192 0.0510 0.0532 0.0665 0.0607 0.0523 0.0447 0.0617 0.0764 0.1338 0.2235 0.3692 0.2493 0.4412 0.5502 0.3132 1.8663 1.3836 1.4090 1.3934 1.1669 0.4343 1.5148 1.0094 1.1230 0.6422 0.4485 0.4825 0.6548 0.6310 0.8108 0.6924 0.7468 6.9194 2.6045 2.4097 0.7660 3.3963 1.7634 1.3409 0.9551 7.7654 1.6741 1.2805 1.2017 1.1375 1.0641 1.2338 1.2717 1.2092 1.7900 4.8350 1.3783 1.3072 1.3065 1.3833 1.3139 1.3200 1.3271 1.3544 1.3658 1.3418 1.4048 1.3934 1.3983 14.3268 5.4402 5.5134 5.4235 5.5051 5.4334 5.4463 5.8018 5.5093 5.9530 6.0263 6.1097 6.1181 6.1311 6.1589 6.1976 6.1907 6.2780 6.3338</array>
                        <array dataType="xsd:double" dictRef="cc:irintensity" size="93">0.5940 0.7001 0.0088 0.0842 2.1984 1.3839 0.2150 0.2965 0.4357 0.2727 0.1999 0.2111 2.8438 0.9654 0.5086 3.8565 0.2915 2.8290 18.1245 0.5652 2.1702 3.0818 12.7602 3.9029 2.8686 8.7690 0.7485 16.3285 13.0305 9.8285 10.7530 4.7090 22.5422 2.5569 14.5847 5.6551 0.9548 32.8997 25.5718 18.0176 134.2593 107.8898 225.1704 246.0608 8.0150 13.1359 175.9924 7.8788 21.4300 7.4765 69.8043 44.2655 4.4580 13.7267 2.5072 6.5867 28.3499 21.3021 33.5229 10.8866 29.0946 11.9790 9.9370 13.9885 6.5811 2.4992 3.8715 20.0175 2.4036 3.1129 13.5322 15.4014 14.3721 9.7387 247.2630 10.6869 3.2336 66.6944 33.8062 7.7211 12.8526 10.7728 33.8325 20.9667 11.7057 80.1570 52.3135 11.2000 18.4956 14.8670 19.1125 3.6846 7.6190</array>
                        <array dataType="xsd:integer" dictRef="cc:atomicNumber" size="33">14 9 9 9 8 7 6 6 6 6 6 6 6 6 6 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
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                  <atom elementType="C"
                        id="a9"
                        x3="0.383205"
                        y3="3.019922"
                        z3="-1.640287"/>
                  <atom elementType="C"
                        id="a10"
                        x3="1.379248"
                        y3="2.765414"
                        z3="1.314818"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.39602"
                        y3="-1.651394"
                        z3="-0.084092"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.285737"
                        y3="0.985817"
                        z3="1.671068"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.352554"
                        y3="0.170858"
                        z3="-0.70882"/>
                  <atom elementType="C"
                        id="a14"
                        x3="3.655902"
                        y3="-2.723816"
                        z3="0.995673"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-2.658369"
                        y3="-0.61298"
                        z3="-0.359493"/>
                  <atom elementType="H"
                        id="a16"
                        x3="3.039035"
                        y3="1.00441"
                        z3="-0.97969"/>
                  <atom elementType="H"
                        id="a17"
                        x3="1.739548"
                        y3="-0.004249"
                        z3="-1.656519"/>
                  <atom elementType="H"
                        id="a18"
                        x3="2.723934"
                        y3="-0.107487"
                        z3="1.293393"/>
                  <atom elementType="H"
                        id="a19"
                        x3="1.413717"
                        y3="-1.104663"
                        z3="0.621458"/>
                  <atom elementType="H"
                        id="a20"
                        x3="1.285907"
                        y3="3.578818"
                        z3="-1.950557"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-0.00624"
                        y3="2.469791"
                        z3="-2.512495"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.377167"
                        y3="3.753465"
                        z3="-1.316779"/>
                  <atom elementType="H"
                        id="a23"
                        x3="2.337226"
                        y3="3.267837"
                        z3="1.081534"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.661813"
                        y3="3.552271"
                        z3="1.610468"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.555441"
                        y3="2.105843"
                        z3="2.183068"/>
                  <atom elementType="H"
                        id="a26"
                        x3="4.347595"
                        y3="-1.144552"
                        z3="-0.344799"/>
                  <atom elementType="H"
                        id="a27"
                        x3="3.035285"
                        y3="-2.135655"
                        z3="-1.013682"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-0.904676"
                        y3="1.895746"
                        z3="2.157346"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.95472"
                        y3="0.110856"
                        z3="2.259106"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.385887"
                        y3="1.029616"
                        z3="1.691862"/>
                  <atom elementType="H"
                        id="a31"
                        x3="2.724699"
                        y3="-3.265051"
                        z3="1.248536"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.396811"
                        y3="-3.469529"
                        z3="0.653895"/>
                  <atom elementType="H"
                        id="a33"
                        x3="4.042225"
                        y3="-2.266282"
                        z3="1.926361"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a6" order="S"/>
                  <bond atomRefs2="a2 a15" order="S"/>
                  <bond atomRefs2="a3 a15" order="S"/>
                  <bond atomRefs2="a4 a15" order="S"/>
                  <bond atomRefs2="a5 a13" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a6 a13" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a16" order="S"/>
                  <bond atomRefs2="a7 a17" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a19" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a9 a22" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a10 a23" order="S"/>
                  <bond atomRefs2="a10 a24" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a26" order="S"/>
                  <bond atomRefs2="a11 a27" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a12 a30" order="S"/>
                  <bond atomRefs2="a12 a28" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a33" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a14 a32" order="S"/>
               </bondArray>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">223.1831095999999</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C9H18F3NOSi/c1-5-6-7-15(3,4)13(2)8(14)9(10,11)12/h5-7H2,1-4H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:14,12,9,10,11,8,7,13,15,2,3,4,6,5,1/E:(3,4)(10,11,12)/CRV:8.3,14.1/rA:33SiFFFO1NCCCCCCC3CCHHHHHHHHHHHHHHHHHH/rB:;;;;s1;s1;s7;s1;s1;s8;s6;s5s6;s11;s2s3s4s13;s7;s7;s8;s8;s9;s9;s9;s10;s10;s10;s11;s11;s12;s12;s12;s14;s14;s14;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
         </module>
      </module>
   </module>
</module>
